MEMS resonator directional energy injection device and method based on phased array

Abstract

The invention provides an MEMS resonator directional energy injection device and method based on a phased array, and belongs to the technical field of MEMS testing and directional energy. The device aims at solving the problems that an existing energy injection technology is low in precision and poor in selectivity, and incidental damage is likely to be caused. According to the invention, a phased array composed of a plurality of energy transducer units is adopted, and independent and high-precision dynamic adjustment is carried out on the phase and amplitude of a signal transmitted by each unit in the array through a central phase controller. A controllable energy focus of which the energy is highly concentrated and the size can reach a millimeter level is formed in a three-dimensional space through a beam coherent combination principle. The focus can be accurately guided to a resonant structure of a specific MEMS chip in the target equipment, so that'surgical 'energy injection or interference is realized, and other adjacent electronic elements around are not influenced. The method has the characteristics of high spatial resolution, dynamic target tracking, adjustable energy parameters and the like.

Description

Technical Field

[0001] This invention belongs to the interdisciplinary field of directed energy technology and microelectronics technology, specifically relating to a device and method for high-precision energy injection into microelectromechanical systems (MEMS). More specifically, this invention utilizes the principle of phased array to achieve selective, non-contact energy transfer to millimeter-scale targets by controlling the propagation of ultrasonic or electromagnetic waves. It is suitable for high-precision applications such as performance testing, failure analysis, directional interference and protection, and non-destructive circuit repair of MEMS devices. Background Technology

[0002] Microelectromechanical systems (MEMS) have found widespread application in fields such as communication (e.g., RF filters, oscillators), sensing (e.g., accelerometers, gyroscopes), and optics (e.g., micromirror arrays) due to their advantages of small size, low power consumption, and mass production capability. With the increasing integration of electronic devices, MEMS devices are often densely packaged with numerous other sensitive electronic components on the same substrate or within the same system-in-package (SiP) module. In this context, accurately testing, stimulating, or subjecting controlled interference to individual MEMS devices while avoiding impact on neighboring components has become a highly challenging technical problem.

[0003] Existing energy injection or interference techniques for MEMS devices mainly fall into the following categories: 1. Direct contact probe excitation: This involves directly contacting specific electrodes or structures of the MEMS device with a millimeter-scale physical probe to apply electrical signals or mechanical forces. The advantages of this method are precise positioning and direct energy transfer. However, its disadvantages are also significant: First, it is a destructive and invasive operation that may cause physical damage to the device surface, especially unsuitable for devices with protective layers or internal encapsulation; second, the operation is complex, requiring expensive micro-manipulation stages and high-magnification microscopes, making automation and mass production difficult; finally, for high-frequency excitation, the probe itself may introduce parasitic inductance and capacitance, affecting signal purity. 2. Wide-area energy field radiation: This involves generating a broad-spectrum or single-frequency electromagnetic or acoustic field across the entire area containing the target device using devices such as antennas, Helmholtz coils, or large ultrasonic transducers. This method is simple to operate and can be used to evaluate the overall anti-interference capability of the device (EMC / EMI testing). However, its fundamental drawback is the lack of spatial selectivity. The wide coverage of the energy field makes it impossible to precisely concentrate energy on a single MEMS device. This results in all electronic components within the field being affected, making "point-to-point" operation of specific devices impossible and easily leading to misjudgments or large-area collateral damage. 3. Quasi-optical focusing technology: This method uses lenses (such as acoustic lenses, dielectric lenses) or reflective surfaces (such as parabolic reflectors) to physically focus the energy beam. Compared to wide-area radiation, this method improves energy density and spatial directivity to some extent. However, the focal position is usually fixed or requires mechanical movement of the entire device for adjustment, resulting in poor flexibility and making it impossible to achieve rapid electronic scanning and dynamic target tracking. In addition, limited by the diffraction limit and the processing precision of the lens / reflective surface, the size of the focal point is usually on the order of millimeters. For millimeter-sized MEMS devices, the precision is still insufficient, and it is easily affected by refraction and scattering from the target device's casing or internal complex medium, leading to focal dispersion and position shift.

