Multi-mode variable-frequency gyroscope

Abstract

The invention relates to the technical field of gyroscopes, and discloses a multi-mode variable-frequency gyroscope, which comprises a frequency modulation polar plate group arranged on a driving frame and / or a detection frame and comprising an electrostatic force polar plate capable of being selectively electrified; the first change-over switch is configured to be capable of changing the polarity of the first driving comb teeth and the second driving comb teeth, so that the two driving frames are switched between two driving modes of same-direction movement and opposite-direction movement; and the second change-over switch is configured to be capable of changing the polarities of the first detection comb teeth and the second detection comb teeth of the detection electrodes on the detection frame. The first change-over switch of the multi-mode variable-frequency gyroscope disclosed by the invention can enable the two driving frames to move in the same direction or in opposite directions, so that the working frequency of the multi-mode variable-frequency gyroscope is changed for the first time, the second change-over switch exchanges the polarity of one detection electrode, the detection of the angular velocity in the third direction is realized, and meanwhile, the detection efficiency of the multi-mode variable-frequency gyroscope is improved. The frequency modulation polar plate group can change the driving frequency and / or the detection frequency again, so that the working frequency of the gyroscope is changed again.

Description

Technical Field

[0001] This invention relates to the field of gyroscope technology, and more particularly to a multi-mode frequency conversion gyroscope. Background Technology

[0002] With the development of micro-nano manufacturing and optical technologies, gyroscopes have made significant progress in terms of accuracy, size, and power consumption. However, in applications with high security requirements, especially in complex electromagnetic environments or when facing active attack threats, existing gyroscope technology still has serious security vulnerabilities. Its core mechanism typically relies on one or more fixed resonant frequencies, causing the device to produce stable and predictable physical or optical response characteristics during operation, forming an identifier similar to a "static fingerprint." This inherent characteristic is easily detected and identified in the frequency or time domain, allowing attackers to implement targeted resonant interference, requiring only minimal energy to cause gyroscope performance failure or abnormal output. Therefore, existing fixed-frequency gyroscopes cannot meet the active security protection requirements of high-value systems in highly contested environments. To fundamentally improve the anti-interference and anti-attack capabilities of gyroscopes and expand their applications in security-sensitive fields such as national defense, critical infrastructure, and high-end industrial control, it is urgent to break through the limitations of the traditional fixed-frequency operating mode, eliminate this detectable and exploitable static characteristic from the signal source, and achieve a dynamic, non-stationary frequency operating mechanism. Summary of the Invention

[0003] Based on the above, the purpose of this invention is to provide a multi-mode frequency-converting gyroscope that solves the problem of fixed resonant frequency in existing gyroscopes, has multiple operating frequencies, and significantly improves safety performance.

[0004] To achieve the above objectives, the present invention adopts the following technical solution: A multimode frequency-converting gyroscope includes two drive frames, two detection frames, two drive electrodes, and two detection electrodes. The two drive frames and two detection frames correspond one-to-one. The two drive frames are arranged along a first direction, and the two detection frames are arranged between the two drive frames along the first direction. Each drive frame has one drive electrode, and each detection frame has one detection electrode. The drive electrodes are configured to drive the corresponding drive frame to move along a second direction. Each drive electrode includes a first drive comb tooth and a second drive comb tooth, and each detection electrode includes a first detection comb tooth and a second detection comb tooth. The multimode frequency-converting gyroscope further includes: A frequency-modulated electrode assembly is disposed on the drive frame and / or the detection frame and includes an electrostatic electrode. The electrostatic electrode can be selectively energized to change the electrostatic resistance between the electrostatic electrode and the drive frame and / or the detection frame, thereby changing the drive frequency of the multimode frequency-modulated gyroscope in the drive direction and / or the detection frequency in the detection direction. A first switching switch is configured to swap the polarity of the first driving comb teeth and the second driving comb teeth of the driving electrode on one of the driving frames, so as to change the driving direction of the driving frame and the detection direction of the detection frame corresponding to the driving frame, so that the two driving frames switch between two driving modes of driving motion in the same direction and driving motion in opposite directions. At the same time, when detecting the angular velocity in a third direction, the two detection frames switch between two detection modes of detection motion in the same direction and detection motion in opposite directions. The second switching switch is configured to switch the polarity of the first and second detection comb teeth of the detection electrode on the detection frame when the detection direction changes.

[0005] As a preferred embodiment of a multimodal frequency-modulated gyroscope, the number of frequency-modulated electrode groups is at least two and they are divided into: A frequency-modulated drive electrode assembly is disposed on the drive frame. The electrostatic electrode is an electrostatic drive electrode. The electrostatic drive electrode can be selectively energized to change the drive electrostatic resistance between the electrostatic drive electrode and the drive frame, thereby changing the drive frequency of the multimode frequency-modulated gyroscope in the drive direction. A frequency-modulated detection electrode group is disposed on the detection frame. The electrostatic electrode is an electrostatic force detection electrode. The electrostatic force detection electrode can be selectively energized to change the detection electrostatic resistance between the electrostatic force detection electrode and the detection frame, thereby changing the detection frequency of the multimode frequency-modulated gyroscope in the detection direction.

[0006] As a preferred embodiment of a multimode frequency-converting gyroscope, the detection electrostatic resistance changes with the driving electrostatic resistance, so that the difference between the driving frequency and the detection frequency is a set frequency.

[0007] As a preferred embodiment of a multimode frequency-converting gyroscope, the two driving electrodes are respectively a first driving electrode and a second driving electrode, and the multimode frequency-converting gyroscope further includes parallel connections: The first drive connection circuit is connected to the positive port of the feedback circuit, and is provided with the first drive comb teeth of the drive first electrode. The second drive connection circuit is provided with the second drive comb teeth of the drive second electrode; The third drive connection circuit is connected to the negative port of the feedback circuit, and is provided with the second drive comb teeth of the drive first electrode. The fourth drive connection circuit is provided with the first drive comb teeth of the drive second electrode; The first changeover switch is configured to selectively connect the second drive connection circuit to one of the positive port and the negative port of the feedback circuit, and is also configured to connect the fourth drive connection circuit to the other of the positive port and the negative port of the feedback circuit.

[0008] As a preferred embodiment of a multimode frequency conversion gyroscope, the multimode frequency conversion gyroscope further includes a fifth drive connection circuit and a sixth drive connection circuit. One end of the fifth drive connection circuit is connected to the positive port of the feedback circuit, and one end of the sixth drive connection circuit is connected to the negative port of the feedback circuit. The first changeover switch includes four movable contacts, two of which are electrically connected, and the other two are electrically connected. The second drive connection circuit, the fourth drive connection circuit, the fifth drive connection circuit, and the sixth drive connection circuit are respectively connected to the four movable contacts one-to-one. When the fourth drive connection circuit is connected to the fifth drive connection circuit through two movable contacts, the first drive comb tooth of the drive second electrode is connected to the positive port of the feedback circuit; when the second drive connection circuit is connected to the sixth drive connection circuit through two movable contacts, the second drive comb tooth of the drive second electrode is connected to the negative port of the feedback circuit, and the two drive frames move in the same direction. When the fourth drive connection circuit is connected to the sixth drive connection circuit through two movable contacts, the first drive comb tooth of the drive second electrode is connected to the negative port of the feedback circuit; when the second drive connection circuit is connected to the fifth drive connection circuit through two movable contacts, the second drive comb tooth of the drive second electrode is connected to the positive port of the feedback circuit, and the two drive frames move in opposite directions.

[0009] As a preferred embodiment of a multimode frequency-converting gyroscope, the two detection electrodes are respectively a first detection electrode and a second detection electrode, and the multimode frequency-converting gyroscope further includes parallel connections: The first detection connection circuit is connected to the first positive terminal interface and is provided with the first detection comb teeth of the first detection electrode. The second detection connection circuit is provided with the second detection comb teeth of the second detection electrode; The third detection connection circuit is connected to the first negative terminal interface and is provided with the second detection comb teeth of the first detection electrode. The fourth detection connection circuit is provided with the first detection comb teeth of the second detection electrode; The second switch is configured to selectively connect the second detection connection circuit to one of the first positive interface terminal and the first negative interface terminal, and is also configured to connect the fourth detection connection circuit to the other of the first positive interface terminal and the first negative interface terminal.

[0010] As a preferred embodiment of a multimode frequency-converting gyroscope, the multimode frequency-converting gyroscope further includes a fifth detection connection circuit and a sixth detection connection circuit. One end of the fifth detection connection circuit is connected to the first positive terminal, and one end of the sixth detection connection circuit is connected to the first negative terminal. The second changeover switch includes four second electrical connection contacts, two of which are electrically connected and the other two are electrically connected. The second detection connection circuit, the fourth detection connection circuit, the fifth detection connection circuit, and the sixth detection connection circuit are respectively connected to the four second electrical connection contacts one-to-one. When the two detection frames move in the same direction, when the fourth detection connection circuit is connected to the fifth detection connection circuit through the two second electrical connection points, the first detection comb tooth of the second detection electrode is connected to the first positive terminal interface; when the second detection connection circuit is connected to the sixth detection connection circuit through the two second electrical connection points, the second detection comb tooth of the second detection electrode is connected to the first negative terminal interface. When the two detection frames move in opposite directions, and the fourth detection connection circuit is connected to the sixth detection connection circuit through the two second electrical connection points, the first detection comb tooth of the second detection electrode is connected to the first negative terminal interface; when the second detection connection circuit is connected to the fifth detection connection circuit through the two second electrical connection points, the second detection comb tooth of the second detection electrode is connected to the first positive terminal interface.

[0011] As a preferred embodiment of a multimode frequency conversion gyroscope, the multimode frequency conversion gyroscope further includes a third switching switch and two drive readout electrodes. The two drive readout electrodes correspond to the two drive frames respectively. Each drive readout electrode includes a first drive readout comb and a second drive readout comb. The third switching switch is configured to switch the polarity of the first drive readout comb and the second drive readout comb of the drive readout electrode on the drive frame where the drive direction changes.

[0012] As a preferred embodiment of a multimode frequency-converting gyroscope, the two drive readout electrodes are respectively a drive readout first electrode and a drive readout second electrode, and the multimode frequency-converting gyroscope also includes parallel connections: The first drive read connection circuit is connected to the second positive interface terminal and is provided with the first drive read comb teeth of the drive read first electrode. The second drive read connection circuit is provided with the second drive read comb teeth of the drive read second electrode; The third drive read connection circuit is connected to the second negative terminal interface, and is provided with the second drive read comb teeth of the drive read first electrode. The fourth drive read connection circuit is provided with the first drive read comb teeth of the drive read second electrode; The third switch is configured to selectively connect the second drive read connection circuit to one of the second positive interface terminal and the second negative interface terminal, and is also configured to connect the fourth drive read connection circuit to the other of the second positive interface terminal and the second negative interface terminal.

