Myoelectricity sensor, myoelectricity sensor module and myoelectricity sensor device

Abstract

The embodiment of the invention provides a myoelectricity sensor, a myoelectricity sensor module and a myoelectricity sensor device, and relates to the field of electronic devices. In the myoelectricity sensor, a flexible substrate, a device layer, a circuit layer and an electrode layer are stacked, the device layer comprises at least one signal processing device, the electrode layer comprises at least one sensing electrode, and the sensing electrode and the signal processing device are connected through a signal wire to form a myoelectricity sensing unit. Orthographic projections of the sensing electrode and the signal processing device on the flexible substrate are arranged in a staggered manner. According to the design, the flexible substrate is adopted to bear other film layers of the myoelectricity sensor, so that the flexibility of the myoelectricity sensor can be improved, the myoelectricity sensor can be well attached to the skin of a user during use, foreign body sensation generated during attachment is reduced, and the use experience of the user is improved; and the sensing precision reduction caused by the too close distance between the myoelectricity sensor and the sensor can be avoided, and the myoelectricity sensor is ensured to have high detection precision.

Description

Technical Field

[0001] This application relates to the field of electronic device technology, and more specifically, to an electromyography (EMG) sensor, an EMG sensor module, and an EMG sensor device. Background Technology

[0002] An electromyography (EMG) sensor is an electronic measuring device that collects bioelectrical signals from human muscles through electrodes on the skin surface. The EMG sensor collects bioelectrical signals from human muscles through a high-density electrode array.

[0003] In related technologies, electromyography (EMG) sensors have a structure similar to flexible printed circuits (FPCs), using an entire metal layer (such as a copper layer) as a substrate layer to support other membrane layers of the EMG sensor. The overall flexibility of EMG sensors is poor, and they will produce a greater foreign body sensation after being attached to human skin. The larger the size of the EMG sensor, the more severe the foreign body sensation, which seriously affects the user's experience. Summary of the Invention

[0004] In order to overcome the technical problems mentioned in the above technical background, this application provides an electromyography (EMG) sensor, an EMG sensor module, and an EMG sensor device.

[0005] A first aspect of this application provides an electromyography (EMG) sensor comprising: Flexible substrate; A device layer is located on the flexible substrate, wherein the device layer includes at least one signal processing device; A circuit layer, located on the side of the device layer away from the flexible substrate, includes signal traces; An electrode layer is located on the side of the circuit layer away from the flexible substrate. The electrode layer includes at least one sensing electrode. The sensing electrode and the signal processing device are connected through signal traces in the circuit layer to form an electromyography (EMG) sensing unit. The orthographic projection of the sensing electrode on the flexible substrate is offset from the orthographic projection of the signal processing device on the flexible substrate.

[0006] In one possible implementation of this application, the device layer includes a plurality of signal processing devices, and the electrode layer includes a plurality of sensing electrodes; In at least a portion of the electromyography sensing units, the orthographic projection of the sensing electrode on the flexible substrate is located on the same side as the orthographic projection of the corresponding signal processing device on the flexible substrate.

[0007] In one possible implementation of this application, the signal trace includes at least one L-shaped segment in a cross-section along the thickness direction of the flexible substrate; The orthographic projection shape of the signal trace on the flexible substrate includes a wavy or sawtooth shape.

[0008] In one possible implementation of this application, the electromyography sensor further includes signal input traces and signal output traces; The signal input trace is connected to the signal processing device to provide an input signal to the signal processing device. The signal output trace is connected to the signal processing device and is used to transmit the signal after the electromyographic signal collected by the sensing electrode is processed by the signal processing device. The same signal input trace is electrically connected to the signal processing device in multiple different electromyography sensing units, and different signal output traces are electrically connected to the signal processing device in the corresponding electromyography sensing unit. Preferably, the plurality of electromyography sensing units are arranged along a first direction, and the signal input trace and the signal output trace extend along the first direction; In two adjacent electromyography (EMG) sensing units arranged along the first direction, the orthographic projection of the sensing electrode on the flexible substrate is located on the same side of the orthographic projection of the signal processing device on the flexible substrate, or the orthographic projection of the sensing electrode on the flexible substrate is located on the opposite side of the orthographic projection of the signal processing device on the flexible substrate.

[0009] In one possible implementation of this application, the device layer includes a plurality of conductive layers and an insulating layer located between adjacent conductive layers; The signal input trace is located within at least one conductive layer or the circuit layer in the device layer; The signal output trace is located within at least one conductive layer or the circuit layer in the device layer; Preferably, the signal input trace or the signal output trace is formed by multiple conductive layers in the device layer; Preferably, the signal input trace, the signal output trace, and the signal processing device are located in different conductive layers; The orthographic projection of the signal input trace or the signal output trace on the flexible substrate at least partially overlaps with the orthographic projection of the signal processing device on the flexible substrate.

[0010] In one possible implementation of this application, the electromyography sensor further includes an electromagnetic shielding layer located on the side of the device layer away from the flexible substrate, and the electromagnetic shielding layer is insulated from the sensing electrode; The orthographic projection of the signal processing device on the flexible substrate is located within the orthographic projection of the electromagnetic shielding layer on the flexible substrate; Preferably, the signal processing device includes an operational amplifier.

[0011] In one possible implementation of this application, the electromagnetic shielding layer is located on the side of the circuit layer away from the flexible substrate, and the electromagnetic shielding layer is disposed in the same layer as the sensing electrode; The electromagnetic shielding layer includes an opening in the electromagnetic shielding layer, and the sensing electrode is exposed from the location of the opening in the electromagnetic shielding layer; The orthographic projection of the sensing electrode on the flexible substrate does not overlap with the orthographic projection of the shielding layer on the flexible substrate.

[0012] In one possible implementation of this application, the electromagnetic shielding layer is located between the circuit layer and the electrode layer; The signal trace passes through a via on the electromagnetic shielding layer and is connected to the sensing electrode. The orthographic projection of the sensing electrode on the flexible substrate lies within the orthographic projection of the shielding layer on the flexible substrate.

[0013] Secondly, this application also provides an electromyography sensor module, wherein the first protective layer further includes a second opening spaced apart from the first opening; The first opening has the same shape as the second opening, and the orthographic projection area of ​​the first opening on the flexible substrate is the same as the orthographic projection area of ​​the second opening on the flexible substrate; At least a portion of the second opening is connected to form an opening region, and the orthographic projection of the opening region on the flexible substrate is misaligned with the orthographic projection of the signal processing device on the flexible substrate; Preferably, in the opening region, the orthographic projection shape of the signal trace on the flexible substrate includes a wavy or sawtooth shape.

[0014] In one possible implementation of this application, the first protective layer includes a substrate layer and a first adhesive layer, wherein the substrate layer is fixed to the electromyography sensor via the first adhesive layer; The elastic modulus of the substrate layer ranges from 2.5 GPa to 3.5 GPa, and the elastic modulus of the first adhesive layer ranges from 25 KPa to 35 KPa.

[0015] In one possible implementation of this application, the thickness of the sensing electrode is 0.8 micrometers to 1.2 micrometers in the direction perpendicular to the plane of the flexible substrate, and the thickness of the first adhesive layer is 10 micrometers to 20 micrometers.

