Corrosion-resistant gas pipeline assembly

Abstract

The invention relates to a corrosion-resistant gas pipeline assembly. The gas pipeline assembly comprises a stainless steel pipe, a corrosion-resistant lining pipe arranged on the inner wall of the stainless steel pipe and connectors arranged at the two ends of the stainless steel pipe. A first corrugated pipe section is arranged in the middle of the stainless steel pipe; a second corrugated pipe section matched with the first corrugated pipe section is arranged in the middle of the anti-corrosion lining pipe. According to the gas pipeline assembly, the anti-corrosion lining pipe is arranged on the inner wall of the stainless steel pipe, the anti-corrosion lining pipe has good chemical resistance, corrosion resistance and high temperature resistance, the surface is smooth and does not adsorb chemical substances, pollution and residues can be reduced, and the situation that special gas reacts with water vapor to corrode the stainless steel pipe can be avoided; therefore, the corrosion resistance and the service life of the gas pipeline are improved.

Description

Technical Field

[0001] This invention relates to the field of corrosion technology, and more specifically, to a corrosion-resistant gas pipeline assembly. Background Technology

[0002] Etching equipment in semiconductor manufacturing typically uses special gases chlorine (Cl2) and hydrogen bromide (HBr) for etching. The etching equipment is usually equipped with detachable gas pipelines to allow the special gases to flow through, and the gas pipelines are made of stainless steel.

[0003] When special gases flow through the gas pipelines of etching equipment, trace amounts remain on the inner walls of the pipelines (especially the corrugated sections). Because the gas pipelines are exposed to the atmosphere for extended periods, they inevitably react with moisture to form strong acids, which corrode the protective layer of the pipeline's inner walls. For example, chlorine reacts with moisture to produce hydrochloric acid and hypochlorous acid, which corrode stainless steel and form dark green ferric chloride. Hydrogen bromide reacts with moisture to produce hydrobromic acid, a stronger acid than hydrochloric acid, which corrodes stainless steel and forms brownish-yellow ferric bromide. Ferric chloride and ferric bromide tend to accumulate in the pipelines, leading to a decrease in corrosion resistance and a reduced lifespan over time. Summary of the Invention

[0004] The purpose of this invention is to provide a corrosion-resistant gas pipeline assembly with high corrosion resistance and long service life.

[0005] To achieve the above objectives, the present invention provides a corrosion-resistant gas pipeline assembly, the gas pipeline assembly comprising a stainless steel pipe, a corrosion-resistant liner disposed on the inner wall of the stainless steel pipe, and joints disposed at both ends of the stainless steel pipe; a first corrugated pipe section is disposed in the middle of the stainless steel pipe; and a second corrugated pipe section adapted to the first corrugated pipe section is disposed in the middle of the corrosion-resistant liner.

[0006] Optionally, the material of the anti-corrosion lining tube includes one of soluble polytetrafluoroethylene, polytetrafluoroethylene, perfluoroethylene propylene, and polyethylene, preferably soluble polytetrafluoroethylene.

[0007] Optionally, the temperature resistance range of the anti-corrosion lining tube is -200-260℃.

[0008] Optionally, the length of the stainless steel pipe matches the length of the anti-corrosion lining pipe, which is 300-350mm.

[0009] Optionally, the stainless steel tube has an outer diameter of 13-18 mm and an inner diameter of 10-15 mm.

[0010] Optionally, the outer diameter of the anti-corrosion lining tube is 10-15 mm, and the inner diameter is 7-12 mm.

[0011] Optionally, the surface roughness of the stainless steel tube is <0.8 μm.

[0012] Optionally, the stainless steel pipe and the first corrugated pipe section are integrally formed, and the anti-corrosion lining pipe and the second corrugated pipe section are integrally formed.

[0013] Optionally, the first corrugated pipe section and the second corrugated pipe section each independently include a number of peaks, and a trough is formed between two adjacent peaks; the cross-sectional shape of the peaks of the first corrugated pipe section and the second corrugated pipe section is U-shaped.

[0014] Optionally, the lengths of the first corrugated pipe section and the second corrugated pipe section are each independently 50-58 mm.

[0015] Optionally, the connector is a VCR connector or an SWG connector, and the material of the connector is stainless steel.

[0016] Optionally, the connector is detachably connected to the stainless steel pipe.

[0017] Through the above technical solution, the gas pipeline assembly of the present invention provides an anti-corrosion liner on the inner wall of a stainless steel pipe. The anti-corrosion liner has good chemical resistance, corrosion resistance and high temperature resistance, and its smooth surface does not adsorb chemical substances, which can reduce pollution and residue. It can also prevent special gases from reacting with water vapor and corroding the stainless steel pipe, thereby improving the corrosion resistance and service life of the gas pipeline.

