Precise pressure control large-angle rotary patch head and chip mounter

Abstract

The present application relates to the technical fields of integrated circuit chip mounter, and particularly relates to a precise pressure control large-angle rotary chip mounter head and chip mounter, which mainly solves the technical problems of low pressure control precision, narrow pressure adjustment range and small nozzle rotation angle of the existing chip mounter head. The chip mounter head comprises a rotary driving part, an elastic bellows, a mandrel, a suction nozzle and a supporting cylinder. The rotary driving part comprises a fixed shell and a rotary shaft. The elastic bellows comprises a bellows section, an input shaft and an output shaft. On one hand, the chip mounter head can make the suction nozzle exert corresponding pressure on the chip when the suction nozzle contacts the chip by injecting gas with preset pressure into the elastic bellows, so that the pressure control precision is high and the pressure adjustment range is wide. On the other hand, the mandrel and the supporting cylinder can form an air bearing through the positive pressure air path, so that the mandrel can rotate 360 degrees without damping under the driving of the rotary driving part, thereby being able to adapt to chips with various angles.

Description

Technical Field

[0001] This invention relates to the field of integrated circuit placement machine technology, and in particular to a precision pressure-controlled large-angle rotating placement head and placement machine. Background Technology

[0002] Integrated circuit (IC) pick-and-place machines are the core equipment in the IC placement process. They are equipped with a three-axis (XYZ) robotic arm, with a placement head mounted at the end of the arm. During placement, the placement head first picks up the chip from the cassette or blue film, then transfers the chip to a vision inspection station. The vision inspection system calculates the chip's positional deviation, and finally transfers the chip to the placement station. After position compensation, the chip is placed onto the substrate. Throughout the chip picking and placement processes, the placement head applies pressure to the chip using a suction nozzle to ensure complete contact between the nozzle and the chip, and to fully flatten the adhesive layer between the chip and the substrate.

[0003] In existing technologies, placement heads typically apply the aforementioned pressure using an overtravel method. This involves the robotic arm continuing to feed along the Z-axis after the nozzle contacts the chip, causing deformation of the elastic body within the structure, thereby applying pressure to the chip through the nozzle. However, this pressure control method relies on the deformation of the elastic body to apply pressure, resulting in poor linearity and low precision, making it unsuitable for thin and fragile chips requiring high pressure accuracy. Furthermore, this pressure control method has a narrow pressure adjustment range, failing to meet the placement needs of chips with varying pressure requirements. Additionally, the placement angles of individual chips within the hopper differ, with some chips even being placed 180° backwards. During the position compensation stage, the placement head needs to adjust the chip orientation by rotating the nozzle. However, the rotation angle of existing placement heads is typically limited to within 30°. When the chip placement angle exceeds this range, the equipment can only trigger an error message, requiring manual intervention for correction, which is insufficient for automated operations.

[0004] Therefore, there is an urgent need for a patch head with high pressure control accuracy, wide pressure adjustment range, and large nozzle rotation angle. Summary of the Invention

[0005] To overcome the technical defects of existing placement heads, such as low pressure control accuracy, narrow pressure adjustment range, and small nozzle rotation angle, this invention provides a precision pressure-controlled large-angle rotating placement head and a placement machine.

[0006] The precision pressure-controlled large-angle rotating patch head provided by this invention includes:

[0007] A rotary drive unit includes a fixed housing and a rotating shaft. The rotating shaft is disposed inside the fixed housing and has a hollow structure. The rotating shaft is arranged vertically, and its top end is used to connect to a positive pressure source.

[0008] An elastic bellows includes a bellows section, an input shaft located at the top of the bellows section, and an output shaft located at the bottom of the bellows section. The input shaft has a hollow structure and is sealed to the rotating shaft. The output shaft has a closed structure to form a pressure chamber within the bellows section.

[0009] A mandrel, the top of which is connected to the output shaft, and a first negative pressure channel extending to its bottom end is provided at the center of the mandrel;

[0010] A suction nozzle is connected below the spindle, and an adsorption channel is provided at the center of the suction nozzle, and the adsorption channel is sealed and connected to the first negative pressure channel.

[0011] A support cylinder is connected below the fixed housing and sleeved on the outside of the mandrel. The support cylinder has a positive pressure air passage. One end of the positive pressure air passage extends to the outside of the support cylinder to connect to a positive pressure source, and the other end extends between the mandrel and the support cylinder to form an air bearing. The inner wall of the support cylinder has a first inner annular groove. The first inner annular groove is connected to the outside of the support cylinder through a first negative pressure external air passage opened inside the support cylinder to connect to a negative pressure source. The first inner annular groove is also connected to the first negative pressure channel through a first negative pressure internal air passage opened inside the mandrel.