[0016] In one possible implementation of this application, the electromyography sensor module further includes a support membrane and a second adhesion layer; The support membrane is fixed to the flexible substrate of the electromyography sensor via the second adhesive layer.

[0017] In one possible implementation of this application, in a plane perpendicular to the flexible substrate, the thickness of the flexible substrate is in the range of 10 micrometers to 20 micrometers, the thickness of the substrate layer is in the range of 20 micrometers to 30 micrometers, the thickness of the support film is in the range of 20 micrometers to 30 micrometers, the thickness of the first adhesive layer is in the range of 10 micrometers to 20 micrometers, and the thickness of the second adhesive layer is in the range of 10 micrometers to 20 micrometers. The flexible substrate, the substrate layer, and the support film are made of the same material, and the first adhesive layer and the second adhesive layer are made of the same material. Preferably, the flexible substrate, the substrate layer, and the support film are made of polyimide, and the first adhesive layer and the second adhesive layer are made of acrylic adhesive.

[0018] In one possible implementation of this application, the electromyography sensor module further includes a conductive adhesive layer and a metal layer; The conductive adhesive layer is located on the side of the support film away from the flexible substrate; The metal layer is located on the side of the conductive adhesive layer away from the flexible substrate; The conductive adhesive layer and the metal layer extend relative to one side of the electromyography sensor.

[0019] In one possible implementation of this application, the elastic modulus of the metal layer is 50 GPa-100 GPa, and the thickness of the metal layer in the plane perpendicular to the flexible substrate is 5 micrometers-15 micrometers. The metal layer includes an electrolytic copper layer; Preferably, the thickness of the conductive adhesive layer in a plane perpendicular to the flexible substrate is in the range of 15 micrometers to 25 micrometers.

[0020] In one possible implementation of this application, the electromyography sensor module includes a flexible circuit board; The flexible circuit board is bonded to the electromyography sensor, and an exposed metal area is provided on the side of the flexible circuit board bonded to the electromyography sensor. The metal layer extending from the side of the electromyography sensor is electrically connected to the exposed metal area through the conductive adhesive layer.

[0021] In one possible implementation of this application, an accommodating space is formed between the metal layer extending from the electromyography sensor and the flexible circuit board; The electromyography sensor module also includes a waterproof adhesive, which fills the accommodating space.

[0022] Secondly, this application also provides an electromyography (EMG) sensor device, including an EMG sensor in any possible implementation of the first aspect, or including an EMG sensor module in any possible implementation of the second aspect. Attached Figure Description

[0023] To more clearly illustrate the technical solutions of the embodiments of this application, the accompanying drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this application and should not be regarded as a limitation of the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0024] Figure 1 One of the schematic diagrams of the membrane structure of the electromyography sensor provided in the embodiments of this application is illustrated; Figure 2 A schematic diagram illustrating the distribution of electromyographic sensing units is provided. Figure 3 A second schematic diagram of the membrane structure of the electromyography sensor provided in the embodiments of this application is illustrated. Figure 4 A schematic diagram illustrating the orthographic projection shape of a signal trace on a flexible substrate is shown. Figure 5 A schematic diagram illustrating the distribution of multiple electromyographic sensing units is shown. Figure 6 Another schematic diagram illustrating the distribution of multiple electromyographic sensing units is shown; Figure 7 Example 3 shows a schematic diagram of the membrane structure of the electromyography sensor provided in the embodiments of this application; Figure 8 A schematic diagram illustrating the distribution of device layers, wiring layers, and light-shielding layers is provided. Figure 9 Example four is a schematic diagram of the membrane structure of the electromyography sensor provided in the embodiments of this application; Figure 10 Example five is a schematic diagram of the membrane structure of the electromyography sensor provided in the embodiments of this application; Figure 11 One of the schematic diagrams of the membrane structure of the electromyography sensor module provided in the embodiments of this application is illustrated; Figure 12 A schematic diagram illustrating the distribution of the first and second openings is provided. Figure 13 A second schematic diagram of the membrane structure of the electromyography sensor module provided in the embodiments of this application is illustrated. Figure 14 Example 3 shows a schematic diagram of the membrane structure of the electromyography sensor module provided in the embodiments of this application; Figure 15 A schematic diagram illustrating the distribution of the neutral layer and metal traces in a bent state is shown in the relevant technology. Figure 16 This example illustrates the distribution relationship between the neutral layer and the membrane layer of the electromyography sensor module provided in this example under a bent state; Figure 17 The fourth example illustrates the membrane structure of the electromyography sensor module provided in the embodiments of this application.

[0025] Key Icons: 1-EMG Sensor Module; 10-EMG Sensor; 11-Flexible Substrate; 12-Device Layer; 121-Signal Processing Device; 13-Circuit Layer; 131-Signal Traces; 14-Electrode Layer; 141-Sensing Electrode; 15-Signal Input Traces; 16-Signal Output Traces; 17-Electromagnetic Shielding Layer; 1701-Electromagnetic Shielding Layer Opening; 18-Light-Shielding Layer; 181-First Sublayer; 182-Second Sublayer; 19-Bonding Electrode; 20-EMG Sensing Unit; 30-First Protective Layer; 301-First Opening; 302-Second Opening; 31-First Adhesive Layer; 32-Substrate Layer; 40-Support Film; 50-Second Adhesive Layer; 60-Conductive Adhesive Layer; 70-Metal Layer; 80-Flexible Circuit Board; 90-Waterproof Adhesive; 100-Accommodation Space. Detailed Implementation

[0026] To make the objectives, technical solutions, and advantages of the embodiments of this application clearer, the technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. The components of the embodiments of this application described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.

[0027] Therefore, the following detailed description of the embodiments of this application provided in the accompanying drawings is not intended to limit the scope of the claimed application, but merely to illustrate selected embodiments of the application. All other embodiments obtained by those skilled in the art based on the embodiments of this application without inventive effort are within the scope of protection of this application.

[0028] It should be noted that similar reference numerals and letters in the following figures indicate similar items; therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures. It should be noted that, unless otherwise specified, different features in the embodiments of this application can be combined with each other.

[0029] For ease of understanding, the accompanying diagram shows the mutually orthogonal X-axis, Y-axis, and Z-axis. The direction along the X-axis is called the X-direction, the direction along the Y-axis is called the Y-direction, and the direction along the Z-axis is called the Z-direction. The Z-direction is the normal direction relative to the plane containing the X and Y directions. Furthermore, a view where various elements are observed parallel to the plane containing the X and Y directions is called a top view. Alternatively, the planes in the X and Y directions can be planes parallel to the display surface of the display panel, and the Z-direction can be a direction parallel to the thickness direction of the display panel.

[0030] It should be understood that the accompanying drawings in this application are for illustrative and descriptive purposes only and are not intended to limit the scope of protection of this application. Furthermore, it should be understood that the schematic drawings are not drawn to scale.

