MEMS probe with sharp tail
By designing a MEMS probe with a pointed needle tail, the problem of breakdown caused by tiny insulating impurities under high pin count and high current carrying conditions of traditional probe cards is solved, achieving more stable electrical signal transmission and equipment protection.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- SUZHOU UIGREEN MICRO & NANO TECH CO LTD
- Filing Date
- 2025-12-30
- Publication Date
- 2026-04-10
AI Technical Summary
Traditional probe cards, under conditions of high pin count and high current carrying capacity, are prone to breakdown due to tiny insulating debris when the probe tail contacts the signal converter, causing test abnormalities and equipment damage.
A MEMS probe with a pointed needle tail is designed, featuring an inverted trapezoidal needle tip, a vertical elastic needle body, a protruding part, and a grooved needle tail. The needle tail is processed by femtosecond laser cutting to ensure point-to-surface contact between the needle tail and the gold-plated point on the signal converter, thereby enhancing contact stability.
This reduces the breakdown phenomenon during the contact process between the needle tail and the gold-plated point on the signal converter, and improves contact stability and the reliability of electrical signal transmission.
Smart Images
Figure CN121831218A_ABST
Abstract
Description
Technical Field
[0001] This invention relates to the field of MEMS probes for CP testing, and more specifically to a MEMS probe with a pointed needle tail. Background Technology
[0002] The probe is the core component of the probe card. As a customized consumable, the probe card is mainly used in the CP testing stage before chip packaging, serving as an electrical signal channel connecting the chip and the test machine. MEMS probe cards have significant advantages over traditional probe cards. Currently, the MEMS probe card market is mainly monopolized by foreign countries, especially in the design and manufacturing technology of MEMS probes, where China started relatively late and is still in the initial stage of development.
[0003] During testing, the probe tip contacts the chip under test (DUT), and the probe tail contacts the contact pad of the signal adapter. Under the action of the probe station, the DUT moves closer to the test head, squeezing the probe and causing it to deform. The deformed probe exerts pressure on the signal adapter at the tail end and on the DUT at the tip end. This pressure ensures stable contact between the probe tail and the signal adapter, and between the probe tip and the DUT, preventing open circuits and maintaining stable resistance.
[0004] With the development of chips, the probe card industry is currently moving towards higher pin counts and higher current carrying capacity. Traditional probe tails are planar at the contact point with the signal converter. When the planar probe tail contacts the gold-plated point on the signal converter, tiny insulating impurities may exist between the probe tail and the gold-plated point, potentially causing an isolation and an open circuit. Under high current conditions, this can lead to a breakdown effect, damaging both the probe tail and the gold-plated point on the converter, resulting in test abnormalities and equipment damage. The probability of a tiny insulating impurity appearing between a single probe tail and the gold-plated point on the signal converter is relatively small; however, when the total number of probe pins reaches tens of thousands, this probability increases significantly. Summary of the Invention
[0005] To overcome the aforementioned problems, the present invention aims to provide a MEMS probe with a pointed needle tail, which reduces the breakdown phenomenon that occurs during the contact between the needle tail and the gold-plated point on the signal converter.
[0006] To achieve the above objectives, the technical solution adopted by this invention is: a MEMS probe with a pointed needle tail, comprising a needle tip, a needle body, and a needle tail.
[0007] The needle includes a needle body and a needle tip, and the cross-section of the needle tip has an inverted trapezoidal structure;
[0008] The needle body is vertical and has elasticity;
[0009] The needle tail includes a needle tail body and a needle tail end. The needle tail body is provided with a needle tail protrusion and a needle tail groove. The needle tail end has a protruding pointed quadrangular pyramid structure. The front and rear side views of the needle tail end form an isosceles triangle structure, and the left and right side views form a triangle structure.
[0010] Preferably, the needle tail end is formed by planar contour cutting plus Z-axis inclined material removal cutting.
[0011] Preferably, the pointed position of the needle tail end on the needle tail body is adjustable.
[0012] Preferably, the needle tail protrusion is located on one side of the needle tail body, and the needle tail groove is located on the other side of the needle tail body, with the two positioned opposite each other.
[0013] Preferably, both the needle tail protrusion and the needle tail groove are formed by planar contour cutting.
