High-purity solid precursor source bottle

Abstract

The invention discloses a high-purity solid precursor source bottle which comprises a heating outer cover, an outer cover sealing plate, a source bottle body and a source bottle cover plate, an inner cavity of the heating outer cover is a first cavity, and the heating outer cover is provided with an outer wall with a preset thickness; the first cavity is filled with a heat-conducting medium, and a plurality of embedded heating rods are inserted into the outer wall of the first cavity; the source bottle main body is arranged in the first cavity, and the source bottle cover plate covers the source bottle main body; an inner cavity of the source bottle main body is a second cavity and is used for placing a plurality of trays loaded with solid precursors; and the second cavity is provided with a hollow central heating rod. According to the high-purity solid precursor source bottle disclosed by the invention, the following targets are achieved: the pollution risk is reduced, the temperature control uniformity is improved, the conveying stability and efficiency are improved, the particle carrying-out is reduced, and a stable and reliable precursor supply guarantee is provided for a semiconductor film deposition process.

Description

Technical Field

[0001] This invention belongs to the field of semiconductor thin film deposition technology, specifically relating to a high-purity solid precursor source bottle, which is suitable for the storage, transportation and temperature control of high-purity solid precursors in processes such as ALD and CVD. Background Technology

[0002] Solid precursor delivery systems are widely used in semiconductor thin film deposition processes, with their core function being the storage and transport of high-purity solid precursor materials. In existing technologies, the source bottle is typically made of internally polished stainless steel or quartz. The solid precursor is sublimated or melted via a heating system and then transported to the reaction chamber by a carrier gas. However, existing technologies suffer from the following significant drawbacks: 1. Uneven temperature control: The heating system has poor heating uniformity, and local overheating can easily lead to inconsistent precursor decomposition rates, affecting process stability. 2. High risk of contamination: Traditional source bottles are made of metal and only undergo internal polishing. During long-term use, the corrosive precursor is prone to absorbing moisture, which leads to a decrease in its own purity. At the same time, it will aggravate the corrosion and damage inside the steel bottle, further contaminating the precursor. 3. Low conveying efficiency and uneven effective gas flow: The sublimation rate of solid precursors is unstable, resulting in poor process repeatability and inability to guarantee stable conveying efficiency and uniform gas flow. 4. Particle problem: The precursor may carry a small amount of solid powder during transportation, which increases the risk of pipeline contamination and blockage, affecting the quality of the deposition process. Summary of the Invention

[0003] The main objective of this invention is to provide a high-purity solid precursor source bottle to achieve the following goals: reduce contamination risk, improve temperature control uniformity, enhance transport stability and efficiency, reduce particle carry-out, and provide a stable and reliable precursor supply guarantee for semiconductor thin film deposition processes.

[0004] To achieve the above objectives, the present invention provides a high-purity solid precursor source bottle, comprising a heating outer cover, an outer cover sealing plate, a source bottle body, and a source bottle cap plate, wherein: The heating cover has an internal cavity that is a first cavity and an outer wall of a preset thickness. The first cavity is filled with a heat-conducting medium and a plurality of embedded heating rods are inserted into the outer wall. The source bottle body is built into the first cavity and the source bottle cover is placed on the source bottle body. The outer cover sealing plate covers both the heating outer cover and the source bottle cover. The internal cavity of the source bottle body is a second cavity, which is used to place multiple trays carrying solid precursors. The trays are stacked in a layered structure. A filter plate is provided on the top of the second cavity. The second cavity is equipped with a hollow central heating rod. The central heating rod passes through the first central hole of the filter plate and the second central hole of each tray from top to bottom. A central area gap is provided between the central heating rod and each second central hole. Temperature control is achieved through a dual heating method, as detailed below: Heat is generated by the embedded heating rod on the outer wall, which is then conducted to the entire heating cover and then to the heat-conducting medium. This allows the temperature to be evenly conducted to the second cavity, achieving buffered temperature control and ensuring uniform temperature distribution. This enables the solid precursor inside the second cavity to be heated and sublimated. Carrier gas is introduced through the hollow structure of the central heating rod. After being heated by the central heating rod, the carrier gas is output to the bottom of the lowest tray, carrying the gaseous precursor after the sublimation of the solid precursor and rising together in the gap of the central area. After being filtered by the filter plate, it is transported to the reaction chamber through the gas outlet pipe.

[0005] As a further preferred embodiment of the above technical solution, the inner wall of the heating outer cover and the inner wall of the source bottle body are both treated with SiC / Ta composite coating.

[0006] As a further preferred embodiment of the above technical solution, both the top of the outer wall and the top of the source bottle cap are provided with sealing grooves, and sealing gaskets are installed in the sealing grooves to achieve a seal with the outer cover sealing plate.