[0013] As a preferred embodiment of a multimode frequency conversion gyroscope, the multimode frequency conversion gyroscope further includes a fifth drive reading connection circuit and a sixth drive reading connection circuit. One end of the fifth drive reading connection circuit is connected to the second positive terminal, and one end of the sixth drive reading connection circuit is connected to the second negative terminal. The third changeover switch includes four third electrical connection contacts, two of which are electrically connected and the other two are electrically connected. The second drive reading connection circuit, the fourth drive reading connection circuit, the fifth drive reading connection circuit, and the sixth drive reading connection circuit are respectively connected to the four third electrical connection contacts one by one. When the two drive frames move in the same direction, when the fourth drive reading connection circuit is connected to the fifth drive reading connection circuit through the two third electrical connection contacts, the first drive reading comb tooth of the drive reading second electrode is connected to the second positive terminal; when the second drive reading connection circuit is connected to the sixth drive reading connection circuit through the two third electrical connection contacts, the second drive reading comb tooth of the drive reading second electrode is connected to the second negative terminal. When the two drive frames move in opposite directions, when the fourth drive reading connection circuit is connected to the sixth drive reading connection circuit through the two third electrical connection points, the first drive reading comb tooth of the drive reading second electrode is connected to the second negative terminal interface; when the second drive reading connection circuit is connected to the fifth drive reading connection circuit through the two third electrical connection points, the second drive reading comb tooth of the drive reading second electrode is connected to the second positive terminal interface.

[0014] As a preferred embodiment of a multimode frequency-converting gyroscope, the multimode frequency-converting gyroscope further includes: Two fixed anchor points are set on the substrate along the second direction; Two connecting frames are distributed along the second direction, and the two detection frames are located between the two connecting frames; Two elastic beams are provided, each corresponding to one of the two connecting frames and one of the two fixed anchor points. One end of each elastic beam is connected to the connecting frame, and the other end is connected to the fixed anchor point. The drive beam is deformable along a second direction and its two ends are respectively connected to the drive frame and the connecting frame; A drive detection beam is capable of deforming along the first direction and the second direction, and its two ends are respectively connected to the connecting frame and the detection frame; The detection beam is deformable along the first direction and its two ends are respectively connected to the detection frame and the driving frame.

[0015] The beneficial effects of this invention are as follows: The multimode frequency-converting gyroscope disclosed in this invention uses a first switching switch to change the polarity of the first and second driving comb teeth of a driving electrode, enabling the two driving frames to move in the same direction or in opposite directions, thus switching between two driving modes. When detecting angular velocity in a third direction, the two detection frames switch between the two detection modes of same-direction and opposite-direction detection movement with the driving frames. Then, the second switching switch, by swapping the polarity of the first and second detection comb teeth of the detection electrodes on the detection frames with changing detection directions, achieves the detection of angular velocity in a third direction. This multimode frequency-converting gyroscope, in the driving direction... Both the upward driving frequency and the detection frequency in the detection direction change, meaning the operating frequency of the multimode frequency-converting gyroscope changes initially. Simultaneously, the frequency-tuning electrode group on the driving frame and / or detection frame can adjust the electrostatic resistance between the electrostatic electrode and the driving frame and / or detection frame by controlling the energization state of the electrostatic force electrode, thereby changing the driving frequency and / or detection frequency. This causes the operating frequency of the multimode frequency-converting gyroscope to change again. Therefore, it can be seen that the multimode frequency-converting gyroscope disclosed in this invention has multiple operating frequencies, enhancing its anti-attack capability and safety performance. Attached Figure Description

[0016] To more clearly illustrate the technical solutions in the embodiments of the present invention, the accompanying drawings used in the description of the embodiments of the present invention will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on the content of the embodiments of the present invention and these drawings without creative effort.

[0017] Figure 1This is a schematic diagram of a multimodal frequency conversion gyroscope provided in a specific embodiment of the present invention; Figure 2 This is a schematic diagram of the frequency modulation drive plate assembly of the multi-mode frequency conversion gyroscope provided in a specific embodiment of the present invention; Figure 3 This is a partial structural schematic diagram of the multimodal frequency conversion gyroscope provided in a specific embodiment of the present invention; Figure 4 This is a circuit diagram of the frequency modulation drive plate group of the multimode frequency conversion gyroscope provided in a specific embodiment of the present invention; Figure 5 This is a circuit diagram of the frequency modulation detection electrode group of the multimode frequency conversion gyroscope provided in a specific embodiment of the present invention; Figure 6 This is a circuit diagram of the first switching switch of the multi-mode frequency conversion gyroscope in the first position according to a specific embodiment of the present invention; Figure 7 This is a circuit diagram of the first switching switch of the multi-mode frequency conversion gyroscope in the second position according to a specific embodiment of the present invention; Figure 8 This is a circuit diagram of the second switching switch of the multimode frequency conversion gyroscope provided in a specific embodiment of the present invention in the third position; Figure 9 This is a circuit diagram of the second switching switch of the multimode frequency conversion gyroscope provided in a specific embodiment of the present invention in the fourth position; Figure 10 This is a circuit diagram of the third switching switch of the multimode frequency conversion gyroscope provided in a specific embodiment of the present invention in the fifth position; Figure 11 This is a circuit diagram of the third switching switch of the multimode frequency conversion gyroscope provided in a specific embodiment of the present invention at the sixth position.

[0018] In the picture: 11. Drive frame; 1201. First drive electrode; 1202. Second drive electrode; 121. First drive comb tooth; 122. Second drive comb tooth; 13. Drive beam; 1401. First drive reading electrode; 1402. Second drive reading electrode; 141. First drive reading comb tooth; 142. Second drive reading comb tooth; 21. Detection frame; 2201. First detection electrode; 2202. Second detection electrode; 221. First detection comb tooth; 222. Second detection comb tooth; 23. Detection beam; 31. Frequency modulation drive electrode group; 311. First electrostatic force drive electrode; 312. Second electrostatic force drive electrode; 313. Third electrostatic force drive electrode; 314. Fourth electrostatic force drive electrode; 315. Fifth electrostatic force drive electrode; 32. Frequency modulation detection electrode group; 321. First electrostatic force detection electrode; 322. Second electrostatic force detection electrode; 323. Third electrostatic force detection electrode; 324. Fourth electrostatic force detection electrode; 325. Fifth electrostatic force detection electrode; 41. First movable contact; 42. Second movable contact; 43. Third movable contact; 44. Fourth movable contact; 45. First rotating body; 46. Fifth movable contact; 47. Sixth movable contact; 48. Seventh movable contact; 49. Eighth movable contact; 410. Second rotating body; 411. Ninth movable contact; 412. Tenth movable contact; 413. Eleventh movable contact; 414. Twelfth movable contact; 415. Third rotating body; 51. Connecting frame; 52. Drive detection beam; 521. First U-shaped beam; 522. Second U-shaped beam; 53. Fixed anchor point; 54. Elastic beam; 61. First drive connection circuit; 62. Second drive connection circuit; 63. Third drive connection circuit; 64. Fourth drive connection circuit; 65. Fifth drive connection circuit; 66. Sixth drive connection circuit; 71. First switch; 72. Second switch; 73. Third switch; 74. Fourth switch; 75. Fifth switch; 76. Sixth switch; 77. Seventh switch; 78. Eighth switch; 79. Ninth switch; 710. Tenth switch; 81. First detection connection circuit; 82. Second detection connection circuit; 83. Third detection connection circuit; 84. Fourth detection connection circuit; 85. Fifth detection connection circuit; 86. Sixth detection connection circuit; 91. First drive read connection circuit; 92. Second drive read connection circuit; 93. Third drive read connection circuit; 94. Fourth drive read connection circuit; 95. Fifth drive read connection circuit; 96. Sixth drive read connection circuit. Detailed Implementation

[0019] To make the technical problems solved by the present invention, the technical solutions adopted, and the technical effects achieved clearer, the technical solutions of the embodiments of the present invention will be further described in detail below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0020] In the description of this invention, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing the invention and for simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the invention. Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance. The terms "first position" and "second position" refer to two different positions.

[0021] In the description of this invention, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to fixed connections or detachable connections; mechanical connections or electrical connections; direct connections or indirect connections through an intermediate medium; or internal connections between two components. Those skilled in the art can understand the specific meaning of the above terms in this invention according to the specific circumstances.

[0022] This embodiment provides a multi-mode frequency conversion gyroscope, such as Figures 1 to 11As shown, the gyroscope includes two drive frames 11, two detection frames 21, two drive electrodes, and two detection electrodes. The two drive frames 11 and two detection frames 21 correspond one-to-one. The two drive frames 11 are arranged along a first direction, and the two detection frames 21 are arranged between the two drive frames 11 along the first direction. Each drive frame 11 has a drive electrode, and each detection frame 21 has a detection electrode. Each drive electrode is configured to drive the corresponding drive frame 11 to move along a second direction. Each drive electrode includes a first drive comb tooth 121 and a second drive comb tooth 122, and each detection electrode includes a first detection comb tooth 221 and a second detection comb tooth 222. The multimode frequency-converting gyroscope also includes a frequency-modulated electrode plate assembly, a first switching switch, and a second switching switch. The frequency-modulated electrode plate assembly is arranged on the drive frames 11 and the detection frames 21 and includes an electrostatic electrode plate. The electrostatic electrode plate can be selectively energized to change the electrostatic resistance between the electrostatic electrode plate and the drive frames 11 and the detection frames 21, thereby changing the drive frequency in the drive direction and the detection frequency in the detection direction of the multimode frequency-converting gyroscope. The first switching switch is configured to interchange the polarity of the first driving comb teeth 121 and the second driving comb teeth 122 of the driving electrodes on a driving frame 11, thereby changing the driving direction of the driving frame 11 and the detection direction of the corresponding detection frame 21. This allows the two driving frames 11 to switch between two driving modes: driving motion in the same direction and driving motion in opposite directions. Simultaneously, when detecting angular velocity in a third direction, the two detection frames 21 switch between two detection modes: detection motion in the same direction and detection motion in opposite directions. The second switching switch is configured to interchange the polarity of the first detection comb teeth 221 and the second detection comb teeth 222 of the detection electrodes on the detection frame 21 with its changing detection direction, thereby enabling the detection of angular velocity in a third direction.

[0023] It should be noted that in other embodiments of the present invention, only the frequency tuning plate group can be provided on the drive frame 11. In this case, by controlling the energizing state of the electrostatic plate, the magnitude of the electrostatic force between the electrostatic plate and the drive frame 11 can be adjusted, thereby changing the drive frequency and causing the operating frequency of the multimode frequency-converting gyroscope to fluctuate. Alternatively, only the frequency tuning plate group can be provided on the detection frame 21. In this case, by controlling the energizing state of the electrostatic plate, the magnitude of the electrostatic resistance between the electrostatic plate and the detection frame 21 can be adjusted, thereby changing the detection frequency and causing the operating frequency of the multimode frequency-converting gyroscope to fluctuate.

