Capacitance film vacuum gauge diaphragm aging device

Abstract

The invention discloses a capacitor film vacuum gauge diaphragm aging device, and relates to the technical field of diaphragm aging, the capacitor film vacuum gauge diaphragm aging device comprises a support frame body, a pipe body and a placing frame, the pipe body is fixedly arranged above the support frame body, the two ends of the pipe body are provided with air supply mechanisms, the placing frame is arranged at the top end of the pipe body, and a clamping mechanism for fixing a diaphragm is arranged in the placing frame. And a butt joint mechanism is arranged between the pipe body and the placing frame. According to the invention, the membrane is fixed in the placing frame through the clamping mechanism, then the placing frame is connected with the pipe body, and the air supply mechanism is used for pressurizing the interior of the placing frame, so that the membrane fixed in the placing frame is aged under the pressure required by the process, and the convenience of membrane aging treatment is improved.

Description

Technical Field

[0001] This invention relates to the field of diaphragm aging technology, and in particular to a diaphragm aging device for a capacitor thin-film vacuum gauge. Background Technology

[0002] As a high-precision vacuum measuring instrument, the core pressure-sensing element of a capacitive thin-film vacuum gauge is a metal diaphragm located inside the sensor. This diaphragm undergoes minute deformation when subjected to a pressure difference, and the vacuum level is calculated by detecting this deformation. Therefore, the mechanical stability and long-term reliability of the diaphragm directly determine the overall performance and measurement accuracy of the vacuum gauge.

[0003] During the manufacturing process of capacitive thin-film vacuum gauges, residual stress often exists within the newly prepared diaphragm material, and its microstructure is unstable in its initial state. This instability can lead to slow deformation or performance drift of the diaphragm during subsequent long-term use, resulting in zero-point drift and sensitivity changes, which severely affect the accuracy and repeatability of vacuum measurements. To eliminate this initial instability and improve the long-term reliability of the diaphragm, an aging process is necessary.

[0004] Traditional aging processes typically involve placing the assembled vacuum gauge or diaphragm assembly in a specific environment, relying on natural aging or simple cycling to release stress. However, this method suffers from long processing cycles, low efficiency, and difficulty in simulating the pressure loads experienced by the diaphragm under actual working conditions, resulting in insufficient and inconsistent aging effects. To address this, we propose an aging device for capacitive thin-film vacuum gauge diaphragms. Summary of the Invention

[0005] The purpose of this invention is to provide a capacitor thin-film vacuum gauge diaphragm aging device to solve the problems mentioned in the background art.

[0006] To achieve the above objectives, the present invention provides the following technical solution: a capacitor thin-film vacuum gauge diaphragm aging device, comprising:

[0007] Support frame;

[0008] The pipe body is fixedly installed above the support frame, and air supply mechanisms are provided at both ends of the pipe body;

[0009] A placement frame is provided at the top of the tube body. The placement frame is equipped with a clamping mechanism for fixing the diaphragm inside. A docking mechanism is provided between the tube body and the placement frame.

[0010] Preferably, the gas supply mechanism includes:

[0011] An air pump, which is installed inside the support frame;

[0012] An air intake pipe is installed between the air pump and one end of the pipe body, and a first valve is installed inside the air intake pipe.

[0013] A return air pipe is installed between the air pump and the other end of the pipe body. A second valve is installed inside the return air pipe, and a pressure gauge is installed at the top of the return air pipe.

[0014] Preferably, the docking mechanism includes:

[0015] A connecting hole is provided at the bottom end of the placement frame;

[0016] The insertion tube is fixedly connected to the bottom end of the placement frame, the insertion tube is positioned corresponding to the connecting hole, and the bottom end of the insertion tube is symmetrically fixedly connected with a compression rod.

[0017] A convex sleeve is fixedly inserted at intervals at the top end of the tube body, and an insert is inserted inside the convex sleeve. A fixing mechanism is provided between the insert and the convex sleeve, and a blocking mechanism is provided inside the convex sleeve.

[0018] Preferably, the fixing mechanism includes:

[0019] External thread groove, wherein the external thread groove is provided on the outer wall of the insertion tube;

[0020] An internal thread groove is provided on the inner wall of the convex sleeve, and the outer wall of the external thread groove is engaged with the outer wall of the internal thread groove. A sealing mechanism is provided on the outer wall of the insertion tube.

