Method for controlling the operation of a device and method for controlling the operation of a micro- and nanofabrication laboratory device

Abstract

The application provides a control method of device operation and a control method of micro-nano processing laboratory device operation, generates a device operation instruction template through user authority, sample processing reservation information uploaded by the user and a standard operation procedure file corresponding to different sample processing steps of the device, generates corresponding device operation to-be-confirmed information for non-standard decision-making links or manual review links in the device operation instruction template that need to be processed by the user, adjusts the device operation instruction template in combination with specific instructions returned by the user, disassembles the device operation instruction template into a plurality of device operation instructions according to the device operation instruction template adjusted by the user, and inputs the device operation instructions into a flow automatic processing module, so as to shorten the learning time of the user for the complex operation device, meanwhile, the non-standard decision-making links, the manual review links and the parameter adjustment links are reserved for specific users or sample processing, so as to form interaction with the user, guarantee efficient key-in of complex operation page data of the large device, and meanwhile, the freedom of user operation is reserved.

Description

TECHNICAL FIELD

[0001] The present application relates to the field of device control, in particular to a device operation control method and a micro-nano processing laboratory device operation control method. BACKGROUND

[0002] The existing laboratory or large industrial system relies on multiple experimental devices or industrial devices to process samples in sequence, however, the existing experimental devices or industrial devices mostly rely on manual experience operation management, which has defects of response lag, too high subjective decision-making and insufficient fault prediction ability, resulting in long device downtime and serious reduction of production efficiency once the device fails.

[0003] At the same time, for some experimental devices or production devices, there is a long device learning period and a dependence on professional experience, and for new operators or inexperienced personnel, it is difficult to operate the device, and the sample is easily damaged.

[0004] In view of the above situation, the prior art sets a fixed sample processing flow file, and directly executes the set sample processing flow steps combined with RPA technology. However, for laboratories or industrial systems with rapid technology update iteration, sample processing mostly has great innovation and pioneering nature, and the fixed sample processing flow file limits the execution of innovative or pioneering experiments. SUMMARY

[0005] Therefore, in order to solve the problems of long training time and complicated operation of experimental devices, and to balance the innovation and pioneering nature of sample processing experiments, the present application provides a device operation control method and a micro-nano processing laboratory device operation control method, generates a specific device operation guide template through sample processing reservation information uploaded by a user and a standard operation procedure file corresponding to different sample processing steps of a device, generates corresponding device operation to-be-confirmed information for non-standard decision-making links or manual review links in the device operation guide template that need to be processed by the user, adjusts the device operation guide template combined with specific instructions returned by the user, and then disassembles the device operation guide template after user adjustment into a plurality of device operation instructions and inputs them into a flow-based automatic robot, so as to shorten the training and learning time of the user for complex operation devices, reduce the process of entering data one by one on a large device complex operation page, only keep the non-standard decision-making links or manual review links interact with the user, and improve the efficiency of the user using large devices or complex operation pages.

[0006] In a first aspect, the present invention provides a method for controlling equipment operation, which is applied to an equipment operation control system. The equipment operation control system includes an interactive terminal and a device control terminal configured with a process automation processing module. The interactive terminal and the device control terminal are communicatively connected. When the equipment control terminal executes the method for controlling equipment operation, it includes the following steps:

[0007] Obtain user permissions, information on samples to be processed, and sample processing appointment orders;

[0008] The standard operating procedure document of the equipment is retrieved based on the information of the sample to be processed and the sample processing appointment work order.

[0009] A device operation guide template is generated by combining the standard operating procedure document, the information of the sample to be processed, and the user permissions.

[0010] Based on the device operation guide template, generate device operation confirmation information and send the device operation confirmation information to the interactive terminal;

[0011] Upon receiving a device operation confirmation instruction or a device operation parameter input instruction from the interactive terminal, the device operation guidance template is adjusted according to the device operation confirmation instruction or the device operation parameter input instruction.

[0012] The revised equipment operation guide template is broken down into several equipment operation instructions, and the equipment operation instructions are sent to the process automation processing module.

[0013] The process automation module executes equipment operation instructions, and the corresponding equipment operating parameters and sample processing parameters are recorded to form a sample processing record.

[0014] After the process automation module completes all equipment operation instructions, it generates a sample processing completion prompt message and sends the sample processing completion prompt message and sample processing record to the interactive terminal.

[0015] Furthermore, before retrieving the standard operating procedure (SOP) file for the equipment based on the information to be processed and the sample processing appointment order, the process also includes:

[0016] If the information of the sample to be processed includes a previous processing record, the previous processing record is retrieved. The previous processing record includes the operating parameters of the previous equipment and the processing steps of the previous equipment.

[0017] The preceding equipment processing steps and the preceding equipment operating parameters are input into the trained sample prediction model to obtain the predicted sample parameters of the sample to be processed after the preceding equipment processing.

[0018] Calculate the degree of deviation in the previous processing of the sample based on the predicted sample parameters and the planned sample requirements;

[0019] If the deviation in the previous processing of the sample belongs to the first deviation level, retrieve the standard operating procedure document of the equipment according to the sample processing appointment work order;

[0020] If the deviation of the sample preprocessing belongs to the second deviation level, the standard operating procedure file of the equipment is retrieved according to the sample processing appointment work order, and the deviation of the sample preprocessing is pushed to the interactive terminal.

[0021] If the deviation in the preceding processing of the sample belongs to the third deviation level, a sample deviation warning message is generated based on the deviation in the preceding processing of the sample, and the sample deviation warning message is sent to the interactive terminal.

[0022] Furthermore, the step of retrieving the standard operating procedure document for the equipment based on the sample processing appointment work order specifically includes:

[0023] The processing mode of the equipment is determined based on the information of the sample to be processed and the sample processing reservation work order.

[0024] Retrieve the standard operating procedure file of the equipment according to its processing mode.

[0025] Furthermore, the step of combining the standard operating procedure document, the sample information to be processed, and the user authorization to generate a device operation guide template includes:

[0026] If the information of the sample to be processed does not contain previous processing records, or if the deviation of the previous processing of the sample in the information of the sample to be processed belongs to the first deviation level, the equipment operation guide template does not set sample-related interruption points;

[0027] If the degree of deviation in the previous processing of the sample in the information of the sample to be processed belongs to the second deviation level, the sample-related interruption point is set in the equipment operation guide template;

[0028] If the degree of deviation in the previous processing of the sample in the information of the sample to be processed belongs to the third deviation level, the equipment operation guide template sets a sample alarm interruption point at the starting node.

[0029] Furthermore, the step of combining the standard operating procedure document, the sample information to be processed, and the user authorization to generate a device operation guide template includes:

[0030] If the user has basic permissions, no personnel-related interruption points are set in the device operation guide template;

[0031] If the user has intermediate or advanced permissions, the device operation guide template will set personnel-related interruption points.

[0032] Furthermore, the step of combining the standard operating procedure document, the sample information to be processed, and the user authorization to generate a device operation guide template includes:

[0033] If the standard operating procedure file contains non-standard decision-making steps or manual review steps, a feedback interruption point shall be set in the equipment operation guide template;

[0034] If the standard operating procedure file does not include non-standard decision-making steps and manual review nodes, the equipment operation guide template does not set feedback interruption points.

[0035] Furthermore, the step of generating device operation confirmation information based on the device operation guidance template and sending the device operation confirmation information to the interactive terminal specifically involves:

[0036] Extract the start node, break point, and end node from the device operation guide template;

[0037] Based on the start node, interruption point, end node, and current equipment operating status, equipment operation confirmation information is generated. The equipment operation confirmation information includes processing instruction information, processing parameter information, sample parameter information, and feedback information from non-standard decision-making or manual review processes.

[0038] Based on the device operation confirmation information and a natural language template or preset format, a session mode device operation confirmation information is generated and sent to the interactive terminal.