[0024] In other words, the first switching switch in this embodiment can change the polarity of the first driving comb tooth 121 and the second driving comb tooth 122 of one of the driving electrodes, so that the polarity of the first driving comb tooth 121 and the second driving comb tooth 122 of the driving electrode are exchanged, thereby changing the driving direction of the corresponding driving frame 11 and switching the two driving frames 11 between driving in the same direction and driving in opposite directions. The second switching switch can change the polarity of the first detection comb tooth 221 and the second detection comb tooth 222 of the detection electrode on the detection frame 21 corresponding to the driving frame 11, so that the polarity of the first detection comb tooth 221 and the second detection comb tooth 222 of the detection electrode are exchanged, thereby realizing the detection of the third-direction angular velocity.

[0025] Specifically, in this embodiment, the two drive frames 11 are distributed along the first direction, and each drive frame 11 is provided with a drive electrode. The drive electrode can drive the drive frame 11 to move along the second direction. The two detection frames 21 are located between the two drive frames 11 and distributed along the first direction. The two drive frames 11 correspond one-to-one with the two detection frames 21. The drive frames 11 and the detection frames 21 are elastically connected along the first direction. Each detection frame 21 is provided with a detection electrode. This multimode frequency conversion gyroscope is used to detect the angular velocity in the third direction. In the detection mode, the detection frame 21 moves along the first direction.

[0026] Specifically, such as Figure 1 and Figure 3 As shown, in this embodiment, the first direction is the Y-axis, the second direction is the X-axis, and the third direction is the Z-axis, with the Y-axis, X-axis, and Z-axis being mutually perpendicular. In other embodiments, the first direction can be the X-axis, the second direction the Y-axis, and the third direction the Z-axis, with the X-axis, Y-axis, and Z-axis being mutually perpendicular, depending on actual needs.

[0027] Specifically, a driving frequency-modulated capacitor is formed between the static electrode plate and the driving frame 11. When a voltage difference exists across the driving frequency-modulated capacitor, it generates an electrostatic resistance negatively correlated with the driving displacement, which acts on the driving frame 11. This electrostatic resistance produces a driving stiffness coefficient similar to a virtual spring for the multimode frequency-modulated gyroscope. By designing different driving frequency-modulated capacitors, an effective driving electrostatic stiffness coefficient can be generated in the driving direction, thereby enabling the multimode frequency-modulated gyroscope to change the driving frequency in the driving direction.

[0028] A detection frequency-modulated capacitor is formed between the static electrode plate and the detection frame 21. When a voltage difference exists across the detection frequency-modulated capacitor, it generates an electrostatic resistance negatively correlated with the detected displacement, which acts on the detection frame 21. This electrostatic resistance produces a detection stiffness coefficient, which is essentially a virtual spring, for the multimode frequency-modulated gyroscope. By designing different detection frequency-modulated capacitors, an effective detection electrostatic stiffness coefficient can be generated in the detection direction, thereby enabling the multimode frequency-modulated gyroscope to change the detection frequency in the detection direction.

[0029] When the multi-mode frequency conversion gyroscope of this embodiment is working, the polarity of only the first driving comb tooth 121 and the second driving comb tooth 122 of one driving electrode can be changed to change the operating frequency of the gyroscope; or, the electrostatic resistance between the electrostatic plate and the driving frame 11 and the detection frame 21 can be changed to change the operating frequency of the gyroscope; or, not only the polarity of the first driving comb tooth 121 and the second driving comb tooth 122 of one driving electrode can be changed, but also the electrostatic resistance between the electrostatic plate and the driving frame 11 and the detection frame 21 can be changed to change the operating frequency of the gyroscope. The specific choice is made according to actual needs, and will not be limited here.

[0030] In this embodiment, the first switching switch can change the polarity of the first driving comb tooth 121 and the second driving comb tooth 122 of one of the driving electrodes, causing the polarity of the first driving comb tooth 121 and the second driving comb tooth 122 of the driving electrode to exchange, thereby changing the movement direction of the corresponding driving frame 11, and switching the two driving frames 11 between moving in the same direction and moving in opposite directions, ultimately realizing the change of the operating frequency of the multimode frequency conversion gyroscope. At the same time, the second switching switch accordingly swaps the polarity of the first detection comb tooth 221 and the second detection comb tooth 222 of the detection electrode on the detection frame 21 where the detection direction changes, realizing the detection of the third-direction angular velocity.

[0031] The multimode frequency conversion gyroscope provided in this embodiment uses a first switching switch to change the polarity of the first driving comb 121 and the second driving comb 122 of a driving electrode, enabling the two driving frames 11 to move in the same direction or in opposite directions, thus switching between two driving modes. When detecting the angular velocity in a third direction, the two detection frames 21 switch between the two detection modes of same-direction detection motion and opposite-direction detection motion with the driving frames 11. Then, the second switching switch, by changing the polarity of the first detection comb 221 and the second detection comb 222 of the detection electrode on the detection frame 21 with the changing detection direction, realizes the detection of the angular velocity in a third direction. This multimode... The driving frequency in the driving direction and the detection frequency in the detection direction of the frequency-converting gyroscope both change, that is, the operating frequency of the multi-mode frequency-converting gyroscope changes for the first time. The frequency-tuning plate group on the driving frame 11 and the detection frame 21 can adjust the electrostatic resistance between the electrostatic plate and the driving frame 11 and / or the detection frame 21 by controlling the energization state of the electrostatic plate, thereby changing the driving frequency and / or the detection frequency, and causing the operating frequency of the multi-mode frequency-converting gyroscope to change again. It can be seen that the multi-mode frequency-converting gyroscope provided in this embodiment has multiple operating frequencies at the same time, which enhances the anti-attack capability and safety performance of the multi-mode frequency-converting gyroscope.

[0032] The frequency modulation electrode assembly in this embodiment includes five electrostatic electrodes. Each electrostatic electrode in the frequency modulation electrode assembly can be energized individually, any two electrostatic electrodes in the frequency modulation electrode assembly can be energized simultaneously, and any three, four, or five electrostatic electrodes in the frequency modulation electrode assembly can be energized simultaneously, depending on actual needs. It should be noted that in other embodiments of the present invention, the number of electrostatic electrodes included in the frequency modulation electrode assembly is not limited to the above five, and can also be one, two, three, four, or more than five, depending on actual needs, and will not be limited here.

[0033] In this embodiment, there are at least two frequency modulation electrode groups, which are divided into a frequency modulation driving electrode group 31 and a frequency modulation detection electrode group 32. The frequency modulation driving electrode group 31 is disposed on the driving frame 11, and the electrostatic force electrode is an electrostatic force driving electrode. The electrostatic force driving electrode can be selectively energized to change the driving electrostatic resistance between the electrostatic force driving electrode and the driving frame 11. The frequency modulation detection electrode group 32 is disposed on the detection frame 21, and the electrostatic force electrode is an electrostatic force detection electrode. The electrostatic force detection electrode can be selectively energized to change the detection electrostatic resistance between the electrostatic force detection electrode and the detection frame 21.

[0034] Specifically, such as Figure 1As shown, in this embodiment, there are six frequency modulation electrode groups, two of which are frequency modulation drive electrode groups 31, and the other four are frequency modulation detection electrode groups 32. Each detection frame 21 is provided with a frequency modulation drive electrode group 31, which is located in the middle of the drive frame 11. Each detection frame 21 is provided with two frequency modulation detection electrode groups 32, which are located on the outer side of the detection electrode along the second direction.

[0035] To ensure stable operation of the multimode frequency-modulated gyroscope, the frequency difference between the detection mode and the driving mode must be constant. During actual operation, the frequency-modulated driving electrode group 31 and the frequency-modulated detection electrode group 32 must operate synchronously. The driving electrostatic resistance between the frequency-modulated driving electrode group 31 and the driving frame 11, and the detection electrostatic resistance between the frequency-modulated detection electrode group 32 and the detection frame 21, correspond one-to-one. That is, the multiple of the driving electrostatic resistance to the first electrostatic force value is equal to the multiple of the detection electrostatic resistance to the second electrostatic force value. In other words, the detection electrostatic resistance changes with the driving electrostatic resistance to ensure that the difference between the driving frequency in the driving direction and the detection frequency in the detection direction remains stable at a set frequency. This set frequency is related to the structure of the multimode frequency-modulated gyroscope itself. In other embodiments, the frequency-modulated driving electrode group 31 and the frequency-modulated detection electrode group 32 may also operate asynchronously, meaning the multiple of the driving electrostatic resistance to the first electrostatic force value is not equal to the multiple of the detection electrostatic resistance to the second electrostatic force value, depending on actual needs.

[0036] like Figure 2 and Figure 3 As shown, the frequency modulation drive plate group 31 of this embodiment includes five electrostatic drive plates, namely a first electrostatic drive plate 311, a second electrostatic drive plate 312, a third electrostatic drive plate 313, a fourth electrostatic drive plate 314, and a fifth electrostatic drive plate 315. The length of the first electrostatic drive plate 311 along the first direction is the same as the length of the second electrostatic drive plate 312 along the first direction. The length of the third electrostatic drive plate 313 along the first direction is twice the length of the first electrostatic drive plate 311 along the first direction. The length of the fourth electrostatic drive plate 314 along the first direction is four times the length of the first electrostatic drive plate 311 along the first direction. The total length of the fifth electrostatic drive plate 315 along the first direction is eight times the length of the first electrostatic drive plate 311 along the first direction. That is, the total length of the fifth electrostatic drive plate 315 along the first direction is eight times the length of the first electrostatic drive plate 311 along the first direction. In other embodiments, the length relationship between the electrostatically driven plates is not limited to two times, four times, and eight times that of this embodiment, but can also be other integer multiples or non-integer multiples, depending on actual needs, and is not limited here.

[0037] Define the driving electrostatic resistance between the first electrostatic force driving plate 311 and the driving frame 11 as the first electrostatic force value. Then, the driving electrostatic resistance between the third electrostatic force driving plate 313 (twice the length of the first electrostatic force driving plate 311) and the driving frame 11 is twice the first electrostatic force value; the driving electrostatic resistance between the fourth electrostatic force driving plate 314 (four times the length of the first electrostatic force driving plate 311) and the driving frame 11 is four times the first electrostatic force value; and the driving electrostatic resistance between the fifth electrostatic force driving plate 315 (eight times the length of the first electrostatic force driving plate 311) and the driving frame 11 is eight times the first electrostatic force value. In other words, the lengths of the first electrostatic force driving plate 311, the second electrostatic force driving plate 312, the third electrostatic force driving plate 313, the fourth electrostatic force driving plate 314, and the fifth electrostatic force driving plate 315 are integer multiples of each other, and the driving electrostatic resistance between the electrostatic force driving plates and the driving frame 11 is also an integer multiple.

