Optical fiber array manufacturing method and manufacturing equipment

Abstract

The invention provides an optical fiber array manufacturing method and manufacturing equipment, and the method comprises the steps: preparing a plurality of segments of substrates, and splicing and assembling the plurality of segments of substrates, thereby obtaining a substrate assembly; the M polarization maintaining optical fibers are placed in the M grooves in one-to-one correspondence, and the positions of the M polarization maintaining optical fibers in the corresponding grooves are adjusted; packaging the substrate assembly by using a cover plate to obtain a first optical fiber array; strengthening the first optical fiber array to obtain a second optical fiber array; and performing performance detection on the second optical fiber array, and determining the second optical fiber array passing the performance detection as a target optical fiber array. In the embodiment of the invention, the processing difficulty of the single substrate is reduced through the sectional structure, and low cost and batch production are realized; the optical fiber array is strengthened, so that the vibration resistance and the aging resistance of the optical fiber array are improved, and the reliability is improved; performance detection is carried out on the optical fiber array so as to ensure that the optical fiber array meets the requirement of high precision.

Description

Technical Field

[0001] This application relates to the field of semiconductor technology, and in particular to a method and apparatus for manufacturing fiber arrays. Background Technology

[0002] Fiber optic arrays are the core input / output coupling devices of micro-mirror arrays in optical circuit switches. The consistency of the center-to-center spacing (pitch) of adjacent fibers directly determines the optical coupling efficiency, signal transmission stability, and long-term link reliability.

[0003] Among existing fiber optic array manufacturing technologies, the manufacturing solutions for 32-channel and 64-channel fiber optic arrays are relatively mature. However, in high-density scenarios with 128 channels and above, the accuracy and reliability of fiber optic arrays meet the technical requirements.

[0004] Specifically, in the existing technology, a single substrate V-groove processing scheme is adopted. However, due to limitations in photolithography resolution, substrate material stress release, and etching uniformity, the cumulative error increases linearly with the number of channels, and the pitch error of a 128-channel substrate is difficult to meet the technical requirements.

[0005] In the existing technology, the ceramic ferrule combination scheme is adopted. High-density arrangement is achieved by splicing multiple small-channel ceramic ferrules. Although it can reduce the processing error of a single ferrule, there is a positioning deviation during the splicing process. In addition, the thermal expansion coefficients of ceramic materials and optical fibers do not match, which can easily lead to pitch drift after temperature cycling. Furthermore, the assembly process of this scheme is complicated and the cost remains high.

[0006] In the existing technology, polarization-maintaining fiber positioning technology has shortcomings. It relies on manual or semi-automatic operation, resulting in low alignment efficiency and poor consistency, and cannot be adapted to large-scale production.

[0007] Therefore, how to provide a high-precision, high-reliability, low-cost, and mass-producible high-density fiber array manufacturing method is a technical problem that needs to be solved in this field. Summary of the Invention

[0008] This application provides a fiber optic array manufacturing method and equipment, aiming to solve the technical problems that existing fiber optic array manufacturing methods do not meet the requirements of high precision, high reliability, low cost, and mass production.

[0009] In a first aspect, embodiments of this application provide a method for manufacturing an optical fiber array. The method includes: preparing multiple substrate segments and assembling the multiple substrate segments to obtain a substrate assembly; each substrate segment includes N channels and N grooves corresponding to the N channels; the substrate assembly includes M channels and M grooves corresponding to the M channels, where N and M are both positive integers greater than 1, and M is the product of N and the number of substrates; placing M polarization-maintaining fibers into the corresponding M grooves and adjusting the positions of the M polarization-maintaining fibers in the corresponding grooves; encapsulating the substrate assembly with a cover plate to obtain a first optical fiber array; strengthening the first optical fiber array to obtain a second optical fiber array; and performing performance testing on the second optical fiber array, identifying the second optical fiber array that passes the performance test as the target optical fiber array.

[0010] Optionally, the preparation of the multi-segment substrate includes: depositing a mask on the surface of each segment of the substrate and spin-coating photoresist; performing photolithographic exposure on each segment of the substrate to form N channel groove photolithographic patterns on the surface of each segment of the substrate; immersing each segment of the substrate after photolithographic exposure into an etching solution for wet etching; and, when the etching time reaches a first preset time, removing the mask and photoresist from the surface of each segment of the substrate, and cleaning and drying to obtain the prepared multi-segment substrate.