[0012] Furthermore, the rotary drive component is a hollow shaft motor.

[0013] Furthermore, the mandrel includes a shaft body and a plug. The bottom end of the shaft body is provided with a mounting hole, and the shaft body is also provided with a blind hole extending to the mounting hole. The blind hole is connected to the first negative pressure internal air passage. The plug is a flexible structure and is sleeved in the mounting hole. The plug is provided with a central hole. The blind hole, the mounting hole and the central hole together form the first negative pressure channel, and the central hole is sealed and connected to the adsorption channel.

[0014] Furthermore, the bottom end of the plunger is provided with a flared docking lug, which abuts against the top surface of the suction nozzle and surrounds the peripheral area of ​​the adsorption channel to achieve a sealed connection between the central hole and the adsorption channel.

[0015] Furthermore, the bottom end of the shaft body is provided with an annular connecting plate, the plunger is located in the hollow area of ​​the connecting plate, the shaft body is also provided with a second negative pressure channel, the bottom end of the second negative pressure channel extends to the space between the connecting plate and the nozzle, an annular seal is provided between the bottom surface of the connecting plate and the top edge of the nozzle, the inner wall of the support cylinder is provided with a second inner annular groove, the second inner annular groove is connected to the outside of the support cylinder through a second negative pressure external air passage opened in the support cylinder to connect to a negative pressure source, the second inner annular groove is also connected to the second negative pressure channel through a second negative pressure internal air passage opened in the shaft body.

[0016] Furthermore, the bottom surface of the connecting plate is evenly distributed with multiple magnetic elements along its circumference, the top of the suction nozzle is made of ferromagnetic material, and there is a gap between the magnetic elements and the top surface of the suction nozzle.

[0017] Furthermore, the positive pressure air path is provided in two sets and is located at the top and bottom of the support cylinder respectively, and the first inner ring groove and the second inner ring groove are located between the two sets of positive pressure air paths.

[0018] Furthermore, the support cylinder includes an outer cylinder and an inner cylinder. The inner cylinder is sleeved on the outside of the mandrel, and the inner cylinder and the mandrel form an air bearing. The outer wall of the inner cylinder has an outer ring groove corresponding to both the first and second inner ring grooves. The outer ring groove is connected to the corresponding first or second inner ring groove through a plurality of circumferentially distributed connecting holes, and the outer ring groove is connected to the outside of the outer cylinder. The positive pressure air path includes an annular air inlet groove and an air blowing port. The annular air inlet groove is located on the outer wall of the inner cylinder and is connected to the outside of the outer cylinder. The air blowing port has a plurality of ports and is evenly distributed along the circumference of the inner cylinder. One end of the air blowing port extends between the inner cylinder and the mandrel, and the other end is connected to the annular air inlet groove. The annular air inlet groove and the outer ring groove, as well as adjacent outer ring grooves, are separated by sealing rings.

[0019] Furthermore, the precision pressure-controlled large-angle rotating patch head also includes a positioning sensing component. The positioning sensing component includes a sensor body and a detection plate. The sensor body is disposed on the support cylinder, and the detection plate is connected between the elastic bellows and the mandrel. The detection plate overlaps the sensor body, and the positioning sensing component is used to send a positioning signal when the detection plate is lifted to the point of detachment from the sensor body.

[0020] The pick-and-place machine provided by the present invention includes the aforementioned precision pressure-controlled large-angle rotating pick-and-place head.

[0021] The technical solution provided by this invention has the following advantages compared with the prior art.

[0022] The precision pressure-controlled large-angle rotary chip mount head provided by this invention, on the one hand, can apply corresponding pressure to the chip when the nozzle contacts the chip by injecting gas at a preset pressure into the elastic bellows, with high pressure control accuracy and a wide pressure adjustment range; on the other hand, the positive pressure air path can make the mandrel and the support cylinder form an air bearing, so that the mandrel can rotate 360° without damping under the drive of the rotary drive component, thereby adapting to chips with various placement angles.

