Opening mechanism and semiconductor equipment

Abstract

This application relates to the field of semiconductor technology and provides a cover-opening mechanism and semiconductor device to solve the problem of abnormal force caused by the conflict between the cover of the transmission chamber and the cover-opening mechanism when the cover moves vertically downward. The cover-opening mechanism includes a driving component and a rotating arm. The driving component includes a rotating member with a first mating part. One end of the rotating arm has a second mating part that mates with the first mating part, and the other end of the rotating arm is fixedly connected to the cover of the transmission chamber. The first or second mating part includes a first mating area and a second mating area that are connected. When the second mating part is connected to the first mating area or the first mating part is connected to the first mating area, the rotating member drives the rotating arm to rotate, and the cover opens. When the second mating part is connected to the second mating area or the first mating part is connected to the second mating area, the power transmission between the rotating member and the rotating arm is released, thus avoiding abnormal force on the cover-opening mechanism when the cover moves vertically downward.

Description

Technical Field

[0001] This application relates to the field of semiconductor technology, and in particular to a cover-opening mechanism and semiconductor device. Background Technology

[0002] In semiconductor manufacturing equipment, the transfer chamber is a key component for transferring wafers between various process chambers. It is usually equipped with a robot for wafer handling. A sealing ring is set between the top cover and the main body of the transfer chamber, which enables the transfer chamber to operate stably in a vacuum environment.

[0003] In the installation and daily maintenance of semiconductor manufacturing equipment, the top cover of the transmission chamber needs to be opened frequently in order to debug the internal robotic arm or other components. In related technologies, the top cover of the transmission chamber is opened by rotating the cover, that is, a rotating opening mechanism is set on one side of the cover to drive the cover to rotate and open.

[0004] However, when the top cover is closed, during the vacuuming process in the transfer chamber, the external atmospheric pressure will act on the surface of the top cover and compress the sealing ring, causing the top cover to move vertically downwards. Since the rotating opening mechanism itself restricts the vertical freedom of the top cover, the vertical downward movement of the top cover during the vacuuming process will interfere with the rotational movement of the rotating opening mechanism, causing the rotating opening mechanism to bear huge pressure. Under long-term operation, this will not only affect the life cycle of the rotating opening mechanism, but also lead to seal failure. Summary of the Invention

[0005] This application discloses a cover-opening mechanism and a semiconductor device to solve the problem of abnormal force caused by the conflict between the vertical downward movement of the upper cover of the transmission chamber and the rotational movement of the cover-opening mechanism.

[0006] In a first aspect, this application provides a cover-opening mechanism, comprising: a driving assembly including a rotating member having a first mating portion; and a rotating arm having a second mating portion at one end that engages with the first mating portion, and the other end of the rotating arm being fixedly connected to a cover of a transmission chamber; the first mating portion includes a first mating area and a second mating area that are connected to each other; when the second mating portion is engaged with the first mating area, the rotating member rotates and drives the rotating arm to rotate, thereby opening the cover; when the second mating portion is engaged with the second mating area, the power transmission between the rotating member and the rotating arm is released; or, the second mating portion includes a first mating area and a second mating area that are connected to each other; when the first mating portion is engaged with the first mating area, the rotating member rotates and drives the rotating arm to rotate, thereby opening the cover; when the first mating portion is engaged with the second mating area, the power transmission between the rotating member and the rotating arm is released.

[0007] When using this opening mechanism, the rotating component, driven by power, transmits torque to the rotating arm through its power contact with the rotating arm, causing the rotating arm to rotate and thus lifting the top cover, achieving the opening action of the top cover. The power contact between the rotating component and the rotating arm can also be released, thereby disengaging the power transmission. After the power transmission is released, the rotating component cannot drive the rotating arm to rotate, and the rotation of the rotating arm will not affect the rotating component. Therefore, before evacuating the chamber body, disengaging the power transmission between the rotating component and the rotating arm, and releasing the connection between the top cover and the opening mechanism, can avoid abnormal stress on the opening mechanism caused by the vertical downward displacement of the top cover during evacuation of the chamber body. This, in turn, prevents the opening mechanism from deforming or breaking due to uneven stress, improving the stability of the mechanism, operational safety, and the sealing of the chamber body.

[0008] In one possible implementation, the first mating part is at least one convex shaft disposed on the rotating member, and the second mating part is at least one irregular hole disposed on the rotating arm. The irregular hole includes two holes with different inner diameters that are connected to each other to form the first mating area and the second mating area. The inner diameter of the first mating area is smaller than the inner diameter of the second mating area, and the inner diameter of the first mating area is the same as the inner diameter of the convex shaft. When the convex shaft is connected to the first mating area, the convex shaft rotates and drives the irregular hole to rotate. When the convex shaft is connected to the second mating area, the power transmission between the convex shaft and the irregular hole is released.

[0009] The cam shaft and the irregular hole achieve dynamic switching of power transmission through mechanical geometry. The switching process depends only on the relative rotational position between the cam shaft and the irregular hole. When the cam shaft rotates to the second mating area at a set angle, such as the hole with a larger area, it automatically enters the disengagement state. When it continues to rotate away from this position and rotates to the first mating area, such as the hole with a smaller area, it automatically returns to the meshing state, thereby realizing the periodic connection and disconnection function.

[0010] In one possible implementation, the first mating part is a connecting groove disposed on the rotating member, and the second mating part is a connecting protrusion disposed on the rotating arm. The connecting groove includes a first mating area and a second mating area. In the direction in which the upper cover moves toward the interior of the transmission chamber, the first mating area and the second mating area are adjacent to each other, with the first mating area closer to the upper cover. When the connecting protrusion is connected to the first mating area, the connecting groove rotates and drives the connecting protrusion to rotate. When the connecting protrusion is connected to the second mating area, the power transmission between the connecting groove and the connecting protrusion is released.

