Graphite boat microwave drying equipment and drying method

Abstract

The present application relates to a kind of graphite boat microwave drying equipment and drying method, including drying cavity, microwave generating device, temperature control pressure exhaust system and closed system, wherein, microwave generating device is installed on the mounting hole of the inside wall of the drying cavity, for emitting microwave to the inside of the drying cavity;The microwave generating device is arranged along the two opposite long sides of the inside wall of the drying cavity, and the microwave generating device of at least one side is staggered arrangement in mounting position each other.The microwave drying groove body of the present application emits microwave when working, because the graphite boat of the same layer in the inside of the drying cavity is arranged with high difference staggered, microwave irradiation is more uniform, improves product yield and life, also improves drying efficiency;In addition, by staggering arrangement of microwave generating device, the service life of microwave generating device is prolonged, and the later maintenance cost of microwave drying groove is reduced.

Description

Technical Field

[0001] This invention belongs to the technical field of drying equipment, specifically relating to a graphite boat microwave drying equipment and drying method. Background Technology

[0002] Graphite boats are key process consumables used in large quantities in photovoltaic industry equipment. Graphite boats need to undergo strict cleaning and drying before they can be used. Graphite boat drying refers to removing moisture and other impurities from the surface and interior of the graphite boat through drying equipment and supporting technical means, thereby ensuring the dryness and cleanliness of the graphite boat and guaranteeing the performance and quality of the photovoltaic products produced.

[0003] Existing graphite boat drying equipment mostly uses electric heaters for drying, relying on heat conduction technology. This results in long drying times, uneven drying temperatures, high energy consumption, and low efficiency. Newer generation technologies using microwaves shorten drying time, reduce energy consumption, and improve efficiency. However, existing microwave drying equipment for graphite boats suffers from short microwave generator lifespan and uneven drying temperatures, which negatively impact the lifespan of the graphite boats.

[0004] Patent CN219474107 U discloses a microwave drying device for graphite boats, including a housing, a microwave generator, a tank, a hot air system, and a control system. The microwave generator and the tank are installed inside the housing. The microwave generator generates microwave energy, and the tank supports the graphite boat. The hot air system includes a hot air gas inlet installed on the side of the housing, and several exhaust holes are provided on the opposite side of the housing. This design utilizes the microwave generator to generate microwave energy to raise the temperature inside the housing. It has a compact structure and represents a fairly representative basic design in the current market, although there is still room for optimization.

[0005] Patent CN 221825824 U discloses an automatic graphite boat drying device. A feeding section is bolted to the right side of the frame. A drying section is bolted to the front of the feeding section, and a drying section is bolted to the front of the drying section. A discharging section is bolted to the front of the drying section. A water receiving trough is fixedly installed at the bottom of the inner cavity of the drying section. Swing cylinders are fixedly installed on both sides of the water receiving trough. Air pipes are fixedly connected to the output ends of the swing cylinders. Air outlets are opened at the bottom of the air pipes. A traveling frame is provided within the inner cavity of the drying section. This patented solution can pre-dry the graphite boat body before drying, which improves the drying efficiency. However, in terms of actual use, the pre-drying drying section can only remove the small amount of residual liquid on the graphite boat (a similar effect can be achieved by a short period of draining). This makes the drying process more complicated, increases equipment costs, and takes up space in microwave drying. It can only shorten the drying time by a few minutes and there are still hard-to-dry dead corners. It is not very economical in terms of overall efficiency and will also destroy the uniformity of overall drying, leading to increased losses or defective products.

[0006] In view of this, it is necessary to propose a graphite boat microwave drying equipment and drying method that is more economical, has a longer service life, and provides more uniform drying effect. Summary of the Invention

[0007] The purpose of this invention is to provide a microwave drying equipment and method that achieves more economical and efficient drying of graphite boats by optimizing the overall layout of the air supply system, microwave generator, and sealing system.

