Water chilling unit and chip testing equipment

Abstract

The invention discloses a water chilling unit and chip testing equipment, and the water chilling unit comprises a first evaporator, a compressor, a first condenser and a first throttler which are sequentially connected and form circulation, and further comprises a waste heat refrigeration module; the waste heat refrigeration module comprises a driving heat recovery unit and a pre-cooling unit; the driving heat recovery unit is connected between the compressor and the first condenser and is configured to recover waste heat of the output end of the compressor so as to drive the waste heat refrigeration module to operate. The pre-cooling unit and the first evaporator are connected to a circulation loop of fluid to be cooled in series, and the pre-cooling unit is configured to pre-cool the fluid to be cooled. The waste heat of the output end of the compressor is efficiently recovered by means of the driving heat recovery unit, the waste heat which can be directly released originally is converted into power for driving the waste heat refrigeration module to operate, so that the pre-cooling unit generates cooling capacity, and the pre-cooling unit and the first evaporator are connected in series to achieve pre-cooling treatment on cooling fluid.

Description

Technical Field

[0001] This invention relates to the field of chiller technology, and more particularly to a chiller and chip testing equipment. Background Technology

[0002] Chip testing is a crucial step in the semiconductor industry to ensure chip performance and quality. Chip testing equipment, as the core testing platform, is used to comprehensively test key indicators such as the chip's electrical performance and reliability. During chip testing, the chip operates under high load for extended periods, continuously generating a large amount of heat. If this heat cannot be dissipated in time, the chip temperature will become excessively high, severely affecting the accuracy and reliability of test data and potentially damaging the chip. Therefore, chip testing equipment typically requires dedicated cooling devices to maintain a stable testing environment. Water chillers, as highly efficient cooling equipment, are a core component of chip testing equipment. Their main function is to cool the coolant required for chip testing. Through the circulation of the coolant, the heat generated by the chip is carried away, providing a stable low-temperature environment for chip testing.

[0003] Currently, chillers used in chip testing equipment typically consist of a conventional structure comprising an evaporator, compressor, condenser, and expansion valve. However, for scenarios with high loads, such as the significant temperature difference between the high-temperature return water generated during chip testing and the required cooling temperature, this conventional structure is insufficient to meet the operational demands of the chip testing equipment. The overall operating load is too high, increasing energy consumption and potentially accelerating wear and tear on core components. Furthermore, these chillers generate substantial waste heat during operation, which is usually directly discharged into the environment without effective recovery, resulting in significant energy waste and low energy efficiency. Therefore, there is an urgent need to design a new type of chiller and corresponding chip testing equipment. Summary of the Invention

[0004] The purpose of this invention is to provide a chiller unit and chip testing equipment to solve the problems of high operating load and unutilized waste heat in existing chiller units under chip testing scenarios with large temperature differences.

[0005] To achieve this objective, the present invention adopts the following technical solution: A chiller unit for cooling a fluid to be cooled includes a first evaporator, a compressor, a first condenser, and a first throttling device connected in sequence and forming a circulation, and also includes a waste heat refrigeration module; The waste heat cooling module includes a drive heat recovery unit and a precooling unit; The drive heat recovery unit is connected between the compressor and the first condenser and is configured to recover the waste heat at the output of the compressor to drive the operation of the waste heat refrigeration module so that the precooling unit generates cooling capacity. The precooling unit is connected in series with the first evaporator in the circulation loop of the fluid to be cooled, and is configured to precool the fluid.

[0006] Furthermore, the driving heat recovery unit includes a generator; The precooling unit includes a second evaporator.

[0007] Furthermore, the waste heat refrigeration module also includes a second condenser, a second throttle valve, and an absorber; the generator, second condenser, second throttle valve, second evaporator, and absorber are connected in sequence to form a cycle; The generator and the absorber are provided with a first branch from the generator to the absorber and a second branch from the absorber to the generator, and a first liquid pump is provided on the second branch.

[0008] Furthermore, the waste heat refrigeration module also includes a solution heat exchanger connected to the first branch and the second branch, the solution heat exchanger being used to exchange heat between the fluids in the first branch and the second branch.

[0009] Furthermore, the generator includes a first cavity and a first heating tube. The first cavity contains an absorbent solution capable of undergoing a gas-liquid phase change. The first cavity is provided with a vapor outlet connected to a second condenser, a first solution outlet connected to a first branch, and a first solution inlet connected to a second branch. The first heating tube passes through the first cavity, and both ends of the first heating tube are connected to the outlet of the compressor and the inlet of the first condenser, respectively, so that the high-temperature fluid from the compressor passes through the first heating tube and heats the absorbent solution; The absorber includes a second cavity and a first cooling pipe; the second cavity is provided with a vapor inlet communicating with a second evaporator, a second solution inlet communicating with a first branch, and a second solution outlet communicating with a second branch; the second cavity contains an absorbent solution from the generator; The first cooling pipe is disposed in the second cavity, and a cooling medium flows through the first cooling pipe to remove the heat of the absorbent solution in the second cavity.