[0011] On the same connecting groove, by changing the axial position of the connecting protrusion, the connecting protrusion is connected to different mating areas, realizing power transmission and disconnection. Power connection and disconnection are integrated into a single "connecting groove", saving space and reducing the number of parts. Only a small distance needs to be controlled to move the connecting protrusion to switch between power transmission and power disconnection. The switching action is fast, and the position is guaranteed by the geometry, resulting in high reliability.

[0012] In one possible implementation, the cover opening mechanism further includes a locking pin; the drive assembly is provided with a first locking hole, the rotating member is provided with a second locking hole, and the rotating arm is provided with a third locking hole; when the rotating member drives the rotating arm to rotate to a first position, the upper cover opens, the hole axes of the first locking hole, the second locking hole, and the third locking hole coincide, and the locking pin is fixedly connected in the first locking hole, the second locking hole, and the third locking hole.

[0013] The locking pin is used to fix the rotating part and the rotating arm to the drive assembly, thereby mechanically preventing the top cover from rotating and ensuring that the top cover is always in the open position, preventing the top cover from falling accidentally due to its own weight.

[0014] In one possible implementation, the opening mechanism further includes a mounting base; the mounting base is configured to be fixedly connected to the top outer wall of the transmission chamber, and the mounting base is used to fix the drive assembly; the mounting base is provided with a limiting groove, and the side peripheral wall of the rotating member is provided with at least two first protrusions spaced apart circumferentially thereon, and the at least two first protrusions respectively cooperate with the limiting groove to limit the rotation of the rotating member.

[0015] The mounting base is used to secure the drive assembly, preventing displacement when the cover is opened or closed, thus ensuring the stability and reliability of the opening mechanism. The limiting groove on the mounting base provides a clear mechanical stop for the rotating component, preventing accidental opening or closing due to vibration or misalignment, thereby limiting the movement during the opening and closing process. In one possible embodiment, the mounting base is provided with a pin receiving hole for accommodating the locking pin when not in use.

[0016] There's no need to carry a separate locking pin; mechanical fixing solves the problem of locking pins being easily lost due to the lack of a dedicated storage location, preventing them from slipping or being lost during operation. At the same time, the pin storage hole prevents the locking pin from contacting the external environment, reducing the risk of locking failure due to oxidation or contamination, indirectly improving equipment maintenance efficiency.

[0017] In one possible implementation, the opening mechanism further includes a position switch; the position switch is fixedly connected to the drive assembly, and the position switch includes a first contact and a second contact; the side peripheral wall of the rotating member is provided with a second protrusion and a third protrusion spaced apart circumferentially thereon; when the rotating member drives the rotating arm to rotate to a first position, the upper cover opens, the second protrusion abuts against the first contact, and the position switch outputs an electrical signal indicating that the opening of the cover is complete; when the rotating member drives the rotating arm to rotate to a second position, the upper cover closes, the third protrusion abuts against the second contact, and the position switch outputs an electrical signal indicating that the closing of the cover is complete.

[0018] Position switches enable precise and reliable automated control, converting mechanical positions into clear electrical signals, providing closed-loop feedback for the system, enabling the equipment to intelligently determine the switching status, and improving the overall reliability and safety of the equipment.

[0019] In one possible implementation, the rotating member is provided with at least one limiting hole, and the rotating arm is provided with at least one roller, each roller being rotatably connected to a corresponding limiting hole.

[0020] The rollers are fixedly mounted on the rotating arm to achieve axial positioning of the rotating component and the rotating arm, ensuring that the rotating component and the rotating arm maintain a stable axial position when transmitting power, avoiding axial movement, and smoothly converting the rotational motion of the rotating component into the swinging motion of the rotating arm.

[0021] In one possible implementation, the drive assembly includes a worm gear reducer and a planetary reducer; the output end of the worm gear reducer is fixedly connected to the rotating component to drive the rotating component to rotate; the planetary reducer is disposed on top of the worm gear reducer, the input end of the planetary reducer is used to connect to a drive source, and the output end of the planetary reducer is connected to the input end of the worm gear reducer; a one-way damper is provided inside the planetary reducer, and the one-way damper is used to control the speed at which the upper cover moves into the transmission chamber.

[0022] Utilizing the inherent mechanical self-locking characteristics of the worm gear reducer, the top cover is actively and reliably locked at any position, thus initially securing the top cover. At the same time, the planetary reducer's built-in one-way damper serves as a backup safety device. In case of unexpected failure of the worm gear reducer's self-locking mechanism, it provides controllable resistance to ensure that even if the top cover moves unexpectedly, it will only fall extremely slowly, thereby minimizing impact and risk. The combined functions of these two devices enhance the safety of the cover opening mechanism.

[0023] In one possible implementation, the input end of the planetary reducer is provided with a hexagonal shaft, which is configured to manually drive the drive assembly in a non-powered state via an external drive tool.

[0024] Using the hexagonal shaft of the planetary reducer as a purely manual mechanical interface, even when the power and control system are completely paralyzed, manual intervention through tools can still restore equipment control; the six flat surfaces of the hexagonal shaft can form a reliable, slip-free engagement with a standard wrench, ensuring safe and efficient torque transmission during emergency manual operation, completely avoiding the risks of slippage of round shafts or stress concentration of square shafts.

[0025] In one possible implementation, the mounting base includes: a first mounting base, a second mounting base, and a third mounting base; the first mounting base, the second mounting base, and the third mounting base surround the side periphery of the drive assembly; the first mounting base and the second mounting base are respectively fixedly connected to two opposite side walls of the drive assembly; the third mounting base is located between the first mounting base and the second mounting base along the circumferential direction of the drive assembly; the first mounting base and / or the second mounting base are provided with the limiting groove; the third mounting base is provided with the pin receiving hole.

[0026] The first, second, and third mounting brackets surround the sides of the drive assembly, securing it from three directions. This effectively eliminates any radial displacement, vibration, or torsion that may occur in the drive assembly, ensuring precise fixation. Simultaneously, this surrounding fastening evenly distributes the load, preventing deformation or stress concentration caused by unilateral force. Furthermore, the pin storage hole is located on the third mounting bracket at the rear end, preventing the locking pin from interfering with the rotation of the rotating components.

