A high-uniformity vacuum drying device

Abstract

The application relates to a high-uniformity vacuum drying device which comprises a rack and a cover body arranged on the rack, the cover body is fixed to the rack, and the cover body opening is arranged downward; a seat body is arranged below the cover body, the seat body is arranged in the rack in a lifting sliding mode, and the seat body is used for carrying a substrate; a lifting assembly comprises a pushing block and a lifting driving element, the lifting driving element drives the pushing block to ascend, the pushing block ascends to push the seat body upward, the cover body is buckled on the cover body, and a sealed processing chamber is formed between the seat body and the cover body; a negative pressure assembly is arranged on the top of the cover body and is communicated with the processing chamber through a plurality of air suction ports. The application forms a sealed processing chamber by buckling the seat body on the cover body, air suction ports are arranged on the cover body, air flow is accurately controlled, air flow velocities at different positions of the substrate are consistent, the consistency of drying rates of different films is improved, and the forming quality of the films is ensured.

Description

Technical Field

[0001] This application relates to the field of vacuum drying technology, and in particular to a high-uniformity vacuum drying apparatus. Background Technology

[0002] Perovskite solar cells are attracting increasing attention due to their high conversion efficiency, low cost, and environmental friendliness. Furthermore, the photoelectric conversion efficiency of perovskite solar cells has increased several times in just a few years, demonstrating exceptional photoelectric performance.

[0003] In the fabrication of perovskite solar cells, multiple film layers need to be formed on a substrate, typically using methods such as blade coating or spray coating. These layers then undergo vacuum drying to remove the solvent. The drying process for perovskite solar cells requires a relatively fast vacuum rate to ensure the uniformity and quality of the film layers.

[0004] In related technologies, since both loading and unloading of the substrate requires the use of a robotic arm, a ejector pin assembly needs to be arranged inside the vacuum chamber. The lifting and lowering of multiple ejector pins in the ejector pin assembly is used to suspend the substrate, thereby leaving a gap between the substrate and the support stage to allow space for the robotic arm. Therefore, the vacuum chamber needs to have a certain height for the ejector pin assembly to lift the substrate, making it difficult to reduce the internal volume of the vacuum chamber.

[0005] By employing two smaller housings, the vacuum chamber is opened and closed through the lifting and lowering of the upper housing. Therefore, during substrate loading and unloading, the lower housing's open shape facilitates the process. After the ejector assembly descends, the upper housing descends and engages with the lower housing, forming a sealed vacuum chamber. Therefore, when sealing the vacuum chamber, space must be maintained for the ejector assembly to minimize its internal volume and ensure optimal processing results for the film vacuum drying process.

[0006] Because the upper chamber needs to move up and down, the evacuation port must be located on the fixed lower chamber to avoid the piping restricting the movement of the upper chamber. Correspondingly, within the vacuum chamber, the evacuation port is located below the substrate. The airflow above the substrate must bypass the support platform and the ejector pin assembly below it before being extracted from the evacuation port. This makes airflow control difficult, hindering the consistency of airflow velocity across the substrate surface and consequently affecting the consistency of the film drying rate. This non-uniformity is particularly amplified during high-speed vacuuming processes, negatively impacting film quality. Summary of the Invention

[0007] This application provides a high-uniformity vacuum drying apparatus to solve the technical problem in related technologies that it is difficult to ensure the uniformity of airflow velocity on the substrate surface, and thus difficult to ensure the uniformity of the drying speed of the film layer on the substrate surface, which has an adverse effect on the film quality.

[0008] A high-uniformity vacuum drying apparatus includes a frame and a component arranged on the frame: A cover body, which is fixed to the frame and has its opening facing downwards; A base body, located below the cover body, is slidably and vertically arranged on the frame, and is used to support the substrate; A lifting assembly, comprising a push block and a lifting drive, wherein the lifting drive drives the push block to rise, and the push block rises to push the seat upward, thereby fastening the cover to the seat, and forming a sealed processing chamber between the seat and the cover. The negative pressure assembly has multiple air extraction ports on the top of the cover, and the negative pressure assembly is connected to the processing chamber through the multiple air extraction ports.