[0004] In recent years, phased array technology has achieved great success in fields such as radar, wireless communication, and medical ultrasound. Its core idea is to electronically synthesize and manipulate beams by controlling the transmission phase of multiple small cells in the array. However, applying phased array technology to ultra-precise directional energy injection for millimeter-level targets, especially for MEMS devices within complex packaging structures, has yet to yield a mature and reliable technical solution. Existing technologies still have gaps in areas such as how to achieve millimeter-level focusing, how to achieve precise compensation through complex media, and how to construct a closed-loop control system capable of dynamically tracking targets.

[0005] Therefore, there is an urgent need for a new type of energy injection device that can achieve non-contact operation and provide millimeter-level spatial resolution and flexible electron beam scanning capabilities, thereby solving the various limitations of existing technologies in the precise operation of specific MEMS devices in high-density integrated circuits.

[0006] A search revealed application publication number CN112588547A, which discloses a non-contact tactile feedback system based on ultrasonic phased array technology. The system comprises: an ultrasonic transducer array containing several ultrasonic transducers for emitting ultrasonic waves to a specific area in the air; a main control module, whose input receives coordinate parameters of the specific area in the air, calculates and outputs control signals for each channel of the ultrasonic transducer array based on the coordinate parameters, the control signals including phase period, synchronization clock, and modulation signal; and a drive module, whose input is connected to the output of the main control module, and whose output is connected to the ultrasonic transducer array, for calculating and amplifying the control signals for each channel of the ultrasonic transducer array. This invention, a multi-channel ultrasonic phased array transmitting system, utilizes a dual-core structure of DSP and FPGA to achieve precise control of the ultrasonic transducer phase, realizing non-contact tactile feedback based on an ultrasonic phased array.

[0007] The defects / deficiencies of this patent:

[0008] (1) The application scenario is "emitting ultrasonic waves to a specific area in the air" to achieve tactile feedback. Its propagation medium is singular (only air), so its phase calculation only needs to consider simple geometric distance. It lacks a penetration design for complex multi-layered media (such as air-solid package-chip) and cannot solve the problems of refraction, sound speed change and wavefront distortion of energy waves at different medium interfaces.

[0009] (2) The control logic of this invention is mainly open-loop, that is, the main control module receives the coordinate parameters of a specific area in the air and directly calculates and outputs the control signal. It does not mention a real-time detection and feedback locking mechanism for minute displacements or vibrations of the target. For MEMS devices whose position may change slightly or are in a state of vibration, this method is prone to causing focus deviation (missing the target).

[0010] (3) Used for "haptic feedback", its target is the human hand, and the accuracy requirement is low (usually centimeter level is sufficient to meet the tactile sensation). Moreover, it is not optimized for the testing needs of microelectronic devices and lacks the ability to selectively stimulate small areas.

[0011] The solution of this invention:

[0012] (1) This invention addresses the characteristic that MEMS devices are typically encapsulated in ceramic or metal casings by incorporating a media parameter database (containing sound velocity, dielectric constant, etc. for different media) into the central phase controller. The system can calculate the equivalent optical path / sound path based on the multiple media (such as air, encapsulation material, and substrate) along the propagation path of the energy wave, and compensate for the phase delay value in real time, thereby correcting the wavefront distortion caused by media inhomogeneity and ensuring that energy is accurately focused inside the package.

[0013] (2) This invention introduces a target positioning and feedback module, forming a closed-loop control system. The device measures the three-dimensional coordinates of the target in real time through optical visual positioning (capturing image features) or energy echo positioning (analyzing reflected signals), and feeds the data back to the controller to dynamically update the phase delay value. This enables automatic tracking and focus locking of moving or vibrating targets, ensuring the continuity and stability of energy injection.

[0014] (3) This invention utilizes the phased array principle combined with specific frequency band optimization (20KHz-1MHz ultrasound has strong penetrating power) to achieve millimeter-level energy focus. This precision is sufficient to distinguish specific chip areas in a system-in-package (SiP) module, realizing "surgical" directional energy injection and avoiding collateral interference to adjacent electronic components. Summary of the Invention

[0015] This invention aims to solve the problems of the prior art. It proposes a method for directional energy injection into MEMS resonators based on a phased array. The technical solution of this invention is as follows:

[0016] A phased array-based MEMS resonator directional energy injection device, comprising:

[0017] An energy transducer array consisting of multiple independent and controllable energy transducer units is used to convert electrical signals into energy waves that propagate outwards.