[0027] In one possible implementation, the rotating component includes two parts, and the rotating arm includes two parts; the two rotating components are respectively fixedly connected to both ends of the drive shaft of the drive assembly, one end of each rotating arm is respectively connected to a corresponding rotating component, and the other end of each rotating arm is configured to be fixedly connected to the upper cover.

[0028] The two rotating parts rotate simultaneously, causing the two rotating arms to lift or lower, thus improving the stability of the opening mechanism.

[0029] In one possible implementation, the cover opening mechanism further includes a connecting seat; the connecting seat includes a connecting plate and a connecting block, the back of the connecting plate is fixedly connected to the upper cover, one end of the connecting block is fixedly connected to the front of the connecting plate, and the other end of the connecting block is fixedly connected to the rotating arm.

[0030] The connector is connected to the top cover via a connecting plate, ensuring the contact area between the connector and the top cover and increasing the stability of the connection.

[0031] Secondly, this application provides a semiconductor device including the opening mechanism described in the first aspect above, and further including a transmission chamber; the transmission chamber includes a chamber body and an upper cover for sealing the chamber body; the opening mechanism is fixedly disposed on the top outer wall of the chamber body, and the rotating arm of the opening mechanism is fixedly connected to the upper cover to open or close the upper cover. Attached Figure Description

[0032] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0033] Figure 1 This is a schematic diagram of the structure of the opening mechanism provided in the embodiment of this application, which is disposed in the transmission chamber;

[0034] Figure 2 Schematic diagram of the opening mechanism provided in the embodiments of this application Figure 1 ;

[0035] Figure 3 Schematic diagram of the opening mechanism provided in the embodiments of this application Figure 2 ;

[0036] Figure 4 Schematic diagram of the rotating component of the lid-opening mechanism provided in the embodiments of this application Figure 1 ;

[0037] Figure 5 A schematic diagram of the rotating arm of the lid-opening mechanism provided in this application embodiment. Figure 1 ;

[0038] Figure 6 A schematic diagram of the rotating arm of the lid-opening mechanism provided in this application embodiment. Figure 2 ;

[0039] Figure 7 A schematic diagram of the rotating arm of the lid-opening mechanism provided in this application embodiment. Figure 3 ;

[0040] Figure 8 Schematic diagram of the opening mechanism provided in the embodiments of this application Figure 3 ;

[0041] Figure 9A schematic diagram of the rotating arm of the lid-opening mechanism provided in this application embodiment. Figure 4 ;

[0042] Figure 10 Schematic diagram of the rotating component of the lid-opening mechanism provided in the embodiments of this application Figure 2 ;

[0043] Figure 11 A schematic diagram of the rotating arm of the lid-opening mechanism provided in this application embodiment. Figure 5 ;

[0044] Figure 12 A schematic diagram of the rotating arm of the lid-opening mechanism provided in this application embodiment. Figure 6 ;

[0045] Figure 13 A schematic diagram of the rotating arm of the lid-opening mechanism provided in this application embodiment. Figure 7 ;

[0046] Figure 14 This is a schematic diagram of the structure of the rollers of the lid-opening mechanism provided in an embodiment of this application;

[0047] Figure 15 This is a side view of the opening mechanism provided in an embodiment of this application.

[0048] Explanation of reference numerals in the attached figures:

[0049] 100-Driver Components;

[0050] 101-Rotating component; 102-First locking socket; 104-Worm gear reducer; 105-Planetary reducer; 106-Pin mounting base;

[0051] 110 - First mating area; 220 - Second mating area;

[0052] 1011-First mating part; 1012-Second locking hole; 1013-First protrusion; 1014-Second protrusion; 1015-Limiting hole; 1051-Hexagonal shaft;

[0053] 10111 - Male shaft; 10112 - Connecting groove;

[0054] 200-Rotating arm;

[0055] 201 - Second mating part; 202 - Third locking hole; 203 - Roller;

[0056] 2013 - Irregularly shaped hole; 2014 - Connecting protrusion; 2031 - Spherical surface; 2032 - Roller body; 2033 - Connecting shaft;

[0057] 300 - Transmission Chamber;

[0058] 301 - Top cover; 302 - Chamber body;

[0059] 400-Locking pin;

[0060] 500 - Mounting base;

[0061] 501 - Limiting groove; 502 - First mounting base; 503 - Second mounting base; 504 - Third mounting base;

[0062] 600-Connector;

[0063] 601 - Connecting plate; 602 - Connecting block;

[0064] 700 - Fixed bracket. Detailed Implementation

[0065] The technical solutions of the embodiments of this application will now be described with reference to the accompanying drawings. Obviously, the described embodiments are merely some, and not all, of the embodiments of this application. All other embodiments obtained by those skilled in the art based on the embodiments of this application without creative effort are within the scope of protection of this application.

[0066] refer to Figure 1 The cover opening mechanism provided in this application embodiment is applied to the transmission chamber 300 of a semiconductor device to open or close the upper cover 301 of the transmission chamber 300.

[0067] The transmission chamber 300 includes a chamber body 302. The top outer wall of the chamber body 302 has an opening, and a top cover 301 is provided at the opening. The top cover 301 is used to seal the chamber body 302.

[0068] The opening mechanism is located on the top outer wall of the chamber body 302 and near the opening, and is used to open or close the upper cover 301.

[0069] refer to Figure 2 The opening mechanism includes a drive assembly 100 and a rotating arm 200.

[0070] The drive assembly 100 is fixedly disposed on the top outer wall of the chamber body 302 and close to the opening. The drive assembly 100 includes a rotating member 101 and is used to drive the rotating member 101 to rotate clockwise or counterclockwise.

[0071] Specifically, the drive assembly 100 also includes a drive shaft, which is fixedly connected to the rotating component 101; the drive shaft drives the rotating component 101 to rotate synchronously.