[0008] To achieve the above objectives, the present invention discloses a graphite boat microwave drying device, comprising: a drying cavity having an opening at the top of the drying device body, wherein the length of the internal accommodating space of the drying cavity is adapted to the graphite boat to accommodate one or more graphite boats; A microwave generator is installed in a mounting hole on the inner wall of the drying chamber and is used to emit microwaves into the drying chamber. The microwave generator is arranged along two opposite long sides of the inner wall of the drying chamber, and the microwave generators on at least one side are staggered in their installation positions. The temperature, pressure and humidity control system includes an air inlet jacket at the bottom of the drying chamber, an air inlet fan and air inlet duct at the bottom of the air inlet jacket and connected to the air inlet jacket, and an exhaust hole on the upper side wall of the drying chamber, an exhaust fan and exhaust duct connected to the exhaust hole, used to regulate the temperature and negative pressure in the drying chamber and exhaust moisture; the upper part of the air inlet jacket is a porous corrosion-resistant plate with evenly distributed air inlet holes, and the air inlet duct is connected to the drying chamber through the air inlet holes; A sealing system includes a drying chamber cover for sealing the opening of the drying chamber and a pressure rod mechanism for increasing the pressure between the drying chamber cover and the drying device body when they are closed. The pressure rod mechanism is located at the top edge of the drying device body and includes a rotatable pressure rod and a drive mechanism. The drive mechanism is used to drive the pressure rod to rotate to press or release the drying chamber cover.

[0009] Preferably, the graphite boat placement device includes at least a lower placement platform installed in the drying chamber, which is used to lift the graphite boat from both ends, so that the graphite boat is in a suspended state.

[0010] Preferably, the graphite boat placement device further includes an upper placement mechanism, which includes a flap that can be retracted to the side wall of the drying chamber and a drive flipping mechanism for retracting or unfolding the flap. When the flap is unfolded, the internal space of the drying chamber is divided into upper and lower layers to place the double-layer graphite boat.

[0011] Preferably, there are no other microwave generating devices within a radius of at least 50 mm around the microwave generating device, and the microwave generating devices arranged in a staggered manner have a lateral spacing of 250±50 mm and a lateral spacing of 60±10 mm.

[0012] Preferably, the microwave generators, whose installation positions are staggered, have a horizontal spacing of 235mm and a vertical spacing of 55mm; the microwave generators use 1kW or 1.5kW magnetrons.

[0013] The opening of the drying chamber is provided with at least one ring of anti-microwave leakage components. Preferably, in the temperature and pressure control and dehumidification system, at least the exhaust duct has a double-layer insulation structure.

[0014] Preferably, the drying chamber cover is provided with a pressure plate, and a pressure detection device is provided at a corresponding position on the upper part of the drying chamber. When the pressure rod presses the drying chamber cover, the pressure plate triggers the pressure detection device.

[0015] A method for drying a graphite boat using the microwave drying equipment includes the following steps: S1: Open the drying chamber cover and place the graphite boat to be dried into the drying chamber; if a double-layer graphite boat is to be placed, first place the first layer graphite boat on the lower placement platform when the flap is in the retracted state, then open the flap and place the second layer graphite boat on the flap. S2: Close the drying chamber cover and drive the pressure rod to press the drying chamber cover tightly; S3: Start the microwave generator to heat the graphite boat, and at the same time start the temperature and pressure control and dehumidification system. By adjusting the air volume of the air intake fan and the exhaust fan, the temperature and negative pressure inside the drying chamber are controlled, and the generated water vapor is discharged. S4: After drying is complete, stop the microwave generator and the temperature, pressure and humidity control system, loosen the pressure rod, open the drying tank cover, and take out the dried graphite boat.

[0016] Preferably, in S3, when two layers of graphite boats are placed inside the drying chamber, the microwave generator is controlled to emit microwaves simultaneously from both sides of the drying chamber; or, the microwave generator is controlled to emit microwaves from one side of the drying chamber, and after a certain period of time, it emits microwaves from the other side.

[0017] Preferably, in S1, the graphite boat placement device is provided with a placement structure for positioning the graphite boat, so that multiple graphite boats placed on the same layer are staggered in the height direction; the placement structure includes multiple pads or protrusions for lifting the graphite boats and making them more than 2 cm higher than the adjacent graphite boats.

[0018] Compared with the prior art, the graphite boat microwave drying equipment and drying method of the present invention have at least the following advantages: 1. When the microwave drying tank of this invention is in operation, the microwave generator on the drying chamber emits microwaves. Because the graphite boats in the same layer inside the drying chamber are arranged with different heights and staggered positions, the microwave irradiation is more uniform, which has several positive effects: ① Due to more uniform drying, the product consistency is better, which can extend the life of the dried graphite boats to a certain extent and reduce the wear and tear of the graphite boats; ② The defect rate of the dried graphite boat products is reduced by 30% on the original basis, reducing defective products and improving the product yield; ③ The drying time is further shortened, and the drying efficiency is improved.