[0010] Furthermore, the waste heat cooling module also includes: A first regulating valve connected in parallel with the second throttle valve; A second regulating valve is connected in parallel with the generator; A third regulating valve is connected in series with the generator; A fourth regulating valve is connected in parallel with the second evaporator; A fifth regulating valve is connected in series with the second evaporator; A sixth regulating valve is connected in series with the first cooling pipe.

[0011] Furthermore, the chiller unit includes a composite high-efficiency refrigeration mode, a single-cycle refrigeration mode, a low-load refrigeration mode, and a pre-cooling enhanced refrigeration mode; When the chiller unit is in the combined high-efficiency cooling mode, the second regulating valve is open at 10%~30%, the third regulating valve is open at 70%~100%, the fourth regulating valve is closed, the fifth regulating valve is open at 70%~100%, and the sixth regulating valve is open at 70%~100%. When the chiller unit is in single-cycle cooling mode, the second regulating valve is 100% open, the third regulating valve is closed, the fourth regulating valve is 100% open, the fifth regulating valve is closed, and the sixth regulating valve is closed. When the chiller unit is in low-load cooling mode, the second regulating valve is open at 60%~80%, the third regulating valve is open at 30%~50%, the fourth regulating valve is closed, the fifth regulating valve is open at 30%~50%, and the sixth regulating valve is open at 30%~50%. When the chiller unit is in the pre-cooling enhanced refrigeration mode, the second regulating valve is open at 10%~30%, the third regulating valve is open at 100%, the fourth regulating valve is closed, the fifth regulating valve is open at 100%, and the sixth regulating valve is open at 100%.

[0012] Furthermore, the absolute working pressure range within the generator is 5 kPa to 12 kPa; The absolute working pressure range in the second evaporator is 0.5 kPa to 1.5 kPa.

[0013] Furthermore, the absorbent solution is one of lithium bromide aqueous solution, lithium chloride aqueous solution, lithium formate aqueous solution, or ammonia solution; The steam inlet of the second chamber is equipped with a nozzle.

[0014] A chip testing device, including the chiller unit; The chip testing equipment is equipped with a circulation loop, in which a coolant is circulated to cool the chip under test. The chiller unit is configured to cool the coolant from a high return water temperature after absorbing heat from the chip under test to a low supply water temperature required for testing the chip under test.

[0015] Compared with the prior art, the present invention has the following beneficial effects:

[0016] The chiller unit provided by this invention, by setting up a waste heat refrigeration module, efficiently recovers the waste heat from the compressor output end with the help of a drive heat recovery unit. This converts the waste heat, which would otherwise be directly released, into power to drive the waste heat refrigeration module, enabling the pre-cooling unit to generate cooling capacity. The pre-cooling unit, connected in series with the first evaporator, pre-cools the cooling fluid, significantly reducing the temperature of the fluid entering the first evaporator. This effectively reduces the refrigeration load on the first evaporator, allowing the compressor to meet refrigeration needs without operating at excessively high loads. Simultaneously, it reduces the heat exchange load on the first condenser, placing the first evaporator, compressor, and condenser in optimal operating conditions. This not only improves the overall energy efficiency of the chiller unit and reduces energy waste, but also reduces the operating losses of the first evaporator, compressor, and condenser, extending the equipment's lifespan. Furthermore, the coordinated refrigeration of the pre-cooling unit and the main cycle enhances the overall refrigeration capacity of the chiller unit, meeting higher refrigeration demands.

[0017] This invention incorporates a solution heat exchanger, enabling heat exchange between the dilute and concentrated solutions within the waste heat refrigeration module. This facilitates heat recovery and reuse, effectively reducing the generator's demand for compressor waste heat and allowing limited waste heat to play a greater driving role. Simultaneously, it lowers the temperature of the dilute solution entering the absorber, improving the absorption efficiency of the absorbent solution for auxiliary refrigerant vapor within the absorber. This further optimizes the operating efficiency of the waste heat refrigeration module, allowing it to achieve better pre-cooling with less waste heat consumption. Consequently, it further reduces the workload of the main cycle, enhancing the overall refrigeration efficiency and energy utilization of the entire chiller unit. Attached Figure Description

[0018] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0019] The structures, proportions, sizes, etc., shown in the accompanying drawings of this specification are only for the purpose of assisting those skilled in the art in understanding and reading the content disclosed in the specification, and are not intended to limit the conditions under which the present invention can be implemented. Therefore, they have no substantial technical significance. Any modifications to the structure, changes in the proportions, or adjustments to the size, without affecting the effects and objectives that the present invention can produce, should still fall within the scope of the technical content disclosed in the present invention.

[0020] Figure 1 This is a schematic diagram of the chiller unit in this invention; Figure 2 This is a schematic diagram of the waste heat cooling module in this invention; Figure 3 This is a schematic diagram of the generator in this invention; Figure 4 This is a schematic diagram of the absorber in this invention.

