Method for collecting multi-dimensional data sets and related system

Abstract

In one example, a method includes recording a plurality of data frames by making test position measurements at a plurality of sample test positions and recording response signals. Each test position measurement is characterized by a phase delay. For at least one sample test location, test location measurements are made with repetitive phase delays in discontinuous measurements. In another example, test position measurements are taken at each sample test position such that different respective phase delays are used at two or more different sample test positions. In another example, the CPM system is configured to direct an illumination pulse of a charged particle beam to a sample test location, apply an excitation stimulus to the sample test location, and receive one or more response signals. The CPM system includes a controller programmed to execute one or more methods disclosed herein.

Description

Technical Field

[0001] This disclosure generally relates to methods and systems for collecting multidimensional datasets. More specifically, this disclosure relates to methods and systems for collecting datasets generated by charged particle microscopy systems in different spatial and temporal dimensions. Background Technology

[0002] Transmission electron microscopy (TEM) systems can be used to study the response of a sample to an excitation stimulus by sequentially exciting and probing a region of the sample. For example, when the sample response corresponds to a reversible process, this process can be studied by repeating a sequential excitation-probe cycle at the test location of the sample. Changing the phase delay between the excitation and probe illumination allows for time-resolved measurements of the sample response at the probe location. Repeating such measurements over a region of the sample can further expand the collected dataset to cover the spatial dimensions of the probe region.

[0003] In ultrafast electron microscopy using repetitive stroboscopic measurements, the signal collected in each excitation-probe cycle can be very small. These small signals may require long exposures and / or repeated measurements at a given sample test location to accumulate useful measurements. Therefore, the total time required to collect a sufficient signal across the entire probe region of the sample can be excessively long and undesirable. In some examples, this long measurement duration may allow undesirable spatial drift of the probe region before the measurement is complete. In other examples, this long measurement duration may delay informing the user that data was collected under unavailable conditions, resulting in wasted time. Summary of the Invention

[0004] In a representative example, the method for collecting the dataset includes recording multiple data frames by performing test position measurements at each of multiple sample test locations. Performing test position measurements includes, for each sample test location, applying an excitation stimulus to the sample test location at an excitation time, guiding a charged particle beam to the sample test location at a probe time separated from the excitation time by a phase delay, and recording one or more response signals generated by the interaction between the charged particle beam and the sample. For at least one repeated sample test location, the method includes repeating the test position measurements with repeated phase delays in non-continuous test position measurements.

[0005] In another representative example, the method for collecting the dataset includes recording data frames by performing test position measurements at each of a plurality of sample test locations. Performing test position measurements includes, for each sample test location, applying an excitation stimulus to the sample test location at an excitation time, guiding a charged particle beam to the sample test location at a detection time separated from the excitation time by a phase delay, and recording one or more response signals generated by the interaction between the charged particle beam and the sample. Recording data frames includes performing test position measurements at each sample test location such that a single phase delay is used at each sample test location, and performing test position measurements with different corresponding phase delays at two or more different sample test locations among the plurality of sample test locations.

[0006] In another representative example, a charged particle microscopy (CPM) system includes a charged particle emitter configured to generate a beam of charged particles, an optical assembly configured to guide and focus illumination pulses of the charged particle beam onto a sample test location located on a sample plane, an excitation source configured to apply an excitation stimulus to the sample test location, a detector subassembly configured to receive one or more response signals generated by the interaction between the illumination pulse and the sample, and a controller. The controller includes a processor system and a memory containing instructions that, when executed by the processor system, cause the CPM system to record multiple data frames. Specifically, for each of the multiple data frames, a test location measurement is performed at each of the multiple sample test locations of the sample. The test location measurement includes: applying an excitation stimulus to the sample test location using the excitation source at a stimulation time point; guiding an illumination pulse to the sample test location at a detection time point separated by a phase delay from the stimulation time point; and recording one or more response signals generated by the interaction between the charged particle beam and the sample. The method includes repeating the test location measurement with repeated phase delays in non-continuous test location measurements for at least one repeated sample test location.

[0007] The above and other objects, features and advantages of the invention will become more apparent from the following detailed description, which is carried out with reference to the accompanying drawings. Attached Figure Description

[0008] Figure 1 It is a schematic representation of the CPM system in the example.

[0009] Figure 2 It is a feature representation of the measurement sequence that may be performed based on the example, used to record multiple data frames.

[0010] Figure 3 It is a feature representation of a measurement sequence that may be performed based on another example, used to record multiple data frames.

[0011] Figure 4 It is a feature representation of a measurement sequence that may be performed based on another example, used to record multiple data frames.

[0012] Figure 5 This is a flowchart describing the method for collecting a dataset based on an example.

[0013] Figure 6 It is a schematic representation of the features of a computing system that can be used to perform one or more methods of this disclosure, based on examples. Detailed Implementation

[0014] This disclosure relates to methods for collecting datasets, such as using charged particle microscopy (CPM) systems, like scanning electron microscopy (SEM) systems and / or scanning transmission electron microscopy (STEM) systems. In particular, the methods disclosed herein are capable of providing useful and / or actionable information more quickly than conventional methods. For example, such methods may be particularly advantageous when performing stroboscopic measurements in ultrafast electron microscopy analysis, which may require repeated collection of low-intensity signals across different spatial and / or temporal dimensions.

[0015] Transmission electron microscopy (TEM) systems can be used to study the response of a sample to an excitation stimulus by sequentially exciting and probing a region of the sample. For example, a test location on the sample can be excited with an excitation stimulus that is highly localized in time. Subsequent probing of the test location with an incident electron beam can generate multiple response signals, which can be collected to characterize the sample's response to the excitation stimulus. When the sample response corresponds to a reversible process, measurements can be repeated by varying the phase delay between the excitation stimulus and the electron beam probing incident on the sample to study the evolution of the sample response over time.

[0016] Such time-resolved studies can be performed in ultrafast regimes, where the duration of each excitation, the duration of sample illumination by the probe electron beam, and the phase delays separating these events must be controlled with extremely high precision. For example, excitation and / or illumination can occur on picosecond or femtosecond timescales and may be separated by phase delays ranging from nanoseconds to femtoseconds or even shorter. Therefore, the signal collected by the TEM system in each measurement may be very small, requiring repeated measurements at a given phase delay to accumulate sufficient data to produce statistically significant results. However, such repetition can result in a long total experimental time. For example, collecting sufficient data corresponding to a series of phase delays at a given test location may require a total exposure time of seconds or minutes.

[0017] When experiments are expanded to use TEM as a STEM probe for multiple (e.g., grid) test sites on the sample, the experimental duration can increase further. For example, performing a 100-millisecond stroboscopic experiment at each test site on a 512 x 512 grid of sample test sites would result in a total experimental time of over 7 hours. When each test site is probed sequentially in this manner, the characteristic representation (e.g., image) of the test sample region may only be available after the experiment is completed, during which time the experiment may be affected by various adverse conditions. For example, sample drift relative to the charged particle beam, damage to the sample from the charged particle beam, and / or the effects of suboptimal measurement parameters may only become apparent after the experiment is completed, resulting in wasted time if the collected data is ultimately found to be unavailable.

[0018] This disclosure relates to data collection methods that avoid such shortcomings. For example, such methods can provide users with indications of experimental status or health conditions during the experiment, and / or enable adjustments to various experimental parameters before the complete experiment is finished.

[0019] This disclosure generally pertains to examples of data collection methods combined with the operation of a CPM system. In particular, this disclosure describes various examples of CPM systems as electron microscopy systems, such as scanning electron microscopy (SEM) systems and / or STEM systems, where the charged particle beam is an electron beam. However, this is not a requirement for all examples, and the scope of this disclosure also includes the possibility that the methods of this disclosure can be applied to any other system, such as other charged particle microscopy systems and / or optical systems.

[0020] In this document, the term "experiment" is used to describe the operation of a microscope system relative to a sample, and is intended to refer to any applicable set or sequence of measurements recorded by varying one or more experimental parameters within their respective parameter ranges. This disclosure generally pertains to experiments including stroboscopic excitation and measurement at multiple sample test locations and examples under a series of phase delays. However, it should be understood that an experiment may also refer to treatments with more or fewer variations than these parameters. As examples, additional parameters that may vary during an experiment include the focal plane of the charged particle beam, the beam current of the charged particle beam, etc.

[0021] Figure 1 An example of a CPM system 100 that can be used in conjunction with the methods of this disclosure is shown. As described below, the CPM system 100 can be described as an example representing a SEM system and / or a STEM system. Figure 1As shown, the CPM system 100 includes a charged particle emitter 102 that generates a charged particle beam 104 and an optical assembly 106 that guides and / or focuses the charged particle beam 104 onto a sample test position 112 of a sample 110. In some examples, the charged particle emitter 102 is an electron emitter, and the charged particle beam 104 is an electron beam. The sample 110 and / or the sample test position 112 may be positioned on a sample plane 111. The optical assembly 106 may include and / or be various optical elements for manipulating the charged particle beam 104, such as illuminators and / or focusing systems, and may include any suitable combination of electrostatic lenses, magnetic lenses, deflectors, correctors, etc.

[0022] The CPM system 100 also includes a scanning coil 108 configured to scan the charged particle beam 104 relative to the sample 110 to guide the charged particle beam 104 to any of a variety of sample test positions 112 on the sample 110. The scanning coil 108 may also be referred to as a deflection coil 108. In this disclosure, when the charged particle beam 104 is incident on the sample test position 112 to generate the response signal described herein, the charged particle beam 104 can be described as illuminating the sample test position 112.

[0023] For simplicity, Figure 1 A portion of the charged particle beam 104 and the corresponding signal downstream of the sample 110 are shown in a continuous beam shape. However, it should be understood that this disclosure may relate to the charged particle beam 104 and / or the corresponding generated signals, which may be pulsed and / or otherwise discretized.

[0024] like Figure 1 As shown, the CPM system 100 includes an excitation source 120 configured to deliver and / or apply an excitation stimulus 122 to a sample test location 112. In some examples, the excitation source 120 includes and / or a laser source, and the excitation stimulus 122 is a laser beam and / or laser pulse generated by the excitation source 120. Figure 1 In one example, the CPM system 100 includes one or more waveguides 124 (e.g., optical fibers) configured and / or arranged to transmit excitation 122 to the sample test location 112.

[0025] In some examples, the excitation source 120 is configured to apply an excitation stimulus 122 to a region of sample 110 that includes multiple sample test sites 112. For example, the excitation stimulus 122 may be applied to a region of sample 110 that includes multiple or all of the sample test sites 112 to be measured in a given experiment. Alternatively, the excitation stimulus 122 may be applied to a portion of sample 110 that does not include one or more of the sample test sites 112 to be measured. Thus, in various examples, the CPM system 100 may be configured to scan the charged particle beam 104 relative to sample 110 as the experiment moves to a new sample test site 112, without scanning the excitation stimulus 122 relative to sample 110 in a similar manner.

[0026] Each sample test location 112 can be defined in various ways. For example, each sample test location 112 can refer to a local location or point on the sample 110 (e.g., on the upper surface of the sample 110). In such an example, the sample test area can include a plurality of spaced-apart sample test locations 112 arranged in a grid. In such an example, the charged particle beam 104 can be focused onto each sample test location 112 and can be incident on the sample 110 with a beam width encompassing the target sample test location 112. As another example, each sample test location 112 can refer to a two-dimensional region on the sample 110 (e.g., on the upper surface of the sample 110) such that adjacent sample test locations 112 are directly adjacent to each other. In such an example, the charged particle beam 104 can be focused onto each sample test location 112, and the beam width is contained within the sample test location 112. In all these examples, the sample test location 112 can also, or alternatively, be referred to as pixel 112 and / or sample pixel 112.