[0009] In some embodiments, the high uniformity vacuum drying apparatus further includes a sealing structure comprising a sealing ring disposed at the bottom edge of the cover and / or the top edge of the seat; the sealing ring deforms when the seat is raised to be fastened by the cover; The pusher block pushes the seat upward, causing the seat and the cover to be pressed together by the sealing ring. Then, the negative pressure assembly applies a negative pressure environment to the processing chamber, causing the sealing ring to deform and thus driving the seat to rise further, creating a gap between the seat and the pusher block.

[0010] In some embodiments, the two end faces of the sealing ring are a mounting surface and an abutment surface, respectively, and the portion of the sealing ring closer to the abutment surface is more prone to deformation than the portion closer to the mounting surface.

[0011] In some embodiments, the lifting assembly further includes a mating block, which is installed on the base and is abutted by the push block, and the push block and the mating block form an interlocking fit in the vertical direction.

[0012] In some embodiments, the lifting assembly further includes an elastic element, the push block is connected to the drive end of the lifting drive element through the elastic element, and the deformation direction of the elastic element is vertical.

[0013] In some embodiments, the high uniformity vacuum drying device further includes multiple damping elements, which are installed on the driving end of the lifting drive element, and the buffer end of the damping element continuously faces upward and presses against the base. When the negative pressure environment inside the processing chamber is released, the damping component buffers the downward impact force on the seat.

[0014] In some embodiments, the high uniformity vacuum drying device further includes a lifting assembly, which lifts the base to a predetermined height, and then the lifting assembly lifts the base to press against the cover through the sealing ring; After the connection between the cover and the base is released, the lifting assembly receives the falling base.

[0015] In some embodiments, the lifting assembly includes a lifting cylinder and a lateral drive. The lifting cylinder is mounted on the lateral drive. After the seat is at a predetermined height, the lateral drive moves the lifting cylinder below the seat. The lifting cylinder pushes the seat upward so that the seat abuts against the cover through the sealing ring.

[0016] In some embodiments, the high uniformity vacuum drying apparatus further includes a guide plate, which is installed on the inner top of the cover and has multiple guide holes.

[0017] In some embodiments, the top surface of the base is raised in the middle, and the raised position in the middle of the base is used to support the substrate, and the bottom surface of the cover abuts against the edge of the base.

[0018] The beneficial effects of the technical solution provided in this application include: This application provides a high-uniformity vacuum drying apparatus. A substrate is placed on a base, and a lifting assembly pushes the base upwards, causing a cover to engage with the base, thus forming a sealed processing chamber. The substrate is located within the processing chamber. A negative pressure device evacuates air from the processing chamber to dry the substrate.

[0019] Because the air extraction ports are located at the top of the cover, air can be extracted directly from the substrate surface through the evenly distributed air extraction ports. This results in a more stable airflow and easier control of the airflow on the substrate surface. It also allows for precise control of the airflow to ensure consistent airflow velocity throughout the substrate, thereby improving the consistency of the drying rate of the film layer at different maintenance stages and guaranteeing the forming quality of the film layer.

[0020] In addition, due to the lifting arrangement of the base, the cover does not affect the space above the base when the substrate is loaded or unloaded. Therefore, there is no need to reserve extra space for the ejector pin assembly required for substrate loading or unloading. As a result, the processing chamber formed after the cover is fastened to the base can be made smaller, which improves the speed of vacuuming and thus meets the process requirements of rapid vacuuming and ensures printing quality.

[0021] Furthermore, due to the lifting and lowering of the base, the cover connected to the negative pressure component remains fixed and does not need to move. Therefore, the connecting pipe between the negative pressure component and the extraction port does not need to be arranged as a flexible hose. During high-power vacuuming, there is no issue of the pipe shrinking and deforming due to air pressure, avoiding air leakage caused by pipe deformation, and ensuring the extraction rate. This ensures that the vacuuming process meets the required process requirements and guarantees the film formation quality. Attached Figure Description

[0022] To more clearly illustrate the technical solutions in the embodiments of this application, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0023] Figure 1 A schematic diagram of the high uniformity vacuum drying apparatus provided in the embodiments of this application; Figure 2 A schematic diagram of the base, cover, and lifting assembly provided in the embodiments of this application; Figure 3 An internal schematic diagram of the cover and seat after they are fastened together, as provided in an embodiment of this application; Figure 4 A schematic diagram showing the seat being pushed up by a lifting assembly, as provided in an embodiment of this application; Figure 5 A schematic diagram from another perspective showing the seat being pushed up by the lifting assembly, as provided in the embodiments of this application. Figure 6 A schematic diagram of the seat contact sealing ring provided in an embodiment of this application; Figure 7 This is a schematic diagram illustrating the further compression of the sealing ring in the seat body provided in the embodiments of this application.

