A purification device for electronic-grade hydrogen peroxide

Abstract

This invention relates to the field of purification equipment technology, and particularly to a purification device for electronic-grade hydrogen peroxide, comprising: a tower body with an internal cavity penetrating the tower body; at least two sets of alignment tracks on the inner wall of the tower body, each track having a torsion section extending circumferentially along the tower body; multiple purification units, including a protective shell, a support slider, and a purification body; the support slider slides along the alignment track to the torsion section, and after the protective shell rotates, the support slider continues to slide along the alignment track through the torsion section; the purification body has an input component and an output component; a receiving unit is located at the bottom of the cavity, used to allow the bottommost purification unit to rotate out of the cavity and output; and a delivery pipeline detachably connected to the bottommost input component and the topmost output component. The electronic-grade hydrogen peroxide purification device provided by this invention can rapidly replenish resin according to production conditions and has good application value.

Description

Technical Field

[0001] This invention relates to the field of purification equipment technology, and in particular to a purification device for electronic-grade hydrogen peroxide. Background Technology

[0002] Currently, the main method for preparing electronic-grade hydrogen peroxide is the anthraquinone process, but the inherent characteristics of this process result in the presence of organic impurities such as anthraquinone degradation products and phosphate ester extractant residues in the hydrogen peroxide. To meet the ultra-high purity requirements of electronic-grade hydrogen peroxide, it is necessary to perform multi-stage adsorption, multiple ion exchanges, and precision filtration in series.

[0003] However, traditional ion exchange towers are mainly fixed-bed vertical structures with resin filled in a closed tower body. Resin replacement requires a complete shutdown, drainage of hydrogen peroxide, and disassembly of the upper and lower end caps and flange connections, which is cumbersome and time-consuming, leading to production interruptions. Furthermore, electronic-grade hydrogen peroxide has high purification requirements, and opening the tower to replace resin can easily introduce particulate matter and metal ions into the tower, potentially causing secondary contamination of the hydrogen peroxide in subsequent production. Moreover, the strong oxidizing properties of hydrogen peroxide cause resin deactivation, typically requiring replacement every 3-6 months. Frequent disassembly and reassembly can accelerate the aging of equipment seals, increasing the risk of leakage.

[0004] To avoid frequent disassembly and reassembly, the main improvement direction in the industry is the adoption of modular ion exchange columns. These columns pre-load resin into standardized column units, allowing for easy removal and addition of the units via quick-connect couplings, thus facilitating resin replacement. Compared to open-column systems, this switching process avoids exposing the resin and internal hydrogen peroxide. Alternatively, a continuous ion exchange system can be used, with multiple columns connected in parallel for rotation. When one column fails, it automatically switches to a backup column and regenerates / replaces offline, ensuring uninterrupted purification. However, the latter requires a sophisticated control system, and resin regeneration in hydrogen peroxide systems is difficult (due to irreversible oxidative degradation). Therefore, modular quick-change systems remain the mainstream improvement direction.

[0005] While modular quick-change solutions can accelerate resin replacement, the varying degrees of resin oxidation at different locations within the column unit mean that during use, the resin at the bottom of the filter unit may become oxidized and ineffective, while the resin at the top may remain partially effective. Continuing to use this solution can negatively impact the purification efficiency of the column unit. Direct replacement, on the other hand, would significantly increase production costs.

[0006] Therefore, how to further improve resin purification equipment so that it can quickly replace resin while meeting purification needs and improving production efficiency has become a research hotspot. Summary of the Invention

[0007] The technical problem to be solved by the present invention is to provide a purification device for electronic-grade hydrogen peroxide, which solves the problems of cumbersome resin replacement operation in existing resin purification equipment, which makes continuous production difficult, and is prone to leakage and pollution.