[0072] The two ends of the rotating arm 200 along its long axis are connected to the rotating member 101 and the upper cover 301, respectively. When the rotating member 101 rotates clockwise, it drives the rotating arm 200 to rotate, causing the end of the rotating arm 200 connected to the upper cover 301 to fall down, thereby closing the upper cover 301. When the rotating member 101 rotates counterclockwise, it drives the rotating arm 200 to rotate, causing the end of the rotating arm 200 connected to the upper cover 301 to rise up, thereby opening the upper cover 301.

[0073] refer to Figure 3 , Figure 4 and Figure 5 The rotating part 101 is provided with a first mating part 1011, and the rotating arm 200 is provided with a second mating part 201 at one end along its long axis. The second mating part 201 is mated and connected with the first mating part 1011. The other end of the rotating arm 200 along its long axis is configured to be fixedly connected to the upper cover 301.

[0074] The first mating part 1011 is provided with a first mating area 110 and a second mating area 220 that are connected. The second mating part 201 is mated and connected in the first mating area 110 or the second mating area 220. When the rotating member 101 rotates, the second mating part 201 switches between the first mating area 110 and the second mating area 220. When the second mating part 201 is mated and connected in the first mating area 110, the rotating member 101 rotates and drives the rotating arm 200 to rotate, so that the upper cover 301 opens. When the second mating part 201 is mated and connected in the second mating area 220, the power transmission between the rotating member 101 and the rotating arm 200 is released.

[0075] Alternatively, the second mating part 201 may be provided with a first mating area 110 and a second mating area 220 that are connected. In this case, the first mating part 1011 is mated and connected in the first mating area 110 or the second mating area 220. Similarly, when the rotating member 101 rotates, the first mating part 1011 will switch between the first mating area 110 and the second mating area 220. When the first mating part 1011 is mated and connected in the first mating area 110, the rotating member 101 rotates and drives the rotating arm 200 to rotate, so that the upper cover 301 opens. When the first mating part 1011 is mated and connected in the second mating area 220, the power transmission between the rotating member 101 and the rotating arm 200 is released.

[0076] After the power transmission is released, the rotating component 101 cannot drive the rotating arm 200 to rotate, and the rotation of the rotating arm 200 will not affect the rotating component 101. Therefore, before evacuating the chamber body 302, the power transmission between the rotating component 101 and the rotating arm 200 is released, and the connection between the release cover 301 and the opening mechanism is disconnected. This avoids abnormal force on the opening mechanism caused by the vertical downward displacement of the cover 301 when the chamber body 302 is evacuated, and avoids deformation or breakage of the opening mechanism due to uneven force. This ensures the stability of the mechanism, the safety of operation, and the sealing of the chamber body 302.

[0077] refer to Figure 4 and Figure 5 In one embodiment of this application, the second mating part 201 is provided with a first mating region 110 and a second mating region 220 that are connected to each other.

[0078] In this embodiment, the first mating part 1011 is at least one convex shaft 10111 disposed on the rotating member 101, and the second mating part 201 is at least one irregular hole 2013 disposed on the rotating arm 200, with one convex shaft 10111 connected to a corresponding irregular hole 2013.

[0079] The irregular hole 2013 includes two holes with different inner diameters that are connected to each other to form a first mating region 110 and a second mating region 220, wherein the inner diameter of the first mating region 110 is smaller than the inner diameter of the second mating region 220.

[0080] refer to Figure 6 The inner diameter of the first mating area 110 is the same as the outer diameter of the cam shaft 10111. When the cam shaft 10111 is connected to the first mating area 110, a mechanical constraint is formed between the two. The cam shaft 10111 rotates and drives the irregular hole 2013 to rotate, thereby driving the rotating arm 200 to rotate.

[0081] refer to Figure 7 The inner diameter of the second mating area 220 is larger than the outer diameter of the convex shaft 10111. When the convex shaft 10111 is connected to the second mating area 220, there is a gap between the convex shaft 10111 and the irregular hole 2013, and the power transmission between the convex shaft 10111 and the irregular hole 2013 is released.

[0082] The convex shaft 10111 and the irregular hole 2013 achieve dynamic switching of power transmission through mechanical geometry. The switching process depends only on the relative rotational position between the convex shaft 10111 and the irregular hole 2013. When the convex shaft 10111 rotates to the second mating area 220 at a set angle, such as inside a hole with a large area, it automatically enters the disengagement state. If it continues to rotate away from this position, it automatically returns to the engagement state, thereby realizing the periodic connection and disconnection function.

[0083] The first mating area 110 and the second mating area 220 can be circular holes. The junction of the first mating area 110 and the second mating area 220 is connected by their tangents, which are the transitional parts connecting the large circle and the small circle.

[0084] The transition tangent of the irregular hole 2013 can ensure a smooth transition when the cam 10111 changes its mating state, reduce mechanical shock, and extend the service life of the mechanism.

[0085] It should be noted that the rotating component 101 is a circular power turntable, on which three convex shafts 10111 can be installed. The three convex shafts 10111 are arranged at equal intervals along the circumference of the rotating component 101 to ensure uniform force distribution.

[0086] refer to Figure 8 , Figure 9 and Figure 10 In another embodiment of this application, the first mating part 1011 is provided with a first mating region 110 and a second mating region 220 that are connected to each other.

[0087] The first mating part 1011 is a connecting groove 10112 provided on the rotating member 101. The connecting groove 10112 includes a first mating area 110 and a second mating area 220, in the direction in which the upper cover 301 moves into the transmission chamber 300. Figure 10 In the direction indicated by the middle arrow, the first mating area 110 and the second mating area 220 are adjacent to each other along the direction of vertical movement of the upper cover 301, with the first mating area 110 close to the upper cover 301.

[0088] The rotating arm 200 is provided with a receiving groove 2015, and the rotating member 101 is disposed in the receiving groove 2015; the second mating part 201 is a connecting protrusion 2014 disposed on the rotating arm 200; the connecting protrusion 2014 is connected in the connecting groove 10112, and when the rotating member 101 rotates, the connecting protrusion 2014 will switch between the first mating area 110 and the second mating area 220.