[0027] While this disclosure generally relates to the example of the excitation stimulus 122 being a pulsed laser beam, not all examples require this. In other examples, the excitation source 120 may also be configured, or alternatively, to deliver any other suitable excitation to the sample test position 112. As an example, the excitation stimulus 122 may include and / or be a mechanical stimulus, a thermal stimulus, an electromagnetic stimulus (e.g., non-laser light), etc.

[0028] When the sample test location 112 is illuminated by the charged particle beam 104, the sample 110 can generate various response signals, which can be detected and / or measured in various ways. The CPM system 100 may include a detector sub-assembly 130, which includes one or more detectors for measuring such response signals. For example, as Figure 1As shown, detector subassembly 130 may include a bright-field electron detector 132 configured to record a bright-field signal 134 emitted by sample 110, an annular bright-field electron detector (e.g., bright-field electron detector 132) configured to record annular bright-field signals (e.g., at least a portion of bright-field signals 134) emitted by sample 110, an annular dark-field electron detector 136 configured to record annular dark-field signals 138 emitted by sample 110, and / or a high-angle annular dark-field electron detector 140 configured to record high-angle annular dark-field signals 142 emitted by sample 110. Furthermore, or alternatively, detector subassembly 130 may include an electron energy loss spectroscopy module 144 configured to record an electron energy loss spectroscopy signal 146. In all these examples, the signal recorded by each detector may include and / or be electrons emitted downstream from sample 110 due to the interaction between charged particle beam 104 and sample test position 112.

[0029] Furthermore, or alternatively, the detector sub-assembly 130 may include one or more electronic detectors configured to record information about the spatial distribution of electrons emitted from the sample 110. For example, such as Figure 1 As shown, detector subassembly 130 may include a pixelated electron detector 148 comprising a plurality of (e.g., grid) detector pixels. Such a pixelated electron detector 148 can be configured to create a two-dimensional record of electrons emitted from sample 110, such as an image of the spatial distribution of electrons. In some examples, the pixels of the pixelated electron detector 148 can be configured to record the arrival time of electrons incident on the pixels, the energy of electrons incident on the pixels, and / or the total number of electrons incident on each pixel within a given time unit. In some examples, the pixelated electron detector 148 can be configured to record diffraction signals 150 (e.g., diffraction patterns) emitted by sample 110. Specifically, in Figure 1 In the example, diffraction signal 150 represents a convergent-beam electron diffraction signal. Alternatively, the pixelated electron detector 148 can be configured to record any other suitable form of electronic signal emitted from the sample 110.

[0030] As another example, detector subassembly 130 may include a segmented electronic detector 152 having multiple detector segments. In such an example, the segmented electronic detector 152 may be configured to record a differential phase contrast signal 154 emitted from sample 110.

[0031] The detector subassembly 130 may also include one or more detectors to detect signals emitted upstream due to the interaction between the charged particle beam 104 and the sample test site 112. The use of such detectors may correspond to examples of CPM system 100 including and / or SEM and / or examples of CPM system 100 including and / or STEM. For example, as... Figure 1 As shown, the detector sub-assembly 130 may include a backscattered electron detector 172 configured to record the backscattered electron signal 174 emitted by the sample 110 and / or a secondary electron detector 176 configured to detect the backscattered electron signal 178 emitted by the sample 110.

[0032] In some examples, such as Figure 1 As shown, the signal emitted from sample 110 may also include, or alternatively include, electromagnetic radiation, such as X-ray signal 158. Therefore, detector subassembly 130 may include X-ray detector 156 configured to detect X-ray signal 158. X-ray signal 158 may include and / or energy-dispersive X-ray spectral signals.

[0033] The various detectors and components of detector subassembly 130 are provided as non-limiting examples, and it should be understood that CPM system 100 may include more or fewer detector components than discussed herein. It should also be understood that CPM system 100 may include and / or use any suitable combination of such detector components.

[0034] like Figure 1 As shown, the CPM system 100 may also include a controller 160 configured and / or programmed to operate various components of the CPM system 100 described herein. For example, the controller 160 may include a processor system 162 and a memory 164, the memory 164 storing instructions that, when executed by the processor system 162, cause the controller 160 and / or the CPM system 100 to perform any applicable methods disclosed herein. The CPM system 100 may also include a user input device 166 for receiving input from a user, and / or a display device 168 for visually displaying information to the user.

[0035] The CPM system 100 can be configured to control the timing of the incident of the charged particle beam 104 and the excitation stimulus 122 on the sample test position 112 in various ways. The time interval between the incident time of the excitation stimulus 122 and the time when the illuminated charged particle beam 104 is incident on the sample test position 112 may be referred to herein as phase delay and / or time delay.

[0036] As described herein, the excitation stimulus 122 and the charged particle beam 104 can each be incident on the sample test position 112 for a very short but non-zero duration. For example, the excitation stimulus 122 may include and / or a laser pulse, and the charged particle beam 104 may be incident on the sample test position 112 in the form of pulses and / or pulse trains of charged particles (e.g., electrons). Therefore, the excitation stimulus 122 (and / or a portion thereof) incident on the sample test position 112 for a given measurement may also be referred to herein as excitation pulse 122. Similarly, a portion of the charged particle beam 104 incident on the sample test position 112 for a given measurement may be referred to as illumination pulse 105.

[0037] In some examples, the duration of each excitation stimulus 122 incident on the sample 110 is less than 1 picosecond (ps). Additionally, or alternatively, in some examples, the duration of each illumination pulse 105 incident on the sample 110 is less than 1 picosecond. In such examples, the excitation and / or illumination of the sample test location 112 can be described as occurring on a femtosecond timescale.

[0038] The phase delay separating the excitation stimulus 122 and the incident charged particle beam 104 can be defined in various ways. For example, the phase delay can be defined as the time delay between the respective portions of the excitation pulse 122 and the illumination pulse 105 incident on the sample test position 112. As a more specific example, the phase delay can correspond to the time interval measured relative to the time when the excitation pulse 122 and the illumination pulse 105 have maximum intensity at the sample test position 112. Furthermore, or alternatively, the phase delay can correspond to the time delay measured relative to the midpoint of the time interval between the respective incident of the excitation pulse 122 and the illumination pulse 105 on the sample test position 112. As an additional example, the phase delay can correspond to the time interval measured relative to the time when the excitation pulse 122 first incident on the sample test position 112, the time when the excitation pulse 122 has maximum intensity at the sample test position 112, and / or the time when the excitation pulse 122 last incident on the sample test position 112. In addition, or alternatively, the phase delay may correspond to the time interval measured relative to the time when the illumination pulse 105 first incident on the sample test position 112, the midpoint of the time interval between the illumination pulse 105 incident on the sample test position 112, and / or the time when the illumination pulse 105 last incident on the sample test position 112.

[0039] The CPM system 100 can be configured to generate illumination pulses 105 of charged particle beams 104 in various ways. For example, as Figure 1 As shown, the CPM system 100 may include a radio frequency (RF) cavity 170 configured to generate a pulsed charged particle beam through the interaction between one or more RF standing waves and a passing charged particle beam (e.g., charged particle beam 104). Although Figure 1 Although not specifically stated in the text, it should be understood that the RF cavity 170 may be located on the cross plane of the charged particle beam 104 downstream of the charged particle emitter 102.

[0040] In some examples, the RF cavity 170 may include input and output apertures that allow a charged particle beam 104 to pass through the RF cavity 170, causing the charged particle beam to interact with an RF wave established within the cavity. In other examples, the "cut aperture" may be positioned remotely from the RF cavity 170. In such examples, the charged particle beam 104 may interact with the RF wave within the RF cavity 170, producing a periodic deflection of the charged particle beam 104, thereby creating an illumination pulse 105 at the cut aperture. In all such examples, the spatial and / or temporal interaction between the aperture, the RF standing wave, and the charged particle beam 104 can form the illumination pulse 105. In such examples, the RF wave can effectively move the charged particle beam across the output aperture, thereby emitting and directing a pulsed electron train to the sample 110. Examples of RF cavities that can be used in conjunction with the CPM system 100 are disclosed in U.S. Patent No. 9,048,060, the entire contents of which are incorporated herein by reference.

[0041] As another example, illumination pulse 105 can be generated at charged particle emitter 102. For example, as Figure 1 As shown, a portion of the laser pulse generated by excitation source 120 can be transmitted to charged particle emitter 102 in the form of emitter pulse 126 (e.g., via waveguide 124). Emitter pulse 126 can then be incident on a portion of charged particle emitter 102 to stimulate the emission of a charged particle beam 104 in the form of illumination pulse 105. Thus, in such examples, generating a series of excitation pulses 122 using excitation source 120 can be operated to generate a corresponding series of illumination pulses 105 using charged particle emitter 102. In such examples, charged particle emitter 102 may also be referred to as photoelectron-induced charged particle emitter 102. In some such examples, CPM system 100 also includes a variable illumination delay line 128 connected in series with waveguide 124 between excitation source 120 and charged particle emitter 102, configured to delay the transmission of illumination pulse 105 to a variable degree. Therefore, in such examples, changing the delay generated by the variable illumination delay line 128 (e.g., using the controller 160) can be operated to change the phase delay at the sample test position 112.

[0042] As another example, the pulse of the charged particle beam 104 can be achieved by fast beam blanking, for example using the beam blanker of the optical component 106.

[0043] In all such examples, controller 160 may at least partially control the generation and / or pulses of the charged particle beam 104. For example, controller 160 may directly control the operation of charged particle emitter 102 to generate a continuous charged particle beam 104, and / or may directly control the operation of RF cavity 170 to generate illumination pulses 105. As another example, controller 160 may control the operation of an excitation source to generate emitter pulses 126 for use in conjunction with photoelectron-induced charged particle emitter 102.

[0044] Although Figure 1 An example is shown where an RF cavity 170 acts on an input charged particle beam 104 to generate an illumination pulse 105; however, it should be understood that the illumination pulse 105 downstream of the RF cavity 170 can also be referred to as the charged particle beam 104 (individually and / or collectively). Similarly, in an example where the charged particle emitter 102 emits a charged particle beam 104 in the form of a series of illumination pulses 105, such illumination pulses 105 can be referred to as the charged particle beam 104 (individually and / or collectively). Furthermore, although Figure 1 An example of an excitation stimulus 122 being an excitation pulse 122 is shown, but it should be understood that an excitation pulse 122 may also refer to a portion of an excitation stimulus that includes multiple such pulses.

[0045] In some examples, the pulses of the charged particle beam 104 are synchronized with the scanning of the charged particle beam 104 (and / or illumination pulses 105) relative to the sample 110. As described in more detail herein, this synchronization can result in each sample test location 112 receiving an equal number of illumination pulses 105.

[0046] The CPM system 100 can be configured to control and / or measure phase delay in various ways. For example, as Figure 1 As shown, the CPM system 100 may include a variable excitation delay line 129, which is connected in series with a waveguide 124 between the excitation source 120 and the sample 110, and configured to delay the transmission of the excitation pulse 122 to a variable degree. Therefore, in such an example, changing the delay generated by the variable excitation delay line 129 (e.g., using a controller 160) can be operated to change the phase delay at the sample test position 112.

