Lens, preparation method of lens, optical device and terminal equipment

Abstract

The invention relates to the technical field of optical structures, in particular to a lens, a preparation method of the lens, an optical device and terminal equipment. The lens comprises a lens main body and at least two stress relief structures, the at least two stress relief structures are symmetrically arranged along the center of the lens main body, and the stress relief structures and the lens main body are integrally formed; the stress relieving structure comprises an elastic part and a connecting part which are integrally formed, one end of the elastic part is connected to the edge of the lens main body, and the other end of the elastic part is connected with the connecting part. The lens provided by the invention can reduce the influence of stress change on the position precision and surface precision of the lens.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of optical structure, in particular to a lens, a preparation method of the lens, an optical device and a terminal device. BACKGROUND

[0002] In the prior art, the material of the optical lens is mainly glass and resin, and different film layers are made on the surface of the optical lens to achieve different application requirements. The optical lens has good light transmittance, mechanical and chemical properties and constant refractive index. Generally speaking, the optical glass lens is heavy and fragile, the resin lens is light and not easy to break, but the heat resistance and scratch resistance are poor.

[0003] Firstly, according to different application scenarios, lens types and use requirements, the optical lens has different installation methods: such as vacuum adsorption, clamp fixing, glue bonding, pressing plate and screw fixing, and magnetic adsorption. In the process of fixing the optical lens by using the above installation methods, the stress change caused by the curing shrinkage of the glue will cause the optical lens surface to be poor; in the process of screw installation, stress change will also be introduced, which will reduce the position accuracy of the optical lens. The influence of the stress introduced by the above two methods is particularly obvious in the installation of small lenses.

[0004] Secondly, during use, when the environmental temperature changes significantly, the lens itself may introduce thermal stress and cause deformation, thereby causing the lens surface to be poor; the installation support introduces thermal stress and causes deformation, thereby reducing the position accuracy of the lens; the glue changes in properties and introduces stress change, thereby causing the lens surface to change. When the lens and the support belong to different materials, the greater the difference between the thermal expansion coefficients of the two, the greater the stress change introduced by the environmental temperature at the position where the two are fixed and connected, which will cause the lens surface to be worse and the position accuracy to be lower.

[0005] Therefore, during the installation and use of the optical lens, how to reduce the influence of stress change on the lens surface accuracy and position accuracy has become a problem to be solved. SUMMARY

[0006] The embodiments of the present application provide a lens, a preparation method of the lens, an optical device and a terminal device to reduce the influence of stress change on the lens surface accuracy and position accuracy.

[0007] In a first aspect, the embodiments of the present application provide a lens, which comprises: a lens body and at least two stress relief structures, the at least two stress relief structures are arranged symmetrically along the center of the lens body, and the stress relief structures are integrally formed with the lens body; the stress relief structure comprises an integrally formed elastic part and a connecting part, one end of the elastic part is connected to the edge of the lens body, and the other end of the elastic part is connected to the connecting part.

[0008] The lens in the present application, the stress relief structure is integrally formed with the lens body, and the stress relief structure and the lens body are made of the same material. When the external environment temperature changes, there is no problem of different thermal expansion coefficients between the stress relief structure and the lens body, reducing the influence of the stress relief structure on the surface shape of the lens body. In addition, at least two stress relief structures are symmetrically arranged along the center of the lens body, which can also improve the stability of the lens mounted on the mounting frame and improve the position accuracy of the lens. The connecting part is used to connect with the mounting frame, and the elastic part can absorb the stress generated when the connecting part is connected with the mounting frame, thereby reducing the influence of stress change on the position accuracy of the lens during the mounting process. In addition, the material of the elastic part is the same as that of the lens body, which can also reduce the influence of the elastic part on the surface shape of the lens body.

[0009] In one embodiment, the elastic part includes a first elastic member, the first elastic member includes at least one first through hole, the at least one first through hole penetrates the first elastic member along the thickness direction of the first elastic member, and the side surface of the first elastic member has at least one first opening, and the at least one first opening is used to communicate the at least one first through hole with the side surface of the first elastic member.