[0089] refer to Figure 11 At this time, the upper cover 301 is in the closed state, the connecting protrusion 2014 is connected to the first mating area 110, the rotating part 101 rotates clockwise, causing the connecting groove 10112 to drive the connecting protrusion 2014 to rotate, and the rotating arm 200 drives the upper cover 301 to lift.

[0090] refer to Figure 12 At this time, the upper cover 301 is in the closed state. When the connecting protrusion 2014 is switched to the second mating area 220, and the rotating part 101 rotates clockwise, the connecting groove 10112 cannot drive the connecting protrusion 2014 to rotate, and the power transmission between the connecting groove 10112 and the connecting protrusion 2014 is released.

[0091] At the same time, when the chamber body 302 is evacuated, the upper cover 301 will drive the rotating arm 200 to move vertically downward. Since the connecting groove 10112 is located in the second mating area 220 at this time, the first mating area 110 can provide compensation for the vertical downward movement of the rotating arm 200, prevent the rotating arm 200 from affecting other parts of the opening mechanism, and avoid the opening mechanism from deforming or breaking due to uneven force.

[0092] On the same connecting groove 10112, power transmission and disconnection can be achieved by changing the axial position of the connecting protrusion 2014 (entering different mating areas). Power connection and disconnection are integrated on a single "connecting groove", saving space and reducing the number of parts. Only a small distance needs to be controlled to move the connecting protrusion 2014 to switch between power transmission and power disconnection. The switching action is fast and the position is guaranteed by the geometry, making it very reliable.

[0093] It should be noted that when the rotating part 101 is placed in the receiving groove 2015, there is a certain gap between the outer peripheral wall of the rotating part 101 and the inner peripheral wall of the receiving groove 2015, so that the rotating part 101 can rotate freely in the receiving groove 2015 and avoid jamming when the rotating part 101 rotates; at the same time, it also ensures that the receiving groove 2015 can provide compensation for the vertical downward movement of the rotating arm 200.

[0094] refer to Figure 2 , Figure 3 , Figure 4 and Figure 5 In the embodiments of this application, the opening mechanism further includes a locking pin 400.

[0095] The drive assembly 100 is provided with a pin mounting base 106, and the pin mounting base 106 is provided with a first locking hole 102; the rotating part 101 is provided with a second locking hole 1012, and the rotating arm 200 is provided with a third locking hole 202; when the rotating part 101 drives the rotating arm 200 to rotate to the first position, the upper cover 301 opens, and the hole axes of the first locking hole 102, the second locking hole 1012 and the third locking hole 202 coincide, and the locking pin 400 is fixedly connected in the first locking hole 102, the second locking hole 1012 and the third locking hole 202.

[0096] The locking pin 400 is used to fix the rotating part 101 and the rotating arm 200 to the drive assembly 100, thereby preventing the top cover 301 from rotating through mechanical fixation, ensuring that the top cover 301 is always in the open state, and preventing the top cover 301 from falling accidentally due to its own weight.

[0097] refer to Figure 2 , Figure 3 and Figure 4In the embodiments of this application, the cover opening mechanism further includes a mounting base 500.

[0098] The mounting base 500 is configured to be fixedly connected to the top outer wall of the transmission chamber 300. The mounting base 500 is used to fix the drive assembly 100. The mounting base 500 includes a horizontal plate and a vertical plate connected vertically. The horizontal plate is fixed to the top outer wall of the transmission chamber 300 by a threaded connection, and the vertical plate is also fixed to the outer peripheral wall of the drive assembly 100 by a threaded connection. This serves to fix the drive assembly 100 and prevent the drive assembly 100 from shifting when the cover 301 is opened or closed, thus ensuring the stability and reliability of the cover opening mechanism.

[0099] The mounting base 500 is provided with a limiting groove 501. The vertical plate of the mounting base 500 is provided with an arc-shaped limiting groove 501. The side peripheral wall of the rotating member 101 is provided with at least two first protrusions 1013 spaced apart along its circumference. The at least two first protrusions 1013 respectively cooperate with the limiting groove 501 to limit the rotation of the rotating member 101.

[0100] refer to Figure 3 When the rotating component 101 rotates to the first position, the upper cover 301 opens; one of the first protrusions 1013 slides from the first end of the limiting groove 501 into the limiting groove 501; when the rotating component 101 rotates to the second position, the upper cover 301 closes, and the other first protrusion 1013 slides from the second end of the limiting groove 501 into the limiting groove 501; thereby realizing the limiting function during the switching process, and also providing a signal that the switching has been completed.

[0101] The limiting groove 501 on the mounting base 500 provides a clear mechanical stop for the rotating part 101, which requires the user to apply a clear force to pass, thereby preventing accidental opening and closing due to vibration or misalignment, thus achieving limiting during the switching process.

[0102] refer to Figure 2 and Figure 3 In the embodiments of this application, the mounting base 500 is provided with a pin storage hole, which is used to accommodate the locking pin 400 when not in use.

[0103] There's no need to carry the locking pin 400 separately. Mechanical fixing solves the problem of the locking pin 400 being easily lost due to the lack of a dedicated storage location, preventing it from slipping or being lost during operation. At the same time, the pin storage hole prevents the locking pin 400 from contacting the external environment, reducing the risk of locking failure due to oxidation or contamination, indirectly improving equipment maintenance efficiency.

[0104] Among them, a columnar block is set on the horizontal plate of the mounting base 500, and a pin storage hole is provided on the columnar block.

[0105] refer to Figure 2 , Figure 3 and Figure 4 In the embodiments of this application, the cover opening mechanism also includes a position switch.

[0106] A fixing bracket 700 is provided on the drive assembly 100. The fixing bracket 700 is used to fix the position switch so that the position switch is fixedly connected to the drive assembly 100.

[0107] The position switch includes a first contact and a second contact. The side wall of the rotating member 101 is provided with a second protrusion 1014 and a third protrusion spaced apart along its circumference. When the rotating member 101 drives the rotating arm 200 to rotate to the first position, the upper cover 301 opens, the second protrusion 1014 abuts against the first contact, and the position switch outputs an electrical signal indicating that the opening of the cover is complete. When the rotating member 101 drives the rotating arm 200 to rotate to the second position, the upper cover 301 closes, the third protrusion abuts against the second contact, and the position switch outputs an electrical signal indicating that the closing of the cover is complete.