[0024] In the diagram: 1. Base; 2. Cover; 2a. Air extraction port; 3. Frame; 4. Lifting assembly; 41. Push block; 42. Lifting drive component; 43. Mating block; 5. Sealing structure; 6. Damping component; 7. Lifting assembly; 71. Lifting cylinder; 72. Lateral drive component; 8. Guide plate; a. Processing chamber. Detailed Implementation

[0025] To make the objectives, technical solutions, and advantages of the embodiments of this application clearer, the technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0026] This application provides a high-uniformity vacuum drying apparatus. A sealed processing chamber is formed by the lifting and lowering of the base and the engaging of the cover. This facilitates the creation of an air extraction port on the cover, allowing for precise airflow control and ensuring consistent airflow velocity across the substrate. This improves the consistency of drying rates at different stages of film formation, guaranteeing the quality of the film. This application addresses the technical problem in related technologies where it is difficult to ensure consistent airflow velocity on the substrate surface, thus hindering the consistency of film drying rates and negatively impacting film quality.

[0027] Reference Figure 1 and Figure 2 A high-uniformity vacuum drying apparatus includes a frame 3, a base 1, a cover 2, a lifting assembly 4, and a negative pressure assembly. The cover 2 is fixed to the frame 3 with its opening facing downwards. The base 1 is jacked up and down on the frame 3, supporting a substrate, and is located below the cover 2. The lifting assembly 4 is used to move the base 1 up and down. The base 1 rises and falls to abut against the cover 2, thus forming a sealed processing chamber a between the cover 2 and the base 1. The negative pressure assembly is used to evacuate the processing chamber a.

[0028] In this embodiment, the base 1 is arranged on the frame 3 by lifting and lowering via at least one of the slide rails and guide rods.

[0029] When loading and unloading the substrate, the base 1 descends, thereby increasing the space above the base 1 to facilitate the loading and unloading of the substrate.

[0030] With this arrangement, since the base 1 is raised and lowered, the cover 2 does not affect the space above the base 1 when the substrate is loaded and unloaded. Therefore, there is no need to reserve extra space for the ejector pin assembly required for substrate loading and unloading. As a result, the processing chamber a formed after the cover 2 is fastened to the base 1 can be made smaller, which improves the vacuuming speed and meets the process requirements of rapid vacuuming, thus ensuring printing quality.

[0031] Reference Figure 1 and Figure 2 The cover 2 has multiple air extraction ports 2a on its top, and the negative pressure assembly is connected to the processing chamber a through these ports 2a. In this embodiment, the negative pressure assembly includes a dry pump and / or a molecular pump.

[0032] With this configuration, since the air extraction port 2a is located at the top of the cover 2, air can be extracted directly from the substrate surface through the evenly distributed air extraction ports 2a. The airflow is more stable and easier to control the airflow on the substrate surface. This allows for precise control of the airflow, ensuring that the airflow velocity is consistent throughout the substrate. This improves the consistency of the drying rate of the film layer at different maintenance stages and guarantees the forming quality of the film layer.

[0033] Furthermore, since the base 1 rises and falls, the cover 2, which is connected to the negative pressure component, remains fixed and does not need to move. Therefore, the connecting pipe between the negative pressure component and the suction port 2a does not need to be arranged as a flexible hose. During high-power vacuuming, there is no problem of the pipe shrinking and deforming due to air pressure, avoiding air leakage caused by pipe deformation, and ensuring the suction rate, so as to ensure that the vacuuming process meets the required process requirements and ensures the film quality.

[0034] Preferably, multiple air extraction ports 2a are evenly distributed on the top of the cover 2 to improve airflow uniformity.

