A coaxial positioning and welding process and special device for multi-layer quartz tube

Abstract

The application relates to the field of quartz tube welding, and discloses a multilayer quartz tube coaxial positioning welding process and a special device, which comprises a main body, a half-side limiting chassis is arranged at the middle part of the upper end of the main body, an outer quartz tube is arranged at the upper end of the half-side limiting chassis, a movable limiting chassis is arranged at the side of the half-side limiting chassis, a piston rod is connected to the side, away from the half-side limiting chassis, of the movable limiting chassis, and a hydraulic cylinder is arranged at the other side of the piston rod. In the application, the outer quartz tube is accurately aligned to the central axis position of the half-side limiting chassis, then the hydraulic cylinder is started to drive the movable limiting chassis to synchronously translate along the central axis direction, a double-base stable support system is formed, then the first bidirectional motor is activated, the first threaded rod is accurately rotated through a belt transmission mechanism, and the movable limiting frame is driven to smoothly move along the preset slide rail until the movable limiting frame is tightly combined with the outer quartz tube, so that high-precision control of axial positioning is realized.

Description

Technical Field

[0001] This invention relates to the field of quartz tube welding, and in particular to a coaxial positioning welding process and special device for multilayer quartz tubes. Background Technology

[0002] Quartz tubes are a special industrial technical glass made of silicon dioxide, an excellent basic material. Due to their excellent high-temperature resistance, chemical stability, and light transmission properties, quartz tubes are widely used in optics, semiconductors, medical, and chemical industries. In certain specific situations, multiple layers of quartz tubes need to be welded together, such as for developing laboratory high-temperature containers or reactors with multi-layer protection. Each additional layer of quartz structure is equivalent to building a gradient thermal insulation barrier, which can withstand sudden cooling and heating shocks exceeding 1200°C (ordinary single-layer can only withstand 800°C). It is particularly suitable for the cavity protection of wafer etching reactors. By alternately stacking high-purity transparent quartz and dark quartz layers doped with titanium, it can simultaneously resist the dual corrosion of hydrofluoric acid and strong alkalis. This composite structure can extend the life of chemical distillation towers by more than 3 times.

[0003] In the welding process of multilayer quartz tubes, the existing technology has significant drawbacks: due to the lack of a fixed fixture system with real-time monitoring and feedback functions, it is impossible to dynamically detect and warn of coaxiality deviations during the welding process; in addition, the traditional process does not adopt effective positioning measures, which easily leads to eccentricity between layers of quartz tubes of different diameters, resulting in large coaxiality errors. This limitation of the process directly affects the product accuracy, especially in high-end application scenarios such as semiconductor etching equipment and high-precision optical channels. The problem of equipment installation difficulties or functional failures caused by non-component coaxiality is particularly prominent, and post-weld repair is costly and extremely difficult, which seriously restricts the adaptability of the equipment and the yield of finished products. Summary of the Invention

[0004] The technical problem this invention aims to solve is to provide a coaxial positioning welding process and dedicated device for multilayer quartz tubes to address the significant shortcomings of existing technologies in multilayer quartz tube welding processes: the lack of a fixed fixture system with real-time monitoring and feedback capabilities prevents dynamic detection and early warning of coaxiality deviations during welding; furthermore, the traditional process lacks effective positioning measures, leading to eccentricity between layers of quartz tubes with different diameters, resulting in significant coaxiality errors. This limitation directly affects product accuracy, especially in high-end applications such as semiconductor etching equipment and high-precision optical channels, where non-compliance with component coaxiality standards causes difficulties in equipment installation or functional failures. Post-weld repair is also costly and extremely difficult, severely restricting equipment adaptability and finished product yield.

[0005] To address the aforementioned problems, the present invention is implemented through the following technical solution.

[0006] A coaxial positioning welding process and special device for multi-layer quartz tubes includes: a main body, a half-side limiting base frame is provided in the middle of the upper end of the main body, and an outer quartz tube is placed on the upper end of the half-side limiting base frame. A movable limiting base frame is provided on the side of the half-side limiting base frame. A piston rod is connected to the side of the movable limiting base frame away from the half-side limiting base frame, and a hydraulic cylinder is provided on the other side of the piston rod.