[0010] In one embodiment, the first through hole and the first opening are both two, two first openings are respectively communicated with two first through holes, and two first openings are arranged on both sides of the first elastic member along the center line of the first elastic member.

[0011] In one embodiment, the center line of the first elastic member coincides with the center line of the connecting part

[0012] In one embodiment, the elastic part further includes a second elastic member and an elastic connecting plate, one end of the first elastic member and one end of the second elastic member are connected to the edge of the lens body, the other end of the first elastic member and the other end of the second elastic member are connected through the elastic connecting plate, and there is a gap between the elastic connecting plate and the edge of the lens body, and the connecting part is arranged at the center line of the elastic connecting plate.

[0013] In one embodiment, the first elastic member and the second elastic member have the same structure.

[0014] In one embodiment, the first elastic member and the second elastic member are symmetrically arranged along the center line of the elastic connecting plate.

[0015] In one embodiment, the shape of the lens body is one of circular, rectangular, oval or diamond.

[0016] In a second aspect, the embodiments of the present application provide an optical device, which comprises a mounting support and a lens as in any of the embodiments of the first aspect, the mounting support comprising a mounting frame and a base, the mounting frame being detachably mounted on the base, the mounting frame comprising a mounting hole, and the lens being connected to the mounting frame through the mounting hole. Since the lens has the stress relief structure, the stress relief structure can absorb the stress during the mounting of the lens on the mounting frame, and the stress relief structure can also relieve the stress caused by external vibration and thermal effect, thereby reducing the influence of external vibration and thermal effect on the surface shape of the lens. The performance of the optical device can be ensured.

[0017] In a third aspect, the embodiments of the present application provide a method for manufacturing the lens as in the first aspect, comprising the following steps:

[0018] coating photoresist on the surface of the wafer substrate;

[0019] forming a lens pattern with at least two stress relief structures on the photoresist through a MEMS process;

[0020] forming a lens with at least two stress relief structures on the wafer substrate through a MEMS process;

[0021] removing the photoresist from the wafer substrate after etching, and cleaning and drying the wafer substrate;

[0022] covering the surface of the wafer substrate with a glass cover plate corresponding to the lens with at least two stress relief structures;

[0023] coating a film on the surface of the wafer substrate;

[0024] removing the glass cover plate;

[0025] falling off the lens through laser stealth dicing.

[0026] In the lens manufacturing method in the present application, the stress relief structure of the lens is an integral structure with the lens body, and the materials of the two are generally the same, and there is no problem of different expansion coefficients between the stress relief structure and the lens body. Therefore, when the temperature of the external environment changes, the lens body will not change significantly in surface shape due to the different expansion coefficients of the stress relief structure. In addition, when the lens is mounted on the mounting frame, the material of the mounting frame is generally different from that of the lens. When the temperature changes, the stress between the stress relief structure and the mounting frame can also be absorbed by the stress relief structure, thereby reducing the influence on the surface shape of the lens body.

[0027] In a fourth aspect, the present application also provides a terminal device, comprising a transceiver assembly, the transceiver assembly comprising a transmitting end, a receiving end and the optical device in the second aspect, the transmitting end being configured to transmit a light beam to the optical device, and the optical device being configured to reflect the light beam to the receiving end. Since the lens in the optical device will not produce a significant change in surface shape due to the difference in expansion coefficient with the stress relief structure, the performance of the optical device can be guaranteed, thereby improving the stability of the light beam transmission of the terminal device. BRIEF DESCRIPTION OF DRAWINGS DETAILED DESCRIPTION OF THE INVENTION BRIEF DESCRIPTION OF DRAWINGS

[0028] Figure 1 A schematic diagram of the spot energy distribution under an ideal state of RMS = 0 provided in an embodiment of the present application;

[0029] Figure 2a A schematic diagram of the spot energy distribution of RMS = 1 / 50λ wavefront provided in an embodiment of the present application;

[0030] Figure 2b A schematic diagram of the spot energy distribution of RMS = 1 / 30λ wavefront provided in an embodiment of the present application;