[0008] To solve the above-mentioned technical problems, the technical solution adopted by the present invention is: a purification device for electronic-grade hydrogen peroxide, comprising: The tower body has an internal cavity that runs through it. The inner wall of the tower body is provided with at least two sets of alignment tracks. The alignment tracks extend from the top of the tower body to the bottom of the tower body and have a torsion section extending along the circumference of the tower body. The purification unit comprises multiple units, including a protective shell, a support slider, and a purification body. The protective shell is located around the purification body, and the support slider is positioned on the outer wall of the protective shell along a corresponding alignment track. The support slider slides along the alignment track to a torsion section. After the protective shell rotates, the support slider continues to slide along the alignment track through the torsion section. The purification body is filled with ion exchange resin. An input component is located at the bottom of the purification body, and an output component is located at the top. The vertical projection of the output component in a single purification unit coincides with the vertical projection of the input component. When purification units are stacked, the output component of the purification unit above extends into the input component of the purification unit below it. The receiving unit is located at the bottom of the placement cavity and is used to allow the bottommost purification unit to rotate out of the placement cavity and output the purified unit. The delivery pipeline is detachably connected to the bottom input component and the top output component.

[0009] In one embodiment, the input component includes an input bellows, a first spring, and an input ball head; the input bellows is connected to the bottom of the purification body, the first spring is wound around the outer edge of the input bellows, and the input ball head is located at the end of the input bellows away from the purification body; The output component includes an output bellows, a second spring, and an output concave ball; the output bellows is connected to the top of the purification body, the second spring is wound around the outer edge of the output bellows, and the output concave ball is embedded at the end of the output bellows away from the purification body. When the purification units are stacked, the input ball head is embedded in the output concave ball and they abut against each other, causing the input bellows and output bellows to be compressed and shortened.

[0010] In one embodiment, the input component and the output component are provided with a flow control element, which controls the opening and closing of the input ball head or the output concave ball according to the pressure deformation of the input bellows or the output bellows.

[0011] In one embodiment, the protective housing includes a top cover and a bottom cover, which are generally frustoconical in shape. The top cover has a mounting chuck at its center, and the bottom cover has a rotating slot at its center. The depth of the rotating slot is greater than the height of the mounting chuck.

[0012] In one embodiment, the output component extends beyond the bottom cover, and the top cover is provided with a torsion arc groove corresponding to the output component. The output component is located at the center of the torsion arc groove, and the depth of the torsion arc groove gradually decreases from the output component to both ends.

[0013] In one embodiment, the receiving unit includes a rotating platform, a lifting assembly, and a displacement assembly. The displacement assembly is located at the bottom of the tower body, and the side wall of the tower body has a displacement opening corresponding to the displacement assembly. The lifting assembly is located on the displacement assembly, and the rotating platform is located at the top of the lifting assembly. After the rotating platform causes the bottom purification unit to rotate away from the placement cavity, the displacement assembly drives the lifting assembly to leave the tower body through the displacement opening.

[0014] In one embodiment, a rotating block is provided on the top of the rotating stage corresponding to the rotating slot.

[0015] In one embodiment, the purification body has a filling cavity and a plurality of baffles, the openings of which are alternately arranged on both sides of the filling cavity near or away from the input component.

[0016] In one embodiment, the alignment track includes an input section, an output section, a torsion section, and a placement section. The placement section is vertically formed on the side wall of the placement cavity. The torsion section is located at both ends of the placement section and extends circumferentially along the placement cavity. The input section and the output section are respectively located at the top and bottom of the placement cavity and communicate with the corresponding torsion sections.

[0017] In one embodiment, the bottom of the supporting slider is provided with ball bearings.

[0018] The beneficial effects of this invention are as follows: Currently, ion exchange towers mainly employ fixed-bed or modular quick-change column units. While the modular quick-change system accelerates resin replacement, the resin at different locations within the column unit is oxidized to varying degrees. During use, the resin at the bottom of the filter unit may become oxidized and ineffective, while the resin at the top remains partially effective. Continuing to use this partially ineffective resin at the bottom compromises the purification efficiency of the column unit. Directly replacing the resin at the bottom results in low resin utilization and significantly increases production costs.