[0023] The pick-and-place machine provided by this invention has the aforementioned advantages because it has a precision pressure-controlled, large-angle rotating pick-and-place head. Attached Figure Description

[0024] The accompanying drawings, which are incorporated in and form part of this specification, illustrate embodiments consistent with the invention and, together with the description, serve to explain the principles of the invention.

[0025] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, for those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0026] Figure 1 This is a schematic diagram illustrating the structure of the precision pressure-controlled large-angle rotating patch head in an embodiment of the present invention.

[0027] Figure 2 express Figure 1 Sectional view at point AA;

[0028] Figure 3 express Figure 2 A magnified view of a section at point I.

[0029] In the picture:

[0030] 1. Rotary drive component; 11. Fixed housing; 12. Rotating shaft; 2. Elastic bellows; 21. Bellows section; 22. Input shaft; 23. Output shaft; 24. Locking screw; 3. Mandrel; 31. First negative pressure channel; 32. Shaft body; 321. Mounting hole; 322. Blind hole; 323. Connecting plate; 324. Second negative pressure channel; 325. First negative pressure internal air passage; 326. Second negative pressure internal air passage; 33. Plug; 331. Center hole; 332. Connecting lug; 3 4. Annular seal; 35. Magnetic component; 4. Nozzle; 41. Adsorption channel; 5. Support cylinder; 51. Positive pressure air path; 52. Outer cylinder; 53. Inner cylinder; 531. First inner annular groove; 532. Second inner annular groove; 533. Annular air inlet groove; 534. Air outlet; 535. Outer annular groove; 536. Connecting hole; 54. Sealing ring; 55. Air path connector; 6. Position sensing assembly; 61. Sensor body; 62. Detection plate; 621. Threaded cylinder; 7. Connecting flange. Detailed Implementation

[0031] To better understand the above-mentioned objectives, features, and advantages of the present invention, the solutions of the present invention will be further described below. It should be noted that, unless otherwise specified, the embodiments of the present invention and the features thereof can be combined with each other.

[0032] Many specific details are set forth in the following description in order to provide a full understanding of the invention, but the invention may also be practiced in other ways different from those described herein; obviously, the embodiments in the specification are only some embodiments of the invention, and not all embodiments.

[0033] The specific embodiments of the present invention will now be described in detail with reference to the accompanying drawings.

[0034] Example 1

[0035] Reference Figures 1 to 3 This embodiment provides a precision pressure-controlled large-angle rotating patch head, including a rotating drive 1, an elastic bellows 2, a mandrel 3, a suction nozzle 4, and a support cylinder 5.

[0036] The rotary drive component 1 includes a fixed housing 11 and a rotary shaft 12. The rotary shaft 12 is located inside the fixed housing 11 and has a hollow structure. The rotary shaft 12 is arranged vertically, and the top end of the rotary shaft 12 is used to connect to a positive pressure source.

[0037] Specifically, the structure of the rotary drive component 1 is not limited. For example... Figure 2 As shown, the rotary drive component 1 in this embodiment is a hollow shaft motor. A hollow shaft motor is a mature structure in the field, meaning that both the upper and lower ends of the rotary shaft 12 extend outwards from the fixed housing 11, and the rotary shaft 12 is a hollow structure. In other embodiments, the rotary drive component 1 can also adopt a combined structure of a rotary power component, a rotary shaft 12, and a transmission component. The rotary power component can adopt a servo motor or similar structure, the rotary shaft 12 can be designed as a hollow structure, and the transmission component can adopt a common structure such as a gear pair. The rotary power component drives the rotary shaft 12 to rotate through the transmission component.

[0038] The flexible bellows 2 includes a bellows section 21, an input shaft 22 located at the top of the bellows section 21, and an output shaft 23 located at the bottom of the bellows section 21. The input shaft 22 is a hollow structure and is sealed to the rotating shaft 12. The output shaft 23 is a closed structure to form a pressure chamber inside the bellows section 21.

[0039] Specifically, the connection method of the bellows section 21, the input shaft 22 and the output shaft 23 is not limited. They can be connected by integral molding or by welding or other connection methods.

[0040] It is easy to understand that the bellows section 21 can elastically deform along its axial direction, and the bellows section 21 can withstand a certain torque in order to transmit the output torque of the rotary drive 1.

[0041] Specifically, the connection method between the input shaft 22 and the rotation shaft 12 is not limited. For example... Figure 2As shown, in this embodiment, the input shaft 22 and the rotating shaft 12 are connected by threads, and a locking screw 24 extending radially along the top sidewall of the input shaft 22 is installed. After the input shaft 22 and the rotating shaft 12 are screwed into place, the locking screw 24 completes the locking and fixation. In other embodiments, the input shaft 22 can also be interference-fitted onto the outside of the rotating shaft 12, or it can be fixed by a flange connection.