[0108] Position switches enable precise and reliable automated control, converting mechanical positions into clear electrical signals, providing closed-loop feedback for the system, enabling the equipment to intelligently determine the switching status, and improving the overall reliability and safety of the equipment.

[0109] refer to Figure 4 and Figure 13 In the embodiments of this application, at least one limiting hole 1015 is provided on the rotating member 101, and at least one roller 203 is provided on the rotating arm 200, with each roller 203 rotatably connected to a corresponding limiting hole 1015.

[0110] The roller 203 is fixedly mounted on the rotating arm 200 to achieve axial positioning of the rotating component 101 and the rotating arm 200, ensuring that the rotating component 101 and the rotating arm 200 maintain a stable axial position when transmitting power, avoiding axial movement, and smoothly converting the rotational motion of the rotating component 101 into the swinging motion of the rotating arm 200.

[0111] refer to Figure 5 , Figure 13 and Figure 14 Roller 203 includes roller body 2032, roller body 2032 along its axial direction ( Figure 14The two ends of the vertical section shown are respectively provided with a spherical surface 2031 and a connecting shaft 2033; the rotating arm 200 is provided with a mounting groove 204, and the bottom of the mounting groove 204 is provided with a connecting hole 2041; when the roller body 2032 is set in the mounting groove 204, the connecting shaft 2033 is fixedly connected to the connecting hole 2041, so that the roller body 2032 is fixedly set in the mounting groove 204; the spherical surface 2031 protrudes from the groove opening of the mounting groove 204 and is rotatably connected in the limiting hole 1015 to realize the axial limiting of the rotating part 101 and the rotating arm 200.

[0112] The roller 203 contacts the rotating part 101 through the spherical surface 2031, changing sliding friction into rolling friction, which significantly reduces wear, frictional resistance and heat generation, making the operation smoother and more efficient.

[0113] refer to Figure 2 , Figure 3 and Figure 15 In the embodiments of this application, the drive assembly 100 includes a worm gear reducer 104 and a planetary reducer 105.

[0114] The output end of the worm gear reducer 104 is fixedly connected to the rotating component 101 to drive the rotating component 101 to rotate; the planetary reducer 105 is disposed on the top of the worm gear reducer 104, the input end of the planetary reducer 105 is used to connect to the drive source, and the output end of the planetary reducer 105 is connected to the input end of the worm gear reducer 104; a one-way damper is provided inside the planetary reducer 105, and the one-way damper is used to control the moving speed of the upper cover 301 into the transmission chamber 300.

[0115] Utilizing the inherent mechanical self-locking characteristics of the worm gear reducer 104, the upper cover 301 is actively and reliably locked at any position, thereby initially fixing the upper cover 301. The one-way damper built into the planetary reducer 105 serves as a backup safety device. In case of accidental failure of the self-locking mechanism of the worm gear reducer 104, it provides controllable resistance to ensure that even if the upper cover 301 moves unexpectedly, it can only fall extremely slowly, thereby minimizing the impact and risk. The combined functions of the two mechanisms enhance the safety of the cover opening mechanism.

[0116] In the embodiments of this application, the input end of the planetary reducer 105 is provided with a hexagonal shaft 1051, which is configured to manually drive the drive assembly 100 in a powerless state by an external drive tool.

[0117] External drive tools include, but are not limited to, wrenches, sockets, or special handles.

[0118] Using the hexagonal shaft 1051 of the planetary reducer 105 as a purely manual mechanical interface, even when the power and control system is completely paralyzed, manual intervention through tools can still be used to restore equipment control; the six flat surfaces of the hexagonal shaft 1051 can form a reliable non-slip engagement with a standard wrench, ensuring safe and efficient torque transmission during emergency manual operation, completely avoiding the risks of slippage of round shafts or stress concentration of square shafts.

[0119] refer to Figure 2 and Figure 3 In the embodiments of this application, the mounting base 500 includes: a first mounting base 502, a second mounting base 503 and a third mounting base 504.

[0120] The first mounting base 502, the second mounting base 503, and the third mounting base 504 surround the side periphery of the drive assembly 100. The first mounting base 502 and the second mounting base 503 are respectively fixedly connected to two opposite side walls of the drive assembly 100. The third mounting base 504 is located between the first mounting base 502 and the second mounting base 503 along the circumference of the drive assembly 100. The first mounting base 502 and / or the second mounting base 503 are provided with a limiting groove 501. The third mounting base 504 is provided with a pin receiving hole.

[0121] The first mounting base 502, the second mounting base 503, and the third mounting base 504 surround the side periphery of the drive assembly 100, fastening the drive assembly 100 from three directions. This can stably eliminate any radial displacement, vibration, or torsion that the drive assembly 100 may generate, ensuring that it is precisely fixed. At the same time, this surrounding fastening can evenly distribute the load and avoid deformation or stress concentration caused by unilateral force.

[0122] Meanwhile, the pin storage hole is located on the third mounting base 504 at the rear end to prevent the locking pin 400 from interfering with the rotation of the rotating part 101.

[0123] In the embodiments of this application, the rotating member 101 may include one, and correspondingly, the rotating arm 200 includes one; the rotating member 101 is fixedly connected to the drive shaft of the drive assembly 100, and the drive shaft drives the rotating member 101 to rotate, thereby driving the two rotating arms 200 to lift or lower.

[0124] refer to Figure 2 , Figure 3 and Figure 15 In the embodiments of this application, the rotating member 101 may also include two, and correspondingly, the rotating arm 200 includes two; the two rotating members 101 are respectively fixedly connected to the two ends of the drive shaft of the drive assembly 100, one end of each rotating arm 200 is respectively connected to a corresponding rotating member 101, and the other end of each rotating arm 200 is configured to be fixedly connected to the upper cover 301.

