Radio frequency power supply power control method and device, electronic equipment and storage medium
By calculating the difference between the current forward power and the expected forward power and comparing it with the death window threshold, a target control signal is generated. The PID algorithm is used to control the RF power supply, which solves the problem of equipment damage when the reflected power is abnormal. It realizes the early prediction and active intervention of potential risks, and improves the operational safety and stability of the RF power supply.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- JIHUA LAB
- Filing Date
- 2026-04-30
- Publication Date
- 2026-06-05
AI Technical Summary
Existing RF power supply control methods cannot actively intervene and suppress abnormal trends in reflected power in the early stages, which may cause damage to the equipment when the reflected power is too high and cannot protect the RF power supply in time.
By calculating the absolute value of the difference between the current forward power and the expected forward power and comparing it with the preset death window threshold, a target control signal is generated. The PID algorithm is then used for power control to ensure the safety of the RF power supply in the next control cycle.
It enables early prediction and proactive intervention of potential risks, improves the operational safety of RF power supplies, avoids equipment damage, and ensures the stability and safety of the power regulation process.
Smart Images
Figure CN122152069A_ABST
Abstract
Description
Technical Field
[0001] This application relates to the technical field of radio frequency power supply detection, and more specifically, to a radio frequency power supply power control method, apparatus, electronic device, and storage medium. Background Technology
[0002] Radio frequency (RF) power supplies play a crucial role in many high-tech fields such as semiconductor processing, scientific research, and medical equipment. The stability and safety of their output power are essential for ensuring normal equipment operation and process quality. In practical applications, the output power of RF power supplies can be affected by dynamic changes in factors such as plasma impedance and load matching. This can cause some forward power to fail to be effectively transmitted to the load and instead return to the RF power supply as reflected power. When the reflected power is too high, it can directly cause thermal or electrical stress damage to critical components such as the power amplifier and matching network inside the RF power supply. In severe cases, it can even lead to permanent damage to the equipment, thereby affecting production efficiency and equipment lifespan.
[0003] Traditional RF power control systems typically employ PID closed-loop control algorithms to maintain stable output power. However, these conventional solutions often exhibit significant lag when dealing with abnormal reflected power. They usually only trigger protective measures such as shutdown, alarms, or power backoff after detecting that the reflected power has exceeded a preset threshold. While this "post-event protection" mechanism can prevent catastrophic failures to some extent, it cannot proactively intervene and suppress abnormal reflected power trends in their early stages. Before the system responds, the RF power supply may still be subjected to excessively high reflected power surges for a short period, accumulating potential damage. Even under rapidly changing load conditions, the delay in protection action can still lead to device damage.
[0004] To address the aforementioned issues, existing technologies urgently need improvement. Summary of the Invention
[0005] The purpose of this application is to provide a method, device, electronic device, and storage medium for controlling the power of an RF power supply. By comparing the absolute value of the difference between the current forward power and the expected safe forward power with a preset death window threshold, the RF power supply is controlled. This solves the problem that existing RF power supply control methods cannot actively intervene and suppress abnormal trends in reflected power in the early stages, thus failing to protect the RF power supply in time. It can predict the expected safe forward power in the next control cycle, realize early prediction and active intervention of potential risks, and improve the operational safety of the RF power supply.
[0006] In a first aspect, this application provides a radio frequency power control method, including: Obtain the current forward power, current reflected power, and current load power of the RF power supply; Based on the preset target power and the preset allowable reflection power threshold, combined with the current forward power, the current reflection power and the current load power, the safe expected forward power of the RF power supply in the next control cycle is calculated. The absolute value of the difference between the current forward power and the expected forward power is compared with a preset death window threshold to obtain the comparison result information. Based on the comparison results, the power of the radio frequency power supply is controlled.
[0007] The RF power control method provided in this application can control the power of the RF power supply. By comparing the absolute value of the difference between the current forward power and the safe expected forward power with a preset death window threshold, the RF power supply is controlled. This solves the problem that existing RF power supply control methods cannot actively intervene and suppress abnormal trends in reflected power in the early stages, thus failing to protect the RF power supply in time. It can predict the safe expected forward power in the next control cycle, realize early prediction and active intervention of potential risks, and improve the operational safety of the RF power supply.
[0008] Optionally, based on a preset target power and a preset allowable reflection power threshold, and in conjunction with the current forward power, the current reflection power, and the current load power, a calculation is performed to obtain the safe expected forward power of the RF power supply in the next control cycle, including: Based on the preset allowable threshold for reflected power and its corresponding preset risk parameter information, the reflected power risk threshold is determined; Determine whether the current forward power is greater than the reflection power risk threshold; If so, the preset target power is determined as the safe expected forward power of the RF power supply in the next control cycle; If not, then based on the power mode of the RF power supply, combined with the current reflected power and the current load power, the safe expected forward power of the RF power supply in the next control cycle is calculated.