[0039] Furthermore, upon receiving a device operation confirmation instruction or device operation parameter input instruction from the interactive terminal, the device operation guidance template is adjusted according to the device operation confirmation instruction or device operation parameter input instruction, specifically as follows:

[0040] Upon receiving a device operation confirmation command or device operation parameter input command from the interactive terminal, if the device operation confirmation command or device operation parameter input command does not meet the preset format requirements, a prompt message indicating that the input information is incorrect is sent to the interactive terminal.

[0041] If the device operation confirmation command or device operation parameter input command meets the preset format requirements, and combined with the current device operating parameters, determine whether the current device operating status meets the device requirements of the received device operation confirmation command or device operation parameter input command;

[0042] If the current device operating status meets the device requirements of the received device operation confirmation instruction or device operation parameter input instruction, the device operation guidance template is adjusted according to the device operation confirmation instruction or device operation parameter input instruction.

[0043] Furthermore, the control method for operating the device also includes:

[0044] If the current device operating status does not meet the device requirements of the received device operation confirmation instruction or device operation parameter input instruction, a corresponding device operation reference value is generated by combining the current device operating status and the device operation guide template, and the device operation reference value is sent to the interactive terminal.

[0045] Furthermore, the step of breaking down the adjusted equipment operation guide template into several equipment operation instructions and sending the equipment operation instructions to the process automation processing module specifically involves:

[0046] Based on the operable keys of the current device system interface, the adjusted device operation guide template is broken down into several device operation instructions, with each operable key corresponding to one device operation instruction.

[0047] The equipment operation instructions are input into the process automation module.

[0048] Furthermore, the control method for operating the device also includes:

[0049] Obtain the equipment operating parameters sent by each device, the received equipment reservation work orders, and the equipment monitoring information sent by the laboratory monitoring system;

[0050] If the operating parameters sent by any device deviate from the preset operating parameter threshold, a device maintenance prompt message is generated based on the corresponding device monitoring information and sent to the administrator. At the same time, a device appointment work order transfer prompt message is generated based on the device appointment work order received by the device and the idle status of devices with similar functions and sent to both the administrator and the user.

[0051] If any device's monitoring information is abnormal, retrieve the device's operating parameters. If the operating parameters are normal, send a first alert to the administrator based on the abnormal monitoring information. If the operating parameters are abnormal, send a second alert to the administrator based on both the abnormal monitoring information and the operating parameters.

[0052] Furthermore, the control method for operating the device also includes:

[0053] For any given device, obtain feedback information on the completion of the sample processing steps;

[0054] Based on the feedback information, retrieve the equipment operating parameters during the sample processing;

[0055] The equipment operation instruction fault analysis results are generated by combining the defect information and equipment operating parameters in the feedback information, and the equipment operation instruction fault analysis results are used to revise the equipment operation guide template.

[0056] Furthermore, the control method for operating the device also includes:

[0057] Based on the non-defect information in the feedback, retrieve the equipment's historical sample processing records;

[0058] If the non-defect information is compared with the same information recorded in the equipment's historical processing samples and has a higher yield, the equipment operation guide template is revised based on the feedback information.

[0059] Secondly, the present invention also provides a control method for operating micro-nano fabrication laboratory equipment. This control method is applied to a micro-nano equipment operation control system, which includes an interactive terminal and micro-nano equipment control terminals deployed on each micro-nano fabrication device. Each micro-nano equipment control terminal is equipped with a process automation module and is communicatively connected to the interactive terminal, an equipment reservation system, an equipment evaluation system, an equipment monitoring system, and a sample recording system. When executed on the micro-nano equipment control terminal, the control method applied to the operation of the micro-nano fabrication laboratory equipment includes the following steps:

[0060] Retrieve and query the user's incomplete equipment reservation work orders from the equipment reservation system based on the user's login information;

[0061] If the user's incomplete equipment reservation work order is empty, the user's usage rights on the current equipment are determined by combining the user's login information and the user's assessment results retrieved from the equipment assessment system.

[0062] Retrieve current equipment operation information from the equipment monitoring system and retrieve previous processing records of the sample to be processed from the sample recording system;

[0063] The system combines the current device's operating information and the user's usage permissions on the current device to generate sample processing inquiry information, which is then sent to the interactive terminal.

[0064] The standard operating procedure document for the equipment is determined based on the sample processing reservation work order, the previous processing record of the sample to be processed, and the information of the sample to be processed retrieved from the equipment reservation system.

[0065] A device operation guide template is generated by combining the standard operating procedure file, the information of the sample to be processed, and the user's usage permissions on the current device.

[0066] Based on the equipment operation instructions, equipment operation confirmation information is generated, and combined with the equipment's sample processing steps, the confirmation information is sent to the interactive terminal. The equipment operation confirmation information includes sample injection prompts, sample selection prompts, processing parameter input information, and sampling prompts.

[0067] After receiving the sample selection confirmation information and processing parameter input information returned by the interactive terminal, the device operation guide template is adjusted according to the sample selection confirmation information and processing parameter input information;

[0068] The revised equipment operation guide template is broken down into several equipment operation instructions, and these instructions are input into the process automation module.

[0069] The process automation module executes equipment operation instructions, and the corresponding equipment operating parameters and sample processing parameters are recorded to form a sample processing record.

[0070] Once the automated processing module completes all equipment operation instructions, it generates a sample processing completion notification and sends the notification along with the sample processing record to the interactive terminal.

[0071] Thirdly, the present invention also provides a computer-readable storage medium having a computer program stored thereon, wherein the computer program, when executed by a processor, implements the steps of the control method for operating the device as described in any one of the first aspects or the control method for operating the micro / nano fabrication laboratory equipment as described in the second aspect.

[0072] Fourthly, the present invention also provides a computer device, including a memory and a processor, wherein the memory stores a computer program, and when the processor executes the computer program, it executes the control method for operating the device as described in any one of the first aspects or the control method for operating the micro-nano fabrication laboratory equipment as described in the second aspect.

[0073] The beneficial effects of adopting the above technical solution are as follows: This embodiment generates specific equipment operation guidance templates based on the sample processing reservation information uploaded by the user and the standard operating procedure files corresponding to different sample processing steps of the equipment. For non-standard decision-making or manual review steps that require user processing within the equipment operation guidance template, corresponding equipment operation confirmation information is generated. The equipment operation guidance template is then adjusted based on the specific instructions returned by the user. Furthermore, the adjusted equipment operation guidance template is broken down into several equipment operation instructions and input into the process automation module. This shortens the user's training time for operating complex equipment and reduces the process of manually entering data on complex operation pages of large equipment. Only non-standard decision-making or manual review steps are retained for user interaction, thereby improving the efficiency of using large equipment or complex operation pages. Further, in this embodiment, during the execution of sample processing steps in the process automation module, in addition to recording processing data, the operating parameters of the equipment are also recorded, forming a complete sample processing record. Simultaneously, by combining the complete sample processing record and the sample feedback information sent by the user, the parameters or steps of the standard operating procedure files can be adjusted to improve the sample yield. Attached Figure Description

[0074] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the accompanying drawings used in the description of the embodiments or the prior art will be briefly introduced below.

[0075] Figure 1 This is a schematic diagram of a device operation control method in one embodiment of this application. Detailed Implementation

[0076] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention. To describe the present invention in more detail, the control method for operating the equipment and the control method for operating the micro-nano fabrication laboratory equipment provided by the present invention will be specifically described below with reference to the accompanying drawings.