[0014] Preferably, the end face of the needle tip is planar.
[0015] Preferably, the protruding part of the needle tail has a cuboid structure, and the interior of the groove of the needle tail has a cuboid structure.
[0016] Preferably, the probe is cut from a metal sheet using a femtosecond laser, and several probes are connected by a frame to form a probe unit.
[0017] Preferably, one end of the probe is connected to the first connecting rib on the frame via the tip of the probe, and the other end is connected to the second connecting rib on the frame via the groove at the tail of the probe.
[0018] Preferably, the probe disconnects from the frame after cutting the first and second connecting ribs with a femtosecond laser.
[0019] The beneficial effects of this invention are: the pointed structure of the needle tail allows point-to-surface contact when the needle tail contacts the gold-plated point on the signal converter, which not only transmits electrical signals but also enhances the stability of the contact and reduces the breakdown phenomenon that occurs during the contact between the needle tail and the gold-plated point on the signal converter. Attached Figure Description
[0020] Figure 1 This is a schematic diagram of the probe structure in this embodiment. Figure 1 ;
[0021] Figure 2 This is a schematic diagram of the probe structure in this embodiment. Figure 2 ;
[0022] Figure 3This is a schematic diagram of the fabrication structure of the probe unit in this embodiment.
[0023] In the figure: 1. Needle tip; 2. Needle body; 3. Needle tail; 4. Needle tip body; 5. Needle tip end; 6. Needle tail body; 7. Needle tail end; 8. Needle tail protrusion; 9. Needle tail groove; 10. Metal sheet; 11. Frame; 12. First connecting rib; 13. Second connecting rib. Detailed Implementation
[0024] The preferred embodiments of the present invention will now be described in detail with reference to the accompanying drawings, so that the advantages and features of the present invention can be more easily understood by those skilled in the art, thereby providing a clearer and more explicit definition of the scope of protection of the present invention.
[0025] See Figures 1-3 As shown, this embodiment discloses a MEMS probe with a pointed needle tail, including a needle tip 1, a needle body 2, and a needle tail 3.
[0026] The needle 2 includes a needle body 4 and a needle tip 5. The cross-section of the needle tip 5 is an inverted trapezoidal structure, that is, the end face of the needle tip 5 is set as a plane. The side of the needle tip 5 is inclined towards the needle body 4. The inclination makes it easier for the needle 2 to be inserted into the probe hole. The inclination has a guiding effect.
[0027] The needle body 2 is vertical and elastic. As an intermediate body connecting the needle head 1 and the needle tail 3, the needle body 2 can undergo elastic deformation when pressure is applied to it by the needle head 1 and the needle tail 3, and can return to a vertical state when the pressure is removed.
[0028] The needle tail 3 includes a needle tail body 6 and a needle tail end 7. The needle tail body 6 is provided with a needle tail protrusion 8 and a needle tail groove 9. The needle tail protrusion 8 is located on one side of the needle tail body 6, and the needle tail groove 9 is located on the other side of the needle tail body 6. The two are positioned opposite each other. The function of the needle tail protrusion 8 is to prevent the probe from falling completely into the probe needle hole when the probe is inserted into the probe needle hole.
[0029] The needle tail end 7 has a raised, pointed, four-sided pyramid structure. The front and rear side views of the needle tail end 7 have an isosceles triangular structure, and the left and right side views have a triangular structure.
[0030] The needle tail end 7 is processed by planar contour cutting plus Z-axis inclined material removal cutting, and the pointed position of the needle tail end 7 on the needle tail body 6 is adjustable. It can be set at the center of the needle tail body 6, or at a position slightly to the left or right of the center.
[0031] In one embodiment, both the needle tail protrusion 8 and the needle tail groove 9 are formed by cutting a planar contour. The needle tail protrusion 8 has a cuboid structure, and the interior of the needle tail groove 9 has a cuboid structure.
[0032] In one embodiment, the probe is cut on a metal sheet 10 by a femtosecond laser. Several probes are connected by a frame 11 to form a probe unit. One end of the probe is connected to the first connecting rib 12 on the frame 11 through the needle tip 5, and the other end is connected to the second connecting rib 13 on the frame 11 through the needle tail groove 9.