[0019] 2. In microwave drying processes, the cathode material inside the microwave generator gradually ages during use, resulting in a limited maximum service life. By staggering the arrangement of the microwave generators, this method significantly extends their service life and reduces the later maintenance costs of the microwave drying tank. Furthermore, the staggered arrangement of the microwave generators ensures more uniform microwave distribution, and combined with the staggered arrangement of the graphite boats, the two work together to further enhance the uniformity of microwave heating in this device.

[0020] 3. The temperature, pressure, and humidity control system of the microwave drying chamber can be adjusted to a slightly negative pressure state, allowing for timely extraction of moisture generated during drying. Crucially, the air intake fan continuously draws in fresh air during the drying process. This fresh air enters the graphite boat drying chamber through numerous evenly distributed air intake holes on the top of the air intake jacket. This evenly dilutes any residue that evaporates into the drying chamber during the graphite boat drying process, ensuring the air inside the drying chamber is dry and clean. This prevents residue from accumulating in the corners of the drying chamber, thus avoiding secondary contamination of the dried graphite boat and further improving the yield of the dried product. Attached Figure Description

[0021] Figure 1 This is a schematic diagram of the overall structure of a graphite boat microwave drying equipment (some components are not shown).

[0022] Figure 2 This is a schematic diagram of the structure of one side wall of the long side of the drying chamber, where the arrows indicate the flipping direction when the flap is retracted.

[0023] Figure 3 This is a schematic diagram of the structure of the other side wall of the long side of the drying chamber.

[0024] Figure 4 This is a schematic diagram of the bottom of the drying chamber.

[0025] Figure 5 This is a schematic diagram of the structure of one side wall of the short side of the drying chamber.

[0026] The components in the diagram are numbered as follows: 1. Drying device body; 2. Drying chamber; 3. Outer frame; 4. Graphite boat; 5. Microwave generator; 6. Tilting mechanism; 7. Drive device; 8. Air inlet jacket; 9. Air inlet pipe; 10. Exhaust vent; 11. Exhaust pipe; 12. Drying tank cover; 13. Microwave leakage prevention component; 14. Pressure rod; 15. Drive mechanism; 16. Pressure plate; 17. Pressure detection device; 18. Mounting hole; 19. Lower placement platform; 20. Tilting plate. Detailed Implementation

[0027] The present invention will be further described in detail below through embodiments, so that those skilled in the art can implement it based on the description.

[0028] It should be understood that terms such as “having,” “comprising,” and “including” as used herein do not exclude the presence or addition of one or more other elements or combinations thereof.

[0029] like Figure 1-5 As shown, a graphite boat microwave drying device includes: a drying cavity 2, which opens at the top of the drying device body 1, and the length of the internal accommodating space of the drying cavity 2 is adapted to the graphite boat 4 to accommodate one or more graphite boats 4. A microwave generator 5 is installed in the mounting hole 18 on the inner wall of the drying chamber 2 and is used to emit microwaves into the drying chamber 2. The microwave generator 5 is arranged along two opposite long sides of the inner wall of the drying chamber, and at least one microwave generator 5 is staggered in its installation position. Temperature and pressure control dehumidification system, such as Figure 5As shown, it includes an air inlet jacket 8 located at the bottom of the drying chamber 2, an air inlet fan and an air inlet pipe 9 located at the bottom of the air inlet jacket and connected to the air inlet jacket 8, and an exhaust hole 10 opened on the upper part of the side wall of the drying chamber 2, and an exhaust fan and an exhaust pipe 11 connected to the exhaust hole 10, used to regulate the temperature and negative pressure in the drying chamber 2 and to discharge moisture; the upper part of the air inlet jacket is a porous corrosion-resistant plate with evenly distributed air inlet holes, and the air inlet pipe is connected to the drying chamber 2 through the air inlet holes; Closed systems, such as Figure 1 , 2 As shown, it includes a drying chamber cover 12 for sealing the opening of the drying chamber 2 and a pressure rod mechanism for increasing the pressure between the drying chamber cover and the drying device body when they are closed. The pressure rod mechanism is located at the top edge of the drying device body. The pressure rod mechanism includes a rotatable pressure rod 14 and a drive mechanism 15. The drive mechanism is used to drive the pressure rod 14 to rotate to press or release the drying chamber cover 12.