[0019] The electronic-grade hydrogen peroxide purification equipment provided by this invention adopts a modular stacking architecture guided by alignment tracks and torsion sections. The purification units are stacked in a tower body with a placement cavity. The alignment tracks guide the supporting sliders of the purification units to slide in, and the torsion sections support and lock the purification units as a whole. The purification units can only be installed or disassembled and output after the torsion sections have rotated. The purification units between the two torsion sections are stacked by their own gravity to form a processing unit. At the same time, the alignment tracks restrict the rotation of the stacked purification units, thereby completing the alignment and installation of the purification units and preventing them from falling off within the placement cavity, ensuring the normal operation of production.

[0020] This invention, during the production process, removes the bottom purification unit while simultaneously adding a top purification unit. This allows for the replacement of the degraded resin within the tower, ensuring continuous renewal of the top purification unit. The degree of resin degradation in the purification unit is aligned with the flow direction of the hydrogen peroxide, guaranteeing that the hydrogen peroxide output from the top is purified to meet the required purity after passing through intact resin. Furthermore, the replacement operation is simple and convenient, significantly reducing costs and maintenance time while maintaining purification effectiveness, thus effectively improving production efficiency.

[0021] Meanwhile, since the purification units are independent entities, different types of resins can be filled in different purification units, allowing the purification equipment for electronic-grade hydrogen peroxide to change the type of resin and the number of purification units according to purification needs, effectively enhancing the overall adjustability and adaptability of the equipment.

[0022] Furthermore, the electronic-grade hydrogen peroxide purification equipment provided by this invention has a receiving unit at the bottom of the tower. During production, the receiving unit supports the purification unit at the bottom, ensuring the overall stability of the purification unit. Then, when replacement is needed, the bottom purification unit rotates and slowly descends to output power, ensuring that other purification units do not fall instantly, thus guaranteeing the safety of the equipment and the stability of the connection between the purification units.

[0023] Other features and beneficial effects of the invention will be set forth in the following description, and will be apparent in part from the description, or may be learned by practicing the invention. The objects of the invention and other beneficial effects may be realized and obtained by means of the structures and / or components pointed out in the description and claims. Attached Figure Description

[0024] Figure 1 This is a perspective view of an embodiment of the present invention; Figure 2 This is a top view of an embodiment of the present invention; Figure 3 for Figure 2 Cross-sectional view at point AA; Figure 4for Figure 3 A magnified view of a section at point B in the middle; Figure 5 This is a schematic diagram of the input and output components of an embodiment of the present invention equipped with a flow control element; Figure 6 This is an exploded view of the internal structure of an embodiment of the present invention; Figure 7 for Figure 6 Another angle of the exploded view; Figure 8 This is a three-dimensional schematic diagram of the tower body in one embodiment of the present invention.

[0025] Label Explanation: 1. Tower body; 11. Installation cavity; 12. Alignment track; 121. Input section; 122. Torsion section; 123. Installation section; 124. Output section; 2. Purification unit; 21. Protective shell; 211. Top cover; 212. Bottom cover; 213. Mounting chuck; 214. Rotary slot; 215. Torsion arc groove; 22. Supporting slider; 23. Purification body; 231. Input component; 2311. Input bellows; 2312. ... 1. Spring; 2313. Input ball head; 232. Output assembly; 2321. Output bellows; 2322. Second spring; 2323. Output concave ball; 233. Flow control component; 2331. Liquid flow pipe; 2332. Flow sleeve; 2333. Liquid channel; 234. Filling cavity; 235. Baffle plate; 3. Receiving unit; 31. Rotating platform; 311. Rotating block; 32. Lifting assembly; 33. Displacement assembly. Detailed Implementation

[0026] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below. Obviously, the described embodiments are some embodiments of the present invention, but not all embodiments. The technical features designed in the different embodiments of the present invention described below can be combined with each other as long as they do not conflict with each other. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0027] In the description of this invention, it should be noted that all terms used in this invention (including technical and scientific terms) have the same meaning as commonly understood by one of ordinary skill in the art to which this invention pertains, and should not be construed as limiting the invention; it should be further understood that the terms used in this invention should be understood to have the same meaning as those in the context of this specification and in the relevant field, and should not be understood in an idealized or overly formal sense, except as expressly defined in this invention.