[0031] Figure 2c A schematic diagram of the spot energy distribution of RMS = 1 / 10λ wavefront provided in an embodiment of the present application;

[0032] Figure 3 A schematic diagram of the structure of an optical device provided in an embodiment of the present application;

[0033] Figure 4 A schematic diagram of the structure of a mounting bracket in an optical device provided in an embodiment of the present application;

[0034] Figure 5 A schematic diagram of a structure of a lens provided in an embodiment of the present application;

[0035] Figure 6 A schematic diagram of another structure of a lens provided in an embodiment of the present application;

[0036] Figure 7 A schematic diagram of another structure of a lens provided in an embodiment of the present application;

[0037] Figure 8 A schematic diagram of another structure of a lens provided in an embodiment of the present application;

[0038] Figure 9 A schematic diagram of another structure of a lens provided in an embodiment of the present application;

[0039] Figure 10 A schematic diagram of another structure of a lens provided in an embodiment of the present application;

[0040] Figure 11 A flow chart of a lens manufacturing method provided in an embodiment of the present application;

[0041] Figure 12a to Figure 12h A flow chart of a lens manufacturing method provided in an embodiment of the present application;

[0042] Figure 13 A schematic structural diagram of a terminal device provided in an embodiment of the present application;

[0043] Figure 14 Another schematic structural diagram of an optical device provided in an embodiment of the present application;

[0044] Figure 15 Another schematic structural diagram of a terminal device provided in an embodiment of the present application;

[0045] Figure 16 Another schematic structural diagram of an optical device provided in an embodiment of the present application.

[0046] Reference signs:

[0047] 1-wafer substrate; 2-glass cover plate; 3-photoresist; 4-coating film; 10-lens; 11-lens body; 12-stress relief structure; 120-elastic part; 1201-first elastic member; 1202-first through hole; 1203-second elastic member; 1204-elastic connecting plate; 121-connection part; 1210-aperture; 20-mounting support; 21-mounting bracket; 211-mounting groove; 210-mounting hole; 22-base; 220-fixing hole; 30-emitting end; 40-receiving end; 50-collimating lens; 60-primary mirror; 70-secondary mirror. DETAILED DESCRIPTION

[0048] In order to make the purpose, technical solutions and advantages of the present application clearer, the present application will be described in further detail below with reference to the drawings.

[0049] Figure 1 A schematic diagram of light spot energy distribution when the RMS of a lens in an ideal state is 0. Refer to Figure 1 When the RMS of a lens surface shape value is 0, the optical transmission efficiency is 100%, and the light energy density of the lens light spot is the highest. Figure 2a A schematic diagram of RMS=1 / 50λ wavefront light spot energy distribution provided in an embodiment of the present application, Figure 2b A schematic diagram of RMS=1 / 30λ wavefront light spot energy distribution provided in an embodiment of the present application, Figure 2c A schematic diagram of RMS=1 / 10λ wavefront light spot energy distribution provided in an embodiment of the present application. Refer to Figure 2a , Figure 2b and Figure 2cWhen the RMS value gradually increases, the corresponding spot diffusion degree also obviously increases, the spot energy density decreases, and the link transmission efficiency is reduced. Generally, the surface precision value required by the lens processing index is: RMS≤1 / 50λ, wherein λ is 632.8 nm. In the process of lens installation and use, the lens will be affected by stress and change in surface shape, thereby reducing the optical transmission efficiency.

[0050] Therefore, how to reduce the influence of stress change on the lens surface precision and position precision has become a problem to be solved.

[0051] The terms used in the following embodiments are only for the purpose of describing specific embodiments and are not intended to be limiting to the present application. As used in the specification and the appended claims of the application, the singular forms “a,” “an” and “the” are intended to include both the singular and plural forms, unless the context clearly indicates otherwise.