[0125] The two rotating parts 101 rotate simultaneously and drive the two rotating arms 200 to lift or lower, thereby improving the stability of the opening mechanism.

[0126] It should be noted that the worm gear reducer 104 includes two output ends 1041, which are fixedly connected to two rotating parts 101 respectively.

[0127] refer to Figure 2 and Figure 3 In the embodiments of this application, the opening mechanism further includes a connecting seat 600.

[0128] The connecting seat 600 includes a connecting plate 601 and a connecting block 602. The back of the connecting plate 601 is fixedly connected to the upper cover 301 by a threaded connection. One end of the connecting block 602 is fixedly connected to the front of the connecting plate 601, and the other end of the connecting block 602 is fixedly connected to the rotating arm 200.

[0129] The connector 600 is connected to the upper cover 301 via the connector plate 601, ensuring the contact area between the connector 600 and the upper cover 301 and increasing the stability of the connection between them.

[0130] This application also provides a semiconductor device that includes the opening mechanism described above.

[0131] like Figure 1 As shown, the semiconductor device also includes a transmission chamber 300, which includes a chamber body 302 and an upper cover 301 for sealing the chamber body 302; an opening mechanism is fixedly disposed on the top outer wall of the chamber body 302, and the rotating arm 200 of the opening mechanism is fixedly connected to the upper cover 301 to open or close the upper cover 301.

[0132] In summary, this embodiment provides a cover-opening mechanism and a semiconductor device. The cover-opening mechanism includes a driving assembly 100 and a rotating arm 200. The driving assembly 100 includes a rotating member 101, on which a first mating portion 1011 is provided. One end of the rotating arm 200 is provided with a second mating portion 201 that engages with the first mating portion 1011, and the other end of the rotating arm 200 is configured to be fixedly connected to the upper cover 301 of the transmission chamber 300. The first mating portion 1011 includes a first mating region 110 and a second mating region 220 that are in communication. When the second mating portion 201 engages with the first mating region 110, rotation... When component 101 rotates, it drives the rotating arm 200 to rotate, thereby opening the upper cover 301; when the second mating part 201 is engaged with the second mating area 220, the power transmission between the rotating component 101 and the rotating arm 200 is released; or, the second mating part 201 includes a first mating area 110 and a second mating area 220 that are connected, when the first mating part 1011 is engaged with the first mating area 110, the rotating component 101 rotates, driving the rotating arm 200 to rotate, thereby opening the upper cover 301; when the first mating part 1011 is engaged with the second mating area 220, the power transmission between the rotating component 101 and the rotating arm 200 is released.

[0133] The dynamic switching of power transmission is achieved through mechanical geometry. After the power transmission is released, the rotating part 101 cannot drive the rotating arm 200 to rotate, and the rotation of the rotating arm 200 will not affect the rotating part 101. Therefore, before evacuating the chamber body 302, the power transmission between the rotating part 101 and the rotating arm 200 is released, and the connection between the release cover 301 and the opening mechanism is disconnected. This avoids abnormal force on the opening mechanism caused by the vertical downward displacement of the cover 301 when the chamber body 302 is evacuated, and avoids deformation or breakage of the opening mechanism due to uneven force. This ensures the stability of the mechanism, the safety of operation, and the sealing of the chamber body 302.

[0134] The terminology used in the embodiments of this application is for the purpose of describing particular embodiments only and is not intended to be limiting of this application. The singular forms "a" and "the" as used in the embodiments of this application and the appended claims are also intended to include the plural forms, unless the context clearly indicates otherwise.

[0135] It should be understood that the term "and / or" used in this document is merely a description of the same field in the related objects, indicating that three relationships can exist. For example, A and / or B can represent: A alone, A and B simultaneously, and B alone. Additionally, the character " / " in this document generally indicates that the preceding and following related objects have an "or" relationship.

[0136] It should be understood that the terms "first," "second," etc., used in this application are for distinguishing purposes only and should not be construed as indicating or implying relative importance or order.

[0137] The phrase "within the range" used in this application, unless otherwise specified, includes both endpoints of the range by default. For example, in the range of 1 to 5, it includes the values ​​1 and 5.

[0138] It should be understood that the described embodiments are merely some, not all, of the embodiments in this application. All other embodiments obtained by those skilled in the art based on the embodiments in this application without inventive effort are within the scope of protection of this application.

Claims

1. A lid-opening mechanism, characterized in that, include: A drive assembly (100) includes a rotating member (101) and a first mating part (1011) is provided on the rotating member (101). A rotating arm (200) is provided at one end with a second mating part (201) that is connected to the first mating part (1011), and the other end of the rotating arm (200) is used to be fixedly connected to the upper cover (301) of the transmission chamber (300). The first mating part (1011) includes a first mating area (110) and a second mating area (220) that are connected. When the second mating part (201) is mated to the first mating area (110), the rotating member (101) rotates and drives the rotating arm (200) to rotate, so that the upper cover (301) opens. When the second mating part (201) is mated to the second mating area (220), the power transmission between the rotating member (101) and the rotating arm (200) is released. Or, The second mating part (201) includes a first mating area (110) and a second mating area (220) that are connected. When the first mating part (1011) is mated to the first mating area (110), the rotating member (101) rotates and drives the rotating arm (200) to rotate, so that the upper cover (301) is opened. When the first mating part (1011) is mated to the second mating area (220), the power transmission between the rotating member (101) and the rotating arm (200) is released.

2. The lid-opening mechanism according to claim 1, characterized in that, The first mating part (1011) is at least one convex shaft (10111) disposed on the rotating member (101), and the second mating part (201) is at least one irregular hole (2013) disposed on the rotating arm (200). The irregular hole (2013) includes two holes with different inner diameters and connected to each other to form the first mating area (110) and the second mating area (220). The inner diameter of the first mating area (110) is smaller than the inner diameter of the second mating area (220), and the inner diameter of the first mating area (110) is the same as the outer diameter of the convex shaft (10111). When the convex shaft (10111) is connected to the first mating area (110), the convex shaft (10111) rotates and drives the irregular hole (2013) to rotate; When the convex shaft (10111) is connected to the second mating area (220), the power transmission between the convex shaft (10111) and the irregular hole (2013) is released.