[0021] Illustrations: 11. First evaporator; 12. Compressor; 13. First condenser; 14. First expansion valve; 15. Circulation pump; 21. Generator; 211. First chamber; 212. First heating tube; 213. Steam outlet; 214. First solution outlet; 215. First solution inlet; 22. Second condenser; 23. Second throttle valve; 24. Second evaporator; 25. Absorber; 251. Second chamber; 252. First cooling tube; 253. Steam inlet; 254. Second solution inlet; 255. Second solution outlet; 26. Solution heat exchanger; 27. First liquid pump; 31. First branch road; 32. Second branch road; 41. First regulating valve; 42. Second regulating valve; 43. Third regulating valve; 44. Fourth regulating valve; 45. Fifth regulating valve; 46. Sixth regulating valve. Detailed Implementation

[0022] To make the objectives, features, and advantages of this invention more apparent and understandable, the technical solutions of the embodiments of this invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the embodiments described below are only some embodiments of this invention, and not all embodiments. Based on the embodiments of this invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this invention.

[0023] In the description of this invention, it should be understood that the terms "upper," "lower," "top," "bottom," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing the invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of the invention. It should be noted that when a component is considered to be "connected" to another component, it can be directly connected to the other component or there may be a component positioned centrally in the connection.

[0024] The technical solution of the present invention will be further described below with reference to the accompanying drawings and specific embodiments.

[0025] Example 1: This embodiment provides a chiller unit that cools the fluid to be cooled through a refrigeration cycle. Combined with... Figure 1As shown, the chiller unit includes a first evaporator 11, a compressor 12, a first condenser 13, and a first throttling device 14 connected in sequence and forming a cycle. The first evaporator 11 is used to realize heat exchange between the fluid to be cooled and the main refrigerant in the refrigeration cycle, allowing the main refrigerant to absorb heat from the fluid to be cooled and achieve the cooling effect, wherein the main refrigerant becomes low-pressure and high-temperature. The compressor 12 is used to compress the low-pressure main refrigerant that has completed heat absorption, making it a high-temperature and high-pressure main refrigerant, preparing for subsequent heat release. The first condenser 13 is used to realize heat exchange between the high-temperature and high-pressure main refrigerant and the external cooling medium, allowing the main refrigerant to release the heat it carries and complete the condensation process to form a high-pressure and low-temperature main refrigerant. The first throttling device 14 is used to throttle and reduce the pressure of the low-temperature and high-pressure main refrigerant that has completed condensation, making it a low-temperature and low-pressure gas-liquid mixture, which then re-enters the first evaporator 11 to participate in the refrigeration cycle. In a specific embodiment, the circulation structure formed by the first evaporator 11, compressor 12, first condenser 13, and first throttling device 14 is further provided with a circulation pump 15. The circulation pump 15 is used to provide power for the continuous flow of the main refrigerant in the circulation structure, ensuring that the main refrigerant can pass through each component sequentially along a predetermined path, maintaining the stable operation of the entire vapor compression refrigeration cycle. Furthermore, the circulation structure formed by the first evaporator 11, compressor 12, first condenser 13, and first throttling device 14 is the main circulation of the chiller unit described in this embodiment.

[0026] The chiller unit also includes a waste heat refrigeration module, used to recover and utilize the waste heat generated during the operation of the compressor 12. This waste heat drives the chiller to complete its own refrigeration cycle, thereby providing pre-cooling capacity for the fluid to be cooled. This, in conjunction with the main cycle, improves the overall refrigeration efficiency while reducing the refrigeration load of the main cycle. Figure 2As shown, the waste heat refrigeration module includes a driving heat recovery unit and a pre-cooling unit. The driving heat recovery unit is connected between the compressor 12 and the first condenser 13, and is configured to recover the waste heat from the output of the compressor 12 to drive the operation of the waste heat refrigeration module, so that the pre-cooling unit generates cooling capacity. The pre-cooling unit is connected in series with the first evaporator 11 in the circulation loop of the fluid to be cooled, and is configured to pre-cool the fluid to be cooled. In a specific embodiment, the driving heat recovery unit includes a generator 21, which is used to absorb the waste heat output from the compressor 12, realize the desorption process of the absorbent solution, release the auxiliary refrigerant vapor in the absorbent solution, and provide power for the circulation of the waste heat refrigeration module. The pre-cooling unit includes a second evaporator 24, which is used to realize the heat exchange between the fluid to be cooled and the auxiliary refrigerant in the waste heat refrigeration module, provide pre-cooling capacity for the fluid to be cooled, and reduce the temperature of the fluid to be cooled when it enters the first evaporator 11. It should be noted that the absolute working pressure range within the waste heat refrigeration module is 0.5 kPa to 12 kPa. This pressure range is the suitable pressure range for stable operation of the waste heat refrigeration module, ensuring the orderly circulation and heat exchange process of the absorbent solution and / or auxiliary refrigerant between the various components inside the module, and keeping the gas-liquid phase change and absorption-desorption reactions of the absorbent solution and auxiliary refrigerant under stable operating conditions. Furthermore, the absolute working pressure range within the generator 21 is 5 kPa to 12 kPa. This pressure range matches the temperature requirements of the driving heat source (waste heat from compressor 12), ensuring that the absorbent solution within the generator 21 can fully absorb waste heat to complete the desorption reaction and release sufficient auxiliary refrigerant vapor. The absolute working pressure range within the second evaporator 24 is 0.5 kPa to 1.5 kPa. This pressure range allows the auxiliary refrigerant within the second evaporator 24 to achieve a low-temperature evaporation process, improving the heat absorption capacity of the auxiliary refrigerant and thus enhancing the pre-cooling effect of the pre-cooling unit on the cooled fluid.