[0011] Optionally, assembling the multiple substrate segments to obtain a substrate assembly includes: splicing the multiple substrate segments using positioning pins; laying an elastic compensation layer on the surface of the spliced ​​multiple substrate segments; detecting the center distance error corresponding to each channel in the multiple substrate segments in real time, and applying a preload to the elastic compensation layer based on the center distance error corresponding to each channel to adjust the compression amount of the elastic compensation layer; and stopping the application of the preload to the elastic compensation layer when the center distance error corresponding to each channel is within a first preset range.

[0012] Optionally, adjusting the position of the M polarization-maintaining fibers in the corresponding groove includes: adjusting the position of the M polarization-maintaining fibers in the corresponding groove; and, after the position adjustment of the M polarization-maintaining fibers in the corresponding groove is completed, performing a pre-curing treatment on the M polarization-maintaining fibers.

[0013] Optionally, adjusting the position of the M polarization-maintaining fibers in the corresponding groove includes: identifying the fiber stress zone corresponding to each polarization-maintaining fiber using a visual inspection module; adjusting the orientation of each polarization-maintaining fiber so that the fiber stress zone corresponding to each polarization-maintaining fiber is aligned with the positioning groove provided at the bottom of the groove; acquiring the central region corresponding to each polarization-maintaining fiber using a scanning module, and adjusting the position of each polarization-maintaining fiber in the corresponding groove based on the position of the central region in the groove, until the center distance error corresponding to each channel is within a first preset range, and the polarization axis alignment error corresponding to each polarization-maintaining fiber is within a second preset range.

[0014] Optionally, the step of encapsulating the substrate assembly with a cover plate to obtain a first fiber array includes: encapsulating the substrate assembly with a cover plate to obtain a third fiber array; pre-curing the third fiber array with ultraviolet light at a first power; and, if the pre-curing time reaches a second preset time, curing the third fiber array with ultraviolet light at a second power for a third preset time to obtain the first fiber array; wherein the first power is lower than the second power, and the second preset time is shorter than the third preset time.

[0015] Optionally, the step of strengthening the first fiber array to obtain the second fiber array includes: placing the first fiber array in a high-low temperature chamber and subjecting the first fiber array to a preset number of high-low temperature cycle treatments through the high-low temperature chamber.

[0016] Optionally, the step of performing performance testing on the second fiber array and determining the second fiber array that passes the performance testing as the target fiber array includes: performing insertion loss testing, return loss testing, center distance consistency testing, and polarization axis alignment error testing on the second fiber array; if the insertion loss value corresponding to the second fiber array is less than a first preset value, the return loss value corresponding to the second fiber array is greater than a second preset value, the center distance error corresponding to the second fiber array is within a first preset range, and the polarization axis alignment error corresponding to the second fiber array is within a second preset range, then the second fiber array is determined as the target fiber array.

[0017] Secondly, embodiments of this application provide a fiber optic array manufacturing apparatus, the apparatus comprising: a fabrication device for fabricating multiple substrate segments and assembling the multiple substrate segments to obtain a substrate assembly; each substrate segment includes N channels and N grooves corresponding to the N channels, the substrate assembly includes M channels and M grooves corresponding to the M channels, where N and M are both positive integers greater than 1, and M is the product of N and the number of substrates; M polarization-maintaining fibers are placed into the corresponding M grooves; a positioning mechanism is used to adjust the position of the M polarization-maintaining fibers in the corresponding grooves; the fabrication device is further used to encapsulate the substrate assembly using a cover plate to obtain a first fiber optic array; the first fiber optic array is subjected to strengthening treatment to obtain a second fiber optic array; the second fiber optic array is subjected to performance testing, and the second fiber optic array that passes the performance testing is determined as the target fiber optic array.

[0018] Optionally, the positioning mechanism further includes: a visual inspection module for identifying the fiber stress zone corresponding to each polarization-maintaining fiber; a fine-tuning platform for adjusting the orientation of each polarization-maintaining fiber so that the fiber stress zone corresponding to each polarization-maintaining fiber is aligned with the positioning groove at the bottom of the groove; a scanning module for acquiring the central region corresponding to each polarization-maintaining fiber; the fine-tuning module is further used to adjust the position of each polarization-maintaining fiber in the corresponding groove based on the position of the central region in the groove, until the center distance error corresponding to each channel is within a first preset range, and the polarization axis alignment error corresponding to each polarization-maintaining fiber is within a second preset range.