[0033] First, the planar structure of the probe is drawn and imported into the femtosecond laser equipment. A specific metal sheet 10 is laid flat on a suitable glass, and a specific adhesive is used to bond the metal sheet 10 and the glass together. The metal sheet 10 is flattened using a tool. The glass with the metal sheet 10 attached is placed on the worktable of the femtosecond laser equipment. The femtosecond laser is used to process the frame and the main outline of the individual probe on the metal sheet 10, including the needle head 1, the needle body 2, and the needle tail 3. Then, some details are refined using the laser, including the needle head end 5, the needle tail end 7, the needle tail protrusion 8, the needle tail groove 9, the first connecting rib 12, and the second connecting rib 13, thus completing the manufacturing of the overall probe.
[0034] The metal sheet 10 used for probe processing is preferably a high-strength, high-conductivity metal foil. Its high strength allows the probe body 2 to bend and deform to the maximum extent, preventing the probe from being crushed during testing. Its high conductivity allows the probe to carry a larger current, facilitating current supply and signal transmission during testing.
[0035] According to design requirements, probes with the same structure can be cut into multiple identical probes at a certain interval. A probe unit can be composed of dozens to hundreds of individual probes. All probes in a probe unit are connected to the same frame 11 through the first connecting rib 12 and the second connecting rib 13, which facilitates the mass production of probes and also makes it convenient for subsequent inventory, transportation and storage of probes.
[0036] The first connecting rib 12 and the second connecting rib 13 ensure the stability of the probe during the processing. When the probe is cut by the femtosecond laser, the connection with the frame 11 is broken and a single probe is formed.
[0037] In addition to connecting with the second connecting rib 13, the needle tail groove 9 can also be used to store the burrs and residue left after the second connecting rib 13 is cut off.
[0038] The above embodiments are only for illustrating the technical concept and features of the present invention. Their purpose is to enable those skilled in the art to understand the content of the present invention and implement it. They should not be used to limit the scope of protection of the present invention. All equivalent changes or modifications made in accordance with the spirit and essence of the present invention should be covered within the scope of protection of the present invention.
Claims
1. A MEMS probe with a pointed needle tail, comprising a needle tip, a needle body, and a needle tail, characterized in that, The needle includes a needle body and a needle tip, and the cross-section of the needle tip has an inverted trapezoidal structure; The needle body is vertical and has elasticity; The needle tail includes a needle tail body and a needle tail end. The needle tail body is provided with a needle tail protrusion and a needle tail groove. The needle tail end has a protruding pointed quadrangular pyramid structure. The front and rear side views of the needle tail end form an isosceles triangle structure, and the left and right side views form a triangle structure.
2. The MEMS probe with a pointed needle tail according to claim 1, characterized in that, The needle tail end is formed by planar contour cutting plus Z-axis inclined material removal cutting.
3. The MEMS probe with a pointed needle tail according to claim 1, characterized in that, The pointed position of the needle tail end on the needle tail body is adjustable.
4. The MEMS probe with a pointed needle tail according to claim 1, characterized in that, The protruding part of the needle tail is located on one side of the needle tail body, and the groove of the needle tail is located on the other side of the needle tail body, with the two positioned opposite each other.
5. The MEMS probe with a pointed needle tail according to claim 1, characterized in that, Both the needle tail protrusion and the needle tail groove are machined by cutting a planar contour.
6. The MEMS probe with a pointed needle tail according to claim 1, characterized in that, The end face of the needle tip is planar.
7. The MEMS probe with a pointed needle tail according to claim 1, characterized in that, The protruding part of the needle tail has a cuboid structure, and the interior of the groove of the needle tail also has a cuboid structure.
8. The MEMS probe with a pointed needle tail according to any one of claims 1-7, characterized in that, The probe is cut from a metal sheet using a femtosecond laser, and several probes are connected by a frame to form a probe unit.
9. The MEMS probe with a pointed needle tail according to claim 8, characterized in that, One end of the probe is connected to the first connecting rib on the frame via the tip of the needle, and the other end is connected to the second connecting rib on the frame via the groove at the tail of the needle.
10. The MEMS probe with a pointed needle tail according to claim 9, characterized in that, The probe disconnects from the frame after cutting the first and second connecting ribs with a femtosecond laser.