[0031] In the description of this application, it should be noted that the terms "upper," "lower," etc., indicating the orientation or positional relationship are based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship commonly used when the product of this application is in use. They are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation on this application. For example, for certain elements, sometimes the terms "upper" or "above" are used when describing the position of an element located in the Z direction, and "lower" or "below" are used when describing the position of an element located in the opposite direction. In addition, when using terms such as "upper," "above," "lower," "below," and "relative" to define the positional relationship between two elements, it includes not only the state in which the two elements are directly connected, but also the state in which the two elements are separated by a gap or other elements. Furthermore, the terms "first," "second," "third," etc., are only used to distinguish descriptions and should not be construed as indicating or implying relative importance.

[0032] To address the technical problems mentioned in the background section, the inventors have innovatively designed the following technical solutions, which will be described in detail below with reference to the accompanying drawings. It should be noted that the deficiencies in the existing solutions are the result of the inventors' practical experience and careful research. Therefore, the discovery process of the aforementioned technical problems and the solutions proposed in this embodiment below are contributions made by the inventors to this application during the invention process, and should not be construed as technical content known to those skilled in the art.

[0033] Please refer to Figure 1 , Figure 1 This is a schematic diagram of the membrane structure of the electromyography (EMG) sensor provided in the embodiments of this application. The EMG sensor 10 includes a flexible substrate 11, a device layer 12, a circuit layer 13, and an electrode layer 14.

[0034] The flexible substrate 11 can be made of a flexible material; for example, the flexible substrate 11 can be made of flexible polyimide.

[0035] Device layer 12 is located on flexible substrate 11. Device layer 12 includes multiple stacked conductive layers and insulating layers located between adjacent conductive layers. Device layer 12 is formed on flexible substrate 11 by processes such as exposure, etching, chemical vapor deposition (CVD), and physical vapor deposition (PVD). At least one signal processing device 121 is formed in device layer 12.

[0036] The circuit layer 13 is located on the side of the device layer 12 away from the flexible substrate 11. The circuit layer 13 may include signal traces 131 and an insulating layer covering the signal traces 131.

[0037] The electrode layer 14 is located on the side of the circuit layer 13 away from the flexible substrate 11. Specifically, the electrode layer 14 is located on the insulating layer in the circuit layer 13. The electrode layer 14 includes at least one sensing electrode 141, wherein the sensing electrode 141 is used to collect bioelectrical signals from human muscles.

[0038] In this embodiment, the sensing electrode 141 and the signal processing device 121 are connected through the signal trace 131 in the circuit layer 13 to form an electromyography sensing unit 20. The electromyography sensor 10 may include at least one electromyography sensing unit 20.

[0039] After analyzing the structure of the electromyography sensor 10 in the related technology, the inventors found that there is an overlap between the sensing electrode 141 and the signal processing device 121. Through experimental testing, it was found that the electromyography signal is relatively weak. When the two overlap, the detected bioelectric signal has a certain error. The specific reason is that at the overlapping position, the distance between the sensing electrode 141 and the signal processing device 121 is too small, which will cause signal interference between the two.

[0040] To solve the above problems, in this embodiment, the orthographic projection of the sensing electrode 141 on the flexible substrate 11 is misaligned with the orthographic projection of the signal processing device 121 on the flexible substrate 11. Furthermore, the sensing electrode 141 and the signal processing device 121 are spaced apart on the flexible substrate 11 by their orthogonal projections. In the above structure, using the flexible substrate 11 to support the other membrane layers of the electromyography sensor 10 can improve the flexibility of the electromyography sensor 10, making it easier for the electromyography sensor 10 to fit well against the user's skin during use, reducing the foreign body sensation during contact and improving the user experience. In addition, the staggered arrangement of the sensing electrode 141 and the signal processing device 121 can also avoid the decrease in sensing accuracy caused by their close proximity, ensuring that the electromyography sensor 10 has high detection accuracy.

[0041] In one possible implementation, please refer to Figure 2 The device layer 12 includes a plurality of signal processing devices 121, and the electrode layer 14 includes a plurality of sensing electrodes 141.

[0042] In this embodiment, multiple sensing electrodes 141 are arranged in an array, and the electromyography sensor 10 detects the bioelectric signals of human muscles at different locations through the sensing electrodes 141 distributed at different positions.

[0043] In this embodiment, to increase the stability of the electromyography sensor 10 detection, the distribution density of the sensing electrodes 141 can be increased, that is, the number of sensing electrodes 141 per unit area can be increased, reducing the problem of large variations in detection results caused by a small number of sensing electrodes 141 per unit area. For this purpose, signal processing devices 121 corresponding to sensing electrodes 141 in adjacent rows or columns can be stacked. Specifically, for example... Figure 3 As shown, signal processing devices 121 corresponding to adjacent rows or columns of sensing electrodes 141 can be placed in different film layers, and the problem of signal crosstalk between them can be solved by setting an electromagnetic shielding layer (not shown in the figure) between the stacked signal processing devices 121. In addition, a planarization layer can be made in the area where the signal processing devices 121 are stacked, for example, a planarization layer formed by a rigid material such as silicon nitride or silicon oxide, to ensure that the flatness of the area where the signal processing devices 121 are located is conducive to the fabrication of the film layers in the signal processing devices 121. The area where the sensing electrodes 141 are located is not provided with this planarization layer to ensure the flexibility of the area where the sensing electrodes 141 are located, so that the sensing electrodes 141 can fit tightly to human skin.

[0044] In this embodiment, please refer to Figure 2 In at least a portion of the electromyography sensing unit 20, the orthographic projection of the sensing electrode 141 onto the flexible substrate 11 is located on the same side as the orthographic projection of the corresponding signal processing device 121 onto the flexible substrate 11. For example, in... Figure 2 In the figure, two electromyography (EMG) sensing units 20 are arranged along a first direction (X direction in the figure). In one EMG sensing unit 20, the sensing electrode 14 is located above the corresponding signal processing device 121; in the other EMG sensing unit 20, the sensing electrode 14 is also located above the corresponding signal processing device 121.

[0045] The minimum distance between the orthographic projections of the sensing electrode 141 and the signal processing device 121 on the flexible substrate 11 is greater than or equal to half the width of the sensing electrode 141. In the direction from which the orthographic projection of the sensing electrode 141 on the flexible substrate 11 points to the orthographic projection of the signal processing device 121 on the flexible substrate 11, the distance between their orthographic projections is greater than or equal to half the width of the sensing electrode 141 in the pointing direction. This ensures that the sensing electrode 141 and the signal processing device 121 are spaced a certain distance apart in the planar direction, thus preventing lateral crosstalk.

[0046] In one possible implementation, refer to Figure 1 On the cross-section of the flexible substrate 11 in the thickness direction Z, the signal trace 131 includes at least one L-shaped segment. That is, the signal trace 131 includes at least one segment in the thickness direction Z of the flexible substrate 11. A segment exists on a plane parallel to the flexible substrate 11, thus separating the sensing electrode 141 and the signal processing device 121 on the cross-section of the flexible substrate 11 in the thickness direction Z. By varying the orthographic projections of the sensing electrode 141 and the signal processing device 121 onto the flexible substrate 11, and by providing the signal trace 131 in the Z direction, electromagnetic induction interference is eliminated between the sensing electrode 141, the signal trace 131, and the signal processing device 121 in the X, Y, and Z directions, thereby improving the accuracy of the sensing signal.