[0038] Since each electrostatic driving electrode included in the frequency modulation driving electrode group 31 can be energized or de-energized individually, when any one of the first electrostatic driving electrode 311 and the second electrostatic driving electrode 312 is energized, while the remaining electrostatic driving electrodes are de-energized, the driving electrostatic resistance between the frequency modulation driving electrode group 31 and the driving frame 11 is the first electrostatic force value. When the first electrostatic force driving plate 311 and the second electrostatic force driving plate 312 are both energized, while the other electrostatic force driving plates are not energized, or when only the third electrostatic force driving plate 313 is energized, while the other electrostatic force driving plates are not energized, the driving electrostatic resistance between the frequency modulation driving plate group 31 and the driving frame 11 is twice the value of the first electrostatic force. When either the first electrostatic force driving plate 311 or the second electrostatic force driving plate 312 is energized, and the third electrostatic force driving plate 313 is also energized, while the other electrostatic force driving plates are not energized, the driving electrostatic resistance between the frequency modulation driving plate group 31 and the driving frame 11 is three times the value of the first electrostatic force. When the first electrostatic force driving plate 311, the second electrostatic force driving plate 312 and the third electrostatic force driving plate 313 are all energized, while the remaining electrostatic force driving plates are not energized, or when the fourth electrostatic force driving plate 314 is energized and the remaining electrostatic force driving plates are not energized, the driving electrostatic resistance between the frequency modulation driving plate group 31 and the driving frame 11 is four times the first electrostatic force value. When either the first electrostatic force driving plate 311 or the second electrostatic force driving plate 312 is energized, and the fourth electrostatic force driving plate 314 is also energized, while the remaining electrostatic force driving plates are not energized, the driving electrostatic resistance between the frequency modulation driving plate group 31 and the driving frame 11 is five times the value of the first electrostatic force. When the first electrostatic force driving plate 311 and the second electrostatic force driving plate 312 are both energized, and the fourth electrostatic force driving plate 314 is also energized, while the remaining electrostatic force driving plates are not energized, or when the third electrostatic force driving plate 313 and the fourth electrostatic force driving plate 314 are both energized, while the remaining electrostatic force driving plates are not energized, the driving electrostatic resistance between the frequency modulation driving plate group 31 and the driving frame 11 is six times the first electrostatic force value; When the third electrostatic force driving plate 313 and the fourth electrostatic force driving plate 314 are both energized, and one of the first electrostatic force driving plate 311 and the second electrostatic force driving plate 312 is energized while the other electrostatic force plates are not energized, the driving electrostatic resistance between the frequency modulation driving plate group 31 and the driving frame 11 is seven times the first electrostatic force value. When the fifth electrostatic force driving plate 315 is energized and the other electrostatic force driving plates are not energized, or when the fifth electrostatic force driving plate 315 is not energized and the other electrostatic force driving plates are energized, the driving electrostatic resistance between the frequency modulation driving plate group 31 and the driving frame 11 is eight times the first electrostatic force value. When either the first electrostatic force driving plate 311 or the second electrostatic force driving plate 312 is energized, the fifth electrostatic force driving plate 315 is energized, and the remaining electrostatic force driving plates are not energized, the driving electrostatic resistance between the frequency modulation driving plate group 31 and the driving frame 11 is nine times the value of the first electrostatic force. When the first electrostatic force driving plate 311, the second electrostatic force driving plate 312, and the fifth electrostatic force driving plate 315 are all energized, and the third electrostatic force driving plate 313 and the fourth electrostatic force driving plate 314 are not energized, or when the third electrostatic force driving plate 313 and the fifth electrostatic force driving plate 315 are all energized, and the remaining electrostatic force driving plates are not energized, the driving electrostatic resistance between the frequency modulation driving plate group 31 and the driving frame 11 is ten times the first electrostatic force value; When the third electrostatic force driving plate 313 and the fifth electrostatic force driving plate 315 are energized, one of the first electrostatic force driving plate 311 and the second electrostatic force driving plate 312 is energized, and the fourth electrostatic force driving plate 314 is not energized, the driving electrostatic resistance between the frequency modulation driving plate group 31 and the driving frame 11 is eleven times the first electrostatic force value. When the fourth electrostatic force driving plate 314 and the fifth electrostatic force driving plate 315 are energized, while the other electrostatic force driving plates are not energized, or when the first electrostatic force driving plate 311, the second electrostatic force driving plate 312, the third electrostatic force driving plate 313 and the fifth electrostatic force driving plate 315 are all energized, while the fourth electrostatic force driving plate 314 is not energized, the driving electrostatic resistance between the frequency modulation driving plate group 31 and the driving frame 11 is twelve times the first electrostatic force value; When the fourth electrostatic force driving plate 314 and the fifth electrostatic force driving plate 315 are energized, one of the first electrostatic force driving plate 311 and the second electrostatic force driving plate 312 is energized, and the third electrostatic force driving plate 313 is not energized, the driving electrostatic resistance between the frequency modulation driving plate group 31 and the driving frame 11 is thirteen times the first electrostatic force value. When the first electrostatic force driving plate 311, the second electrostatic force driving plate 312, the fourth electrostatic force driving plate 314, and the fifth electrostatic force driving plate 315 are all energized, while the third electrostatic force driving plate 313 is not energized, or when the third electrostatic force driving plate 313, the fourth electrostatic force driving plate 314, and the fifth electrostatic force driving plate 315 are all energized, while the first electrostatic force driving plate 311 and the second electrostatic force driving plate 312 are not energized, the driving electrostatic resistance between the frequency modulation driving plate group 31 and the driving frame 11 is fourteen times the first electrostatic force value; When only one of the first electrostatic force driving plate 311 and the second electrostatic force driving plate 312 is not energized, while the remaining electrostatic force driving plates are all energized, the driving electrostatic resistance between the frequency modulation driving plate group 31 and the driving frame 11 is 15 times the first electrostatic force value. When all five electrostatic driving plates of the frequency-modulated driving plate group 31 are energized, that is, when the first electrostatic driving plate 311, the second electrostatic driving plate 312, the third electrostatic driving plate 313, the fourth electrostatic driving plate 314 and the fifth electrostatic driving plate 315 are all energized, the first electrostatic force value is sixteen times the driving electrostatic resistance between the frequency-modulated driving plate group 31 and the driving frame 11.

[0039] It can be seen that there are sixteen levels of continuous driving electrostatic resistance between the frequency-modulated drive plate group 31 and the drive frame 11. When the multi-mode frequency conversion gyroscope is working, the driving electrostatic resistance between the frequency-modulated drive plate group 31 and the drive frame 11 can be changed according to actual needs.

[0040] Furthermore, the first electrostatic force drive plate 311, the second electrostatic force drive plate 312, the third electrostatic force drive plate 313, the fourth electrostatic force drive plate 314, and the fifth electrostatic force drive plate 315 are respectively disposed on five parallel circuits. For example... Figure 3 As shown, the first electrostatic force-driven electrode 311 and the corresponding drive frame 11 form Cm1, the second electrostatic force-driven electrode 312 and the corresponding drive frame 11 form Cm2, the third electrostatic force-driven electrode 313 and the corresponding drive frame 11 form Cm3, the fourth electrostatic force-driven electrode 314 and the corresponding drive frame 11 form Cm4, and the fifth electrostatic force-driven electrode 315 and the corresponding drive frame 11 form Cm5. During the actual operation of this multi-mode frequency conversion gyroscope, the drive frame 11 is grounded or supplied with a stable DC voltage Str1. Figure 4 As shown, five circuits are equipped with a first switch 71, a second switch 72, a third switch 73, a fourth switch 74, and a fifth switch 75, respectively. The first switch 71 is S11, the second switch 72 is S12, the third switch 73 is S13, the fourth switch 74 is S14, and the fifth switch 75 is S15. The first switch 71 can control whether the first electrostatic force drive plate 311 is energized, the second switch 72 can control whether the second electrostatic force drive plate 312 is energized, the third switch 73 can control whether the third electrostatic force drive plate 313 is energized, the fourth switch 74 can control whether the fourth electrostatic force drive plate 314 is energized, and the fifth switch 75 can control whether the fifth electrostatic force drive plate 315 is energized.

[0041] like Figure 3As shown, the frequency modulation detection electrode group 32 of this embodiment includes five electrostatic force detection electrodes, namely a first electrostatic force detection electrode 321, a second electrostatic force detection electrode 322, a third electrostatic force detection electrode 323, a fourth electrostatic force detection electrode 324, and a fifth electrostatic force detection electrode 325. The length of the first electrostatic force detection electrode 321 along the second direction is the same as the length of the second electrostatic force detection electrode 322 along the second direction. The length of the third electrostatic force detection electrode 323 along the second direction is twice the length of the first electrostatic force detection electrode 321 along the second direction. The length of the fourth electrostatic force detection electrode 324 along the second direction is four times the length of the first electrostatic force detection electrode 321 along the second direction. The length of the fifth electrostatic force detection electrode 325 along the second direction is eight times the length of the first electrostatic force detection electrode 321 along the second direction. That is, the total length of the fifth electrostatic force detection electrode 325 along the second direction is eight times the length of the first electrostatic force detection electrode 321 along the second direction. In other embodiments, the length relationship between the electrostatic force detection plates is not limited to two times, four times, and eight times that of this embodiment, but can also be other integer multiples or non-integer multiples, depending on actual needs, and is not limited here.

[0042] Define the electrostatic resistance between the first electrostatic force detection plate 321 and the detection frame 21 as the second electrostatic force value. Then, the electrostatic resistance between the third electrostatic force detection plate 323 (twice the length of the first electrostatic force detection plate 321) and the detection frame 21 is twice the second electrostatic force value; the electrostatic resistance between the fourth electrostatic force detection plate 324 (four times the length of the first electrostatic force detection plate 321) and the detection frame 21 is four times the second electrostatic force value; and the electrostatic resistance between the fifth electrostatic force detection plate 325 (eight times the length of the first electrostatic force detection plate 321) and the detection frame 21 is eight times the second electrostatic force value. In other words, the lengths of the first, second, third, fourth, and fifth electrostatic force detection plates 321, 322, 323, 324, and 325 are integer multiples of each other, and the electrostatic resistance between the electrostatic force detection plates and the detection frame 21 is also an integer multiple.

