Clean control system and method

Abstract

The invention discloses a cleaning control system which comprises a building dust detection unit, an equipment dust detection unit and a cleaning controller. And the cleaning controller is configured to determine the change value of the dust vibration height in the set time in the building space defined by the building based on the first dust density change value, the second dust density change value and the set density of the equipment in the building. And obtaining a plurality of dust density positions greater than a threshold value according to the change value of the dust vibration height. Clean control information is generated according to the positions, corresponding to the air speed control units and the humidity control units, of the dust density positions and used for driving the air speed control units and the humidity control units at the corresponding positions to operate. Therefore, precise positioning and dynamic regulation and control of a dust gathering area are realized, and disordered diffusion of particulate matters in a space is effectively inhibited. And the environmental stability and the product yield level in the semiconductor manufacturing process are remarkably improved.

Description

Technical Field

[0001] This invention relates to the field of space purification technology. Specifically, it relates to a cleanroom control system and method. Background Technology

[0002] Semiconductor cleanrooms, also known as clean rooms or dust-free workshops, are an indispensable core infrastructure for semiconductor manufacturing. Their core function is to create a protected, high-purity environment by precisely controlling key parameters such as particle concentration, temperature, humidity, air pressure, and airflow speed within the space, thereby minimizing the impact of contaminants such as dust, harmful gases, and bacteria on the precision manufacturing process.

[0003] For example, in advanced 3nm chip manufacturing processes, the number of particles larger than 0.5 micrometers per cubic foot of air must not exceed one, which sets an extremely high standard for clean environments. To achieve this goal, cleanrooms generally rely on high-efficiency air filtration systems, airflow organization patterns, and sophisticated air conditioning and pressure control systems to maintain a stable internal environment, thereby ensuring the yield rate of key processes such as photolithography and etching.

[0004] Existing cleanroom purification technologies still face significant challenges. Traditional control strategies often focus on maintaining overall environmental parameters within the workshop, lacking the ability to accurately perceive and respond to local pollution sources and the dynamic migration of pollutants. The complex building structures, equipment layouts, and personnel activities within semiconductor workshops can lead to uneven airflow distribution, easily generating eddies or dead zones, thus causing dust accumulation in localized areas. Summary of the Invention

[0005] The purpose of this invention is to provide a cleanroom control method and system that solves the problem of cleaning dust dead zones in existing semiconductor cleanrooms.

[0006] In a first aspect, the present invention provides a cleanroom control system, which is arranged inside a cleanroom. The cleanroom control system controls airflow control units at multiple locations and humidity control units at multiple locations for micro-dust filtration.

[0007] The cleanroom control system includes: The building dust detection unit is set at a predetermined height where the building contacts the ground and is configured to detect the first dust density change value of the building within a predetermined time.

[0008] The equipment dust detection unit is installed at a predetermined height between buildings and is configured to detect the second dust density change value of the equipment within a predetermined time period. The cleanroom controller is configured as follows: Based on the first dust density change value, the second dust density change value, and the equipment installation density in the building, the change value of dust vibration height in the building space enclosed by the building is determined within a set time period.

[0009] Based on the change in dust vibration height, multiple dust density locations with values ​​greater than a threshold are obtained.

[0010] Based on the location of dust density corresponding to the location of wind speed control unit and humidity control unit, cleanroom control information is generated to drive the operation of wind speed control unit and humidity control unit at the corresponding location.

[0011] In one embodiment of the cleanroom control system of the present invention, the system further includes: calibrating at multiple detection time points based on a first dust density change value and a second dust density change value to obtain the dust deposition amount of the building space at multiple detection time points, so as to evaluate the cleanliness of the building space.

[0012] In one embodiment of the cleanroom control system of the present invention, it further includes: The locations in the building space prone to dust accumulation are determined based on the first dust density change value, the second dust density change value, and the narrow locations in the building space information.