[0018] Other features and advantages of the present invention will be described in detail in the following detailed description section. Attached Figure Description

[0019] The accompanying drawings are provided to further illustrate the invention and form part of the specification. They are used together with the following detailed description to explain the invention, but do not constitute a limitation thereof. In the drawings: Figure 1 This is a schematic diagram of the gas pipeline assembly of the present invention; Figure 2 This is a schematic diagram of the stainless steel pipe structure of the present invention; Figure 3 This is a cross-sectional view of the stainless steel corrugated pipe section of the present invention.

[0020] Explanation of reference numerals in the attached figures 1-Stainless steel pipe; 2-Anti-corrosion lining pipe; 3-Joint; 4-First corrugated pipe section; 5-Second corrugated pipe section. Detailed Implementation

[0021] The specific embodiments of the present invention will be described in detail below with reference to the accompanying drawings. It should be understood that the specific embodiments described herein are for illustration and explanation only and are not intended to limit the present invention.

[0022] This invention provides a corrosion-resistant gas pipeline assembly, such as... Figure 1-3 As shown, the gas pipeline assembly includes a stainless steel pipe 1, an anti-corrosion lining pipe 2 disposed on the inner wall of the stainless steel pipe 1, and joints 3 disposed at both ends of the stainless steel pipe 1; a first corrugated pipe section 4 is disposed in the middle of the stainless steel pipe 1; and a second corrugated pipe section 5 adapted to the first corrugated pipe section 4 is disposed in the middle of the anti-corrosion lining pipe 2.

[0023] The gas pipeline assembly of the present invention provides an anti-corrosion liner on the inner wall of a stainless steel pipe. The anti-corrosion liner has good chemical resistance, corrosion resistance and high temperature resistance, and its smooth surface does not adsorb chemical substances, which can reduce pollution and residue. It can also prevent special gases from reacting with water vapor and corroding the stainless steel pipe, thereby improving the corrosion resistance and service life of the gas pipeline.

[0024] According to the present invention, optionally, the anti-corrosion liner 2 is provided with a second corrugated pipe section 5 to increase the range of flexibility and avoid relative sliding between the stainless steel pipe and the anti-corrosion liner; the anti-corrosion liner may also be provided without a corrugated pipe section and a straight pipe is used as the liner, which requires a small range of sliding during use.

[0025] According to the present invention, optionally, the material of the anti-corrosion lining tube 2 includes one of soluble polytetrafluoroethylene, polytetrafluoroethylene, perfluoroethylene propylene, and polyethylene, preferably soluble polytetrafluoroethylene.

[0026] According to the present invention, optionally, soluble polytetrafluoroethylene (PFA), also known as perfluoroalkoxy vinyl ether polymer, has excellent chemical resistance, with advantages such as high melting point, dent resistance, crack resistance, and corrosion resistance. Its properties are similar to Teflon, and it can be processed into products in the molten state. When using PFA as a material for special gas pipelines, it is necessary to ensure its stability and durability under conditions such as high temperature, high pressure, and high flow rate to meet application requirements.

[0027] Optionally, according to the present invention, the temperature resistance range of the anti-corrosion liner 2 is -200-260℃. The anti-corrosion liner of the present invention has strong high-temperature resistance; in high-temperature environments, it can still maintain its physical properties and structural integrity, enabling it to operate for a long time under high temperature and extreme chemical environments.

[0028] According to the present invention, optionally, the length of the stainless steel pipe 1 matches the length of the anti-corrosion lining pipe 2, and the length is 300-350 mm. Having the same length for both the stainless steel pipe and the anti-corrosion lining pipe provides better protection against corrosion.

[0029] According to the present invention, optionally, the outer diameter of the stainless steel pipe 1 is 13-18 mm and the inner diameter is 10-15 mm, and the outer diameter of the anti-corrosion lining pipe 2 is 10-15 mm and the inner diameter is 7-12 mm. Through the above embodiments, it is convenient for special gases to flow in gas pipelines.

[0030] According to the present invention, optionally, the stainless steel pipe 1 is of type SUS 316L with a surface roughness of <0.8μm. The low surface roughness and smoothness of the stainless steel pipe make it less susceptible to corrosive gases penetrating into the inner metal layer, thus reducing the risk of surface corrosion.