[0043] Since each electrostatic force detection electrode included in the frequency modulation detection electrode group 32 can be energized or de-energized individually, when either the first electrostatic force detection electrode 321 or the second electrostatic force detection electrode 322 is energized, while the remaining electrostatic force detection electrodes are de-energized, the detection electrostatic resistance between the frequency modulation detection electrode group 32 and the detection frame 21 is the second electrostatic force value. When the first electrostatic force detection plate 321 and the second electrostatic force detection plate 322 are both energized, while the other electrostatic force detection plates are not energized, or when only the third electrostatic force detection plate 323 is energized, while the other electrostatic force detection plates are not energized, the detection electrostatic resistance between the frequency modulation detection plate group 32 and the detection frame 21 is twice the second electrostatic force value. When either the first electrostatic force detection plate 321 or the second electrostatic force detection plate 322 is energized, and the third electrostatic force detection plate 323 is also energized, while the remaining electrostatic force detection plates are not energized, the detection electrostatic resistance between the frequency modulation detection plate group 32 and the detection frame 21 is three times the second electrostatic force value. When the first electrostatic force detection plate 321, the second electrostatic force detection plate 322, and the third electrostatic force detection plate 323 are all energized, while the remaining electrostatic force detection plates are not energized, or when the fourth electrostatic force detection plate 324 is energized while the remaining electrostatic force detection plates are not energized, the detection electrostatic resistance between the frequency modulation detection plate group 32 and the detection frame 21 is four times the second electrostatic force value; When either the first electrostatic force detection plate 321 or the second electrostatic force detection plate 322 is energized, and the fourth electrostatic force detection plate 324 is also energized, while the remaining electrostatic force detection plates are not energized, the detection electrostatic resistance between the frequency modulation detection plate group 32 and the detection frame 21 is five times the second electrostatic force value. When the first electrostatic force detection plate 321 and the second electrostatic force detection plate 322 are both energized, and the fourth electrostatic force detection plate 324 is also energized, while the remaining electrostatic force detection plates are not energized, or when the third electrostatic force detection plate 323 and the fourth electrostatic force detection plate 324 are both energized, while the remaining electrostatic force detection plates are not energized, the detection electrostatic resistance between the frequency modulation detection plate group 32 and the detection frame 21 is six times the second electrostatic force value; When the third electrostatic force detection plate 323 and the fourth electrostatic force detection plate 324 are both energized, and one of the first electrostatic force detection plate 321 and the second electrostatic force detection plate 322 is energized while the other electrostatic force plates are not energized, the detection electrostatic resistance between the frequency modulation detection plate group 32 and the detection frame 21 is seven times the second electrostatic force value. When the fifth electrostatic force detection plate 325 is energized and the other electrostatic force detection plates are not energized, or when the fifth electrostatic force detection plate 325 is not energized and the other electrostatic force detection plates are energized, the detection electrostatic resistance between the frequency modulation detection plate group 32 and the detection frame 21 is eight times the second electrostatic force value. When either the first electrostatic force detection plate 321 or the second electrostatic force detection plate 322 is energized, the fifth electrostatic force detection plate 325 is energized, and the remaining electrostatic force detection plates are not energized, the detection electrostatic resistance between the frequency modulation detection plate group 32 and the detection frame 21 is nine times the second electrostatic force value. When the first electrostatic force detection plate 321, the second electrostatic force detection plate 322, and the fifth electrostatic force detection plate 325 are all energized, and the third electrostatic force detection plate 323 and the fourth electrostatic force detection plate 324 are not energized, or when the third electrostatic force detection plate 323 and the fifth electrostatic force detection plate 325 are all energized, and the remaining electrostatic force detection plates are not energized, the detection electrostatic resistance between the frequency modulation detection plate group 32 and the detection frame 21 is ten times the second electrostatic force value; When the third electrostatic force detection electrode 323 and the fifth electrostatic force detection electrode 325 are energized, one of the first electrostatic force detection electrode 321 and the second electrostatic force detection electrode 322 is energized, and the fourth electrostatic force detection electrode 324 is not energized, the detection electrostatic resistance between the frequency modulation detection electrode group 32 and the detection frame 21 is eleven times the second electrostatic force value. When the fourth electrostatic force detection plate 324 and the fifth electrostatic force detection plate 325 are energized, while the other electrostatic force detection plates are not energized, or when the first electrostatic force detection plate 321, the second electrostatic force detection plate 322, the third electrostatic force detection plate 323 and the fifth electrostatic force detection plate 325 are all energized, while the fourth electrostatic force detection plate 324 is not energized, the detection electrostatic resistance between the frequency modulation detection plate group 32 and the detection frame 21 is twelve times the second electrostatic force value; When the fourth electrostatic force detection plate 324 and the fifth electrostatic force detection plate 325 are energized, one of the first electrostatic force detection plate 321 and the second electrostatic force detection plate 322 is energized, and the third electrostatic force detection plate 323 is not energized, the detection electrostatic resistance between the frequency modulation detection plate group 32 and the detection frame 21 is thirteen times the second electrostatic force value. When the first electrostatic force detection plate 321, the second electrostatic force detection plate 322, the fourth electrostatic force detection plate 324, and the fifth electrostatic force detection plate 325 are all energized, while the third electrostatic force detection plate 323 is not energized; or when the third electrostatic force detection plate 323, the fourth electrostatic force detection plate 324, and the fifth electrostatic force detection plate 325 are all energized, while the first electrostatic force detection plate 321 and the second electrostatic force detection plate 322 are not energized, the detection electrostatic resistance between the frequency modulation detection plate group 32 and the detection frame 21 is fourteen times the second electrostatic force value. When only one of the first electrostatic force detection plate 321 and the second electrostatic force detection plate 322 is not energized, while the other electrostatic force detection plates are energized, the detection electrostatic resistance between the frequency modulation detection plate group 32 and the detection frame 21 is 15 times the second electrostatic force value. When all five electrostatic force detection plates of the frequency modulation detection plate group 32 are energized, that is, when the first electrostatic force detection plate 321, the second electrostatic force detection plate 322, the third electrostatic force detection plate 323, the fourth electrostatic force detection plate 324 and the fifth electrostatic force detection plate 325 are all energized, the second electrostatic force value is sixteen times the detection electrostatic resistance between the frequency modulation detection plate group 32 and the detection frame 21.

[0044] Therefore, it can be seen that there are sixteen levels of continuous electrostatic resistance between the frequency modulation detection plate group 32 and the detection frame 21. When the multi-mode frequency conversion gyroscope is working, the electrostatic resistance between the frequency modulation detection plate group 32 and the detection frame 21 can be changed according to actual needs.

[0045] Furthermore, the first electrostatic force detection plate 321, the second electrostatic force detection plate 322, the third electrostatic force detection plate 323, the fourth electrostatic force detection plate 324, and the fifth electrostatic force detection plate 325 are respectively disposed on five parallel circuits, such as... Figure 3 As shown, the first electrostatic force sensor plate 321 and the corresponding drive frame 11 form Cm6, the second electrostatic force sensor plate 322 and the corresponding drive frame 11 form Cm7, the third electrostatic force sensor plate 323 and the corresponding drive frame 11 form Cm8, the fourth electrostatic force sensor plate 324 and the corresponding drive frame 11 form Cm9, and the fifth electrostatic force sensor plate 325 and the corresponding drive frame 11 form Cm10. During the actual operation of the multi-mode frequency conversion gyroscope, the drive frame 11 is grounded or supplied with a stable DC voltage Str2. For example... Figure 5 As shown, the five circuits are equipped with a sixth switch 76, a seventh switch 77, an eighth switch 78, a ninth switch 79, and a tenth switch 710, respectively. The sixth switch 76 is S21, the seventh switch 77 is S22, the eighth switch 78 is S23, the ninth switch 79 is S24, and the tenth switch 710 is S25. Among them, the sixth switch 76 can control whether the first electrostatic force sensor plate 321 is energized, the seventh switch 77 can control whether the second electrostatic force sensor plate 322 is energized, the eighth switch 78 can control whether the third electrostatic force sensor plate 323 is energized, the ninth switch 79 can control whether the fourth electrostatic force sensor plate 324 is energized, and the tenth switch 710 can control whether the fifth electrostatic force sensor plate 325 is energized.

[0046] The first electrostatic force driving electrode 311, the second electrostatic force driving electrode 312, the third electrostatic force driving electrode 313, the fourth electrostatic force driving electrode 314, and the fifth electrostatic force driving electrode 315 of this embodiment are respectively disposed on anchor points fixed to the substrate, and the first electrostatic force detection electrode 321, the second electrostatic force detection electrode 322, the third electrostatic force detection electrode 323, the fourth electrostatic force detection electrode 324, and the fifth electrostatic force detection electrode 325 are respectively disposed on anchor points fixed to the substrate.

[0047] In this embodiment, the length of the first electrostatic force driving plate 311 and the length of the first electrostatic force detection plate 321 are not directly related; they can be the same or different. As long as only the first electrostatic force driving plate 311 and only the first electrostatic force detection plate 321 are energized, the difference between the driving frequency in the driving direction and the detection frequency in the detection direction of the multimode frequency converter gyroscope can be stabilized at the aforementioned set frequency. It should be noted that in other embodiments of the present invention, when only the first electrostatic force driving plate 311 and the first electrostatic force detection plate are energized, the difference between the driving frequency in the driving direction and the detection frequency in the detection direction may not be the aforementioned set frequency. The specific setting depends on actual needs and is not limited here.

[0048] like Figure 1 As shown, the two driving electrodes in this embodiment are the first driving electrode 1201 and the second driving electrode 1202, respectively. Figure 6 and Figure 7 As shown, the multimode frequency conversion gyroscope also includes a first drive connection circuit 61, a second drive connection circuit 62, a third drive connection circuit 63, and a fourth drive connection circuit 64 connected in parallel. The first drive connection circuit 61 is connected to the positive port of the feedback circuit and has a first drive comb tooth 121 for driving the first electrode 1201. The second drive connection circuit 62 has a second drive comb tooth 122 for driving the second electrode 1202. The third drive connection circuit 63 is connected to the negative port of the feedback circuit and has a second drive comb tooth 122 for driving the first electrode 1201. The fourth drive connection circuit 64 has a first drive comb tooth 121 for driving the second electrode 1202. A first switching switch is configured to selectively connect the second drive connection circuit 62 to either the positive port or the negative port of the feedback circuit, and is also configured to connect the fourth drive connection circuit 64 to the other of the positive and negative ports of the feedback circuit.

[0049] Furthermore, such as Figure 6 and Figure 7As shown, the multimode frequency conversion gyroscope of this embodiment also includes a fifth drive connection circuit 65 and a sixth drive connection circuit 66. One end of the fifth drive connection circuit 65 is connected to the positive port of the feedback circuit, and one end of the sixth drive connection circuit 66 is connected to the negative port of the feedback circuit. The first changeover switch includes four movable contacts, two of which are electrically connected and the other two are electrically connected. The second drive connection circuit 62, the fourth drive connection circuit 64, the fifth drive connection circuit 65, and the sixth drive connection circuit 66 are respectively connected to the four movable contacts one-to-one. When the fourth drive connection circuit 64 is connected to the fifth drive connection circuit 65 through two movable contacts, the first drive comb tooth 121 of the second electrode 1202 is connected to the positive port of the feedback circuit; when the second drive connection circuit 62 is connected to the sixth drive connection circuit 66 through two movable contacts, the second drive comb tooth 122 of the second electrode 1202 is connected to the negative port of the feedback circuit, and the two drive frames 11 move in the same direction. When the fourth drive connection circuit 64 is connected to the sixth drive connection circuit 66 through two movable contacts, the first drive comb tooth 121 of the second drive electrode 1202 is connected to the negative port of the feedback circuit; when the second drive connection circuit 62 is connected to the fifth drive connection circuit 65 through two movable contacts, the second drive comb tooth 122 of the second drive electrode 1202 is connected to the positive port of the feedback circuit, and the two drive frames 11 move in opposite directions.