[0013] Based on the location of the wind speed control unit and humidity control unit corresponding to the location of the dust accumulation point, dust accumulation cleaning control information is generated to drive the wind speed control unit and humidity control unit at the corresponding location to operate.

[0014] In one embodiment of the cleanroom control system of the present invention, it further includes: a building monitoring unit, which includes: The building wind speed detection module is installed on the building and configured to collect ambient wind speed and clean air speed information within a set time period. The ambient wind speed information is the wind speed when the wind speed control unit is in low-wind mode. The clean air speed information is the wind speed when the wind speed control unit is in filter mode. The equipment humidity detection module and the building humidity detection module are installed on the building and configured to collect ambient humidity and cleanroom humidity information within a set time period. The ambient humidity information is the humidity when the humidity control unit is in non-humidification mode. The cleanroom humidity information is the humidity when the humidity control unit is in humidification mode.

[0015] In one embodiment of the cleanroom control system of the present invention, it further includes: an equipment monitoring unit, which includes: The equipment wind speed detection module is installed on the equipment and configured to collect ambient wind speed information and clean air speed information within a set time period. The ambient wind speed information is the wind speed when the wind speed control unit is in low-wind control mode. The clean air speed information is the wind speed when the wind speed control unit is in filter control mode. The equipment humidity detection module is installed on the equipment and configured to collect ambient humidity and cleanroom humidity information within a set time period. The ambient humidity information is the humidity when the humidity control unit is in non-humidification mode. The cleanroom humidity information is the humidity when the humidity control unit is in humidification mode.

[0016] In one embodiment of the cleanroom control system of the present invention, the cleanroom controller is further configured to: Based on the building's environmental wind speed and clean air speed information, the building's environmental humidity information and clean humidity information, and combined with multiple dust density locations, the difference location points are obtained.

[0017] Based on the locations of the nearby wind speed control unit and humidity control unit corresponding to the difference location, the building enhanced cleaning control information is generated to drive the operation of the wind speed control unit and humidity control unit at the corresponding location.

[0018] In one embodiment of the cleanroom control system of the present invention, the cleanroom controller is further configured to: Based on the ambient wind speed and clean air speed information, the ambient humidity information and clean humidity information of the equipment, and combined with multiple dust density locations, the equipment difference location points are obtained.

[0019] Based on the locations of the nearest wind speed control unit and humidity control unit corresponding to the equipment's different locations, enhanced cleanliness control information is generated to drive the wind speed control unit and humidity control unit at the corresponding locations to operate.

[0020] In one embodiment of the cleanroom control system of the present invention, the cleanroom controller is further configured to: Obtain the density generation time of the dust density location within a set time period.

[0021] Based on the population density information corresponding to the density generation time, conventional cleanroom control information is generated to drive the wind speed control unit and humidity control unit at the corresponding location. At multiple density generation time points, the corresponding location will operate automatically.

[0022] A second aspect of the present invention provides a cleanroom control method, which is implemented through a cleanroom control system located inside a cleanroom. The cleanroom control system controls airflow control units at multiple locations and humidity control units at multiple locations for micro-dust filtration.

[0023] Cleanliness control methods include: The building dust detection unit detects the first change in dust density within a set time period.

[0024] The equipment's dust detection unit detects the second dust density change value within a set time period.

[0025] Based on the first dust density change value, the second dust density change value, and the equipment installation density in the building, the change value of dust vibration height in the building space enclosed by the building is determined within a set time period.

[0026] Based on the change in dust vibration height, multiple dust density locations with values ​​greater than a threshold are obtained.

[0027] Based on the location of dust density corresponding to the location of wind speed control unit and humidity control unit, cleanroom control information is generated to drive the operation of wind speed control unit and humidity control unit at the corresponding location.

[0028] In one embodiment of the cleanroom control method of the present invention, it further includes: Based on the first and second dust density change values, calibrations were performed at multiple detection time points to obtain the dust deposition amount in the building space at multiple detection time points, in order to assess the cleanliness of the building space.