[0027] The waste heat refrigeration module also includes a second condenser 22, a second throttle valve 23, and an absorber 25. The generator 21, the second condenser 22, the second throttle valve 23, the second evaporator 24, and the absorber 25 are connected in sequence to form a cycle; wherein, a first branch 31 from the generator 21 to the absorber 25 and a second branch 32 from the absorber 25 to the generator 21 are provided between the generator 21 and the absorber 25, and a first liquid pump 27 is provided on the second branch 32.

[0028] In a specific embodiment, combined with Figure 3As shown, the generator 21 includes a first chamber 211 and a first heating tube 212. The first chamber 211 contains an absorbent solution capable of undergoing a gas-liquid phase change. The first heating tube 212 passes through the first chamber 211, and its two ends are connected to the outlet of the compressor 12 and the inlet of the first condenser 13, respectively, so that the high-temperature fluid from the compressor 12 passes through the first heating tube 212 and heats the absorbent solution. The first chamber 211 is provided with a vapor outlet 213 connected to the second condenser 22, a first solution outlet 214 connected to the first branch 31, and a first solution inlet 215 connected to the second branch 32. It should be noted that the absorbent solution is an absorbent-auxiliary refrigerant pair, specifically a solution with reversible absorption and desorption capabilities for the auxiliary refrigerant, capable of desorbing the refrigerant when absorbing heat and absorbing the refrigerant when releasing heat. Furthermore, the absorbent solution is one of lithium bromide aqueous solution, lithium chloride aqueous solution, lithium formate aqueous solution, or ammonia solution; in this case, the auxiliary refrigerant is water.

[0029] In a specific embodiment, combined with Figure 4 As shown, the absorber 25 includes a second cavity 251 and a first cooling pipe 252. The second cavity 251 is provided with a vapor inlet 253 connected to the second evaporator 24, a second solution inlet 254 connected to the first branch 31, and a second solution outlet 255 connected to the second branch 32. Further, the vapor inlet 253 of the second cavity 251 is provided with a nozzle for uniformly dispersing the auxiliary refrigerant vapor entering from the second evaporator 24, so that the gaseous auxiliary refrigerant vapor can be fully diffused into the absorbent solution in the second cavity 251 in a turbulent manner, which greatly increases the contact area and contact time between the auxiliary refrigerant vapor and the absorbent solution, allowing the two to fully contact and complete the absorption reaction, effectively improving the absorption efficiency of the absorber 25, while avoiding the problem of local temperature rise caused by local concentration of auxiliary refrigerant vapor, and ensuring the stable progress of the absorption process. The second cavity 251 contains an absorbent solution from the generator 21. The first cooling pipe 252 is located inside the second cavity 251, and a cooling medium flows through the first cooling pipe 252 to remove the heat from the absorbent solution inside the second cavity 251. The absorbent solution releases a large amount of absorbed heat during the absorption of auxiliary refrigerant vapor. If the heat cannot be dissipated in time, the temperature of the absorbent solution will rise, and its absorption capacity for auxiliary refrigerant vapor will decrease significantly with the increase in temperature. It will not be able to fully complete the absorption process, which will affect the normal circulation of the absorbent solution and / or auxiliary refrigerant in the waste heat refrigeration module, and may even lead to a significant reduction in the operating efficiency of the entire waste heat refrigeration cycle and instability. Timely cooling of the absorbent solution can ensure that it always maintains good absorption performance, ensures full absorption of auxiliary refrigerant vapor, and ensures the stable and efficient operation of the waste heat refrigeration module.

[0030] In practice, the absorbent solution in generator 21 absorbs the waste heat transferred from compressor 12 and completes desorption, releasing auxiliary refrigerant vapor. Simultaneously, the absorbent solution in generator 21 becomes more concentrated due to the precipitation of auxiliary refrigerant, forming a concentrated solution. This concentrated solution is transported to absorber 25 via the first branch 31 flowing from generator 21 to absorber 25. The auxiliary refrigerant vapor released from generator 21 enters the second condenser 22, where it condenses into liquid auxiliary refrigerant. The liquid auxiliary refrigerant is then throttled and depressurized by the second throttling valve 23 before entering the second evaporator 24, where it absorbs heat from the fluid to be cooled. Evaporation occurs, and the evaporated auxiliary refrigerant vapor enters the absorber 25, where it comes into full contact with the concentrated solution transported to the absorber 25 via the first branch 31. After cooling in the absorber 25, the concentrated solution absorbs the auxiliary refrigerant vapor to form a dilute solution. This dilute solution, as the mixed solution after absorption, flows back to the generator 21 via the second branch 32, which flows from the absorber 25 to the generator 21, thus forming a complete waste heat cooling forward cycle. This cycle is driven by the waste heat generated by the compressor 12 and can continuously provide pre-cooling capacity to the fluid to be cooled through the second evaporator 24, effectively improving the overall cooling capacity of the chiller unit and significantly reducing the operating load of the main cycle.