[0050] It should be noted that, as Figure 1 As shown, in this embodiment, the first driving comb tooth 121 of the driving first electrode 1201 and the corresponding driving frame 11 form Cd1, the second driving comb tooth 122 of the driving first electrode 1201 and the corresponding driving frame 11 form Cd3, the first driving comb tooth 121 of the driving second electrode 1202 and the corresponding driving frame 11 form Cd4, and the second driving comb tooth 122 of the driving second electrode 1202 and the corresponding driving frame 11 form Cd2. In the actual operation of the multi-mode frequency conversion gyroscope, the driving frame 11 is grounded or supplied with a stable DC voltage Str3, that is, the ends of the first driving connection circuit 61, the second driving connection circuit 62, the third driving connection circuit 63 and the fourth driving connection circuit 64 are all grounded or supplied with a stable DC voltage.

[0051] like Figure 1 As shown, in this embodiment, the two detection electrodes are a first detection electrode 2201 and a second detection electrode 2202. The first detection electrode 2201 corresponds to one detection frame 21, and the second detection electrode 2202 corresponds to another detection frame 21. The detection frame 21 corresponding to the first detection electrode 2201 is elastically connected to the driving frame 11 corresponding to the driving first electrode 1201 along a first direction, and the detection frame 21 corresponding to the second detection electrode 2202 is elastically connected to the driving frame 11 corresponding to the driving second electrode 1202 along a first direction. Figure 6 and Figure 7 As shown, the multimode frequency conversion gyroscope also includes a first detection connection circuit 81, a second detection connection circuit 82, a third detection connection circuit 83, and a fourth detection connection circuit 84 connected in parallel. The first detection connection circuit 81 is connected to the first positive terminal and has a first detection comb tooth 221 for detecting the first electrode 2201. The second detection connection circuit 82 has a second detection comb tooth 222 for detecting the second electrode 2202. The third detection connection circuit 83 is connected to the first negative terminal and has a second detection comb tooth 222 for detecting the first electrode 2201. The fourth detection connection circuit 84 has a first detection comb tooth 221 for detecting the second electrode 2202. A second switch is configured to selectively connect the second detection connection circuit 82 to either the first positive terminal or the first negative terminal, and is also configured to connect the fourth detection connection circuit 84 to the other of the first positive terminal and the first negative terminal.

[0052] Furthermore, such as Figure 6 and Figure 7 As shown, the multimode frequency conversion gyroscope of this embodiment also includes a fifth detection connection circuit 85 and a sixth detection connection circuit 86. One end of the fifth detection connection circuit 85 is connected to the first positive terminal, and one end of the sixth detection connection circuit 86 is connected to the first negative terminal. The second changeover switch includes four second electrical connection contacts, two of which are electrically connected, and the other two are electrically connected. The second detection connection circuit 82, the fourth detection connection circuit 84, the fifth detection connection circuit 85, and the sixth detection connection circuit 86 are respectively connected to the four second electrical connection contacts one-to-one. When the two detection frames 21 move in the same direction, as... Figure 5 As shown, when the fourth detection connection circuit 84 is connected to the fifth detection connection circuit 85 through two second electrical contact points, the first detection comb tooth 221 of the second detection electrode 2202 is connected to the first positive terminal interface; when the second detection connection circuit 82 is connected to the sixth detection connection circuit 86 through two second electrical contact points, the second detection comb tooth 222 of the second detection electrode 2202 is connected to the first negative terminal interface. When the two detection frames 21 move in the opposite direction, as... Figure 6 As shown, when the fourth detection connection circuit 84 is connected to the sixth detection connection circuit 86 through two second electrical connection points, the first detection comb tooth 221 of the detection second electrode 2202 is connected to the first negative terminal interface; when the second detection connection circuit 82 is connected to the fifth detection connection circuit 85 through two second electrical connection points, the second detection comb tooth 222 of the detection second electrode 2202 is connected to the first positive terminal interface.

[0053] It should be noted that, as Figure 1As shown, in this embodiment, the first detection comb tooth 221 of the first detection electrode 2201 and the corresponding detection frame 21 form Cs1, the second detection comb tooth 222 of the first detection electrode 2201 and the corresponding detection frame 21 form Cs3, the first detection comb tooth 221 of the second detection electrode 2202 and the corresponding detection frame 21 form Cs4, and the second detection comb tooth 222 of the second detection electrode 2202 and the corresponding detection frame 21 form Cs2. During the actual operation of the multi-mode frequency conversion gyroscope, the detection frame 21 is grounded or supplied with a stable DC voltage Str2, that is, the ends of the first detection connection circuit 81, the second detection connection circuit 82, the third detection connection circuit 83 and the fourth detection connection circuit 84 are all grounded or supplied with a stable DC voltage.

[0054] The multimode frequency conversion gyroscope in this embodiment also includes a third switching switch and two drive readout electrodes, such as Figure 1 As shown, two drive readout electrodes correspond to two drive frames 11 respectively. Each drive readout electrode includes a first drive readout comb tooth 141 and a second drive readout comb tooth 142. A third switching switch is configured to switch the polarity of the first drive readout comb tooth 141 and the second drive readout comb tooth 142 of the drive readout electrode on the drive frame 11 when the drive direction changes. The drive readout electrodes can reflect the movement of the drive frame 11 in the drive mode, enabling the drive electrodes to adjust the drive of the drive frame 11 in a timely manner, thereby ensuring the smooth operation of the drive frame 11.

[0055] Specifically, such as Figure 3 As shown, in this embodiment, the two driving read electrodes are driving read first electrode 1401 and driving read second electrode 1402, respectively. Both the first driving read electrode and the first driving electrode 1401 correspond to the same driving frame 11, and both the second driving read electrode and the second driving electrode 1402 correspond to another driving frame 11. Figure 8 and Figure 9As shown, the multimode frequency conversion gyroscope also includes a first drive-reading connection circuit 91, a second drive-reading connection circuit 92, a third drive-reading connection circuit 93, and a fourth drive-reading connection circuit 94 connected in parallel. The first drive-reading connection circuit 91 is connected to the second positive interface terminal and has a first drive-reading comb tooth 141 for driving and reading the first electrode 1401. The second drive-reading connection circuit 92 has a second drive-reading comb tooth 142 for driving and reading the second electrode 1402. The third drive-reading connection circuit 93 is connected to the second negative interface terminal and has a second drive-reading comb tooth 142 for driving and reading the first electrode 1401. The fourth drive-reading connection circuit 94 has a first drive-reading comb tooth 141 for driving and reading the second electrode 1402. A third switch is configured to selectively connect the second drive-reading connection circuit 92 to one of the second positive interface terminal and the second negative interface terminal, and is also configured to connect the fourth drive-reading connection circuit 94 to the other of the second positive interface terminal and the second negative interface terminal.

[0056] Furthermore, such as Figure 8 and Figure 9 As shown, the multimode frequency conversion gyroscope of this embodiment also includes a fifth drive reading connection circuit 95 and a sixth drive reading connection circuit 96. One end of the fifth drive reading connection circuit 95 is connected to the second positive terminal, and one end of the sixth drive reading connection circuit 96 is connected to the second negative terminal. The third changeover switch includes four third electrical connection contacts, two of which are electrically connected, and the other two are electrically connected. The second drive reading connection circuit 92, the fourth drive reading connection circuit 94, the fifth drive reading connection circuit 95, and the sixth drive reading connection circuit 96 are respectively connected to the four third electrical connection contacts one-to-one. When the two drive frames 11 move in the same direction, as... Figure 8 As shown, when the fourth drive read connection circuit 94 is connected to the fifth drive read connection circuit 95 through two third electrical contact points, the first drive read comb tooth 141 of the drive read second electrode 1402 is connected to the second positive terminal interface; when the second drive read connection circuit 92 is connected to the sixth drive read connection circuit 96 through two third electrical contact points, the second drive read comb tooth 142 of the drive read second electrode 1402 is connected to the second negative terminal interface. When the two drive frames 11 move in opposite directions, as... Figure 9 As shown, when the fourth drive read connection circuit 94 is connected to the sixth drive read connection circuit 96 through two third electrical connection points, the first drive read comb tooth 141 of the drive read second electrode 1402 is connected to the second negative terminal interface; when the second drive read connection circuit 92 is connected to the fifth drive read connection circuit 95 through two third electrical connection points, the second drive read comb tooth 142 of the drive read second electrode 1402 is connected to the second positive terminal interface.

[0057] It should be noted that, as Figure 1 As shown, in this embodiment, the first drive reading comb tooth 141 of the drive reading first electrode 1401 forms Cds1 with the corresponding drive frame 11, the second drive reading comb tooth 142 of the drive reading first electrode 1401 forms Cds3 with the corresponding drive frame 11, the first drive reading comb tooth 141 of the drive reading second electrode 1402 forms Cds4 with the corresponding drive frame 11, and the second drive reading comb tooth 142 of the drive reading second electrode 1402 forms Cds2 with the corresponding drive frame 11. During the actual operation of the multi-mode frequency conversion gyroscope, the drive frame 11 is grounded or supplied with a stable DC voltage Str1, that is, the ends of the first drive reading connection circuit 91, the second drive reading connection circuit 92, the third drive reading connection circuit 93 and the fourth drive reading connection circuit 94 are all grounded or supplied with a stable DC voltage.

[0058] like Figure 6 and Figure 7 As shown, the first changeover switch in this embodiment also includes a first rotating body 45, and four movable contacts are all disposed on the first rotating body 45. The first rotating body 45 can rotate and switch between a first position and a second position. Figure 6 As shown, when the first rotating body 45 is in the first position, the first driving comb tooth 121 of the driving second electrode 1202 is connected to the positive port of the feedback circuit, and the second driving comb tooth 122 of the driving second electrode 1202 is connected to the negative port of the feedback circuit, and the two driving frames 11 move in the same direction; Figure 7 As shown, when the first rotating body 45 is in the second position, the first driving comb 121 of the driving second electrode 1202 is connected to the negative port of the feedback circuit, and the second driving comb 122 of the driving second electrode 1202 is connected to the positive port of the feedback circuit, and the two driving frames 11 move in opposite directions.