[0042] The top end of the spindle 3 is connected to the output shaft 23, and the center of the spindle 3 is provided with a first negative pressure channel 31 extending to its bottom end.

[0043] Specifically, the connection method between the spindle 3 and the output shaft 23 is not limited. For example... Figure 2 and Figure 3 As shown, in this embodiment, the spindle 3 and the output shaft 23 are indirectly connected via a detection piece 62 (the detection piece 62 is a component of the position sensing assembly 6, which will be described in detail later). The detection piece 62 is provided with a threaded cylinder 621, and the top of the spindle 3 has a threaded hole. The output shaft 23 is screwed into the threaded cylinder 621, and the bottom of the threaded cylinder 621 is screwed into the threaded hole, thus achieving the connection and fixation between the spindle 3 and the output shaft 23. In other embodiments, the spindle 3 and the output shaft 23 can also be directly connected by welding, screws, or other methods.

[0044] Specifically, the structure of mandrel 3 is not limited. For example... Figure 3 As shown, the mandrel 3 in this embodiment includes a shaft body 32 and a plunger 33. The bottom end of the shaft body 32 has a mounting hole 321, and the shaft body 32 also has a blind hole 322 extending from its bottom end to the mounting hole 321. The plunger 33 is a flexible structure and is fitted into the mounting hole 321. The plunger 33 has a central hole 331. The blind hole 322, the mounting hole 321, and the central hole 331 together form the first negative pressure channel 31. The mandrel 3 adopts a combined structure of the shaft body 32 and the plunger 33. Utilizing the structural characteristics of the plunger 33, it is easier to ensure a tight seal between the mandrel 3 and the nozzle 4, and it is also easier to replace the plunger 33 when the sealing performance deteriorates. In other embodiments, the mandrel 3 can also be designed as a single piece, with a hole directly drilled in the mandrel 3 to form the first negative pressure channel 31.

[0045] As an improved structure of the plunger 33, this embodiment also provides a flared docking lug 332 at the bottom end of the plunger 33. When the mandrel 3 is docked with the nozzle 4, the docking lug 332 expands and deforms outward under pressure, which is more conducive to ensuring a sealed docking between the mandrel 3 and the nozzle 4.

[0046] The suction nozzle 4 is connected to the bottom of the spindle 3. The suction nozzle 4 has an adsorption channel 41 at its center, and the adsorption channel 41 is sealed and connected to the first negative pressure channel 31.

[0047] It should be noted that the aforementioned docking ear 332 abuts against the top surface of the suction nozzle 4, and the docking ear 332 surrounds the peripheral area of ​​the adsorption channel 41 to achieve a sealed connection between the central hole 331 and the adsorption channel 41, thereby achieving a sealed connection between the adsorption channel 41 and the first negative pressure channel 31.

[0048] Specifically, the connection method between the spindle 3 and the nozzle 4 is not limited. For example... Figure 3 As shown, the bottom end of the shaft body 32 in this embodiment is provided with an annular connecting plate 323. The plug 33 is located in the hollow area of ​​the connecting plate 323. The shaft body 32 is also provided with a second negative pressure channel 324. The bottom end of the second negative pressure channel 324 extends between the connecting plate 323 and the suction nozzle 4. An annular seal 34 is provided between the bottom surface of the connecting plate 323 and the top edge of the suction nozzle 4. In use, under the action of the annular seal 34, a sealing area is formed between the connecting plate 323 and the suction nozzle 4. The second negative pressure channel 324 communicates with this sealing area. When a negative pressure is generated in the second negative pressure channel 324, the suction nozzle 4 will be adsorbed and fixed below the connecting plate 323, and at the same time, the adsorption channel 41 of the suction nozzle 4 will be connected with the central hole 331 of the plug 33. This connection method can fix the suction nozzle 4 relative to the spindle 3 when a negative pressure is generated in the second negative pressure channel 324, and can detach the suction nozzle 4 from the spindle 3 when the negative pressure is eliminated in the second negative pressure channel 324, which is more conducive to the automated assembly and disassembly of the suction nozzle 4.