[0019] This application provides a method and apparatus for manufacturing an optical fiber array, including preparing multiple substrate segments and assembling them to obtain a substrate assembly. Each substrate segment includes N channels and N grooves corresponding to the N channels. The substrate assembly includes M channels and M grooves corresponding to the M channels, where N and M are both positive integers greater than 1, and M is the product of N and the number of substrates. M polarization-maintaining fibers are placed into the corresponding M grooves, and their positions are adjusted. The substrate assembly is then encapsulated using a cover plate to obtain a first optical fiber array. The first optical fiber array is then strengthened to obtain a second optical fiber array. The second optical fiber array undergoes performance testing, and the second optical fiber array that passes the performance test is identified as the target optical fiber array. In this embodiment, the preparation of multiple substrate segments and the assembly of these segments to obtain the substrate assembly reduces the processing difficulty of a single substrate through a segmented structure, achieving low cost and mass production. The strengthening treatment of the optical fiber array improves its vibration resistance, anti-aging performance, and reliability. The performance testing of the optical fiber array ensures that it meets high precision requirements. Attached Figure Description

[0020] To more clearly illustrate the technical solutions of the embodiments of this application, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0021] Figure 1 This is a flowchart illustrating a method for manufacturing an optical fiber array according to an embodiment of this application;

[0022] Figure 2 This is a schematic diagram of the structure of a fiber optic array manufacturing device provided in an embodiment of this application. Detailed Implementation

[0023] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0024] See Figure 1 , Figure 1 This is a flowchart of a fiber optic array manufacturing method provided in an embodiment of this application, such as... Figure 1 As shown, the method includes the following steps: Step 101, preparing multiple substrate segments and assembling the multiple substrate segments to obtain a substrate assembly; each substrate segment includes N channels and N grooves corresponding to the N channels, the substrate assembly includes M channels and M grooves corresponding to the M channels, N and M are both positive integers greater than 1, and M is the product of N and the number of substrates.

[0025] Optionally, the substrate material is fused silica, which has a low coefficient of thermal expansion and high surface flatness (less than 0.01 μm). In this step, multiple substrate segments are prepared and then spliced ​​and assembled to obtain a substrate assembly.

[0026] It should be noted that each substrate segment includes N channels and N grooves corresponding to each of the N channels. Optionally, the grooves are V-grooves, with an included angle of 90°, a depth of 55μm, and a groove width adapted to a 125μm diameter optical fiber. The substrate assembly includes M channels and M grooves corresponding to each of the M channels.

[0027] For the purpose of clearly illustrating the embodiments, the following description uses the fabrication of a 128-channel fiber optic array as an example, where N is 32 and M is 128. It should be understood that the fiber optic array manufacturing method provided in this application can also fabricate fiber optic arrays with higher precision.

[0028] Step 102: Place the M polarization-maintaining fibers into the M corresponding grooves, and adjust the positions of the M polarization-maintaining fibers in the corresponding grooves.

[0029] Optionally, the above-mentioned polarization-maintaining fiber is a panda-type polarization-maintaining fiber with a core diameter of 9μm, a cladding diameter of 125μm, a stress zone spacing of 60μm, and a working wavelength covering the C+L band (1530nm-1625nm). The fiber end face is polished and the end face roughness is less than 0.02μm.

[0030] In this step, M polarization-maintaining fibers are placed into the M corresponding grooves, and the positions of the M polarization-maintaining fibers in the corresponding grooves are adjusted to achieve precise positioning of the polarization-maintaining fibers.

[0031] Step 103: The substrate assembly is encapsulated using a cover plate to obtain the first fiber array.

[0032] Step 104: Strengthen the first fiber array to obtain the second fiber array.

[0033] Step 105: Perform performance testing on the second fiber array, and determine the second fiber array that passes the performance test as the target fiber array.

[0034] In this step, the substrate assembly is encapsulated using a cover plate to obtain a first fiber array, and the first fiber array is then strengthened to obtain a second fiber array.

[0035] After obtaining the second fiber array, its performance is tested. The second fiber array that passes the performance test is identified as the target fiber array, and a high-precision fiber array is thus prepared.

