Semiconductor devices and semiconductor device assemblies having inkjet printed conductive pads and methods of making the same

By forming conductive pads and traces on semiconductor device assemblies using inkjet printing technology, the problem of functional testing of stacked assemblies in the prior art is solved. It also enables protection of electrical interconnects and active circuits and fan-out of dense conductor arrays, and is suitable for stacked devices.

CN122139499APending Publication Date: 2026-06-02MICRON TECHNOLOGY INC

Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
MICRON TECHNOLOGY INC
Filing Date
2024-10-18
Publication Date
2026-06-02

AI Technical Summary

Technical Problem

Existing technologies make it difficult to effectively test the functionality of stacked assemblies in semiconductor device assemblies, and photolithography methods are incompatible or inconvenient for positioning probe pads after stacking, which may damage electrical interconnects and active circuits.

Method used

Inkjet printing technology is used to form conductive pads on semiconductor device assemblies, directly contacting exposed conductors. Conductive nanoparticles are positioned in different vertical planes through inkjet printing process to form conductive pads and traces for testing circuit functionality. This method is suitable for stacked devices.

Benefits of technology

It enables functional testing of the assembled components after stacking, protects electrical interconnects and active circuits from mechanical deformation damage, is compatible with stacked devices, and provides fan-out capability for dense conductor arrays.

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Abstract

A method for forming a semiconductor device assembly is described. The method includes: vertically stacking at least one semiconductor device on a substrate; and after vertically stacking the at least one semiconductor device, inkjet printing a conductive pad on an exposed conductor of the at least one semiconductor device or the substrate. The method may further include testing the circuitry of the semiconductor device assembly by electrically probing the circuitry through the conductive pad.
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