[0047] Furthermore, or alternatively, the phase delay can be at least partially controlled by synchronizing the generation of the excitation pulse 122 with the operation of the RF cavity 170. For example, the controller 160 can be programmed and / or configured to coordinate the generation of the excitation pulse 122 by the excitation source 120 and the generation of the illumination pulse 105 by the RF cavity 170, such that the illumination pulse 105 is delayed relative to the excitation pulse 122 with a controlled phase delay.

[0048] While this disclosure generally relates to examples of using discrete illumination pulses 105 to strobe probe sample 110, not all examples require this. For example, as described above, a pixelated electron detector 148 (and / or another component of detector sub-assembly 130) can be configured to record the arrival time of electrons. In such examples, a beam of charged particles 104 can be guided to sample test location 112 within an illumination time interval to generate a response signal within the corresponding time interval. A portion of the response signal delayed by a given phase relative to the excitation stimulus 122 can then be identified and recorded as the response signal corresponding to that phase delay. This method allows for high-precision identification of the desired response signal. However, in some examples, the time required to reset the detector for subsequent measurements may be relatively long.

[0049] In this disclosure, references to using a specific phase delay for test measurements, such as using appropriately timed illumination pulses, can be understood to include examples of extracting measurement signals from extended measurement durations as described above. That is, while this disclosure generally relates to examples of controlling phase delays by generating illumination pulses, the principles of this disclosure can also be applied to examples where the phase delay corresponds to selected portions of a continuous timestamp record.

[0050] The full dataset generated experimentally according to this disclosure can be described as a multidimensional dataset based on the number of parameters and / or dimensions characterizing each data point. For example, a given data point in the dataset can be characterized by two spatial dimensions corresponding to the sample test location 112, a time dimension of the phase delay used when measuring the data point, and the number of dimensions characterizing the measurement of the response signal.

[0051] As a more specific example, when the recorded response signal is a measurement corresponding to a two-dimensional diffraction pattern at each sample test position 112 (e.g., recorded by a pixelated electron detector 148), the resulting dataset can be described as a five-dimensional dataset. If such a dataset is extended to also record high-angle annular dark-field signals using a high-angle annular dark-field electron detector 140, the resulting dataset can be described as a six-dimensional dataset. Therefore, in various examples, the resulting dataset can be described as having 3+N dimensions, where N represents the total dimension of the recorded response signal.

[0052] Generally, performing time-resolved experiments on a region of sample 110 using a CPM system 100 may include selecting and / or coordinating multiple variables to be varied during the experiment. Examples of such variables include the location (e.g., coordinates) of the sample test location 112 detected at each test location measurement, the number of test location measurements (and / or their sequence) performed at each sample test location 112, and the phase delay at each test location measurement.

[0053] In some previous examples, experiments could be performed by taking measurements at a series of test locations with multiple different phase delays at each sample test location before moving on to the next. In this “pixel-based” approach, the entire experiment might be complete once all sample test locations have been visited, as a complete time-resolved dataset has been collected at each location. However, this approach can effectively mask and / or delay various indications of experimental progress until the experiment is complete, at which point various errors in the experiment may finally become apparent. For example, if the sample drifts significantly relative to the charged particle beam during the experiment, or if the selected sample test area contains defects, the generated dataset revealed after a long experiment may be suboptimal or unusable. Similarly, repeated measurements at each sample test location can lead to increased damage to the sample from the charged particle beam, which may not become apparent until long after the experiment is complete. As another example, if various suboptimal experimental parameters (e.g., beam current, focal plane, degree of optical aberration, etc.) are used, the detection or correction of these problems may be delayed until the entire experiment is finished.

[0054] In contrast, the method disclosed herein can lead to an experimental procedure that generates useful and / or actionable information before the full experiment is completed. Therefore, such methods can allow for the acquisition of useful datasets without requiring iterative execution of long-running experiments. Such methods can also allow for the generation of preliminary datasets and / or feature representations of samples before the complete experimental dataset is collected.

[0055] Figure 2 This indicates an example of a measurement sequence that can be executed to generate a dataset corresponding to the sample region. Figure 2 A series of data frames 200a-200f are shown, which can be recorded to form at least a portion of a dataset. Each data frame 200a-200f includes data corresponding to each of the multiple sample detection locations 202, and the description of each detection location can be in coordinates. ,in .

[0056] like Figure 2 As shown, phase delay can be used This characterizes each sample detection position 202 in each data frame 200a-200f for corresponding test measurements. (Phase delay is also mentioned.) Through index To identify, thus enabling the complete phase delay set Range across minimum phase delay To the maximum phase delay In this way, the value of the exponent T can be understood as representing the resolution by which phase delays within that range are sampled. To give a simplified example, consider a series of phase delays characterized by a minimum phase delay of 0 s and a maximum phase delay of 100 ps. The phase delay to be sampled can include .

[0057] In various examples, it may be necessary to configure a set of phase delays. This includes phase delay corresponding to baseline test measurements, such as determining whether the sample exhibits spatial and / or temporal drift (e.g., temporal instability) during the experiment.

[0058] For example, it may be necessary to configure a phase delay set. This includes one or more negative phase delays (i.e., corresponding to the illumination pulse arriving before the excitation pulse) to provide such baseline test measurements. Alternatively, test measurements can be performed with zero delay between the excitation and illumination pulses; in some examples, this can represent such baseline test measurements. In some examples, the baseline test measurement value may correspond to the first phase delay of the test (e.g., ...). However, this is not necessary.

[0059] It should be understood that the phase delay set It may include any set of phase delays, including sets that do not include negative and / or zero phase delays.

[0060] In various examples, it may be necessary to configure a set of phase delays. Make the phase delay uniformly distributed; for example, make It is a constant .

[0061] In particular, probing a linear phase delay series in this manner may be the most straightforward and practical in implementation, and / or provide a uniformly distributed sampling of the time intervals of interest. However, this is not a requirement for all examples. For instance, the scope of this disclosure also includes situations where the phase delay can be non-linearly distributed. As a more specific example, it may be necessary to configure a set of phase delays. It exhibits a logarithmic distribution, exploring dynamics around a range of phase delay of interest (e.g., near-zero phase delay), and has higher resolution compared to longer phase delays far from the range of interest.

[0062] In addition, or as an alternative, if the time scale of the feature of interest is initially unknown, configuring the phase delay set to be logarithmically distributed can facilitate the exploration of a wide range of time scales.

[0063] This disclosure generally relates to a set of phase delays. Examples of sequential testing (e.g., testing in order of increasing or decreasing values) are possible, but not all examples require this. For instance, in some examples, it may be necessary to probe the phase delay in a non-sequential manner, such as probing the phase delay values ​​in a random or pseudo-random order. In particular, this configuration may help distinguish the actual dynamics of the sample response from drifts in the signal that are unrelated to it, which could otherwise be unintentionally associated with the phase delay values ​​tested sequentially.

[0064] exist Figure 2 In the example, multiple data frames 200a-200f are recorded sequentially, as shown by the flow arrows. The ellipsis in the selected flow arrows indicates that additional data frames may be recorded between the shown data frames. For example, any number of data frames similar to data frames 200a and 200b may be recorded between the recording of data frames 200a and 200b.

[0065] For each data frame 200a-200f, by measuring the test position at each sample test position 202, an excitation stimulus is applied to the sample test position during the excitation time (e.g., ...). Figure 1 The excitation pulse 122), and during the detection time, a beam of charged particles (e.g., Figure 1 The illumination pulse 105 is directed to the sample test position. The detection time and excitation time are separated by a phase delay corresponding to (e.g., assigned to) the sample test position being tested and the data frame being recorded. One or more response signals generated by the interaction between the charged particle beam and the sample are then recorded, for example using... Figure 1 One or more components of the detector sub-component 130.

[0066] In some examples, one or more data frames 200a-200f can be recorded by performing repeated consecutive test position measurements at each sample test position (e.g., using multiple excitation pulses and / or multiple illumination pulses) before continuing to the next sample test position.

[0067] In other examples, one or more data frames 200a-200f can be recorded by performing only a single test position measurement at each sample test position (e.g., using a single excitation pulse and a single illumination pulse) before continuing to the next sample test position. In such examples, consecutive test position measurements can be performed at different sample test positions for all test position measurements performed in a given data frame.

[0068] In all examples, the number of consecutive test position measurements performed at each sample test position can be determined and / or controlled, at least in part, by synchronizing the scanning of the charged particle beam on the sample with the generation of excitation pulses and / or illumination pulses. For example, such synchronization can result in each sample test position receiving the same number (e.g., one or more) of excitation pulse / illumination pulse pairs.

[0069] exist Figure 2 In the example, frame 200a uses the same (single) phase delay at each sampling test location 202. Recording is performed. Specifically, in this example, multiple such data frames are recorded with the same phase delay. Data is recorded sequentially at each sampling test location 202, where data frame 200a represents the first data frame in the sequence and data frame 200b represents the last data frame in the sequence.

[0070] Referring to the data frame sequence including data frames 200a and 200b, each sample test position in each data frame of this sequence can be described as a repeating sample test position. Specifically, in this disclosure, the term "repeated sample test position" refers to any sample test position measured using the same repeating phase delay in different, non-continuous test position measurements. In this example, non-continuous test position measurements correspond to test position measurements performed in different data frames.

[0071] However, it should be understood that the definition of repeated sample test positions does not preclude the possibility that such sample test positions may also use the same repeated phase delay in consecutive test position measurements. This could be the case, for example, when multiple illumination pulses are applied to each sample test position within a given data frame before continuing to the next sample test position in the data frame.

[0072] Data frames 200a-200b (and Figure 2 (Any intermediate data frames of similar records not shown in the document) may be described herein as representing phase-redundant data frames. Specifically, as used herein, the term "phase-redundant data frame" may refer to a set of data frames in which, for each sample test position, the test position is measured with the same phase delay in each phase-redundant data frame. For example, taking data frames 200a and 200b as examples, in each data frame, the sampled test position... Using the same phase delay, the test location is sampled in each data frame. The same phase delay is used at each sampling test location, and so on, applying to all sampling test locations. In other examples, as discussed in more detail below, a phase-redundant data frame set may include data frames using different phase delays at different sample test locations within the same data frame. Figure 2In the example, the sequence of phase-redundant data frames including data frames 200a and 200b can be referred to as the first group of 210 phase-redundant data frames.

[0073] After recording data frame 200b, data frame 200c can be recorded, in which the same phase delay is used at each sample test position 202. Multiple such data frames can be recorded sequentially, using the same phase delay at each sample test location. Data frame 200c represents the first data frame in this sequence, and data frame 200d represents the last data frame in this sequence. Data frames 200c-200d (and...) Figure 2 (Any intermediate data frames of similar records not shown in the text) can therefore also be described as representing a set of phase-redundant data frames. In particular, in this example, the sequence of phase-redundant data frames including data frames 200c and 200d can be referred to as the second set of 220 phase-redundant data frames.

[0074] This sequence can be tailored to each phase delay to be considered. Repeat execution. For example... Figure 2 As shown, data frames 200e and 200f respectively represent the use of the same final phase delay. The first and last data frames recorded. Data frames 200e-200f (and any intermediate data frames not shown in Figure 2) can therefore also be described as representing the phase redundancy data frames of the third group 230. Figure 2 In the example, the third group of 230 phase redundancy data frames represents the last group among the T groups of different phase redundancy data frames recorded.