[0031] Based on the above embodiments, the waste heat cooling module further includes a solution heat exchanger 26 connected to the first branch 31 and the second branch 32, the solution heat exchanger 26 being used to exchange heat between the fluids in the first branch 31 and the second branch 32.

[0032] In specific implementation, the solution heat exchanger 26 is connected to the first branch 31 for conveying concentrated solution and the second branch 32 for conveying dilute solution. The concentrated solution and the dilute solution exchange heat before the concentrated solution enters the absorber 25 from the generator 21 and before the dilute solution enters the generator 21 from the absorber 25. The concentrated solution releases heat to lower its own temperature, and the dilute solution absorbs heat to raise its own temperature. Through this heat exchange process, the heat carried by the concentrated solution can be recovered and the dilute solution can be preheated with this heat, reducing the waste heat consumption of the compressor 12 by the generator 21. At the same time, the temperature of the concentrated solution when it enters the absorber 25 is reduced, the absorption efficiency in the absorber 25 is increased, and the energy utilization efficiency of the waste heat refrigeration module is further improved, thereby reducing the energy consumption of the entire chiller unit.

[0033] Based on the above embodiments, the waste heat refrigeration module further includes: a first regulating valve 41 connected in parallel with the second throttle valve 23; a second regulating valve 42 connected in parallel with the generator 21; a third regulating valve 43 connected in series with the generator 21; a fourth regulating valve 44 connected in parallel with the second evaporator 24; a fifth regulating valve 45 connected in series with the second evaporator 24; and a sixth regulating valve 46 connected in series with the first cooling pipe 252. Further, the first regulating valve 41 is connected at both ends to the second condenser 22 and the second evaporator 24 respectively, enabling bypass regulation of the auxiliary refrigerant and capacity regulation of the waste heat refrigeration module. Simultaneously, during low-load operation or start-up phases of the system, the bypassed portion of the auxiliary refrigerant directly enters the absorber 25, avoiding crystallization of the absorbent solution caused by excessively low temperature of the auxiliary refrigerant in the evaporator. In a specific embodiment, the opening of the first regulating valve 41 is flexibly adjusted according to the operating conditions of the waste heat refrigeration module. During system startup or low-load operation, to fully utilize the anti-crystallization function and adapt to capacity adjustment requirements, the opening of the first regulating valve 41 is 30%~50%. When the waste heat refrigeration module is operating at full load (such as in composite high-efficiency refrigeration mode or pre-cooling enhanced refrigeration mode), only a small amount of auxiliary refrigerant needs to be bypassed, and the opening of the first regulating valve 41 is 10%~20%. When the system is in pure vapor compression refrigeration mode and the waste heat refrigeration module is not running, the opening of the first regulating valve 41 is 0% (closed state) to avoid energy loss caused by ineffective bypass of auxiliary refrigerant. The two ends of the second regulating valve 42 are connected to the outlet of the compressor 12 and the inlet of the first condenser 13, respectively, and are used to bypass the waste heat fluid of the compressor 12 that does not need to be recovered by the generator 21, flexibly adjusting the flow rate of the waste heat fluid entering the generator 21. The third regulating valve 43 is connected to the outlet of the compressor 12 and the heat source inlet of the generator 21, respectively, and is used to precisely control the flow rate of the waste heat fluid entering the generator 21, thereby adjusting the total amount of waste heat that the generator 21 can utilize. The fourth regulating valve 44 is connected to the inlet and outlet of the second evaporator 24, respectively, and is used to bypass the fluid to be cooled that does not need to be pre-cooled by the second evaporator 24, thereby switching the path of the fluid to be cooled whether or not it has undergone a pre-cooling process. The fifth regulating valve 45 is connected to the liquid supply line of the fluid to be cooled and the inlet of the second evaporator 24, respectively, and is used to precisely control the flow rate of the fluid to be cooled entering the second evaporator 24, thereby flexibly adjusting the pre-cooling load of the second evaporator 24. The sixth regulating valve 46 is used to control the flow rate of the cooling medium entering the first cooling pipe 252 in the absorber 25, thereby adjusting the heat exchange efficiency in the absorber 25 and ensuring the absorption effect of the absorber 25 on the auxiliary refrigerant vapor.

[0034] As a preferred implementation, the chiller unit includes four operating modes: a composite high-efficiency refrigeration mode, a single-cycle refrigeration mode, a low-load refrigeration mode, and a pre-cooling enhanced refrigeration mode. These four operating modes can be flexibly switched according to actual refrigeration needs, the waste heat supply of the compressor 12, and environmental conditions. By adjusting the on / off and opening states of the second regulating valve 42, the third regulating valve 43, the fourth regulating valve 44, the fifth regulating valve 45, and the sixth regulating valve 46, the chiller unit can maintain a highly efficient and stable operating state under different operating conditions, while taking into account both refrigeration efficiency and system safety.