[0021] Preferably, the sealing mechanism includes:

[0022] A pressure ring, which is fixedly sleeved on the outer wall of the insertion tube;

[0023] The third rubber pad is attached to the bottom end of the pressure ring.

[0024] Preferably, the clamping mechanism includes:

[0025] A pressure frame is movably disposed inside the placement frame, and a lifting mechanism is provided at the top of the pressure frame;

[0026] The first rubber pad is attached to the bottom end of the pressure frame.

[0027] Preferably, the lifting mechanism includes:

[0028] A lifting plate is movably disposed inside the placement frame. A connecting rod is symmetrically fixedly connected to the bottom end of the lifting plate. The bottom end of the connecting rod is fixedly connected to the top end of the pressure frame. A limit mechanism is provided between the lifting plate and the placement frame.

[0029] An adjusting bolt, the bottom end of which is rotatably connected to the top end of the lifting plate;

[0030] A threaded hole is provided at the top of the placement frame, and the outer wall of the adjusting bolt is threadedly connected to the inner wall of the threaded hole.

[0031] Preferably, the limiting mechanism includes:

[0032] Limiting blocks, which are symmetrically and fixedly connected to both sides of the lifting plate;

[0033] The limiting groove is symmetrically opened on the inner wall of the placement frame, and the outer wall of the limiting block is slidably connected to the inner wall of the limiting groove.

[0034] Preferably, the blocking mechanism includes:

[0035] A blocking plate, wherein the blocking plate is movably disposed inside the convex sleeve, and the size of the blocking plate is larger than the size of the top opening of the convex sleeve;

[0036] The second rubber pad is attached to the top of the blocking plate;

[0037] A fixed plate, wherein fixed rods are symmetrically fixedly connected to the outer wall of the fixed plate, one end of the fixed rods is fixedly connected to the inner wall of the convex sleeve, and a guide mechanism is provided between the blocking plate and the fixed plate;

[0038] A compression spring is disposed between the top end of the fixed plate and the bottom end of the blocking plate.

[0039] Preferably, the guiding mechanism includes:

[0040] A guide rod is fixedly connected to the bottom end of the blocking plate, and a compression spring is sleeved on the outer wall of the guide rod;

[0041] A guide hole is provided at the top of the fixed plate, and a guide rod is inserted into the inner wall of the guide hole.

[0042] The technical effects and advantages of this invention are as follows:

[0043] The present invention fixes the diaphragm in the placement frame by a clamping mechanism, then connects the placement frame to the tube body, and then pressurizes the placement frame by a gas supply mechanism, so that the diaphragm fixed in the placement frame is subjected to the pressure required by the process for aging, thereby improving the convenience of diaphragm aging treatment. Attached Figure Description

[0044] The accompanying drawings are provided to further illustrate the invention and form part of the specification. They are used together with the embodiments of the invention to explain the invention, but do not constitute a limitation thereof. In the drawings:

[0045] Figure 1This is a front view of the present invention.

[0046] Figure 2 This is a schematic diagram of the front structure of the placement frame of the present invention;

[0047] Figure 3 This is a schematic diagram of the front structure of the convex sleeve of the present invention.

[0048] In the attached diagram: 101, support frame; 201, pipe body; 202, placement frame; 301, convex sleeve; 302, insertion tube; 303, connecting hole; 401, pressure frame; 402, first rubber pad; 403, lifting plate; 404, connecting rod; 405, threaded hole; 406, adjusting bolt; 407, limiting groove; 408, limiting block; 501, blocking plate; 502, second rubber pad; 503, fixing plate; 504, compression spring; 505, fixing rod; 506, guide rod; 507, guide hole; 508, compression rod; 601, external thread groove; 602, internal thread groove; 603, pressure ring; 604, third rubber pad; 701, air pump; 702, air inlet pipe; 703, air return pipe; 704, first valve; 705, second valve; 706, pressure gauge. Detailed Implementation

[0049] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0050] This invention provides, for example Figures 1-3 The illustrated capacitor film vacuum gauge diaphragm aging device includes a support frame 101, a tube 201, and a placement frame 202. The tube 201 is fixedly disposed above the support frame 101, and gas supply mechanisms are provided at both ends of the tube 201. The placement frame 202 is disposed at the top of the tube 201, and a clamping mechanism for fixing the diaphragm is provided inside the placement frame 202. A docking mechanism is provided between the tube 201 and the placement frame 202 to fix the diaphragm in the placement frame 202 through the clamping mechanism. Then, the placement frame 202 is connected to the tube 201, and pressure is applied to the placement frame 202 through the gas supply mechanism, so that the diaphragm fixed in the placement frame 202 is subjected to the pressure required by the process for aging, thereby improving the convenience of diaphragm aging treatment.