[0075] The number of phase-redundant data frames recorded for each test phase delay can be at least partially based on the number of test position measurements performed at each sample test position in each data frame. For example, for a given sample test position and a given phase delay to be tested, a complete characterization of the sample test position at that phase delay may require providing at least one threshold illumination flux to the sample test position via illumination pulses. In other words, the response signal generated by each illumination pulse may be too weak to be detected with a usable signal-to-noise ratio (SNR), so a usable signal can only be obtained by generating a series of response signals using a series of illumination pulses until the total measurement signal has a sufficient SNR. The threshold illumination flux can represent the total amount of illumination that generates such a total measurement signal.

[0076] Threshold illumination flux can be distributed across different test location measurements in various ways. For example, increasing the number of test location measurements performed at each sample test location in a given data frame can allow for a corresponding reduction in the number of phase-redundant data frames that need to be recorded (and vice versa).

[0077] Recording a relatively large number of phase-redundant data frames, where relatively few test-position measurements are performed at each sample test location (e.g., a single test measurement), can result in each data frame being recorded in a relatively short time. In some examples, while each data frame may not contain enough data to fully characterize the sample scan area (e.g., with sufficient SNR), each data frame (or a small set thereof) may still contain enough data to provide valuable information about the experimental state.

[0078] For example, Figure 2 One or more of any of the data frames 200a-200f represented herein can be analyzed to generate intermediate information about the experimental state. Such intermediate information includes information about the spatial drift of the sample during the experiment, whether the current of the charged particle beam is too low to produce a meaningful response signal, whether the current is too high to potentially damage the sample, whether the charged particle beam is correctly focused on the sample, and whether the scanned area of ​​the sample is suitable for testing. In some examples, two or more data frames can be combined (e.g., by summing and / or integrating the respective measured response signals at each sample test location) to obtain such intermediate information. For example, two or more data frames can be combined (e.g., by summing and / or integrating the corresponding measured response signals at each sample test location) to generate such intermediate information. As another example, two or more non-phase redundant data frames can be combined to generate intermediate information about other aspects of sample behavior, such as sample drift. In all such examples, the data frame analyzed to generate such intermediate information can be referred to as a test data frame.

[0079] In some examples, intermediate information may be included in, represented as, or derived from intermediate feature representations. For example, one or more data frames may be recorded, rendered, and / or displayed as images representing the sample scan area. Analysis of such images may yield intermediate information. For example, analysis of such images may yield information about sample spatial drift, information about damaged areas of the sample, and / or information about whether different experimental parameters (e.g., beam current, focus position, etc.) are preferred.

[0080] In various examples, intermediate feature representations can be described as images even if they are not rendered and / or displayed graphically. For example, intermediate feature representations can be recorded and / or stored as data files (e.g., image data files) and analyzed by a computer processor (e.g., controller 160). In other examples, intermediate feature representations can be displayed graphically to a user, who can then derive meaningful information from the displayed feature representations and adjust experiments as needed (e.g., using...). Figure 1 User input device 166).

[0081] In one example, if analysis of one or more test data frames indicates the aforementioned deficiencies in the experiment, the experimental parameters can be adjusted accordingly before completing the experiment. In some examples, such adjustments can be at least partially responsive to user input. For example, intermediate feature representations can be displayed to the user (e.g., using...). Figure 1 (Display device 168), the user can adjust one or more experimental parameters based on intermediate feature expressions (e.g., using...) Figure 1 (User input device 166). Furthermore, or alternatively, such adjustments can be performed automatically, at least partially, by the controller 160.

[0082] Data contained in a set of phase-redundant data frames can be combined and / or summarized to produce an enhanced response signal measurement corresponding to each repeatable sample test location. For example, for each sample test location, the recorded response signals measured in each data frame of a given set of phase-redundant data frames can collectively form a summary dataset corresponding to the repeating phase delay used in each such measurement. The summary dataset can then be shrunk by summing and / or integrating the individually recorded response signals to produce summary data points corresponding to the selected sample test location and the corresponding phase delay. In this way, the summary data points can provide an improved SNR relative to the individually recorded response signals represented by each individual data frame. The summary data points can be described as “shrinking” relative to the summary dataset because multiple data points in the summary dataset are compressed into a single corresponding summary data point. The summary data points can include and / or refer to data of any dimension, such as (one-dimensional) intensity measurements, (two-dimensional) diffraction patterns, etc.

[0083] exist Figure 2 In the examples, various combinations of data frames can also be described as representing a set of phase-variable data frames. Specifically, as used herein, the term "phase-variable data frame" can refer to a set of data frames in which, for each sample test location, the test location is measured with a different phase delay in each phase-variable data frame. For example, refer to Figure 2 The phase delay used at each sample test position in data frame 200a is different from the phase delay used at the same sample test position in data frame 200c. Similarly, the phase delay used at each sample test position in data frame 200c is different from the phase delay used at the same sample test position in data frame 200e. Therefore, data frames 200a, 200c, and 200e can be described as representing a set of phase-change data frames.

[0084] Figure 2An example can therefore be described as collecting a cube by recording multiple phase-redundant data frame sequences, each sequence corresponding to a different phase delay used at each sample test location. Each phase-redundant data frame sequence can then be aggregated to produce aggregated data points corresponding to each sample test location and the phase delay used in each data frame. By repeating this process for each phase-redundant data frame sequence, each sample test location can be associated with aggregated data points corresponding to each phase delay within the tested phase delay range.

[0085] exist Figure 2 In the example, during the recording of each data frame 200a-200f, each sample test position 202 represented in the data frame is tested using the same phase delay. However, this is not a requirement for all examples. For example, Figure 3 Another example of a measurement sequence that can be executed to generate a dataset corresponding to a sample region is shown. Figure 3 A series of data frames 300a-300f are shown that can be recorded to form at least a portion of a dataset. Each data frame 300a-300f includes data corresponding to each of a plurality of sample detection locations 302, and the description of each detection location can be in coordinates. ,in .

[0086] Similar to Figure 2 Multiple data frames 300a-300f include the first group of 310 phase redundant data frames (including data frames 300a and 300b), the second group of 320 phase redundant data frames (including data frames 300c and 300d), and the third group of 330 phase redundant data frames (including data frames 300e and 300f).

[0087] exist Figure 3 In the example, each data frame 300a-300f includes a sample test position 302 for test position measurement using different phase delays. Specifically, in this example, each data frame represents a test position measurement using two different phase delays. Within each data frame 300a-300f, ,in If the number is odd, it can be described as forming the first subset of locations, and the sample detection locations. ,in If the number is even, it can be described as forming a subset of the second position. (For simplicity, this example will use indexing.) It is considered an even number; however, this is not required.

[0088] In each data frame 300a-300f, each sample test position in the first location subset is measured with a first phase delay, and each sample test position in the second location subset is measured with a second phase delay. Within each group of phase-redundant data frames (e.g., the first group 310, the second group 320, or the third group 330), the first phase delay is the same for each data frame in that group, and the second phase delay is also the same for each data frame in that group.

[0089] However, by comparing data frames from different phase-redundant data frame sets, it can be seen that the first (or second) phase delay of one data frame differs from the first (or second) phase delay of another data frame. In this way, selected data frames from different phase-redundant data frame sets can be described as forming a phase-variable data frame set as described above.

[0090] exist Figure 3 In the example, the sample test locations of a first subset of locations in each data frame can be described as interleaved with those of a second subset of locations. A dataset captured in any such data frame (or a summary of data points from a set of phase-redundant data frames) can be described as similar to a dataset collected in two different data frames, each recorded at each sample test location with a single phase delay and half the spatial resolution. In this way, using different phase delays at different sample test locations (or subsets of sample test locations) can produce information corresponding to multiple different phase delays in a single scan of the sample region, at the cost of reduced spatial resolution. For example, it might be desirable to test multiple different phase delays in a rapid manner to determine whether these phase delays are suitable for probing dynamic processes before performing a full experiment. In such an example, with Figure 3 The spatial resolution reduction that may result from interleaved phase delays may be irrelevant to the information obtained in the early stages of the experiment for confirming and / or calibrating experimental parameters.

[0091] Although Figure 3 An example is shown where the first and second location subsets are staggered, but this is not required. In other examples, the first and second location subsets can correspond to any other non-overlapping subsets of the sample test locations. Furthermore, or alternatively, the sample test locations can include any other suitable number (e.g., three, four, or more) of test location subsets and their corresponding phase delays. Test location subsets can contain the same number of sample test locations or different numbers of sample test locations.

[0092] In various examples, the way each sample test position is associated with the corresponding phase delay in a given data frame can be described as a phase mapping representing the data frame. Thus, for example, each data frame in a given set of phase-redundant data frames can be described as having the same phase mapping. Similarly, each data frame in a given set of phase-variable data frames can be described as having a different phase mapping.

[0093] Figure 4 Another example of a measurement sequence that can be executed to generate a dataset corresponding to a sample region is shown. Figure 4 A series of data frames 400a-400d are shown, which can be recorded to form at least a portion of a dataset. Each data frame 400a-400d includes data corresponding to each of a plurality of sample detection locations 402, and the description of each detection location can be in coordinates. ,in .

[0094] exist Figure 4 In the example, each data frame 400a-400d has the same phase mapping. Therefore, data frames 400a-400d can be described as representing a set of phase-redundant data frames. Furthermore, in this example, the phase mapping is characterized by using a different phase delay at each sample test position 402.

[0095] because Figure 4 In the example, each sample test location is tested with only a single phase delay, and the generated dataset does not contain [databases with specific parameters]. Figure 2-3 The same information is used in the example, where each sample test location is tested with multiple different phase delays. However, with Figure 4 Capturing one or more data frames in a manner that allows for testing a wide range of phase delays over a relatively short period can still be valuable, for example, by allowing for testing of a broad range of phase delays over a relatively short time period. For instance, the range of phase delays used in each data frame 400a-400d may be wide enough to cover dynamic processes occurring at unknown timescales. In such examples, one or more (individually and / or collectively) of data frames 400a-400d can provide an indication of characteristic timescales that can be probed more precisely in subsequent experiments.

[0096] In another example, Figure 4The measurement sequence depicted can be varied by altering the phase mapping of one or more data frames 400a-400d, such that each sample test location 402 is tested with different phase delays in two or more different data frames. For example, the phase mapping can be adjusted such that each data frame represents the same set of phase delays distributed differently between sample test locations to produce phase-variable data frames. In such examples, recording a sufficient number of these phase-variable data frames (and / or a sufficient number of phase-redundant data frames for each individual phase mapping) can generate enough data to form a complete experimental dataset. In some examples, the set of data frames measured with the same phase delay may differ for each sample test location and / or for each phase delay. Therefore, it may often be desirable to assign a metadata tag to each recorded response signal, indicating the data frame, sample test location, and / or phase delay corresponding to the recorded response signal. This allows for the identification of all recorded response signals corresponding to a given sample test location and / or a given phase delay, regardless of the sequence in which the corresponding measurements were performed.

[0097] exist Figure 2-4 In the examples provided, flow arrows are given to indicate examples of sequences in which the depicted data frames might be recorded. However, it should be understood that such sequences are not required, and an equivalent dataset can be obtained by recording data frames in any other sequence. Therefore, unless otherwise stated, references to recording multiple data frames do not require such data frames to be recorded in a consecutive sequence.