[0009] Optionally, based on the power mode of the RF power supply, and in conjunction with the current reflected power and the current load power, a calculation is performed to obtain the safe expected forward power of the RF power supply in the next control cycle, including: When the power mode of the radio frequency power supply is forward power mode, the reflection power ratio limit value is calculated based on the ratio between the current reflected power and the preset allowed reflection power threshold. The minimum value between the reflected power ratio limit and the preset target power is selected as the safe expected forward power of the RF power supply in the next control cycle.
[0010] The RF power control method provided in this application can control the power of the RF power supply. By calculating the reflected power ratio limit value for the forward power mode of the RF power supply and comparing the reflected power ratio limit value with the preset target power, the minimum value between the two is selected as the safe expected forward power. This can effectively prevent equipment damage caused by excessive reflected power while maintaining the expected forward power output.
[0011] Optionally, based on the power mode of the RF power supply, and in conjunction with the current reflected power and the current load power, a calculation is performed to obtain the safe expected forward power of the RF power supply in the next control cycle, including: When the power mode of the RF power supply is the load power mode, the load power tracking limit value is calculated based on the difference between the current load power and the preset target load power. The reflection power ratio limit is calculated based on the ratio between the current reflection power and the preset allowable reflection power threshold. The minimum value between the load power tracking limit and the reflected power proportional limit is selected as the safe expected forward power of the RF power supply in the next control cycle.
[0012] The RF power control method provided in this application can realize power control of RF power supply. By calculating the load power tracking limit and the reflected power proportional limit for the load power supply load power mode, the load power tracking limit and the reflected power proportional limit are compared and the minimum value of the two is selected as the safe expected forward power, which ensures that the load power requirements are met while minimizing the risks caused by reflected power.
[0013] Optionally, the absolute value of the difference between the current forward power and the expected forward power is compared with a preset death window threshold to obtain comparison result information, including: Calculate the difference between the current forward power and the safe expected forward power, and obtain the absolute value of the difference; Determine whether the absolute value of the difference is greater than a preset death window threshold; If so, power control is applied to the radio frequency power supply to obtain comparison result information when the absolute value of the difference is greater than the preset death window threshold.
[0014] Optionally, based on the comparison result information, the radio frequency power supply is controlled, including: Based on the comparison results, a target control signal is generated using a PID algorithm. The radio frequency power supply is controlled according to the target control signal.
[0015] Optionally, based on the comparison result information, a target control signal is generated using a PID algorithm, including: Based on the difference between the current forward power and the expected safe forward power in the comparison results, an initial control signal is generated using a PID algorithm. Using a preset safety adjustment step size as an adjustment constraint, the initial control signal is subjected to amplitude limiting processing to obtain a target control signal; the target control signal is a control signal that adjusts the current forward power multiple times based on the preset safety adjustment step size, so that the current forward power after multiple adjustments tends to the safe expected forward power.
[0016] The RF power control method provided in this application can realize power control of RF power supply. By introducing a safe adjustment step size to limit the initial control signal, it effectively avoids overshoot or oscillation that may occur during the fast response of PID algorithm, ensuring the smoothness and safety of the power adjustment process, thereby further protecting the RF power supply.
[0017] Secondly, this application provides a radio frequency power control device, comprising: The acquisition module is used to acquire the current forward power, current reflected power, and current load power of the RF power supply. The calculation module is used to calculate the safe expected forward power of the radio frequency power supply in the next control cycle based on the preset target power and the preset allowed threshold for reflected power, combined with the current forward power, the current reflected power and the current load power. The comparison module is used to compare the absolute value of the difference between the current forward power and the expected forward power with a preset death window threshold to obtain comparison result information. The control module is used to control the power of the radio frequency power supply based on the comparison result information.
[0018] This RF power control device controls the RF power supply by comparing the absolute value of the difference between the current forward power and the expected safe forward power with a preset death window threshold. This solves the problem that existing RF power supply control methods cannot actively intervene and suppress abnormal trends in reflected power in the early stages, thus failing to protect the RF power supply in time. It can predict the expected safe forward power in the next control cycle, enabling early prediction and active intervention of potential risks, thereby improving the operational safety of the RF power supply.
[0019] Thirdly, this application provides an electronic device including a processor and a memory, the memory storing a computer program executable by the processor, wherein when the processor executes the computer program, it performs the steps of the radio frequency power control method described above.
[0020] Fourthly, this application provides a computer-readable storage medium having a computer program stored thereon, which, when executed by a processor, performs the steps of the radio frequency power control method described above.