[0007] A movable limiting frame is provided on one side of the outer quartz tube, and a coaxial shaft is provided in the middle of the side of the movable limiting frame near the outer quartz tube. The outer diameter of the coaxial shaft is the same as the inner diameter of the inner quartz tube. A laser receiver is provided on the other side of the movable limiting frame corresponding to the position of the coaxial shaft.

[0008] A support frame is provided on the side of the upper part of the main body away from the movable limiting frame, and a support groove is opened at the upper end of the support frame. An inner quartz tube is placed in the support groove, and a laser positioning transmitter is provided on the inner side of the end of the inner quartz tube away from the outer quartz tube. The outer diameter of the laser positioning transmitter is the same as the inner diameter of the inner quartz tube.

[0009] In one embodiment, an operating table is welded and fixed to one side of the upper end of the main body, and a pre-placement frame is provided on the upper end of the operating table. The upper end of the pre-placement frame is arc-shaped, and the arc-shaped structure of the inner side of the upper end of the pre-placement frame matches the outer shape of the outer quartz tube.

[0010] In one embodiment, the movable limiting base frame forms a movable structure with a piston rod and a hydraulic cylinder, and the bottom of the hydraulic cylinder is welded and fixed to the upper end of the main body. The lower side of the movable limiting base frame corresponds to the lower side of the half-side limiting base frame in a horizontal position.

[0011] In one embodiment, the upper ends of both the semi-side limiting base and the movable limiting base are arc-shaped, and the upper end of the semi-side limiting base and the movable limiting base together form an arc-shaped support surface for supporting and fixing the outer quartz tube.

[0012] In one embodiment, the center position of the coaxial axis coincides with the central axis of the laser receiver, and the lateral position of the laser positioning transmitter coincides with the central axis of the laser receiver.

[0013] In one embodiment, the bottom of the movable limiting frame is provided with a first threaded channel, and a first threaded rod is provided through the first threaded channel. Both ends of the first threaded rod extend outside the first threaded channel, and the shape and structure of the outer side of the first threaded rod match the shape and structure of the first threaded channel at the bottom of the movable limiting frame.

[0014] In one embodiment, a first bearing bracket is provided on the outer side of the end of the first threaded rod away from the movable limiting frame, and a first driven wheel is connected to the end of the first threaded rod away from the movable limiting frame. A first transmission belt is provided on the outer side of the first driven wheel, and a first driving wheel is provided on the inner side of the end of the first transmission belt away from the first driven wheel.

[0015] In one embodiment, a first bidirectional motor is connected to one side of the first drive wheel, and one side of the first bidirectional motor is welded and fixed to the inner side of the main body. A first slider is provided at the bottom of the movable limiting frame, and a first slide rail is provided at the upper end of the main body along the sliding trajectory of the first slider.

[0016] In one embodiment, the bottom of the support frame is provided with a second threaded channel, and a second threaded rod is provided through the second threaded channel. Both ends of the second threaded rod extend outside the second threaded channel, and the shape and structure of the outer side of the second threaded rod match the shape and structure of the second threaded channel at the bottom of the support frame. A second bearing bracket is provided on the outer side of the end of the second threaded rod away from the support frame, and a second driven wheel is connected to the end of the second threaded rod away from the support frame. A second transmission belt is provided on the outer side of the second driven wheel, and a second driving wheel is provided on the inner side of the end of the second transmission belt away from the second driven wheel. A second bidirectional motor is connected to one side of the second driving wheel, and one side of the second bidirectional motor is welded and fixed to the inner side of the main body. A second slider is provided at the bottom of the support frame, and a second slide rail is provided at the upper end of the main body along the sliding trajectory of the second slider.

[0017] A coaxial positioning welding process for multilayer quartz tubes includes the following steps:

[0018] S1. When the outer quartz tube is to be processed, a pre-placement rack for the temporary operation table can be used. During welding, it is supported on the half-side limiting base frame. The hydraulic cylinder is started to extend the piston rod and push the movable limiting base frame to support one side of it. Together with the half-side limiting base frame, it is supported. Then the first bidirectional motor is started, which drives the first threaded rod to rotate clockwise through the first drive wheel, the first transmission belt, and the first driven wheel, which drives the movable limiting frame to move outward along the first threaded channel.