[0047] Please refer to Figure 4 , Figure 4 A schematic diagram illustrating the orthographic projection shape of the signal trace 131 on the flexible substrate 11 is provided. In this embodiment, the orthographic projection shape of the signal trace 131 on the flexible substrate 11 includes a wavy line or a sawtooth shape. This design increases the compression and tensile strength of the signal trace 131, preventing it from breaking due to bending during use of the electromyography sensor 10, thus affecting the function of the electromyography sensor 10.

[0048] Further, please refer to Figure 5 In this embodiment, the electromyography sensor 10 further includes a signal input line 15 and a signal output line 16. The signal input line 15 is connected to the signal processing device 121 to provide an input signal to the signal processing device 121. The signal output line 16 is connected to the signal processing device 121 and is used to transmit the signal after the electromyography signal collected by the sensing electrode 141 is processed by the signal processing device 121.

[0049] To enhance the compression and tensile strength of the signal input trace 15 and the signal output trace 16, in one possible implementation, the signal input trace 15 and the signal output trace 16 can be entirely designed as wavy or sawtooth. In another possible implementation, the signal input trace 15 and the signal output trace 16 can also be partially designed as wavy or sawtooth; for example, the portions of the signal input trace 15 and the signal output trace 16 that do not overlap with the signal processing device 121 are designed as wavy or sawtooth.

[0050] In one possible implementation, the same signal input line 15 is electrically connected to signal processing devices 121 in multiple different electromyography (EMG) sensing units 20, and different signal output lines 16 are electrically connected to the corresponding signal processing devices 121 in the corresponding EMG sensing unit 20. In other words, one signal input line 15 can provide input signals to the signal processing devices 12 in different EMG sensing units 20, while one signal output line 16 is connected to one corresponding signal processing device 121, and one signal output line 16 only outputs the signal processed by one signal processing device 121.

[0051] Alternatively, please refer to Figure 5 and Figure 6 Multiple electromyography (EMG) sensing units 20 are arranged along a first direction (X direction in the figure). Signal input lines 15 and signal output lines 16 extend along the first direction. Each signal input line 15 and signal output line 16 includes a main body and a branch. The main body of each signal input line 15 and signal output line 16 extends along the first direction, and the branch of the signal input line 15 is connected to a respective signal processing device 121. The branch of the signal output line 16 is also connected to a corresponding signal processing device 121. The signal input lines 15 and signal output lines 16 are insulated from each other. For example, the signal input line 15 may be located between the signal processing device 121 and the signal output line 16, i.e., in a second direction (Y direction in the figure), the distance between the signal processing device 121 and the signal input line 15 is less than the distance between the signal processing device 121 and the signal output line 16.

[0052] In one possible implementation, among two adjacent electromyographic sensing units 10 arranged along the first direction, such as Figure 5 As shown, the orthographic projection of the sensing electrode 141 on the flexible substrate 11 is located on the same side as the orthographic projection of the signal processing device 121 on the flexible substrate 11.

[0053] In another possible implementation, such as Figure 6 As shown, the orthographic projection of the sensing electrode 141 on the flexible substrate 11 is located on the opposite side of the orthographic projection of the signal processing device 121 on the flexible substrate 11.

[0054] In one possible implementation, the signal input trace 15 is located within at least one conductive layer or circuit layer 13 of the device layer 12. For example, the signal input trace 15 is located within one conductive layer of the device layer 12; or, the signal input trace 15 may be located within two conductive layers of the device layer 12. Specifically, a portion of the signal input trace 15 is located within one conductive layer of the device layer 12, while another portion of the signal input trace 15 is located within another conductive layer of the device layer 12; or, the signal input trace 15 is formed by connecting traces in parallel in two conductive layers of the device layer 12; or, for yet another example, the signal input trace 15 is located within the circuit layer 13.

[0055] In one possible implementation, the signal output trace 16 is located within at least one conductive layer or circuit layer 13 of the device layer 12. For example, the signal output trace 16 is located within one conductive layer of the device layer 12; or, the signal output trace 16 may be located within two conductive layers of the device layer 12. Specifically, a portion of the signal output trace 16 is located within one conductive layer of the device layer 12, while another portion of the signal output trace 16 is located within another conductive layer of the device layer 12; or, the signal output trace 16 is formed by connecting traces in parallel in two conductive layers of the device layer 12; or, for yet another example, the signal output trace 16 is located within the circuit layer 13.

[0056] Optionally, the signal input trace 15 or the signal output trace 16 is formed by multiple conductive layers in the device layer 12, which can reduce the resistance of the signal input trace 15 or the signal output trace 16 and reduce signal transmission loss.

[0057] To increase the density of the sensing electrode 141, it is necessary to increase the density of the traces and signal processing device 121. In one possible implementation, the signal input trace 15, the signal output trace 16, and the signal processing device 121 can be disposed in different conductive layers.

[0058] In this embodiment, the orthographic projection of the signal input trace 15 or the signal output trace 16 on the flexible substrate 11 at least partially overlaps with the orthographic projection of the signal processing device 121 on the flexible substrate 11.

[0059] In one possible implementation, please refer to Figure 7 and Figure 8The electromyography (EMG) sensor 10 also includes a light-shielding layer 18, which comprises a first sub-layer 181 located on the device layer 12 and a second sub-layer 182 located on the circuit layer 13. The first sub-layer 181 surrounds the device layer 12, and the second sub-layer 182 surrounds the circuit layer 13. The orthographic projections of the first sub-layer 181 and the second sub-layer 182 on the flexible substrate 11 overlap. This ensures that both the signal processing device 121 and the signal trace 131 are light-shielded, preventing external light from shining from the side onto the active area of ​​the signal processing device 121 and affecting its stability.

[0060] The light-shielding layer 18 and the sensing electrode 141 are spaced apart on the flexible substrate 11 by their orthogonal projections, so as to avoid the hardness of the light-shielding layer 18 affecting the bending performance of the sensing electrode 141 area.

[0061] In this embodiment, the light-shielding layer 18 includes organic adhesive and carbon black. The organic adhesive has certain hydrophobic properties, which improves the waterproof and light-shielding performance of the device layer 12 and the circuit layer 13.

[0062] In another embodiment, the light-shielding layer 18 includes an ink layer, which is coated on the device layer 12 and the circuit layer 13 respectively. The orthographic projection of the ink layer on the flexible substrate 11 is spaced apart from the sensing electrode 141. The ink layer is thinner and does not affect the bending performance of the device layer 12 and the circuit layer 13. Furthermore, in this embodiment, referring to Figure 9 The electromyography sensor 10 also includes an electromagnetic shielding layer 17, which is located on the side of the device layer 12 away from the flexible substrate 11 and is insulated from the sensing electrode 141. The electromagnetic shielding layer 17 is used to shield external interference signals on the side of the device layer 12 away from the flexible substrate 11.

[0063] The orthographic projection of the signal processing device 121 onto the flexible substrate 11 lies within the orthographic projection of the electromagnetic shielding layer 17 onto the flexible substrate 11. This design allows the electromagnetic shielding layer 17 to shield the signal processing device 121 from external interference signals originating from the side of the device layer 12 away from the flexible substrate 11.

[0064] In this embodiment, the signal processing device 121 includes an operational amplifier, and the signal processing device 121 may be a thin-film transistor structure composed of film layers in the device layer 12.