[0098] Figure 2-4 Typically, an example is described where test position measurements are taken for each sample test location in each data frame. However, this is not a requirement for all examples. For instance, the scope of this disclosure also includes one or more data frames that can be recorded in a “sparse” manner, wherein test position measurements are taken for some, but not all, sample test locations. In such examples, multiple data frames may be recorded such that test position measurements are taken for each sample test location in some, but not all, data frames.

[0099] Furthermore, or alternatively, the set of sample test locations for which sample test location measurements are performed in at least one data frame may be sparsely distributed within the sample region. In other words, in some examples, the set of sample test locations may be selected such that no test location measurements are performed within the sample regions adjacent to and / or between the selected sample test locations.

[0100] In various examples, phase delay can similarly be probed in a sparse manner. For example, although Figure 2-4Examples of sequentially probing phase delay are typically described (e.g., between adjacent sample test positions within a given data frame and / or between the same sample test positions in sequentially recorded data frames), but this is not a requirement for all examples. In other examples, as described above, phase delay can be probing in a random or pseudo-random sequence within a given data frame and / or between sequentially recorded data frames.

[0101] Figure 5 This is a flowchart illustrating 500 examples of methods for collecting datasets. Unless otherwise stated, each component, feature, attribute, etc., described in this document's referenced method 500 is to be understood as referring to and / or encompassing the methods described herein. Figure 1-4 The discussion covers similarly named components, features, attributes, etc. Method 500 and / or any suitable portion thereof can be executed by a computer processor system, for example, by... Figure 1 The controller 160 is executed by one or more processors.

[0102] like Figure 5 As shown, method 500 includes recording one or more data frames at 510. For each of the one or more data frames, recording the data frame at 510 may include performing a test position measurement at 516 for each of the multiple sample test positions.

[0103] For each sample test location, measuring the test location at 516 may include applying an excitation stimulus to the sample test location at excitation time 522 and guiding a charged particle beam to the sample test location at probe time 524. The probe time is separated from the excitation time by a phase delay. Measuring the test location at 516 for each sample test location may also include recording one or more response signals generated at 526 by the interaction between the charged particle beam and the sample. The charged particle beam may include and / or be a charged particle beam, such as... Figure 1 The charged particle beam 104 generated by the CPM system 100.

[0104] Performing multiple test location measurements at 516 can be done in various ways. In some examples, performing test location measurements at 516 results in multiple sample test locations forming a two-dimensional location grid on the sample.

[0105] In some examples, the test position measurement at 516 is synchronized with the scanning of the charged particle beam relative to the sample. Specifically, in some examples, method 500 includes scanning the charged particle beam relative to the sample to guide the charged particle beam to each sample test position, and synchronizing the scanning of the charged particle beam with the test position measurement at 516. This synchronization allows the same number of test position measurements to be performed at each sample test position before proceeding to the next sample test position. Specifically, guiding the charged particle beam at 524 may include guiding illumination pulses to the sample test positions, and synchronization may include guiding the same number of illumination pulses to each sample test position.

[0106] As mentioned above Figure 1 Discussed in this context, applying an excitation stimulus at 522 may include applying the stimulus to a region of the sample that includes multiple sample test sites, such as all of the multiple sample test sites. In some examples, applying the excitation stimulus at 522 includes directing a laser pulse onto the sample, such as a femtosecond laser pulse with a duration of less than 1 picosecond incident on the sample.

[0107] In some examples, guiding the charged particle beam at 524 involves directing a charged particle beam pulse (e.g., an illumination pulse) to the sample test location. For example, the duration of the charged particle beam pulse incident on the sample may be less than 1 picosecond.

[0108] Recording the response signal at 526 can include recording various signals using various detectors. As an example, recording the response signal at 526 can include recording bright field signals and / or annular bright field signals (e.g., using...). Figure 1 Bright field electronic detector 132), recording ring-shaped dark field signals (e.g., using... Figure 1 (e.g., using a ring-shaped dark field electron detector 136) to record high-angle ring-shaped dark field signals (e.g., using...) Figure 1 A high-angle ring-shaped dark-field electron detector 140), recording backscattered electron signals (e.g., using...). Figure 1 A backscattered electron detector 172), recording secondary electron signals (e.g., using... Figure 1 Secondary electron detector 176), recording energy-dispersive X-ray spectral signals (e.g., using... Figure 1 X-ray detector 156), recording electron energy loss spectrum signals (e.g., using Figure 1 The electron energy loss spectrum module 144), records differential phase contrast signals (e.g., using... Figure 1 (a segmented electron detector 152), and / or a recorder of converging electron diffraction signals (e.g., using a ...). Figure 1 (Pixelated electronic detector 148).

[0109] In various examples, recording the response signal at 526 includes recording signals corresponding to two or more different analytical methods, for example, by using two or more separate detector devices. As an example, the response signal recorded in each test location measurement may include an electron energy loss spectrum signal recorded by an electron energy loss spectroscopy module and a ring signal recorded by a ring STEM detector (e.g., a bright-field electron detector, a ring dark-field electron detector, and / or a high-angle ring dark-field electron detector). As another example, the response signal recorded in each test location measurement may include an energy-dispersive X-ray spectral signal recorded using an X-ray detector and a backscattered electron signal recorded using a backscattered electron detector and / or a secondary electron signal recorded using a secondary electron detector. As yet another example, the response signal recorded in each test location measurement may include an electron diffraction pattern recorded by a pixelated electron detector and a high-angle ring dark-field signal recorded by a separate high-angle ring dark-field electron detector. Any other practical signal and / or detector combinations are also within the scope of this disclosure. In such examples, the test location measurement can be described as a multimodal measurement. Therefore, the dataset generated by executing method 500 can have a dimension of 3+N, where N represents the total dimension of the response signals collected in each test location measurement.

[0110] In some examples, method 500 includes, for at least one repeated sample test position, repeating the test position measurement at 516 with a repeated phase delay in discontinuous test position measurements. Such discontinuous test position measurements may correspond to test position measurements performed while recording different data frames. For example, refer to... Figure 2 The first set of 210 phase-redundant data frames, each sample test position 202 can be described as representing such repeated sample test positions, because each sample test position is delayed by a repeated phase (in this case, for Tests are conducted in discontinuous measurements corresponding to different data frames.

[0111] In some examples, recording a data frame at 510 involves, for each data frame, repeatedly performing a test position measurement at 516 multiple times at each sample test position, and then performing another test position measurement at the sample test position. For example, as described above, repeated test position measurements can be performed at a given sample test position and a given phase delay to accumulate data corresponding to multiple illumination pulses.

[0112] In this way, the total illumination flux required to obtain a signal with sufficient SNR can be distributed across multiple consecutive test position measurements performed at a given sample test location with a given phase delay, as well as multiple non-consecutive test position measurements performed for the given sample test location in different data frames. As discussed above, distributing at least a portion of the total illumination flux across different data frames can more quickly generate valuable information about the experimental state and / or help maintain sample integrity. In some examples, for each data frame, all consecutive test position measurements can be performed at different respective sample test locations.

[0113] In some examples, such as those mentioned above Figure 2 Discussed in the context of [the previous discussion], repeating test measurements at 516 may include performing test position measurements multiple times at each sample test position with a repeated phase delay to generate a summary dataset corresponding to the repeated sample test positions and repeated phase delays. In such an example, method 500 may include shrinking the summary dataset for each repeated sample test position and each repeated phase delay at 534.

[0114] Shrinking the summary dataset at point 534 can include combining data from the summary dataset in various ways, such as by summing and / or integrating the summary dataset. As an example, see [reference]. Figure 2 The first set of 210 phase-redundant data frames, corresponding to a summary dataset for each sample test location 202, may include all response signals recorded in all data frames of the first set of 210. In such an example, shrinking the summary dataset at 534 may include summing and / or integrating all individual response signals to produce a single shrunken data point representing the phase-delayed response at the sample test location at repeated intervals.

[0115] In some examples, repeating the test location measurement at 516 involves recording multiple repeated data frames with similar and / or identical measurement parameters. For example, such as Figure 5 As shown, recording a data frame at 510 may include recording multiple phase-redundant data frames as described above at 512. Specifically, for each of the multiple sample test locations, the test location is measured with the same phase delay in each data frame of the multiple phase-redundant data frames.

[0116] In some examples, method 500 also includes repeatedly recording phase-redundant data frames at 512 with multiple different phase delays. Figure 2 The sequence shown represents an example of this type of method, where the first group 210, the second group 220, and the third group 230 of phase redundancy data frames represent the results of the corresponding iterations recorded at 512. In this example, recording phase redundancy data frames at 512 is repeated with different phase delays to produce a set of different sets of phase redundancy data frames.

[0117] In some examples, such as Figure 5 As shown, recording a data frame at 510 includes recording multiple phase-variable data frames as described above at 514. Specifically, for each of the multiple phase-variable data frames, a test position measurement is performed at each sample test location with a phase delay corresponding to that data frame, which differs from the phase delay corresponding to each of the other data frames. As stated above... Figure 2-3 In the context described above, a selected data frame from multiple sets of different phase-redundant data frames can be described as representing a set of phase-variable data frames.

[0118] In some examples, for at least one data frame, method 500 includes measuring the test position at each sample test position with the same phase delay. For example, in Figure 2 In the example, when each data frame in data frames 200a-200f is recorded, the same phase delay is used for each sample test position within each data frame. In such examples, method 500 may include performing a test position measurement precisely only once at each sample test position, such that successive test position measurements are performed at different sample test positions. In other examples, method 500 may include performing multiple test position measurements at each sample test position with a given phase delay before proceeding to the next sample test position.

[0119] Furthermore, or alternatively, method 500 may include measuring test positions with different phase delays at two or more different sample test locations in at least one data frame. For example, in Figure 3 In the example, each data frame in data frames 300a-300f includes different sample test locations using different phase delays.

[0120] More specifically, as mentioned above Figure 3 Discussed in this context, the sample test positions of a data frame can be divided into (at least) a first position subset and a second position subset, where different corresponding first and second phase delays are used. Therefore, as... Figure 5 As shown, method 500 may include, for at least one data frame, performing a test position measurement at 518 for each sample test position in a first location subset with a first phase delay. Similarly, method 500 may include, for the same data frame, performing a test position measurement at 520 for each sample test position in a second location subset with a second phase delay different from the first phase delay. In various examples, method 500 may similarly include using a different third phase delay in a third location subset, a different fourth phase delay in a fourth location subset, and so on.

[0121] In some examples, recording a data frame at 510 includes, for at least one data frame, performing a test position measurement at each sample test position such that each (individual) sample test position uses a single phase delay, and different corresponding phase delays are used at two or more different sample test positions. Figure 3-4 Examples can also be described as examples representing such methods. Specifically, different sample test positions corresponding to different phase delays can be obtained from... Figure 3 The data frame is selected from the first and second position subsets. Similarly, different sample test positions corresponding to different phase delays can correspond to... Figure 4 Any two different sample test locations in any data frame.

[0122] In some examples, method 500 may include analyzing one or more recorded data frames to generate information about the state of the ongoing experiment before all data frames are recorded. In such examples, the data frames that can be analyzed in the middle stages of the method may be referred to as one or more test data frames.

[0123] like Figure 5 As shown, method 500 can analyze one or more test data frames at 528 after recording the test data frames to generate intermediate information about the sample. In some examples, analyzing the data frames at 528 includes generating an intermediate feature representation of the sample at 530. This intermediate feature representation may be at least partially based on one or more test data frames. As described above... Figure 2 In the context of this discussion, intermediate feature representations can take various forms, such as data files analyzed by a computer processor and / or graphical feature representations displayed to the user.