[0028] To explain in detail the technical content, objectives, and effects of the present invention, the following description is provided in conjunction with the embodiments and accompanying drawings.

[0029] Please refer to Figures 1 to 8 A purification device for electronic-grade hydrogen peroxide, comprising: The tower body 1 has an internal cavity 11 that runs through the tower body 1. The inner wall of the tower body 1 is provided with at least two sets of alignment rails 12. The alignment rails 12 extend from the top of the tower body 1 to the bottom of the tower body 1. The alignment rails 12 have a torsion section 122 that extends circumferentially along the tower body 1. The purification unit 2 comprises multiple units, including a protective shell 21, a support slider 22, and a purification body 23. The protective shell 21 is disposed around the purification body 23. The support slider 22 is disposed on the outer wall of the protective shell 21 corresponding to the alignment track 12. The support slider 22 slides along the alignment track 12 to the torsion section 122. After the protective shell 21 rotates, the support slider 22 continues to slide along the alignment track 12 through the torsion section 122. The purification body 23 is filled with ion exchange resin. The bottom of the purification body 23 is provided with an input component 231, and the top of the purification body 23 is provided with an output component 232. The vertical projection of the output component 232 in a single purification unit 2 coincides with the vertical projection of the input component 231. When the purification units 2 are stacked, the output component 232 of the upper purification unit 2 extends into the input component 231 of the lower purification unit 2. The receiving unit 3 is located at the bottom of the placement cavity 11 and is used to allow the bottom purification unit 2 to rotate out of the placement cavity 11 and output. The delivery pipeline (not shown in the figure) is detachably connected to the bottom input component 231 and the top output component 232.

[0030] Specifically, the connection between the delivery pipeline and the purification unit 2 is made of a flexible hose, which allows the delivery pipeline to be moved when adding to or removing from the purification unit 2.

[0031] Specifically, the connection end of the delivery pipeline to the purification unit 2 adopts a structure corresponding to the input component 231 or the output component 232, so that the delivery pipeline can be adapted to the purification unit 2.

[0032] Preferably, the hose is driven by a structure such as a robotic arm, gantry, or telescopic push rod, allowing it to move closer to or further away from the input component 231 or output component 232 as needed, thereby separating it from or connecting it to the purification unit 2. Those skilled in the art can select appropriate delivery pipelines and corresponding drive structures as needed, without specific limitations.

[0033] Since the purification units 2 need to be stacked in the cavity 11, if the input component 231 and the output component 232 are connected by rigid flanges or straight pipes, not only is it difficult to compensate for manufacturing and installation tolerances, but also lateral stress is easily generated during docking, causing the sealing surface to bump and wear, resulting in micro-leakage or particle shedding. Therefore, in this embodiment, the input component 231 includes an input bellows 2311, a first spring 2312, and an input ball head 2313; the input bellows 2311 is connected to the bottom of the purification body 23, the first spring 2312 is wound around the outer edge of the input bellows 2311, and the input ball head 2313 is located at the end of the input bellows 2311 away from the purification body 23; The output component 232 includes an output bellows 2321, a second spring 2322, and an output concave ball 2323; the output bellows 2321 is connected to the top of the purification body 23, the second spring 2322 is wound around the outer edge of the output bellows 2321, and the output concave ball 2323 is embedded at the end of the output bellows 2321 away from the purification body 23. When purification units 2 are stacked, the input ball head 2313 is partially embedded in the output concave ball 2323 and abuts against each other, compressing the input bellows 2311 and output bellows 2321. This arrangement ensures that when purification units 2 are added, the input ball head 2313 contacts the protective housing 21 and is compressed back. After rotation to the correct position, the first spring 2312 causes the input ball head 2313 to embed into the output concave ball 2323, completing the alignment. Furthermore, after the input ball head 2313 and output concave ball 2323 are engaged, the first spring 2312 and the second spring 2322 keep the input ball head 2313 and output concave ball 2323 abutting against each other, enhancing sealing while buffering pulses and oscillations caused by the liquid flow, ensuring the overall stability of the device. Specifically, the input ball head 2313 and output concave ball 2323 use liquid flow channels to allow hydrogen peroxide liquid to flow in and out through them.