[0035] Reference Figure 3 and Figure 4 Optionally, the high uniformity vacuum drying device also includes a guide plate 8, which is installed on the inner top of the cover 2 and has multiple guide holes.

[0036] This configuration guides the airflow through the guide plate 8, resulting in more uniform airflow on the substrate surface, more consistent film drying efficiency, and guaranteed film quality.

[0037] The top surface of the base 1 has a raised section in the middle, which is used to support the substrate. The bottom surface of the cover 2 abuts against the edge of the base 1.

[0038] With this configuration, after the cover 2 is fastened to the base 1, the protruding part of the base 1 further occupies the internal space of the cover 2, thereby reducing the internal volume of the processing chamber a, improving the vacuuming efficiency of the processing chamber a, and ensuring the film formation quality.

[0039] Reference Figure 2 and Figure 4 The lifting assembly 4 includes a push block 41 and a lifting drive component 42. The lifting drive component 42 is mounted on the frame 3, and the push block 41 is mounted on the drive end of the lifting drive component 42. By driving the push block 41 to rise and push the seat 1 upward, the seat 1 can be raised. When the push block 41 falls, the seat 1 falls together with the push block 41 due to the gravity of the seat 1.

[0040] In this embodiment, it is necessary to ensure the movement accuracy of the seat 1 so that the seat 1 is just pressed against the cover 2, avoiding any impact to the cover 2 or any gap between the seat 1 and the cover 2. Preferably, the lifting drive component 42 includes a lead screw mechanism or a linear motor.

[0041] In this embodiment, the lifting assembly 4 is provided in multiple sets. The multiple sets of lifting assemblies 4 simultaneously apply force to multiple positions of the seat 1 to stably support the seat 1 and stably push the seat 1 to rise.

[0042] Reference Figure 2 and Figure 3 The high-uniformity vacuum drying device further includes a sealing structure 5, which comprises a sealing ring disposed at the bottom edge of the cover 2 and / or the top edge of the seat 1. In this embodiment, the sealing ring is disposed at the top edge of the seat 1. When the seat 1 rises to be fastened by the cover 2, the sealing ring deforms.

[0043] Reference Figures 5-7 Specifically, the pusher block 41 causes the seat 1 to rise until it abuts against the sealing ring, thereby forming a sealed processing chamber a. Subsequently, under the action of the negative pressure component, the sealing ring will further deform, thereby further raising the seat 1.

[0044] With this configuration, since the push block 41 is not directly connected to the seat 1, when the negative pressure component draws a vacuum, causing the sealing ring to deform and the seat 1 to rise, the push block 41 will not be driven to rise by the seat 1. Therefore, the lifting drive component 42 will not be subjected to tension, thus avoiding damage to the lifting drive component 42.

[0045] Reference Figures 5-7 In this process, the pusher block 41 pushes the seat 1 upward, so that the seat 1 and the cover 2 are pressed together by the sealing ring. Then, the negative pressure assembly applies a negative pressure environment to the processing chamber a, so that the sealing ring is deformed and the seat 1 is further raised, so that a gap is generated between the seat 1 and the pusher block 41.

[0046] This setup, by applying negative pressure to the processing chamber a, further compresses the sealing ring and uses the air pressure difference to support the seat 1, ensures the sealing state of the processing chamber a.

[0047] The two end faces of the sealing ring are the mounting surface and the abutment surface, respectively. The part of the sealing ring closer to the abutment surface is more prone to deformation than the part closer to the mounting surface.

[0048] This design ensures that when the seat 1 and cover 2 are initially pressed together by the sealing ring, the sealing ring is prone to deformation. This deformation of both the seat 1 and cover 2 guarantees a seal between them, reducing the precision requirements for machining the seat 1 and cover 2 and saving on manufacturing costs. Furthermore, even when the sealing ring is further compressed by air pressure, it can still withstand deformation and prevent collisions between the seat 1 and cover 2.

[0049] Preferably, the surface of the cover 2 or the seat 1 for installing the sealing ring is provided with an annular groove, and the sealing ring is installed in the annular groove to limit the lateral movement of the sealing ring and facilitate the installation and positioning of the sealing ring.