[0018] A multi-channel signal generation and driving module is connected to each unit of the energy transducer array in a one-to-one correspondence, and is used to generate and provide a driving signal with independently adjustable phase and amplitude for each unit;

[0019] A central phase controller, connected to the multi-channel signal generation and driving module, is used to calculate a phase delay value for each unit in the energy transducer array based on the coordinates of the preset target focus in three-dimensional space, and instruct the multi-channel signal generation and driving module to adjust the phase of the driving signal of the corresponding channel according to the phase delay value, so that the energy waves emitted from each unit are coherently superimposed at the target focus to form a controllable focus with concentrated energy.

[0020] Furthermore, it also includes a target localization and feedback module, which is used to measure the coordinates of the target MEMS device in three-dimensional space in real time or periodically, and feed the coordinate data back to the central phase controller to realize dynamic tracking and automatic focus locking of moving or uncertain targets.

[0021] Furthermore, the target localization and feedback module adopts an optical vision localization method, which is a method of acquiring visual information of the target using optical imaging equipment and combining it with algorithms for spatial calculation. It includes an image acquisition unit and an image processing unit. The image acquisition unit is used to capture high-resolution images of the target MEMS device in real time, and the image processing unit is used to perform pattern recognition or feature matching on the acquired images to determine the precise coordinates of the target device in three-dimensional space. By performing pattern recognition or feature matching on the acquired images, the two-dimensional or three-dimensional position of the target device can be determined.

[0022] Furthermore, the target positioning and feedback module adopts the energy echo positioning method, which uses the energy transducer array to receive the echo signal reflected by the target, and processes the multi-channel echo signal to calculate the target's position information in reverse.

[0023] Furthermore, the central phase controller has a built-in medium parameter database and can compensate for the phase delay value based on the physical parameters of one or more media along the propagation path of the energy wave, so as to correct the wavefront distortion caused by the non-uniformity of the medium.

[0024] Furthermore, the energy transducer array is an ultrasonic phased array, and its transducer units are made of piezoelectric materials with an operating frequency between 20 kHz and 1 MHz.

[0025] Furthermore, the energy transducer array is an electromagnetic phased array, and its transducer units are microwave or millimeter-wave antennas with an operating frequency between 1 GHz and 300 GHz.

[0026] A MEMS directional energy injection method based on any of the aforementioned devices includes the following steps:

[0027] Step a: Target localization, determining the three-dimensional coordinates of the target MEMS device in the device coordinate system;

[0028] Step b: Phase calculation. Based on the three-dimensional coordinates, calculate the phase delay value required to achieve focusing for each unit of the energy transducer array.

[0029] Step c: Signal driving, controlling the multi-channel signal generation and driving module to apply a driving signal containing the phase delay value to each transducer unit;

[0030] Step d: Energy emission and focusing, driving the energy transducer array to emit energy waves, forming an energy focus at the location of the target MEMS device.

[0031] Furthermore, between step a and step b, there is a medium parameter acquisition step for determining the medium characteristics along the energy wave propagation path; in step b, the phase calculation is compensated in conjunction with the medium characteristics.

[0032] Furthermore, during the execution of step d, steps a and b are repeated periodically to update the target coordinates and phase delay value in real time, so as to achieve energy focus tracking of dynamic targets.

[0033] The advantages and beneficial effects of this invention are as follows:

[0034] 1. Superior Penetration and Millimeter-Level Positioning Accuracy: This invention utilizes the 20kHz to 1MHz ultrasonic frequency band. Compared to high-frequency ultrasound, this band possesses stronger penetration capabilities, effectively penetrating thick metal or multi-layered ceramic packages while minimizing energy loss. Simultaneously, combined with a phased array focusing algorithm, it can form millimeter-level energy focal points within the package. This makes it possible to independently excite specific chip regions within a System-in-Package (SiP) module, solving the problem that traditional wide-area radiation cannot distinguish adjacent modules.