[0029] The locations in the building space prone to dust accumulation are determined based on the first dust density change value, the second dust density change value, and the narrow locations in the building space information.

[0030] Based on the location of the wind speed control unit and humidity control unit corresponding to the location of the dust accumulation point, dust accumulation cleaning control information is generated to drive the wind speed control unit and humidity control unit at the corresponding location to operate.

[0031] The following section will further explain the characteristics, technical features, advantages, and implementation methods of cleanroom control methods and systems in a clear and easy-to-understand manner, with the aid of accompanying diagrams. Attached Figure Description

[0032] Figure 1 This is a schematic diagram illustrating the composition of a cleanroom control system in one embodiment of the present invention.

[0033] Figure 2 This is a flowchart illustrating a cleanliness control method in one embodiment of the present invention. Detailed Implementation

[0034] To provide a clearer understanding of the technical features, objectives, and effects of the invention, specific embodiments of the invention are now described with reference to the accompanying drawings. In the drawings, the same reference numerals indicate components with the same or similar structures but the same function.

[0035] In this document, "illustrative" means "serving as an example, illustration, or description," and any illustrations or embodiments described herein as "illustrative" should not be construed as a more preferred or advantageous technical solution. For the sake of brevity, each figure only schematically shows the parts relevant to this exemplary embodiment, and they do not represent the actual structure or true proportions of the product.

[0036] In a first aspect, this invention provides a cleanroom control system arranged inside a cleanroom. The cleanroom control system controls multiple wind speed control units and multiple humidity control units at various locations for micro-dust filtration. The aforementioned cleanroom refers to a high-cleanliness environment in a semiconductor manufacturing workshop used for wafer fabrication, where stringent requirements are placed on the concentration of airborne particles, temperature, humidity, and airflow organization.

[0037] The aforementioned wind speed control units and multiple humidity control units are installed at various locations within the workshop. The wind speed control units, specifically, can utilize variable frequency fans or intelligent air valves, capable of dynamically adjusting local wind speeds based on real-time monitored airflow data to ensure stable and unidirectional airflow in critical process areas. The humidity control units consist of precision humidifiers and dehumidifiers, combined with environmental sensor feedback, to achieve precise control of relative humidity within the space, with an error range controlled within ±1%.

[0038] like Figure 1 As shown, the cleanroom control system of the present invention includes: The building dust detection unit 101 is positioned at a predetermined height where the building contacts the ground, and is configured to detect the first change in dust density within a predetermined time period. This building dust detection unit 101 can be implemented using a dust detection sensor, specifically the LS-6A laser scattering dust detection sensor, which features high sensitivity and rapid response, and can monitor the concentration of suspended particulate matter with a diameter of 0.3 micrometers and above in real time. This sensor is arranged in a multi-point array at a height of 30 cm from the bottom of the wall to capture dust disturbed by foot traffic or equipment vibration.

[0039] The equipment dust detection unit 201 is installed at a set height between buildings and is configured to detect the second dust density change value of the equipment within a set time period. The equipment dust detection unit 201 uses a PSL-3B type particulate matter sensor module, installed at a height of 1.2 meters around the process equipment platform to monitor the dynamic release of particles caused by friction, static electricity, or material volatilization during equipment operation. This sensor features a wide measurement range and low background noise, accurately identifying dust change trends within the 0.1 to 5 micrometer particle size range, providing data support for locating local pollution sources.

[0040] The equipment dust detection unit 301 is configured as follows: Based on the first dust density change value, the second dust density change value, and the equipment placement density within the building, the change value of dust vibration height within the building space enclosed by the building is determined over a set time period. The change value of dust vibration height can be calculated by an algorithm model to determine the vertical diffusion trend of dust disturbance, combined with a three-dimensional spatial airflow organization simulation, to generate a real-time dust concentration gradient distribution cloud map.