[0019] S2. The first slider at the bottom of the movable limiting frame moves along the first slide rail at the upper end of the main body to fit against the side wall of the outer quartz tube. Then the inner quartz tube is placed in the support groove of the support frame. The second bidirectional motor is started, and the second threaded rod is driven to rotate clockwise through the second drive wheel, the second transmission belt and the second driven wheel, which drives the support frame to move along the second threaded channel to the other side of the outer quartz tube.

[0020] S3. The support bracket moves along the second slide rail of the main body via the second slider, so that the inner quartz tube is accurately inserted into the outer quartz tube and fitted onto the outside of the ceramic coaxial shaft. The positions of the half-side limiting base and the movable limiting base fixing the outer quartz tube and the positions of the support bracket fixing the inner quartz tube are all preset in advance. The preset conditions are that the central axes of the outer quartz tube, the inner quartz tube, the laser positioning transmitter, the coaxial shaft and the laser receiver are coincident, and the coaxiality error is ≤0.02mm. The laser positioning transmitter is installed at the tail of the inner quartz tube. The outer diameter of the laser positioning transmitter is the same as the inner diameter of the inner quartz tube. By adjusting the outer fixing of the inner quartz tube, the laser beam emitted by the laser positioning transmitter passes through the coaxial shaft and irradiates the laser receiver to achieve coaxiality verification.

[0021] This invention provides a coaxial positioning welding process and dedicated device for multilayer quartz tubes. Compared with the prior art, it has the following advantages:

[0022] The outer quartz tube is precisely aligned with the central axis of the half-side limiting base. The hydraulic cylinder is then activated to drive the movable limiting base to move synchronously along the central axis, forming a stable double-base support system. The first bidirectional motor is then activated, driving the first threaded rod to rotate precisely via a belt drive mechanism. This causes the movable limiting frame to move smoothly along a preset slide rail until it is tightly fitted with the outer quartz tube, achieving high-precision axial positioning. The inner quartz tube is then properly placed in the dedicated support groove of the support frame. A second bidirectional motor drives the second threaded rod for fine adjustment, ensuring the inner tube is precisely inserted into the outer tube and accurately aligned with the ceramic coaxial shaft. A laser positioning transmitter is integrated at the tail of the inner quartz tube, its outer diameter strictly matching the inner diameter of the inner tube. By precisely adjusting the fixing device on the outside of the inner tube, the laser beam emitted by the transmitter can penetrate the coaxial shaft and accurately project onto the laser receiver. This allows for real-time monitoring and calibration of the coaxiality error between the two tubes. If the laser receiver does not receive a signal during the welding process, it indicates that welding deformation has caused a coaxiality shift, allowing for timely fine-tuning to ensure the concentricity of the outer and inner quartz tubes. Attached Figure Description

[0023] Figure 1 This is a left-side three-dimensional structural diagram of the coaxial positioning welding process and special equipment for multi-layer quartz tubes.

[0024] Figure 2 Coaxial positioning welding process and special equipment for multi-layer quartz tubes Figure 1 Enlarged structural diagram at point A in the middle.

[0025] Figure 3 This is a schematic diagram of the coaxial positioning welding process and special equipment for multi-layer quartz tubes, including the support frame and the half-section structure of the inner quartz tube.

[0026] Figure 4This is a schematic diagram of the coaxial positioning welding process and special device for multi-layer quartz tubes, including the movable limiting frame and the half-section structure of the outer quartz tube.

[0027] Figure 5 This is a side view of the structure after the half-side limiting base frame and the movable limiting base frame of the coaxial positioning welding process and special device for multi-layer quartz tubes come into contact.

[0028] Figure 6 This is a three-dimensional view of the right side of the coaxial positioning welding process and special equipment for multi-layer quartz tubes.

[0029] Figure 7 Coaxial positioning welding process and special equipment for multi-layer quartz tubes Figure 6 Enlarged structural diagram at point B.

[0030] Figure 8 A top-view plan view of the multi-layer quartz tube coaxial positioning welding process and special equipment after removing the first and second transmission belts.