[0030] like Figure 1-3 As shown, the graphite boat placement device includes at least a lower placement platform 19 installed in the drying chamber 2. The lower placement platform 19 is used to lift the graphite boat 4 from both ends, so that the graphite boat is in a suspended state.

[0031] The graphite boat placement device also includes an upper placement mechanism, which includes a flap 20 that can be retracted to the side wall of the drying chamber 2 and a flipping mechanism 6 for retracting or unfolding the flap 20. The flipping mechanism 6 is driven by a drive device 7 located outside the drying device body 1. When the flap 20 is unfolded, it divides the internal space of the drying chamber 2 into upper and lower layers to place the double-layer graphite boat 4.

[0032] Furthermore, there are no other microwave generating devices 5 within a radius of at least 50 mm around the microwave generating device 5, and the microwave generating devices 5 arranged in a staggered manner have a lateral spacing of 250±50 mm and a lateral spacing of 60±10 mm.

[0033] Specifically, such as Figure 1-2As shown, the microwave generators 5, whose installation positions are staggered, have a horizontal spacing of 235mm and a vertical spacing of 55mm. Each microwave generator uses a 1kW or 1.5kW magnetron. Microwave drying of graphite boats typically uses 1kW or 1.5kW magnetrons. Arranging these magnetrons with a horizontal spacing of 250±50mm and a vertical spacing of 60±10mm (especially close to 235mm and 55mm) ensures sufficient magnetron density while reducing mutual interference between the microwaves emitted by the magnetrons, thus improving microwave drying efficiency. Simultaneously, it reduces adverse effects on adjacent magnetrons, increasing the lifespan of both the magnetrons and the microwave generators. More specifically, the arrangement of the microwave generators affects the microwave and electric fields inside the graphite boat drying chamber. A reasonable arrangement of the microwave generators can reduce mutual interference and extend their service life. For example, the lifespan of commonly used microwave generators (arranged in a linear, uniform pattern with intervals of 150-300mm) is approximately 3000-4000 hours. However, the specific microwave generator arrangement described in this invention (e.g., 235mm horizontal spacing and 55mm vertical spacing) significantly extends the lifespan of the microwave generators, increasing the magnetron lifespan to 5000-6000 hours. Furthermore, test results show that, while meeting the required magnetron density (power density) for drying, the overall magnetron lifespan of the 235mm horizontal and 55mm vertical spacing arrangement is superior to other arrangements. It is worth noting that for 1kW or 1.5kW magnetrons, the layout can be fine-tuned around the optimal value (235mm horizontal spacing and 55mm vertical spacing) based on actual conditions; for higher-power magnetrons, the spacing should be appropriately increased; and space can be reserved in the mounting holes 18 to allow for vertical adjustment of the microwave generator's installation position, facilitating the installation of higher-power microwave generators.

[0034] Furthermore, the opening of the drying chamber is provided with at least one ring of anti-microwave leakage components 13; In the temperature and pressure control and dehumidification system, at least the exhaust duct 11 has a double-layer insulation structure.

[0035] The drying chamber cover 12 is provided with a pressure plate 16, and the top of the outer frame 3 of the drying chamber 2 or the drying device body 1 is provided with a pressure detection device 17. When the pressure rod 14 presses the drying chamber cover 12, the pressure plate 16 triggers the pressure detection device 17.

[0036] A method for drying a graphite boat using the microwave drying equipment includes the following steps: S1: Open the drying chamber cover 12 and place the graphite boat 4 to be dried into the drying chamber 2; If a double-layer graphite boat is placed, first place the first layer graphite boat on the lower placement platform 19 when the flip plate 20 is in the retracted state, then open the flip plate 20 and place the second layer graphite boat on the flip plate 20. S2: Close the drying chamber cover 12 and drive the pressure rod 14 to press the drying chamber cover 12 tightly; S3: Start the microwave generator 5 to heat the graphite boat 4, and at the same time start the temperature and pressure control and dehumidification system. By adjusting the air volume of the air intake fan and the exhaust fan, control the temperature and negative pressure in the drying chamber 2, and discharge the generated water vapor. S4: After drying is complete, stop the microwave generator 5 and the temperature, pressure and humidity control system, loosen the pressure rod 14, open the drying tank cover 12, and take out the dried graphite boat 4.