[0059] like Figure 8 and Figure 9 As shown, the second changeover switch in this embodiment also includes a second rotating body 410, and four second electrical contact points are all disposed on the second rotating body 410. The second rotating body 410 can rotate and switch between the third position and the fourth position. Figure 8 As shown, when the two detection frames 21 move in the same direction, the second rotating body 410 is in the third position, the first detection comb 221 of the second detection electrode 2202 is connected to the first positive terminal interface, and the second detection comb 222 of the second detection electrode 2202 is connected to the first negative terminal interface; as shown Figure 9As shown, when the two detection frames 21 move in opposite directions, the second rotating body 410 is in the fourth position, the first detection comb 221 of the second detection electrode 2202 is connected to the first negative terminal interface, and the second detection comb 222 of the second detection electrode 2202 is connected to the first positive terminal interface.

[0060] like Figure 10 and Figure 11 As shown, the third changeover switch in this embodiment also includes a third rotating body 415. Four third electrical contact points are all disposed on the third rotating body 415. The third rotating body 415 can rotate and switch between the fifth and sixth positions, as shown below. Figure 10 As shown, when the two drive frames 11 move in the same direction, the third rotating body 415 is in the third position, the first drive reading comb 141 of the drive reading second electrode 1402 is connected to the second positive terminal interface, and the second drive reading comb 142 of the drive reading second electrode 1402 is connected to the second negative terminal interface; as shown Figure 11 As shown, when the two drive frames 11 move in opposite directions, the third rotating body 415 is in the sixth position, the first drive reading comb 141 of the drive reading second electrode 1402 is connected to the second negative terminal interface, and the second drive reading comb 142 of the drive reading second electrode 1402 is connected to the second positive terminal interface.

[0061] Specifically, such as Figure 6 and Figure 7 As shown, the four movable contacts on the first rotating body 45 are defined sequentially in a counterclockwise direction as first movable contact 41, second movable contact 42, third movable contact 43, and fourth movable contact 44, wherein first movable contact 41 is connected to second movable contact 42, and third movable contact 43 is connected to fourth movable contact 44. The four second electrical connection contacts on the second rotating body 410 are defined sequentially as fifth movable contact 46, sixth movable contact 47, seventh movable contact 48, and eighth movable contact 49, wherein fifth movable contact 46 is connected to sixth movable contact 47, and seventh movable contact 48 is connected to eighth movable contact 49. The four third electrical contact points mentioned above are defined on the third rotating body 415 as the ninth movable contact 411, the tenth movable contact 412, the eleventh movable contact 413 and the twelfth movable contact 414, respectively. Among them, the ninth movable contact 411 is connected to the tenth movable contact 412, and the eleventh movable contact 413 is connected to the twelfth movable contact 414.

[0062] When the first rotating body 45 is in the first position, the second rotating body 410 is in the third position, and the third rotating body 415 is in the fifth position. At this time, as... Figure 6As shown, the first movable contact 41 is connected to the fourth drive connection circuit 64 and the second movable contact 42 is connected to the fifth drive connection circuit 65. The first drive comb tooth 121 of the drive second electrode 1202 on the fourth drive connection circuit 64 is connected to the positive port of the feedback circuit. The second drive connection circuit 62 is connected to the third movable contact 43 and the sixth drive connection circuit 66 is connected to the fourth movable contact 44. The second drive comb tooth 122 of the drive second electrode 1202 on the second drive connection circuit 62 is connected to the negative port of the feedback circuit. At this time, the two drive electrodes drive the two drive frames 11 to move in the same direction, and the two detection frames 21 move in the same direction in the detection mode.

[0063] At the same time, such as Figure 8 As shown, for the second changeover switch, the fifth movable contact 46 is connected to the fourth detection connection circuit 84 and the sixth movable contact 47 is connected to the fifth detection connection circuit 85. The first detection comb tooth 221 of the detection second electrode 2202 on the fourth detection connection circuit 84 is connected to the first positive terminal interface. The second detection connection circuit 82 is connected to the seventh movable contact 48 and the sixth detection connection circuit 86 is connected to the eighth movable contact 49. The second detection comb tooth 222 of the detection second electrode 2202 on the second detection connection circuit 82 is connected to the first negative terminal interface. At this time, the detection first electrode 2201 and the detection second electrode 2202 can detect the corresponding change in detection capacitance, thereby realizing the detection of the third-direction angular velocity.

[0064] At the same time, such as Figure 10 As shown, for the third changeover switch, the ninth movable contact 411 is connected to the fourth drive reading connection circuit 94 and the tenth movable contact 412 is connected to the fifth drive reading connection circuit 95. The first drive reading comb tooth 141 of the drive reading second electrode 1402 on the fourth drive reading connection circuit 94 is connected to the second positive terminal. The second drive reading connection circuit 92 is connected to the eleventh movable contact 413 and the sixth drive reading connection circuit 96 is connected to the twelfth movable contact 414. The second drive reading comb tooth 142 of the drive reading second electrode 1402 on the second drive reading connection circuit 92 is connected to the second negative terminal. At this time, the drive reading first electrode 1401 and the drive reading second electrode 1402 can detect the corresponding drive capacitance change.

[0065] When the first rotating body 45 is in the second position, the second rotating body 410 is in the fourth position, and the third rotating body 415 is in the sixth position. At this time, as... Figure 7As shown, the first movable contact 41 is connected to the sixth drive connection circuit 66 and the second movable contact 42 is connected to the fourth drive connection circuit 64. The first drive comb tooth 121 of the drive second electrode 1202 on the fourth drive connection circuit 64 is connected to the negative port of the feedback circuit. The fifth drive connection circuit 65 is connected to the third movable contact 43 and the second drive connection circuit 62 is connected to the fourth movable contact 44. The second drive comb tooth 122 of the drive second electrode 1202 on the second drive connection circuit 62 is connected to the positive port of the feedback circuit. At this time, the two drive electrodes drive the two drive frames 11 to move in the opposite direction, and the two detection frames 21 move in the opposite direction in the detection mode.

[0066] At the same time, such as Figure 9 As shown, for the second changeover switch, the fifth movable contact 46 is connected to the sixth detection connection circuit 86 and the sixth movable contact 47 is connected to the fourth detection connection circuit 84. The first detection comb tooth 221 of the detection second electrode 2202 on the fourth detection connection circuit 84 is connected to the first negative terminal interface. The fifth detection connection circuit 85 is connected to the seventh movable contact 48 and the second detection connection circuit 82 is connected to the eighth movable contact 49. The second detection comb tooth 222 of the detection second electrode 2202 on the second detection connection circuit 82 is connected to the first positive terminal interface. At this time, the detection first electrode 2201 and the detection second electrode 2202 can detect the corresponding changes in detection capacitance, thereby realizing the detection of the third-direction angular velocity.

[0067] At the same time, such as Figure 11 As shown, for the third changeover switch, the ninth movable contact 411 is connected to the sixth drive reading connection circuit 96 and the tenth movable contact 412 is connected to the fourth drive reading connection circuit 94. The first drive reading comb tooth 141 of the drive reading second electrode 1402 on the fourth drive reading connection circuit 94 is connected to the second negative terminal interface. The fifth drive reading connection circuit 95 is connected to the eleventh movable contact 413 and the second drive reading connection circuit 92 is connected to the twelfth movable contact 414. The second drive reading comb tooth 142 of the drive reading second electrode 1402 on the second drive reading connection circuit 92 is connected to the second positive terminal interface. At this time, the drive reading first electrode 1401 and the drive reading second electrode 1402 can detect the corresponding drive capacitance change of the drive frame 11.

[0068] In actual operation, the multimodal frequency conversion gyroscope of this embodiment changes the first and second positions of the first switching switch at preset intervals to alter the polarity of the first driving comb teeth 121 and the second driving comb teeth 122 of the driving second electrode 1202. This causes the polarity of the first driving comb teeth 121 and the second driving comb teeth 122 of the driving second electrode 1202 to exchange, thereby changing the movement direction of the corresponding driving frame 11 along the second direction and switching between same-direction and opposite-direction movement of the two driving frames 11. When there is an angular velocity in the third direction, the two detection frames 21 are subjected to Coriolis forces in the same or opposite directions along the first direction and move in the same or opposite directions along the first direction, thereby changing the detection frequency and ultimately achieving the effect of changing the operating frequency of the multimodal frequency conversion gyroscope. Simultaneously, the first switch is switched between the third and fourth positions to detect the angle of the third direction by the detection electrode. At the same time, the first switch is switched between the fifth and sixth positions to detect the movement of the drive frame 11 as the drive direction changes by the drive reading electrode, ensuring smooth movement of the drive frame 11 along the second direction. It should be noted that the preset duration can be set according to actual needs, and can be three seconds, four seconds, five seconds, or other durations; no limitation is made here.

[0069] like Figure 1 and Figure 3 As shown, the multimode frequency conversion gyroscope of this embodiment also includes two connecting frames 51, a driving beam 13, a detection beam 23, and a driving detection beam 52. The two connecting frames 51 are arranged on both sides of the two detection frames 21 along the second direction. The driving beam 13 can deform along the second direction and its two ends are respectively connected to the driving frame 11 and the connecting frame 51. The detection beam 23 can deform along the first direction and its two ends are respectively connected to the driving frame 11 and the detection frame 21. The driving detection beam 52 can deform along the first direction and the second direction and its two ends are respectively connected to the detection frame 21 and the connecting frame 51.

[0070] like Figure 1 and Figure 3 As shown, in this embodiment, there are four driving beams 13, four detection beams 23, and four driving detection beams 52. Each driving frame 11 is connected to one detection beam 23 at each end along the second direction, and each connecting frame 51 is connected to one driving beam 13 at each end along the first direction. Furthermore, the middle of each connecting frame 51 is connected to two driving detection beams 52. That is, each driving frame 11 corresponds to two detection beams 23, and each connecting frame 51 corresponds to two driving beams 13 and two driving detection beams 52. Wherein, as... Figure 3As shown, the drive detection beam 52 includes a first U-shaped beam 521 and a second U-shaped beam 522. The first U-shaped beam 521 can deform along a first direction and one end of it is connected to the detection frame 21. The second U-shaped beam 522 can deform along a second direction and one end of it is connected to the other end of the first U-shaped beam 521. The other end of the second U-shaped beam 522 is connected to the connecting frame 51. The structure of the connecting frame 51 and the drive detection beam 52 in this embodiment ensures that the detection frame 21 of the multimode frequency conversion gyroscope is not affected by the drive state in the detection mode, and at the same time, the drive frame 11 is not affected by the movement of the detection frame 21 in the drive mode, thus realizing bidirectional decoupling between drive and detection.

[0071] like Figure 1 As shown, the multimode frequency conversion gyroscope of this embodiment also includes two fixed anchor points 53 and two elastic beams 54. The two fixed anchor points 53 are fixed to the substrate along the second direction. The two elastic beams 54 correspond to the two connecting frames 51 respectively, and each elastic beam 54 can deform along the second direction. Both ends of each elastic beam 54 are connected to the connecting frame 51 and the fixed anchor point 53 respectively. Specifically, the elastic beam 54 in this embodiment is a square frame beam, which can absorb displacement along the second direction, ensuring the stable operation of the connecting frame 51.