[0124] In some examples, intermediate information and / or intermediate feature representations can be used to update one or more aspects of the experimental procedure. For example, such as Figure 5 As shown, method 500 may also include adjusting the charged particle microscope system performed in conjunction with method 500 at 532 (e.g., Figure 1 One or more measurement parameters of the CPM system 100. Adjusting the measurement parameters at 532 can be done at least in part based on intermediate information and / or intermediate feature representations. Adjusting the measurement parameters at 532 can be done after recording a test data frame and before recording subsequent data frames.

[0125] In some examples, the adjustment of the measurement parameters at 532 is performed at least partially automatically, for example by the controller of the charged particle microscope system (e.g., controller 160). For example, an automatic comparison of intermediate feature representations corresponding to two different test data frames can indicate the degree of spatial drift of the sample, and the controller can automatically adjust the scanning of the charged particle beam to counteract the effects of this drift.

[0126] Furthermore, or alternatively, adjusting the measurement parameters at 532 can be performed at least partially manually and / or in response to user input. For example, method 500 may include displaying intermediate information and / or intermediate feature representations to the user, who can then select to adjust one or more experimental parameters based on the intermediate information.

[0127] Figure 6 The following discussion is intended to provide a brief, general description of an exemplary computing environment for implementing the disclosed techniques. In particular, some or all portions of this computing environment may be used in conjunction with the methods and apparatus described above, for example, for directing a beam of charged particles and / or excitation stimuli to a sample test location, performing test location measurements, and / or performing any portion of the methods disclosed herein.

[0128] While not strictly required, the disclosed techniques are described within the general context of computer-executable instructions (e.g., program modules) being executed by a personal computer (PC). Typically, program modules include routines, programs, objects, components, data structures, etc., that perform specific tasks or implement specific abstract data types. Furthermore, the techniques disclosed herein can be implemented using other computer system configurations, including handheld devices, tablets, multiprocessor systems, microprocessor-based or programmable consumer electronics, network PCs, microcomputers, mainframes, virtual machines, containerized applications, Kubernetes clusters, etc. The disclosed techniques can also be practiced in distributed computing environments where tasks are performed by remote processing devices linked via a communication network. In distributed computing environments, program modules can reside in both local and remote memory storage devices. In some cases, such processing is provided in a CPM system. The disclosed system can be used to control image acquisition and provide a user interface, as well as to function as an image processor.

[0129] refer to Figure 6An exemplary system implementing the disclosed technology includes the form of a general-purpose computing device, namely an exemplary conventional PC 600, including one or more processing units 602, system memory 604, and a system bus 606 coupling various system components, including system memory 604, to the one or more processing units 602. Each of the one or more processing units 602 may also be referred to as a processor 602, and the one or more processing units 602 collectively may be referred to as a processor system. The system bus 606 may be any of several types of bus structures including a memory bus or memory controller, a peripheral bus, and a local bus using various bus architectures. The exemplary system memory 604 includes read-only memory (ROM) 608 and random access memory (RAM) 610. A basic input / output system (BIOS) 612, containing basic routines that facilitate the transfer of information between elements within the PC 600, is stored in the ROM 608. In various examples, the PC 600 (and / or one or more components thereof) may also be referred to as a controller. The PC 600 may represent Figure 1 An example of at least a portion of the controller 160.

[0130] The exemplary PC 600 also includes one or more storage devices 630, such as a hard disk drive for reading from and writing to a hard disk, a disk drive for reading from or writing to a removable disk, and an optical disc drive for reading from or writing to a removable optical disc (e.g., a CD-ROM or other optical media). Such storage devices can be connected to the system bus 606 via a hard disk drive interface, a disk drive interface, and an optical disc drive interface, respectively. The drives and their associated computer-readable media provide the PC 600 with non-volatile storage of computer-readable instructions, data structures, program modules, and other data. Other types of computer-readable media (e.g., magnetic tape, flash memory cards, solid-state drives, digital video optical discs, CDs, DVDs, RAM, ROM, etc.) may also be used in the exemplary operating environment.

[0131] Multiple program modules may be stored in storage device 630, including an operating system, multiple operating systems, a virtual operating system, one or more applications, other program modules, and / or program data. In some examples, one or more aspects of the methods disclosed herein may be transferred to program modules through programming, implementation, coding, training, and / or other means using machine learning, neural networks, artificial intelligence, etc.

[0132] The exemplary PC 600 may include various devices configured for a user interface. For example, a user may input commands and information to the PC 600 via one or more input devices 640, such as a keyboard and / or a pointing device such as a mouse. For example, a user may input commands to initiate image acquisition and / or initiate one or more methods disclosed herein. Other input devices may include digital cameras, microphones, joysticks, gamepads, buttons, dial pads, disc satellite antennas, scanners, etc. In some examples, several such input devices may be integrated into a single user interface device, such as devices typically used with CPM systems. These and other input devices are typically connected to one or more processing units 602 via a serial port interface coupled to system bus 606, but may also be connected via other interfaces, such as parallel ports, game ports, universal serial bus (USB), or wired or wireless network connections. Monitor 646 or other types of display devices are also connected to system bus 606 via an interface, such as a video adapter, and may display one or more images of a sample or specimen, for example, before, after, and / or during the execution of one or more methods disclosed herein. Monitor 646 can also be used to select processing portions or specific image alignment and alignment procedures, such as correlation, feature recognition, and preview area selection, or other image selection. Other peripheral output devices, such as speakers and printers (not shown), may also be included. Input device 640 can represent... Figure 1 An example of a user input device 166. Alternatively, monitor 646 may represent... Figure 1 Example of display device 168.

[0133] PC 600 can operate in a network environment using logical connections to one or more remote computers (e.g., remote computer 660). In some examples, this includes one or more network or communication connections 650. Remote computer 660 can be another PC, server, router, network PC and / or peer device, or other common network node, typically including many or all of the elements described relative to PC 600, although... Figure 6 Only the memory storage device 862 is shown. The personal computer 600 and / or remote computer 660 can be connected to a local area network (LAN) and / or a wide area network (WAN). Such network environments are common in offices, enterprise-wide computer networks, intranets, and the Internet.

[0134] like Figure 6As shown, memory 690 (or portions of this memory or other memory) may store processor-executable instructions for beam focusing control, beam deflector control, pattern recognition and analysis (e.g., detecting and / or characterizing the drift of a sample relative to a charged particle beam), etc. Such processor-executable instructions may also include, or alternatively, instructions for performing various calculations and / or performing various measurement routines (e.g., as described herein). For example, when executed by a processor system, such processor-executable instructions may enable PC 600 and / or another component (e.g., Figure 1 The processor-executable instructions may (either a suitable component of the CPM system 100) perform any of the methods disclosed herein. In some examples, the processor-executable instructions may generate images for display (e.g., intermediate feature representations of a sample), process preview images, and / or acquire additional images.

[0135] General considerations

[0136] As used in this application and claims, the singular forms “a,” “an,” and “the” include the plural forms unless the context clearly indicates otherwise. Additionally, the term “comprising” means “including.” Furthermore, the term “coupled” does not exclude the existence of intermediate elements between coupled items.

[0137] Unless otherwise stated, the term "substantially" as used herein means the listed values ​​and / or properties and any value and / or property that is at least 75% of the listed values ​​and / or properties. Equivalently, the term "substantially" means the listed values ​​and / or properties and any value and / or property that differs from the listed values ​​and / or properties by at most 25%. For example, "substantially equal" means quantities that are exactly equal and quantities that differ from each other by at most 25%.

[0138] The systems, apparatuses, and methods described herein should not be construed as limiting in any way. Rather, this disclosure is intended to relate to all novel and non-obvious features and aspects, including, but not limited to, the various disclosed embodiments, and features and aspects formed by combining these embodiments individually or in various combinations and sub-combinations. The disclosed systems, methods, and apparatuses are not limited to any particular aspect or feature or combination thereof, nor are they required to have any one or more particular advantages or problems solved. Any operational theory should be readily apparent, but the disclosed systems, methods, and apparatuses are not limited to such operational theories.

[0139] Although some operations of the disclosed methods are described in a specific sequential order for ease of presentation, it should be understood that this descriptive approach encompasses rearrangements of operations unless the specific language used herein requires a particular order. For example, operations described sequentially may be rearranged or performed concurrently in some cases. Furthermore, for the sake of brevity, the accompanying drawings may not show the various ways in which the disclosed systems, methods, and apparatus may be used in conjunction with other systems, methods, and apparatuses. Moreover, terms such as “produce” and “provide” are sometimes used in the specification to describe the disclosed methods. These terms are high-level abstractions of the actual operations performed. The actual operations corresponding to these terms will vary depending on the specific implementation and are readily apparent to those skilled in the art.

[0140] In some instances, values, procedures, etc., may be described using descriptive terms such as "lowest," "best," "minimum," "extreme," etc. It should be understood that such descriptions are intended to indicate that a choice can be made among several available functional alternatives, and that such a choice is not necessarily better, smaller, or superior to other choices.

[0141] Innovations can be described within the general context of computer-executable instructions, such as those instructions included in a program module and executed on a computing system targeting a real or virtual processor. Generally, program modules or components include routines, programs, libraries, objects, classes, parts, data structures, etc., that perform specific tasks or implement specific abstract data types. The functionality of a program module can be combined or split in different examples depending on specific needs. The computer-executable instructions used in a program module can execute within a local or distributed computing system. Generally, a computing system or computing device can be local or distributed and can include any combination of dedicated hardware and / or general-purpose hardware with software that implements the functionality described herein, such as personal computers, handheld devices, tablets, multiprocessor systems, microprocessor-based or programmable consumer electronics, networked personal computers, minicomputers, mainframes, virtual machines, containerized applications, etc.

[0142] In the various examples described in this specification, a module (such as a component or engine) may be "programmed" and / or "coded" to perform a specific operation or provide a specific function. This means that the computer-executable instructions of the module may be executed to perform such an operation, cause such an operation to be performed, or otherwise provide such functionality. Although the functionality described with respect to a software part, module, or engine may be executed as a discrete software unit (e.g., a program, function, class method), it does not need to be implemented as a discrete unit. That is, the functionality may be incorporated into a larger or more general program, such as one or more lines of code in a larger or more general program.

[0143] The algorithms described may, for example, be embodied as software or firmware instructions executed by a digital computer. For instance, any of the disclosed methods may be executed by one or more of a computer or other computing hardware that is part of a microscopic examination tool. The computer may be a computer system comprising one or more processors (processing devices) and tangible, non-transitory computer-readable media (e.g., one or more optical discs, volatile memory devices such as DRAM or SRAM), or non-volatile memory or storage devices such as hard disk drives, NVRAM, and solid-state drives (e.g., flash drives)). The one or more processors may execute computer-executable instructions stored on one or more tangible, non-transitory computer-readable media, thereby performing any of the techniques disclosed. For example, software for performing any of the above examples may be stored on one or more volatile, non-volatile computer-readable media in the form of computer-executable instructions, which, when executed by one or more processors, cause one or more processors to perform any of the techniques or subsets of the techniques described above.

[0144] Examples of the disclosed technology

[0145] Having described and illustrated the principles of the present disclosure with reference to the illustrated examples, it will be appreciated that modifications may be made to the arrangement and details of the illustrated examples without departing from these principles. For example, an example element implemented in software may be implemented in hardware, and vice versa. Similarly, techniques from any example may be combined with techniques described in any or more other examples. It should be understood that programs and functions such as those described with reference to the illustrated examples may be implemented in a single hardware or software module, or may be provided as separate modules. The specific arrangement described above is provided for ease of illustration, and other arrangements may be used.