[0031] Figure 9 A partial sectional view of the structure after removing the first and second transmission belts in the coaxial positioning welding process and special equipment for multi-layer quartz tubes.

[0032] The attached figures are labeled as follows:

[0033] 1. Main body; 2. Operating table; 3. Pre-placement frame; 4. Half-side limiting base frame; 5. Outer quartz tube; 6. Movable limiting base frame; 7. Piston rod; 8. Hydraulic cylinder; 9. Movable limiting frame; 10. Coaxial shaft; 11. Laser receiver; 12. First threaded channel; 13. First threaded rod; 14. First bearing bracket; 15. First driven wheel; 16. First transmission belt; 17. First driving wheel; 18. First bidirectional motor; 19. First slider; 20. First slide rail; 21. Support frame; 22. Support groove; 23. Second threaded channel; 24. Laser positioning transmitter; 25. Inner quartz tube; 26. Second threaded rod; 27. Second driven wheel; 28. Second bearing bracket; 29. ​​Second transmission belt; 30. Second driving wheel; 31. Second bidirectional motor; 32. Second slider; 33. Second slide rail. Detailed Implementation

[0034] The present invention will be further illustrated below with reference to specific embodiments. It should be understood that these embodiments are for illustrative purposes only and are not intended to limit the scope of protection of the present invention.

[0035] The following specific examples illustrate the implementation of the present invention. Those skilled in the art can easily understand other advantages and effects of the present invention from the content disclosed in this specification. The present invention can also be implemented or applied through other different specific embodiments, and various details in this specification can also be modified or changed based on different viewpoints and applications without departing from the spirit of the present invention.

[0036] Reference Figures 1-9 A coaxial positioning welding process and special device for multi-layer quartz tubes includes: a main body 1, a half-side limiting base 4 is provided in the middle of the upper end of the main body 1, and an outer quartz tube 5 is placed on the upper end of the half-side limiting base 4. A movable limiting base 6 is provided on the side of the half-side limiting base 4. A piston rod 7 is connected to the side of the movable limiting base 6 away from the half-side limiting base 4, and a hydraulic cylinder 8 is provided on the other side of the piston rod 7.

[0037] A movable limiting frame 9 is provided on one side of the outer quartz tube 5, and a coaxial shaft 10 is provided in the middle of the side of the movable limiting frame 9 near the outer quartz tube 5. The outer diameter of the coaxial shaft 10 is the same as the inner diameter of the inner quartz tube 25. A laser receiver 11 is provided on the other side of the movable limiting frame 9 corresponding to the position of the coaxial shaft 10.

[0038] A support frame 21 is provided on the side of the upper part of the main body 1 away from the movable limiting frame 9, and a support groove 22 is provided on the upper end of the support frame 21. An inner quartz tube 25 is placed in the support groove 22, and a laser positioning transmitter 24 is provided on the inner side of the end of the inner quartz tube 25 away from the outer quartz tube 5. The outer diameter of the laser positioning transmitter 24 is the same as the inner diameter of the inner quartz tube 25.

[0039] An operating table 2 is welded and fixed to one side of the upper part of the main body 1, and a pre-placement frame 3 is provided on the upper part of the operating table 2. The upper end of the pre-placement frame 3 is arc-shaped, and the arc-shaped structure of the inner side of the upper end of the pre-placement frame 3 matches the outer shape of the outer quartz tube 5.

[0040] The movable limiting base 6 forms a movable structure with the hydraulic cylinder 8 via the piston rod 7, and the bottom of the hydraulic cylinder 8 is welded and fixed to the upper end of the main body 1. The lower side of the movable limiting base 6 corresponds to the lower side of the half-side limiting base 4 in a horizontal position.

[0041] The upper ends of both the semi-side limiting base 4 and the movable limiting base 6 are arc-shaped, and the upper end of the semi-side limiting base 4 and the movable limiting base 6 together form an arc-shaped support surface to support and fix the outer quartz tube 5.

[0042] The center position of the coaxial shaft 10 coincides with the central axis of the laser receiver 11, and the lateral position of the laser positioning transmitter 24 coincides with the central axis of the laser receiver 11.