[0035] When the chiller unit is in the combined high-efficiency cooling mode, the second regulating valve 42 is open at 10%~30%, the third regulating valve 43 is open at 70%~100%, the fourth regulating valve 44 is closed, the fifth regulating valve 45 is open at 70%~100%, and the sixth regulating valve 46 is open at 70%~100%. This combined high-efficiency cooling mode is suitable for the chiller unit operating at full load and where the waste heat generated by the compressor 12 is sufficient to provide enough driving heat for the waste heat cooling module. At this time, by adjusting the opening of each regulating valve, the waste heat from the compressor 12 is maximized to be introduced into the generator 21, fully driving the waste heat cooling module. Simultaneously, the fluid to be cooled passes through the second evaporator 24 and the first evaporator 11 in its entirety, achieving coordinated cooling of the main cycle and the waste heat cooling module. This fully utilizes waste heat to increase the overall cooling capacity while effectively reducing the workload of each component in the main cycle, thereby improving the overall cooling efficiency of the chiller unit.

[0036] When the chiller unit is in single-cycle cooling mode, the second regulating valve 42 is 100% open, the third regulating valve 43 is closed, the fourth regulating valve 44 is 100% open, the fifth regulating valve 45 is closed, and the sixth regulating valve 46 is closed. This single-cycle cooling mode is suitable for situations where the waste heat generated by the compressor 12 is insufficient to provide an effective driving heat source for the waste heat cooling module, or when the waste heat cooling module malfunctions and cannot operate normally, or when the actual cooling demand is low and the pre-cooling function is not required. In this case, by adjusting the state of each regulating valve, the waste heat path to the generator 21 is completely cut off, causing the waste heat cooling module to stop operating. Simultaneously, the fluid to be cooled bypasses the second evaporator 24, and only the main cycle completes the cooling work. This avoids pipeline resistance and energy loss caused by the ineffective operation of the waste heat cooling module, ensuring the stability and efficiency of the main cycle operating independently.

[0037] When the chiller unit is in low-load cooling mode, the second regulating valve 42 is open at 60%~80%, the third regulating valve 43 is open at 30%~50%, the fourth regulating valve 44 is closed, the fifth regulating valve 45 is open at 30%~50%, and the sixth regulating valve 46 is open at 30%~50%. This low-load cooling mode is suitable for low-load cooling operation of the chiller unit, where the waste heat generated by the compressor 12 is limited and the cooling demand of the fluid to be cooled is low. In this condition, by adjusting the opening of each regulating valve, the flow rate of waste heat entering the generator 21 and the flow rate of the fluid to be cooled entering the second evaporator 24 are controlled, allowing the waste heat cooling module to operate stably at low load. Simultaneously, it matches the low-load cooling demand of the main cycle. This not only fully utilizes the limited waste heat to achieve a small amount of pre-cooling, reducing the workload of the main cycle, but also avoids crystallization of the absorbent solution due to excessive waste heat input or excessive flow rate of the fluid to be cooled, ensuring the safety of the system during low-load operation.

[0038] When the chiller unit is in pre-cooling enhanced refrigeration mode, the second regulating valve 42 is open at 10%~30%, the third regulating valve 43 is open at 100%, the fourth regulating valve 44 is closed, the fifth regulating valve 45 is open at 100%, and the sixth regulating valve 46 is open at 100%. This pre-cooling enhanced refrigeration mode is suitable for situations where the ambient temperature is high, the initial temperature of the fluid to be cooled is high, or the cooling effect is high and a significant reduction in the temperature of the fluid to be cooled is required. In this case, by adjusting the opening of each regulating valve, all the waste heat generated by the compressor 12 is introduced into the generator 21, allowing the waste heat refrigeration module to operate at full load. Simultaneously, the fluid to be cooled passes through the second evaporator 24 in its entirety, maximizing the pre-cooling effect of the second evaporator 24 and significantly reducing the temperature of the fluid entering the first evaporator 11. This effectively reduces the cooling load on the first evaporator 11, allowing the main circulation to operate under better conditions, improving the overall cooling effect and operating efficiency of the chiller unit, and preventing instability in the main circulation due to excessive load.

[0039] Understandably, the four operating modes mentioned above are independent of each other and can be flexibly switched. Each mode achieves comprehensive regulation of the waste heat input of the generator 21, the fluid flow of the second evaporator 24, and the cooling medium flow of the absorber 25 through precise control of the second regulating valve 42, the third regulating valve 43, the fourth regulating valve 44, the fifth regulating valve 45, and the sixth regulating valve 46 in the waste heat refrigeration module. This allows the chiller unit to adapt to different refrigeration needs, waste heat supply conditions, and environmental conditions. Whether it is full-load high-efficiency refrigeration, low-load safe refrigeration, enhanced refrigeration under special conditions, or single-cycle refrigeration in emergency situations, the chiller unit can maintain a good operating condition, achieving a balance between refrigeration efficiency and operational safety, while maximizing the recovery and utilization of waste heat from the compressor 12 and reducing energy consumption.