[0021] Beneficial effects: The RF power control method, device, electronic device and storage medium provided in this application control the RF power supply by comparing the absolute value of the difference between the current forward power and the safe expected forward power with the comparison result information obtained by comparing the difference with the preset death window threshold. This solves the problem that existing RF power supply control methods cannot actively intervene and suppress the abnormal trend of reflected power in the early stage and thus cannot protect the RF power supply in time. It can predict the safe expected forward power of the next control cycle, realize the early prediction and active intervention of potential risks, and improve the operational safety of the RF power supply. Attached Figure Description
[0022] Figure 1 A flowchart of a radio frequency power control method provided in an embodiment of this application.
[0023] Figure 2 This is a schematic diagram of the structure of the radio frequency power control device provided in the embodiments of this application.
[0024] Figure 3 This is a schematic diagram of the structure of an electronic device provided in an embodiment of this application.
[0025] Labeling Explanation: 1. Acquisition Module; 2. Calculation Module; 3. Comparison Module; 4. Control Module; 301. Processor; 302. Memory; 303. Communication Bus. Detailed Implementation
[0026] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. The components of the embodiments of this application described and shown in the accompanying drawings can be arranged and designed in various different configurations. Therefore, the following detailed description of the embodiments of this application provided in the accompanying drawings is not intended to limit the scope of the claimed application, but merely represents selected embodiments of this application. All other embodiments obtained by those skilled in the art based on the embodiments of this application without inventive effort are within the scope of protection of this application.
[0027] It should be noted that similar reference numerals and letters in the following figures indicate similar items; therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures. Furthermore, in the description of this application, terms such as "first," "second," etc., are used only to distinguish descriptions and should not be construed as indicating or implying relative importance.
[0028] Please refer to Figure 1 , Figure 1 This application discloses a radio frequency power control method in some embodiments, used for power control of a radio frequency power supply, comprising the following steps: Step S101: Obtain the current forward power, current reflected power, and current load power of the RF power supply; Step S102: Based on the preset target power and the preset allowable reflection power threshold, combined with the current forward power, current reflection power and current load power, calculate the safe expected forward power of the RF power supply in the next control cycle. Step S103: Compare the absolute value of the difference between the current forward power and the safe expected forward power with the preset death window threshold to obtain the comparison result information. Step S104: Based on the comparison results, perform power control on the RF power supply.
[0029] This RF power control method uses the comparison result obtained by comparing the absolute value of the difference between the current forward power and the safe expected forward power with a preset death window threshold to control the power of the RF power. This solves the problem that existing RF power control methods cannot actively intervene and suppress abnormal trends in reflected power in the early stages, thus failing to protect the RF power in time. It can predict the safe expected forward power in the next control cycle, realize early prediction and active intervention of potential risks, and improve the operational safety of the RF power supply.
[0030] Specifically, in step S101, the current forward power, current reflected power, and current load power of the RF power supply are obtained. These power parameters can be achieved by installing corresponding sensors or detection circuits on the output path of the RF power supply. For example, a directional coupler can be used to separate the forward power and reflected power, which can then be measured using a power meter.
[0031] Specifically, in step S102, based on the preset target power and the preset allowable reflection power threshold, and combined with the current forward power, current reflection power, and current load power, a calculation is performed to obtain the safe expected forward power of the RF power supply in the next control cycle, including: Based on the preset allowable threshold for reflected power and its corresponding preset risk parameter information, the reflected power risk threshold is determined; Determine whether the current forward power exceeds the reflection power risk threshold; If so, the preset target power is determined as the safe expected forward power of the RF power supply in the next control cycle; If not, the expected forward power of the RF power supply in the next control cycle is calculated based on the power mode of the RF power supply, combined with the current reflected power and the current load power.
[0032] In step S102, the reflected power risk threshold refers to a threshold at which, during the operation of the RF power supply, a higher risk is considered to exist when the reflected power reaches or exceeds a certain level, requiring a more conservative power control strategy. This threshold can be set based on a preset allowed reflected power threshold and corresponding risk parameter information. For example, it can be set as a percentage of the preset allowed reflected power threshold (i.e., preset risk parameter information, such as 50%). Setting a reflected power risk threshold can identify and avoid potential risks of excessive reflected power in advance. The preset allowed reflected power threshold can be set according to actual needs, such as by obtaining it from the instruction manual or through experiments.