[0050] Optionally, the lifting assembly 4 also includes a mating block 43, which is installed on the base 1 and is abutted by the push block 41. The push block 41 and the mating block 43 form an interlocking fit in the vertical direction.

[0051] This configuration, with the mating block 43 providing a position for the pusher block 41 to push against the base 1, serves two purposes. First, it provides the pusher block 41 with a force-applying position to push against the base 1, preventing damage to the base 1 caused by prolonged pushing by the pusher block 41. Second, when the pusher block 41 lifts and supports the base 1, the lateral movement of the base 1 is restricted through the interlocking of the pusher block 41 and the mating block 43, ensuring stable lifting and lowering of the base 1 and preventing wobbling of the base plate on the base 1.

[0052] In some embodiments, the lifting assembly 4 further includes an elastic element, and the push block 41 is connected to the driving end of the lifting drive 42 through the elastic element, and the deformation direction of the elastic element is vertical.

[0053] Specifically, when the lifting drive 42 drives the push block 41 to rise and push the seat 1, as the push block 41 rises, it comes into contact with the seat 1, and the elastic element is gradually compressed. Then, the lifting drive 42 drives the elastic element and the seat 1 together to rise. After the seat 1 and the cover 2 abut against each other through the sealing ring, as the negative pressure component evacuates the processing chamber a, the seat 1 rises further under the action of the pressure difference. At this time, the push block 41, under the action of the elastic element, rises along with the seat 1 and continues to press against the seat 1. Finally, after the vacuum in the processing chamber a is released, the seat 1 falls and is directly caught by the push block 41, without any hard collision with the push block 41.

[0054] With this configuration, the lifting drive component 42 supports the push block 41 via an elastic element. After the seat 1 rises due to the air pressure difference, the elastic force of the elastic element causes the push block 41 to continuously press against the seat 1. Furthermore, the lifting drive component 42 and the push block 41 are elastically connected through the elastic element. After the vacuum in the subsequent processing chamber a is broken, the seat 1 will fall at high speed due to its weight and the rebound force of the sealing ring. Because the push block 41 continuously presses against the seat 1, the seat 1 will not collide hard with the push block 41. Moreover, due to the action of the elastic element, the falling seat 1 is buffered, thus the impact on the lifting drive component 42 is buffered, making it less likely to be damaged.

[0055] It should be noted that the pressure difference causes the seat 1 to rise further, which further compresses the sealing ring. When the vacuum state of the processing chamber a is released, the elastic force of the sealing ring is relatively large, causing the seat 1 to fall violently with a strong impact force. If the rebound force of the sealing ring accelerates the descent of the seat 1 and impacts the push block 41, it can easily cause a sudden increase in the instantaneous force on the lifting drive component 42, resulting in damage.

[0056] In this embodiment, the elastic element includes a damper, a spring, etc.

[0057] Reference Figure 3 and Figure 4 The high-uniformity vacuum drying device also includes multiple damping elements 6, which are installed at the drive end of the lifting drive element 42. The buffer end of the damping element 6 continuously faces upward and presses against the seat 1. When the negative pressure environment in the processing chamber a is released, the damping element 6 buffers the downward impact force on the seat 1.

[0058] Specifically, the damping element 6 and the push block 41 are both installed on the driving end of the lifting drive element 42. The height of the buffer end of the damping element 6 that abuts against the seat 1 is higher than the height of the push end of the push block 41 that abuts against the seat 1, and the height difference between the two is greater than the deformation length of the sealing ring.

[0059] Reference Figures 5-7 As the lifting drive 42 drives the push block 41 to rise, the damping element 6 rises simultaneously, and the damping element 6 abuts against the seat 1 before the push block. As the lifting drive 42 further drives the push block 41 to rise until it abuts against the seat 1, and the seat 1 abuts against the cover 2, the buffer end of the damping element 6 undergoes an elastic downward displacement. As the negative pressure assembly evacuates the processing chamber a, and the seat 1 rises further due to the pressure difference, compressing the sealing ring, the buffer end of the damping element 6 rises synchronously and remains pressed against the seat 1.

[0060] In this embodiment, the damping element 6 includes a damper.