[0034] Preferably, a sealing ring is provided on the top of the output concave ball 2323.

[0035] Specifically, the output bellows 2321 and the input bellows 2311 are made of PFA / PTFE material.

[0036] Preferably, the first spring 2312 and the second spring 2322 are embedded in the input bellows 2311 and the output bellows 2321.

[0037] In this embodiment, the input component 231 and the output component 232 are provided with a flow control element 233. The flow control element 233 controls the opening and closing of the input ball head 2313 or the output concave ball 2323 according to the pressure deformation of the input bellows 2311 or the output bellows 2321. Specifically, the flow control element 233 in the input component 231 and the output component 232 can adopt a structure in which the liquid flow pipe 2331 and the flow sleeve 2332 cooperate. In the input component 231, the fluid flow pipe 2331 is connected to the fluid flow channel of the input ball head 2313. The flow sleeve 2332 is located in the middle of the input bellows 2311. The side wall of the fluid flow pipe 2331 is provided with a flow hole. The fluid flow pipe 2331 is embedded in the flow sleeve 2332 and can slide relative to the flow sleeve 2332. The flow sleeve 2332 is provided with a liquid channel 2333. When the input bellows 2311 is compressed to a certain extent, the flow hole and the liquid channel 2333 are connected to form a passage. When the input bellows 2311 is not compressed or is over-compressed, an open circuit is formed. In the output component 232, the fluid flow pipe 2331 is located below the output concave ball 2323 and is also connected to the fluid flow channel. The flow sleeve 2332 is located in the lower middle part of the output bellows 2321. When the output bellows 2321 is compressed to a certain extent, the flow hole connects with the liquid channel 2333, forming a passage; while when the output bellows 2321 is not compressed or is over-compressed, a circuit is formed. This arrangement ensures that the input component 231 and the output component 232 form a passage only when accurately aligned. During alignment or when misalignment, liquid cannot flow into or out of the purification unit 2, thereby preventing external impurities from entering the purification unit 2, avoiding hydrogen peroxide contamination, and preventing hydrogen peroxide leakage, effectively improving overall safety. Other flow control components 233 structures, such as cone valves or ball valves, can also be selected as needed, without specific limitations.

[0038] In this embodiment, the protective housing 21 includes a top cover 211 and a bottom cover 212. Both the top cover 211 and the bottom cover 212 are frustoconical in shape. The top cover 211 has a mounting chuck 213 at its center, and the bottom cover 212 has a rotating slot 214 at its center. The depth of the rotating slot 214 is greater than the height of the mounting chuck 213. This design allows the frustoconical top cover 211 and bottom cover 212 to fit more tightly when the purification units 2 are stacked, achieving a better sealing effect. The mounting chuck 213 facilitates the gripping and rotating of the purification units 2 by operators or robotic arms. The rotating slot 214 can accommodate the mounting chucks 213 of other purification units 2, further ensuring the tightness of the stack.

[0039] In this embodiment, the output component 232 extends beyond the bottom cover 212, and the top cover 211 is provided with a torsion groove 215 corresponding to the output component 232. The output component 232 is located at the center of the torsion groove 215, and the depth of the torsion groove 215 gradually decreases from the output component 232 to both ends. The torsion groove 215 can guide the input component 231, so that the input component 231 is gradually guided or guided away from the output component 232 during rotation, ensuring the smoothness and stability of alignment, and avoiding damage to the input component 231 due to excessive force during rotation.

