Perovskite blade coating equipment and application thereof

Abstract

The invention provides perovskite blade coating equipment and application thereof. The perovskite blade coating equipment comprises an operation table, a blade coating assembly, a dropping liquid cleaning assembly, a placement assembly and a control device, a substrate resistance heating wire is mounted on the bottom surface of the placement table top to heat the table top, and a vacuum device provides negative pressure to fix a corresponding substrate; the liquid dropping cleaning assembly is provided with an electric liquid dropping device, a precursor solution storage device, a cleaning water tank, a spraying device and a fan; a scraper assembly of the blade coating assembly is connected to the bottom end of a piston rod of a blade coating push rod through a pull pressure sensor, a scraper switching motor is installed on a lifting frame to drive a star-shaped knife rest to rotate so as to switch a blade coating knife, and a knife head heating resistance wire is arranged in the blade coating knife. Automatic tool changing, temperature control and cleaning can be integrated, the fluid dynamic pressure model is introduced to control the downward pressure of the blade coating push rod, and the blade coating defect caused by fluid dynamic pressure is overcome.

Description

Technical Field

[0001] This invention relates to the field of semiconductor thin film preparation equipment technology, specifically to perovskite coating equipment and its applications. Background Technology

[0002] Perovskite thick films have wide applications in X-ray imaging, radiation detection, and other fields. Their preparation process typically employs solution-based methods such as blade coating and spin coating. Among these, blade coating has the advantages of relatively simple equipment structure and good process scalability, making it a commonly used method for preparing large-area thick films.

[0003] Existing blade coating equipment typically includes a substrate placement platform, a blade coating mechanism, and a drive mechanism. The drive mechanism drives the blade coating mechanism to perform longitudinal and lateral movements to coat the substrate, aiming to obtain a uniform film thickness. Preparing high-quality thick films often requires multi-stage processes, such as a combination of low-speed nucleation blade coating and high-speed through-hole filling blade coating. This necessitates independent temperature control for both the blade and the substrate, and cleaning of the placement platform between coating operations. Existing equipment lacks an integrated structure for automatic blade changing, temperature control, and cleaning, hindering continuous and efficient high-quality thick film coating and impeding improvements in coating efficiency and the standardization of equipment design.

[0004] Meanwhile, during actual coating processes, fluctuations in coating speed, solution viscosity, doctor blade geometry, and insufficient motion stability can cause hydrodynamic pressure changes, leading to the doctor blade being lifted by the hydrodynamic pressure. This can result in defects such as uneven film thickness, edge lifting, or streaks, thus affecting the density of the thick film and device performance. To prevent the doctor blade from being lifted by the hydrodynamic pressure and to ensure film thickness uniformity, existing equipment incorporates structures such as spring compensation to ensure downward pressure on the doctor blade. However, this can easily lead to excessive downward pressure on the doctor blade, causing damage, uneven film thickness, and substrate damage. None of the above structures incorporate the actual hydrodynamic pressure into the overall mechanical and control design, making it impossible to provide suitable and stable pressure under high-speed or multi-stage coating conditions to obtain a uniform film.

[0005] Based on the above problems, it is necessary to propose a perovskite coating equipment and its application to achieve automatic blade changing, temperature control and cleaning integration, improve continuous coating efficiency, and overcome defects such as uneven film thickness, edge lifting or streaks caused by hydrodynamic pressure. Summary of the Invention

[0006] This invention provides a perovskite coating equipment and its application, which can realize automatic blade changing, temperature control and cleaning integration, improve the quality of thick film coating and continuous coating efficiency, and overcome coating defects caused by hydrodynamic pressure.

[0007] To achieve the above-mentioned technical objectives and effects, the present invention solves the above-mentioned problems through the following technical solutions:

[0008] A perovskite coating device includes an operating table and a coating component, a drip cleaning component, a placement component, and a control device installed on the operating table; the placement component is installed on the top surface of the operating table, and the drip cleaning component and the coating component are mounted above the placement component;

[0009] The placement assembly includes a placement platform with a base placement position in the middle. Glass plates with a thickness matching the height of the base are placed on both sides of the base placement position. A base resistance heating wire and a temperature sensor III are installed on the bottom surface of the placement platform to heat the platform and detect its temperature, respectively. A vacuum interlayer is opened on the placement platform, which is connected to a vacuum device to obtain negative pressure. Multiple vertical vacuum holes are opened on the top of the vacuum interlayer corresponding to the base placement position.

[0010] The drip cleaning assembly includes a drip moving frame that is slidably mounted above the placement assembly via a drip linear module. The drip linear module is located on the top surface of the operating table along the X-axis. The drip moving frame is equipped with an electric drip device, a precursor solution storage device, a cleaning water tank, a spray device, and a fan. The precursor solution storage device is connected to the electric drip device to deliver the scraping solution, and the cleaning water tank is connected to the spray device to deliver cleaning water.