[0036] In this embodiment, multiple substrate segments are prepared and assembled to obtain a substrate assembly. The segmented structure reduces the processing difficulty of a single substrate, achieving low cost and mass production. The fiber array is strengthened to improve its vibration resistance, aging resistance, and reliability. The fiber array is subjected to performance testing to ensure that it meets the high precision requirements.

[0037] Furthermore, by adjusting the number of segments and groove parameters, it can be flexibly expanded to fabricate high-density fiber arrays with 256 channels or more; it also supports switching between single-mode and polarization-maintaining fibers, is applicable to wavelengths covering the C+L band, and can be adapted to optical circuit switch architectures and optical transmission scenarios with different port densities.

[0038] Optionally, the preparation of the multi-segment substrate includes: depositing a mask on the surface of each segment of the substrate and spin-coating photoresist; performing photolithographic exposure on each segment of the substrate to form N channel groove photolithographic patterns on the surface of each segment of the substrate; immersing each segment of the substrate after photolithographic exposure into an etching solution for wet etching; and, when the etching time reaches a first preset time, removing the mask and photoresist from the surface of each segment of the substrate, and cleaning and drying to obtain the prepared multi-segment substrate.

[0039] Optionally, a 50mm×12.5mm×1mm fused silica blank is ground and polished to achieve a surface flatness of less than 0.01μm, and then the blank is cleaned and dried to prepare a substrate.

[0040] Optionally, the above-mentioned mask is The chromium layer has a photoresist thickness of 1 μm.

[0041] In this embodiment, a chromium layer is deposited on the substrate surface as a mask, photoresist is spin-coated, ultraviolet lithography is used for exposure, and after development, a 32-channel V-groove photolithography pattern is formed. The exposure dose is [missing information]. .

[0042] Furthermore, the substrate exposed by photolithography is immersed in an etching solution for wet etching. Optionally, the etching solution is a mixture of hydrofluoric acid and ammonium fluoride (volume ratio 1:4), the etching temperature is 25°C, and the etching time is 12 minutes, i.e., the first preset time is 12 minutes.

[0043] After wet etching of the substrate, the mask and photoresist on the surface of each substrate segment are removed, and the substrate is cleaned and dried to obtain the prepared multi-segment substrate.

[0044] Optionally, assembling the multiple substrate segments to obtain a substrate assembly includes: splicing the multiple substrate segments using positioning pins; laying an elastic compensation layer on the surface of the spliced ​​multiple substrate segments; detecting the center distance error corresponding to each channel in the multiple substrate segments in real time, and applying a preload to the elastic compensation layer based on the center distance error corresponding to each channel to adjust the compression amount of the elastic compensation layer; and stopping the application of the preload to the elastic compensation layer when the center distance error corresponding to each channel is within a first preset range.

[0045] In this embodiment, four 32-channel substrate segments are spliced ​​together using positioning pins, and an elastic compensation layer is laid on the surface of the spliced ​​substrate segments. Optionally, the elastic compensation layer is a polyimide elastic compensation layer.

[0046] The center-to-center distance error (Pitch error) for each channel in a multi-segment substrate is detected in real time. Based on the Pitch error for each channel, a preload is applied to the elastic compensation layer. The preload is stopped when the Pitch error for each channel falls within a first preset range, thus securing the substrate assembly. The locating pins are interference-fitted with the substrate, and the elastic compensation layer is prepared using a vacuum deposition process, exhibiting excellent elastic recovery properties.

[0047] Optionally, a 6N preload can be applied using a stainless steel clamp, and the deformation of the elastic compensation layer can be used to offset the splicing error, ensuring that the overall pitch error of the 128 channels is within a first preset range. Optionally, the first preset range is a pitch error greater than or equal to... And less than or equal to 0.15μm.

[0048] In this embodiment, a multi-segment fused silica substrate splicing design is adopted, dividing the 128 channels into four 32-channel standard substrates. This segmented structure reduces the processing difficulty of a single substrate and improves yield. Micron-level positioning pins and a polyimide elastic compensation layer are placed on the substrate splicing surface. Pre-loaded stress is used to offset splicing gaps and processing deviations, achieving an overall pitch error of 128 channels greater than or equal to... Furthermore, the micrometer diameter is less than or equal to 0.15 μm, breaking through the cumulative error bottleneck in single-substrate processing. Simultaneously, the use of low-cost materials such as fused silica and polyimide reduces processing costs.