[0040] In this embodiment, the receiving unit 3 includes a rotating platform 31, a lifting assembly 32, and a displacement assembly 33. The displacement assembly 33 is located at the bottom of the tower body 1, and the side wall of the tower body 1 has a displacement opening corresponding to the displacement assembly 33. The lifting assembly 32 is mounted on the displacement assembly 33, and the rotating platform 31 is located on top of the lifting assembly 32. After the bottom purification unit 2 rotates away from the placement cavity 11 due to the rotating platform 31, the displacement assembly 33 drives the lifting assembly 32 to leave the tower body 1 through the displacement opening. Specifically, the rotating platform 31 can be a rotary cylinder, the lifting assembly 32 can be a structure with a bracket and a lifting cylinder, and the displacement assembly 33 can be a structure with a sliding rail, a push rod, and a trolley. Those skilled in the art can select a suitable receiving unit 3 as needed, without specific limitations. Specifically, the outer diameter of the rotating platform 31 is smaller than the inner diameter of the placement cavity 11.

[0041] In this embodiment, a rotating locking block 311 is provided on the top of the rotating stage 31 corresponding to the rotating slot 214. This arrangement allows the rotating stage 31 to be embedded in the rotating slot 214 of the purification unit 2 at the bottom, thereby applying rotational power so that the purification unit 2 can complete the rotation and then disengage.

[0042] In this embodiment, the purification body 23 has a filling cavity 234 and multiple flow-blocking plates 235. The openings of the flow-blocking plates 235 are alternately arranged on both sides of the filling cavity 234, near or far from the input component 231. This arrangement forms a serpentine channel within the filling cavity 234, thereby restricting the flow path of hydrogen peroxide and improving the purification effect.

[0043] In this embodiment, the alignment track 12 includes an input section 121, an output section 124, a torsion section 122, and a placement section 123. The placement section 123 is vertically formed on the side wall of the placement cavity 11. The torsion section 122 is disposed at both ends of the placement section 123 and extends circumferentially along the placement cavity 11. The input section 121 and the output section 124 are respectively disposed at the top and bottom of the placement cavity 11 and communicate with the corresponding torsion section 122.

[0044] In this embodiment, the bottom of the support slider 22 is provided with ball bearings. This arrangement can reduce the frictional force of the purification unit 2 when it rotates in the torsion section 122, reduce the wear of the support slider 22, and improve the smoothness of rotation.

[0045] Furthermore, those skilled in the art should understand that although many problems exist in the prior art, each embodiment or technical solution of the present invention can be improved in only one or a few aspects, without necessarily solving all the technical problems listed in the prior art or the background art simultaneously. Those skilled in the art should understand that any content not mentioned in a claim should not be construed as a limitation on that claim.

[0046] Although this document frequently uses terms such as tower body and cavity placement, the possibility of using other terms is not excluded. These terms are used merely for the convenience of describing and explaining the essence of the invention; interpreting them as any kind of additional limitation would contradict the spirit of the invention. The terms "first," "second," etc. (if present) in the specification and claims of the embodiments of the invention are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence.

[0047] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, and not to limit them; although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features; and these modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present invention.

Claims

1. A purification device for electronic-grade hydrogen peroxide, characterized in that, include: The tower body (1) has an internal cavity (11) that runs through the tower body (1). The inner wall of the tower body (1) is provided with at least two sets of alignment tracks (12). The alignment tracks (12) extend from the top of the tower body (1) to the bottom of the tower body (1). The alignment tracks (12) have a torsion section (122) that extends circumferentially along the tower body (1). The purification unit (2) is provided with multiple components, including a protective shell (21), a support slider (22), and a purification body (23). The protective shell (21) is disposed around the purification body (23). The support slider (22) is disposed on the outer wall of the protective shell (21) corresponding to the alignment track (12). The support slider (22) slides along the alignment track (12) to the torsion section (122). After the protective shell (21) rotates, the support slider (22) continues to slide along the alignment track (12) through the torsion section (122). The purification body (23) is filled with ion exchange resin. The bottom of the purification body (23) is provided with an input component (231) and the top of the purification body (23) is provided with an output component (232). The vertical projection of the output component (232) in a single purification unit (2) coincides with the vertical projection of the input component (231). When the purification units (2) are stacked, the output component (232) of the purification unit (2) located above extends into the input component (231) of the purification unit (2) located below it. The receiving unit (3) is located at the bottom of the placement cavity (11) and is used to allow the bottommost purification unit (2) to rotate out of the placement cavity (11) and output; The delivery pipeline is detachably connected to the bottommost input component (231) and the topmost output component (232).