[0011] The coating assembly includes a coating moving frame slidably mounted above the placement assembly via a coating linear module. The coating linear module is positioned on the top surface of the operating table along the X-axis. The scraper assembly is longitudinally lifted and lowered below the coating moving frame via a coating push rod. The scraper assembly includes a lifting frame connected to the bottom end of the piston rod of the coating push rod via a tension / compression sensor. A star-shaped blade holder is horizontally rotatably mounted on the lifting frame. Each star-shaped arm of the star-shaped blade holder can be detachably mounted with a coating blade of different slit height. A scraper switching motor mounted on the lifting frame drives the star-shaped blade holder to rotate to switch the coating blade. The coating blade has a built-in blade head heating resistance wire. The cross-section of the blade head is an isosceles trapezoid at the bottom and a semi-circular structure at the top. The inclined surface of the isosceles trapezoid is the working inclined surface of the coating blade. The tension / compression sensor and temperature sensor I are connected to the output signal of the control device. The control device is connected to each actuator for control.

[0012] Furthermore, the linear scraping module includes lead screws disposed on both sides of the placement component along the X-axis direction. bare pole bare pole Connected to the output of the scraper drive motor, the scraper moving frame is connected to corresponding sliders and lead screws at both ends. bare pole A sliding fit is used to drive the scraper moving frame to slide along the X-axis; the dripping linear module includes lead screws respectively disposed on both sides of the placement component along the X-axis. bare pole bare pole Connected to the output of the drip rack drive motor, the bottom of the drip moving rack is connected to the lead screw. bare pole It slides along the X-axis.

[0013] Furthermore, the dripping moving frame includes a top dripping mounting plate and bottom two sides respectively connected to lead screws. bare pole The system includes a sliding block; a drip lifting push rod and a drip transverse moving assembly are stacked between the sliding block and the drip mounting plate to drive the drip mounting plate to move in the Z and Y axes respectively; the drip lifting push rod consists of two longitudinal electric push rods located on both sides of the sliding block, and the drip transverse moving assembly consists of a lead screw slide table set along the Y axis. The top output end of the drip lifting push rod is connected to the slide seat of the drip transverse moving assembly, and the bottom of the drip mounting plate is fixed to the sliding block of the drip transverse moving assembly, moving along the Y axis under the drive of the drip transverse moving assembly.

[0014] Furthermore, the precursor solution storage device includes a storage tank and a stirring shaft that extends through the storage tank. A storage tank heating device and a temperature sensor are installed inside the storage tank. The stirring shaft is arranged with stirring plates in a circular array to stir the solution in the tank, and the top of the stirring shaft is connected to a stirring motor.

[0015] Furthermore, the spraying device includes a spray pipe horizontally rotatably mounted at the bottom of the dripping moving frame, and a spraying swinging device that drives the spray pipe to swing. Spray heads pointing towards one side of the base are arrayed at the bottom of the spray pipe. The spraying swinging device includes a driving bevel gear mounted at the bottom end of the stirring shaft, a driven bevel gear meshing with the driving bevel gear, a drive shaft coaxially connected to the driven bevel gear, a rotating plate connected to the drive shaft, and a slider eccentrically mounted on the rotating plate. A swinging plate with a long groove is mounted at one end of the spray pipe, and the slider cooperates with the long groove to drive the spray pipe to swing periodically.

[0016] Furthermore, the angle between the isosceles trapezoidal inclined surface of the scraper and the bottom surface of the scraper head is 100°–145°, and the angle between the working inclined surface of the scraper and the base plane is α=180°–θ, where α is 50°–70°.

[0017] The application of perovskite coating equipment includes the following steps:

[0018] S1. Place the substrate on the placement platform and start the vacuum device. The negative pressure adsorbs and fixes the substrate through the vacuum hole; start the substrate resistance heating wire to heat the substrate to the preset temperature; start the blade heating resistance wire to heat the scraper blade to the preset temperature;

[0019] S2. Start the drip cleaning component. The drip linear module moves the drip moving frame above the substrate. The electric drip device drips the precursor solution onto the substrate according to the set amount. After the precursor solution is dripped, the drip linear module starts and moves the drip moving frame forward to the waiting position on the front side.

[0020] S3, Nucleation Scraping: The scraping assembly is started, and the control device will substitute the set nucleation scraping speed V1 into the hydrodynamic pressure model to calculate the target downward pressure Ftarget of the scraping push rod, and calculate the standard downward pressure Fset according to the gravity compensation pressure formula of the scraper assembly.

[0021] The formula for calculating the target pressure Ftarget using the hydrodynamic pressure model is as follows:

[0022]

[0023] in, The hydrodynamic coefficient is denoted as . The viscosity of the solution. To set the scraping speed, The base width, The angle between the working bevel of the scraper and the substrate plane. The height of the scraper slit. This is the gravitational efficiency coefficient. For the weight of the scraper assembly; The effective working area of ​​the scraper head is defined as follows: , The base width, This refers to the width of the scraper's bottom.

[0024] The formula for the gravity compensation pressure of the scraper assembly is:

[0025]

[0026] in, For the weight of the scraper assembly;

[0027] The control device starts the linear scraping module and drives the scraper assembly to make one lateral movement at the set nucleation scraping speed V1. At the same time, the control device controls the scraping push rod to press down and scrape according to the signal of the tension and pressure sensor, so that the value of the tension and pressure sensor is stabilized at the standard downward pressure Fset during the scraping process. After the scraping push rod scrapes laterally once, the linear scraping module and the scraping push rod drive the scraper assembly to rise and return to the initial waiting position.

[0028] S4. Filling and Thickening Scraping: Repeat step S2 and add precursor solution again. The control device drives the scraper switching motor to rotate and switch the scraper. Repeat step S3 and substitute the standard pressure Fset calculated by filling and thickening scraping V2. The control device controls the scraper push rod 3 to scrape back and forth according to the calculated standard pressure Fset. After scraping a set number of times, the scraping linear module and the scraper push rod drive the scraper assembly to lift and return to the initial waiting position.