[0033] The system determines whether the current forward power exceeds the reflected power risk threshold to indicate that the RF power supply's forward power has reached a high-risk level. If the determination is that the current forward power exceeds the reflected power risk threshold, the preset target power is directly set as the safe expected forward power of the RF power supply in the next control cycle. The preset target power refers to the power value expected to be achieved by the RF power supply under normal and safe operating conditions, and can be set according to actual needs. When a high risk is detected, it is directly set as the target power to ensure that the RF power supply will not continue to increase its power under high-risk conditions. If the determination is that the current forward power is not greater than the reflected power risk threshold, it indicates that the current risk is relatively low. In this case, based on the RF power supply's power mode, combined with the current reflected power and current load power, a more refined calculation can be performed to obtain the safe expected forward power of the RF power supply in the next control cycle. The focus and method for calculating the safe expected forward power will differ under different power modes.
[0034] Specifically, in step S102, based on the power mode of the RF power supply, and combining the current reflected power and the current load power, a calculation is performed to obtain the safe expected forward power of the RF power supply in the next control cycle, including: When the power mode of the RF power supply is forward power mode, the reflected power ratio limit value is calculated based on the ratio between the current reflected power and the preset allowed reflected power threshold. The minimum value between the reflected power ratio limit and the preset target power is selected as the safe expected forward power of the RF power supply in the next control cycle.
[0035] In step S102, by distinguishing the power modes of the RF power supply and employing specific calculation logic for different modes, refined management of the expected forward power is achieved. In the "forward power mode," the primary focus is on the stable output of the forward power, but a "reflected power ratio limit" is used to constrain the forward power, ensuring that the output can be reduced promptly in case of abnormal reflected power, thus preventing equipment damage. In the "forward power mode," by comparing the reflected power ratio limit with the original target power and taking the minimum of the two as the final expected forward power, equipment damage caused by excessive reflected power can be effectively prevented, while maintaining the expected forward power output.
[0036] The specific formula for calculating the reflected power proportional limit is as follows: ; in, This is the reflected power proportional limit value; The preset target power; This is the amplitude limiting intensity coefficient; This represents the current load power. This is the preset allowable threshold for reflected power.
[0037] Specifically, in step S102, based on the power mode of the RF power supply, and combining the current reflected power and the current load power, a calculation is performed to obtain the safe expected forward power of the RF power supply in the next control cycle, including: When the power mode of the RF power supply is the load power mode, the load power tracking limit value is calculated based on the difference between the current load power and the preset target load power. The reflection power ratio limit is calculated based on the ratio between the current reflection power and the preset allowable reflection power threshold. The minimum value between the load power tracking limit and the reflected power proportional limit is selected as the safe expected forward power of the RF power supply in the next control cycle.
[0038] In step S102, under the "load power mode", it is necessary not only to ensure that the load power can accurately track the target value, but also to take into account the safety limit of the reflected power. By calculating the "load power tracking limit value" and the "reflected power proportional limit value", and taking the minimum of the two as the final safe expected forward power, it is ensured that the risk of reflected power is minimized while meeting the load power requirements.
[0039] The specific formula for calculating the load power tracking limit is as follows: ; in, This is the load power tracking limit value; This represents the current forward power. For load tracking coefficient; This represents the current load power.
[0040] Specifically, in step S103, the absolute value of the difference between the current forward power and the expected safe forward power is compared with a preset death window threshold to obtain comparison result information, including: Calculate the difference between the current forward power and the safe expected forward power, and obtain the absolute value of the difference; Determine whether the absolute value of the difference is greater than the preset death window threshold; If so, power control of the RF power supply is required to obtain comparison results when the absolute value of the difference is greater than the preset death window threshold.
[0041] In step S103, the difference between the current forward power and the safe expected forward power is calculated and the absolute value is taken, in order to quantify the degree of deviation between the current actual power and the safe target power.
[0042] The system determines whether the absolute value of the difference exceeds a preset death window threshold to ascertain whether the power deviation between the current forward power and the expected safe forward power warrants triggering protection control. The preset death window threshold is a critical value used to define whether the power deviation requires triggering protection control, and can be set based on factors such as the characteristics of the RF power supply, the sensitivity of the load, and the system's stability requirements.
[0043] When the absolute value of the difference is less than or equal to the death window threshold, it is considered a safe state, indicating that the current power deviation is within an acceptable safe range and no immediate protective measures are required. The comparison result information in this case indicates "no power control of the RF power supply is required." Conversely, when the absolute value of the difference is greater than the death window threshold, it is considered a risky state, indicating that the power deviation has exceeded the safe range and there is a potential risk. The comparison result information in this case indicates "power control of the RF power supply is required" to avoid equipment damage.
[0044] Specifically, in step S104, based on the comparison result information, power control of the RF power supply is performed, including: Based on the comparison results, the target control signal is generated using the PID algorithm. The power of the radio frequency power supply is controlled according to the target control signal.