[0049] To improve the stability of suction from nozzle 4, this embodiment adds magnetic suction to the negative pressure suction, such as... Figure 3 As shown, the specific structure is as follows: Multiple magnetic components 35 are evenly distributed along the circumference of the bottom surface of the connecting plate 323. The top of the suction nozzle 4 is made of ferromagnetic material, and a gap is left between the magnetic components 35 and the top surface of the suction nozzle 4. When the suction nozzle 4 is connected to the bottom of the connecting plate 323 by negative pressure adsorption, the magnetic components 35 generate a magnetic attraction force on the top of the ferromagnetic material suction nozzle 4, thereby improving the stability of the suction nozzle 4. The aforementioned "gap" is designed to ensure that while the magnetic components 35 generate a magnetic attraction force, excessive magnetic attraction force caused by direct contact between the magnetic components 35 and the ferromagnetic material is avoided, which would make it difficult to remove the suction nozzle 4, thus facilitating the automated assembly and disassembly of the suction nozzle 4.

[0050] The support cylinder 5 is connected to the bottom of the fixed housing 11 and sleeved on the outside of the mandrel 3. The support cylinder 5 has a positive pressure air passage 51. One end of the positive pressure air passage 51 extends to the outside of the support cylinder 5 to connect to the positive pressure source, and the other end of the positive pressure air passage 51 extends between the mandrel 3 and the support cylinder 5 so that the mandrel 3 and the support cylinder 5 form an air bearing. The inner wall of the support cylinder 5 has a first inner ring groove 531. The first inner ring groove 531 is connected to the outside of the support cylinder 5 through a first negative pressure external air passage opened in the support cylinder 5 to connect to the negative pressure source. The first inner ring groove 531 is also connected to the first negative pressure channel 31 through a first negative pressure internal air passage 325 opened in the mandrel 3.

[0051] It should be noted that the aforementioned blind hole 322 is connected to the first negative pressure internal air passage 325; the inner wall of the aforementioned support cylinder 5 is provided with a second inner ring groove 532, which is connected to the outside of the support cylinder 5 through a second negative pressure external air passage opened in the support cylinder 5 to connect to a negative pressure source. The second inner ring groove 532 is also connected to a second negative pressure channel 324 through a second negative pressure internal air passage 326 opened in the shaft body 32, so that an external negative pressure source can provide negative pressure to the second negative pressure channel 324.

[0052] It is easy to understand that the purpose of setting the "first inner ring groove 531" and the "second inner ring groove 532" is to match the rotational movement of the mandrel 3 relative to the support cylinder 5. If the first inner ring groove 531 and the second inner ring groove 532 adopt the design of circumferential local grooves, when the mandrel 3 rotates at a certain angle, since the first negative pressure internal air passage 325 and the second negative pressure internal air passage 326 are both opened on the mandrel 3, the first negative pressure internal air passage 325 and the corresponding circumferential local groove will be misaligned and unable to connect. The second negative pressure internal air passage 326 and the corresponding circumferential local groove will also be misaligned and unable to connect.

[0053] To ensure the stability of the air bearing, the positive pressure air passage 51 in this embodiment is provided in two sets, which are located at the top and bottom of the support cylinder 5 respectively. The first inner ring groove 531 and the second inner ring groove 532 are located between the two sets of positive pressure air passages 51.

[0054] Specifically, the structure of the first negative pressure internal air passage 325 and the second negative pressure internal air passage 326 is not limited. They can be straight or curved channels, which are easy for those skilled in the art to design and are not shown in the figure.

[0055] Specifically, the structures of the first negative pressure external air passage, the second negative pressure external air passage, and the positive pressure air passage 51 are not limited. For example... Figure 3As shown, the support cylinder 5 in this embodiment includes an outer cylinder 52 and an inner cylinder 53. The inner cylinder 53 is sleeved on the outside of the mandrel 3, and the inner cylinder 53 and the mandrel 3 form an air bearing. The outer side wall of the inner cylinder 53 is provided with an outer ring groove 535 corresponding to the first inner ring groove 531 and the second inner ring groove 532. The outer ring groove 535 is connected to the corresponding first inner ring groove 531 or second inner ring groove 532 through a plurality of circumferentially distributed connecting holes 536, and the outer ring groove 535 is connected to the outside of the outer cylinder 52. The positive pressure air passage 51 includes an annular air inlet groove 533 and an air blowing port 534. The annular air inlet groove 533 is located on the outer side wall of the inner cylinder 53 and connects to the outer side of the outer cylinder 52. Multiple air blowing ports 534 are provided and are evenly distributed along the circumference of the inner cylinder 53. One end of the air blowing port 534 extends between the inner cylinder 53 and the mandrel 3 and the other end connects to the annular air inlet groove 533. The annular air inlet groove 533 and the outer annular groove 535, as well as adjacent outer annular grooves 535, are separated by sealing rings 54. The annular inlet groove 533 and the outer annular groove 535 can be directly connected to the outside of the outer cylinder 52 through the air passage connector 55 installed on the outer cylinder 52, making the connection more convenient; in addition, the annular inlet groove 533 and the outer annular groove 535 can also meet the large flow requirements of negative pressure or positive pressure; the annular inlet groove 533 and the outer annular groove 535 can also homogenize the airflow of the external positive pressure source or negative pressure source, ensuring the uniformity of negative pressure in the first inner annular groove 531 and the second inner annular groove 532 as well as the uniformity of positive pressure in each blowing port 534 of the positive pressure air passage 51.