[0065] In one possible implementation, please refer again. Figure 9 The electromagnetic shielding layer 17 is located on the side of the circuit layer 13 away from the flexible substrate 11, and the electromagnetic shielding layer 17 is disposed in the same layer as the sensing electrode 141.

[0066] In this embodiment, the electromagnetic shielding layer 17 includes an electromagnetic shielding layer opening 1701, through which the sensing electrode 141 is exposed. The orthographic projection of the sensing electrode 141 on the flexible substrate 11 does not overlap with the orthographic projection of the electromagnetic shielding layer 17 on the flexible substrate 11, that is, the sensing electrode 141 will not contact the shielding layer 14.

[0067] In this embodiment, the electromagnetic shielding layer 17 can shield the signal processing device 121 from external interference signals on the side of the device layer 12 away from the flexible substrate 11.

[0068] In another possible implementation, please refer to Figure 10 The electromagnetic shielding layer 17 is located between the circuit layer 13 and the electrode layer 14. The signal trace 131 passes through the via on the electromagnetic shielding layer 17 and is connected to the sensing electrode 141. The electromagnetic shielding layer 17 is insulated from both the signal trace 131 and the sensing electrode 141.

[0069] In this embodiment, the orthographic projection of the sensing electrode 141 onto the flexible substrate 11 lies within the orthographic projection of the electromagnetic shielding layer 17 onto the flexible substrate 11. That is, in this embodiment, the electromagnetic shielding layer 17 can not only shield the signal processing device 121 from external interference signals on the side of the device layer 12 away from the flexible substrate 11, but also prevent signal interference between the sensing electrode 141 and the signal processing device 121.

[0070] Based on the same inventive concept, this embodiment also provides an electromyography sensor module 1, please refer to... Figure 11 The electromyography sensor module 1 includes an electromyography sensor 10 and a first protective layer 30.

[0071] In this embodiment, the electromyography sensor 10 includes a flexible substrate 11, a device layer 12, a circuit layer 13, and an electrode layer 14.

[0072] The flexible substrate 11 can be made of a flexible material; for example, the flexible substrate 11 can be made of flexible polyimide.

[0073] Device layer 12 is located on flexible substrate 11. Device layer 12 includes multiple stacked conductive layers and insulating layers located between adjacent conductive layers. Device layer 12 is formed on flexible substrate 11 by means of exposure, etching, chemical vapor deposition (CVD), physical vapor deposition (PVD), etc. At least one signal processing device 121 is formed in device layer 12.

[0074] The circuit layer 13 is located on the side of the device layer 12 away from the flexible substrate 11. The circuit layer 13 may include signal traces 131 and an insulating layer covering the signal traces 131.

[0075] The electrode layer 14 is located on the side of the circuit layer 13 away from the flexible substrate 11. Specifically, the electrode layer 14 is located on the insulating layer in the circuit layer 13. The electrode layer 14 includes at least one sensing electrode 141, wherein the sensing electrode 141 is used to collect bioelectrical signals from human muscles.

[0076] In this embodiment, the sensing electrode 141 and the signal processing device 121 are connected through the signal trace 131 in the circuit layer 13 to form an electromyography sensing unit 20. The electromyography sensor 10 may include at least one electromyography sensing unit 20.

[0077] In this embodiment, the orthographic projection of the sensing electrode 141 on the flexible substrate 11 and the orthographic projection of the signal processing device 121 on the flexible substrate 11 are misaligned, that is, the orthographic projections of the sensing electrode 141 and the signal processing device 121 on the flexible substrate 11 do not overlap.

[0078] In this embodiment, the other membrane structures of the electromyography sensor 10 can refer to the above embodiments, and will not be described again here.

[0079] In this embodiment, the first protective layer 30 is located on the side of the electrode layer 14 away from the flexible substrate 11. The first protective layer 30 includes a first opening 301. The orthographic projection of the first opening 301 on the flexible substrate 11 is located within the orthographic projection of the sensing electrode 141 on the flexible substrate 11, and the orthographic projection outline of the first opening 301 on the flexible substrate 11 does not overlap with the orthographic projection outline of the sensing electrode 141 on the flexible substrate 11.

[0080] The edge of the sensing electrode 141 is covered by the first protective layer 30. This design prevents sweat from seeping into the interior of the electromyography (EMG) sensor 10 through the peripheral gaps of the sensing electrode 141 after the skin sweats, thus avoiding corrosion or oxidation of the internal circuitry and ensuring a longer service life for the EMG sensor 10. Simultaneously, the central area of ​​the sensing electrode 141 is exposed through the first opening 301, ensuring that the sensing electrode 141 can accurately acquire EMG signals.

[0081] In one possible implementation, please refer to Figure 12 The first protective layer 30 also includes a second opening 302 spaced apart from the first opening 301. The second opening 302 exposes a portion of the edge of the sensing electrode 141, and the first protective layer 30 covers most of the edge of the sensing electrode 141.

[0082] The first opening 301 and the second opening 302 have the same outline shape. When the openings of the second opening 302 are connected, the orthographic projection area of ​​the first opening 301 on the flexible substrate 11 is the same as the orthographic projection area of ​​the second opening 302 on the flexible substrate 11.

[0083] At least a portion of the second opening 302 connects to form an opening region. The orthographic projection of the opening region onto the flexible substrate 11 is offset from the orthographic projection of the signal processing device 121 onto the flexible substrate 11, meaning the signal processing device 121 is positioned to avoid the opening region. In this embodiment, the shape and size of the first opening 301 and the second opening 302 are not limited. For example, both the first opening 301 and the second opening 302 are circular, but their sizes may differ.

[0084] In another possible implementation, the second opening 302 may also be misaligned with the sensing electrode 141, that is, the orthogonal projections of the second opening 302 and the sensing electrode 141 on the flexible substrate 11 do not overlap. The second opening 302 is mainly used to increase the flexibility of the corresponding area so that the electromyography sensor 10 can be bent.

[0085] Reference Figure 12 The sensing electrodes 141 are arranged in an array in the first direction X and the second direction Y. The first opening 301 forms a first opening column along the first direction X, and the second opening 302 forms a second opening column in the first direction X. In the second opening column, the number of connected second openings 302 is not limited to two, but to avoid excessive exposure of the edges of the sensing electrodes 141, it is preferable that two second openings 302 are connected.

[0086] The opening area includes, but is not limited to, at least two interconnected second openings 302, in Figure 12 In the middle, the opening area includes two adjacent columns of second openings, and the signal processing device 121 corresponding to the second opening column is located on the side of the second opening facing the adjacent first opening.

[0087] The opening area may also include only one column. In the first direction X, the width of the opening area is the width of the flexible substrate 11, which facilitates the overall bending of the electromyography sensor 10.

