Uncrosslinked rubber composition and rubber molded article using the same
By adding a specific proportion of perfluorinated skeleton compounds and silica to silicone rubber, an uncrosslinked rubber composition is formed and then crosslinked to prepare rubber molded articles. This solves the shortcomings of silicone rubber compositions in terms of plasma resistance and achieves excellent plasma resistance applications.
CN121752671BActive Publication Date: 2026-07-24MITSUBISHI CABLE INDUSTRIES LTD
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Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- MITSUBISHI CABLE INDUSTRIES LTD
- Filing Date
- 2024-08-06
- Publication Date
- 2026-07-24
AI Technical Summary
Technical Problem
Existing silicone rubber compositions are insufficient in terms of plasma resistance, making it difficult to meet the requirements of certain specific applications.
Method used
A matrix rubber with silicone rubber as the main component is used, and a perfluorinated skeleton compound with ethylene unsaturated bonds and silicon dioxide are added. By controlling the proportion of each component and surface treatment, an uncrosslinked rubber composition is formed, and rubber molded products are prepared by crosslinking process.
Benefits of technology
It significantly improves the plasma resistance of rubber molded products, making them suitable for applications such as semiconductor manufacturing equipment.
✦ Generated by Eureka AI based on patent content.
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Abstract
The uncrosslinked rubber composition contains a base rubber of which a silicone rubber is a main component, a compound having a perfluoro skeleton with ethylenic unsaturation, and a first silica. The content of the compound having a perfluoro skeleton is less than 5 in mass ratio relative to the content of the first silica.
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