[0007] As a further preferred embodiment of the above technical solution, the outer ring of the second central hole of the tray is provided with a shallow groove air guiding structure, which is used to increase the stability of the output after the solid precursor is sublimated; the outer ring of the shallow groove air guiding structure is provided with a sinking structure, which is used to place the solid precursor.

[0008] As a further preferred embodiment of the above technical solution, the filter plate has a dome structure.

[0009] The beneficial effects of this invention are as follows: 1. Precise temperature control: It adopts a dual heating system structure (external oil temperature heating and central heating), and achieves buffered temperature control through dual adjustment to ensure the uniformity of the precursor sublimation temperature and avoid the problem of inconsistent decomposition rate caused by local overheating; 2. High purity guarantee: The second chamber is made of SUS316L material with a SiC / Ta composite coating inner liner, which can effectively resist the erosion of corrosive precursors, avoid internal corrosion and precursor contamination, and ensure the high purity of the precursors. 3. Stable delivery: Through carrier gas linkage control and inlet gas heating design, the cooling effect of carrier gas on solid precursor is prevented; combined with outlet gas buffer design and filtration structure, the sublimation rate fluctuation is reduced, making the output quality of precursor more uniform; at the same time, the layered storage structure (tray design) of solid precursor further improves the sublimation effect, improves delivery efficiency and process repeatability. 4. Particle-proof design: The built-in dome-shaped filter layer can effectively intercept solid powder, reduce the risk of particles being carried out, and avoid pipeline contamination and blockage. Attached Figure Description

[0010] Figure 1 This is a schematic diagram of the structure of the present invention.

[0011] Figure 2 This is a cross-sectional view of the present invention.

[0012] Figure 3 This is a schematic diagram of the structure of the heating cover of the present invention.

[0013] Figure 4 This is a schematic diagram of the structure of the present invention (the heating cover is hidden).

[0014] Figure 5 This is a schematic diagram of the structure of the tray, filter plate and central heating rod of the present invention.

[0015] Figure 6 This is a schematic diagram of the tray structure of the present invention.

[0016] The reference numerals in the attached drawings include: 10, heating outer cover; 11, first cavity; 12, outer wall; 13, embedded heating rod; 14, sealing groove; 20, outer cover sealing plate; 30, source bottle body; 31, second cavity; 32, tray; 321, second central hole; 322, shallow groove air guiding structure; 323, settling groove structure; 33, filter plate; 331, first central hole; 34, central heating rod; 341, central area gap; 35, air outlet pipe; 40, source bottle cover plate. Detailed Implementation

[0017] The following description is intended to disclose the present invention and enable those skilled in the art to implement it. The preferred embodiments described below are merely examples, and other obvious variations will occur to those skilled in the art. The basic principles of the invention defined in the following description can be applied to other embodiments, modifications, improvements, equivalents, and other technical solutions that do not depart from the spirit and scope of the invention.

[0018] In the preferred embodiments of the present invention, those skilled in the art should note that the solid precursors and the like involved in the present invention can be considered as prior art.

[0019] Preferred embodiment.

[0020] like Figure 1-6 As shown, this invention discloses a high-purity solid precursor source bottle, comprising a heating outer cover 10, an outer cover sealing plate 20, a source bottle body 30, and a source bottle cover plate 40, wherein: The internal cavity of the heating cover 10 is a first cavity 11 and the heating cover 10 is provided with an outer wall 12 of a preset thickness. The first cavity 11 is filled with a heat-conducting medium (temperature controlled by oil temperature, etc.) and a plurality of embedded heating rods 13 are inserted into the outer wall 12. The source bottle body 30 is built into the first cavity 11 and the source bottle cover plate 40 covers the source bottle body 30. The outer cover sealing plate 20 covers both the heating outer cover 10 and the source bottle cover plate 40. The internal cavity of the source bottle body 30 is a second cavity 31, which is used to place multiple trays 32 carrying solid precursors. The trays 32 are stacked in a layered structure. A filter plate 33 is provided on the top of the second cavity 31. The second cavity 31 is equipped with a hollow central heating rod 34. The central heating rod 34 passes through the first central hole 331 of the filter plate 33 (there is a sealing structure between the central heating rod and the first central hole to prevent leakage of sublimated precursors) and the second central hole 321 of each tray 32 from top to bottom. A central area gap 341 is provided between the central heating rod 34 and each second central hole 321. Temperature control is achieved through a dual heating method, as detailed below: Heat is generated by the embedded heating rod 13 on the outer wall 12, and the heat is conducted to the entire heating cover 10. Then, the heat is conducted to the heat-conducting medium through the heating cover 10, and then the temperature is evenly conducted to the second cavity 31 to achieve buffered temperature control and ensure uniform temperature distribution, thereby enabling the solid precursor inside the second cavity 31 to be heated and sublimated. Carrier gas (such as argon) is introduced through the hollow structure of the central heating rod 34. After being heated by the central heating rod 34, the carrier gas is output to the bottom of the bottom tray 32. (The heated carrier gas will not affect the sublimation of the precursor. If an unheated carrier gas is introduced, the precursor will cool down and turn into powder, affecting the sublimation quality and efficiency.) The gaseous precursor, which carries the sublimated solid precursor, is lifted together in the central region gap 341. After being filtered by the filter plate 33, it is transported to the reaction chamber by the gas outlet pipe 35.