[0031] According to the present invention, optionally, the stainless steel pipe 1 and the first corrugated pipe section 4 are integrally formed, and the anti-corrosion liner pipe 2 and the second corrugated pipe section 5 are integrally formed. The integrally formed structure eliminates the welding step in the traditional process, and the integral forming results in better sealing performance and a higher safety factor between the stainless steel pipe and the anti-corrosion liner pipe, thereby reducing the leakage risk of the corrugated pipe section and improving its use value.

[0032] According to the present invention, optionally, the first corrugated pipe section 4 and the second corrugated pipe section 5 each independently include a plurality of crests, and a trough is formed between two adjacent crests; the cross-sectional shape of the crests of the first corrugated pipe section 4 and the second corrugated pipe section 5 is U-shaped. The U-shaped design of the corrugated pipe section cross-section gives the corrugated pipe section higher deformation sensitivity, and when subjected to external impact, it can deform more quickly to protect the internal structure from damage.

[0033] According to the present invention, optionally, the lengths of the first corrugated pipe section 4 and the second corrugated pipe section 5 are each independently 50-58 mm.

[0034] According to the present invention, optionally, the length, outer diameter, inner diameter of the stainless steel pipe and the anti-corrosion lining pipe, as well as the length of the corrugated pipe section, can be varied according to the actual situation.

[0035] According to the present invention, optionally, the connector 3 is a VCR connector or an SWG connector, and the material of the connector 3 is stainless steel SUS 316L.

[0036] According to the present invention, optionally, the connector 3 is detachably connected to the stainless steel pipe 1.

[0037] According to the present invention, optionally, the internal channel between the connector 3 and the stainless steel tube 1 is subjected to electrolytic polishing treatment; the polishing solution used for electrolytic polishing includes one or more of concentrated sulfuric acid, concentrated phosphoric acid, concentrated nitric acid, perchloric acid, acetic acid, and citric acid, the concentration of the polishing solution is 60-98%, the electrolytic polishing temperature is 60-70℃, the electrolytic polishing time is 5-7 min, the electrolytic polishing current is 3000-4000 mA, and the voltage is 15-20 V. Electrolytic polishing can improve corrosion resistance, reduce surface roughness, improve surface smoothness, ensure high purity and cleanability, and reduce product contamination.

[0038] According to the present invention, optionally, the stainless steel pipe manufacturing process of the present invention includes the following steps: S1. Select a pipe with appropriate outer and inner diameters and cut it to the appropriate length; S2. Using a corrugating device, the middle part of the tube is squeezed to form a corrugated tube section with crests and troughs and a U-shaped cross-section, resulting in a stainless steel tube with smooth ends and a corrugated section in the middle. S3. Anneal the stainless steel pipe; S4. Cut the two smooth sections of the stainless steel pipe to appropriate lengths and perform electrolytic polishing on the stainless steel pipe.

[0039] Optionally, according to the present invention, a soluble polytetrafluoroethylene (PTFE) anti-corrosion liner is installed on the inner wall of a stainless steel pipe using an injection molding process. The injection molding process involves injecting molten raw material into a mold cavity under high pressure, followed by cooling and solidification to obtain the injection-molded product. Specifically, the soluble PTFE raw material for the anti-corrosion liner is heated to a molten state, then injected into the stainless steel pipe under high pressure, allowing it to cool and solidify into a specific shape to form the liner layer. This method ensures that the liner layer possesses excellent chemical stability and corrosion resistance, while maintaining good physical properties, making it suitable for long-term use in various industrial environments. The injection molding process allows for the convenient processing of the soluble PTFE raw material into complex shapes to meet the needs of different application scenarios.

[0040] The present invention will be further illustrated by the following examples, but the present invention is not limited thereto.

[0041] Example 1 The corrosion-resistant gas pipeline assembly of this embodiment includes a stainless steel pipe 1, an anti-corrosion liner 2 disposed on the inner wall of the stainless steel pipe 1, and connectors 3 disposed at both ends of the stainless steel pipe 1; the anti-corrosion liner 2 is made of soluble polytetrafluoroethylene, the length of the stainless steel pipe 1 and the length of the anti-corrosion liner 2 are 310.5 mm, the outer diameter of the stainless steel pipe 1 is 13.5 mm, the inner diameter is 10.9 mm, the outer diameter of the anti-corrosion liner 2 is 10.7 mm, and the inner diameter is 8 mm. The stainless steel pipe 1 has a first corrugated pipe section 4 in the middle; the anti-corrosion lining pipe 2 has a second corrugated pipe section 5 that is adapted to the first corrugated pipe section 4 in the middle; the length of the first corrugated pipe section 4 and the second corrugated pipe section 5 is 54mm; the stainless steel pipe 1 and the first corrugated pipe section 4 are integrally formed, and the anti-corrosion lining pipe 2 and the second corrugated pipe section 5 are integrally formed. Connector 3 is a VCR connector, and connector 3 is detachably connected to the stainless steel pipe 1.