[0077] Unless otherwise defined, the technical or scientific terms used in this application shall have the ordinary meaning understood by one of ordinary skill in the art to which this invention pertains. The terms "first," "second," and similar terms used in this invention do not indicate any order, quantity, or importance, but are merely used to distinguish different components. Similarly, the terms "an," "a," or "the" do not indicate a quantity limitation, but rather indicate the presence of at least one. The terms "comprising" or "including" mean that the preceding element or object encompasses the elements or objects listed after the word and their equivalents, without excluding other elements or objects. The terms "connected" or "linked" are not limited to physical or mechanical connections, but can include electrical connections, whether direct or indirect. "Up," "down," "left," "right," etc., are used only to indicate relative positional relationships; when the absolute position of the described object changes, the relative positional relationship may also change accordingly.

[0078] Existing laboratories or large industrial systems in universities, research institutes, or industries consist of multiple pieces of industrial equipment. In fields such as semiconductors, bioengineering, and power, most experimental or industrial equipment is characterized by complex operating procedures and numerous control parameters or buttons on the user interface. This results in a high barrier to entry for operators, long learning cycles, and reliance on the experience of specialized personnel. For new or inexperienced operators, learning the specific operating procedures for numerous function buttons or user interfaces, as well as the underlying principles of each interface, requires an extremely long learning cycle (1-4 months, or even half a year to a year, for highly sophisticated and complex equipment). Even after learning these skills, the complexity of the equipment still makes operation difficult and can easily damage samples or the equipment itself.

[0079] In addition, existing laboratory or large industrial system management relies heavily on manual experience, which has drawbacks such as delayed response, excessive subjectivity in decision-making, and insufficient ability to predict failures. Once equipment fails, it can easily lead to prolonged downtime or a serious reduction in production efficiency.

[0080] Meanwhile, various industries are constantly seeking solutions to the aforementioned problems, including using AI, RPA, or IoT solutions. However, pure AI solutions lack real-time control over the underlying equipment. While they have some application in predictive maintenance, predictive maintenance is disconnected from the equipment's business processes, making it difficult to form a closed-loop management system. Pure RPA solutions, although they can replace some manual operations, are often limited to software operation processes with clearly defined rules, and cannot be applied to complex scenarios where equipment management or rules are not unique. They also cannot learn and optimize autonomously, making it difficult to promote the automation of business processes. Pure IoT solutions can achieve device connectivity or data collection, but lack the ability to process business processes. Therefore, in existing equipment operation control or equipment management, equipment management systems, environmental monitoring systems, and safety early warning systems are independent of each other, lacking a mechanism for collaborative processing.

[0081] In response, this invention provides a control method for equipment operation and a control method for micro-nano fabrication laboratory equipment operation. Through the deep integration of IoT, RPA, and AI technologies, various experimental or production equipment are equipped with autonomous sensing, autonomous decision-making, autonomous execution, and autonomous evolution functions. In particular, in terms of equipment management, it achieves full-process automation and safe and agile response, breaking through the problems of slow response and low processing efficiency of traditional equipment. By constructing a closed-loop "perception-decision-execution-feedback" chain, dynamic collaborative optimization of equipment hardware and software is achieved.

[0082] The application environment of the equipment operation control method is as follows: the equipment operation control method is applied to the equipment operation control system. The equipment operation control system includes an interactive terminal and an equipment control terminal equipped with a process automation processing module. The interactive terminal and the equipment control terminal are connected for communication. It should be noted that, taking a laboratory or factory as an example, the equipment in the laboratory or factory is equipped with one or more multi-functional sensors to collect the equipment operating status, including, for example, the rotation speed of the spin coater, the amount of adhesive dispensed by the spin coater, the gas flow rate of the lithography equipment, the laser intensity of the lithography equipment, the temperature of the developer solution, the liquid level and pH value of the developer solution, etc. Each device is equipped with an interactive terminal, which is used to display the equipment operation interface and user confirmation information or parameters to be entered, etc., displayed in the form of a conversation or icon. At the same time, each device can also be equipped with an edge computing node to process the collected equipment operating parameters, processing tasks executed by the equipment, etc., for autonomous decision-making and execution of equipment processing tasks, and to manage the operating status of the equipment. It can also work with network nodes to feed back the specific operating status of the equipment and the autonomously executed processing tasks to the administrator for management of the equipment in the laboratory or factory. In addition, monitoring equipment with algorithms can be installed inside laboratories or factories, such as monitoring cameras with infrared detection functions installed in key locations, to improve the ability to perceive equipment operation or environment, especially to achieve all-weather monitoring in low light, no light or special environments.

[0083] The above application scenarios include the edge computing nodes provided in the embodiments. These edge computing nodes include, but are not limited to, smartphones and computer devices. The computer devices can be at least one of desktop computers, portable computers, laptop computers, mainframe computers, tablet computers, etc. After receiving the user's trigger information, the terminal device generates a specific device operation guidance template by combining the device reservation work order and the device's standard operating procedure file. Then, it determines the confirmation information that needs to be interacted with by the user based on the device operation guidance template. After the user provides confirmation, the device autonomously executes the clearly defined operation steps, improving the user's device operation efficiency and accuracy. (Referring to the attached...) Figure 1 The diagram illustrates a control method for operating the equipment. For details, please refer to an embodiment of the control method for operating the equipment.

[0084] Step S100: Obtain user permissions, information on samples to be processed, and sample processing appointment work orders.

[0085] Specifically, user permissions can be identified through the electronic tag carried by the user or the user's login identity information; the information of the sample to be processed may include the size of the sample to be processed, the material of the sample to be processed, the cleanliness of the sample to be processed, the surface structure of the sample to be processed, etc.; the sample processing appointment work order includes the sample processing type, sample processing requirements, and sample processing appointment time.

[0086] It should be noted that in this embodiment, there are multiple ways to obtain the equipment reservation work order sent by the user. The above-mentioned equipment reservation work order can be obtained by obtaining the user's input information through conversational questions, or the user's permissions can be identified by an electronic tag reading system connected to the equipment, and the specific equipment reservation work order of the user for the target equipment can be retrieved from the control server of the laboratory / factory.

[0087] Furthermore, after obtaining the aforementioned user permissions, sample information to be processed, and sample processing appointment order, and before retrieving the equipment's standard operating procedure file based on the sample information and sample processing appointment order, the equipment operation control method in this embodiment further includes:

[0088] Step S101: If the sample information to be processed includes a previous processing record, retrieve the previous processing record. The previous processing record includes the previous equipment operating parameters and the previous equipment processing steps.

[0089] For example, if the current equipment is a photolithography equipment, and the sample to be processed has undergone a photoresist coating process before entering the photolithography equipment, then the preceding processing record included in the sample information is the photoresist coating process record of the sample to be processed. The preceding processing record includes the photoresist used in the photoresist coating process, the amount of photoresist dispensed by the photoresist coating equipment, the photoresist coating speed, and the specific steps of the photoresist coating.

[0090] Step S102: Input the preceding equipment processing steps and preceding equipment operating parameters into the trained sample prediction model to obtain the predicted sample parameters of the sample to be processed after the preceding equipment processing.

[0091] Specifically, in this embodiment, a trained sample prediction model is set up for each preceding device. This model uses historical processed sample records of the corresponding preceding device to construct a training dataset, and uses the sample processing results of the historical records as labels to train the model until the number of iterations or the output error of the trained model meets a preset condition. By inputting the preceding device processing steps and operating parameters into the trained sample prediction model, predicted sample parameters after the sample to be processed by the preceding device can be obtained. These predicted sample parameters include the defect types that occurred during the preceding processing and the specific measurement results of the defects.

[0092] Step S103: Calculate the degree of deviation in the previous processing of the sample based on the predicted sample parameters and the expected processing value.

[0093] Specifically, for the sample to be processed, each processing step is set with a corresponding expected processing value. This expected processing value is the user's expectation of the processing result of the preceding processing, and it can be reflected in the sample processing requirements. After obtaining the predicted sample parameters of the sample to be processed, the degree of deviation of the sample's preceding processing can be obtained by combining the expected processing value. In this embodiment, the degree of deviation of the sample's preceding processing is divided into three levels, namely the first deviation level, the second deviation level, and the third deviation level.