[0043] The bottom of the movable limiting frame 9 is provided with a first threaded channel 12, and a first threaded rod 13 is provided through the first threaded channel 12. Both ends of the first threaded rod 13 extend outside the first threaded channel 12, and the shape and structure of the outer side of the first threaded rod 13 match the shape and structure of the first threaded channel 12 at the bottom of the movable limiting frame 9.

[0044] A first bearing bracket 14 is provided on the outer side of the end of the first threaded rod 13 away from the movable limit frame 9, and a first driven wheel 15 is connected to the end of the first threaded rod 13 away from the movable limit frame 9. A first transmission belt 16 is provided on the outer side of the first driven wheel 15, and a first driving wheel 17 is provided on the inner side of the end of the first transmission belt 16 away from the first driven wheel 15.

[0045] The first drive wheel 17 is connected to a first bidirectional motor 18 on one side, and one side of the first bidirectional motor 18 is welded and fixed to the inner side of the main body 1. The bottom of the movable limit frame 9 is provided with a first slider 19, and the upper end of the main body 1 is provided with a first slide rail 20 along the sliding trajectory of the first slider 19.

[0046] The support frame 21 has a second threaded channel 23 at its bottom, and a second threaded rod 26 is provided through the second threaded channel 23. Both ends of the second threaded rod 26 extend outside the second threaded channel 23, and the shape and structure of the outer side of the second threaded rod 26 match the shape and structure of the second threaded channel 23 at the bottom of the support frame 21. A second bearing bracket 28 is provided on the outer side of the end of the second threaded rod 26 away from the support frame 21, and a second driven wheel 27 is connected to the end of the second threaded rod 26 away from the support frame 21. A second transmission belt 29 is provided on the outer side of the second driven wheel 27, and a second driving wheel 30 is provided on the inner side of the end of the second transmission belt 29 away from the second driven wheel 27. A second bidirectional motor 31 is connected to one side of the second driving wheel 30, and one side of the second bidirectional motor 31 is welded and fixed to the inner side of the main body 1. A second slider 32 is provided at the bottom of the support frame 21, and a second slide rail 33 is provided on the upper end of the main body 1 along the sliding trajectory of the second slider 32.

[0047] A coaxial positioning welding process for multilayer quartz tubes includes the following steps:

[0048] S1. When the outer quartz tube 5 is to be processed, the pre-placement frame 3 of the operating table 2 can be temporarily placed. During welding, it is supported on the half-side limiting base frame 4. The hydraulic cylinder 8 is started to extend the piston rod 7 and push the movable limiting base frame 6 to support one side of it. Together with the half-side limiting base frame 4, it is supported. Then the first bidirectional motor 18 is started, which drives the first threaded rod 13 to rotate clockwise through the first drive wheel 17, the first transmission belt 16, and the first driven wheel 15, which drives the movable limiting frame 9 to move outward along the first threaded channel 12.

[0049] S2. The first slider 19 at the bottom of the movable limiting frame 9 moves along the first slide rail 20 at the upper end of the main body 1 to fit against the side wall of the outer quartz tube 5. Then, the inner quartz tube 25 is placed in the support groove 22 of the support frame 21. The second bidirectional motor 31 is started, and the second threaded rod 26 is driven to rotate clockwise through the second driving wheel 30, the second transmission belt 29 and the second driven wheel 27, which drives the support frame 21 to move along the second threaded channel 23 to the other side of the outer quartz tube 5.

[0050] S3. The support frame 21 moves along the second slide rail 33 of the main body 1 via the second slider 32, so that the inner quartz tube 25 is accurately inserted into the outer quartz tube 5 and fitted onto the outside of the ceramic coaxial shaft 10. The positions of the half-side limiting base frame 4 and the movable limiting base frame 6 that fix the outer quartz tube 5 and the positions of the support frame 21 that fix the inner quartz tube 25 are all preset in advance. The preset conditions are that the central axes of the outer quartz tube 5, the inner quartz tube 25, the laser positioning transmitter 24, the coaxial shaft 10 and the laser receiver 11 are coincident, and the coaxiality error is ≤0.02mm. The laser positioning transmitter 24 is installed at the tail of the inner quartz tube 25. The outer diameter of the laser positioning transmitter 24 is the same as the inner diameter of the inner quartz tube 25. By adjusting the outer fixing of the inner quartz tube 25, the laser beam emitted by the laser positioning transmitter 24 passes through the coaxial shaft 10 and irradiates the laser receiver 11 to achieve coaxiality verification.