3. The lid-opening mechanism according to claim 1, characterized in that, The first mating part (1011) is a connecting groove (10112) provided on the rotating member (101), and the second mating part (201) is a connecting protrusion (2014) provided on the rotating arm (200). The connecting groove (10112) includes the first mating area (110) and the second mating area (220). In the direction in which the upper cover (301) moves into the transmission chamber (300), the first mating region (110) and the second mating region (220) are adjacent, with the first mating region (110) close to the upper cover (301). When the connecting protrusion (2014) is connected to the first mating area (110), the connecting groove (10112) rotates and drives the connecting protrusion (2014) to rotate; When the connecting protrusion (2014) is connected to the second mating area (220), the power transmission between the connecting groove (10112) and the connecting protrusion (2014) is released.

4. The lid-opening mechanism according to any one of claims 1-3, characterized in that, The opening mechanism also includes a locking pin (400). The drive assembly (100) is provided with a first locking hole (102), the rotating part (101) is provided with a second locking hole (1012), and the rotating arm (200) is provided with a third locking hole (202). When the rotating component (101) drives the rotating arm (200) to rotate to the first position, the upper cover (301) opens, and the hole axes of the first locking hole (102), the second locking hole (1012) and the third locking hole (202) coincide. The locking pin (400) is fixedly connected in the first locking hole (102), the second locking hole (1012) and the third locking hole (202).

5. The lid-opening mechanism according to any one of claims 1-4, characterized in that, The opening mechanism also includes a mounting base (500); The mounting base (500) is configured to be fixedly connected to the top outer wall of the transmission chamber (300), and the mounting base (500) is used to fix the drive assembly (100). The mounting base (500) is provided with a limiting groove (501), and the side wall of the rotating member (101) is provided with at least two first protrusions (1013) spaced apart along its circumference. The at least two first protrusions (1013) respectively cooperate with the limiting groove (501) to limit the rotation of the rotating member (101).

6. The lid-opening mechanism according to claim 5, characterized in that, The mounting base (500) is provided with a pin storage hole (103) for accommodating the locking pin (400) when not in use.

7. The lid-opening mechanism according to any one of claims 1-6, characterized in that, The opening mechanism also includes a position switch; The position switch is fixedly connected to the drive assembly (100), and the position switch includes a first contact and a second contact; The side wall of the rotating component (101) is provided with a second protrusion (1014) and a third protrusion spaced apart along its circumference. When the rotating component (101) drives the rotating arm (200) to rotate to the first position, the upper cover (301) opens, the second protrusion (1014) abuts against the first contact, and the position switch outputs an electrical signal indicating that the opening of the cover is completed. When the rotating component (101) drives the rotating arm (200) to rotate to the second position, the upper cover (301) closes, the third protrusion abuts against the second contact, and the position switch outputs an electrical signal indicating that the cover is closed.

8. The lid-opening mechanism according to claim 2, characterized in that, The rotating component (101) is provided with at least one limiting hole (1015), and the rotating arm (200) is provided with at least one roller (203), each roller (203) being rotatably connected in a corresponding limiting hole (1015).

9. The lid-opening mechanism according to any one of claims 1-8, characterized in that, The drive assembly (100) includes: a worm gear reducer (104) and a planetary reducer (105). The output end of the worm gear reducer (104) is fixedly connected to the rotating component (101) to drive the rotating component (101) to rotate; The planetary reducer (105) is disposed on top of the worm gear reducer (104). The input end of the planetary reducer (105) is used to connect to the drive source, and the output end of the planetary reducer (105) is connected to the input end of the worm gear reducer (104). The planetary reducer (105) is equipped with a one-way damper, which is used to control the speed at which the upper cover (301) moves into the transmission chamber (300).

10. The lid-opening mechanism according to claim 9, characterized in that, The planetary reducer (105) is provided with a hexagonal shaft (1051) at its input end, which is configured to manually drive the drive assembly (100) in a powerless state by means of an external drive tool.

11. The lid-opening mechanism according to claim 6, characterized in that, The mounting base (500) includes: a first mounting base (502), a second mounting base (503) and a third mounting base (504); The first mounting base (502), the second mounting base (503) and the third mounting base (504) surround the side periphery of the drive assembly (100). The first mounting base (502) and the second mounting base (503) are respectively fixedly connected to two opposite side walls of the drive assembly (100). The third mounting base (504) is located between the first mounting base (502) and the second mounting base (503) along the circumferential direction of the drive assembly (100). The first mounting base (502) and / or the second mounting base (503) are provided with the limiting groove (501); The third mounting base (504) is provided with the pin receiving hole (103).

12. The lid-opening mechanism according to claim 1, characterized in that, The rotating component (101) comprises two parts, and the rotating arm (200) comprises two parts; The two rotating parts (101) are respectively fixedly connected to the two ends of the drive shaft of the drive assembly (100), one end of each rotating arm (200) is respectively connected to a corresponding rotating part (101), and the other end of each rotating arm (200) is configured to be fixedly connected to the upper cover (301).

13. The lid-opening mechanism according to any one of claims 1-12, characterized in that, The opening mechanism also includes a connecting seat (600); The connecting seat (600) includes a connecting plate (601) and a connecting block (602). The back of the connecting plate (601) is fixedly connected to the upper cover (301). One end of the connecting block (602) is fixedly connected to the front of the connecting plate (601), and the other end of the connecting block (602) is fixedly connected to the rotating arm (200).

14. A semiconductor device, characterized in that, The lid-opening mechanism according to any one of claims 1-13 further includes a transmission chamber (300). The transmission chamber (300) includes a chamber body (302) and a cover (301) for sealing the chamber body (302). The opening mechanism is fixedly installed on the top outer wall of the chamber body (302), and the rotating arm (200) of the opening mechanism is fixedly connected to the upper cover (301) to open or close the upper cover (301).

Images