[0040] The chiller unit provided in this embodiment, by setting up a waste heat refrigeration module, efficiently recovers the waste heat from the output of the compressor 12 with the help of a drive heat recovery unit. The waste heat that would otherwise be directly released is converted into the power to drive the waste heat refrigeration module, so that the pre-cooling unit generates cooling capacity. The pre-cooling unit is connected in series with the first evaporator 11 to pre-cool the cooling fluid, which significantly reduces the temperature of the fluid entering the first evaporator 11, thereby effectively reducing the cooling load of the first evaporator 11. As a result, the compressor 12 does not need to operate at an excessively high load to meet the cooling demand. At the same time, the heat exchange load of the first condenser 13 is reduced, so that the first evaporator 11, compressor 12, and first condenser 13 are all in a better working condition. This not only improves the energy utilization efficiency of the entire chiller unit and reduces energy waste, but also reduces the working losses of the first evaporator 11, compressor 12, and first condenser 13, extending the service life of the equipment. At the same time, the synergistic cooling of the pre-cooling unit and the main cycle also improves the overall cooling capacity of the chiller unit and meets higher cooling demands.

[0041] This embodiment includes a solution heat exchanger 26, which enables heat exchange between the dilute and concentrated solutions inside the waste heat refrigeration module, achieving heat recovery and reuse. This effectively reduces the demand of the generator 21 on the waste heat of the compressor 12, allowing the limited waste heat to play a greater driving role. At the same time, it lowers the temperature of the dilute solution when it enters the absorber 25, improves the absorption efficiency of the absorbent solution in the absorber 25 on the auxiliary refrigerant vapor, further optimizes the operating efficiency of the waste heat refrigeration module, and allows the module to achieve a better pre-cooling effect with less waste heat consumption. This further reduces the workload of the main cycle and improves the overall refrigeration efficiency and energy utilization of the entire chiller unit.

[0042] Example 2: This embodiment provides a chip testing device, a dedicated device for performance testing of various chips. During chip testing, the chip generates a large amount of heat. If this heat cannot be dissipated in time, it will affect the testing accuracy and safety. Therefore, a dedicated cooling device is needed to provide continuous cooling protection for the chip. The chip testing device includes the chiller unit described in Embodiment 1; the chip testing device has a circulation loop, in which coolant for cooling the chip under test flows; the chiller unit is configured to cool the coolant from the high return water temperature after absorbing heat from the chip under test to the low supply water temperature required for chip testing.

[0043] It should be noted that the fluid to be cooled in Embodiment 1 is the coolant flowing in the circulation loop in this embodiment; the main refrigerant in Embodiment 1 is the working fluid flowing in the main circulation of the chiller unit; and the auxiliary refrigerant in Embodiment 1 is a part of the absorbent solution in the waste heat refrigeration module, wherein the absorbent solution is an absorbent-auxiliary refrigerant pair.

[0044] It should be noted that the test fixtures used to carry the chip under test, the detection modules used to detect chip signals, the control modules used to control the test process, and other structures in the chip testing equipment are all conventional structures known to those skilled in the art in the field of chip testing. Their specific structures and working principles will not be elaborated on here. This embodiment mainly applies the chiller unit described in Embodiment 1 to the chip testing equipment, utilizing the high-efficiency cooling and waste heat recovery characteristics of the chiller unit to provide stable and efficient cooling protection for the chip testing process.

[0045] The chip testing equipment described in this embodiment includes the chiller unit as described in Embodiment 1. This chiller unit, in conjunction with a circulation loop, provides continuous and stable cooling to the chip under test, promptly removing heat generated during chip testing and ensuring the chip remains in a suitable testing temperature environment. This effectively improves the accuracy and reliability of chip test data. Simultaneously, the chiller unit achieves efficient cooling through waste heat recovery, reducing the overall energy consumption of the chip testing equipment and improving its energy efficiency. Furthermore, the chiller unit can flexibly switch operating modes according to different load requirements of chip testing. It can meet the enhanced cooling needs during high-load chip testing and achieve energy-saving operation during low-load testing, while ensuring the safety of equipment operation and preventing damage to the chip due to temperature fluctuations, thus improving the overall operational stability and practicality of the chip testing equipment.

[0046] The above-described embodiments are only used to illustrate the technical solutions of the present invention, and are not intended to limit it. Although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A water chiller unit, characterized in that: Used to cool the fluid to be cooled, it includes a first evaporator (11), a compressor (12), a first condenser (13), and a first throttle (14) connected in sequence to form a cycle, and also includes a waste heat refrigeration module; The waste heat cooling module includes a drive heat recovery unit and a precooling unit; The drive heat recovery unit is connected between the compressor (12) and the first condenser (13) and is configured to recover the waste heat at the output of the compressor (12) to drive the operation of the waste heat refrigeration module so that the precooling unit generates cooling capacity. The precooling unit is connected in series with the first evaporator (11) in the circulation loop of the fluid to be cooled and is configured to precool the fluid to be cooled.