[0051] During use, when the outer quartz tube 5 is awaiting processing, it can be temporarily placed on the pre-placement rack 3 of the operating table 2. When welding processing of the outer quartz tube 5 is required, first support the outer quartz tube 5 on the upper end of the half-side limiting base 4, then start the hydraulic cylinder 8. When the hydraulic cylinder 8 starts, the piston rod 7 extends and moves the movable limiting base 6 towards the outer quartz tube 5 until the movable limiting base 6 stably supports one side of the outer quartz tube 5. The movable limiting base 6 and the half-side limiting base 4 jointly support the outer quartz tube 5. Then start the first bidirectional motor 18. When the first bidirectional motor 18 starts, the first drive wheel 17 rotates clockwise, driving the first transmission belt 1. The first driven wheel 15 rotates, which in turn drives the first threaded rod 13 to rotate. One side of the first threaded rod 13 rotates inside the first bearing bracket 14, and the outside of the first threaded rod 13 is wrapped with a movable limiting frame 9. The movable limiting frame 9 forms a linkage structure with the first threaded rod 13 through the first threaded channel 12. The clockwise rotation of the first threaded rod 13 drives the movable limiting frame 9 to move towards one side of the outer quartz tube 5. At the same time, the first slider 19 at the bottom of the movable limiting frame 9 moves along the first slide rail 20 at the upper end of the main body 1 towards one side of the outer quartz tube 5 until one side of the movable limiting frame 9 is in contact with one side of the outer quartz tube 5. Then, the inner quartz tube 25 is placed on the support frame 2. Within the support groove 22 of 1, the second bidirectional motor 31 is started again. The second bidirectional motor 31 starts, and the second driving wheel 30 rotates clockwise. The clockwise rotation of the second driving wheel 30 drives the second transmission belt 29 to rotate, thereby driving the second driven wheel 27 to rotate. The rotation of the second driven wheel 27 drives the second threaded rod 26 to rotate. One side of the second threaded rod 26 rotates inside the second bearing bracket 28, and the outer side of the second threaded rod 26 is wrapped with a support frame 21. The support frame 21 forms a linkage structure with the second threaded rod 26 through the second threaded channel 23. The clockwise rotation of the second threaded rod 26 drives the support frame 21 to move to the other side of the outer quartz tube 5. At the same time, the second slider 32 at the bottom of the support frame 21 moves along... The second slide rail 33 at the upper end of the main body 1 moves to the other side of the outer quartz tube 5 until the inner quartz tube 25 placed in the support groove 22 on the support frame 21 is inserted into the outer quartz tube 5 and slowly fits onto the coaxial shaft 10 on one side of the movable limiting frame 9 (the coaxial shaft 10 is made of high temperature resistant ceramic material, and the outer diameter of the coaxial shaft 10 matches the inner diameter of the inner quartz tube 25). The positions of the half-side limiting base frame 4 and the movable limiting base frame 6 that fix the outer quartz tube 5 and the positions of the support frame 21 that fix the inner quartz tube 25 are all preset in advance. The preset conditions are that the central axes of the outer quartz tube 5, the inner quartz tube 25, the laser positioning transmitter 24, the coaxial shaft 10 and the laser receiver 11 coincide, and the coaxiality error is ≤0.A laser positioning transmitter 24, with an outer diameter of 0.02 mm, is installed at the tail of the inner quartz tube 25. The outer diameter of the laser positioning transmitter 24 is the same as the inner diameter of the inner quartz tube 25. By adjusting the outer side of the inner quartz tube 25, the laser beam emitted by the laser positioning transmitter 24 passes through the coaxial shaft 10 and illuminates the laser receiver 11. This ensures the coaxiality of the outer quartz tube 5 and the inner quartz tube 25, ensuring that the error is within the allowable range.