[0088] The second opening 302 includes an opening, and the openings of the connected second openings 302 are arranged opposite each other. The width of the opening is less than or equal to 1 / 10 of the width of the sensing electrode 141. The opening exposes part of the edge of the sensing electrode 141. The orthographic projection of the corresponding signal trace 131 on the flexible substrate 11 does not overlap with the orthographic projection of the connected area on the flexible substrate, ensuring that even if part of the edge of the sensing electrode 141 is exposed, the signal trace 131 will not be exposed. In this embodiment, the shape of the opening area can be set according to requirements, such as a strip, a star shape, or a cross shape. By setting the opening area, when the electromyography sensor 10 is bent, it is easy to concentrate and fix the bending stress in the opening area, avoiding bending damage to the signal trace 131 and the signal processing device 121, and reducing the bending stress applied to the electromyography sensor 10 by the first protective layer 30.

[0089] Optionally, in the open area, the orthographic projection shape of the signal trace 131 on the flexible substrate 11 includes a wavy or sawtooth shape. This can increase the compression and tensile resistance of the signal trace 131 in the open area, ensuring that the signal trace 131 will not break. In the non-open area, the orthographic projection of the signal trace 131 on the flexible substrate 11 is a straight line, reducing the transmission impedance of the signal trace 131.

[0090] Furthermore, please refer to again Figure 11 The first protective layer 30 includes a substrate layer 32 and a first adhesive layer 31. The substrate layer 32 is fixed to the electromyography sensor 10 through the first adhesive layer 31.

[0091] In this embodiment, the substrate layer 32 can be made of polyimide material, and the first adhesive layer 31 can be made of acrylic adhesive. The elastic modulus of the substrate layer 32 ranges from 2.5 GPa to 3.5 GPa, and the elastic modulus of the first adhesive layer 31 ranges from 25 KPa to 35 KPa. For example, the elastic modulus of the substrate layer 32 includes 2.5 GPa, 2.65 GPa, 2.8 GPa, 3.05 GPa, 3.2 GPa, 3.38 GPa, or 3.5 GPa, and the elastic modulus of the first adhesive layer 31 includes 25 KPa, 27 KPa, 29 KPa, 31 KPa, 33 KPa, or 35 KPa. Compared with the prior art method of using PET material to make the first protective layer 30, the elastic modulus of the combined film of the substrate layer 32 and the first adhesive layer 31 is smaller than that of the PET material film (around 4 GPa), and the combined film of the substrate layer 32 and the first adhesive layer 31 is more flexible. In addition, polyimide material can effectively filter out ultraviolet light, which can improve the accuracy of the signal collected by the electromyography sensor 10.

[0092] In one possible implementation, in the direction perpendicular to the plane of the flexible substrate 11, the thickness d1 of the sensing electrode 141 is 0.8 μm to 1.2 μm, and the thickness d2 of the first adhesive layer 31 is 10 μm to 20 μm. For example, the thickness d1 of the sensing electrode 141 may include 0.8 μm, 0.85 μm, 0.92 μm, 0.98 μm, 1.05 μm, 1.12 μm, 1.17 μm, or 1.2 μm, etc., and the thickness d2 of the first adhesive layer 31 may include 10 μm, 11.5 μm, 14 μm, 16.3 μm, 18 μm, or 20 μm, etc.

[0093] The inventors discovered that when the thickness of the sensing electrode 141 and the thickness of the first adhesive layer 31 satisfy the above relationship, when the first adhesive layer 31 is attached to the surface of the electromyography sensor 10 by pressing, the first adhesive layer 31 can fill the gap of the sensing electrode 141, thereby protecting the edge of the sensing electrode 141 and preventing moisture or sweat from invading the interior of the electromyography sensor 10.

[0094] Further, please refer to Figure 13 The electromyography sensor module 1 also includes a support membrane 40 and a second adhesive layer 50. The support membrane 40 is fixed to the flexible substrate 11 of the electromyography sensor 10 through the second adhesive layer 50.

[0095] In one possible implementation, the support membrane 40 and the substrate layer 32 may be the same size, and their orthogonal projections onto the flexible substrate 11 are within the range of the electromyography sensor 10.

[0096] In this embodiment, on a plane perpendicular to the flexible substrate 11, the thickness d3 of the flexible substrate 11 ranges from 10 micrometers to 20 micrometers, the thickness d6 of the substrate layer 32 ranges from 20 micrometers to 30 micrometers, the thickness d5 of the support film 40 ranges from 20 micrometers to 30 micrometers, the thickness d2 of the first adhesive layer 31 ranges from 10 micrometers to 20 micrometers, and the thickness d4 of the second adhesive layer 50 ranges from 10 micrometers to 20 micrometers. For example, the thickness d3 of the flexible substrate 11 includes 10 micrometers, 12 micrometers, 15 micrometers, 18 micrometers or 20 micrometers, etc.; the thickness d6 of the substrate layer 32 includes 20 micrometers, 23 micrometers, 25.5 micrometers, 27.8 micrometers or 30 micrometers, etc.; the thickness d2 of the first adhesive layer 31 includes 10 micrometers, 11.5 micrometers, 14 micrometers, 17 micrometers or 20 micrometers, etc.; and the thickness d4 of the second adhesive layer 50 includes 10 micrometers, 13.5 micrometers, 16 micrometers, 18.5 micrometers or 20 micrometers, etc.

[0097] In this embodiment, the flexible substrate 11, the substrate layer 32, and the support film 40 are made of the same material, and the first adhesive layer 31 and the second adhesive layer 50 are made of the same material. For example, the flexible substrate 11, the substrate layer 32, and the support film 40 are made of polyimide, and the first adhesive layer 31 and the second adhesive layer 50 are made of acrylic adhesive.

[0098] Further, please refer to Figure 14 The electromyography (EMG) sensor module 1 provided in this embodiment further includes a conductive adhesive layer 60 and a metal layer 70. The conductive adhesive layer 60 is located on the side of the support film 40 away from the flexible substrate 11, and the metal layer 70 is located on the side of the conductive adhesive layer 60 away from the flexible substrate 11. The conductive adhesive layer 60 and the metal layer 70 extend outwards from the side of the EMG sensor 10.

[0099] In this embodiment, the elastic modulus of the metal layer 70 is 50 GPa-100 GPa. For example, the elastic modulus of the metal layer 70 includes 50 GPa, 60 GPa, 70 GPa, 80 GPa, 90 GPa, or 100 GPa. In the plane perpendicular to the flexible substrate 11, the thickness of the metal layer 70 ranges from 5 micrometers to 15 micrometers. For example, the thickness of the metal layer 70 includes 5 micrometers, 7 micrometers, 10 micrometers, 11 micrometers, 13 micrometers, or 15 micrometers.

[0100] In one possible implementation, the metal layer 70 can be an electrolytic copper layer, wherein the electrolytic copper layer is more flexible than rolled copper, which is beneficial for bending the electromyography sensor module 1.

[0101] The inventors discovered through research that, for example Figure 15 If a homogeneous object is bent, the theoretical neutral layer will be located at the center of the bend (the dotted line in the figure). The outer side of the bend is subjected to tensile stress, and the inner side is subjected to compressive stress. The neutral layer refers to the position where the stress is balanced within the bent object. The membrane structure of the electromyography sensor module 1 can be simplified to a flexible substrate 11 and a wiring layer (including a device layer and a circuit layer) on the flexible substrate. Compared to the other membrane layers covering the flexible substrate 11 and the wiring layer, the wiring layer is thinner. In the bending state, the metal traces in the wiring layer are located inside the neutral layer and will be subjected to greater compressive stress.