2. The chiller unit according to claim 1, characterized in that: The driving heat recovery unit includes a generator (21); The precooling unit includes a second evaporator (24).

3. The chiller unit according to claim 2, characterized in that: The waste heat refrigeration module also includes a second condenser (22), a second throttle valve (23), and an absorber (25); the generator (21), the second condenser (22), the second throttle valve (23), the second evaporator (24), and the absorber (25) are connected in sequence to form a cycle; Among them, a first branch (31) from the generator (21) to the absorber (25) and a second branch (32) from the absorber (25) to the generator (21) are provided between the generator (21) and the absorber (25), and a first liquid pump (27) is provided on the second branch (32).

4. The chiller unit according to claim 3, characterized in that: The waste heat cooling module also includes a solution heat exchanger (26) connected to the first branch (31) and the second branch (32), the solution heat exchanger (26) being used to exchange heat between the fluids in the first branch (31) and the second branch (32).

5. The chiller unit according to claim 3, characterized in that: The generator (21) includes a first cavity (211) and a first heating tube (212). The first cavity (211) contains an absorbent solution that can undergo a gas-liquid phase change. The first cavity (211) is provided with a vapor outlet (213) connected to the second condenser (22), a first solution outlet (214) connected to the first branch (31), and a first solution inlet (215) connected to the second branch (32). The first heating tube (212) passes through the first cavity (211), and both ends of the first heating tube (212) are connected to the outlet of the compressor (12) and the inlet of the first condenser (13), respectively, so that the high-temperature fluid from the compressor (12) passes through the first heating tube (212) and heats the absorbent solution; The absorber (25) includes a second cavity (251) and a first cooling pipe (252); the second cavity (251) is provided with a vapor inlet (253) communicating with the second evaporator (24), a second solution inlet (254) communicating with the first branch (31), and a second solution outlet (255) communicating with the second branch (32); the second cavity (251) is filled with an absorbent solution from the generator (21); The first cooling pipe (252) is located inside the second cavity (251), and a cooling medium flows through the first cooling pipe (252) to remove the heat of the absorbent solution in the second cavity (251).

6. The chiller unit according to claim 3, characterized in that: The waste heat cooling module also includes: A first regulating valve (41) is connected in parallel with the second throttle valve (23); A second regulating valve (42) is connected in parallel with the generator (21); A third regulating valve (43) is connected in series with the generator (21); A fourth regulating valve (44) is provided in parallel with the second evaporator (24); A fifth regulating valve (45) is connected in series with the second evaporator (24); A sixth regulating valve (46) is connected in series with the first cooling pipe (252).

7. The chiller unit according to claim 6, characterized in that: The chiller unit includes a composite high-efficiency cooling mode, a single-cycle cooling mode, a low-load cooling mode, and a pre-cooling enhanced cooling mode. When the chiller unit is in the compound high-efficiency refrigeration mode, the opening degree of the second regulating valve (42) is 10%~30%, the opening degree of the third regulating valve (43) is 70%~100%, the fourth regulating valve (44) is in the closed state, the opening degree of the fifth regulating valve (45) is 70%~100%, and the opening degree of the sixth regulating valve (46) is 70%~100%. When the chiller is in single-cycle cooling mode, the second regulating valve (42) is 100% open, the third regulating valve (43) is closed, the fourth regulating valve (44) is 100% open, the fifth regulating valve (45) is closed, and the sixth regulating valve (46) is closed. When the chiller is in low-load cooling mode, the second regulating valve (42) is open at 60%~80%, the third regulating valve (43) is open at 30%~50%, the fourth regulating valve (44) is closed, the fifth regulating valve (45) is open at 30%~50%, and the sixth regulating valve (46) is open at 30%~50%. When the chiller is in the pre-cooling enhanced refrigeration mode, the second regulating valve (42) is 10%~30% open, the third regulating valve (43) is 100% open, the fourth regulating valve (44) is closed, the fifth regulating valve (45) is 100% open, and the sixth regulating valve (46) is 100% open.

8. The chiller unit according to claim 3, characterized in that: The absolute working pressure range within the generator (21) is 5 kPa to 12 kPa; The absolute working pressure range within the second evaporator (24) is 0.5 kPa to 1.5 kPa.

9. The chiller unit according to claim 5, characterized in that: The absorbent solution is one of lithium bromide aqueous solution, lithium chloride aqueous solution, lithium formate aqueous solution or ammonia solution; The second cavity (251) has a nozzle at its steam inlet (253).

10. A chip testing device, characterized in that, Includes the chiller unit as described in any one of claims 1-9; The chip testing equipment is equipped with a circulation loop, in which a coolant is circulated to cool the chip under test. The chiller unit is configured to cool the coolant from a high return water temperature after absorbing heat from the chip under test to a low supply water temperature required for testing the chip under test.

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