[0045] Specifically, in step S104, based on the comparison result information, a target control signal is generated using a PID algorithm, including: Based on the difference between the current forward power and the safe expected forward power in the comparison results, and combined with the PID algorithm, an initial control signal is generated. Using a preset safe adjustment step size as the adjustment constraint, the initial control signal is limited to obtain the target control signal. The target control signal is a control signal that adjusts the current forward power multiple times based on the preset safe adjustment step size, so that the current forward power after multiple adjustments tends to the safe expected forward power.
[0046] In step S104, when the comparison result information indicates that power control is not required, it means that the deviation between the current forward power of the RF power supply and the safe expected forward power is within an acceptable range. At this time, no target control signal is generated to avoid interference with the stable operating state.
[0047] When power control of the RF power supply is required, an initial control signal is generated using a PID (Proportional-Integral-Derivative) algorithm based on the difference between the current forward power and the calculated safe expected forward power from the comparison results. This initial control signal reflects the magnitude and trend of the current power deviation and is the theoretical adjustment amount calculated by the PID controller based on its internal parameters. The PID algorithm is existing technology and will not be described in detail here.
[0048] To avoid potentially drastic power fluctuations caused by the initial control signal, a preset safety adjustment step size is introduced. This step size limits the initial control signal, ensuring that the target control signal is controlled within a series of small steps (the preset safety adjustment step size) to obtain the target control signal. The initial control signal is limited by comparing the absolute value of the difference between the initial control signal and the target control signal with the safety adjustment step size. If the absolute value of the difference is greater than the safety adjustment step size, the absolute value of the target control signal's control step size is limited to the safety adjustment step size. If the absolute value is less than or equal to the safety adjustment step size, the target control signal directly adopts the initial control signal. The preset safety adjustment step size is the maximum allowable change in the forward power of the RF power supply within a single control cycle. This preset safety adjustment step size limits the amplitude of each adjustment, preventing drastic power fluctuations or overshoot due to excessively large control signals. It can be empirically set or determined experimentally based on factors such as the characteristics of the RF power supply, the sensitivity of the load, and process requirements.
[0049] Therefore, no matter how large the theoretical adjustment amount calculated by the PID algorithm is, the target control signal actually applied to the RF power supply will not exceed this preset safe adjustment step size. It is precisely because of this limiting mechanism that the power adjustment process of the RF power supply can be carried out in a controlled and gradual manner, thereby avoiding the risk of system instability, power overshoot, or damage to equipment that may be caused by a single large adjustment, and achieving a smooth transition between the current forward power and the safe expected forward power.
[0050] Specifically, in step S104, when there is no target control signal, no additional control is required for the RF power supply to avoid unnecessary protection actions, thereby improving the operational stability and continuity of the RF power supply. When generating the target control signal, the target control signal is applied to the power regulation circuit of the RF power supply by means such as adjusting the drive voltage, current, or duty cycle of the RF power supply, so that its output power smoothly approaches the safe desired forward power, thereby achieving precise and dynamic adjustment of the RF power supply output power and realizing the protection control of the RF power supply.
[0051] As can be seen from the above, this RF power supply power control method obtains the current forward power, current reflected power, and current load power of the RF power supply. Based on the preset target power and preset allowable reflection power threshold, and combined with the current forward power, current reflected power, and current load power, it calculates the safe expected forward power of the RF power supply in the next control cycle. The absolute value of the difference between the current forward power and the safe expected forward power is compared with a preset death window threshold to obtain comparison result information. Based on the comparison result information, the RF power supply is controlled. Thus, by using the comparison result information obtained by comparing the absolute value of the difference between the current forward power and the safe expected forward power with the preset death window threshold to control the power supply, this method solves the problem that existing RF power supply control methods cannot actively intervene and suppress abnormal reflection power trends in the early stages, thus failing to protect the RF power supply in a timely manner. It can predict the safe expected forward power in the next control cycle, realize early prediction and active intervention of potential risks, and improve the operational safety of the RF power supply.
[0052] refer to Figure 2 This application provides an RF power supply power control device for controlling the power of an RF power supply, comprising: Acquisition module 1 is used to acquire the current forward power, current reflected power and current load power of the RF power supply; The calculation module 2 is used to calculate the safe expected forward power of the RF power supply in the next control cycle based on the preset target power and the preset allowable threshold for reflected power, combined with the current forward power, the current reflected power and the current load power. Comparison module 3 is used to compare the absolute value of the difference between the current forward power and the safe expected forward power with the preset death window threshold to obtain comparison result information. Control module 4 is used to control the power of the RF power supply based on the comparison result information.