[0029] S5. Repeat step S4 according to the settings to achieve continuous switching and scraping of the scraper blade 243.

[0030] S6. After the coating is completed, the control device moves the dripping moving frame above the substrate, and the spraying device is activated to spray and clean the placement table. After cleaning, the fan is activated to dry the placement table and the substrate, ready for the next coating.

[0031] Furthermore, in step S3, the nucleation coating speed V1 is 0.8–1.2 cm / s, and in step S4, the pore-filling and thickening coating speed V2 is 5–10 cm / s.

[0032] The advantages and effects of this invention are:

[0033] 1. This invention integrates a scraping component, a drip cleaning component, and a placement component at the top of the operating table. The scraping component has scraper lifting and switching functions, the drip cleaning component has dripping and spray cleaning functions, and the placement component has substrate negative pressure adsorption and substrate preheating functions. This allows the device to complete the cyclic process of "substrate preheating and fixing → scraper switching → dripping → scraping → cleaning" on the same platform in sequence. It can realize continuous multiple scraping of perovskite and complete complex film formation process steps, which is conducive to improving the automation level and production efficiency of high-quality thick film production.

[0034] 2. This invention introduces a hydrodynamic pressure model to control the downward pressure of the doctor blade and specifically sets up a doctor blade that conforms to the hydrodynamic pressure model. The control unit can accurately calculate and apply the required downward pressure based on parameters such as solution viscosity, doctor blade speed at different stages, equivalent incident angle, and doctor blade slit height, overcoming defects such as uneven film thickness, edge lifting, or streaks caused by hydrodynamic pressure, and significantly improving film thickness uniformity and thick film density.

[0035] 3. The coating component in this invention adopts a rotary multi-blade structure with a star-shaped blade frame, which can switch between different types of blades for continuous coating according to the set program, meeting the needs of different coating programs such as low-speed nucleation and high-speed hole filling.

[0036] 4. In this invention, the doctor blade, substrate, and solution are all equipped with a preheating structure, which can improve the stability of temperature and viscosity during the doctor coating process, ensure the stability of crystallization conditions, and significantly improve the uniformity and density of the finished film. Attached Figure Description

[0037] Figure 1 This is a schematic diagram of the perovskite coating equipment of the present invention;

[0038] Figure 2 This is a schematic diagram of the component structure.

[0039] Figure 3 A first-view structural diagram of the drip cleaning component;

[0040] Figure 4 A schematic diagram of the droplet cleaning component from a second-view perspective.

[0041] Figure 5 for Figure 4 A magnified view of a section at point A in the middle;

[0042] Figure 6 This is a schematic diagram of the scraper assembly.

[0043] Figure 7 This is a schematic diagram of the structure of a scraper.

[0044] Figure 8 Preparation of Cs for this invention 0.05 MA 0.60 FA 0.35 SEM characterization of PbI3 perovskite thick film.

[0045] Drawing number identifier:

[0046] 1. Control panel;

[0047] 2. Scraping assembly, 21. Scraping linear module, 211. Lead screw 212, bare rod 213. Coating rack drive motor; 22. Coating moving frame; 23. Coating push rod; 24. Coating blade assembly; 241. Lifting frame; 242. Star-shaped blade holder; 243. Coating blade; 244. Coating blade switching motor; 245. Blade head heating resistance wire; 246. Temperature sensor 25. Tension / compression sensor;

[0048] 3. Drip cleaning assembly; 31. Drip linear module; 311. Lead screw 312, bare pole 313. Dropper rack drive motor; 32. Dropper moving rack; 321. Dropper mounting plate; 322. Dropper lifting push rod; 323. Dropper lateral movement assembly; 33. Electric dropper device; 34. Precursor solution storage device; 341. Storage tank; 342. Stirring shaft; 343. Storage heating device; 344. Stirring motor; 345. Temperature sensor 35. Cleaning water tank; 36. Spraying device; 361. Spraying pipe; 362. Driving bevel gear; 363. Driven bevel gear; 364. Drive shaft; 365. Rotating plate; 366. Sliding block; 367. Swinging plate; 368. Cleaning pump; 37. Fan.

[0049] 4. Component placement; 41. Placement platform; 411. Vacuum interlayer; 412. Vacuum port; 42. Base resistance heating wire; 43. Vacuum device; 44. Glass plate; 45. Temperature sensor. I;

[0050] 5. Control device; 6. Base. Detailed Implementation

[0051] The present invention will be further described below with reference to the embodiments, but the present invention is not limited to these embodiments.

[0052] The perovskite coating equipment described in this embodiment is as follows: Figure 1 As shown, the main body includes an operating table 1, a scraping assembly 2, a drip cleaning assembly 3, a placement assembly 4, and a control device 5. The placement assembly 4 is embedded in the top surface of the operating table 1, and the drip cleaning assembly 3 and the scraping assembly 2 are installed on the top surface of the operating table 1 and mounted above the placement assembly 4. The control device 5 is installed at the bottom of the operating table 1 and controls the operation of each actuator of the scraping assembly 2, the drip cleaning assembly 3, and the placement assembly 4.