[0094] The first deviation level is the slight deviation level. When the deviation in the preceding processing of the sample is at the first deviation level, i.e., the slight deviation level, it means that the deviation between the predicted sample parameters and the key parameters in the expected processing value is small. Therefore, this deviation level has little impact on the subsequent processing steps of the sample. The second deviation level is the moderate deviation level. When the deviation in the preceding processing of the sample is at the second deviation level, i.e., the moderate deviation level, it means that the predicted sample parameters and the key parameters in the expected processing value have a certain degree of deviation. However, based on this deviation, subsequent processing steps can still be performed. Alternatively, the deviation between the predicted sample parameters and the non-key parameters in the expected processing value is large, affecting the yield of subsequent processing steps. The third deviation level is the severe deviation level. When the deviation in the preceding processing of the sample is at the third deviation level, i.e., the severe deviation level, it means that the deviation between the predicted sample parameters and the key parameters in the expected processing value is large. This deviation level affects the execution of subsequent processing steps or the sample processing yield.

[0095] Step S104: If the deviation of the sample's previous processing belongs to the first deviation level, retrieve the standard operating procedure file of the equipment according to the sample processing appointment work order.

[0096] Specifically, if the deviation in the previous processing of the sample is at the first level, the deviation has little or no impact on the current target equipment during the sample processing. Therefore, the standard operating procedure document of the equipment can be retrieved in conjunction with the sample processing appointment work order for sample processing.

[0097] Step S105: If the deviation level of the sample pre-processing belongs to the second deviation level, retrieve the standard operating procedure file of the equipment according to the sample processing appointment work order, and push the deviation level of the sample pre-processing to the interactive terminal.

[0098] Specifically, if the deviation in the previous processing of the sample is at the second level, and this deviation has a certain impact on the current target equipment's processing of the sample, such as reducing the sample's processing yield, then the user needs to be informed of the potential impact of the deviation in the previous processing before the current target equipment is used for processing. The standard operating procedure (SOP) file should also be retrieved so that the user can determine whether the SOP file needs to be adjusted.

[0099] Step S106: If the degree of deviation in the preceding processing of the sample belongs to the third deviation level, generate a sample deviation warning message based on the degree of deviation in the preceding processing of the sample, and send the sample deviation warning message to the interactive terminal.

[0100] Specifically, if the deviation in the previous processing of the sample is at the third level, this deviation level has a significant impact on the sample processing of the current target equipment. For example, the yield of subsequent processing of the sample may be lower than the average, or the sample may be damaged or unable to perform subsequent processing steps. In this case, it is necessary to generate specific sample deviation warning information in combination with the deviation in the previous processing of the sample. This is to remind the user that the deviation level affects the execution of subsequent processing steps, and to take measures such as stopping processing or issuing an alarm for the previous processed samples of this batch.

[0101] The setting of the aforementioned sample pre-processing deviation level enables the target device in this embodiment to comprehensively consider the overall condition of the sample before processing it. In cases where there are multiple devices or multiple processing steps, it can combine the specific data and status of the previous processing steps and use AI models to analyze the specific sample status to determine whether the sample to be processed meets the conditions for entering the next processing step. This achieves a collaborative closed loop of "automatic flow of processing technology for samples that meet the standards, AI-assisted decision-making and notification to users for samples with defects, and manual intervention by users for samples that do not meet the standards," eliminating the need for users to monitor the sample processing steps throughout the entire process.

[0102] Step S200: Retrieve the standard operating procedure document of the equipment based on the information of the sample to be processed and the sample processing appointment work order.

[0103] Specifically, considering that each processing equipment in the laboratory or factory has different processing functions or processing modes, and the specific equipment operation steps or operation sequence corresponding to each processing function or processing mode are different, a corresponding standard operating procedure (SOP) document is set for each specific equipment processing function or processing mode.

[0104] The above step S200 includes the following specific steps:

[0105] Step S201: Determine the processing mode of the equipment based on the information of the sample to be processed and the sample processing reservation work order.

[0106] Step S202: Retrieve the standard operating procedure file of the equipment according to the processing mode of the equipment.

[0107] Specifically, each processing equipment is equipped with one or more processing modes. When the target processing equipment receives the sample information, it determines whether the sample meets the requirements of the target processing equipment based on the sample information, and simultaneously determines the specific processing mode based on the sample processing reservation order. For example, when the target processing equipment is a lithography machine, and the sample information is a 5-inch sample, the sample processing reservation order is to perform overlay processing on the sample to obtain a pattern containing a specific microstructure. In this case, the corresponding processing mode of the lithography machine is the overlay processing mode with a precision of x mm. Each processing mode has a corresponding standard operating procedure (SOP) document (e.g., first determine the wavelength of the etching laser, position the sample to be processed, then start the first layer pattern etching, after completing the first layer pattern etching, position the sample to be processed again, continue the second layer pattern etching, and so on until all patterns containing specific microstructures are etched). When the sample processing reservation work order is for single-layer etching of the sample to be processed, the processing mode of the lithography machine is the single-layer etching mode, which also has a corresponding SOP document (e.g., determine the wavelength of the etching laser - start the single-layer etching of the pattern).

[0108] It should be noted that the standard operating procedure (SOP) files for each processing device in this embodiment can be obtained from the device manual or from continuously updated historical processing operation records. This embodiment does not limit the method of obtaining the SOP files, as long as the SOP files enable the processing device to execute the preset steps and processing parameters step by step when the sample to be processed is free of defects, and obtain the desired processed sample.

[0109] Step S300: Combine the standard operating procedure document, the information on the sample to be processed, and the user's permissions to generate an equipment operation guide template.

[0110] Since the standard operating procedure (SOP) file is only determined based on the specific processing mode of the equipment, directly generating an equipment operation guide template based solely on the SOP file to guide the RPA robot to automatically execute the processing step could easily overlook the processing needs of different sample information or user permissions in the laboratory or factory. Therefore, this embodiment comprehensively considers the nodes that the equipment software may not be able to determine or the important nodes that require multiple user confirmations in the SOP files of different processing equipment, the parameter confirmation nodes or processing step confirmation nodes in the sample that may affect the processing result, and the parameter adjustment nodes or processing step adjustment nodes set according to user R&D needs or permissions. It combines the SOP file, sample information, and user permissions to generate an equipment operation guide template with different nodes. The nodes in this equipment operation guide template are used to introduce user interaction sessions or confirmation steps, specifically manifested as follows:

[0111] First, to address discrepancies in the information of the samples to be processed, corresponding nodes can be set in the equipment operation guide template to identify defects or flaws in the samples. Specifically:

[0112] Step S311: If the information of the sample to be processed does not contain previous processing records, or if the degree of deviation of the previous processing of the sample in the information of the sample to be processed belongs to the first deviation level, no sample-related interruption point is set in the equipment operation guidance template.

[0113] Step S312: If the degree of deviation in the previous processing of the sample in the information of the sample to be processed belongs to the second deviation level, the sample-related interruption point is set in the equipment operation guidance template.

[0114] Step S313: If the degree of deviation in the previous processing of the sample in the information of the sample to be processed belongs to the third deviation level, the equipment operation guidance template sets a sample alarm interruption point at the starting node.

[0115] By setting corresponding nodes in the equipment operation guide template based on whether the sample to be processed has a previous processing record and the specific degree of deviation in the previous processing, a collaborative closed loop is realized, which realizes "automatic flow of processing technology when the sample meets the standard, AI-assisted decision-making and notification to the user when the sample has defects, and manual intervention by the user when the sample does not meet the standard". This eliminates the need for the user to monitor the sample processing steps throughout the process and reduces the intervention of unnecessary nodes when the sample to be processed has no defects or minimal defects, thereby improving the automation of the sample processing process.