[0035] 2. Exceptional flexibility and real-time performance: Focus movement and repositioning are entirely controlled electronically, without any mechanical moving parts. Phase update speeds can reach the microsecond level, enabling high-speed scanning of the energy focus or real-time dynamic tracking and locking of vibrating or moving targets—a significant advantage unmatched by mechanical scanning or fixed-focus systems.

[0036] 3. Strong dielectric penetration and adaptive capability: The technical solution proposed in this invention includes a phase compensation mechanism for complex dielectrics. By establishing a dielectric model and closed-loop feedback, the system can adaptively adjust the phase delay and correct wavefront distortion caused by encapsulation materials, fillers, substrates, etc., ensuring that energy can still accurately converge on the target after penetrating multiple dielectric layers, greatly expanding its application range in non-transparent, complex structure devices.

[0037] 4. Non-invasive operation, protecting device integrity: The entire energy injection process requires no physical contact, avoiding scratches, electrostatic damage, or contamination that may occur during probe testing, thus ensuring the physical and electrical integrity of the target device. This is crucial for failure analysis, in-circuit testing, and reversible functional verification of expensive devices.

[0038] 5. Highly integrated system and user-friendly operation: This invention integrates the transducer array, control circuit, and positioning system into a complete device, and provides an intuitive operation method through a user graphical interface. Users only need to simply specify the target and parameters; complex phase calculations and closed-loop control are all automatically completed by the system, lowering the barrier to entry and improving work efficiency.

[0039] 6. The device does not simply calculate the phase based on geometric linear distance. Instead, it incorporates a database of medium parameters (sound velocity, dielectric constant) and calculates the equivalent optical / sound path based on the multiple layers of media (such as air, ceramic packaging, and silicon substrate) traversed along the energy wave propagation path, compensating for the phase delay value in real time. This overcomes conventional thinking: existing phased array applications typically assume a homogeneous propagation medium (such as pure air or vacuum). In these conventional techniques, the phase delay is only related to geometric distance. This invention targets MEMS packaging scenarios, where the energy wave must penetrate multiple layers of materials with vastly different acoustic impedances / dielectric constants. If conventional phased array algorithms are directly applied, the beam will experience severe refraction and wave velocity changes at the interfaces, leading to a loss of focus.

[0040] Overcoming the technical hurdle of "invisibility": Introducing a "medium parameter database" and performing "wavefront distortion correction" are key means to solve the problems of invisibility and non-uniformity of the medium inside the package. This involves complex algorithms customized for specific application scenarios (chip packaging), rather than being an inherent function of general phased array controllers.

[0041] 7. Optimized frequency band configuration for package penetration: The operating range of 20kHz to 1MHz is clearly defined. While conventional millimeter-level focusing offers high precision, its penetration depth is limited, making it difficult to operate on deeply packaged devices. This invention, by selecting a low-frequency band in conjunction with phased array focusing, maximizes the energy propagation depth and effective operating distance while ensuring "subwavelength (millimeter-level)" spatial resolution, filling the technological gap in non-destructive testing of thick-packaged MEMS devices.

[0042] 8. Deeply couple "visual / echo positioning" with "phase control" to form a closed loop. The device can sense minute displacements or vibrations of the target MEMS device in real time and dynamically refresh phase data to lock the focus. The non-obviousness of system-level integration: Existing technologies are mostly open-loop control (input coordinates -> launch), lacking real-time correction capabilities. This invention creatively introduces a closed-loop locking mechanism similar to "missile guidance" to address the potential vibration or movement characteristics of MEMS devices. This design specifically solves the problem that at the microscale, minute mechanical vibrations can cause the energy focus to deviate from the target structure (missile failure), a special requirement rarely encountered in macroscopic phased array applications. Attached Figure Description

[0043] Figure 1 This is a system structure block diagram of a phased array-based MEMS resonator directional energy injection device according to a preferred embodiment of the present invention;

[0044] Figure 2 This is a schematic diagram of the energy focusing principle of a phased array;

[0045] Figure 3 This is a flowchart of the directed energy injection method. Detailed Implementation

[0046] The technical solutions of the embodiments of the present invention will be clearly and thoroughly described below with reference to the accompanying drawings. The described embodiments are merely some embodiments of the present invention.