[0053] As attached Figure 1 , 2 As shown, the placement assembly 4 includes a placement table 41, a substrate resistance heating wire 42, a vacuum device 43, and a glass plate 44. The top surface of the placement table 41 is not lower than the top surface of the worktable 1. The center of the placement table 41 is the substrate placement position, where the substrate 6 is placed for scraping. ITO glass plates 44, with a thickness matching the height of the substrate 6, are fixed on both sides of the substrate placement position. The glass plates 44 protect the substrate 6 and facilitate smooth scraping with a scraper. The substrate resistance heating wire 42 is installed on the bottom surface of the placement table 41 to heat the table, heating the substrate 6 to a preset temperature through heat transfer. A temperature sensor is mounted on the bottom surface of the placement table 41. I45 detects the tabletop temperature, and control device 5 uses the temperature sensor... The I45 signal controls the heating power of the substrate resistance heating wire 42 to achieve temperature control. A vacuum interlayer 411 is formed on the placement platform 41, which is connected to a vacuum device 43 to obtain negative pressure. Multiple longitudinal vacuum holes 412 are formed at the top of the vacuum interlayer corresponding to the substrate placement position. The substrate 6 can be effectively fixed to the placement platform 41 under negative pressure, preventing substrate slippage during coating and affecting the coating effect. In this embodiment, the vacuum device 43 is a vacuum pump, and the components include the substrate resistance heating wire 42, the vacuum device 43, and a temperature sensor. I45 is electrically connected to control unit 5.

[0054] As attached Figure 1 , 3 As shown in Figures 4 and 5, the drip cleaning assembly 3 includes a drip linear module 31, a drip moving frame 32, an electric dripping device 33, a precursor solution storage device 34, a cleaning water tank 35, a spraying device 36, and a fan 37. The drip moving frame 32 is slidably mounted above the placement assembly 4 via the drip linear module 31. The drip linear module 31 includes lead screws distributed on the operating tables 1 on both sides of the placement assembly 4 along the X-axis direction. 311. Bare Rod 312, bare rod 312 is connected to the output end of the drip rack drive motor 313, and the two ends of the drip moving rack 32 are respectively connected to corresponding sliders and lead screws. 311. Bare Rod 312 Sliding fit. The drip rack drive motor 313 is connected to the control device 5. The control device 5 drives the drip rack drive motor 313 to work, causing the drip moving rack 32 to slide along the X-axis.

[0055] The dripping moving frame 32 includes a dripping mounting plate 321, a dripping lifting push rod 322, a dripping lateral moving assembly 323, and screws respectively connected to the lead screw. 311. Bare Rod The 312-type slider is used in conjunction with the drip lifting push rod 322, which consists of two longitudinal electric push rods located on both sides of the slider. The drip transverse movement assembly 323 consists of two lead screw slides arranged along the Y-axis. The top output end of the drip lifting push rod 322 is connected to the slide of the corresponding side of the drip transverse movement assembly 323. The bottom of the drip mounting plate 321 is fixed to the slider of the drip transverse movement assembly 323. The drip mounting plate 321 moves along the Y-axis under the drive of the drip transverse movement assembly 323 (the lead screw of one side of the drip transverse movement assembly 323 can be a smooth rod for sliding guidance to reduce the number of motors). That is, the drip lifting push rod 322 and the drip transverse movement assembly 323 can drive the drip mounting plate 321 to move in the Z and Y axes respectively, realizing the adjustment of drip height and drip position, and further improving the uniformity of coating. The electric dripping device 33, the precursor solution storage device 34, the cleaning water tank 35, the spraying device 36, and the fan 37 are installed on the dripping mounting plate 321. The precursor solution storage device 34 is connected to the electric dripping device 33 to deliver the scraping solution. The cleaning water tank 35 is connected to the spraying device 36 through the cleaning pump 368 and pipeline to deliver cleaning water. The electric dripping device 33, the cleaning pump 368, and the fan 37 are connected to the control device 5.

[0056] The precursor solution storage device 34 includes a storage tank 341 and a stirring shaft 342 that penetrates the storage tank 341. A storage heating device 343 and a temperature sensor are installed on the inner wall of the storage tank 341. 345, liquid storage heating device 343 and temperature sensor 345 Connects to control device 5 to preheat and detect the temperature of the precursor solution. Control device 5 uses the temperature sensor... The signal adjustment of the liquid storage heating device 343 by 345 achieves constant temperature stirring. Multiple stirring plates are arranged in a circumferential array along the stirring shaft 342 to stir the solution in the tank. The top of the stirring shaft 342 is connected to the stirring motor 344.

[0057] The spray device 36 includes a spray pipe 361 horizontally rotatably mounted at the bottom of the dripping moving frame 32, and a spray oscillation device that drives the spray pipe 361 to oscillate. Spray heads pointing towards one side of the substrate are arrayed at the bottom of the spray pipe 361. The spray oscillation device includes a driving bevel gear 362 mounted at the bottom end of the stirring shaft 342, a driven bevel gear 363 meshing with the driving bevel gear 362, a drive shaft 364 coaxially connected to the driven bevel gear 363, a rotating plate 365 connected to the drive shaft 364, a slider 366 eccentrically mounted on the rotating plate 365, and an oscillation plate 367 with a long groove mounted at one end of the spray pipe 361. The slider 366 slides within the long groove. Thus, when the stirring motor 344 drives the stirring shaft 342 to rotate, the spray pipe 361 can be driven to oscillate periodically, reciprocatingly spraying and cleaning the surface of the placement platform 41 and its surrounding area.