[0052] In this specification, the phrase “one embodiment” or “some embodiments” means that a particular feature, structure, or characteristic described in connection with the embodiment is included in at least one embodiment of the application. Thus, the appearances of the phrase “in one embodiment,” “in some embodiments,” “in other embodiments,” “in additional embodiments,” and so on, in various places in the specification are not necessarily all referring to the same embodiment, unless otherwise specifically noted. The terms “including,” “containing,” “comprising,” and similar terms are meant to be open-ended, unless otherwise noted, so as to encompass the same, but not exclude, “consisting of.”

[0053] Figure 3 A structural schematic diagram of an optical device provided by an embodiment of the application is shown in FIG. 1, Figure 4 A structural schematic diagram of a mounting bracket in an optical device provided by an embodiment of the application is shown in FIG. 2. Referring to Figure 3 and Figure 4The optical device comprises a mounting bracket 20 and a lens 10. The mounting bracket 20 comprises a base 22 and a mounting frame 21, wherein the mounting frame 21 is detachably fixed on the base 22. The base 22 is provided with a fixing hole 220 penetrating through the base 22 along the thickness direction of the base 22. The mounting frame 21 is provided with a mounting hole 210. The lens 10 is connected to the mounting frame 21 through the mounting hole 210. Specifically, at least two mounting grooves 211 can be arranged on the mounting frame 21, which are used to correspond to the stress relief structures 12 on the lens 10, so that the lens 10 is mounted on the mounting frame 21. During the mounting of the lens 10 on the mounting frame 21, the stress relief structures 12 on the lens 10 can absorb the stress generated during the mounting between the lens 10 and the mounting frame 21, thereby reducing the influence of stress change on the position accuracy and surface accuracy of the lens 10. In addition, the stress relief structures 12 can also relieve the stress caused by external vibration and thermal effect during the use of the optical device, thereby reducing the influence of external vibration and thermal effect on the surface of the lens 10.

[0054] Specifically, the number of mounting grooves can be greater than the number of stress relief structures 12.

[0055] The structure of the lens 10 will be described in detail below.

[0056] Figure 5 A structure diagram of the lens provided by the embodiment of the application, Figure 6 Another structure diagram of the lens provided by the embodiment of the application, Figure 7 Another structure diagram of the lens 10 provided by the embodiment of the application, Figure 8 Another structure diagram of the lens 10 provided by the embodiment of the application. Referring to Figure 5 、 Figure 6 、 Figure 7 and Figure 8 The lens 10 comprises a lens body 11 and at least two stress relief structures 12. The at least two stress relief structures 12 are symmetrically arranged along the center of the lens body 11 and are integrally formed with the lens body 11. It can be understood that the stress relief structures 12 are made of the same material as the lens body 11. When the external environment temperature changes, there is no problem of different thermal expansion coefficients between the stress relief structures 12 and the lens body 11, thereby reducing the influence of the stress relief structures 12 on the surface of the lens body 11. In addition, the at least two stress relief structures 12 are symmetrically arranged along the center of the lens body 11, which can also improve the stability of the lens 10 mounted on the mounting frame 21 and improve the position accuracy of the lens 10.

[0057] The stress relief structure 12 comprises an elastic part 120 and a connecting part 121, the elastic part 120 and the connecting part 121 are integrally formed, one end of the elastic part 120 is connected with the edge of the lens main body 11, and the other end of the elastic part 120 is connected with the connecting part 121. The connecting part 121 is used for connecting with the mounting frame 21, and the elastic part 120 can absorb the stress generated when the connecting part 121 is connected with the mounting frame 21, so as to reduce the influence of stress change on the position accuracy of the lens 10 in the mounting process. In addition, the material of the elastic part 120 is the same as that of the lens main body 11, which can also reduce the influence of the elastic part 120 on the surface shape of the lens main body 11.

[0058] It is worth mentioning that, in the embodiment of the present application, the stress relief structure 12 for eliminating the stress generated in the mounting process of the lens 10 is integrally formed with the lens main body 11, and the lens 10 can be mounted on any mounting frame 21 as long as the mounting frame 21 has a mounting groove or a supporting part matched with the connecting part 121, so that the lens 10 can be mounted more flexibly on the basis of ensuring the position accuracy and the surface shape. In addition, the setting of the stress relief structure 12 can also enable the optical device with the lens 10 to absorb the influence of vibration and thermal effect on the surface shape of the lens 10 during work.