[0037] In S3, when two layers of graphite boats 4 are placed inside the drying chamber 2, the microwave generator 5 is controlled to emit microwaves simultaneously from both sides of the drying chamber 2; or, the microwave generator 5 is controlled to emit microwaves from one side of the drying chamber 2, and after a certain period of time, it emits microwaves from the other side.

[0038] Furthermore, in S1, the graphite boat placement device is equipped with a placement structure for positioning the graphite boat 4, so that multiple graphite boats placed on the same layer are staggered in the height direction. The placement structure includes multiple pads or bosses for lifting the graphite boat 4 and making it more than 2cm (e.g., 2-5cm) higher than the adjacent graphite boats. The pads or bosses are made of a material that does not absorb microwaves. The reason for this staggered arrangement of multiple graphite boats on the same layer in the height direction is that the graphite boat closer to the microwave generator 5 tends to receive more microwaves. After being irradiated by microwaves, the graphite boat 4 will generate high temperatures. In the initial stage of heating, the graphite boat 4 near the microwave generator 5 may reach 100°C locally (if there are fragments of silicon wafer remaining, the local temperature may exceed 500°C after absorbing microwaves), while the graphite boat 4 at the far end may only reach 40°C. Prolonged uneven high-temperature drying will affect the service life of the graphite boat. However, the staggered arrangement of the graphite boats with different heights results in more uniform microwave irradiation, reduces temperature differences, and improves service life.

[0039] The reason why staggered arrangement is achieved by setting up spacers can avoid losses and improve efficiency is as follows: 1. By staggering the height of the graphite boats 4, some microwaves can act on the graphite boats far away from the microwave generator without passing through the graphite boats close to the microwave generator, thus reducing losses; 2. Microwaves are constantly reflected when they encounter the metal cavity wall inside the drying chamber (the principle of reflection is the same as the specular reflection of light). The reflected microwaves are also elevated so that they do not need to penetrate one graphite boat to irradiate another graphite boat. Due to the staggered arrangement of the graphite boats 4 at different heights, the microwaves constantly reflected inside the drying chamber 2 can be absorbed more evenly. In addition, the staggered arrangement of the microwave generator 5 makes the microwave irradiation surface spread more evenly in the height direction, making the overall heating of the graphite boats 4 more uniform, thus producing a significant improvement in efficiency.

[0040] 3. The material of the pad does not absorb microwaves, so the microwaves emitted by the microwave generator can directly pass through the pad and irradiate the graphite boat behind it.

[0041] For the reasons mentioned above, microwaves heat the graphite boats more evenly, improving drying efficiency. Compared to conventional drying methods, some graphite boats that were not dried within the conventional drying time or those in areas with poor drying conditions are now dried, shortening the high-temperature drying time and improving the pass rate and lifespan of the dried products. For example, with the microwave generators arranged with a horizontal spacing of 235mm and a vertical spacing of 55mm, using a 1.5kW magnetron, placing three graphite boats side-by-side on the lower placement platform 19, with the middle boat raised by 5cm, tests showed that compared to the conventional arrangement (microwave generators arranged in a straight line, spaced 230mm apart, graphite boats placed side-by-side), the temperature difference between the graphite boats closer to the microwave generators and those further away from the microwave generators reached the same temperature was reduced by 8-10%. For difficult-to-dry areas such as the corners and joints of the graphite boats, the drying time was shortened by 13-16%.

[0042] Although embodiments of the present invention have been disclosed above, they are not limited to the applications listed in the specification and embodiments. They can be applied to various fields suitable for the present invention. For those skilled in the art, other modifications can be easily made. Therefore, without departing from the general concept defined by the claims and their equivalents, the present invention is not limited to the specific details and embodiments shown and described herein.

