High-resolution magnetic deflection mass spectrometer magnetic analyzer

By introducing a three-stage slit and magnetic field focusing design into the magnetic analyzer, the problem of low sensitivity of traditional magnetic analyzers at high resolution is solved, achieving high resolution and efficient ion transport.

CN122067962APending Publication Date: 2026-05-19ANHUI NUOYI TECH CO LTD
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
ANHUI NUOYI TECH CO LTD
Filing Date
2026-02-24
Publication Date
2026-05-19

AI Technical Summary

Technical Problem

Traditional magnetic analyzers, in pursuit of high resolution, suffer from low sensitivity and ion transport efficiency, making it difficult to achieve both simultaneously.

Method used

The design employs a three-stage slit system, including an inlet slit, a middle slit, and an outlet slit. Combined with the magnetic field generated by a rectangular magnet, this achieves multi-stage ion beam screening and focusing, improving quality resolution and reducing sensitivity loss.

Benefits of technology

Through the synergistic effect of the three-stage slits, the instrument's mass resolution and ion transmission efficiency are significantly improved, while the sensitivity loss caused by the slit design is reduced.

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Abstract

The invention relates to the technical field of magnetic deflection mass spectrometers and magnetic analyzers, and discloses a high-resolution magnetic deflection mass spectrometer magnetic analyzer which comprises an analyzer shell, and a vacuum cavity for ion movement is formed in the analyzer shell. According to the high-resolution magnetic deflection mass spectrometer magnetic analyzer, through the inlet slit, the middle slit and the outlet slit which are sequentially arranged along an ion deflection track, an ion beam firstly passes through the narrower inlet slit, ions with smaller spatial dispersity are preliminarily screened out, and then the ions enter the magnetic field; the ions pass through a middle slit and an outlet slit which are also narrower to complete a 180-degree semicircular deflection track and then reach a receiver, and inlet-middle-outlet three-stage cooperative limiting holes jointly form three-stage space screening, so that the ions which deviate from an ideal track due to energy and angle dispersion can be gradually filtered in stages; ions deviating from an ideal track due to energy and angle dispersion are effectively filtered out, and compared with single screening of a traditional design, the mass resolution of an instrument is effectively improved.
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Description

Technical Field

[0001] This invention relates to the field of magnetic deflection mass spectrometer magnetic analyzer technology, specifically a high-resolution magnetic deflection mass spectrometer magnetic analyzer. Background Technology

[0002] In magnetic deflection mass spectrometry, ions are deflected in a magnetic field, and mass separation is achieved through the relationship between their deflection radius and mass-to-charge ratio. To achieve high resolution, such as... Figure 4 As shown, traditional magnetic analyzers typically use a single, extremely narrow exit slit to screen ions, filtering out those that deviate from their ideal trajectory due to initial energy and angular dispersion.

[0003] In single-slit screening, most ions are lost due to dispersion and impact on the inner wall of the analyzer before reaching the exit slit, resulting in a sharp drop in instrument sensitivity. Traditional single-slit designs cannot achieve both high resolution and high sensitivity. Traditional magnetic analyzers use a single slit to screen ions, which leads to low ion transmission efficiency and severely compromised instrument sensitivity when pursuing high resolution. Summary of the Invention

[0004] To address the shortcomings of existing technologies, this invention provides a high-resolution magnetic deflection mass spectrometer magnetic analyzer, which solves the problems mentioned in the background.

[0005] The present invention provides the following technical solution: a high-resolution magnetic deflection mass spectrometer magnetic analyzer, comprising: an analyzer housing, wherein the interior of the analyzer housing has a vacuum cavity for ion movement, and the inner wall of the vacuum cavity is provided with a fixed partition;

[0006] The analyzer housing is provided with an ion source for generating an ion beam and a receiver for receiving ions. The ion source and receiver are both located inside the vacuum chamber and are located on both sides of a fixed partition.

[0007] The fixed partition is provided with a first mounting plate and a second mounting plate on both sides respectively. The first mounting plate is provided with an inlet slit, the second mounting plate is provided with an outlet slit, and the fixed partition is provided with a middle slit.

[0008] Two magnets are provided on both sides of the upper end of the analyzer housing;

[0009] The inlet slit, the middle slit, and the outlet slit are arranged sequentially along the ion deflection trajectory. They work together to filter out ions that deviate from the ideal trajectory due to energy and angular dispersion. The ion beam enters the magnetic field formed between the two magnets through the inlet slit, causing the ions to be deflected. The ions then pass through the middle slit and the outlet slit in sequence to complete the deflection before reaching the receiver.

[0010] Preferably, the two magnets are arranged parallel to each other, and the two magnets are rectangular magnets.

[0011] Preferably, the ion beam deflects in a magnetic field in a semi-circular shape of 180°.

[0012] Preferably, the inlet slit and the outlet slit are symmetrically arranged with respect to the center of the deflection trajectory.

[0013] Preferably, the opening direction of the intermediate slit is perpendicular to the direction of motion of the ion beam at the midpoint of its trajectory.