[0047] The technical solution of the present invention to solve the above-mentioned technical problems is:

[0048] A schematic diagram of the overall structure of a MEMS resonator-based directional energy injection device based on a phased array is shown below. Figure 1 As shown, it mainly includes: an energy transducer array, a multi-channel signal generation and driving module, a central phase controller, a target positioning and feedback module, and a main control and user interface unit.

[0049] 1. Energy transducer array

[0050] This array is the core of the energy transmission. It consists of N×N independent transducer elements arranged in a predetermined geometry (such as planar, concave, or conformal). Each element can independently convert electrical signals into energy waves (ultrasound or electromagnetic waves).

[0051] Example 1 (Ultrasonic Phased Array): A miniature ultrasonic transducer array made of piezoelectric ceramic (such as PZT) or piezoelectric single crystal (PMN-PT) material. The operating frequency can be designed in the low-frequency or mid-frequency ultrasonic band from 20KHz to 1MHz to obtain stronger medium penetration capability, thereby enabling it to act on targets inside deep encapsulation.

[0052] Example 2 (Electromagnetic Phased Array): An array composed of microstrip antennas, patch antennas, or dipole antennas, operating in microwave or millimeter-wave frequency bands (e.g., 24 GHz, 60 GHz, 77 GHz). High frequencies also contribute to achieving high spatial resolution. The array can be integrated onto a PCB board or semiconductor chip, achieving miniaturization and low cost.

[0053] 2. Multi-channel signal generation and driving module

[0054] This module provides an independent drive signal for each unit in the transducer array. It contains multiple parallel signal channels, each capable of independently controlling the phase, amplitude, and frequency of the output signal. Time synchronization: Timestamp calibration of multi-channel sensor data ensures data timing consistency.

[0055] This module is typically implemented using a high-performance field-programmable gate array (FPGA) or application-specific integrated circuit (ASIC). The FPGA integrates multiple numerically controlled oscillators (NCOs) to generate digital baseband signals with precise phase and frequency.

[0056] The digital signal is then converted into an analog signal by a multi-channel digital-to-analog converter (DAC), then amplitude modulated by a programmable gain amplifier (PGA), and finally driven by a power amplifier (PA) to drive the corresponding transducer unit.

[0057] 3. Central phase control

[0058] This is the brain of the invention, responsible for focusing and steering the beam. Its core function is to calculate the required phase delay value for each transducer unit based on the target location and medium information. Its working principle is as follows: Figure 2 As shown.

[0059] Assume the three-dimensional coordinates of the target focus P are (x0, y0, z0), and the coordinates of the i-th transducer unit are (xᵢ, yᵢ, zᵢ). The physical distance of the energy wave propagating from the i-th unit to the focus P is:

[0060]

[0061] To ensure that the waves emitted by all elements are superimposed in phase at the focal point P, a compensatory phase delay φᵢ needs to be applied to the emitted signal of each element. This phase delay is related to the propagation path difference. A reference point (such as the array center) is selected, with a distance d_ref from the focal point. The path difference of the i-th element relative to the reference point is...

[0062] The corresponding phase delay φᵢ is calculated using the following formula:

[0063]

[0064] Where λ is the wavelength of the energy wave in the medium. If the energy wave needs to pass through multiple layers of media with different properties (such as air, packaging materials, and silicon substrates), the calculation of the propagation path dᵢ needs to be corrected to the optical path length, which is the sum of the products of the length of each path segment and the refractive index (or the reciprocal of the speed of sound) of the medium in which they are located. The central phase controller has a built-in medium model database and calculates the optical path difference and the corresponding phase delay in real time under complex paths based on the information provided by the target positioning module.

[0065] The controller can update the phase data of all channels at a speed of microseconds, thereby enabling real-time electronic scanning and dynamic tracking of the focus.

[0066] 4. Target Positioning and Feedback Module

[0067] This module is responsible for accurately determining the position of the target MEMS device in three-dimensional space and providing closed-loop feedback for the phase controller. It can be achieved through one or more of the following methods:

[0068] Optical vision positioning: Using a high-resolution camera (such as an industrial camera or microscope) to capture images of the target device, identifying the target MEMS device through image recognition algorithms (such as template matching and feature point detection), and calculating its three-dimensional coordinates by combining digital image correlation (DIC) or laser ranging technology.