[0116] Secondly, considering that different users have varying levels of familiarity with different processing equipment, and that the accessibility of laboratory or factory processing equipment varies among users, this embodiment can, in order to protect the normal operation of the equipment or reduce damage caused by human factors, set corresponding nodes in the equipment operation guidance template based on the differences in user permissions. Specifically:

[0117] Step S321: If the user's permission is basic, no personnel-related interruption points are set in the device operation guide template.

[0118] Step S322: If the user has intermediate or advanced permissions, set personnel-related interruption points in the device operation guide template.

[0119] It should be noted that the personnel-related interruption points in this embodiment are set to meet the user's R&D needs and the complexity of the equipment program. When personnel-related interruption points are set in the standard operating procedure file, the user can be given the right to adjust specific processing parameters or processing steps in combination with the requirements of the sample processing appointment work order.

[0120] When there are no human-related interruptions in the equipment operation guide template, RPA robots can perform complex and tedious software operation steps on behalf of users. Users do not need to spend a lot of time learning complex equipment software operation procedures, allowing them to focus their energy on innovative ideas and scientific research. They can directly generate specific processing instructions from the equipment operation guide template and execute these instructions through the RPA robot, completing sample processing quickly and efficiently while avoiding damage to the equipment caused by unfamiliar users. When there are human-related interruptions in the equipment operation guide template, users, with higher operating privileges, can appropriately adjust the specific processing parameters or steps of the samples to be processed to conduct more challenging and pioneering experiments.

[0121] Finally, since the specific steps in the standard operating procedure (SOP) documents differ for different processing equipment, and there may be non-standard decisions or situations requiring manual review in the SOP process for specific processing equipment, this embodiment can set corresponding nodes in the equipment operation guidance template to address situations where there are non-standard decisions or key steps requiring manual review in the SOP documents. Specifically:

[0122] Step S311: If the standard operating procedure file contains a non-standard decision-making step or a manual review step, a feedback interruption point is set in the equipment operation guide template.

[0123] Step S312: If the standard operating procedure file does not contain non-standard decision-making steps and manual review nodes, no feedback interruption point is set in the equipment operation guide template.

[0124] It should be noted that in this embodiment, the feedback interruption point can be set at the beginning step of the equipment operation guidance template (such as confirming the information of the sample to be processed, the user verifying the information of the sample to be processed, entering the location of the sample to be processed, etc.), or it can be set at the middle step of the equipment operation guidance template (such as if a processing device needs to repeatedly perform the same steps on the sample to be processed multiple times, and the result of the previous step is fed back before the same step is performed).

[0125] Step S400: Generate device operation confirmation information according to the device operation guide template, and send the device operation confirmation information to the interactive terminal.

[0126] In this embodiment, the device operation guidance template is configured with specific interaction nodes based on the various factors mentioned in step S300. These interaction nodes are used to generate specific device operation confirmation information to form an interaction process with the user, adjusting or confirming the specific steps in the device operation guidance template. The specific steps for generating the device operation confirmation information are as follows:

[0127] Step S401: Extract the start node, interruption point, and end node from the device operation guide template.

[0128] Step S402: Generate equipment operation confirmation information based on the start node, interruption point, end node and current equipment operating parameters. The equipment operation confirmation information includes processing instruction information that needs to be input or adjusted by the user, processing parameter information, sample parameter information, and feedback information from non-standard decision-making or manual review processes.

[0129] Step S403: Generate a session mode device operation confirmation information based on the device operation confirmation information combined with a natural language template or preset format, and send it to the interactive terminal.

[0130] It should be noted that the confirmation information for equipment operation can be sent to the interactive terminal in different ways for different users. For example, for users with sample processing history, to improve the efficiency of information interaction, the confirmation information can be generated using the user's historical information interaction format (such as tables, codes, or natural language dialogues). For users without sample processing history, the user's familiarity with the processing equipment can be judged based on the user's specific identity information. For users with high familiarity with the processing equipment, a more professional and concise expression can be used to send the confirmation information (such as tables, codes, or simple text). For users with low familiarity with the processing equipment, a simpler and more detailed expression can be used to send the confirmation information (such as detailed text or even charts).

[0131] Step S500: After receiving the device operation confirmation instruction or device operation parameter input instruction returned by the interactive terminal, adjust the device operation guidance template according to the device operation confirmation instruction or device operation parameter input instruction.

[0132] Specifically, when the processing equipment receives a user's feedback confirmation instruction or instruction for inputting equipment operation parameters, it first needs to determine whether the user's feedback information is compliant. Secondly, based on the current operating information of the processing equipment, it uses AI assistance to determine whether the current status of the processing equipment can meet the user's feedback requirements. After meeting the above conditions, the equipment operation guidance template is adjusted, including the following steps:

[0133] Step S501: After receiving the device operation confirmation command or device operation parameter input command returned by the interactive terminal, if the device operation confirmation command or device operation parameter input command does not meet the preset format requirements, send a prompt message indicating that the input information is incorrect to the interactive terminal.

[0134] Step S502: If the device operation confirmation command or device operation parameter input command meets the preset format requirements, and in conjunction with the current device operating parameters, determine whether the current device operating status meets the device requirements of the received device operation confirmation command or device operation parameter input command.

[0135] Step S503: If the current device operating status meets the device requirements of the received device operation confirmation instruction or device operation parameter input instruction, adjust the device operation guidance template according to the device operation confirmation instruction or device operation parameter input instruction.

[0136] Step S504: If the current device operating status does not meet the device requirements of the received device operation confirmation instruction or device operation parameter input instruction, generate a corresponding device operation reference value based on the current device operating status and the device operation guide template, and send the device operation reference value to the interactive terminal.

[0137] Specifically, regarding whether the current equipment operating status meets the equipment requirements of the received equipment operation confirmation command or equipment operation parameter input command, this embodiment can introduce an AI model to assist in the judgment. A training set is constructed using different historical equipment operating statuses and corresponding sample processing history records. The parameters of the AI ​​model are then adjusted so that the AI ​​model can determine whether the current equipment operating status meets the equipment requirements corresponding to the processing parameters reported by the user, based on the current equipment operating parameters. When the equipment operating status does not meet the equipment requirements corresponding to the processing parameters reported by the user, a specific equipment operation reference value is generated by combining the equipment operating status and the equipment operation guidance template. This equipment operation reference value can be a specific threshold range.

[0138] Step S600: Decompose the adjusted equipment operation guide template into several equipment operation instructions, and send the equipment operation instructions to the process automation processing module.

[0139] Specifically, after determining the adjusted equipment operation guide template, the processing equipment in this embodiment can execute specific sample processing steps in conjunction with the process automation module (specifically, a process automation module operating using RPA technology), including parameter input for equipment operation nodes and selection of operation keys. To achieve the above operations, the process automation module needs to break down the equipment operation guide template into specific equipment operation instructions, and then execute specific process steps according to these instructions, specifically:

[0140] Step S601: Based on the operable keys of the current device system interface, the adjusted device operation guide template is decomposed into several device operation instructions, where each operable key corresponds to one device operation instruction.

[0141] Step S602: Input the equipment operation command into the process automation processing module.

[0142] It should be noted that each operable key on the device system interface (including virtual buttons, drop-down slots, input slots, etc.) corresponds to a device operation command. Thus, when the process automation module executes each device operation command, it completes the click operation, drop-down-click option operation, or click-parameter input operation of the corresponding operable key on the device system interface.

[0143] Step S700: Record the actions of the automated process module in executing the equipment operation instructions, the corresponding equipment operating parameters and sample processing parameters at that time, and form a sample processing record.

[0144] Specifically, to improve the traceability of laboratory or factory equipment operation records and ensure the integrity of experimental data, the actions of the automated processing module in executing equipment operation instructions, the corresponding equipment operating parameters, and the sample processing parameters together constitute the sample processing record, forming an electronic record book for the processing equipment in the laboratory or factory. This can prevent the loss of experimental processing data in case of unexpected situations (such as equipment failure, experimental terminal failure, etc.).