[0059] In one embodiment, the elastic part 120 comprises a first elastic member 1201, the first elastic member 1201 comprises at least one first through hole 1202, the at least one first through hole 1202 penetrates the first elastic member 1201 along the thickness direction of the first elastic member 1201, and the side surface of the first elastic member 1201 has at least one first opening for connecting the at least one first through hole 1202 with the side surface of the first elastic member 1201. In this way, the first through hole 1202 can form a first notch on the first elastic member 1201, and the first notch can enable the first elastic member 1201 to absorb stress. The number of first through holes 1202 on the first elastic member 1201 can be one, two, three, four or five, and the number of first openings can be one, two, three, four or five. When the number of first through holes 1202 is greater than one, the number of first openings can be less than the number of first through holes 1202.

[0060] In one embodiment, when the first through hole 1202 and the first opening are both two, the two first openings are respectively communicated with the two first through holes 1202, and the two openings are arranged on the two sides of the first elastic member 1201 along the center line of the first elastic member 1201, which can make the stability of the first elastic member 1201 higher when absorbing stress.

[0061] In some embodiments, when the first through holes 1202 and the first openings are both three, the three first openings are respectively communicated with the three first through holes 1202, and the structure formed by the first through hole 1202 and the first opening matched therewith can be understood as a notch penetrating through the first elastic piece 1201 along the thickness direction of the first elastic piece 1201, and the notch is communicated with one side surface of the first elastic piece 1201, and the position of the communication is the position of the first opening. When the first through holes 1202 and the first openings are both three, it can be considered that three notches are arranged on the first elastic piece 1201, and two of the three notches are located on one side of the first elastic piece 1201, and the other notch is located on the other side of the first elastic piece 1201, so as to form an S-shaped stress absorption part on the first elastic piece 1201.

[0062] In the above embodiment, when the elastic part 120 only includes the first elastic piece 1201, the center line of the first elastic piece 1201 can coincide with the center line of the connecting part 121, so that when the connecting part 121 is installed on the mounting frame 21, the stress is more easily absorbed by the first elastic piece 1201.

[0063] Figure 9 FIG. 6 is a schematic view of another structure of a lens 10 provided in an embodiment of the present application, Figure 10 FIG. 6 is a schematic view of another structure of a lens 10 provided in an embodiment of the present application. Referring to Figure 9 and Figure 10 The elastic part 120 can further include a second elastic piece 1203 and an elastic connecting plate 1204, one end of the first elastic piece 1201 and one end of the second elastic piece 1203 are connected to the edge of the lens main body 11, and the one end of the first elastic piece 1201 and the one end of the second elastic piece 1203 are arranged at intervals, the other end of the first elastic piece 1201 and the other end of the second elastic piece 1203 are connected through the elastic connecting plate 1204, and there is a gap between the elastic connecting plate and the edge of the lens main body 11, and the connecting part 121 is arranged on the elastic connecting plate 1204. When the connecting part 121 is installed on the mounting frame 21, the elastic connecting plate 1204 can absorb the stress generated between the connecting part 121 and the mounting frame 21, and the excess stress can be absorbed by the first elastic piece 1201 and the second elastic piece 1203. Among them, the structure of the first elastic piece 1201 and the second elastic piece 1203 can be the same. In some embodiments, the structure of the first elastic piece 1201 and the second elastic piece 1203 can be different, specifically, the first elastic piece 1201 can include two first through holes 1202 and two first openings, the second elastic piece 1203 can include two three second through holes and three second openings, or the first elastic piece 1201 includes two first through holes 1202 and two second openings, and the second elastic piece 1203 also includes two second through holes and two second openings, and the size of the second through hole is larger than the size of the first through hole 1202.