[0052] Therefore, although the invention has been described herein with reference to specific embodiments thereof, freedom of modification, various changes and substitutions are also within the scope of the foregoing disclosure, and it should be understood that in some cases, certain features of the invention may be adopted without departing from the scope and spirit of the invention and without corresponding use of other features. Thus, many modifications can be made to adapt a particular environment or material to the essential scope and spirit of the invention. The invention is not intended to be limited to the specific terminology used in the following claims and / or the specific embodiments disclosed as the best mode for carrying out the invention, but the invention will include any and all embodiments and equivalents falling within the scope of the appended claims. Therefore, the scope of the invention will be defined only by the appended claims.

Claims

1. A special device for coaxial positioning of multi-layer quartz tubes, characterized in that, include: The main body (1) has a half-side limiting base frame (4) in the middle of its upper end, and an outer quartz tube (5) is installed on the upper end of the half-side limiting base frame (4). A movable limiting base frame (6) is provided on the side of the half-side limiting base frame (4). A piston rod (7) is connected to the side of the movable limiting base frame (6) away from the half-side limiting base frame (4), and a hydraulic cylinder (8) is provided on the other side of the piston rod (7). A movable limiting frame (9) is provided on one side of the outer quartz tube (5), and a coaxial shaft (10) is provided in the middle of the side of the movable limiting frame (9) near the outer quartz tube (5). The outer diameter of the coaxial shaft (10) is the same as the inner diameter of the inner quartz tube (25). A laser receiver (11) is provided on the other side of the movable limiting frame (9) corresponding to the position of the coaxial shaft (10). A support frame (21) is provided on the side of the upper end of the main body (1) away from the movable limiting frame (9), and a support groove (22) is provided on the upper end of the support frame (21). An inner quartz tube (25) is placed in the support groove (22), and a laser positioning transmitter (24) is provided on the inner side of the end of the inner quartz tube (25) away from the outer quartz tube (5). The outer diameter of the laser positioning transmitter (24) is the same as the inner diameter of the inner quartz tube (25).

2. The coaxial positioning device for multi-layer quartz tubes according to claim 1, characterized in that, The main body (1) has an operating table (2) welded and fixed on one side of the upper end, and a pre-placement frame (3) is provided on the upper end of the operating table (2). The upper end of the pre-placement frame (3) is arc-shaped, and the arc shape of the inner side of the upper end of the pre-placement frame (3) matches the outer shape of the outer quartz tube (5).

3. The coaxial positioning device for multi-layer quartz tubes according to claim 1, characterized in that, The movable limiting base (6) forms a movable structure with the hydraulic cylinder (8) through the piston rod (7), and the bottom of the hydraulic cylinder (8) is welded and fixed to the upper end of the main body (1). The lower side of the movable limiting base (6) corresponds to the lower side of the half-side limiting base (4) in a horizontal position.

4. The special device for coaxial positioning of multi-layer quartz tubes according to claim 1, characterized in that, The upper ends of the half-side limiting base (4) and the movable limiting base (6) are both arc-shaped, and the upper end of the half-side limiting base (4) and the movable limiting base (6) form an arc-shaped support surface after they are combined to support and fix the outer quartz tube (5).

5. The coaxial positioning device for multi-layer quartz tubes according to claim 1, characterized in that, The center position of the coaxial shaft (10) coincides with the central axis of the laser receiver (11), and the lateral position of the laser positioning transmitter (24) coincides with the central axis of the laser receiver (11).

6. The coaxial positioning device for multi-layer quartz tubes according to claim 1, characterized in that, The bottom of the movable limiting frame (9) is provided with a first threaded channel (12), and a first threaded rod (13) is provided inside the first threaded channel (12). Both ends of the first threaded rod (13) extend outside the first threaded channel (12), and the shape and structure of the outer side of the first threaded rod (13) match the shape and structure of the first threaded channel (12) at the bottom of the movable limiting frame (9).

7. A special device for coaxial positioning of multi-layer quartz tubes according to claim 6, characterized in that, A first bearing bracket (14) is provided on the outer side of the end of the first threaded rod (13) away from the movable limit frame (9), and a first driven wheel (15) is connected to the end of the first threaded rod (13) away from the movable limit frame (9). A first transmission belt (16) is provided on the outer side of the first driven wheel (15), and a first driving wheel (17) is provided on the inner side of the end of the first transmission belt (16) away from the first driven wheel (15).