[0056] It should be noted that, theoretically, the first inner ring groove 531, the second inner ring groove 532, and the air outlet 534 should also be separated by a sealing structure located between the inner cylinder 53 and the spindle 3. However, setting a sealing structure would increase the damping of the spindle 3's rotation. Therefore, this embodiment does not design such a sealing structure. Instead, the micro-gap between the spindle 3 and the inner cylinder 53 can both ensure the generation of the air film in the air bearing and play a relative isolation role, avoiding mutual influence between the first inner ring groove 531 and the second inner ring groove 532 under negative pressure and the air outlet 534 under positive pressure, and also reducing the damping of the spindle 3's rotation.

[0057] It is important to note that Figure 3 Above the first inner ring groove 531, there is also an annular groove, which serves as a backup structure to accommodate spindles 3 with more negative pressure channels.

[0058] Specifically, the method of fixing the support cylinder 5 to the fixed housing 11 is not limited. For example... Figure 2 As shown, in this embodiment, the fixed housing 11 is indirectly fixedly connected to the outer cylinder 52 of the support cylinder 5 via the connecting flange 7. In other embodiments, the axial length of the fixed housing 11 or the outer cylinder 52 can be increased, and the fixed housing 11 and the outer cylinder 52 can be directly fixedly connected.

[0059] In addition, the patch head in this embodiment is also provided with a positioning sensing component 6, such as Figure 3 As shown, the positioning sensing component 6 includes a sensor body 61 and a detection plate 62. The sensor body 61 is mounted on the support cylinder 5, and the detection plate 62 is connected between the elastic bellows 2 and the spindle 3. The detection plate 62 overlaps the sensor body 61, and the positioning sensing component 6 sends a positioning signal when the detection plate 62 is lifted to the point of detachment from the sensor body 61. In use, the detection plate 62 naturally overlaps the sensor body 61. When the suction nozzle 4 contacts the chip, the rotary drive 1 and the support cylinder 5 continue to descend. At this time, the suction nozzle 4, the spindle 3, and the detection plate 62 tend to rise relative to the support cylinder 5 due to the obstruction of the chip. When the detection plate 62 detaches from the sensor body 61, the positioning sensing component 6 sends a positioning signal, indicating that the suction nozzle 4 has fully contacted the chip.

[0060] The working principle of the precision pressure-controlled large-angle rotating patch head in this embodiment is as follows.

[0061] During adsorption, the patch head descends to contact the chip and triggers a positioning signal. Since the detection patch 62 has detached from the sensor body 61 at this time, and the spindle 3 and the support cylinder 5 form an air bearing structure with minimal damping, the air pressure in the pressure chamber is transmitted to the chip through the overall structure formed by the detection patch 62, the spindle 3, and the nozzle 4. Thus, the pressure of the chip can be adjusted by adjusting the pressure in the pressure chamber. During position compensation, the rotation drive 1 drives the elastic bellows 2, the detection patch 62, the spindle 3, and the nozzle 4 to rotate as a whole, thereby correcting the rotation angle of the chip. Furthermore, since the spindle 3 and the support cylinder 5 form an air bearing structure with minimal damping, the rotational resistance is small and 360° rotation can be achieved.

[0062] It should be noted that the gas in the pressure chamber can be filled before the positioning signal is triggered to improve work efficiency; alternatively, filling can begin after the positioning signal is triggered. During filling, positive pressure gas at a preset pressure is injected into the pressure chamber of the elastic bellows 2 through the hollow area of ​​the rotating shaft 12.