[0021] Specifically, the inner wall of the heating outer cover 10 and the inner wall of the source bottle body 30 are both treated with SiC / Ta composite coating (the heating outer cover, outer cover sealing plate, source bottle body, and source bottle cover are all made of SUS316L material).

[0022] More specifically, both the top of the outer wall 12 and the top of the source bottle cap plate 40 are provided with sealing grooves 14, and sealing gaskets (not shown) are installed in the sealing grooves 14 to achieve a seal with the outer cover sealing plate 20 (improving the sealing performance between structures).

[0023] Furthermore, the outer ring of the second central hole 321 of the tray 32 is provided with a shallow groove air guiding structure 322, which is used to increase the stability of the output after the solid precursor is sublimated (so that the sublimated precursor is stably output to the central region gap and then carried up by the carrier gas); the outer ring of the shallow groove air guiding structure 322 is provided with a sinking structure 323, which is used to place the solid precursor.

[0024] Furthermore, the filter plate 33 has a dome structure (for better filtration and output). The filter plate is made of PTFE material to avoid the effects of corrosive environments.

[0025] Preferably, the heating cover 10 is surrounded by heat insulation material for installation inside the gas holder.

[0026] It is worth mentioning that the technical features such as solid precursors involved in this patent application should be regarded as prior art. The specific structure, working principle, and possible control methods and spatial arrangement of these technical features can be adopted using conventional choices in the field, and should not be regarded as the inventive point of this patent. This patent will not be further elaborated in detail.

[0027] For those skilled in the art, modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this invention should be included within the protection scope of this invention.

Claims

1. A high-purity solid precursor source bottle, characterized in that, Includes a heating outer cover, an outer cover sealing plate, a source bottle body, and a source bottle cap, wherein: The heating cover has an internal cavity that is a first cavity and an outer wall of a preset thickness. The first cavity is filled with a heat-conducting medium and a plurality of embedded heating rods are inserted into the outer wall. The source bottle body is built into the first cavity and the source bottle cover is placed on the source bottle body. The outer cover sealing plate covers both the heating outer cover and the source bottle cover. The internal cavity of the source bottle body is a second cavity, which is used to place multiple trays carrying solid precursors. The trays are stacked in a layered structure. A filter plate is provided on the top of the second cavity. The second cavity is equipped with a hollow central heating rod. The central heating rod passes through the first central hole of the filter plate and the second central hole of each tray from top to bottom. A central area gap is provided between the central heating rod and each second central hole. Temperature control is achieved through a dual heating method, as detailed below: Heat is generated by the embedded heating rod on the outer wall, which is then conducted to the entire heating cover and then to the heat-conducting medium. This allows the temperature to be evenly conducted to the second cavity, achieving buffered temperature control and ensuring uniform temperature distribution. This enables the solid precursor inside the second cavity to be heated and sublimated. Carrier gas is introduced through the hollow structure of the central heating rod. After being heated by the central heating rod, the carrier gas is output to the bottom of the lowest tray, carrying the gaseous precursor after the sublimation of the solid precursor and rising together in the gap of the central area. After being filtered by the filter plate, it is transported to the reaction chamber through the gas outlet pipe.

2. The high-purity solid precursor source bottle according to claim 1, characterized in that, The inner wall of the heating outer cover and the inner wall of the source bottle body are both treated with SiC / Ta composite coating.

3. The high-purity solid precursor source bottle according to claim 1, characterized in that, Both the top of the outer wall and the top of the source bottle cap are provided with sealing grooves, and sealing gaskets are installed in the sealing grooves to achieve a seal with the outer cover sealing plate.

4. The high-purity solid precursor source bottle according to claim 1, characterized in that, The outer ring of the second central hole of the tray is provided with a shallow groove air guiding structure, which is used to increase the stability of the output after the solid precursor is sublimated; the outer ring of the shallow groove air guiding structure is provided with a sinking structure, which is used to place the solid precursor.

5. A high-purity solid precursor source bottle according to claim 1, characterized in that, The filter plate has a dome structure.

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