[0049] Optionally, adjusting the position of the M polarization-maintaining fibers in the corresponding groove includes: adjusting the position of the M polarization-maintaining fibers in the corresponding groove; and, after the position adjustment of the M polarization-maintaining fibers in the corresponding groove is completed, performing a pre-curing treatment on the M polarization-maintaining fibers.

[0050] In this embodiment, the optical fiber is first pre-treated by cutting the polarization-maintaining fiber to a specified length, removing the coating layer, cleaning the surface of the optical fiber, and polishing the end face.

[0051] The position of the polarization-maintaining fiber in the corresponding groove is adjusted. After the adjustment is completed, the M polarization-maintaining fibers are pre-cured. Optionally, the pre-curing method is to apply UV glue to the calibrated fiber, pre-cur for 30 seconds, and fix the fiber position.

[0052] Optionally, adjusting the position of the M polarization-maintaining fibers in the corresponding groove includes: identifying the fiber stress zone corresponding to each polarization-maintaining fiber using a visual inspection module; adjusting the orientation of each polarization-maintaining fiber so that the fiber stress zone corresponding to each polarization-maintaining fiber is aligned with the positioning groove provided at the bottom of the groove; acquiring the central region corresponding to each polarization-maintaining fiber using a scanning module, and adjusting the position of each polarization-maintaining fiber in the corresponding groove based on the position of the central region in the groove, until the center distance error corresponding to each channel is within a first preset range, and the polarization axis alignment error corresponding to each polarization-maintaining fiber is within a second preset range.

[0053] In this embodiment, the stress zone of each polarization-maintaining fiber is first identified by the visual inspection module, and the posture of each polarization-maintaining fiber is adjusted so that the stress zone of each polarization-maintaining fiber is aligned with the positioning groove at the bottom of the V-groove, thus achieving preliminary alignment of the polarization axis.

[0054] The polarization axis positioning mechanism includes a six-degree-of-freedom fine-tuning platform and a high-resolution vision inspection module. The fine-tuning platform has high positioning accuracy. Angle adjustment range to Adjustment precision greater than or equal to and less than or equal to The visual inspection module is equipped with a 200x microscope lens, with a resolution of [missing information]. It is used to identify the stress zone direction of polarization-maintaining optical fibers in real time.

[0055] Furthermore, the polarization-maintaining fibers are adjusted in real time. A scanning module acquires the central region corresponding to each polarization-maintaining fiber, and based on the position of the central region within the groove, the position of each polarization-maintaining fiber within its corresponding groove is adjusted.

[0056] Specifically, the aforementioned scanning module includes an atomic force microscope, a data processing unit, and a motion control unit. The steps for real-time adjustment of the polarization-maintaining fibers are as follows: the atomic force microscope is activated to acquire center position data for each fiber; the data processing unit analyzes the pitch error using an integrated empirical mode decomposition (EEMD) algorithm to generate compensation instructions; and the fine-tuning platform adjusts the fiber position based on these compensation instructions until the pitch error for all channels is within a first preset range, and the polarization axis alignment error for each polarization-maintaining fiber is within a second preset range. The second preset range is less than 0.3°.

[0057] The atomic force microscope (AFM) has a scanning resolution of 0.01 μm and a scanning range of 100 μm × 100 μm, enabling real-time acquisition of the three-dimensional contour data of the groove and optical fiber. The data processing unit is equipped with the EEMD algorithm to separate error components and generate compensation commands. The motion control unit has a response time of less than 10 ms, driving the fine-tuning platform to achieve precise positioning.

[0058] In this embodiment, an atomic force microscope and a data processing unit are used to acquire the three-dimensional contour data of the groove array in real time during the fiber assembly process. The EEMD algorithm is used to separate high-frequency noise and low-frequency system errors, generating precise position compensation commands for each channel. This drives an automated fine-tuning platform to dynamically correct the fiber placement posture, achieving closed-loop control of the pitch error across all channels. Micro-positioning slots matching the stress zone of the polarization-maintaining fiber are designed at the bottom of the grooves, working in conjunction with a six-degree-of-freedom automatic core-aligning mechanism to achieve a polarization axis alignment error of less than [value missing] for the 128-channel polarization-maintaining fiber. The use of low-shrinkage UV adhesive and a step-by-step curing process reduces stress deformation during curing and ensures long-term stability of polarization axis alignment accuracy.