[0145] In addition, in this embodiment, the above-mentioned sample processing record is the original log of the equipment processing, which can be directly obtained. Correspondingly, non-quantitative information records, such as "micro-cracks appear on the sample surface", "sudden breakpoint during the experiment for 10 minutes", "unstable equipment status during the experiment", etc., can also be provided to users through the interactive terminal to improve the completeness of the sample processing record.

[0146] Step S800: After the process automation module completes all equipment operation instructions, it generates a sample processing completion prompt message and sends the sample processing completion prompt message and sample processing record to the interactive terminal.

[0147] The above-described equipment operation control method is based on the case of a single processing device. Since there are multiple processing devices or even factory equipment within a laboratory or factory, the equipment operation control method in this embodiment can also be set up on the administrator's end for controlling all equipment within the laboratory or factory. Specifically:

[0148] Step S901: Obtain the equipment operating parameters sent by each device, the received equipment reservation work orders, and the equipment monitoring information sent by the laboratory monitoring system.

[0149] Step S902: If the equipment operating parameters sent by any device deviate from the preset equipment operating parameter threshold, a device maintenance prompt message is generated based on the corresponding device monitoring information and sent to the administrator. At the same time, a sample processing appointment work order transfer prompt message is generated based on the sample processing appointment work order received by the device and the idle status of similar devices and sent to the administrator and the user.

[0150] Step S903: If any device monitoring information is abnormal, retrieve the device operating parameters of that device. If the device operating parameters are normal, send a first prompt message to the administrator based on the abnormal device monitoring information.

[0151] Step S904: If the device operating parameters are abnormal, a second prompt message is sent to the administrator based on the abnormal device monitoring information and the device operating parameters.

[0152] It should be noted that the equipment monitoring in this embodiment includes multiple monitoring information, such as equipment monitoring information and multi-functional sensors installed within the specific equipment. By monitoring the equipment's operating status through multi-dimensional monitoring information, the accuracy of equipment monitoring is improved. If an anomaly is found in the equipment monitoring information (such as observing liquid leakage or detecting abnormal operating temperature), and the multi-functional sensors installed within the equipment do not show normal operating parameters, there is a possibility that the internal sensors of the equipment have failed. In addition to repairing the equipment, the management personnel also need to test the multi-functional sensors deployed inside the equipment. When multiple monitoring information points to abnormal equipment operation, a second alert message about equipment anomaly or malfunction is sent to the management personnel to remind them to investigate the equipment anomaly or malfunction.

[0153] Furthermore, the equipment operation guide template generated in this embodiment is not static and can be adjusted based on user feedback regarding sample processing steps. Specifically:

[0154] Step S1001: For any device, obtain feedback information on the completion of the sample processing step.

[0155] Step S1002: Retrieve the equipment operating parameters during the sample processing based on the feedback information.

[0156] Step S1003: Combine the defect information and equipment operating parameters in the feedback information to generate equipment operation instruction fault analysis results, and revise the equipment operation guidance template based on the equipment operation instruction fault analysis results.

[0157] Step S1004: Based on the non-defect information in the feedback information, retrieve the equipment's historical sample processing records.

[0158] Step S1005: If the non-defect information has a higher yield rate when compared with the same information recorded in the equipment's historical processed samples, the equipment operation guide template is revised based on the feedback information.

[0159] It should be noted that in this embodiment, defect information refers to defect information after sample processing, such as lattice defects, blurred overlay patterns, etc., while non-defect information refers to relevant information that can improve sample working efficiency or experimental yield after sample processing.

[0160] The equipment operation control method provided in this embodiment executes standard procedures through a process automation module, reducing differences and inconsistencies caused by human factors. This significantly shortens the learning time for advanced equipment software, improves equipment operation efficiency, and ensures standardized user operation, reducing equipment damage or malfunctions caused by incorrect operation. It frees researchers from repetitive equipment operations, allowing them to focus on core innovation work. Furthermore, in laboratory or factory equipment management, it shifts from experience-driven to data-driven decision-making, improving transparency and accuracy in equipment management.

[0161] Furthermore, based on the above-mentioned equipment operation control method, this embodiment also proposes the following scheme for the control method of laboratory equipment operation in a micro-nano fabrication laboratory application environment:

[0162] The control method for operating equipment in a micro / nano fabrication laboratory is applied to a micro / nano equipment operation control system. This system includes an interactive terminal and micro / nano equipment control terminals deployed on each micro / nano fabrication device. Each micro / nano equipment control terminal is equipped with a process automation module. The micro / nano equipment control terminals are communicatively connected to the interactive terminal, an equipment reservation system, an equipment assessment system, an equipment monitoring system, and a sample recording system. The equipment reservation system can obtain reservation information for specific micro / nano fabrication equipment. The equipment assessment system can obtain the user's assessment results before using the specific micro / nano fabrication equipment to determine if the user has the necessary permissions. The equipment monitoring system monitors the real-time operating status of the micro / nano fabrication equipment or, based on historical operating data, predicts potential equipment malfunctions. The sample recording system records all operations performed after each sample enters the micro / nano fabrication laboratory. When executed on the micro / nano equipment control terminal, the control method applied to the operation of the micro / nano fabrication laboratory equipment includes the following steps:

[0163] Step S1101: Retrieve the user's incomplete equipment reservation work orders from the equipment reservation system based on the user's login information.

[0164] In this embodiment, user login information can be received by identifying the electronic tag carried by the user or by entering the user's name and password on the interactive terminal. After receiving the user login information, it is first necessary to check whether the user has any incomplete equipment reservation work orders in the equipment reservation system. This query process can prevent the user from repeatedly executing the same equipment reservation work order or making duplicate reservations for the same equipment.

[0165] Step S1102: If the user's incomplete equipment reservation work order is empty, determine the user's usage rights on the current equipment by combining the user login information and the user assessment results retrieved from the equipment assessment system.

[0166] Specifically, in this embodiment, in addition to the user's experimental level indicated by the user login information, the user's usage rights on the specific micro-nano processing equipment can also be combined with the user's assessment results in the equipment assessment system to obtain more objective and targeted usage rights.

[0167] For example, if a user's login information indicates a junior experimenter level, but the user's assessment result for equipment A in the equipment assessment system shows that the user is very familiar with equipment A, then the user's access permissions for equipment A can be appropriately relaxed (from the junior experimenter's permission not to set relevant interrupt points or modify data to the permission to set interrupt points or modify data for non-critical parameters of sample processing). Similarly, if a user's login information indicates an intermediate experimenter level, but the user's assessment result for equipment A in the equipment assessment system shows that the user is unfamiliar with equipment A, then the user's access permissions for equipment A can be appropriately tightened (from the intermediate experimenter's permission to set interrupt points or modify data for critical parameters of sample processing to the permission to only set interrupt points or modify data for non-critical parameters of sample processing).

[0168] Step S1103: Retrieve the current equipment operation information from the equipment monitoring system and retrieve the previous processing records of the sample to be processed from the sample recording system.

[0169] Step S1104: Combine the current operating information of the device and the user's usage rights on the current device to generate sample processing inquiry information, and send the sample processing inquiry information to the interactive terminal.

[0170] Specifically, compared to the above-mentioned control method for equipment operation, this embodiment also includes a step of determining the user's current equipment usage rights. This step first needs to determine whether the user has the right to operate the current equipment. At the same time, the user's usage rights are appropriately adjusted for different equipment operating states (such as when the equipment deviates and needs to be corrected), so as to avoid damage or waste to samples that need to be processed in the event of equipment failure. For senior operators with higher usage rights, sample processing can continue even if there is a deviation in the current equipment operating information. For junior operators with lower usage rights, sample processing can be temporarily suspended when there is a deviation in the current equipment operating information.