[0058] As attached Figure 1 , 6 As shown in Figure 7, the coating assembly 2 includes a coating linear module 21, a coating moving frame 22, a coating push rod 23, a scraper assembly 24, and a tension / compression sensor 25. The coating moving frame 22 is slidably mounted above the placement assembly 4 via the coating linear module 21. The coating linear module 21 includes lead screws distributed on the operating tables 1 on both sides of the placement assembly 4 along the X-axis direction. 211. Bare Rod 212, bare rod 212 is connected to the output end of the scraper drive motor 213, and the two ends of the scraper moving frame 22 are respectively connected to the corresponding slider and lead screw. 211. Bare Rod 212 Sliding fit, so as to drive the scraping moving frame 22 to slide along the X-axis direction.

[0059] The scraper push rod 23 is longitudinally mounted in the middle of the scraper moving frame 22. The telescopic end of the scraper push rod 23 is connected to the scraper assembly 24 via a tension / compression sensor 25. The scraper assembly 24 is longitudinally lifted and lowered on the scraper moving frame 22 via the scraper push rod 23. The scraper assembly 24 includes a lifting frame 241 connected to the tension / compression sensor 25, and a star-shaped blade holder 242 horizontally rotatably mounted on the lifting frame 241. Each star-shaped arm of the star-shaped blade holder 242 is detachably mounted with scraper blades 243 of different slit heights via screws. The lifting frame 241 is equipped with a scraper switching motor 244 that drives the star-shaped blade holder 242 to rotate to switch the scraper blades 243. The control device 5 is connected to the scraper switching motor 244 to drive the star-shaped blade holder 242 to rotate, thereby realizing the switching of the scraper blades 243.

[0060] The scraper blade 243 has a hollow structure, housing a heating resistance wire 245 and a temperature sensor I246. The heating resistance wire 245 and temperature sensor I246 are connected to a control device 5 to preheat and monitor the temperature of the scraper blade 243. The control device 5 adjusts the heating power of the heating resistance wire 245 according to the model of the temperature sensor I246 to achieve temperature control of the scraper blade. The cross-section of the scraper blade 243 is an isosceles trapezoid at the bottom and a semi-circular structure at the top; the inclined surface of the isosceles trapezoid is the working inclined surface of the scraper blade. (See attached image) Figure 6 As shown, the isosceles trapezoidal inclined surface of the scraper blade 243 forms an angle of 100°–145° with the bottom surface of the blade head. During operation, the angle α between the working inclined surface of the scraper blade and the base plane is 180°–θ, where α is 50°–70°. In this embodiment, the star-shaped blade holder 242 has six star-shaped arms. The slit heights of the scraper blades 243 arranged circumferentially on the six star-shaped arms are 10µm, 20µm, 50µm, 75µm, 100µm, and 150µm, respectively. The control device 5 drives the scraper blade switching motor 244 to switch the scraper blades 243 with different slit heights according to the settings.

[0061] The control device 5 includes a control panel installed on the side wall of the operating table 1, and a control unit installed inside the operating table 1 and connected to the control panel. The control panel is a human-machine interface used to input process parameters and send them to the control unit, including solution viscosity, scraping speed, slit height, scraper angle, and number of scraping times / time, etc. It is also used to start / stop multiple consecutive scraping programs, display the running status in real time, and display the target pressure calculated according to the fluid dynamic pressure relationship and the real-time pressure detected by the tension and compression sensors.

[0062] The control device 5 is electrically connected to the scraper drive motor 213, scraper push rod 23, scraper switching motor 244, blade heating resistance wire 245, drip rack drive motor 313, drip lifting push rod 322, drip lateral movement assembly 323, electric dripping device 33, liquid storage heating device 343, substrate resistance heating wire 42, and vacuum device 43, respectively, to realize the coordinated control of scraper reciprocating motion, lifting, blade changing, drip positioning, and temperature-controlled vacuum adsorption. The control unit is electrically connected to the stirring motor 344 of the precursor solution storage device 34, the cleaning pump 368 of the cleaning water tank 35, and the fan 37 to realize the automated process of constant temperature stirring, spray cleaning, and drying of the solution. The above-mentioned actuators complete their corresponding work according to the control information of the control device 5. Each motor in the equipment is equipped with an encoder to achieve precise and synchronous control.

[0063] Application of perovskite coating equipment: Preparation of Cs using the perovskite coating equipment in this embodiment. 0.05 MA 0.60 FA 0.35 The thickness of the PbI3 perovskite thick film is based on the average thickness obtained by cross-sectional measurement. The solvent volume ratio of the precursor solution is set to DMSO:GBL = 1:3-1:7. Preferably, a thick film with a volume ratio of 1:5 and a thickness of 20 μm is prepared as a preferred embodiment of the present invention.

[0064] Preparation of precursor solutions; weighing the chemical formula proportions. Add solvent at a ratio of DMSO:GBL = 1:5 to prepare a solution with a concentration of 2.3%. It is placed in the storage tank 341 of the precursor solution storage device 34 and kept at a constant temperature and stirred.