[0041] Based on the changes in dust vibration height, multiple dust density locations exceeding a threshold are identified. These multiple dust density locations can be represented as three-dimensional coordinate points of dust accumulation, marked as potential pollution hotspots. Based on the spatiotemporal evolution patterns of these multiple dust density locations, dynamic clustering analysis is performed using historical data to identify high-frequency, high-concentration pollution source diffusion paths, thereby optimizing the linkage response strategy between airflow organization and the filtration system.

[0042] Based on the location of dust density corresponding to the positions of the wind speed control unit and humidity control unit, cleanliness control information is generated to drive the operation of the wind speed control unit and humidity control unit at the corresponding locations. This achieves directional airflow guidance and coordinated local humidity control. After receiving the cleanliness control information, the wind speed control unit dynamically adjusts the outlet wind speed and deflection angle of the jet fan to form a gradient air curtain targeting the pollution hotspot area, suppressing the horizontal diffusion of dust. At the same time, the humidity control unit constructs a humidity barrier around the high dust density area through a high-pressure micro-mist humidifier, utilizing the water molecule aggregation effect to promote particle settling.

[0043] Therefore, the operation of the cleanroom control system in this invention involves first collecting real-time data on the concentration, particle size distribution, and spatial location of dust particles using multi-source sensors. This data is then dynamically fitted using a three-dimensional airflow model inside the building to accurately locate the pollution source. Based on the changes in dust vibration height and the results of multi-point density clustering, the system triggers a hierarchical control strategy.

[0044] When a sudden change in particle concentration gradient is detected, the corresponding area's jet air curtain and micro-mist humidification linkage mechanism is automatically activated to form a directional suppression field. The wind speed control unit continuously optimizes the airflow organization direction based on feedback information to ensure that clean airflow covers key pollution paths. At the same time, the humidity control unit adjusts the local relative humidity to above 65% to promote the coagulation and sedimentation of submicron particles. Ultimately, this achieves rapid capture and steady-state suppression of dust within the space, maintaining overall cleanliness within the ISO 14644-1 Class 5 standard range.

[0045] In one embodiment of the cleanroom control system of the present invention, the method further includes: calibrating at multiple detection time points based on a first dust density change value and a second dust density change value to obtain the dust deposition amount in the building space at the multiple detection time points, so as to evaluate the cleanliness of the building space. Thus, the dust deposition amount at multiple detection time points is used to evaluate the evolution trend of the cleanliness performance of the building space.

[0046] In one embodiment of the cleanroom control system of the present invention, it further includes: Based on the first and second dust density change values ​​and narrow locations in the building space information, the dust-prone areas in the building space are determined. Dust accumulation control information is generated based on the corresponding locations of the wind speed control unit and humidity control unit, which are used to drive the operation of the wind speed control unit and humidity control unit at the corresponding locations. Thus, by controlling the wind speed control unit and humidity control unit at the locations of the dust-prone areas, the corresponding wind speed control unit is driven to adjust the local airflow speed, and the timing and intensity of the mist released by the humidity control unit are adjusted. This creates a synergistic effect of airflow lifting and humidity aggregation in the dust-prone areas, preventing the long-term accumulation of particles in narrow locations such as corners, crevices, and the backs of equipment, further improving cleaning efficiency and the stability of space cleanliness.

[0047] In one embodiment of the cleanroom control system of the present invention, it further includes: a building monitoring unit, which includes: The building wind speed detection module is installed on the building and configured to collect ambient wind speed and clean air speed information within a set time period. The ambient wind speed information is the wind speed when the wind speed control unit is in a low-wind setting. The clean air speed information is the wind speed when the wind speed control unit is in a filter setting.