[0102] Please refer to Figure 16 In this embodiment, the substrate layer 32 and the support membrane 40 located on opposite sides of the electromyography (EMG) sensor 10 are made of the same material and are symmetrical with respect to the EMG sensor 10. An opening is provided on the substrate layer 32 to reduce the bending stress transmitted from one side of the substrate layer 32 to the EMG sensor 10. According to computer simulation analysis, by reducing the elastic modulus of the membrane layer on one side (inner bending side) of the EMG sensor 10 and increasing the elastic modulus of the membrane layer on the other side (outer bending side), the neutral layer can be moved towards the inner bending side, thus reducing the stress on the metal traces in the EMG sensor 10. Therefore, by perforating the flexible substrate 11 on one side of the EMG sensor 10 and not perforating the support membrane 40 on the other side of the EMG sensor 10 but adding a metal layer 70, the elastic modulus on the other side of the EMG sensor 10 can be increased, causing the position of stress equilibrium to move to the trace layer position in the EMG sensor 10, thus reducing the stress on the metal traces in the EMG sensor 10.

[0103] In this embodiment, the metal layer 70 can shield the external interference signals on the side of the electromyography sensor 10 away from the first protective layer 30. The metal layer 70 and the electromagnetic shielding layer 17 work together to shield the external interference signals on opposite sides of the electromyography sensor 10, protect the internal circuitry of the electromyography sensor 10, and ensure that electromyographic biological signals can only be obtained from the sensing electrodes.

[0104] Further, please refer to Figure 17 The electromyography sensor module 1 provided in this embodiment also includes a flexible circuit board 80, which is bonded to the electromyography sensor 10. An exposed metal area is provided on the side where the flexible circuit board 80 is bonded to the electromyography sensor 10.

[0105] Further, please refer to Figure 17 The electromyography sensor module 1 provided in this embodiment also includes a bonding area connected to the flexible circuit board 80. The bonding area is located on at least one side of the sensing electrode 141. The bonding area includes a plurality of bonding electrodes 19. The bonding electrodes 19 are disposed on the same layer as the sensing electrode 141. At least some of the bonding electrodes 19 are connected to the signal input trace 15 and the signal output trace 16 through the adapter wire in the circuit layer 13.

[0106] A first protective layer 30 is provided between adjacent bonding electrodes 19, and the first protective layer 30 covers the edge of the bonding electrode 19.

[0107] The metal layer 70 extending from the side of the electromyography sensor 10 is electrically connected to the exposed metal area through the conductive adhesive layer 60.

[0108] In one possible implementation, a receiving space 100 is formed between the metal layer 70 extending relative to the electromyography sensor 10 and the flexible circuit board 80. In this embodiment, to prevent moisture or sweat from flowing into the receiving space 100 and entering the electromyography sensor 10, the electromyography sensor module 1 further includes a waterproof adhesive 90, which fills the receiving space.

[0109] Furthermore, waterproof adhesive 90 is also coated around the electromyography sensor 10 to waterproof the exposed circuit layer 13 and device layer 12.

[0110] In this embodiment, the electromyography sensor module 1 described above can be prepared by the following method.

[0111] First, the electromyography (EMG) sensor 10 is fabricated. Specifically, the various film layers in the EMG sensor 10 can be formed on a flexible substrate 11 through processes such as exposure, etching, chemical vapor deposition (CVD), and physical vapor deposition (PVD) to form an EMG sensor 10 that is thinner and more flexible.

[0112] Next, the first protective layer 30 is obtained and attached to one side of the electromyography (EMG) sensor 10. The first protective layer 30 includes a substrate layer 32 and a first adhesive layer 31. When the first protective layer 30 is obtained, release films for protecting the first protective layer 30 are provided on opposite sides. During attachment, the release film on the first adhesive layer 31 can be removed first, the first adhesive layer 31 can be attached to the EMG sensor 10, and then the release film on the substrate layer 32 can be removed using laser peeling. This utilizes the rigidity of the release film on the substrate layer 32 to support the EMG sensor 10 and prevent it from curling. In this embodiment, a first opening 301 for exposing the sensing electrode 141 can be pre-fabricated on the first protective layer 30. In addition, when the first adhesive layer 31 is attached to the surface of the electromyography sensor 10 by pressing, the first adhesive layer 31 can fill the gap of the sensing electrode 141, thereby protecting the edge of the sensing electrode 141 and preventing moisture or sweat from entering the interior of the electromyography sensor 10.

[0113] Next, other membrane layers are fabricated on the other side of the electromyography sensor 10.

[0114] Specifically, the support membrane 40 can be first bonded to the other side of the electromyography sensor 10 through the second adhesive layer 50; then the metal layer 70 can be bonded to the side of the support membrane 40 away from the electromyography sensor 10 through the conductive adhesive layer 60.

[0115] Based on the same inventive concept, this application also provides an electromyography (EMG) sensor device, which includes the EMG sensor 10 or EMG sensor module 1 described in the previous embodiments.

[0116] In summary, this application provides an electromyography (EMG) sensor, an EMG sensor module, and an EMG sensor device. In the EMG sensor, a flexible substrate, a device layer, a circuit layer, and an electrode layer are sequentially stacked. The device layer includes at least one signal processing device, and the electrode layer includes at least one sensing electrode. The sensing electrode and the signal processing device are connected via signal traces to form an EMG sensing unit. The orthographic projection of the sensing electrode onto the flexible substrate is offset from the orthographic projection of the signal processing device onto the flexible substrate. This design, using a flexible substrate to support the other membrane layers of the EMG sensor, improves the sensor's flexibility, allowing it to conform well to the user's skin during use, reducing the foreign body sensation and improving the user experience. Furthermore, the offset arrangement of the sensing electrode and the signal processing device avoids a decrease in sensing accuracy due to their close proximity, ensuring high detection accuracy of the EMG sensor.

[0117] This reduces the thickness of the flexible circuit board at the overlapping area after it is connected to specific modules, making it easier to achieve a thinner and lighter display device.

[0118] The above description is merely a preferred embodiment of this application and is not intended to limit this application. Various modifications and variations can be made to this application by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this application should be included within the protection scope of this application.

Claims

1. An electromyographic sensor, characterized in that, The myoelectric sensor comprises: a flexible substrate; a device layer on the flexible substrate, wherein the device layer comprises at least one signal processing device; a circuit layer on a side of the device layer away from the flexible substrate, the circuit layer comprising signal traces; an electrode layer on a side of the circuit layer away from the flexible substrate, the electrode layer comprising at least one sensing electrode, the sensing electrode and the signal processing device being connected by signal traces in the circuit layer to form a myoelectric sensing unit, a projection of the sensing electrode on the flexible substrate being misaligned with a projection of the signal processing device on the flexible substrate.

2. The electromyographic sensor of claim 1, wherein, The projection of the sensing electrode on the flexible substrate is spaced apart from the projection of the signal processing device on the flexible substrate; The device layer comprises a plurality of signal processing devices, and the electrode layer comprises a plurality of sensing electrodes; In at least part of the myoelectric sensing units, the projection of the sensing electrode on the flexible substrate is on the same side as the projection of the signal processing device on the flexible substrate.

