Pre-calibration method for pressure drift of MEMS sensor based on outdoor cold environment

Abstract

The application relates to the field of MEMS sensors and discloses a MEMS sensor barometric pressure drift pre-calibration method based on an outdoor cold environment, which comprises the following steps: S1, low-pressure environment construction and natural recovery; and S2, dynamic data synchronous acquisition.In the application, all active barometric pressure control and vibration generating devices are stopped, and the barometric pressure is naturally recovered, so that the pollution of low-pressure box vibration to sensor calibration data is fundamentally eliminated, the purity of the calibration data is ensured, the physical relationship between the barometric pressure and the sensor output is truly reflected by the obtained barometric pressure drift correction coefficient, and the authenticity and accuracy of the calibration coefficient are significantly improved; in view of the non-natural problem in the calibration process of the prior art, the barometric pressure natural recovery process is closer to the barometric pressure change scene experienced by the sensor in actual outdoor application, so that the generalization ability and compensation effect of the calibrated barometric pressure coefficient in the actual environment are better, and the adaptability problem that the accuracy required in the laboratory is high and the error in the field is large is effectively solved.

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