[0065] The application process of perovskite coating equipment includes the following steps:

[0066] S1. After cleaning and drying the 1.4cm×1.4cm ITO glass (substrate 6), place it on the placement platform 41. Start the vacuum device 43 to adsorb and fix the substrate 6. Start the substrate resistance heating wire 42 to preheat the substrate to 115°C. Start the blade resistance heating wire 245 to preheat the scraper blade 28 to the set temperature and maintain it.

[0067] S2. Activate the drip cleaning assembly 3. The drip linear module 31 moves the drip moving frame 32 above the substrate 6. The control device 5 controls the electric dripping device 33 to drip onto the substrate 6. Precursor solution; after the addition is complete, the dropping linear module 31 is activated to move the dropping moving frame 32 to the waiting position at the front;

[0068] S3, Nucleation Coating (Low Speed): Coating assembly 2 starts, control device 5 drives the scraper switching motor 244 to rotate and adjust the slit height. The scraper blade 243 is rotated to the scraping station directly below. The nucleation scraping speed V1 = 1 cm / s is substituted into the hydrodynamic pressure model to calculate the target downward pressure Ftarget of the scraper push rod:

[0069] The formula for calculating the target pressure using the hydrodynamic pressure model is as follows:

[0070]

[0071] in, The hydrodynamic coefficient is denoted as . The viscosity of the solution. To set the scraping speed, The base width, The angle between the working bevel of the scraper and the substrate plane. The height of the scraper slit. This is the gravitational efficiency coefficient. For the weight of the scraper assembly; The effective working area of ​​the scraper head is defined as follows: , The base width, This refers to the width of the scraper's bottom.

[0072] In this calculation of the target downforce Ftarget, the hydrodynamic coefficient is... =0.2, solution viscosity =50cp, =1cm / s, the angle between the working slope of the scraper and the substrate plane =60°, slit height = Gravity efficiency coefficient =0.01, Gravity of the scraper assembly =2.5N, base width It is 1.4cm. It is 3mm. 42mm 2 Substitute the parameters to obtain the result. =0.269N;

[0073] Will Substituting 0.269N into the formula for gravity compensation pressure of the scraper assembly:

[0074]

[0075] in, For the weight of the scraper assembly;

[0076] In this standard pressure Fset calculation, =2.5N, substituting the parameters, we get Fset=2.231N. The tension / compression sensor 25 outputs a positive value when subjected to tension (downward) and a negative value when subjected to compression (upward).

[0077] Control device 5 activates the linear coating module 21, driving the scraper assembly 24 to perform a single lateral movement at a speed of V1 = 1 cm / s. Simultaneously, control device 5 controls the scraper push rod 23 to lower and press down. Based on the deviation between the standard downward pressure Fset and the actual pressure feedback from the tension / compression sensor 25, control device 5 drives the electric push rod to actuate, ultimately stabilizing the actual pressure near the standard downward pressure Fset. After the scraper push rod 23 completes one lateral coating cycle, the linear coating module 21 and the scraper push rod 23 drive the scraper assembly 24 to rise and return to the initial waiting position.

[0078] (When designing the equipment, the substrate width L is preferably 1-2 cm, and the solution viscosity is...) The preferred speed is 40-60 cP. Preferred Equivalent angle of incidence Preferably, the slit angle is 50°-70°, and the slit height is... Preferred Gravity efficiency coefficient 0.01-0.1, Gravity of the scraper assembly Preferably, it is 2N-5N.

[0079] S4. Filling and Thickening Coating (High Speed): Repeat step S2 and add more coating. The precursor solution, control device 5 drives the scraper switching motor 244 to rotate, and switches the slit height. For the scraper blade 243, repeat step S3, substituting the values ​​for filling holes and thickening the scraper V2 = 5 cm / s and the slit height. = With other parameters remaining unchanged, the standard pressure is calculated. =0.343N, Fset= The control device 5 activates the linear scraping module 21, driving the scraper assembly 24 to repeatedly scrape at a speed of V2 = 5 cm / s. Simultaneously, the control device 5 controls the scraping push rod 23 to press down. Based on the deviation between the standard downward pressure Fset and the actual pressure feedback from the tension / compression sensor 25, the control device 5 drives the electric push rod to actuate, ultimately stabilizing the actual pressure near the standard downward pressure Fset. After the set number of scraping cycles, the linear scraping module 21 and the scraping push rod 23 drive the scraper assembly 24 to rise and return to the initial waiting position.

[0080] S5. Repeat step S4 twice according to the settings. During the repetition, do not switch the doctor blade 243 or change the doctor blade speed to obtain a perovskite substrate film with a dense and smooth surface.

[0081] S6. After obtaining the basement membrane, perform a low-speed thickening and leveling process, adding droplets. Precursor solution, switch to slit height = The 243 scraper blade is used to scrape at V3 = 1 cm / s and Fset = =2.5N (i.e.) =0) Apply the coating twice by scraping back and forth; then add drops. Solution, switch to slit height = Scraper 243, scraping at V4=1cm / s and controlling Fset= Apply the coating twice using a 2.5N reciprocating scraping motion; finally, switch to the slit height. = Slit height scraper, scraping at V5=1cm / s and controlling Fset= =2.5N, scrape back and forth twice.

[0082] S7. After placing the perovskite substrate film prepared in step S6 on a 100°C heating stage for 4 hours, allow it to cool naturally to obtain the Cs of the example. 0.05 MA 0.60 FA 0.35 PbI3 perovskite thick film;

[0083] S8. After the coating is completed, the control device 5 controls the drip moving frame 32 to move above the substrate 6, and the spraying device 36 starts to spray and clean the placement table 41. After cleaning, the fan 37 starts to dry the placement table 41 and the substrate 6, waiting for the next coating.