[0053] This RF power control device controls the RF power supply by comparing the absolute value of the difference between the current forward power and the expected safe forward power with a preset death window threshold. This solves the problem that existing RF power supply control methods cannot actively intervene and suppress abnormal trends in reflected power in the early stages, thus failing to protect the RF power supply in time. It can predict the expected safe forward power in the next control cycle, enabling early prediction and active intervention of potential risks, thereby improving the operational safety of the RF power supply.
[0054] Specifically, when module 1 is executed, it acquires the current forward power, current reflected power, and current load power of the RF power supply. These power parameters can be obtained by installing corresponding sensors or detection circuits on the output path of the RF power supply. For example, a directional coupler can be used to separate the forward power and reflected power, which can then be measured using a power meter.
[0055] Specifically, when calculation module 2 calculates the safe expected forward power of the RF power supply in the next control cycle based on the preset target power and preset allowable reflection power threshold, combined with the current forward power, current reflection power, and current load power, it executes the following: Based on the preset allowable threshold for reflected power and its corresponding preset risk parameter information, the reflected power risk threshold is determined; Determine whether the current forward power exceeds the reflection power risk threshold; If so, the preset target power is determined as the safe expected forward power of the RF power supply in the next control cycle; If not, the expected forward power of the RF power supply in the next control cycle is calculated based on the power mode of the RF power supply, combined with the current reflected power and the current load power.
[0056] When calculation module 2 executes, the reflected power risk threshold refers to the threshold at which, during the operation of the RF power supply, the reflected power reaches or exceeds a certain level, indicating a high risk and necessitating a more conservative power control strategy. This threshold can be set based on a preset allowed reflected power threshold and corresponding risk parameter information. For example, it can be set as a percentage of the preset allowed reflected power threshold (i.e., preset risk parameter information, such as 50%). Setting the reflected power risk threshold allows for the early identification and avoidance of potential excessive reflected power risks. The preset allowed reflected power threshold can be set according to actual needs, such as by obtaining it from the instruction manual or through experiments.
[0057] The system determines whether the current forward power exceeds the reflected power risk threshold to indicate that the RF power supply's forward power has reached a high-risk level. If the determination is that the current forward power exceeds the reflected power risk threshold, the preset target power is directly set as the safe expected forward power of the RF power supply in the next control cycle. The preset target power refers to the power value expected to be achieved by the RF power supply under normal and safe operating conditions, and can be set according to actual needs. When a high risk is detected, it is directly set as the target power to ensure that the RF power supply will not continue to increase its power under high-risk conditions. If the determination is that the current forward power is not greater than the reflected power risk threshold, it indicates that the current risk is relatively low. In this case, based on the RF power supply's power mode, combined with the current reflected power and current load power, a more refined calculation can be performed to obtain the safe expected forward power of the RF power supply in the next control cycle. The focus and method for calculating the safe expected forward power will differ under different power modes.
[0058] Specifically, when calculation module 2 calculates the safe expected forward power of the RF power supply in the next control cycle based on the RF power supply's power mode, combined with the current reflected power and the current load power, it executes the following: When the power mode of the RF power supply is forward power mode, the reflected power ratio limit value is calculated based on the ratio between the current reflected power and the preset allowed reflected power threshold. The minimum value between the reflected power ratio limit and the preset target power is selected as the safe expected forward power of the RF power supply in the next control cycle.
[0059] During execution, calculation module 2 differentiates the power modes of the RF power supply and employs specific calculation logic for each mode to achieve refined management of the expected forward power for safety. In "forward power mode," the primary focus is on stable forward power output, but a "reflected power ratio limit" is used to constrain the forward power for safety, ensuring timely reduction of output in case of abnormal reflected power and preventing equipment damage. In "forward power mode," the minimum value between the reflected power ratio limit and the original target power is taken as the final expected forward power for safety, effectively preventing equipment damage caused by excessive reflected power while maintaining the expected forward power output.
[0060] The specific formula for calculating the reflected power proportional limit is as follows: ; in, This is the reflected power proportional limit value; The preset target power; This is the amplitude limiting intensity coefficient; This represents the current load power. This is the preset allowable threshold for reflected power.
[0061] Specifically, when calculation module 2 calculates the safe expected forward power of the RF power supply in the next control cycle based on the RF power supply's power mode, combined with the current reflected power and the current load power, it executes the following: When the power mode of the RF power supply is the load power mode, the load power tracking limit value is calculated based on the difference between the current load power and the preset target load power. The reflection power ratio limit is calculated based on the ratio between the current reflection power and the preset allowable reflection power threshold. The minimum value between the load power tracking limit and the reflected power proportional limit is selected as the safe expected forward power of the RF power supply in the next control cycle.