[0042] Example 2 The corrosion-resistant gas pipeline assembly of this embodiment includes a stainless steel pipe 1, an anti-corrosion liner 2 disposed on the inner wall of the stainless steel pipe 1, and connectors 3 disposed at both ends of the stainless steel pipe 1; the anti-corrosion liner 2 is made of polytetrafluoroethylene, the length of the stainless steel pipe 1 and the length of the anti-corrosion liner 2 are 325mm, the outer diameter of the stainless steel pipe 1 is 15mm and the inner diameter is 12.5mm, and the outer diameter of the anti-corrosion liner 2 is 12mm and the inner diameter is 10mm. The stainless steel pipe 1 has a first corrugated pipe section 4 in the middle; the anti-corrosion lining pipe 2 has a second corrugated pipe section 5 that is adapted to the first corrugated pipe section 4 in the middle; the length of the first corrugated pipe section 4 and the second corrugated pipe section 5 is 56mm; the stainless steel pipe 1 and the first corrugated pipe section 4 are integrally formed, and the anti-corrosion lining pipe 2 and the second corrugated pipe section 5 are integrally formed. Connector 3 is a VCR connector, and connector 3 is detachably connected to the stainless steel pipe 1.

[0043] The preferred embodiments of the present invention have been described in detail above with reference to the accompanying drawings. However, the present invention is not limited to the specific details of the above embodiments. Within the scope of the technical concept of the present invention, various simple modifications can be made to the technical solution of the present invention, and these simple modifications all fall within the protection scope of the present invention.

[0044] It should also be noted that the various specific technical features described in the above specific embodiments can be combined in any suitable manner without contradiction. In order to avoid unnecessary repetition, the present invention will not describe the various possible combinations separately.

[0045] Furthermore, various different embodiments of the present invention can be combined in any way, as long as they do not violate the spirit of the present invention, they should also be regarded as the content disclosed by the present invention.

Claims

1. A corrosion-resistant gas pipeline assembly, characterized in that, The gas pipeline assembly includes a stainless steel pipe (1), a corrosion-resistant inner lining pipe (2) disposed on the inner wall of the stainless steel pipe (1), and joints (3) disposed at both ends of the stainless steel pipe (1). The stainless steel pipe (1) has a first corrugated pipe section (4) in the middle; the anti-corrosion lining pipe (2) has a second corrugated pipe section (5) that is compatible with the first corrugated pipe section (4) in the middle.

2. The gas pipeline assembly according to claim 1, wherein, The anti-corrosion lining tube (2) is made of one of the following materials: soluble polytetrafluoroethylene, polytetrafluoroethylene, perfluoroethylene propylene, and polyethylene, preferably soluble polytetrafluoroethylene.

3. The gas piping assembly according to claim 1, wherein, The temperature range of the anti-corrosion lining tube (2) is -200-260℃.

4. The gas piping assembly according to claim 1, wherein, The length of the stainless steel pipe (1) matches the length of the anti-corrosion lining pipe (2), and the length is 300-350mm; The stainless steel pipe (1) has an outer diameter of 13-18 mm and an inner diameter of 10-15 mm. The outer diameter of the anti-corrosion lining tube (2) is 10-15mm and the inner diameter is 7-12mm.

5. The gas piping assembly according to claim 1, wherein, The surface roughness of the stainless steel tube (1) is <0.8μm.

6. The gas piping assembly according to claim 1, wherein, The stainless steel pipe (1) and the first corrugated pipe section (4) are integrally formed, and the anti-corrosion lining pipe (2) and the second corrugated pipe section (5) are integrally formed.

7. The gas piping assembly according to claim 6, wherein, The first corrugated pipe section (4) and the second corrugated pipe section (5) each independently include a number of peaks, and a trough is formed between two adjacent peaks; The first corrugated pipe section (4) and the second corrugated pipe section (5) have U-shaped corrugated cross sections.

8. The gas piping assembly according to claim 7, wherein, The lengths of the first corrugated pipe section (4) and the second corrugated pipe section (5) are each 50-58 mm.

9. The gas piping assembly according to claim 1, wherein, The connector (3) is a VCR connector or an SWG connector, and the material of the connector (3) is stainless steel.

10. The gas piping assembly according to claim 1, wherein, The connector (3) is detachably connected to the stainless steel pipe (1).

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