[0059] Optionally, the step of encapsulating the substrate assembly with a cover plate to obtain a first fiber array includes: encapsulating the substrate assembly with a cover plate to obtain a third fiber array; pre-curing the third fiber array with ultraviolet light at a first power; and, if the pre-curing time reaches a second preset time, curing the third fiber array with ultraviolet light at a second power for a third preset time to obtain the first fiber array; wherein the first power is lower than the second power, and the second preset time is shorter than the third preset time.

[0060] In this embodiment, an integrated quartz cover plate is placed on top, and uniform pressure is applied by a clamp to make the elastic support point of the cover plate in close contact with the optical fiber, thereby completing the encapsulation operation of the substrate assembly and obtaining the third optical fiber array.

[0061] The cover plate is made of the same material as the substrate and is 1mm thick. The inner side is processed with an array of microstructure elastic support points. The support points are 5μm high and 1mm apart, and are evenly distributed in a matrix. This is used to apply uniform pressure during packaging and balance the stress between the substrate and the optical fiber.

[0062] Furthermore, the fiber array is distributed and cured. First, the third fiber array is pre-cured using ultraviolet light at a first power. After the pre-curing time reaches a second preset time, the third fiber array is cured using ultraviolet light at a second power for a third preset time to obtain the first fiber array.

[0063] Optionally, the first power is The second power is The second preset duration is 30 seconds, and the third preset duration is 120 seconds.

[0064] In this embodiment, an integrated cover plate is fabricated using fused silica material of the same origin as the substrate. An array of microstructure elastic support points is machined on the inner side of the cover plate to uniformly apply pressure during the encapsulation process, offsetting the thermal stress generated during fiber assembly and curing. The low coefficient of thermal expansion of silica material enhances the environmental adaptability of the fiber array. Furthermore, the thermal expansion coefficients of the substrate and cover plate are perfectly matched, complementing the stress-balanced encapsulation structure.

[0065] Optionally, the step of strengthening the first fiber array to obtain the second fiber array includes: placing the first fiber array in a high-low temperature chamber and subjecting the first fiber array to a preset number of high-low temperature cycle treatments through the high-low temperature chamber.

[0066] In this embodiment, the first fiber array is placed in a high and low temperature chamber for testing. The temperature was cycled up to 85℃ for 50 cycles, with each cycle holding the temperature for 30 minutes. After the test, the pitch error was checked using an atomic force microscope to ensure that the pitch error met the requirements.

[0067] Optionally, the step of performing performance testing on the second fiber array and determining the second fiber array that passes the performance testing as the target fiber array includes: performing insertion loss testing, return loss testing, center distance consistency testing, and polarization axis alignment error testing on the second fiber array; if the insertion loss value corresponding to the second fiber array is less than a first preset value, the return loss value corresponding to the second fiber array is greater than a second preset value, the center distance error corresponding to the second fiber array is within a first preset range, and the polarization axis alignment error corresponding to the second fiber array is within a second preset range, then the second fiber array is determined as the target fiber array.

[0068] In this embodiment, the second fiber array is subjected to insertion loss testing, return loss testing, center distance consistency testing, and polarization axis alignment error testing. The test standards are as follows: the insertion loss value of the second fiber array is less than 0.25 dB / channel; the return loss value of the second fiber array is greater than 60 dB; and the center distance error of the second fiber array is greater than or equal to... And less than or equal to 0.15 μm, the polarization axis alignment error of the second fiber array is less than .

[0069] The target fiber array is prepared after the second fiber array meets the test standards.

[0070] In this embodiment, a segmented substrate design and real-time closed-loop calibration are used to achieve a pitch error greater than or equal to that of the 128-channel two-dimensional fiber array. And less than or equal to 0.15 μm, the polarization axis alignment error of the polarization-maintaining fiber is less than It fully meets the coupling requirements of micromirror arrays and can effectively reduce optical link insertion loss and crosstalk.