[0064] In one embodiment, the first elastic element 1201 and the second elastic element 1203 are symmetrically arranged around the centerline of the elastic connecting plate 1204, so that the stress absorbed by the first elastic element 1201 and the second elastic element 1203 is relatively even. In addition, the connecting portion 121 is located at the centerline of the elastic connecting plate 1204, so that the stress generated by the connecting portion 121 and the mounting bracket 21 can be absorbed relatively evenly by the first elastic element 1201 and the second elastic element 1203 respectively, thereby reducing the impact of stress changes during installation on the positional accuracy of the lens 10.

[0065] In the above embodiments, the shape of the first through hole 1202 can be a strip or a rectangle, etc.

[0066] When the lens 10 is connected to the mounting frame 21 by adhesive bonding, the connecting part 121 can directly mate with the mounting groove on the mounting frame 21 to fix the lens 10 to the mounting frame 21. When the lens 10 is detachably connected to the mounting frame 21, the connecting part 121 on the lens 10 can be provided with an opening 1210, and the mounting frame 21 can be provided with a protrusion that mates with the opening 1210. The lens 10 is mounted on the mounting frame 21 by the cooperation of the protrusion and the opening 1210. When the connection method between the lens 10 and the mounting frame 21 is different, the connecting part 121 and the mounting frame 21 can be adjusted accordingly.

[0067] In one embodiment, the shape of the lens body 11 may be, but is not limited to, one of the following: circular, rectangular, elliptical, or rhomboid.

[0068] Figure 11 This is a flowchart illustrating a method for manufacturing a lens according to an embodiment of the present invention; Figure 12a to Figure 12h This is a flowchart illustrating the manufacturing process of a lens according to an embodiment of the present invention. (Refer to...) Figure 11 , Figure 12a to Figure 12h This application also provides a method for preparing a lens 10, which includes the following steps:

[0069] S10: Coat the surface of wafer substrate 1 with photoresist;

[0070] S20: A lens 10 pattern with at least two stress relief structures 12 is formed on the photoresist 3 using MEMS technology;

[0071] S30: A lens 10 having at least two stress relief structures 12 is formed on a wafer substrate 1 using MEMS technology;

[0072] S40: Remove the photoresist 3 from the etched wafer substrate 1, and clean and dry it;

[0073] S50: A glass cover plate 2 is added to the surface of the wafer substrate 1, and the glass cover plate 2 corresponds to the lens 10 having at least two stress relief structures 12.

[0074] S60: Deposit film 4 on the surface of wafer substrate 1;

[0075] S70: Remove glass cover plate 2;

[0076] S80: Lens 10 is dislodged by laser invisible scratching.

[0077] In the lens 10 prepared by the above method, the wafer substrate is usually a silicon wafer, a quartz wafer, or a silicon carbide wafer.

[0078] In the lens 10 prepared by the above method, the stress-relief structure 12 and the lens body 11 are an integral structure made of the same material. There is no difference in the coefficient of thermal expansion between the stress-relief structure 12 and the lens body 11. Therefore, when the temperature of the external environment changes, there will be no significant change in the surface shape due to the difference in the coefficients of thermal expansion between the lens body 11 and the stress-relief structure 12. Furthermore, when the lens 10 is mounted on the mounting frame 21, the material of the mounting frame 21 is generally different from that of the lens 10. When the temperature changes, the stress generated between the stress-relief structure 12 and the mounting frame 21 can also be absorbed by the stress-relief structure 12, thereby reducing the impact on the surface shape of the lens body 11.

[0079] It is worth mentioning that when the lens 10 is prepared by the above method, both the lens body 11 and the stress relief structure 12 are formed on the wafer substrate 1. In this way, only one wafer substrate 1 needs to be processed to form the required lens 10, which also simplifies the processing.

[0080] In the above embodiments, the wafer substrate 1 is typically made of silicon wafer, quartz wafer, or silicon carbide wafer, and the thickness of the silicon wafer is typically in the range of 250 μm to 1 mm, but is not limited to this range.

[0081] Step S20 may specifically include: exposing the surface of the photoresist 3 to form the desired pattern through MEMS process, the pattern being a lens structure 10 with stress relief structure 12; depending on the stress relief structure 12 and the lens structure 10, different photomask patterns can be made to form different patterns; and then the desired pattern is formed on the surface of the photoresist 3 through development and drying steps.