[0171] Step S1105: Determine the standard operating procedure document for the equipment based on the sample processing reservation work order, the previous processing record of the sample to be processed, and the sample information retrieved from the equipment reservation system.

[0172] Step S1106: Combine the standard operating procedure document, the information on the sample to be processed, and the user's usage rights on the current equipment to generate an equipment operation guide template.

[0173] Step S1107: Generate equipment operation confirmation information according to the equipment operation guide, and send the confirmation information to the interactive terminal in conjunction with the equipment's sample processing steps. The equipment operation confirmation information includes sample injection prompt information, sample selection prompt information, processing parameter input information, and sampling prompt information.

[0174] Step S1108: After receiving the sample selection confirmation information and processing parameter input information from the interactive terminal, adjust the equipment operation guide template according to the sample selection confirmation information and processing parameter input information.

[0175] Step S1109: Decompose the adjusted equipment operation guide template into several equipment operation instructions, and input the equipment operation instructions into the process automation processing module.

[0176] Step S1110: Record the actions of the automated process module in executing the equipment operation instructions, the corresponding equipment operating parameters and sample processing parameters at the time, and form a sample processing record.

[0177] Step S1111: After the process automation module completes all equipment operation instructions, it generates a sample processing completion prompt message and sends the sample processing completion prompt message and sample processing record to the interactive terminal.

[0178] The steps identical to those in the control method for operating the micro / nano fabrication laboratory equipment described above will not be repeated here. Please refer to the specific limitations in the control method for operating the equipment.

[0179] It should be understood that, although attached Figure 1 The steps in the flowchart are shown sequentially according to the arrows, but these steps are not necessarily executed in the order indicated by the arrows. Unless otherwise specified in this document, there is no strict order requirement for the execution of these steps, and they can be executed in other orders. Furthermore, [the following is a list of steps]. Figure 1 At least some of the steps in the process may include multiple sub-steps or sub-stages. These sub-steps or stages are not necessarily completed at the same time, but can be executed at different times. The execution order of these sub-steps or stages is not necessarily sequential, but can be executed in turn or alternately with other steps or at least some of the sub-steps or stages of other steps.

[0180] In one embodiment, the present invention also provides a computer-readable storage medium having a computer program stored thereon, wherein the computer program, when executed by a processor, implements the steps of the control method for operating the above-described device or the control method for operating a micro / nano fabrication laboratory device.

[0181] The computer-readable storage medium may be an electronic storage device such as flash memory, EEPROM (Electrically Erasable Programmable Read-Only Memory), EPROM (Erasable Programmable Read-Only Memory), hard disk, or ROM. Optionally, the computer-readable storage medium includes a non-transitory computer-readable storage medium. The computer-readable storage medium has storage space for program code that performs any of the method steps described above. This program code can be read from or written to one or more computer program products, and the program code may be compressed in an appropriate form.

[0182] In one embodiment, the present invention provides a computer device including a memory and a processor, the memory storing a computer program, and the processor executing the computer program performing the control method for operating the device or the control method for operating a micro-nano fabrication laboratory device.

[0183] The computer device includes a memory, a processor, and one or more computer programs, wherein the one or more computer programs may be stored in the memory and configured to be executed by one or more processors, and one or more application programs are configured to perform control methods for operating the aforementioned device or control methods for operating micro / nano fabrication laboratory equipment.

[0184] A processor may include one or more processing cores. The processor connects to various parts of the computer device using various interfaces and lines, and performs various functions and processes data by running or executing instructions, programs, code sets, or instruction sets stored in memory, and by calling data stored in memory. Optionally, the processor may be implemented using at least one hardware form of Digital Signal Processing (DSP), Field-Programmable Gate Array (FPGA), or Programmable Logic Array (PLA). The processor may integrate one or a combination of several of the following: Central Processing Unit (CPU), Graphics Processing Unit (GPU), and modem. The CPU primarily handles the operating system, user interface, and applications; the GPU is responsible for rendering and drawing the displayed content; and the modem handles wireless communication. It is understood that the modem may also be implemented separately as a communication chip, without being integrated into the processor.

[0185] The memory may include random access memory (RAM) or read-only memory (ROM). The memory can be used to store instructions, programs, code, code sets, or instruction sets. The memory may include a program storage area and a data storage area. The program storage area may store instructions for implementing an operating system, instructions for implementing at least one function (such as touch functionality, sound playback functionality, image playback functionality, etc.), and instructions for implementing the various method embodiments described above. The data storage area may also store data created by the terminal device during use.

[0186] The above embodiments are only used to illustrate the technical solutions of the present invention, and are not intended to limit it. Although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A method for controlling equipment operation, wherein the method is applied to an equipment operation control system, the equipment operation control system comprising an interactive terminal and a device control terminal configured with a process automation processing module, the interactive terminal and the device control terminal being communicatively connected, characterized in that... When the device operation control method is executed at the device control terminal, it includes the following steps: Obtain user permissions, information on samples to be processed, and sample processing appointment orders; The standard operating procedure document of the equipment is retrieved based on the information of the sample to be processed and the sample processing appointment work order. A device operation guide template is generated by combining the standard operating procedure document, the information of the sample to be processed, and the user permissions. Based on the device operation guide template, generate device operation confirmation information and send the device operation confirmation information to the interactive terminal; Upon receiving a device operation confirmation instruction or a device operation parameter input instruction from the interactive terminal, the device operation guidance template is adjusted according to the device operation confirmation instruction or the device operation parameter input instruction. The revised equipment operation guide template is broken down into several equipment operation instructions, and the equipment operation instructions are sent to the process automation processing module. The process automation module executes equipment operation instructions, and the corresponding equipment operating parameters and sample processing parameters are recorded to form a sample processing record. After the process automation module completes all equipment operation instructions, it generates a sample processing completion prompt message and sends the sample processing completion prompt message and sample processing record to the interactive terminal. The process of generating a device operation guide template by combining the standard operating procedure file, the sample information to be processed, and the user permissions includes: If the information of the sample to be processed does not contain previous processing records, or if the deviation of the previous processing of the sample in the information of the sample to be processed belongs to the first deviation level, the equipment operation guide template does not set sample-related interruption points; If the degree of deviation in the previous processing of the sample in the information of the sample to be processed belongs to the second deviation level, the sample-related interruption point is set in the equipment operation guide template; If the degree of deviation in the previous processing of the sample in the information of the sample to be processed belongs to the third deviation level, the equipment operation guide template sets a sample alarm interruption point at the starting node.

2. The control method for equipment operation as described in claim 1, characterized in that, Before retrieving the standard operating procedure (SOP) file for the equipment based on the information of the sample to be processed and the sample processing appointment work order, the process also includes: If the information of the sample to be processed includes a previous processing record, the previous processing record is retrieved. The previous processing record includes the operating parameters of the previous equipment and the processing steps of the previous equipment. The preceding equipment processing steps and the preceding equipment operating parameters are input into the trained sample prediction model to obtain the predicted sample parameters of the sample to be processed after the preceding equipment processing. Calculate the degree of deviation in the previous processing of the sample based on the predicted sample parameters and the planned sample requirements; If the deviation in the previous processing of the sample belongs to the first deviation level, retrieve the standard operating procedure document of the equipment according to the sample processing appointment work order; If the deviation of the sample preprocessing belongs to the second deviation level, the standard operating procedure file of the equipment is retrieved according to the sample processing appointment work order, and the deviation of the sample preprocessing is pushed to the interactive terminal. If the deviation of the sample's previous processing is classified as the third deviation level, a sample deviation warning message is generated based on the deviation of the sample's previous processing, and the sample deviation warning message is sent to the interactive terminal.

3. The control method for equipment operation as described in claim 2, characterized in that, The step of retrieving the standard operating procedure document for the equipment based on the sample processing appointment work order is specifically as follows: The processing mode of the equipment is determined based on the information of the sample to be processed and the sample processing reservation work order. Retrieve the standard operating procedure file of the equipment according to its processing mode.