[0084] Appendix Figure 8 For the obtained Cs 0.05 MA 0.60 FA 0.35 SEM characterization images of PbI3 perovskite thick films show that Cs was obtained. 0.05 MA 0.60 FA 0.35 The PbI3 perovskite thick film has a dense and uniform surface without pores, with a thickness of about 20 μm and no obvious interfaces or defects in the cross section.

[0085] Results: As can be seen from its surface morphology, the film surface is composed of blocky grains and is evenly distributed. No obvious through-holes or large-area through-cracks are observed, indicating that the thick film has good surface uniformity. As can be seen from its cross-sectional morphology, the thick film layer covers the substrate continuously with clear interfaces. The cross-section is dense overall, with no obvious interconnected pores. The cross-section has blocky characteristics, and no through-holes or obvious delamination are observed. This indicates that repeated continuous scraping and dynamic pressure compensation can maintain good film integrity and density even under large film thickness conditions.

[0086] The embodiments of the present invention have been described in detail above with reference to the accompanying drawings, but the present invention is not limited to the described embodiments. For those skilled in the art, various changes, modifications, substitutions, and variations of these embodiments without departing from the principles and spirit of the present invention still fall within the protection scope of the present invention.

Claims

1. A perovskite coating equipment, characterized in that: It includes an operating table (1) and a scraping assembly (2), a drip cleaning assembly (3), a placement assembly (4), and a control device (5) installed on the operating table (1); the placement assembly (4) is installed on the top surface of the operating table (1), and the drip cleaning assembly (3) and the scraping assembly (2) are mounted on the placement assembly (4); The placement assembly (4) includes a placement platform (41), with a base placement position in the middle. Glass plates (44) with a thickness matching the height of the base (6) are placed on both sides of the base placement position. A base resistance heating wire (42) and a temperature sensor III (45) are installed on the bottom surface of the placement platform (41) to heat the platform and detect the temperature, respectively. A vacuum interlayer (411) is opened on the placement platform (41). The vacuum interlayer is connected to a vacuum device (43) to obtain negative pressure. Multiple longitudinal vacuum holes (412) are opened on the top of the vacuum interlayer corresponding to the base placement position. The drip cleaning assembly (3) includes a drip moving frame (32) that is slidably mounted above the placement assembly (4) via a drip straight module (31). The drip straight module (31) is located on the top surface of the operating table (1) along the X-axis. The drip moving frame (32) is equipped with an electric drip device (33), a precursor solution storage device (34), a cleaning water tank (35), a spray device (36), and a fan (37). The precursor solution storage device (34) is connected to the electric drip device (33) to deliver the scraping solution. The cleaning water tank (35) is connected to the spray device (36) to deliver cleaning water. The electric drip device (33) is also connected to the electric drip device (33). The scraping assembly (2) includes a scraping moving frame (22) that is slidably mounted above the placement assembly (4) via a scraping straight module (21). The scraping straight module (21) is located on the top surface of the operating table (1) along the X-axis. The scraper assembly (24) is longitudinally lifted and installed below the scraping moving frame (22) via a scraping push rod (23). The scraper assembly (24) includes a lifting frame (241) connected to the bottom end of the piston rod of the scraping push rod (23) via a tension and pressure sensor (25). A star-shaped blade holder (242) is horizontally rotatably mounted on the lifting frame (241). Each star-shaped arm of the star-shaped blade holder (242) can be detachably mounted with scraper blades (243) of different slit heights. The lifting frame (241) is equipped with a scraper switching motor (244) that drives the star-shaped blade holder (242) to rotate to switch the scraper blades (243). The scraper (243) has a built-in blade heating resistance wire (245) and a temperature sensor. (246) The blade head of the scraper (243) has a cross-section of an isosceles trapezoid at the bottom and a semi-circular structure at the top. The inclined surface of the isosceles trapezoid is the working inclined surface of the scraper. The tension and pressure sensor (25), temperature sensor III (45), and temperature sensor I (246) are connected to the output signal of the control device (5). The control device (44) is connected to each actuator for control.

2. The perovskite coating equipment according to claim 1, characterized in that: The scraping linear module (21) includes lead screws disposed on both sides of the placement component (4) along the X-axis direction. (211) Bare rod (212), bare rod (212) is connected to the output end of the scraper drive motor (213), and the two ends of the scraper moving frame (22) are respectively connected to the corresponding slider and lead screw. (211) Bare rod (212) Sliding fit, so as to drive the scraper moving frame (22) to slide along the X-axis; The droplet linear module (31) includes lead screws disposed on both sides of the placement component (4) along the X-axis direction. (311) Bare rod (312), bare rod (312) is connected to the output end of the drip rack drive motor (313), and the bottom of the drip moving rack (32) is connected to the lead screw. (311) Bare rod (312) Slide along the X-axis.