[0082] In step S30, etching is performed using MEMS technology to form a lens structure 10 with a stress-relief structure 12. Because MEMS etching technology offers high processing precision, it can achieve a structural dimensional tolerance of ±2μm. The fit tolerance between the stress-relief structure 12 and the mounting bracket 21 is small, resulting in high assembly precision and further reducing stress introduced by assembly tolerances during installation.

[0083] In step S60, the coating is either a reflective film or a transmissive film. The reflective film can be an optical film layer such as a metal film or a dielectric film; the transmissive film can also be an optical film layer such as a metal film or a dielectric film. The coating method can be achieved using conventional MEMS processes such as sputtering or evaporation, or through optical coating.

[0084] In the above embodiments, the fabrication method may further include: covering another surface of the wafer substrate 1 with a glass cover plate 2, the glass cover plate 2 corresponding to at least two stress relief structures 12; and depositing a film on another surface of the wafer substrate 1. The lens 10 thus formed can be a reflective mirror or a transmissive mirror.

[0085] When the ambient temperature changes, the silicon-based lens and the mounting structure will undergo corresponding deformation. ANSYS simulation analysis shows that after stress relief by springs, the stress change difference of the lens is 0, proving that the elastic structure can eliminate the stress change introduced by temperature changes.

[0086] In the experiment, the above-mentioned structural components were subjected to a 500g mechanical impact test, an acceptance-level random vibration test, and a sine wave test. The components were not damaged, proving that the stress-relieving spring structure does not affect the stability of the components during structural installation, nor does it damage the mirror structure.

[0087] Figure 13 This is a schematic diagram of a terminal device provided in an embodiment of the present invention. The terminal device can be a lidar system or a satellite lidar terminal. (Refer to...) Figure 13 The terminal device includes a transceiver assembly, which includes a transmitter 30, a receiver 40, and an optical component as described in the second aspect. The transmitter 30 emits a light beam to the optical component, and the optical component reflects the light beam to the receiver 40. Since the lens in the optical component does not exhibit significant changes in surface shape due to its different coefficient of thermal expansion compared to the stress-relief structure, the performance of the optical component is guaranteed, thereby improving the stability of the light beam transmission in the terminal device. Furthermore, since the lens 10 in the optical component does not exhibit significant changes in surface shape due to its different coefficient of thermal expansion compared to the stress-relief structure, the performance of the optical component is guaranteed, thereby improving the stability of the light beam transmission in the terminal device.

[0088] Figure 14 for Figure 13A schematic diagram of an optical device is shown. In this method, the light beam emitted by the transmitting end 30 can be directly directed to the lens 10 in the optical device. The lens 10 in the optical device reflects the light beam to the receiving end 40, and the receiving end 40 can further reflect the light beam.

[0089] Figure 15 This is another structural schematic diagram of a terminal device provided in an embodiment of the present invention. (Refer to...) Figure 15 The receiving assembly may further include a collimating lens 50, a primary mirror 60, and a secondary mirror 70. The collimating lens 50 can be disposed between the receiving end 40 and the optical device, while the primary mirror 60 and the secondary mirror 70 are disposed sequentially on the side of the optical device away from the collimating lens 50. In this configuration, the receiving end 40 can function as both a receiver and a transmitter, meaning it can both receive and emit a light beam. Both the primary mirror 60 and the secondary mirror 70 can be reflectors.

[0090] Figure 16 for Figure 15 A schematic diagram of the structure of an optical device in the image, with reference to... Figure 15 and Figure 16 The light beam passing through the collimating lens 50 can pass through the gap between the mounting bracket 20 and the lens 10 and be directed towards the main mirror 60. The light beam directed from the main mirror 60 towards the collimating lens passes through the lens 10.