[0051] The air supply mechanism includes an air pump 701, an air inlet pipe 702, and a return pipe 703. The air pump 701 is installed inside the support frame 101. The air inlet pipe 702 is installed between the air pump 701 and one end of the pipe 201. A first valve 704 is installed inside the air inlet pipe 702. The return pipe 703 is installed between the air pump 701 and the other end of the pipe 201. A second valve 705 is installed inside the return pipe 703. A pressure gauge 706 is installed at the top of the return pipe 703. When the second valve 705 is closed and the first valve 704 is opened, the air pump 701 operates, pressurizing the pipe 201 through the air inlet pipe 702. The pressure inside the pipe 201 can then be observed through the pressure gauge 706, allowing the diaphragm to reach the pressure required for the process. After pressurizing for a certain period of time, the first valve 704 is closed and the second valve 705 is opened to release the pressure, thus completing one aging process for the diaphragm.

[0052] The docking mechanism includes a connecting hole 303, an insert 302, and a convex sleeve 301. The connecting hole 303 is located at the bottom of the placement frame 202. The insert 302 is fixedly connected to the bottom of the placement frame 202, and the position of the insert 302 corresponds to that of the connecting hole 303. A compression rod 508 is symmetrically fixedly connected to the bottom of the insert 302. The convex sleeve 301 is fixedly inserted at intervals at the top of the tube body 201. The insert 302 is inserted into the inside of the convex sleeve 301. A fixing mechanism is provided between the insert 302 and the convex sleeve 301. A blocking mechanism is provided inside the convex sleeve 301. By inserting the insert 302 into the convex sleeve 301 and communicating through the connecting hole 303, the diaphragm fixed in the placement frame 202 is subjected to positive pressure within the placement frame 202.

[0053] The blocking mechanism includes a blocking plate 501, a second rubber pad 502, a fixed plate 503, and a compression spring 504. The blocking plate 501 is movably disposed inside the convex sleeve 301, and the size of the blocking plate 501 is larger than the top opening size of the convex sleeve 301. The second rubber pad 502 is attached to the top of the blocking plate 501. Fixed rods 505 are symmetrically fixedly connected to the outer wall of the fixed plate 503, and one end of the fixed rod 505 is fixedly connected to the inner wall of the convex sleeve 301. A guide mechanism is provided between the blocking plate 501 and the fixed plate 503. The compression spring 504 is disposed between the top of the fixed plate 503 and the bottom of the blocking plate 501. Since multiple diaphragms do not need to be tested every time, the convex sleeve 301 that does not need to be tested needs to be closed. Therefore, the compression of the compression spring 504 causes the blocking plate 501 to be closed. The first part of the tube will always have an upward tendency, so that the second rubber pad 502 abuts against the inner wall of the convex sleeve 301. When the placement frame 202 is under positive pressure, the blocking plate 501 will also be under pressure, so that the blocking plate 501 stably drives the second rubber pad 502 to abut against the inner wall of the convex sleeve 301, thereby ensuring the stability of the aging process. When aging process is required, the insertion tube 302 is inserted into the connecting hole 303 until the extrusion rod 508 abuts against the second rubber pad 502 and presses down the blocking plate 501, so that the second rubber pad 502 separates from the inner wall of the convex sleeve 301. Thus, through the setting of the extrusion rod 508, there is a gap between the insertion tube 302 and the second rubber pad 502, thereby ensuring that the insertion tube 302 is connected to the inside of the convex sleeve 301, thus ensuring the stable progress of the aging process.