[0071] See Figure 2 , Figure 2 This is a schematic diagram of the structure of a fiber optic array manufacturing device provided in an embodiment of this application, as shown below. Figure 2 As shown, the fiber array manufacturing equipment 200 includes: a preparation device 201 for preparing multiple substrate segments and assembling the multiple substrate segments to obtain a substrate assembly; each substrate segment includes N channels and N grooves corresponding to the N channels, the substrate assembly includes M channels and M grooves corresponding to the M channels, N and M are both positive integers greater than 1, and M is the product of N and the number of substrates; M polarization-maintaining fibers are placed into the M grooves corresponding to each other; a positioning mechanism 202 is used to adjust the position of the M polarization-maintaining fibers in the corresponding grooves; the preparation device 201 is also used to encapsulate the substrate assembly with a cover plate to obtain a first fiber array; the first fiber array is subjected to strengthening treatment to obtain a second fiber array; the second fiber array is subjected to performance testing, and the second fiber array that passes the performance test is determined as the target fiber array.

[0072] Optionally, the positioning mechanism 202 further includes: a visual inspection module for identifying the fiber stress zone corresponding to each polarization-maintaining fiber; a fine-tuning platform for adjusting the orientation of each polarization-maintaining fiber so that the fiber stress zone corresponding to each polarization-maintaining fiber is aligned with the positioning groove provided at the bottom of the groove; a scanning module for acquiring the central region corresponding to each polarization-maintaining fiber; the fine-tuning module is further used to adjust the position of each polarization-maintaining fiber in the corresponding groove based on the position of the central region in the groove, until the center distance error corresponding to each channel is within a first preset range, and the polarization axis alignment error corresponding to each polarization-maintaining fiber is within a second preset range.

[0073] It should be understood that the fiber optic array manufacturing equipment provided in this application embodiment can achieve the technical effects of the fiber optic array manufacturing method described above.

[0074] It should be noted that, in this document, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitations, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes that element. Furthermore, it should be noted that the scope of the methods and apparatuses in the embodiments of this application is not limited to performing functions in the order discussed, but may also include performing functions substantially simultaneously or in the reverse order, depending on the functions involved. For example, the described methods may be performed in a different order than described, and various steps may be added, omitted, or combined. Additionally, features described with reference to certain examples may be combined in other examples.

[0075] Through the above description of the embodiments, those skilled in the art can clearly understand that the methods of the above embodiments can be implemented by means of software plus necessary general-purpose hardware platforms. Of course, they can also be implemented by hardware, but in many cases the former is a better implementation method. Based on this understanding, the technical solution of this application, in essence, or the part that contributes to the prior art, can be embodied in the form of a software product. This computer software product is stored in a storage medium (such as ROM / RAM, magnetic disk, optical disk) and includes several instructions to cause a terminal (which may be a mobile phone, computer, server, air conditioner, or network device, etc.) to execute the methods described in the various embodiments of this application.

[0076] The embodiments of this application have been described above with reference to the accompanying drawings. However, this application is not limited to the specific embodiments described above. The specific embodiments described above are merely illustrative and not restrictive. Those skilled in the art can make many other forms under the guidance of this application without departing from the spirit and scope of the claims, and all of these forms are within the protection scope of this application.

Claims

1. A method for manufacturing an optical fiber array, characterized in that, The method includes: Prepare multiple substrate segments and assemble the multiple substrate segments to obtain a substrate assembly; each substrate segment includes N channels and N grooves corresponding to the N channels, and the substrate assembly includes M channels and M grooves corresponding to the M channels, where N and M are both positive integers greater than 1, and M is the product of N and the number of substrates. Place the M polarization-maintaining fibers into the M corresponding grooves, and adjust the positions of the M polarization-maintaining fibers in the corresponding grooves. The substrate assembly is encapsulated using a cover plate to obtain a first fiber array; The first fiber array is enhanced to obtain the second fiber array; The second fiber array is subjected to performance testing, and the second fiber array that passes the performance testing is determined as the target fiber array.

2. The method according to claim 1, characterized in that, The fabrication of the multi-segment substrate includes: A mask is deposited on the surface of each substrate segment and photoresist is spin-coated. Each substrate segment is subjected to photolithography exposure to form N channel groove photolithography patterns on the surface of each substrate segment; Each substrate segment exposed by photolithography is immersed in an etching solution for wet etching. When the etching time reaches the first preset time, the mask and photoresist on the surface of each substrate segment are removed, and the substrate is cleaned and dried to obtain the prepared multi-segment substrate.