[0048] The equipment humidity detection module and the building humidity detection module are installed on the building and configured to collect ambient humidity and cleanroom humidity information within a set time period. Ambient humidity information is collected when the humidity control unit is in non-humidification mode, while cleanroom humidity information is collected when the humidity control unit is in humidification mode. By analyzing the difference between ambient and cleanroom humidity information, the effectiveness of humidification intervention can be determined in real time. Furthermore, by combining the dynamic comparison of ambient and cleanroom wind speeds, the trend of airflow organization efficiency decline can be inferred, thereby optimizing control parameters.

[0049] In one embodiment of the cleanroom control system of the present invention, it further includes: an equipment monitoring unit, which includes: The equipment wind speed detection module is installed on the equipment and configured to collect ambient wind speed and clean air speed information within a set time period. The ambient wind speed information is the wind speed when the wind speed control unit is in low-wind mode. The clean air speed information is the wind speed when the wind speed control unit is in filter mode.

[0050] The equipment humidity detection module, installed on the equipment, is configured to collect ambient humidity and cleanroom humidity information within a set time period. Ambient humidity information is collected when the humidity control unit is in non-humidification mode, while cleanroom humidity information is collected when the humidity control unit is in humidification mode. By analyzing the difference between ambient and cleanroom humidity information, the impact of humidification on the local microenvironment of the equipment is determined. Combined with local wind speed trends, the effectiveness of airflow disturbance in suppressing particulate matter settling is assessed. This allows for dynamic adjustment of wind speed and humidity control parameters, ensuring that the equipment surface and surrounding microenvironment are always in an optimal state for dust prevention and antibacterial control, thus improving the long-term stability and cleanliness consistency of the system.

[0051] In one embodiment of the cleanroom control system of the present invention, the equipment dust detection unit 301 is further configured as follows: Based on the building's environmental wind speed and clean air speed information, the building's environmental humidity information and clean humidity information, and combined with multiple dust density locations, the difference location points are obtained.

[0052] Based on the locations of nearby wind speed and humidity control units corresponding to the points of difference, enhanced building cleanliness control information is generated to drive the operation of the corresponding wind speed and humidity control units. This allows the wind speed and humidity control units to collaboratively adjust local airflow organization and humidity gradients, suppressing particulate matter diffusion paths and enhancing cleanliness efficiency in critical areas. Based on the dynamic evolution trend of the points of difference, the system adaptively optimizes multi-node control parameters, improving the uniformity and stability of the overall clean environment and ensuring continuous compliance with high-level cleanliness requirements under complex operating conditions.

[0053] In one embodiment of the cleanroom control system of the present invention, the equipment dust detection unit 301 is further configured as follows: Based on the ambient wind speed and clean air speed information, the ambient humidity information and clean humidity information of the equipment, and combined with multiple dust density locations, the equipment difference location points are obtained.

[0054] Based on the locations of the nearest wind speed control unit and humidity control unit corresponding to the differences in equipment positions, enhanced cleanliness control information is generated to drive the operation of the wind speed control unit and humidity control unit at the corresponding locations. This allows the wind speed control unit and humidity control unit to collaboratively regulate the local airflow speed and humidity distribution, forming a dynamic microenvironment control field that effectively blocks the adhesion path of particulate matter to the equipment surface.

[0055] In one embodiment of the cleanroom control system of the present invention, the equipment dust detection unit 301 is further configured as follows: Obtain the density generation time of the dust density location within a set time period.

[0056] Based on the pedestrian density information corresponding to the density generation time, standard cleanroom control information is generated to drive the wind speed control unit and humidity control unit at the corresponding locations. These units operate automatically at their respective locations during multiple density generation time points. By proactively initiating coordinated wind speed and humidity control during periods of high pedestrian activity, dynamic pollution barrier capabilities are enhanced. The control strategy is adaptively optimized based on historical density generation patterns, ensuring that the cleanliness of the microenvironment consistently meets process requirements. This effectively reduces the risk of particulate matter accumulation on equipment surfaces and improves system response accuracy and energy efficiency.