[0061] With this configuration, the damping element 6 continuously presses against the seat 1, and even after the seat 1 rises and detaches from the pusher block 41 due to the air pressure difference, the damping element 6 continues to push against the seat 1. When the negative pressure in the processing chamber a is released, the seat 1 is supported by the damping element 6 and slowly falls, thereby preventing the seat 1 from falling rapidly and hitting the pusher, thus protecting the lifting drive component 42 from sudden force increase.

[0062] Reference Figure 1 In some embodiments, the high-uniformity vacuum drying device further includes a lifting assembly 7. After the lifting assembly 4 raises the seat 1 to a predetermined height, the lifting assembly 7 raises the seat 1 and presses it against the cover 2 through a sealing ring. After the connection between the cover 2 and the seat 1 is released, the lifting assembly 7 catches the falling seat 1. This embodiment can be arranged together with the embodiment with the damping element 6, or arranged separately.

[0063] With this configuration, after the lifting drive component 42 pushes the top block 41 to a predetermined height, the lifting assembly 7 pushes the seat 1 to rise, and the lifting assembly 7 drives the seat 1 to rise and abut against the cover 2. After the connection between the cover 2 and the seat 1 is released, the lifting assembly 7 supports the falling seat 1, and then the lifting assembly 7 drives the seat 1 to descend until it is supported by the top block 41.

[0064] The lifting assembly 7 is used to support the falling seat 1, preventing the seat 1 from hitting the push block 41 and causing damage to the lifting drive component 42, thereby protecting the lifting drive component 42.

[0065] Specifically, in this embodiment, the lifting assembly 7 includes a lifting cylinder 71 and a transverse drive 72. The lifting cylinder 71 is installed on the transverse drive 72. After the seat 1 is at the pre-set height, the transverse drive 72 drives the lifting cylinder 71 to move below the seat 1. The lifting cylinder 71 pushes the seat 1 up so that the seat 1 is pressed against the cover 2 by the sealing ring.

[0066] Specifically, the lateral movement drive 72 is mounted on the frame 3, and the lifting cylinder 71 is driven by the lateral movement drive 72 to move laterally. The lifting cylinder 71 can move laterally to the bottom of the base 1, or the lifting cylinder 71 can move to the side of the base 1, thereby leaving space for the base 1 to descend.

[0067] The lifting cylinder 71 pushes the seat 1 to abut the cover 2, and then the lifting cylinder 71 bears the impact force of the seat 1. Due to the inherent cylinder characteristics of the lifting cylinder 71, it has a certain buffering capacity and is not easily damaged by impact. Therefore, the ejector cylinder 71 is used to support the seat 1.

[0068] In this embodiment, the lateral drive 72 includes a linear motor, a cylinder, or a lead screw mechanism.

[0069] This application provides a high-uniformity vacuum drying apparatus. A substrate is placed on a base 1, and a lifting assembly 4 pushes the base 1 upwards, causing a cover 2 to engage with the base 1, thereby forming a sealed processing chamber a. The substrate is located within processing chamber a. A negative pressure device evacuates air from processing chamber a to dry the substrate.

[0070] Since the air extraction port 2a is located on the top of the cover 2, air can be extracted directly from the substrate surface through the evenly distributed air extraction ports 2a. The airflow is more stable and easier to control the airflow on the substrate surface. This allows for precise control of the airflow, ensuring that the airflow velocity is consistent throughout the substrate. This improves the consistency of the drying rate of the film layer at different maintenance stages and guarantees the forming quality of the film layer.

[0071] In addition, since the base 1 is arranged in a lifting manner, the cover 2 does not affect the space above the base 1 when the substrate is loaded or unloaded. Therefore, there is no need to reserve extra space for the ejector pin assembly required for substrate loading or unloading. As a result, the processing chamber a formed after the cover 2 is fastened to the base 1 can be made smaller, which improves the speed of vacuuming and thus meets the process requirements of rapid vacuuming and ensures printing quality.

[0072] Furthermore, because the base 1 rises and falls, the cover 2, which is connected to the negative pressure component, remains fixed and does not need to move. Therefore, the connecting pipe between the negative pressure component and the suction port 2a does not need to be arranged as a flexible hose. During high-power vacuuming, there is no problem of the pipe shrinking and deforming due to air pressure, avoiding air leakage caused by pipe deformation, and ensuring the suction rate, so as to ensure that the vacuuming process meets the required process requirements and ensures the film formation quality.