[0063] Example 2

[0064] This embodiment provides a chip mounter, which includes the precision pressure-controlled large-angle rotating mount head of Embodiment 1.

[0065] It is easy to understand that the above only lists the improvements to the pick and place machine. In addition to the placement head, the pick and place machine also includes necessary structures such as robotic arms.

[0066] The working process of the placement machine in this embodiment is as follows.

[0067] Before placement, the chip is picked up from the cassette or the blue film by the nozzle 4 of the placement head;

[0068] During pickup, the robotic arm first moves along the XY axis to the designated position, and then drives the placement head to move downward along the Z axis. When the nozzle 4 approaches the chip in the hopper, the robotic arm decelerates and moves slowly. When the lower end of the nozzle 4 contacts the upper surface of the chip, the robotic arm stops moving along the Z axis. Then, the placement head applies the target pressure to the chip to ensure complete contact. At the same time, it creates a negative pressure on the nozzle 4 to adsorb the chip onto the nozzle 4. Finally, the Z axis is lifted, and the pickup is completed.

[0069] During chip placement, the robotic arm moves along the XY axis, moving the chip to the vision inspection station. The vision inspection system calculates the chip's XY offset position and θ offset angle. Then, the robotic arm moves along the XY axis, moving the suction nozzle 4 to the placement station. The XY offset position is compensated by the robotic arm's XY movement, and the θ offset angle is compensated by rotating the suction nozzle 4 via the rotary axis 12. Simultaneously, the robotic arm moves the suction nozzle 4 downwards along the Z axis. As the chip approaches the substrate, the robotic arm decelerates and moves slowly. When the lower surface of the chip contacts the upper surface of the substrate, the robotic arm stops moving along the Z axis. Then, the placement head applies target pressure to the substrate, ensuring the adhesive layer between the chip and the substrate is completely flattened and free of air bubbles. At this point, the negative pressure of the suction nozzle 4 is closed, and then the positive pressure of the suction nozzle 4 is opened, detaching the chip from the suction nozzle 4. Finally, the robotic arm lifts upwards along the Z axis, completing the placement process. It is important to note that the positive and negative pressure of the suction nozzle 4 use the same channel, switching between them by connecting to different types of air sources.

[0070] The above are merely specific embodiments of the present invention, enabling those skilled in the art to understand or implement the present invention. Although detailed descriptions have been provided with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features therein; and these modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments, and they should all be covered within the protection scope of the claims.

Claims

1. A precision pressure-controlled large-angle rotary patch head, characterized in that, include: A rotary drive (1) includes a fixed housing (11) and a rotating shaft (12). The rotating shaft (12) is located inside the fixed housing (11) and has a hollow structure. The rotating shaft (12) is arranged vertically, and the top end of the rotating shaft (12) is used to connect to a positive pressure source. The flexible bellows (2) includes a bellows section (21), an input shaft (22) located at the top of the bellows section (21), and an output shaft (23) located at the bottom of the bellows section (21). The input shaft (22) is a hollow structure and is sealed to the rotating shaft (12). The output shaft (23) is a closed structure to form a pressure chamber in the bellows section (21). The mandrel (3) is connected to the output shaft (23) at its top end, and the mandrel (3) has a first negative pressure channel (31) extending to its bottom end at its center. The suction nozzle (4) is connected below the spindle (3). The suction nozzle (4) has an adsorption channel (41) at its center, and the adsorption channel (41) is sealed and connected to the first negative pressure channel (31). A support cylinder (5) is connected below the fixed housing (11) and sleeved on the outside of the mandrel (3). The support cylinder (5) has a positive pressure air passage (51). One end of the positive pressure air passage (51) extends to the outside of the support cylinder (5) to connect to a positive pressure source, and the other end extends between the mandrel (3) and the support cylinder (5) to form an air bearing between the mandrel (3) and the support cylinder (5). The inner wall of the support cylinder (5) has a first inner ring groove (531). The first inner ring groove (531) is connected to the outside of the support cylinder (5) through a first negative pressure external air passage opened in the support cylinder (5) to connect to a negative pressure source. The first inner ring groove (531) is also connected to the first negative pressure channel (31) through a first negative pressure internal air passage (325) opened in the mandrel (3). The position sensing assembly (6) includes a sensor body (61) and a detection piece (62). The sensor body (61) is disposed on the support cylinder (5). The detection piece (62) is connected between the elastic bellows (2) and the spindle (3). The detection piece (62) overlaps the sensor body (61). The position sensing assembly (6) is used to send a position signal when the detection piece (62) is lifted to detach from the sensor body (61). After the chip mounter descends to contact the chip and triggers the positioning signal, the pressure on the chip is adjusted by regulating the pressure inside the pressure chamber.