[0054] The guiding mechanism includes a guide rod 506 and a guide hole 507. The guide rod 506 is fixedly connected to the bottom end of the blocking plate 501. The compression spring 504 is sleeved on the outer wall of the guide rod 506. The guide hole 507 is opened at the top of the fixed plate 503. The guide rod 506 is inserted into the inner wall of the guide hole 507. The guide rod 506 is guided by the guide hole 507, so that the blocking plate 501 can move stably. This allows the blocking plate 501 and the second rubber pad 502 to stably abut against the narrow opening inside the convex sleeve 301, ensuring the stable operation of the blocking mechanism.

[0055] The fixing mechanism includes an external threaded groove 601 and an internal threaded groove 602. The external threaded groove 601 is located on the outer wall of the insertion tube 302, and the internal threaded groove 602 is located on the inner wall of the convex sleeve 301. The outer walls of the external threaded groove 601 and the internal threaded groove 602 are engaged. The outer wall of the insertion tube 302 is provided with a sealing mechanism, which includes a pressure ring 603 and a third rubber pad 604. The pressure ring 603 is fixedly sleeved on the outer wall of the insertion tube 302, and the third rubber pad 604 is attached to the bottom end of the pressure ring 603. During the process of inserting the insertion tube 302 into the convex sleeve 301, the external threaded groove 601 and the internal threaded groove 602 are engaged by rotating the insertion tube 302 until the insertion tube 302 moves down, causing the pressure ring 603 to move down until the third rubber pad 604 abuts against the top end of the convex sleeve 301, thereby completing the seal between the insertion tube 302 and the convex sleeve 301, thus ensuring the stability of the aging treatment.

[0056] The clamping mechanism includes a pressure frame 401 and a first rubber pad 402. The pressure frame 401 is movably disposed inside the placement frame 202. A lifting mechanism is provided at the top of the pressure frame 401. The first rubber pad 402 is attached to the bottom of the pressure frame 401. The diaphragm is placed inside the placement frame 202. Then, the lifting mechanism drives the pressure frame 401 to move downward until the pressure frame 401 drives the first rubber pad 402 to squeeze the diaphragm, thereby fixing the diaphragm between the pressure frame 401 and the placement frame 202, thus ensuring the stable operation of the aging process.

[0057] The lifting mechanism includes a lifting plate 403, an adjusting bolt 406, and a threaded hole 405. The lifting plate 403 is movably disposed inside the placement frame 202. A connecting rod 404 is symmetrically fixedly connected to the bottom end of the lifting plate 403. The bottom end of the connecting rod 404 is fixedly connected to the top end of the pressure frame 401. A limit mechanism is provided between the lifting plate 403 and the placement frame 202. The bottom end of the adjusting bolt 406 is rotatably connected to the top end of the lifting plate 403. The threaded hole 405 is opened at the top end of the placement frame 202. The outer wall of the adjusting bolt 406 is threadedly connected to the inner wall of the threaded hole 405. By turning the adjusting bolt 406, the adjusting bolt 406 can drive the lifting plate 403 to rise and fall under the thread engagement between the outer wall of the adjusting bolt 406 and the inner wall of the threaded hole 405.

[0058] The limiting mechanism includes a limiting block 408 and a limiting groove 407. The limiting block 408 is symmetrically fixedly connected to both sides of the lifting plate 403, and the limiting groove 407 is symmetrically opened on the inner wall of the placement frame 202. The outer wall of the limiting block 408 is slidably connected to the inner wall of the limiting groove 407. The limiting groove 407 limits and guides the limiting block 408, so that when the adjusting bolt 406 rotates and drives the lifting plate 403 to descend, the adjusting bolt 406 will not bring lateral force to the lifting plate 403, thereby ensuring that the lifting plate 403 can stably drive the pressure frame 401 to rise and fall.

[0059] Although embodiments of the invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A capacitor thin-film vacuum gauge diaphragm aging device, characterized in that, include: Support frame (101); Pipe body (201), the pipe body (201) is fixedly installed above the support frame (101), and air supply mechanisms are provided at both ends of the pipe body (201); Placement frame (202) is located at the top of tube body (201). The interior of placement frame (202) is provided with a clamping mechanism for fixing the diaphragm. A docking mechanism is provided between tube body (201) and placement frame (202).

2. The capacitor thin-film vacuum gauge diaphragm aging device according to claim 1, characterized in that, The gas supply mechanism includes: An air pump (701) is installed inside the support frame (101); An air intake pipe (702) is installed between one end of the air pump (701) and the pipe body (201), and a first valve (704) is installed inside the air intake pipe (702). A return air pipe (703) is installed between the air pump (701) and the other end of the pipe body (201). A second valve (705) is installed inside the return air pipe (703), and a pressure gauge (706) is installed at the top of the return air pipe (703).