[0069] Energy echo localization: Phased array systems can not only emit energy but also receive echo signals reflected from targets. By analyzing the phase and amplitude information of the echo signals received by each element (similar to the principle of phased array radar), the target's position and attitude can be calculated in reverse. This method is particularly suitable for scenarios where optical observation is not possible.

[0070] CAD Data Import: Directly import the design drawings of the target device (such as Gerber files and DXF files). The user specifies the target device on the drawing, and the system automatically converts its two-dimensional coordinates into three-dimensional coordinates relative to the device coordinate system.

[0071] This module sends the calculated real-time coordinates (x0, y0, z0) of the target to the central phase controller, forming a closed-loop control system to achieve dynamic tracking of moving or vibrating targets and locking of energy focus.

[0072] 5. Main Control and User Interface Unit

[0073] This unit serves as a human-computer interaction platform, typically an industrial computer or embedded system. Users can interact through a graphical user interface (GUI) to:

[0074] Set the target location (manual input, image selection, or CAD import).

[0075] Set energy parameters, such as energy intensity at the focal point, operating frequency, pulse width, and repetition frequency.

[0076] Monitor the status of the monitoring system, including the working status of each channel, real-time focus position, and feedback module information.

[0077] Start, stop, and schedule energy injection tasks.

[0078] System Architecture

[0079] This invention also provides a method for directional energy injection into a MEMS resonator based on a phased array, comprising the following steps:

[0080] Step 1: System Calibration and Verification. After the system is used for the first time or the transducer array is replaced, perform channel consistency calibration to measure and compensate for the inherent phase and amplitude errors of each channel. Establish the transformation relationship between the device coordinate system and the target equipment coordinate system.

[0081] Step 2: Target Identification and Localization. The operator specifies the target MEMS device through the user interface. The target localization and feedback module is activated, using optical or echo methods to accurately measure the target's three-dimensional coordinates (x0, y0, z0). If the target device has a complex internal medium, the electromagnetic / acoustic parameters of the medium need to be input or measured.

[0082] Step 3: Phase data calculation. Based on the acquired target coordinates and medium parameters, the central phase controller calculates a set of phase delay data {φ1, φ2, ..., φᵢ, ...} for the N×N elements of the transducer array in real time.

[0083] Step 4: Signal Generation and Transmission. The multi-channel signal generation and driving module generates and drives each transducer unit to transmit energy waves with specific phase and amplitude based on phase data and user-defined energy parameters.

[0084] Step 5: Energy Focusing and Dynamic Tracking. The energy waves emitted by each unit coherently superimpose in space, forming an energy focus at the target location (x0, y0, z0). During the injection process, the target localization and feedback module continuously monitors the target position. If a change occurs, the system returns to Step 3, recalculates the phase data, and adjusts the focus position to achieve dynamic tracking.

[0085] Step 6: Mission complete. Once the energy injection reaches the preset time or condition, the system stops launching, and the mission is complete.

[0086] Example 1: MEMS Gyroscope Excitation Test Based on High-Frequency Ultrasonic Phased Array

[0087] This embodiment aims to perform directional energy injection excitation testing on a MEMS inertial measurement unit encapsulated in a ceramic substrate with a package size of 5mm × 5mm.

[0088] 1. System Construction:

[0089] Energy transducer array: A 32×32 two-dimensional ultrasonic phased array is selected, with PZT-5H piezoelectric ceramic elements. The center frequency is 20kHz, the size is 0.6mm, and the spacing is 0.75mm (approximately equal to half the wavelength in water). The total array aperture is approximately 24mm × 24mm.

[0090] Control and Drive System: Employs a central phase controller based on a Xilinx Kintex-7 series FPGA. The FPGA internally implements 1024 numerically controlled oscillators (NCOs) and a phase calculation core. It connects to a 1024-channel 14-bit DAC and a high-speed drive amplifier.

[0091] Target localization module: Employs an industrial microscope with 50x magnification and a 12-megapixel CMOS camera. It uses a template matching algorithm from the OpenCV library to identify specific structures of the gyroscope and combines this with a laser displacement sensor to determine its depth information.