[0062] When the calculation module 2 is executed, in the "load power mode", it must not only ensure that the load power can accurately track the target value, but also take into account the safety limit of the reflected power. By calculating the "load power tracking limit value" and the "reflected power proportional limit value", and taking the minimum of the two as the final safe expected forward power, it ensures that the risk of reflected power is minimized while meeting the load power requirements.
[0063] The specific formula for calculating the load power tracking limit is as follows: ; in, This is the load power tracking limit value; This represents the current forward power. For load tracking coefficient; This represents the current load power.
[0064] Specifically, when comparison module 3 compares the absolute value of the difference between the current forward power and the expected safe forward power with the preset death window threshold to obtain the comparison result information, it executes: Calculate the difference between the current forward power and the safe expected forward power, and obtain the absolute value of the difference; Determine whether the absolute value of the difference is greater than the preset death window threshold; If so, power control of the RF power supply is required to obtain comparison results when the absolute value of the difference is greater than the preset death window threshold.
[0065] When the comparison module 3 is executed, it calculates the difference between the current forward power and the safe expected forward power, and takes the absolute value to quantify the degree of deviation between the current actual power and the safe target power.
[0066] The system determines whether the absolute value of the difference exceeds a preset death window threshold to ascertain whether the power deviation between the current forward power and the expected safe forward power warrants triggering protection control. The preset death window threshold is a critical value used to define whether the power deviation requires triggering protection control, and can be set based on factors such as the characteristics of the RF power supply, the sensitivity of the load, and the system's stability requirements.
[0067] When the absolute value of the difference is less than or equal to the death window threshold, it is considered a safe state, indicating that the current power deviation is within an acceptable safe range and no immediate protective measures are required. The comparison result information in this case indicates "no power control of the RF power supply is required." Conversely, when the absolute value of the difference is greater than the death window threshold, it is considered a risky state, indicating that the power deviation has exceeded the safe range and there is a potential risk. The comparison result information in this case indicates "power control of the RF power supply is required" to avoid equipment damage.
[0068] Specifically, when control module 4 performs power control on the RF power supply based on the comparison result information, it executes: Based on the comparison results, the target control signal is generated using the PID algorithm. The power of the radio frequency power supply is controlled according to the target control signal.
[0069] Specifically, when generating the target control signal based on the comparison result information using the PID algorithm, control module 4 executes: Based on the difference between the current forward power and the safe expected forward power in the comparison results, and combined with the PID algorithm, an initial control signal is generated. Using a preset safe adjustment step size as the adjustment constraint, the initial control signal is limited to obtain the target control signal. The target control signal is a control signal that adjusts the current forward power multiple times based on the preset safe adjustment step size, so that the current forward power after multiple adjustments tends to the safe expected forward power.
[0070] When the control module 4 is executing, if the comparison result information indicates that power control is not required, it means that the deviation between the current forward power of the RF power supply and the safe expected forward power is within an acceptable range. At this time, no target control signal is generated, thus avoiding interference with the stable operating state.
[0071] When power control of the RF power supply is required, an initial control signal is generated using a PID (Proportional-Integral-Derivative) algorithm based on the difference between the current forward power and the calculated safe expected forward power from the comparison results. This initial control signal reflects the magnitude and trend of the current power deviation and is the theoretical adjustment amount calculated by the PID controller based on its internal parameters. The PID algorithm is existing technology and will not be described in detail here.
[0072] To avoid potentially drastic power fluctuations caused by the initial control signal, a preset safety adjustment step size is introduced. This step size limits the initial control signal, ensuring that the target control signal is controlled within a series of small steps (the preset safety adjustment step size) to obtain the target control signal. The initial control signal is limited by comparing the absolute value of the difference between the initial control signal and the target control signal with the safety adjustment step size. If the absolute value of the difference is greater than the safety adjustment step size, the absolute value of the target control signal's control step size is limited to the safety adjustment step size. If the absolute value is less than or equal to the safety adjustment step size, the target control signal directly adopts the initial control signal. The preset safety adjustment step size is the maximum allowable change in the forward power of the RF power supply within a single control cycle. This preset safety adjustment step size limits the amplitude of each adjustment, preventing drastic power fluctuations or overshoot due to excessively large control signals. It can be empirically set or determined experimentally based on factors such as the characteristics of the RF power supply, the sensitivity of the load, and process requirements.
[0073] Therefore, no matter how large the theoretical adjustment amount calculated by the PID algorithm is, the target control signal actually applied to the RF power supply will not exceed this preset safe adjustment step size. It is precisely because of this limiting mechanism that the power adjustment process of the RF power supply can be carried out in a controlled and gradual manner, thereby avoiding the risk of system instability, power overshoot, or damage to equipment that may be caused by a single large adjustment, and achieving a smooth transition between the current forward power and the safe expected forward power.