[0057] The second aspect of the invention, as follows Figure 2 As shown, a cleanroom control method is provided, which is implemented through a cleanroom control system located inside the cleanroom. The cleanroom control system controls the airflow control units and humidity control units at multiple locations of the micro-dust filtration system.

[0058] Cleanliness control methods include: Step S101: The building dust detection unit detects the first dust density change value of the building within a set time.

[0059] In step S102, the equipment dust detection unit 201 detects the second dust density change value of the equipment within a set time.

[0060] Step S103: Based on the first dust density change value, the second dust density change value, and the installation density of the equipment in the building, determine the change value of the dust vibration height in the building space enclosed by the building within a set time period.

[0061] Step S104: Based on the change value of the dust vibration height, obtain multiple dust density locations that are greater than the threshold.

[0062] Step S105: Based on the location of the dust density corresponding to the position of the wind speed control unit and the humidity control unit, generate cleanroom control information to drive the wind speed control unit and humidity control unit at the corresponding position.

[0063] Therefore, the advantage of the cleanroom control method in this invention lies in its ability to sense the dynamic changes in dust density between buildings and equipment in real time, accurately identify dust accumulation areas, and coordinate with wind speed and humidity control units to implement targeted intervention. By constructing a dynamic cleanroom gradient field in a spatial dimension, it suppresses the settling and diffusion paths of particulate matter. Combined with a dust vibration height trend prediction model, it initiates localized enhanced purification programs in advance, achieving a technological leap from passive filtration to active barrier, significantly improving the stability of the ultra-clean environment and the reliability of equipment operation.

[0064] In one embodiment of the cleanroom control method of the present invention, it further includes: Based on the first and second dust density change values, calibrations were performed at multiple detection time points to obtain the dust deposition amount in the building space at multiple detection time points, in order to assess the cleanliness of the building space.

[0065] The locations in the building space prone to dust accumulation are determined based on the first dust density change value, the second dust density change value, and the narrow locations in the building space information.

[0066] Based on the location of the wind speed control unit and humidity control unit corresponding to the location of the dust accumulation point, dust accumulation cleaning control information is generated to drive the wind speed control unit and humidity control unit at the corresponding location to operate.

[0067] It should be understood that although this specification describes various embodiments, not every embodiment contains only one independent technical solution. This way of describing the specification is only for clarity. Those skilled in the art should regard the specification as a whole. The technical solutions in each embodiment can also be appropriately combined to form other embodiments that can be understood by those skilled in the art.

[0068] The detailed descriptions listed above are merely specific descriptions of feasible embodiments of the present invention, and are not intended to limit the scope of protection of the present invention. All equivalent embodiments or modifications made without departing from the spirit of the present invention should be included within the scope of protection of the present invention.

Claims

1. A clean control system, which clean control system is arranged inside a super-clean workshop; The clean control system controls the air speed control units of multiple positions of the micro dust filtration and the humidity control units of multiple positions; The clean control system comprises: A building dust detection unit is arranged at a set height of a building contacting with the ground, configured to detect a first dust density variation value of dust of the building within a set time; A device dust detection unit is arranged at the set height of a device between the buildings, configured to detect a second dust density variation value of dust of the device within a set time; and a clean controller is configured to: Determine a variation value of dust vibration height of a building space surrounded by the buildings within a set time based on the first dust density variation value, the second dust density variation value and a set density of the device in the building; Obtain multiple dust density positions greater than a threshold value according to the variation value of the dust vibration height; Generate clean control information according to positions of the dust density positions corresponding to the air speed control units and the humidity control units, for driving the air speed control units and the humidity control units at the corresponding positions to operate.

2. The clean-up control system according to claim 1, characterized by Further comprising: Calibrate the first dust density variation value and the second dust density variation value at multiple detection time points to obtain dust deposition amounts of the building space at the multiple detection time points, so as to evaluate the cleanliness of the building space.