[0092] 2. Operating Procedures:

[0093] Calibration: A drop of a coupling agent with a known velocity of sound (such as water or glycerin) is placed on the surface of the target device, and the phased array device is placed above the coupling agent. The system performs self-calibration to ensure that the output of each channel is consistent.

[0094] Positioning: By capturing gyroscope images with a microscope camera, the user selects the resonant beam (approximately 10μm × 100μm) to be excited in the GUI. The system automatically calculates the three-dimensional coordinates (x0, y0, z0) of the structure in the device coordinate system, measures the thickness of the coupling agent and ceramic encapsulation, and retrieves its sound velocity parameters from the database.

[0095] Focusing and Excitation: The central phase controller calculates 1024 phase values ​​based on the target coordinates and medium parameters (water, ceramic, silicon) and loads them into the drive module. The system emits a continuous sine wave at 20kHz... Through acoustic field simulation, the energy forms a focal spot with a diameter of approximately 1.5mm at the target chip location. This focal spot covers the core area of ​​the MEMS resonator, and its sound pressure intensity is sufficient to drive it to resonate.

[0096] Feedback and Verification: Simultaneously, a laser Doppler vibration meter (LDV) was used to monitor the vibration of the resonant beam. By scanning the frequency of the injected energy, the resonant frequency and quality factor Q of the structure could be accurately measured. Experimental results showed that the measured resonant frequency matched the device design value by 99.8%, verifying the effectiveness and accuracy of the device's excitation. Throughout the process, another functional module located 3 mm away from the target was monitored, and its vibration amplitude was less than 5% of the main target, demonstrating extremely high spatial selectivity.

[0097] Example 2: Directional Interference of RF MEMS Switches Based on Millimeter-Wave Phased Array

[0098] This embodiment aims to apply directional electromagnetic interference to a specific MEMS switch in a high-density RF front-end module to test its robustness in complex electromagnetic environments.

[0099] 1. System Construction:

[0100] Energy transducer array: Employs a 64×64 mmWave phased array transceiver integrated on a single chip, operating in the 77 GHz band. Antenna elements are microstrip patch antennas with an array aperture of 1 cm × 1 cm.

[0101] Control and drive system: The phased array chip integrates a phase shifter, a variable gain amplifier (VGA), and a transceiver link, and communicates with an external FPGA master controller via an SPI interface.

[0102] Target localization module: Employs echo localization. The system first transmits a wide-beam detection signal, and then, based on the received echo signals from each antenna element, uses direction-of-arrival (DoA) estimation algorithms (such as MUSIC or ESPRIT) and distance estimation to construct a three-dimensional scattering point cloud image of the target area. By comparing this image with a pre-stored CAD model, the location of the target MEMS switch is identified.

[0103] 2. Operating Procedures:

[0104] Location: The system performs an echo scan to generate a 3D electromagnetic image of the circuit board. The user selects the target MEMS switch on the image. The system locks its coordinates and estimates the thickness and dielectric constant of the epoxy encapsulation material above it.

[0105] Focusing and Interference: The FPGA main controller calculates 4096 phase and amplitude values ​​based on the target coordinates and medium parameters, and configures them to the phased array chip via the SPI interface. The chip emits a 77GHz frequency-modulated continuous wave (FMCW) or noise-modulated interference signal. Electromagnetic field simulation shows that an energy focus is formed on the cantilever beam structure of the target switch, with a focus half-power beamwidth (HPBW) of approximately 200μm.

[0106] Performance Evaluation: The S-parameters (such as insertion loss S21) of the RF link containing the MEMS switch were monitored in real-time using a network analyzer. Upon activation of directional interference, S21 deteriorated sharply, indicating switch failure. Meanwhile, the performance indicators of other adjacent RF paths showed negligible changes. The interference threshold of the MEMS switch could be precisely determined by varying the injected energy power. Once the interference energy was removed, the switch function returned to normal, demonstrating the reversibility of the interference.

[0107] The systems, devices, modules, or units described in the above embodiments can be implemented by computer chips or entities, or by products with certain functions.