[0014] Compared with the prior art, the present invention has the following beneficial effects:

[0015] 1. This invention utilizes an inlet slit, a middle slit, and an outlet slit arranged sequentially along the ion deflection trajectory. The ion beam first passes through a narrower inlet slit, initially filtering out ions with lower spatial dispersion. Then, it enters the magnetic field and completes a 180° semi-circular deflection trajectory through the equally narrower middle and outlet slits before reaching the receiver. The three-stage coordinated confining apertures of "inlet-middle-outlet" constitute a three-stage spatial screening, which can filter out ions that deviate from the ideal trajectory due to energy and angular dispersion in stages and progressively. This effectively filters out ions that deviate from the ideal trajectory due to energy and angular dispersion, significantly improving the instrument's quality resolution compared to the single-scan design of traditional designs.

[0016] 2. The present invention uses a pair of magnets configured to generate a focusing effect while providing an ion deflection magnetic field. This magnetic field can apply a focusing force to the ions during the deflection process, constrain the spatial divergence of the ion beam, and enable more ions to pass through the subsequent slit screening, thereby significantly reducing the sensitivity loss that may be caused by setting multiple slits. Attached Figure Description

[0017] Figure 1 This is a three-dimensional structural diagram of the present invention;

[0018] Figure 2 This is a schematic diagram of the internal structure of the present invention;

[0019] Figure 3 This is a cross-sectional view of the inlet slit, middle slit, and outlet slit of the present invention.

[0020] Figure 4 This is a schematic diagram of the existing technology structure.

[0021] In the diagram: 1. Analyzer housing; 2. Vacuum chamber; 3. Fixed partition; 4. Ion source; 5. Receiver; 6. First mounting plate; 7. Second mounting plate; 8. Inlet slit; 9. Middle slit; 10. Outlet slit; 11. Magnet. Detailed Implementation

[0022] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0023] Please see Figure 1-3 A high-resolution magnetic deflection mass spectrometer magnetic analyzer includes: an analyzer housing 1, the interior of the analyzer housing 1 having a vacuum chamber 2 for ion movement, and a fixed partition 3 provided on the inner wall of the vacuum chamber 2.

[0024] The analyzer housing 1 is provided with an ion source 4 for generating an ion beam and a receiver 5 for receiving ions. Both the ion source 4 and the receiver 5 are located inside the vacuum chamber 2, and the ion source 4 and the receiver 5 are located on both sides of the fixed partition 3.

[0025] The fixed partition 3 is provided with a first mounting plate 6 and a second mounting plate 7 on both sides respectively. The first mounting plate 6 is provided with an inlet slit 8, the second mounting plate 7 is provided with an outlet slit 10, and the fixed partition 3 is provided with a middle slit 9.

[0026] Two magnets 11 are provided on both sides of the upper end of the analyzer housing 1;

[0027] The entrance slit 8, the middle slit 9, and the exit slit 10 are arranged sequentially along the ion deflection trajectory. They work together to filter out ions that deviate from the ideal trajectory due to energy and angular dispersion. The ion beam enters the magnetic field formed between the two magnets 11 through the entrance slit 8, causing the ions to be deflected. After the ions pass through the middle slit 9 and the exit slit 10 in sequence, they reach the receiver 5 after being deflected.

[0028] Two magnets 11 are arranged parallel to each other, and both magnets 11 are rectangular magnets 11.

[0029] The ion beam deflects in a magnetic field in a semi-circle of 180°.

[0030] The inlet slit 8 and the outlet slit 10 are symmetrically arranged with respect to the center of the deflection trajectory.

[0031] The opening direction of the middle slit 9 is perpendicular to the direction of motion of the ion beam at the midpoint of its trajectory.

[0032] The magnetic deflection mass spectrometer's magnetic analyzer is placed entirely in a vacuum environment (not shown) within a vacuum system, consisting of an analyzer housing 1. The analyzer housing 1 is internally sealed and evacuated to a high vacuum, forming a vacuum chamber 2 for ion movement.

[0033] An ion source 4 is located on one side below the inside of the analyzer housing 1. The ion source 4 is used to ionize the sample and generate an initial ion beam. An entrance slit 8 is located above the ion source 4, i.e. in the direction of ion beam emission. The slit width of the entrance slit 8 can be finely adjusted on the order of micrometers to millimeters. This allows for primary spatial screening of the ion beam emitted from the ion source 4, which is spatially divergent, and only allows one beam of ions with a smaller spatial dispersion to pass through.

[0034] A pair of rectangular magnets 11 are symmetrically fixed on the outside of the analyzer housing 1. The pair of rectangular magnets 11 are parallel to each other, and their magnetic pole surfaces generate a strong magnetic field region perpendicular to the ion beam deflection plane in the vacuum cavity 2 inside the analyzer housing 1. The pair of rectangular magnets 11 is the source of the Lorentz force required to generate ion deflection.

[0035] Inside the analyzer housing 1, near the midpoint of the theoretical deflection trajectory of the ion beam, there is a central slit 9. On the other side of the analyzer housing 1, below the exit direction of the ion beam after deflection, there is an exit slit 10. Below the exit slit 10, there is an ion receiver 5.