[0146] Example 1. A method for collecting a dataset, comprising: recording multiple data frames for each of multiple data frames; performing test position measurements at each of multiple sample test locations of a sample, wherein performing the test position measurements comprises, for each sample test location: applying an excitation stimulus to the sample test location at an excitation time; guiding a charged particle beam to the sample test location at a detection time separated by a phase delay from the excitation time; and recording one or more response signals generated by the interaction between the charged particle beam and the sample, wherein the method comprises, for at least one repeated sample test location, repeating the test position measurements with repeated phase delays in discontinuous test position measurements.

[0147] Example 2. The method of any of the examples in this paper, specifically Example 1, where the summary dataset has 3+N dimensions, where N represents the dimension of one or more response signals.

[0148] Example 3. The method of any of the examples in this paper, specifically any of the examples in Examples 1-2, wherein multiple sample test locations form a two-dimensional position grid on the sample.

[0149] Example 4. The method of any of the examples in this document, specifically any of the examples 1-3, further includes: scanning a charged particle beam relative to a sample to direct the charged particle beam to each sample test location; and synchronizing the scanning of the charged particle beam with the measurement of the test location.

[0150] Example 5. The method of any of the examples in this document, particularly Example 4, wherein directing a charged particle beam to a sample test location includes directing an illumination pulse to the sample test location, and wherein synchronization includes directing the same number of illumination pulses to each sample test location.

[0151] Example 6. The method of any of the examples in this document, specifically any of the examples 1-5, wherein recording multiple data frames includes, for each of the multiple data frames, repeating the test position measurement multiple times at each sample test position before performing the test position measurement at the next sample test position.

[0152] Example 7. The method of any of the examples in this paper, specifically any of the examples 1-6, wherein, for each of the multiple data frames, consecutive test position measurements are performed at different sample test positions.

[0153] Example 8. The method of any example in this document, specifically any of Examples 1-7, wherein repeatedly performing test position measurements includes performing test position measurements multiple times at each repeated sample test position with repeated phase delays to generate a summary dataset corresponding to the repeated sample test positions and repeated phase delays, and wherein the method further includes compressing the summary dataset for each repeated sample test position and each repeated phase delay.

[0154] Example 9. A method in any of the examples in this paper, specifically Example 8, where the compressed summary dataset includes the integrated summary dataset.

[0155] Example 10. The method of any of the examples in this paper, specifically any of the examples 1-9, wherein repeatedly performing test location measurements involves recording multiple repeated data frames with the same measurement parameters.

[0156] Example 11. The method of any of the examples in this document, specifically any of Examples 1-10, wherein recording multiple data frames includes recording multiple phase-redundant data frames such that for each of the multiple sample test locations, the test location is measured with the same phase delay in each of the multiple phase-redundant data frames.

[0157] Example 12. The method of any of the examples in this document, particularly Example 11, further includes repeatedly recording multiple phase-redundant data frames at multiple different phase delays.

[0158] Example 13. The method of any of the examples in this document, specifically any of Examples 1-12, wherein recording a plurality of data frames includes recording a plurality of phase-variable data frames, such that for each of the plurality of phase-variable data frames, a test position measurement is performed at each sample test position with a phase delay corresponding to that data frame, the phase delay being different from the phase delay corresponding to each of the other data frames.

[0159] Example 14. A method of any of the examples in this document, specifically any of Examples 1-13, wherein, for at least one of a plurality of data frames, the method includes measuring the test position of each of a plurality of sample test positions with the same phase delay.

[0160] Example 15. The method of any of the examples in this document, particularly Example 14, wherein, for at least one of a plurality of data frames, the method includes performing a test position measurement only once at each sample test position.

[0161] Example 16. The method of any of the examples in this document, specifically any of Examples 1-15, wherein, for at least one of a plurality of data frames, the method includes measuring test positions at two or more sample test positions with different phase delays at two or more of a plurality of sample test positions.

[0162] Example 17. A method of any of the examples in this document, specifically any of Examples 1-16, wherein, for at least one of a plurality of data frames, the method includes: measuring the test position of each sample test position in a first subset of the plurality of sample test positions with a first phase delay; and measuring the test position of each sample test position in a second subset of the plurality of sample test positions with a second phase delay different from the first phase delay.

[0163] Example 18. The method of any of the examples in this paper, specifically Example 17, where the first and second location subsets are non-overlapping subsets of multiple sample test locations.

[0164] Example 19. The method of any of the examples in this paper, specifically any of the examples 17-18, wherein the first and second location subsets correspond to the staggered portions of multiple sample test locations.

[0165] Example 20. The method of any of the examples in this document, specifically any of Examples 1-19, wherein applying an excitation stimulus to a sample test site includes applying an excitation stimulus to a sample region comprising a plurality of sample test sites.

[0166] Example 21. The method of any of the examples in this document, specifically any of Examples 1-20, wherein applying an excitation stimulus to the sample test location includes directing a laser pulse to the sample.

[0167] Example 22. The method of any of the examples in this paper, specifically Example 21, wherein the incident time of the laser pulse on the sample is less than 1 picosecond (ps) for each test position measurement.

[0168] Example 23. The method of any of the examples in this document, specifically any of Examples 1-22, wherein directing a charged particle beam to a sample test location includes directing a charged particle beam pulse to the sample test location.

[0169] Example 24. The method of any of the examples in this paper, specifically Example 23, wherein the incident time of the charged particle beam pulse on the sample is less than 1 picosecond (ps).

[0170] Example 25. The method of any of the examples in this document, specifically any of Examples 1-24, wherein guiding a charged particle beam to a sample test location includes guiding the charged particle beam using one or more scanning coils of a charged particle microscope system.

[0171] Example 26. The method of any of the examples in this document, specifically any of Examples 1-25, wherein recording one or more response signals includes one or more of the following: (i) recording a bright-field signal; (ii) recording an annular bright-field signal; (iii) recording an annular dark-field signal; (iv) recording a high-angle annular dark-field signal; (v) recording an energy-dispersive X-ray spectral signal; (vi) recording an electron energy loss spectral signal; (vii) recording a differential phase contrast signal; (viii) recording a convergent electron diffraction signal; (ix) recording a backscattered electron signal; or (x) recording a secondary electron signal.

[0172] Example 27. The method of any of the examples in this document, specifically any of Examples 1-26, wherein recording one or more response signals includes recording using a pixelated electronic detector.

[0173] Example 28. The method of any of the examples in this document, specifically any of Examples 1-27, wherein recording one or more response signals includes recording signals corresponding to two or more different analysis methods.

[0174] Example 29. The method of any of the examples in this document, specifically any of Examples 1-28, wherein recording one or more response signals involves recording using two or more separate detector devices.

[0175] Example 30. The method of any of the examples in this document, specifically any of the examples 1-29, further includes analyzing one or more test data frames to generate intermediate information about the sample after recording one or more test data frames of a plurality of data frames and before recording subsequent data frames of a plurality of data frames.

[0176] Example 31. The method of any of the examples in this paper, particularly Example 30, wherein analyzing one or more test data frames includes generating intermediate feature representations of samples based at least in part on one or more test data frames.

[0177] Example 32. A method of any of the examples in this document, specifically any of Examples 1-31, wherein the method is performed at least in part by a charged particle microscope system, and wherein the method further includes adjusting one or more measurement parameters of the charged particle microscope system at least in part based on intermediate information after recording one or more test data frames and before recording subsequent data frames.

[0178] Example 33. The method of any of the examples in this article, specifically Example 32, in which the adjustment is at least partially performed automatically.

[0179] Example 34. The method of any of the examples in the text, specifically any of the examples 32-33, further includes displaying intermediate information to the user, wherein the adjustment is performed at least in part in response to user input.

[0180] Example 35. A method for collecting a dataset, comprising: recording data frames in a manner that: performing test position measurements at each of a plurality of sample test locations of a sample, wherein performing test position measurements comprises, for each sample test location: applying an excitation stimulus to the sample test location at an excitation time; guiding a charged particle beam to the sample test location at a detection time separated from the excitation time by a phase delay; and recording one or more response signals generated by the interaction between the charged particle beam and the sample, wherein recording data frames comprises: performing test position measurements at each sample test location such that a single phase delay is used at each sample test location; and performing test position measurements at two or more different sample test locations among the plurality of sample test locations with different corresponding phase delays.

[0181] Example 36. The method of any of the examples in this document, particularly Example 35, further includes: scanning the charged particle beam relative to the sample to direct the charged particle beam to each sample test location; and synchronizing the scanning of the charged particle beam with the measurement of the test location.

[0182] Example 37. The method of any example in this document, particularly Example 36, wherein directing a charged particle beam to a sample test location includes directing an illumination pulse to the sample test location, and wherein synchronization includes directing the same number of illumination pulses to each sample test location.

[0183] Example 38. The method of any of the examples in this document, specifically any of the examples 35-37, further includes repeatedly recording data frames to generate multiple data frames.

[0184] Example 39. The method of any of the examples in this paper, specifically Example 38, wherein, for each of a plurality of data frames, each sample test position is associated with each phase delay according to a phase mapping, and wherein each of the plurality of data frames has the same phase mapping.

[0185] Example 40. The method of any of the examples in this paper, specifically any of the examples 35-40, wherein successive test location measurements are performed at different sample test locations.

[0186] Example 41. A method of any of the examples herein, particularly any of Examples 35-40, further comprising: measuring the test position of each sample test position in a first subset of multiple sample test positions with a first phase delay; and measuring the test position of each sample test position in a second subset of multiple sample test positions with a second phase delay different from the first phase delay. Example 42. A method of any of the examples herein, particularly Example 41, wherein the first and second subsets of positions are non-overlapping subsets of multiple sample test positions.

[0187] Example 43. The method of any of the examples in this paper, specifically any of the examples 41-42, wherein the first and second location subsets correspond to the staggered portions of multiple sample test locations.

[0188] Example 44. The method of any of the examples in this document, specifically any of the examples 35-43, wherein applying an excitation stimulus to a sample test site includes applying an excitation stimulus to a sample region comprising a plurality of sample test sites.

[0189] Example 45. The method of any of the examples in this document, specifically any of Examples 35-44, wherein applying an excitation stimulus to the sample test location includes directing a laser pulse to the sample.

[0190] Example 46. The method of any of the examples in this paper, specifically Example 45, wherein the incident time of the laser pulse on the sample is less than 1 picosecond (ps) for each test position measurement.

[0191] Example 47. The method of any of the examples in this document, specifically any of the examples 35-46, wherein directing a charged particle beam to a sample test location includes directing a charged particle beam pulse to the sample test location.

[0192] Example 48. The method of any of the examples in this paper, specifically Example 47, wherein the incident time of the charged particle beam pulse on the sample is less than 1 picosecond (ps).

[0193] Example 49. The method of any of the examples in this document, specifically any of Examples 35-48, wherein guiding a charged particle beam to a sample test location includes guiding the charged particle beam using one or more scanning coils of a charged particle microscope system.

[0194] Example 50. The method of any of the examples in this document, specifically any of Examples 35-49, wherein recording one or more response signals comprises one or more of the following: (i) recording a bright-field signal; (ii) recording an annular bright-field signal; (iii) recording an annular dark-field signal; (iv) recording a high-angle annular dark-field signal; (v) recording an energy-dispersive X-ray spectral signal; (vi) recording an electron energy loss spectral signal; (vii) recording a differential phase contrast signal; (viii) recording a convergent electron diffraction signal; (ix) recording a backscattered electron signal; or (x) recording a secondary electron signal.