[0073] In the description of this application, it should be noted that the terms "upper," "lower," etc., indicating the orientation or positional relationship are based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application. Unless otherwise expressly specified and limited, the terms "installed," "connected," and "linked" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication between two elements. For those skilled in the art, the specific meaning of the above terms in this application can be understood according to the specific circumstances.

[0074] It should be noted that in this application, relational terms such as "first" and "second" are used merely to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitations, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes said element.

[0075] The above description is merely a specific embodiment of this application, enabling those skilled in the art to understand or implement this application. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of this application. Therefore, this application is not to be limited to the embodiments shown herein, but is to be accorded the widest scope consistent with the principles and novel features claimed herein.

Claims

1. A high-uniformity vacuum drying apparatus, characterized in that, It includes the rack and the components arranged on the rack: A cover body, which is fixed to the frame and has its opening facing downwards; A base body, located below the cover body, is slidably and vertically arranged on the frame, and is used to support the substrate; A lifting assembly, comprising a push block and a lifting drive, wherein the lifting drive drives the push block to rise, and the push block rises to push the seat upward, thereby fastening the cover to the seat, and forming a sealed processing chamber between the seat and the cover. The negative pressure assembly has multiple air extraction ports on the top of the cover, and the negative pressure assembly is connected to the processing chamber through the multiple air extraction ports.

2. The high uniformity vacuum drying apparatus according to claim 1, characterized in that, It also includes a sealing structure comprising a sealing ring disposed at the bottom edge of the cover and / or the top edge of the seat; the sealing ring deforms when the seat is raised to be fastened by the cover; The pusher block pushes the seat upward, causing the seat and the cover to be pressed together by the sealing ring. Then, the negative pressure assembly applies a negative pressure environment to the processing chamber, causing the sealing ring to deform and thus driving the seat to rise further, creating a gap between the seat and the pusher block.

3. The high uniformity vacuum drying apparatus according to claim 2, characterized in that, The two end faces of the sealing ring are the mounting surface and the abutment surface, respectively. The portion of the sealing ring closer to the abutment surface is more prone to deformation than the portion closer to the mounting surface.

4. The high uniformity vacuum drying apparatus according to claim 2, characterized in that, The lifting assembly also includes a mating block, which is installed on the base and is abutted by the push block. The push block and the mating block are interlocked in the vertical direction.

5. The high uniformity vacuum drying apparatus according to claim 2, characterized in that, The lifting assembly also includes an elastic element, and the push block is connected to the driving end of the lifting drive through the elastic element, and the deformation direction of the elastic element is vertical.

6. The high uniformity vacuum drying apparatus according to claim 2 or 5, characterized in that, It also includes multiple damping components, which are installed on the drive end of the lifting drive component, and the buffer end of the damping component continuously faces upward and presses against the seat body; When the negative pressure environment inside the processing chamber is released, the damping component buffers the downward impact force on the seat.

7. The high uniformity vacuum drying apparatus according to claim 2, characterized in that, It also includes a lifting assembly, which lifts the seat to a predetermined height, and then the lifting assembly lifts the seat to press against the cover through the sealing ring; After the connection between the cover and the base is released, the lifting assembly receives the falling base.

8. The high uniformity vacuum drying apparatus according to claim 7, characterized in that, The lifting assembly includes a lifting cylinder and a lateral drive. The lifting cylinder is installed on the lateral drive. After the seat is at a predetermined height, the lateral drive drives the lifting cylinder to move below the seat. The lifting cylinder pushes the seat upward so that the seat abuts against the cover through the sealing ring.

9. The high uniformity vacuum drying apparatus according to claim 1, characterized in that, It also includes a flow guide plate, which is installed on the inner top of the cover and has multiple flow guide holes.

10. The high uniformity vacuum drying apparatus according to claim 1, characterized in that, The top surface of the base body is raised in the middle, and the raised position in the middle of the base body is used to support the substrate. The bottom surface of the cover body abuts against the edge of the base body.

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