[0036] During operation, the ion beam is emitted from the ion source 4 and first undergoes preliminary collimation through the entrance slit 8. Subsequently, the collimated ion beam enters perpendicularly into the magnetic field generated by a pair of rectangular magnets 11. Under the action of the magnetic field perpendicular to its direction of motion, the ions are deflected by the Lorentz force. In this embodiment, the magnetic field is designed to cause the ion beam to undergo a 180° semi-circular deflection. Ideally, ions with a specific mass-to-charge ratio and energy will move along a fixed circular arc trajectory with a radius of R. The entrance slit 8 and the exit slit 10 are located exactly at the beginning and end of this theoretical trajectory and are symmetrically arranged with respect to the center of the arc.

[0037] The magnetic pole faces of one pair of rectangular magnets 11 are not perfectly parallel planes. By designing the contours of the pole faces to have specific minute curvatures, such as using a fan-shaped or hyperbolic cross-section, a spatially non-uniform magnetic field can be constructed. This magnetic field has specific gradients both perpendicular to the ion motion direction and parallel to the pole faces. This non-uniform magnetic field generates a directional focusing force on the moving ions, similar to the effect of a lens on light. This allows the ion beam, which initially diverges slightly due to minute differences in angle, to converge towards an ideal trajectory during deflection, rather than continuing to diverge. This focusing effect significantly increases the proportion of ions that can pass through the downstream slit.

[0038] Ions move along an approximately semi-circular trajectory in a magnetic field with a focusing effect. When they reach the vicinity of the midpoint of the trajectory, they encounter an intermediate slit 9. The slit 9 is also very narrow, and its opening direction is strictly perpendicular to the instantaneous motion direction of the ions at that point. Its function is to perform a second screening, intercepting those ions that have significantly deviated from the ideal trajectory in the first half of the deflection due to energy dispersion or angular error. Ions that pass through the intermediate slit 9 continue to complete the second half of the deflection and finally reach the exit slit 10. The exit slit 10 performs the final and most stringent screening, allowing only ions that arrive precisely along the designed trajectory to pass through and are finally detected by the receiver 5.

[0039] The core mechanism of the invention lies in the synergistic confinement of the three-stage "entry-middle-exit" slits. The entry slit 8 is responsible for initial collimation, reducing the angular dispersion of ions entering the magnetic field; the middle slit 9 preemptively eliminates most "unqualified" ions during deflection, reducing the pressure on final screening; and the exit slit 10 ensures the final quality resolution. This three-stage screening, performed sequentially and synergistically, significantly improves resolution. Simultaneously, the focusing effect provided by the magnetic field effectively constrains the spatial divergence of the ion beam during deflection, ensuring that a sufficient number of ions can "survive" and pass through these three slits, thereby achieving high resolution while minimizing sensitivity loss.

[0040] Although embodiments of the invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A high-resolution magnetic deflection mass spectrometer magnetic analyzer, characterized in that, include: The analyzer housing (1) has a vacuum chamber (2) inside for ion movement, and the inner wall of the vacuum chamber (2) is provided with a fixed partition (3). The analyzer housing (1) is provided with an ion source (4) for generating an ion beam and a receiver (5) for receiving ions. The ion source (4) and receiver (5) are both located inside the vacuum cavity (2), and the ion source (4) and receiver (5) are located on both sides of the fixed partition (3). The fixed partition (3) is provided with a first mounting plate (6) and a second mounting plate (7) on both sides respectively. The first mounting plate (6) is provided with an inlet slit (8), the second mounting plate (7) is provided with an outlet slit (10), and the fixed partition (3) is provided with a middle slit (9). Two magnets (11) are provided on both sides of the upper end of the analyzer housing (1). The inlet slit (8), the middle slit (9) and the outlet slit (10) are arranged sequentially along the ion deflection trajectory. They work together to filter out ions that deviate from the ideal trajectory due to energy and angle dispersion. The ion beam enters the magnetic field formed between the two magnets (11) through the inlet slit (8), causing the ions to deflect. The ions pass through the middle slit (9) and the outlet slit (10) in sequence to complete the deflection and reach the receiver (5).

2. The high-resolution magnetic deflection mass spectrometer magnetic analyzer according to claim 1, characterized in that, Two magnets (11) are arranged parallel to each other, and the two magnets (11) are rectangular magnets (11).

3. The high-resolution magnetic deflection mass spectrometer magnetic analyzer according to claim 2, characterized in that, The ion beam deflects in a 180° semicircle in the magnetic field.

4. The high-resolution magnetic deflection mass spectrometer magnetic analyzer according to claim 3, characterized in that, The inlet slit (8) and the outlet slit (10) are symmetrically arranged with respect to the center of the deflection trajectory.

5. The high-resolution magnetic deflection mass spectrometer magnetic analyzer according to claim 4, characterized in that, The opening direction of the intermediate slit (9) is perpendicular to the direction of motion of the ion beam at the midpoint of its trajectory.