Claims

1. A microwave drying device for graphite boats, characterized in that, include: The drying chamber (2) has an opening at the top of the drying device body (1). The length of the internal accommodating space of the drying chamber (2) is adapted to the graphite boat (4) to accommodate one or more graphite boats (4). A microwave generator (5) is installed in the mounting hole (18) on the inner wall of the drying chamber (2) for emitting microwaves into the drying chamber (2); the microwave generator (5) is arranged along two opposite long sides of the inner wall of the drying chamber, and at least one microwave generator (5) is staggered in its installation position. The temperature, pressure and humidity control system includes an air inlet jacket (8) located at the bottom of the drying chamber (2), an air inlet fan and an air inlet pipe (9) located at the bottom of the air inlet jacket and connected to the air inlet jacket (8), and an exhaust hole (10) opened on the upper side wall of the drying chamber (2), an exhaust fan and an exhaust pipe (11) connected to the exhaust hole (10), used to regulate the temperature and negative pressure in the drying chamber (2) and exhaust moisture; the upper part of the air inlet jacket is a porous corrosion-resistant plate with uniformly distributed air inlet holes, and the air inlet pipe is connected to the drying chamber (2) through the air inlet holes; The sealing system includes a drying chamber cover (12) for sealing the opening of the drying chamber (2) and a pressure rod mechanism for increasing the pressure between the drying chamber cover and the drying device body when they are closed. The pressure rod mechanism is located at the top edge of the drying device body. The pressure rod mechanism includes a rotatable pressure rod (14) and a drive mechanism (15). The drive mechanism (15) is used to drive the pressure rod (14) to rotate to press or release the drying chamber cover (12).

2. The graphite boat microwave drying equipment according to claim 1, characterized in that, The graphite boat placement device includes at least a lower placement platform (19) installed in the drying chamber (2). The lower placement platform (19) is used to lift the graphite boat (4) from both ends, so that the graphite boat is in a suspended state.

3. The graphite boat microwave drying equipment according to claim 1, characterized in that, The graphite boat placement device also includes an upper placement mechanism, which includes a flap (20) that can be retracted to the side wall of the drying chamber (2) and a drive flipping mechanism (6) for retracting or unfolding the flap (20). When the flap (20) is unfolded, the internal space of the drying chamber (2) is divided into upper and lower layers to place the double-layer graphite boat (4).

4. The graphite boat microwave drying equipment according to claim 1, characterized in that, There are no other microwave generating devices (5) within a radius of at least 50 mm around the microwave generating device (5). The microwave generating devices (5) arranged in a staggered manner have a lateral spacing of 250±50 mm and a lateral spacing of 60±10 mm.

5. The graphite boat microwave drying equipment according to claim 1, characterized in that, The microwave generators (5) are arranged in staggered positions with a horizontal spacing of 235mm and a vertical spacing of 55mm; the microwave generators use 1kW or 1.5kW magnetrons.

6. The graphite boat microwave drying equipment according to claim 1, characterized in that, The opening of the drying chamber is provided with at least one ring of microwave leakage prevention components (13). In the temperature and pressure control and dehumidification system, at least the exhaust pipe (11) has a double-layer insulation structure.

7. The microwave drying equipment according to claim 1, characterized in that, The drying chamber cover (12) is provided with a pressure plate (16), and the upper part of the drying chamber (2) is provided with a pressure detection device (17). When the pressure rod (14) presses the drying chamber cover (12), the pressure plate (16) triggers the pressure detection device (17).

8. A method for drying a graphite boat using the microwave drying equipment described in any one of claims 1-7, characterized in that, Includes the following steps: S1: Open the drying chamber cover (12) and put the graphite boat (4) to be dried into the drying chamber (2); If a double-layer graphite boat is to be put in, first put the first layer graphite boat on the lower placement platform (19) when the flip plate (20) is in the retracted state, then open the flip plate (20) and put the second layer graphite boat on the flip plate (20); S2: Close the drying chamber cover (12) and drive the pressure rod (14) to press the drying chamber cover (12) tightly; S3: Start the microwave generator (5) to heat the graphite boat (4), and at the same time start the temperature and pressure control and dehumidification system. By adjusting the air volume of the air intake fan and the exhaust fan, control the temperature and negative pressure in the drying chamber (2) and discharge the generated water vapor. S4: After drying is complete, stop the microwave generator (5) and the temperature and pressure control and dehumidification system, loosen the pressure rod (14), open the drying tank cover (12), and take out the dried graphite boat (4).

9. The graphite boat drying method according to claim 8, characterized in that, In S3, when two layers of graphite boats (4) are placed in the drying chamber (2), the microwave generator (5) is controlled to emit microwaves from both sides of the drying chamber (2) simultaneously; or, the microwave generator (5) is controlled to emit microwaves from one side of the drying chamber (2) and then emit microwaves from the other side after a certain period of time.

10. The graphite boat drying method according to claim 8, characterized in that, In S1, the graphite boat placement device is provided with a placement structure for positioning the graphite boat (4), so that multiple graphite boats (4) placed on the same layer are staggered in the height direction; the placement structure includes multiple pads or protrusions for lifting the graphite boat and making it more than 2cm higher than the adjacent graphite boat.

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