[0091] In the optical device of the above embodiment, the function of lens 10 is to perform spatial beam splitting, i.e., spatial multiplexing beam splitter. Its function is to combine two beams or split one beam into two beams. Its main advantage is that its beam combining or splitting efficiency for beams with different energy distributions is higher than that of ordinary broadband beam splitters, and it does not require the addition of extra components. When the optical device is applied in a terminal, the lens, as a spatial multiplexing beam splitter, is used to combine the beacon beam transmitted and received. The beacon beam transmitted has a long strip of energy distribution, and the received beacon beam can be regarded as a uniform circular beam. Therefore, the spatial multiplexing beam splitter reflects the transmitted beam in the area where the energy distribution is relatively concentrated, and the remaining area is used to transmit the received beacon beam. Its transmission and reception efficiency is higher than that of traditional broadband beam splitters.

[0092] Obviously, those skilled in the art can make various modifications and variations to this invention without departing from its spirit and scope. Therefore, if these modifications and variations fall within the scope of the claims of this invention and their equivalents, this invention also intends to include these modifications and variations.

Claims

1. A lens, characterized in that, include: The lens body and at least two stress-relieving structures are arranged symmetrically along the center of the lens body, and the stress-relieving structures are integrally formed with the lens body; The stress relief structure includes an integrally formed elastic part and a connecting part. One end of the elastic part is connected to the edge of the lens body, and the other end of the elastic part is connected to the connecting part.

2. The lens as described in claim 1, characterized in that, The elastic part includes a first elastic element, the first elastic element includes at least one first through hole, the at least one first through hole penetrates the first elastic element along the thickness direction of the first elastic element, and the side of the first elastic element has at least one first opening, the at least one first opening being used to communicate at least one first through hole with the side of the first elastic element.

3. The lens as described in claim 2, characterized in that, There are two first through holes and two first openings. The two first openings are respectively connected to the two first through holes, and the two first openings are arranged on both sides of the first elastic member along the center line of the first elastic member.

4. The lens as described in claim 3, characterized in that, The centerline of the first elastic element coincides with the centerline of the connecting portion.

5. The lens as described in claim 2, characterized in that, The elastic part further includes a second elastic element and an elastic connecting plate. One end of the first elastic element and one end of the second elastic element are connected to the edge of the lens body at a distance. The other end of the first elastic element and the other end of the second elastic element are connected through the elastic connecting plate. There is a gap between the elastic connecting plate and the edge of the lens body. The connecting part is located at the center line of the elastic connecting plate.

6. The lens as described in claim 5, characterized in that, The first elastic element and the second elastic element have the same structure.

7. The lens as described in claim 5, characterized in that, The first elastic element and the second elastic element are arranged symmetrically about the center line of the elastic connecting plate.

8. The lens as described in any one of claims 1 to 7, characterized in that, The shape of the lens body is one of the following: circular, rectangular, elliptical, rhomboid, or polygonal.

9. An optical device, characterized in that, The invention includes a mounting bracket and a lens as described in any one of claims 1 to 5, wherein the mounting bracket includes a mounting frame and a base, the mounting frame is detachably mounted on the base, the mounting frame includes mounting holes, and the lens is connected to the mounting bracket through the mounting holes.

10. A method for preparing a lens as described in any one of claims 1 to 8, characterized in that, The steps include the following: Photoresist is coated onto the surface of a wafer substrate; A lens pattern with at least two stress relief structures is formed on the photoresist using MEMS technology. A lens with at least two stress relief structures is formed on the wafer substrate using MEMS technology; Remove the photoresist from the etched wafer substrate, and clean and dry it; A glass cover is applied to the surface of the wafer substrate, and the glass cover corresponds to a lens having the at least two stress relief structures. A film is deposited on the surface of the wafer substrate; Remove the glass cover plate; The lens is removed by laser invisible scratching.

11. The method for preparing a lens as described in claim 10, characterized in that, The coating is a reflective film or a transmissive film.

12. A terminal device, characterized in that, The transceiver assembly includes a transmitter, a receiver, and an optical device as described in claim 9, wherein the transmitter is used to emit a light beam toward the optical device, and the optical device is used to reflect the light beam toward the receiver.

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