[0108] It should also be noted that the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes said element.

[0109] The above embodiments should be understood as illustrative only and not as limiting the scope of protection of the present invention. After reading the description of the present invention, those skilled in the art can make various alterations or modifications to the present invention, and these equivalent changes and modifications also fall within the scope defined by the claims of the present invention.

Claims

1. A phased array-based MEMS resonator directional energy injection device, characterized in that, include: An energy transducer array consisting of multiple independent and controllable energy transducer units is used to convert electrical signals into energy waves that propagate outwards. A multi-channel signal generation and driving module is connected to each unit of the energy transducer array in a one-to-one correspondence, and is used to generate and provide a driving signal with independently adjustable phase and amplitude for each unit; A central phase controller, connected to the multi-channel signal generation and driving module, is used to calculate a phase delay value for each unit in the energy transducer array based on the coordinates of the preset target focus in three-dimensional space, and instruct the multi-channel signal generation and driving module to adjust the phase of the driving signal of the corresponding channel according to the phase delay value, so that the energy waves emitted from each unit are coherently superimposed at the target focus to form a controllable focus with concentrated energy.

2. The phased array-based MEMS resonator directional energy injection device according to claim 1, characterized in that, It also includes a target localization and feedback module, which measures the coordinates of the target MEMS device in three-dimensional space in real time or periodically, and feeds the coordinate data back to the central phase controller to achieve dynamic tracking and automatic focus locking of moving or uncertain targets.

3. The phased array-based MEMS resonator directional energy injection device according to claim 2, characterized in that, The target localization and feedback module adopts an optical vision localization method, which is a method of acquiring visual information of the target using optical imaging equipment and combining it with algorithms for spatial calculation. It includes an image acquisition unit and an image processing unit. The image acquisition unit is used to capture high-resolution images of the target MEMS device in real time, and the image processing unit is used to perform pattern recognition or feature matching on the acquired images to determine the precise coordinates of the target device in three-dimensional space. By performing pattern recognition or feature matching on the acquired images, the two-dimensional or three-dimensional position of the target device can be determined.

4. The phased array-based MEMS resonator directional energy injection device according to claim 2, characterized in that, The target positioning and feedback module adopts the energy echo positioning method. It uses the energy transducer array to receive the echo signal reflected by the target, and processes the multi-channel echo signal to calculate the target's position information in reverse.

5. The phased array-based MEMS resonator directional energy injection device according to claim 1, characterized in that, The central phase controller has a built-in medium parameter database and can compensate for the phase delay value based on the physical parameters of one or more media along the propagation path of the energy wave, so as to correct the wavefront distortion caused by the non-uniformity of the medium.

6. The phased array-based MEMS resonator directional energy injection device according to claim 1, characterized in that, The energy transducer array is an ultrasonic phased array, and its transducer units are made of piezoelectric materials with an operating frequency between 20 kHz and 1 MHz.

7. The phased array-based MEMS resonator directional energy injection device according to claim 1, characterized in that, The energy transducer array is an electromagnetic phased array, and its transducer units are microwave or millimeter-wave antennas with an operating frequency between 1 GHz and 300 GHz.

8. A MEMS directional energy injection method based on the device according to any one of claims 1 to 7, characterized in that, Includes the following steps: Step a: Target localization, determining the three-dimensional coordinates of the target MEMS device in the device coordinate system; Step b: Phase calculation. Based on the three-dimensional coordinates, calculate the phase delay value required to achieve focusing for each unit of the energy transducer array. Step c: Signal driving, controlling the multi-channel signal generation and driving module to apply a driving signal containing the phase delay value to each transducer unit; Step d: Energy emission and focusing, driving the energy transducer array to emit energy waves, forming an energy focus at the location of the target MEMS device.

9. The method according to claim 8, characterized in that, Between step a and step b, there is also a medium parameter acquisition step, which is used to determine the medium characteristics along the propagation path of the energy wave; in step b, the phase calculation is compensated in conjunction with the medium characteristics.

10. The method according to claim 8, characterized in that, During the execution of step d, steps a and b are repeated periodically to update the target coordinates and phase delay value in real time, so as to achieve energy focus tracking of dynamic targets.

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