3. The method according to claim 1, characterized in that, The step of splicing and assembling the multiple substrate segments to obtain a substrate assembly includes: The multiple substrate segments are spliced ​​together using positioning pins; An elastic compensation layer is laid on the surface of the spliced ​​multi-segment substrate; The center distance error corresponding to each channel in the multi-segment substrate is detected in real time, and a preload is applied to the elastic compensation layer based on the center distance error corresponding to each channel to adjust the compression amount of the elastic compensation layer. When the center distance error corresponding to each channel is within a first preset range, the preload applied to the elastic compensation layer is stopped.

4. The method according to claim 1, characterized in that, Adjusting the position of the M polarization-maintaining fibers in the corresponding grooves includes: Adjust the position of the M polarization-maintaining optical fibers in the corresponding grooves; After the positions of the M polarization-maintaining optical fibers in the corresponding grooves have been adjusted, the M polarization-maintaining optical fibers are pre-cured.

5. The method according to claim 4, characterized in that, Adjusting the position of the M polarization-maintaining fibers in the corresponding grooves includes: The optical fiber stress zone corresponding to each polarization-maintaining fiber is identified by a visual inspection module. Adjust the orientation of each polarization-maintaining fiber so that the fiber stress zone corresponding to each polarization-maintaining fiber is aligned with the positioning groove at the bottom of the groove. The scanning module collects the central region corresponding to each polarization-maintaining fiber, and adjusts the position of each polarization-maintaining fiber in the corresponding groove based on the position of the central region in the groove, until the center distance error corresponding to each channel is within a first preset range, and the polarization axis alignment error corresponding to each polarization-maintaining fiber is within a second preset range.

6. The method according to claim 1, characterized in that, The process of encapsulating the substrate assembly with a cover plate to obtain the first fiber array includes: The substrate assembly is encapsulated using a cover plate to obtain a third fiber array; The third fiber array is pre-cured using ultraviolet light at the first power. When the pre-curing time reaches the second preset time, the third fiber array is cured for the third preset time using ultraviolet light at the second power to obtain the first fiber array. Wherein, the first power is lower than the second power, and the second preset duration is shorter than the third preset duration.

7. The method according to claim 1, characterized in that, The process of strengthening the first fiber array to obtain the second fiber array includes: The first fiber array is placed in a high-low temperature chamber, and the first fiber array is subjected to a preset number of high-low temperature cycle treatments through the high-low temperature chamber.

8. The method according to claim 1, characterized in that, The step of performing performance testing on the second fiber array and determining the second fiber array that passes the performance test as the target fiber array includes: The second fiber array is subjected to insertion loss detection, return loss detection, center distance consistency detection, and polarization axis alignment error detection. The second fiber array is determined as the target fiber array if the insertion loss value of the second fiber array is less than the first preset value, the return loss value of the second fiber array is greater than the second preset value, the center distance error of the second fiber array is within the first preset range, and the polarization axis alignment error of the second fiber array is within the second preset range.

9. A fiber optic array manufacturing apparatus, characterized in that, The manufacturing equipment includes: A fabrication apparatus is used to fabricate multiple substrate segments and assemble the multiple substrate segments to obtain a substrate assembly; each substrate segment includes N channels and N grooves corresponding to the N channels, and the substrate assembly includes M channels and M grooves corresponding to the M channels, where N and M are both positive integers greater than 1, and M is the product of N and the number of substrates. Place the M polarization-maintaining optical fibers into the M corresponding grooves; A positioning mechanism is used to adjust the position of the M polarization-maintaining optical fibers in the corresponding grooves; The fabrication apparatus is also used to encapsulate the substrate assembly using a cover plate to obtain a first fiber array; The first fiber array is enhanced to obtain the second fiber array; The second fiber array is subjected to performance testing, and the second fiber array that passes the performance testing is determined as the target fiber array.

10. The fiber optic array manufacturing apparatus according to claim 9, characterized in that, The positioning mechanism further includes: The visual inspection module is used to identify the fiber stress zone corresponding to each polarization-maintaining fiber. A fine-tuning platform is used to adjust the orientation of each polarization-maintaining fiber so that the fiber stress zone corresponding to each polarization-maintaining fiber is aligned with the positioning groove set at the bottom of the groove. The scanning module is used to acquire the central region corresponding to each polarization-maintaining fiber; The fine-tuning platform is also used to adjust the position of each polarization-maintaining fiber in the corresponding groove based on the position of the central region in the groove, until the center distance error corresponding to each channel is within a first preset range and the polarization axis alignment error corresponding to each polarization-maintaining fiber is within a second preset range.

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