3. The electromyographic sensor of claim 1, wherein, The projection of the signal traces on the flexible substrate comprises a wave shape or a zigzag shape; In a cross section of the flexible substrate in a thickness direction, the signal traces comprise at least one L-shaped segment.

4. The electromyographic sensor of claim 2, wherein, The myoelectric sensor further comprises a signal input trace and a signal output trace; The signal input trace is connected to the signal processing device to provide an input signal to the signal processing device; The signal output trace is connected to the signal processing device to transmit a signal processed by the signal processing device from the sensing electrode; The same signal input trace is electrically connected to signal processing devices in a plurality of different myoelectric sensing units, and different signal output traces are respectively electrically connected to the signal processing devices in the corresponding myoelectric sensing units; Preferably, a plurality of the myoelectric sensing units are arranged along a first direction, and the signal input trace and the signal output trace extend along the first direction; In two adjacent myoelectric sensing units arranged along the first direction, the projection of the sensing electrode on the flexible substrate is on the same side as the projection of the signal processing device on the flexible substrate, or the projection of the sensing electrode on the flexible substrate is on the opposite side of the projection of the signal processing device on the flexible substrate.

5. The electromyographic sensor of claim 4, wherein, The device layer comprises a plurality of conductive layers and insulating layers between adjacent conductive layers; The signal input trace is located in at least one conductive layer in the device layer or in the circuit layer; The signal output trace is located in at least one conductive layer in the device layer or in the circuit layer; Preferably, the signal input trace or the signal output trace is formed by a plurality of conductive layers in the device layer; Preferably, the signal input trace, the signal output trace, and the signal processing device are located in different conductive layers; The projection of the signal input trace or the signal output trace on the flexible substrate at least partially overlaps the projection of the signal processing device on the flexible substrate.

6. The electromyographic sensor of claim 1, wherein, The electromyographic sensor further comprises an electromagnetic shielding layer, the electromagnetic shielding layer is located on the side of the device layer away from the flexible substrate, and the electromagnetic shielding layer is insulated from the sensing electrode; The normal projection of the signal processing device on the flexible substrate is located within the normal projection of the electromagnetic shielding layer on the flexible substrate; Preferably, the signal processing device comprises an operational amplifier.

7. The electromyographic sensor of claim 6, wherein, The electromagnetic shielding layer is located on the side of the circuit layer away from the flexible substrate, and the electromagnetic shielding layer is arranged in the same layer as the sensing electrode. The electromagnetic shielding layer comprises an electromagnetic shielding layer opening, and the sensing electrode is exposed from the electromagnetic shielding layer opening. The normal projection of the sensing electrode on the flexible substrate does not overlap the normal projection of the electromagnetic shielding layer on the flexible substrate.

8. The electromyographic sensor of claim 6, wherein, The electromagnetic shielding layer is located between the circuit layer and the electrode layer. The signal trace is connected to the sensing electrode after passing through the via on the electromagnetic shielding layer. The normal projection of the sensing electrode on the flexible substrate is located within the normal projection of the electromagnetic shielding layer on the flexible substrate.

9. An electromyographic sensor module, comprising: The electromyographic sensor module comprises a first protective layer and the electromyographic sensor according to any one of claims 1-8; The first protective layer is located on the side of the electrode layer away from the flexible substrate; The first protective layer comprises a first opening, the normal projection of the first opening on the flexible substrate is located within the normal projection of the sensing electrode on the flexible substrate, and the normal projection profile of the first opening on the flexible substrate does not overlap the normal projection profile of the sensing electrode on the flexible substrate.

10. The electromyographic sensor module of claim 9, wherein, The first protective layer further comprises a second opening spaced apart from the first opening; The first opening and the second opening are the same shape, and the normal projection area of the first opening on the flexible substrate is the same as the normal projection area of the second opening on the flexible substrate; At least part of the second opening is connected to form an opening region, and the normal projection of the opening region on the flexible substrate is arranged in a staggered manner with the normal projection of the signal processing device on the flexible substrate; Preferably, in the opening region, the normal projection shape of the signal trace on the flexible substrate comprises a wave shape or a zigzag shape.

11. The electromyographic sensor module of claim 9, wherein, The first protective layer comprises a substrate layer and a first adhesive layer, and the substrate layer is fixed to the electromyographic sensor through the first adhesive layer. The elastic modulus of the substrate layer ranges from 2.5 GPa to 3.5 GPa, and the elastic modulus of the first adhesive layer ranges from 25 KPa to 35 KPa.

12. The electromyographic sensor module of claim 11, wherein, In the direction perpendicular to the plane where the flexible substrate is located, the thickness of the sensing electrode is 0.8 microns to 1.2 microns, and the thickness of the first adhesive layer is 10 microns to 20 microns.

13. The electromyography sensor module of claim 11 or 12, wherein, The electromyographic sensor module further comprises a support film and a second adhesive layer; The support film is fixed to the flexible substrate of the electromyographic sensor through the second adhesive layer.

14. The electromyographic sensor module of claim 13, wherein, The thickness of the flexible substrate is 10-20 microns, the thickness of the substrate layer is 20-30 microns, the thickness of the support film is 20-30 microns, the thickness of the first adhesive layer is 10-20 microns, and the thickness of the second adhesive layer is 10-20 microns, in a plane perpendicular to the plane in which the flexible substrate is located; The flexible substrate, the substrate layer, and the support film are made of the same material, and the first adhesive layer and the second adhesive layer are made of the same material; Preferably, the flexible substrate, the substrate layer, and the support film are made of polyimide, and the first adhesive layer and the second adhesive layer are made of acrylic glue.

15. The electromyographic sensor module of claim 13, wherein, The myoelectric sensor module further comprises a conductive adhesive layer and a metal layer; The conductive adhesive layer is located on the side of the support film away from the flexible substrate; The metal layer is located on the side of the conductive adhesive layer away from the flexible substrate; The conductive adhesive layer and the metal layer protrude relative to one side of the myoelectric sensor.

16. The electromyographic sensor module of claim 15, wherein, The elastic modulus of the metal layer is 50-100 GPa, and the thickness of the metal layer is 5-15 microns in a plane perpendicular to the plane in which the flexible substrate is located; The metal layer comprises an electrolytic copper layer; Preferably, the thickness of the conductive adhesive layer is 15-25 microns in a plane perpendicular to the plane in which the flexible substrate is located.

17. The electromyographic sensor module of claim 16, wherein, The myoelectric sensor module comprises a flexible circuit board; The flexible circuit board is bonded to the myoelectric sensor, and the side of the flexible circuit board bonded to the myoelectric sensor is provided with a bare metal area; The metal layer protruding relative to one side of the myoelectric sensor is electrically connected to the bare metal area through the conductive adhesive layer.

18. The electromyographic sensor module of claim 17, wherein, A receiving space is formed between the metal layer protruding relative to the myoelectric sensor and the flexible circuit board. The myoelectric sensor module further comprises waterproof glue, which is filled in the receiving space.

19. An electromyographic sensor device, characterized by The myoelectric sensor comprises the myoelectric sensor as claimed in claims 1-8, or the myoelectric sensor module comprises the myoelectric sensor module as claimed in claims 9-18.

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