[0072] Note that the above description is merely a preferred embodiment of the present invention and the technical principles employed. Those skilled in the art will understand that the present invention is not limited to the specific embodiments described herein, and various obvious changes, readjustments, and substitutions can be made without departing from the scope of protection of the present invention. Therefore, although the present invention has been described in detail through the above embodiments, the present invention is not limited to the above embodiments, and may include many other equivalent embodiments without departing from the concept of the present invention, the scope of which is determined by the scope of the appended claims.

Claims

1. A multimodal frequency-converting gyroscope, comprising two drive frames, two detection frames, two drive electrodes, and two detection electrodes, wherein the two drive frames and the two detection frames correspond one-to-one, the two drive frames are arranged along a first direction, and the two detection frames are arranged between the two drive frames along the first direction, each drive frame is provided with a drive electrode, and each detection frame is provided with a detection electrode, the drive electrodes being configured to drive the corresponding drive frame to move along a second direction, each drive electrode including a first drive comb tooth and a second drive comb tooth, and each detection electrode including a first detection comb tooth and a second detection comb tooth, characterized in that... The multimodal frequency-converting gyroscope also includes: A frequency-modulated electrode assembly is disposed on the drive frame and / or the detection frame and includes an electrostatic electrode. The electrostatic electrode can be selectively energized to change the electrostatic resistance between the electrostatic electrode and the drive frame and / or the detection frame, thereby changing the drive frequency of the multimode frequency-modulated gyroscope in the drive direction and / or the detection frequency in the detection direction. A first switching switch is configured to swap the polarity of the first driving comb teeth and the second driving comb teeth of the driving electrode on one of the driving frames, so as to change the driving direction of the driving frame and the detection direction of the detection frame corresponding to the driving frame, so that the two driving frames switch between two driving modes of driving motion in the same direction and driving motion in opposite directions. At the same time, when detecting the angular velocity in a third direction, the two detection frames switch between two detection modes of detection motion in the same direction and detection motion in opposite directions. A second switching switch is configured to switch the polarity of the first and second detection comb teeth of the detection electrode on one of the detection frames.

2. The multimode frequency conversion gyroscope according to claim 1, characterized in that, The number of frequency-modulated electrode groups is at least two and they are divided into: A frequency-modulated drive electrode assembly is disposed on the drive frame. The electrostatic electrode is an electrostatic drive electrode. The electrostatic drive electrode can be selectively energized to change the drive electrostatic resistance between the electrostatic drive electrode and the drive frame, thereby changing the drive frequency of the multimode frequency-modulated gyroscope in the drive direction. A frequency-modulated detection electrode group is disposed on the detection frame. The electrostatic electrode is an electrostatic force detection electrode. The electrostatic force detection electrode can be selectively energized to change the detection electrostatic resistance between the electrostatic force detection electrode and the detection frame, thereby changing the detection frequency of the multimode frequency-modulated gyroscope in the detection direction.

3. The multimode frequency conversion gyroscope according to claim 2, characterized in that, The detection electrostatic resistance changes with the change of the driving electrostatic resistance, so that the difference between the driving frequency and the detection frequency is a set frequency.

4. The multimode frequency conversion gyroscope according to claim 1, characterized in that, The two driving electrodes are respectively a first driving electrode and a second driving electrode, and the multimode frequency conversion gyroscope also includes parallel connections: The first drive connection circuit is connected to the positive port of the feedback circuit, and is provided with the first drive comb teeth of the drive first electrode. The second drive connection circuit is provided with the second drive comb teeth of the drive second electrode; The third drive connection circuit is connected to the negative port of the feedback circuit, and is provided with the second drive comb teeth of the drive first electrode. The fourth drive connection circuit is provided with the first drive comb teeth of the drive second electrode; The first changeover switch is configured to selectively connect the second drive connection circuit to one of the positive port and the negative port of the feedback circuit, and is also configured to connect the fourth drive connection circuit to the other of the positive port and the negative port of the feedback circuit.

5. The multimode frequency conversion gyroscope according to claim 4, characterized in that, The multi-mode frequency conversion gyroscope further includes a fifth drive connection circuit and a sixth drive connection circuit. One end of the fifth drive connection circuit is connected to the positive port of the feedback circuit, and one end of the sixth drive connection circuit is connected to the negative port of the feedback circuit. The first changeover switch includes four movable contacts, two of which are electrically connected and the other two are electrically connected. The second drive connection circuit, the fourth drive connection circuit, the fifth drive connection circuit, and the sixth drive connection circuit are respectively connected to the four movable contacts one by one. When the fourth drive connection circuit is connected to the fifth drive connection circuit through two movable contacts, the first drive comb tooth of the drive second electrode is connected to the positive port of the feedback circuit; when the second drive connection circuit is connected to the sixth drive connection circuit through two movable contacts, the second drive comb tooth of the drive second electrode is connected to the negative port of the feedback circuit, and the two drive frames move in the same direction. When the fourth drive connection circuit is connected to the sixth drive connection circuit through two movable contacts, the first drive comb tooth of the drive second electrode is connected to the negative port of the feedback circuit; when the second drive connection circuit is connected to the fifth drive connection circuit through two movable contacts, the second drive comb tooth of the drive second electrode is connected to the positive port of the feedback circuit, and the two drive frames move in opposite directions.

6. The multimode frequency conversion gyroscope according to claim 1, characterized in that, The two detection electrodes are a first detection electrode and a second detection electrode, respectively. The multimode frequency conversion gyroscope also includes electrodes connected in parallel: The first detection connection circuit is connected to the first positive terminal interface and is provided with the first detection comb teeth of the first detection electrode. The second detection connection circuit is provided with the second detection comb teeth of the second detection electrode; The third detection connection circuit is connected to the first negative terminal interface and is provided with the second detection comb teeth of the first detection electrode. The fourth detection connection circuit is provided with the first detection comb teeth of the second detection electrode; The second switch is configured to selectively connect the second detection connection circuit to one of the first positive interface terminal and the first negative interface terminal, and is also configured to connect the fourth detection connection circuit to the other of the first positive interface terminal and the first negative interface terminal.

7. The multimode frequency conversion gyroscope according to claim 6, characterized in that, The multimode frequency conversion gyroscope further includes a fifth detection connection circuit and a sixth detection connection circuit. One end of the fifth detection connection circuit is connected to the first positive terminal, and one end of the sixth detection connection circuit is connected to the first negative terminal. The second changeover switch includes four second electrical connection contacts, two of which are electrically connected and the other two are electrically connected. The second detection connection circuit, the fourth detection connection circuit, the fifth detection connection circuit, and the sixth detection connection circuit are respectively connected to the four second electrical connection contacts one by one. When the two detection frames move in the same direction, when the fourth detection connection circuit is connected to the fifth detection connection circuit through the two second electrical connection points, the first detection comb tooth of the second detection electrode is connected to the first positive terminal interface; when the second detection connection circuit is connected to the sixth detection connection circuit through the two second electrical connection points, the second detection comb tooth of the second detection electrode is connected to the first negative terminal interface. When the two detection frames move in opposite directions, and the fourth detection connection circuit is connected to the sixth detection connection circuit through the two second electrical connection points, the first detection comb tooth of the second detection electrode is connected to the first negative terminal interface; when the second detection connection circuit is connected to the fifth detection connection circuit through the two second electrical connection points, the second detection comb tooth of the second detection electrode is connected to the first positive terminal interface.

8. The multimode frequency conversion gyroscope according to claim 1, characterized in that, The multimode frequency conversion gyroscope also includes a third switching switch and two drive readout electrodes. The two drive readout electrodes correspond to the two drive frames respectively. Each drive readout electrode includes a first drive readout comb and a second drive readout comb. The third switching switch is configured to switch the polarity of the first drive readout comb and the second drive readout comb of the drive readout electrode on the drive frame where the drive direction changes.

9. The multimode frequency conversion gyroscope according to claim 8, characterized in that, The two drive readout electrodes are designated as a first drive readout electrode and a second drive readout electrode, respectively. The multimode frequency conversion gyroscope also includes parallel connections: The first drive read connection circuit is connected to the second positive interface terminal and is provided with the first drive read comb teeth of the drive read first electrode. The second drive read connection circuit is provided with the second drive read comb teeth of the drive read second electrode; The third drive read connection circuit is connected to the second negative terminal interface, and is provided with the second drive read comb teeth of the drive read first electrode. The fourth drive read connection circuit is provided with the first drive read comb teeth of the drive read second electrode; The third switch is configured to selectively connect the second drive read connection circuit to one of the second positive interface terminal and the second negative interface terminal, and is also configured to connect the fourth drive read connection circuit to the other of the second positive interface terminal and the second negative interface terminal.

10. The multimode frequency conversion gyroscope according to claim 9, characterized in that, The multi-mode frequency conversion gyroscope further includes a fifth drive reading connection circuit and a sixth drive reading connection circuit. One end of the fifth drive reading connection circuit is connected to the second positive terminal, and one end of the sixth drive reading connection circuit is connected to the second negative terminal. The third changeover switch includes four third electrical connection contacts, two of which are electrically connected and the other two are electrically connected. The second drive reading connection circuit, the fourth drive reading connection circuit, the fifth drive reading connection circuit, and the sixth drive reading connection circuit are respectively connected to the four third electrical connection contacts one by one. When the two drive frames move in the same direction, when the fourth drive reading connection circuit is connected to the fifth drive reading connection circuit through the two third electrical connection contacts, the first drive reading comb tooth of the drive reading second electrode is connected to the second positive terminal; when the second drive reading connection circuit is connected to the sixth drive reading connection circuit through the two third electrical connection contacts, the second drive reading comb tooth of the drive reading second electrode is connected to the second negative terminal. When the two drive frames move in opposite directions, when the fourth drive reading connection circuit is connected to the sixth drive reading connection circuit through the two third electrical connection points, the first drive reading comb tooth of the drive reading second electrode is connected to the second negative terminal interface; when the second drive reading connection circuit is connected to the fifth drive reading connection circuit through the two third electrical connection points, the second drive reading comb tooth of the drive reading second electrode is connected to the second positive terminal interface.

11. The multimode frequency conversion gyroscope according to claim 1, characterized in that, The multimodal frequency-converting gyroscope also includes: Two fixed anchor points are set on the substrate along the second direction; Two connecting frames are distributed along the second direction, and the two detection frames are located between the two connecting frames; Two elastic beams are provided, each corresponding to one of the two connecting frames and one of the two fixed anchor points. One end of each elastic beam is connected to the connecting frame, and the other end is connected to the fixed anchor point. The drive beam is deformable along a second direction and its two ends are respectively connected to the drive frame and the connecting frame; A drive detection beam is capable of deforming along the first direction and the second direction, and its two ends are respectively connected to the connecting frame and the detection frame; The detection beam is deformable along the first direction and its two ends are respectively connected to the detection frame and the driving frame.

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