3. The clean-up control system of claim 1, wherein, Further comprising: Determine dust accumulation positions of the building space according to the first dust density variation value, the second dust density variation value and narrow positions in the building space information: Generate dust accumulation clean control information according to the dust accumulation positions corresponding to the positions of the air speed control units and the humidity control units, for driving the air speed control units and the humidity control units at the corresponding positions to operate.

4. The clean-up control system of claim 1, wherein Further comprising: A building monitoring unit comprises: A building air speed detection module is arranged on the building, configured to collect environmental air speed information and clean air speed information of the building within the set time; wherein the environmental air speed information is air speed information when the air speed control unit is in breeze control; the clean air speed information is air speed information when the air speed control unit is in filtration control; and a device humidity detection module is arranged on the building, configured to collect environmental humidity information and clean humidity information of the building within the set time; wherein the environmental humidity information is humidity information when the humidity control unit is in non-humidification control; the clean humidity information is humidity information when the humidity control unit is in humidification control.

5. The clean-up control system according to claim 4, wherein Further comprising: A device monitoring unit comprises: A device wind speed detection module is arranged on the device and configured to collect environment wind speed information and clean wind speed information of the device within the set time. The environment wind speed information is the wind speed information when the wind speed control unit is in breeze control. The clean wind speed information is the wind speed information when the wind speed control unit is in filtration control.

6. The clean-up control system according to claim 5, wherein The clean controller is further configured to: According to the environment wind speed information and clean wind speed information of the building, the environment humidity information and clean humidity information of the building, and in combination with the plurality of dust density positions, a difference position point is obtained. According to the positions of the adjacent wind speed control unit and humidity control unit corresponding to the difference position point, building enhanced clean control information is generated for driving the wind speed control unit and humidity control unit at the corresponding positions to operate.

7. The clean-up control system according to claim 6, wherein The clean controller is further configured to: According to the environment wind speed information and clean wind speed information of the device, the environment humidity information and clean humidity information of the device, and in combination with the plurality of dust density positions, a device difference position point is obtained. According to the positions of the adjacent wind speed control unit and humidity control unit corresponding to the device difference position point, device enhanced clean control information is generated for driving the wind speed control unit and humidity control unit at the corresponding positions to operate.

8. The clean-up control system according to claim 7, characterized by The clean controller is further configured to: Obtain a density generation time of the dust density position within the set time. According to the people flow density information corresponding to the density generation time, generate regular super-clean control information for driving the wind speed control unit and humidity control unit at the corresponding positions to automatically operate at the corresponding positions at a plurality of density generation time points.

9. A clean control method, which is implemented by a clean control system arranged inside a super-clean workshop. The clean control system controls the wind speed control units of a plurality of positions and the humidity control units of a plurality of positions of micro-dust filtration. The clean control method comprises: Detecting, by a building dust detection unit, a first dust density change value of dust of the building within a set time; Detecting, by a device dust detection unit, a second dust density change value of dust of the device within a set time; Based on the first dust density change value, the second dust density change value, and the setting density of the device in the building, determining a change value of dust vibration height of a building space surrounded by the building within a set time; According to the change value of dust vibration height, a plurality of dust density positions greater than a threshold value are obtained. According to the positions of the wind speed control unit and the humidity control unit corresponding to the dust density positions, generate clean control information for driving the wind speed control unit and humidity control unit at the corresponding positions to operate.

10. The clean-up method according to claim 9, wherein Further comprising: According to the first dust density change value, the second dust density change value, and the building space information, a dust deposition amount at a plurality of detection time points is obtained to evaluate the cleanliness of the building space. According to the first dust density change value, the second dust density change value, and the narrow position in the building space information, a dust-accumulating position of the building space is determined: According to the position of the dust-accumulating position corresponding to the air speed control unit and the humidity control unit, dust cleaning control information is generated to drive the air speed control unit and the humidity control unit at the corresponding position to operate.

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