3. The perovskite coating equipment according to claim 2, characterized in that: The dripping moving frame (32) includes a top dripping mounting plate (321) and two bottom sides respectively connected to lead screws. (311) Bare rod (312) A matching slider is provided between the slider and the drip mounting plate (321), and a drip lifting push rod (322) and a drip transverse moving component (323) are superimposed to drive the drip mounting plate (321) to move in the Z and Y axis directions respectively; The drip lifting push rod (322) consists of two longitudinal electric push rods located on both sides of the slider. The drip transverse movement assembly (323) is a lead screw slide table set along the Y-axis. The top output end of the drip lifting push rod (322) is connected to the slide of the drip transverse movement assembly (323). The bottom of the drip mounting plate (321) is fixed to the slider of the drip transverse movement assembly (323) and moves along the Y-axis under the drive of the drip transverse movement assembly (323).

4. The perovskite coating equipment according to claim 1, characterized in that: The precursor solution storage device (34) includes a storage tank (341) and a stirring shaft (342) that runs through the storage tank (341). A storage heating device (343) and a temperature sensor are installed inside the storage tank (341). (345); The stirring shaft (342) is arranged with stirring plates in a circumferential array to stir the solution in the tank, and the top of the stirring shaft (342) is connected to the stirring motor (344).

5. The perovskite coating equipment according to claim 4, characterized in that: The spraying device (36) includes a spray pipe (361) that is horizontally rotatably disposed at the bottom of the dripping moving frame (32), and a spray swinging device that drives the spray pipe (361) to swing. Spray heads pointing towards one side of the base are arrayed at the bottom of the spray pipe (361). The spray oscillation device includes an active bevel gear (362) installed at the bottom of the stirring shaft (342), a driven bevel gear (363) meshing with the active bevel gear (362), the driven bevel gear (363) being coaxially connected to the transmission shaft (364), the transmission shaft (364) being connected to the rotating plate (365), and a slider (366) being eccentrically installed on the rotating plate (365); an oscillation plate (367) with a long groove is installed at one end of the spray pipe (361), and the slider (366) cooperates with the long groove to drive the spray pipe (361) to oscillate periodically.

6. The perovskite coating equipment according to claim 1, characterized in that: The angle between the isosceles trapezoidal inclined surface of the scraper and the bottom surface of the scraper head is 100°–145°. During operation, the angle between the working inclined surface of the scraper and the base plane is α=180°–θ, where α is 50°–70°.

7. The application of perovskite coating equipment, characterized in that, The perovskite coating equipment based on any one of claims 1 to 7 comprises the following steps: S1. Place the substrate (6) on the placement platform (41) and start the vacuum device (43). The negative pressure adsorbs and fixes the substrate (6) through the vacuum hole (412); start the substrate resistance heating wire (42) to heat the substrate (6) to the preset temperature; start the blade heating resistance wire (245) to heat the scraper (243) to the preset temperature. S2. Start the drip cleaning component (3), the drip linear module (31) moves the drip moving frame (32) above the substrate (6), and the electric drip device (33) drips the precursor solution onto the substrate (6) according to the set amount; After the precursor solution is added, the drop linear module (31) is activated to move the drop moving frame (32) to the waiting position on the front side; S3, nucleation scraping: The scraping assembly (2) is started, and the control device (5) substitutes the set nucleation scraping speed V1 into the hydrodynamic pressure model to calculate the target downward pressure Ftarget of the scraping push rod, and calculates the standard downward pressure Fset according to the gravity compensation pressure formula of the scraper assembly; The formula for calculating the target pressure Ftarget using the hydrodynamic pressure model is as follows: in, The hydrodynamic coefficient is denoted as . The viscosity of the solution. To set the scraping speed, The base width, The angle between the working bevel of the scraper and the substrate plane. The height of the scraper slit. This is the gravitational efficiency coefficient. For the weight of the scraper assembly; The effective working area of ​​the scraper head is defined as follows: , The base width, This refers to the width of the scraper's bottom. The formula for the gravity compensation pressure of the scraper assembly is: in, For the weight of the scraper assembly; The control device (5) starts the linear scraping module (21) and drives the scraper assembly (24) to move laterally once at the set nucleation scraping speed V1. At the same time, the control device (5) controls the scraping push rod (23) to press down and scrape according to the signal of the tension and pressure sensor (25), so that the value of the tension and pressure sensor (25) is stable at the standard pressure Fset during the scraping process. After the scraping push rod (23) scrapes laterally once, the linear scraping module (21) and the scraping push rod (23) drive the scraper assembly (24) to rise and return to the initial waiting position. S4, Filling and Thickening Scraping: Repeat step S2 and add the precursor solution again. The control device (5) drives the scraper switching motor 244 to rotate and switch the scraper 243. Repeat step S3 and substitute the filling and thickening scraping V2 to calculate the standard pressure Fset. The control device (5) controls the scraping push rod (23) to scrape back and forth according to the calculated standard pressure Fset. After scraping a set number of times, the scraping linear module (21) and the scraping push rod (23) drive the scraper assembly (24) to lift and return to the initial waiting position. S5. Repeat step S4 and switch the scraper (243) according to the settings to obtain a dense and smooth perovskite substrate film. S6. After the scraping is completed, the control device (5) controls the drip moving frame (32) to move above the substrate (6), and the spraying device (36) starts to spray and clean the placement table (41). After cleaning, the fan (37) starts to dry the placement table (41) and the substrate (6) and wait for the next scraping.

8. The application of the perovskite coating equipment according to claim 7, characterized in that: In step S3, the nucleation coating speed V1 is 0.8–1.2 cm / s, and in step S4, the pore-filling and thickening coating speed V2 is 5–10 cm / s.

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