4. The control method for equipment operation as described in claim 3, characterized in that, The process of generating a device operation guide template by combining the standard operating procedure file, the sample information to be processed, and the user permissions includes: If the user has basic permissions, no personnel-related interruption points are set in the device operation guide template; If the user has intermediate or advanced permissions, the device operation guide template will set personnel-related interruption points.

5. The control method for equipment operation as described in claim 3, characterized in that, The process of generating a device operation guide template by combining the standard operating procedure file, the sample information to be processed, and the user permissions includes: If the standard operating procedure file contains non-standard decision-making steps or manual review steps, a feedback interruption point shall be set in the equipment operation guide template; If the standard operating procedure file does not include a non-standard decision-making process or a manual review process, the equipment operation guide template will not include a feedback interruption point.

6. The control method for equipment operation as described in any one of claims 1-5, characterized in that, The step of generating device operation confirmation information based on the device operation guide template and sending the device operation confirmation information to the interactive terminal specifically involves: Extract the start node, break point, and end node from the device operation guide template; Based on the start node, interruption point, end node, and current equipment operating status, equipment operation confirmation information is generated. The equipment operation confirmation information includes processing instruction information, processing parameter information, sample parameter information, and feedback information from non-standard decision-making or manual review processes. Based on the device operation confirmation information and a natural language template or preset format, a session mode device operation confirmation information is generated and sent to the interactive terminal.

7. The control method for equipment operation as described in claim 6, characterized in that, Upon receiving a device operation confirmation command or device operation parameter input command from the interactive terminal, the device operation guidance template is adjusted according to the device operation confirmation command or device operation parameter input command, specifically as follows: Upon receiving a device operation confirmation command or device operation parameter input command from the interactive terminal, if the device operation confirmation command or device operation parameter input command does not meet the preset format requirements, a prompt message indicating that the input information is incorrect is sent to the interactive terminal. If the device operation confirmation command or device operation parameter input command meets the preset format requirements, and combined with the current device operating parameters, determine whether the current device operating status meets the device requirements of the received device operation confirmation command or device operation parameter input command; If the current device operating status meets the device requirements of the received device operation confirmation instruction or device operation parameter input instruction, the device operation guidance template is adjusted according to the device operation confirmation instruction or device operation parameter input instruction.

8. The control method for equipment operation as described in claim 7, characterized in that, Also includes: If the current device operating status does not meet the device requirements of the received device operation confirmation instruction or device operation parameter input instruction, a corresponding device operation reference value is generated by combining the current device operating status and the device operation guide template, and the device operation reference value is sent to the interactive terminal.

9. The control method for equipment operation as described in claim 8, characterized in that, The step of breaking down the adjusted equipment operation guide template into several equipment operation instructions and sending the equipment operation instructions to the process automation processing module is as follows: Based on the operable keys of the current device system interface, the adjusted device operation guide template is broken down into several device operation instructions, with each operable key corresponding to one device operation instruction. The device operation instructions are sent to the process automation module.

10. The control method for equipment operation as described in claim 1, characterized in that, Also includes: Obtain the equipment operating parameters sent by each device, the received equipment reservation work orders, and the equipment monitoring information sent by the laboratory monitoring system; If the equipment operating parameters sent by any device deviate from the preset equipment operating parameter threshold, a device maintenance prompt message is generated based on the corresponding equipment monitoring information and sent to the administrator. At the same time, a sample processing appointment work order transfer prompt message is generated based on the sample processing appointment work order received by the device and the idle status of similar devices and sent to the administrator and user. If any device's monitoring information is abnormal, retrieve the device's operating parameters. If the operating parameters are normal, send a first alert to the administrator based on the abnormal monitoring information. If the operating parameters are abnormal, send a second alert to the administrator based on both the abnormal monitoring information and the operating parameters.

11. The control method for equipment operation as described in claim 10, characterized in that, Also includes: For any given device, obtain feedback information on the completion of the sample processing steps; Based on the feedback information, retrieve the equipment operating parameters during the sample processing; The equipment operation instruction fault analysis results are generated by combining the defect information and equipment operating parameters in the feedback information, and the equipment operation instruction fault analysis results are used to revise the equipment operation guide template.

12. The control method for equipment operation as described in claim 11, characterized in that, Also includes: Based on the non-defect information in the feedback, retrieve the equipment's historical sample processing records; If the non-defect information is compared with the same information recorded in the equipment's historical processing samples and has a higher yield, the equipment operation guide template is revised based on the feedback information.

13. A control method for operating micro / nano fabrication laboratory equipment, wherein the control method is applied to a micro / nano equipment operation control system, the micro / nano equipment operation control system comprising an interactive terminal and micro / nano equipment control terminals deployed on each micro / nano fabrication device, the micro / nano equipment control terminals being configured with a process automation processing module, and the micro / nano equipment control terminals being communicatively connected to the interactive terminal, an equipment reservation system, an equipment assessment system, an equipment monitoring system, and a sample recording system, characterized in that... The control method for operating the micro-nano fabrication laboratory equipment includes the following steps when executed at the micro-nano equipment control terminal: Retrieve incomplete equipment reservation work orders from the equipment reservation system based on user login information; If the user's incomplete equipment reservation work order is empty, the user's usage rights on the current equipment are determined by combining the user login information and the user assessment results retrieved from the equipment assessment system. Retrieve current equipment operation information from the equipment monitoring system and retrieve previous processing records of the sample to be processed from the sample recording system; The system combines the current device's operating information and the user's usage permissions on the current device to generate sample processing inquiry information, which is then sent to the interactive terminal. The standard operating procedure document for the equipment is determined based on the sample processing reservation work order, the previous processing record of the sample to be processed, and the information of the sample to be processed retrieved from the equipment reservation system. A device operation guide template is generated by combining the standard operating procedure file, the information of the sample to be processed, and the user's usage permissions on the current device. Based on the equipment operation guide template, equipment operation confirmation information is generated, and combined with the equipment's sample processing steps, the confirmation information is sent to the interactive terminal. The equipment operation confirmation information includes sample injection prompts, sample selection prompts, processing parameter input information, and sampling prompts. After receiving the sample selection confirmation information and processing parameter input information from the interactive terminal, the device operation guide template is adjusted according to the sample selection confirmation information and processing parameter input information; The revised equipment operation guide template is broken down into several equipment operation instructions, and these instructions are input into the process automation module. The process automation module executes equipment operation instructions, and the corresponding equipment operating parameters and sample processing parameters are recorded to form a sample processing record. After the process automation module completes all equipment operation instructions, it generates a sample processing completion prompt message and sends the sample processing completion prompt message and sample processing record to the interactive terminal. The process of generating a device operation guide template by combining the standard operating procedure file, the sample information to be processed, and the user permissions includes: If the information of the sample to be processed does not contain previous processing records, or if the deviation of the previous processing of the sample in the information of the sample to be processed belongs to the first deviation level, the equipment operation guide template does not set sample-related interruption points; If the degree of deviation in the previous processing of the sample in the information of the sample to be processed belongs to the second deviation level, the sample-related interruption point is set in the equipment operation guide template; If the degree of deviation in the previous processing of the sample in the information of the sample to be processed belongs to the third deviation level, the equipment operation guide template sets a sample alarm interruption point at the starting node.

14. A computer-readable storage medium having a computer program stored thereon, characterized in that, When the computer program is executed by the processor, it implements the steps of the control method for operating the device according to any one of claims 1-12 or the control method for operating the micro-nano fabrication laboratory equipment according to claim 13.

15. A computer device comprising a memory and a processor, wherein the memory stores a computer program, characterized in that, When the processor executes the computer program, it executes the control method for operating the device as described in any one of claims 1-12 or the control method for operating the micro-nano fabrication laboratory equipment as described in claim 13.

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