[0195] Example 51. The method of any of the examples in this document, specifically any of Examples 35-50, wherein recording one or more response signals includes recording using a pixelated electronic detector.

[0196] Example 52. The method of any of the examples in this document, specifically any of the examples 35-51, wherein recording one or more response signals includes recording signals corresponding to two or more different analysis methods.

[0197] Example 53. The method of any of the examples in this document, specifically any of the examples 35-52, wherein recording one or more response signals involves recording using two or more separate detector devices.

[0198] Example 54. A method of any of the examples in this document, specifically any of Examples 35-53, wherein the data frame is a test data frame, and wherein the method further includes, after recording the test data frame and before recording subsequent data frames, analyzing the test data frame to generate intermediate information about the sample.

[0199] Example 55. The method of any of the examples in this paper, particularly Example 54, wherein analyzing the test data frame includes generating intermediate feature representations of the sample based at least in part on the test data frame.

[0200] Example 56. A method of any of the examples in this document, particularly any of the examples 54-55, wherein the method is performed at least in part by a charged particle microscope system, and wherein the method further includes adjusting one or more measurement parameters of the charged particle microscope system at least in part based on intermediate information after recording a test data frame and before recording subsequent data frames.

[0201] Example 57. A method of any of the examples in this paper, specifically Example 56, in which adjustments are at least partially performed automatically.

[0202] Example 58. The method of any of the examples in this document, particularly any of the examples 56-57, further includes displaying intermediate information to the user, and wherein adjustments are performed at least in part in response to user input.

[0203] Example 59. A charged particle microscopy (CPM) system comprising: a charged particle emitter configured to generate a beam of charged particles; an optical assembly configured to guide and focus an illumination pulse of the charged particle beam onto a sample test location of a sample located on a sample plane; an excitation source configured to apply an excitation stimulus to the sample test location; a detector subassembly configured to receive one or more response signals generated by the interaction between the illumination pulse and the sample; and a controller including a processor system and a memory, the memory including instructions that, when executed by the processor system, cause the CPM system to perform the methods of any of the examples herein, particularly any of Examples 1-58.

[0204] Example 60. A CPM system in any of the examples herein, particularly Example 59, wherein two or more of the following: (i) the CPM system includes a bright-field electron detector, and recording one or more response signals includes recording a bright-field signal using the bright-field electron detector; (ii) the CPM system includes an annular bright-field electron detector, and recording one or more response signals includes recording an annular bright-field signal using the annular bright-field electron detector; (iii) the CPM system includes an annular dark-field electron detector, and recording one or more response signals includes recording an annular dark-field signal using the annular dark-field electron detector; (iv) the CPM system includes a high-angle annular dark-field electron detector, and recording one or more response signals includes recording a high-angle annular dark-field signal using the high-angle annular dark-field electron detector; (v) the CPM system includes an X-ray detector, and recording one or more response signals includes recording an energy-dispersive X-ray spectral signal using the X-ray detector; (vi) the CPM system includes an electron energy loss spectral module, and recording one or more response signals includes recording an electron energy loss spectral signal using the electron energy loss spectral module; (vii) The CPM system includes a segmented electron detector and records one or more response signals, including recording differential phase contrast signals using the segmented electron detector; (viii) the CPM system includes a pixelated electron detector and records one or more response signals, including recording convergent electron diffraction signals using the pixelated electron detector; (ix) the CPM system includes a backscattered electron detector and records one or more response signals, including recording backscattered electron signals using the backscattered electron detector; or

[0205] Example 61. A CPM system of any of the examples in this document, specifically any of the examples 59-60, wherein the excitation source includes a laser source, and wherein applying the excitation stimulus includes directing a laser pulse to a sample such that the incident time of the laser pulse on the sample is less than 1 picosecond (ps).

[0206] Example 62. A CPM system of any of the examples in this document, specifically any of the examples 59-61, wherein the CPM system includes a scanning electron microscope (SEM) system, wherein the charged particle emitter includes an electron emitter, and wherein the charged particle beam includes an electron beam.

[0207] Example 63. A CPM system in any of the examples herein, specifically any of Examples 59-62, wherein the CPM system includes a scanning transmission electron microscope (STEM) system, wherein the charged particle emitter includes an electron emitter, and wherein the charged particle beam includes an electron beam.

[0208] Given that the principles of this disclosed invention can be applied to many possible embodiments, it should be understood that the illustrated embodiments are merely preferred examples of the invention and should not be considered as limiting the scope of the invention. Rather, the scope of the invention is defined by the following claims. Therefore, we consider all content that conforms to the scope and spirit of these claims as our invention.

Claims

1. A method for collecting a dataset, comprising: By recording multiple data frames for each of multiple data frames: Test position measurements are performed at each of the multiple test locations on the sample, wherein the test position measurements include, for each test location: Apply an excitation stimulus to the test location of the sample during the excitation time; The charged particle beam is guided to the sample test position during a detection time that is phase-delayed from the excitation time; as well as Record one or more response signals generated by the interaction between a charged particle beam and a sample. The method includes, for at least one repeated sample test position, repeating the test position measurement with repeated phase delay in non-continuous test position measurements.

2. The method of claim 1, wherein repeating the test position measurement comprises performing the test position measurement multiple times at each repeated sample test position with repeated phase delays to generate a summary dataset corresponding to the repeated sample test positions and repeated phase delays, and wherein the method further comprises, for each repeated sample test position and each repeated phase delay, integrating the summary dataset.

3. The method of claim 1, wherein recording a plurality of data frames includes recording a plurality of phase-redundant data frames, such that for each of the plurality of sample test locations, the test location is measured with the same phase delay in each of the plurality of phase-redundant data frames.

4. The method of claim 1, wherein recording a plurality of data frames includes recording a plurality of phase-variable data frames, such that for each of the plurality of phase-variable data frames, a test position measurement is performed at each sample test position with a phase delay corresponding to that data frame, the phase delay being different from the phase delay corresponding to each of the other data frames.

5. The method according to any one of claims 1-4, wherein, For at least one of a plurality of data frames, the method includes: Test position measurements were performed at each of the multiple sample test locations with the same phase delay; and Only one test location measurement is performed at each sample test location.

6. The method of any one of claims 1-4, wherein recording one or more response signals comprises recording using two or more separate detector devices.

7. The method according to any one of claims 1-4, further comprising analyzing one or more test data frames to generate intermediate information about the sample after recording one or more test data frames among a plurality of data frames and before recording subsequent data frames among a plurality of data frames.

8. The method of claim 7, wherein the method is performed at least in part by a charged particle microscopy system, and wherein the method further comprises adjusting one or more measurement parameters of the charged particle microscopy system at least in part based on intermediate information after recording one or more test data frames and before recording subsequent data frames.

9. The method of claim 8, wherein the adjustment is performed at least partially automatically.

10. The method of claim 8, further comprising displaying intermediate information to a user, wherein the adjustment is performed at least in part in response to user input.

11. A method for collecting a dataset, comprising: Methods for recording data frames: Test position measurements are performed at each of the multiple test locations on the sample, wherein the test position measurements include, for each test location: Apply an excitation stimulus to the test location of the sample during the excitation time; The charged particle beam is guided to the sample test position during a detection time that is phase-delayed from the excitation time; as well as Record one or more response signals generated by the interaction between a charged particle beam and a sample. The recorded data frames include: Test position measurements are performed at each sample test position, so that a single phase delay is used at each sample test position; as well as Test position measurements are performed at two or more different sample test locations with different corresponding phase delays among multiple sample test locations.

12. The method of claim 11, further comprising repeatedly recording data frames to generate a plurality of data frames.

13. The method according to claim 12, wherein, For each of the multiple data frames, each phase delay is associated with each sample test location according to the phase mapping, and each of the multiple data frames has the same phase mapping.

14. The method of claim 11, wherein the continuous test position measurements are performed at different sample test positions.

15. The method according to any one of claims 11-14, further comprising: Test position measurement is performed on each sample test position with a first phase delay in the first subset of multiple sample test positions; as well as In a second subset of multiple sample test locations, test location measurements are performed on each sample test location with a second phase delay that is different from the first phase delay.

16. The method of claim 15, wherein the first subset of locations and the second subset of locations are non-overlapping subsets of multiple sample test locations.

17. A charged particle microscope (CPM) system, comprising: A charged particle emitter configured to generate a beam of charged particles; An optical component configured to guide and focus illumination pulses of a charged particle beam onto a sample testing location on the sample plane; A stimulus source configured to apply excitation to the test location of the sample; A detector sub-component configured to receive one or more response signals generated by the interaction between an illumination pulse and a sample; as well as The controller includes a processor system and memory, the memory containing instructions that, when executed by the processor system, cause the CPM system to record multiple data frames for each of multiple data frames: Test position measurements are performed at each of the multiple test locations on the sample, wherein the test position measurements include: Use an excitation source to apply an excitation stimulus to the test location of the sample during the excitation time; The illumination pulse is guided to the sample test position during a detection time that is phase-delayed from the excitation time; and Record one or more response signals generated by the interaction between a charged particle beam and a sample. The memory includes instructions that, when executed by the processor system, cause the processor system to repeatedly perform test position measurements with repeated phase delays for at least one repeated sample test position in non-continuous test position measurements.

18. The CPM system of claim 17, wherein two or more of the following: (i) The CPM system includes a bright-field electronic detector and records one or more response signals, including recording bright-field signals using the bright-field electronic detector; (ii) The CPM system includes a ring brightfield electronic detector, and recording one or more response signals includes recording a ring brightfield signal using the ring brightfield electronic detector; (iii) The CPM system includes a ring dark field electronic detector and records one or more response signals, including recording a ring dark field signal using the ring dark field electronic detector; (iv) The CPM system includes a high-angle annular dark field electronic detector and records one or more response signals, including recording high-angle annular dark field signals using the high-angle annular dark field electronic detector. (v) The CPM system includes an X-ray detector and records one or more response signals, including recording energy-dispersive X-ray spectral signals using the X-ray detector; (vi) The CPM system includes an electron energy loss spectroscopy module, and recording one or more response signals includes recording electron energy loss spectral signals using the electron energy loss spectroscopy module; (vii) The CPM system includes a segmented electronic detector and records one or more response signals, including recording differential phase contrast signals using the segmented electronic detector; (viii) The CPM system includes a pixelated electron detector and records one or more response signals, including recording convergent beam electron diffraction signals using a pixelated electron detector; (ix) The CPM system includes a backscattered electron detector and records one or more response signals, including recording backscattered electron signals using the backscattered electron detector; or (x) The CPM system includes a secondary electron detector and records one or more response signals, including recording secondary electron signals using the secondary electron detector.

19. The CPM system of claim 17 or claim 18, wherein the excitation source comprises a laser source, and wherein applying the excitation stimulus comprises directing a laser pulse to the sample such that the incident time of the laser pulse on the sample is less than 1 picosecond (ps).

20. The CPM system of claim 17 or claim 18, wherein the memory further includes instructions, when executed by the processor system, to cause the CPM system to record a test data frame among a plurality of data frames and before recording subsequent data frames among the plurality of data frames: Analyze test data frames to generate intermediate information about the sample; and One or more measurement parameters of the CPM system are automatically adjusted, at least in part, based on intermediate information.

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