3. The capacitor thin-film vacuum gauge diaphragm aging device according to claim 1, characterized in that, The docking mechanism includes: A connecting hole (303) is provided at the bottom end of the placement frame (202); Insertion tube (302), the insertion tube (302) is fixedly connected to the bottom end of the placement frame (202), the insertion tube (302) is positioned corresponding to the connecting hole (303), and the bottom end of the insertion tube (302) is symmetrically fixedly connected with a compression rod (508). A convex sleeve (301) is fixedly inserted at intervals at the top of the tube body (201). A tube (302) is inserted inside the convex sleeve (301). A fixing mechanism is provided between the tube (302) and the convex sleeve (301). A blocking mechanism is provided inside the convex sleeve (301).

4. The capacitor thin-film vacuum gauge diaphragm aging device according to claim 3, characterized in that, The fixing mechanism includes: External thread groove (601), the external thread groove (601) is provided on the outer wall of the insertion tube (302); An internal thread groove (602) is provided on the inner wall of the convex sleeve (301). The outer wall of the external thread groove (601) is engaged with the outer wall of the internal thread groove (602). A sealing mechanism is provided on the outer wall of the insertion tube (302).

5. The capacitor thin-film vacuum gauge diaphragm aging device according to claim 4, characterized in that, The sealing mechanism includes: A pressure ring (603) is fixedly sleeved on the outer wall of the insertion tube (302); The third rubber pad (604) is attached to the bottom end of the pressure ring (603).

6. The capacitor thin-film vacuum gauge diaphragm aging device according to claim 1, characterized in that, The clamping mechanism includes: A pressure frame (401) is movably disposed inside the placement frame (202), and a lifting mechanism is provided at the top of the pressure frame (401); The first rubber pad (402) is attached to the bottom end of the pressure frame (401).

7. The capacitor thin-film vacuum gauge diaphragm aging device according to claim 6, characterized in that, The lifting mechanism includes: A lifting plate (403) is movably disposed inside the placement frame (202). A connecting rod (404) is symmetrically fixedly connected to the bottom end of the lifting plate (403). The bottom end of the connecting rod (404) is fixedly connected to the top end of the pressure frame (401). A limit mechanism is provided between the lifting plate (403) and the placement frame (202). Adjusting bolt (406), the bottom end of which is rotatably connected to the top end of lifting plate (403); A threaded hole (405) is provided at the top of the placement frame (202), and the outer wall of the adjusting bolt (406) is threadedly connected to the inner wall of the threaded hole (405).

8. The capacitor thin-film vacuum gauge diaphragm aging device according to claim 7, characterized in that, The limiting mechanism includes: Limiting blocks (408) are symmetrically fixedly connected to both sides of the lifting plate (403); The limiting groove (407) is symmetrically opened on the inner wall of the placement frame (202), and the outer wall of the limiting block (408) is slidably connected to the inner wall of the limiting groove (407).

9. The capacitor thin-film vacuum gauge diaphragm aging device according to claim 3, characterized in that, The blocking mechanism includes: A blocking plate (501) is movably disposed inside the convex sleeve (301), and the size of the blocking plate (501) is larger than the top opening size of the convex sleeve (301); The second rubber pad (502) is attached to the top of the blocking plate (501); A fixed plate (503) is provided with a fixed rod (505) symmetrically fixedly connected to the outer wall of the fixed plate (503). One end of the fixed rod (505) is fixedly connected to the inner wall of the convex sleeve (301). A guide mechanism is provided between the blocking plate (501) and the fixed plate (503). A compression spring (504) is disposed between the top end of the fixed plate (503) and the bottom end of the blocking plate (501).

10. The capacitor thin-film vacuum gauge diaphragm aging device according to claim 9, characterized in that, The guiding mechanism includes: Guide rod (506), the guide rod (506) is fixedly connected to the bottom end of the blocking plate (501), and the compression spring (504) is sleeved on the outer wall of the guide rod (506); A guide hole (507) is provided at the top of the fixed plate (503), and a guide rod (506) is inserted into the inner wall of the guide hole (507).

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