8. A special device for coaxial positioning of multi-layer quartz tubes according to claim 7, characterized in that, The first drive wheel (17) is connected to a first bidirectional motor (18) on one side, and the first bidirectional motor (18) is welded and fixed to the inner side of the main body (1) on one side. The bottom of the movable limit frame (9) is provided with a first slider (19), and the upper end of the main body (1) is provided with a first slide rail (20) along the sliding trajectory of the first slider (19).

9. A special device for coaxial positioning of multi-layer quartz tubes according to claim 1, characterized in that, The support frame (21) has a second threaded channel (23) at its bottom, and a second threaded rod (26) is provided through the second threaded channel (23). Both ends of the second threaded rod (26) extend outside the second threaded channel (23), and the shape and structure of the outer side of the second threaded rod (26) match the shape and structure of the second threaded channel (23) at the bottom of the support frame (21). A second bearing bracket (28) is provided on the outer side of the end of the second threaded rod (26) away from the support frame (21), and the end of the second threaded rod (26) away from the support frame (21) is connected to... There is a second driven wheel (27), a second transmission belt (29) is provided on the outer side of the second driven wheel (27), and a second driving wheel (30) is provided on the inner side of the end of the second transmission belt (29) away from the second driven wheel (27). A second bidirectional motor (31) is connected to one side of the second driving wheel (30), and one side of the second bidirectional motor (31) is welded and fixed to the inner side of the main body (1). A second slider (32) is provided at the bottom of the support frame (21), and a second slide rail (33) is provided at the upper end of the main body (1) along the sliding trajectory of the second slider (32).

10. A coaxial positioning welding process for multi-layer quartz tubes, employing a special coaxial positioning device for multi-layer quartz tubes as described in any one of claims 1-9, characterized in that: Includes the following steps: S1. When the outer quartz tube (5) is to be processed, it can be temporarily placed on the pre-placement rack (3) of the operating table (2). When welding, it is supported on the half-side limiting base (4). The hydraulic cylinder (8) is started to extend the piston rod (7) and push the movable limiting base (6) to support one side of it. Together with the half-side limiting base (4), it is supported. Then the first bidirectional motor (18) is started, and the first threaded rod (13) is driven to rotate clockwise through the first driving wheel (17), the first transmission belt (16), and the first driven wheel (15), which drives the movable limiting frame (9) to move outward along the first threaded channel (12). S2. The first slider (19) at the bottom of the movable limiting frame (9) moves along the first slide rail (20) at the upper end of the main body (1) to fit against the side wall of the outer quartz tube (5). Then, the inner quartz tube (25) is placed in the support groove (22) of the support frame (21). The second bidirectional motor (31) is started, and the second threaded rod (26) is driven to rotate clockwise through the second driving wheel (30), the second transmission belt (29) and the second driven wheel (27), which drives the support frame (21) to move along the second threaded channel (23) to the other side of the outer quartz tube (5). S3. The support frame (21) moves along the second slide rail (33) of the main body (1) via the second slider (32), so that the inner quartz tube (25) is precisely inserted into the outer quartz tube (5) and fitted onto the outside of the ceramic coaxial shaft (10). The positions of the half-side limiting base frame (4) and the movable limiting base frame (6) for fixing the outer quartz tube (5) and the positions of the support frame (21) for fixing the inner quartz tube (25) are all preset in advance. The preset conditions are that the outer quartz tube (5), the inner quartz tube (25), and the laser positioning device are... The central axes of the emitter (24), coaxial shaft (10) and laser receiver (11) are aligned, and the coaxiality error is ≤0.02mm. A laser positioning emitter (24) is installed at the tail of the inner quartz tube (25). The outer diameter of the laser positioning emitter (24) is the same as the inner diameter of the inner quartz tube (25). By adjusting the outer side of the inner quartz tube (25), the laser beam emitted by the laser positioning emitter (24) passes through the coaxial shaft (10) and irradiates the laser receiver (11), thereby realizing coaxiality verification.

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