2. The purification equipment for electronic-grade hydrogen peroxide according to claim 1, characterized in that: The input component (231) includes an input bellows (2311), a first spring (2312), and an input ball head (2313); the input bellows (2311) is connected to the bottom of the purification body (23), the first spring (2312) is wound around the outer edge of the input bellows (2311), and the input ball head (2313) is located at the end of the input bellows (2311) away from the purification body (23); The output assembly (232) includes an output bellows (2321), a second spring (2322), and an output concave ball (2323); the output bellows (2321) is connected to the top of the purification body (23), the second spring (2322) is wound around the outer edge of the output bellows (2321), and the output concave ball (2323) is embedded at the end of the output bellows (2321) away from the purification body (23); When the purification units (2) are stacked, the input ball head (2313) is partially embedded in the output concave ball (2323) and abuts against each other, causing the input bellows (2311) and the output bellows (2321) to be compressed and shortened.

3. The purification equipment for electronic-grade hydrogen peroxide according to claim 2, characterized in that: The input component (231) and the output component (232) are provided with a flow control component (233), which controls the opening and closing of the input ball head (2313) or the output concave ball (2323) according to the pressure deformation of the input bellows (2311) or the output bellows (2321).

4. The purification equipment for electronic-grade hydrogen peroxide according to claim 1, characterized in that: The protective housing (21) includes a top cover (211) and a bottom cover (212). The top cover (211) and the bottom cover (212) are generally truncated cone-shaped. The top cover (211) has a mounting chuck (213) at its center, and the bottom cover (212) has a rotating slot (214) at its center. The depth of the rotating slot (214) is greater than the height of the mounting chuck (213).

5. The purification equipment for electronic-grade hydrogen peroxide according to claim 4, characterized in that: The output component (232) extends outside the bottom cover (212), and the top cover (211) is provided with a torsion groove (215) corresponding to the output component (232). The output component (232) is located at the center of the torsion groove (215), and the depth of the torsion groove (215) gradually decreases from the output component (232) to both ends.

6. The purification equipment for electronic-grade hydrogen peroxide according to claim 4, characterized in that: The receiving unit (3) includes a rotating platform (31), a lifting assembly (32), and a displacement assembly (33). The displacement assembly (33) is located at the bottom of the tower body (1). The side wall of the tower body (1) is provided with a displacement opening corresponding to the displacement assembly (33). The lifting assembly (32) is located on the displacement assembly (33). The rotating platform (31) is located at the top of the lifting assembly (32). After the rotating platform (31) causes the bottom purification unit (2) to rotate away from the placement cavity (11), the displacement assembly (33) drives the lifting assembly (32) to leave the tower body (1) through the displacement opening.

7. The purification equipment for electronic-grade hydrogen peroxide according to claim 6, characterized in that: The top of the rotating platform (31) is provided with a rotating block (311) corresponding to the rotating slot (214).

8. The purification equipment for electronic-grade hydrogen peroxide according to claim 1, characterized in that: The purification body (23) has a filling cavity (234) and a plurality of baffles (235) inside, with the openings of the baffles (235) alternately arranged on both sides of the filling cavity (234) near or away from the input component (231).

9. The purification equipment for electronic-grade hydrogen peroxide according to claim 1, characterized in that: The alignment track (12) includes an input section (121), an output section (124), a torsion section (122), and a placement section (123). The placement section (123) is vertically opened on the side wall of the placement cavity (11). The torsion section (122) is disposed at both ends of the placement section (123) and extends circumferentially along the placement cavity (11). The input section (121) and the output section (124) are respectively disposed at the top and bottom of the placement cavity (11) and communicate with the corresponding torsion section (122).

10. The purification equipment for electronic-grade hydrogen peroxide according to claim 1, characterized in that: The bottom of the supporting slider (22) is provided with ball bearings.

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