2. The precision pressure-controlled large-angle rotating patch head according to claim 1, characterized in that, The rotary drive component (1) is a hollow shaft motor.

3. The precision pressure-controlled large-angle rotating patch head according to claim 1, characterized in that, The mandrel (3) includes a shaft body (32) and a plug (33). The bottom end of the shaft body (32) is provided with a mounting hole (321), and the shaft body (32) is also provided with a blind hole (322) extending to the mounting hole (321). The blind hole (322) is connected to the first negative pressure internal air passage (325). The plug (33) is a flexible structure and is sleeved in the mounting hole (321). The plug (33) is provided with a central hole (331). The blind hole (322), the mounting hole (321) and the central hole (331) together form the first negative pressure channel (31), and the central hole (331) is sealed and connected to the adsorption channel (41).

4. The precision pressure-controlled large-angle rotating patch head according to claim 3, characterized in that, The bottom end of the plug (33) is provided with a flared docking ear (332), which abuts against the top surface of the suction nozzle (4) and surrounds the peripheral area of ​​the adsorption channel (41) to achieve a sealed docking between the central hole (331) and the adsorption channel (41).

5. The precision pressure-controlled large-angle rotating patch head according to claim 3 or 4, characterized in that, The bottom end of the shaft body (32) is provided with an annular connecting plate (323). The plunger (33) is located in the hollow area of ​​the connecting plate (323). The shaft body (32) is also provided with a second negative pressure channel (324). The bottom end of the second negative pressure channel (324) extends to the space between the connecting plate (323) and the nozzle (4). An annular seal (34) is provided between the bottom surface of the connecting plate (323) and the top edge of the nozzle (4). The inner wall of the support cylinder (5) is provided with a second inner annular groove (532). The second inner annular groove (532) is connected to the outside of the support cylinder (5) through a second negative pressure external air passage opened in the support cylinder (5) to connect to a negative pressure source. The second inner annular groove (532) is also connected to the second negative pressure channel (324) through a second negative pressure internal air passage (326) opened in the shaft body (32).

6. The precision pressure-controlled large-angle rotary patch head according to claim 5, characterized in that, The bottom surface of the connecting plate (323) is evenly distributed with multiple magnetic elements (35) along its circumference. The top of the suction nozzle (4) is made of ferromagnetic material, and there is a gap between the magnetic elements (35) and the top surface of the suction nozzle (4).

7. The precision pressure-controlled large-angle rotary patch head according to claim 5, characterized in that, The positive pressure air passage (51) is provided in two sets and is located at the top and bottom of the support cylinder (5) respectively. The first inner ring groove (531) and the second inner ring groove (532) are located between the two sets of positive pressure air passages (51).

8. The precision pressure-controlled large-angle rotary patch head according to claim 7, characterized in that, The support cylinder (5) includes an outer cylinder (52) and an inner cylinder (53). The inner cylinder (53) is sleeved on the outside of the mandrel (3), and the inner cylinder (53) and the mandrel (3) form an air bearing. The outer wall of the inner cylinder (53) is provided with an outer ring groove (535) corresponding to the first inner ring groove (531) and the second inner ring groove (532). The outer ring groove (535) is connected to the corresponding first inner ring groove (531) or second inner ring groove (532) through a plurality of circumferentially distributed connecting holes (536), and the outer ring groove (535) is connected to the outside of the outer cylinder (52). The positive pressure The air passage (51) includes an annular air inlet groove (533) and an air blowing port (534). The annular air inlet groove (533) is located on the outer side wall of the inner cylinder (53) and connects to the outer side of the outer cylinder (52). There are multiple air blowing ports (534) and they are evenly distributed along the circumference of the inner cylinder (53). One end of the air blowing port (534) extends between the inner cylinder (53) and the mandrel (3) and the other end connects to the annular air inlet groove (533). The annular air inlet groove (533) and the outer annular groove (535) and the adjacent outer annular groove (535) are all separated by sealing rings (54).

9. A pick-and-place machine, characterized in that, Including the precision pressure-controlled large-angle rotating patch head as described in any one of claims 1 to 8.

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