[0074] Specifically, when the control module 4 is executing, it does not require additional control of the RF power supply in the absence of a target control signal, thus avoiding unnecessary protection actions and improving the operational stability and continuity of the RF power supply. When generating a target control signal, the target control signal is applied to the power regulation circuit of the RF power supply by means of adjusting the drive voltage, current, or duty cycle of the RF power supply, so that its output power smoothly approaches the safe desired forward power, thereby achieving precise and dynamic adjustment of the RF power supply output power and realizing the protection control of the RF power supply.
[0075] As can be seen from the above, this RF power supply power control device acquires the current forward power, current reflected power, and current load power of the RF power supply. Based on the preset target power and preset allowable reflection power threshold, and combined with the current forward power, current reflected power, and current load power, it calculates the safe expected forward power of the RF power supply in the next control cycle. The absolute value of the difference between the current forward power and the safe expected forward power is compared with a preset death window threshold to obtain comparison result information. Based on the comparison result information, the RF power supply is controlled. Thus, by using the comparison result information obtained by comparing the absolute value of the difference between the current forward power and the safe expected forward power with the preset death window threshold to control the power supply, this device solves the problem that existing RF power supply control methods cannot actively intervene and suppress abnormal reflection power trends in the early stages, thus failing to protect the RF power supply in a timely manner. It can predict the safe expected forward power in the next control cycle, realizing early prediction and active intervention of potential risks, and improving the operational safety of the RF power supply.
[0076] Please refer to Figure 3 , Figure 3This is a schematic diagram of the structure of an electronic device provided in an embodiment of this application. The electronic device includes a processor 301 and a memory 302. The processor 301 and the memory 302 are interconnected and communicate with each other via a communication bus 303 and / or other forms of connection mechanisms (not shown). The memory 302 stores a computer program executable by the processor 301. When the electronic device is running, the processor 301 executes the computer program to perform the radio frequency power control method in any optional implementation of the above embodiments, to achieve the following functions: obtaining the current forward power, current reflected power, and current load power of the radio frequency power supply; calculating the safe expected forward power of the radio frequency power supply in the next control cycle based on a preset target power and a preset allowed threshold for reflected power, combined with the current forward power, current reflected power, and current load power; comparing the absolute value of the difference between the current forward power and the safe expected forward power with a preset death window threshold to obtain comparison result information; and performing power control on the radio frequency power supply based on the comparison result information.
[0077] This application provides a computer-readable storage medium storing a computer program thereon. When the computer program is executed by a processor, it executes the radio frequency power control method in any optional implementation of the above embodiments to achieve the following functions: obtaining the current forward power, current reflected power, and current load power of the radio frequency power supply; calculating the safe expected forward power of the radio frequency power supply in the next control cycle based on a preset target power and a preset allowed threshold for reflected power, combined with the current forward power, current reflected power, and current load power; comparing the absolute value of the difference between the current forward power and the safe expected forward power with a preset death window threshold to obtain comparison result information; and performing power control on the radio frequency power supply based on the comparison result information. The storage medium can be implemented by any type of volatile or non-volatile storage device or a combination thereof, such as Static Random Access Memory (SRAM), Electrically Erasable Programmable Read-Only Memory (EEPROM), Erasable Programmable Read Only Memory (EPROM), Programmable Red-Only Memory (PROM), Read-Only Memory (ROM), magnetic storage, flash memory, magnetic disk, or optical disk.
[0078] In the embodiments provided in this application, it should be understood that the disclosed apparatus and methods can be implemented in other ways. The apparatus embodiments described above are merely illustrative. For example, the division of units is only a logical functional division, and in actual implementation, there may be other division methods. Furthermore, multiple units or components may be combined or integrated into another system, or some features may be ignored or not executed. Additionally, the displayed or discussed mutual couplings, direct couplings, or communication connections may be through some communication interfaces; indirect couplings or communication connections between devices or units may be electrical, mechanical, or other forms.
[0079] Furthermore, the units described as separate components may or may not be physically separate. The components shown as units may or may not be physical units; they may be located in one place or distributed across multiple network units. Some or all of the units can be selected to achieve the purpose of this embodiment, depending on actual needs.
[0080] Furthermore, the functional modules in the various embodiments of this application can be integrated together to form an independent part, or each module can exist independently, or two or more modules can be integrated to form an independent part.
[0081] In this document, relational terms such as first and second are used only to distinguish one entity or operation from another entity or operation, without necessarily requiring or implying any such actual relationship or order between these entities or operations.
[0082] The above description is merely an embodiment of this application and is not intended to limit the scope of protection of this application. Various modifications and variations can be made to this application by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this application should be included within the scope of protection of this application.
Claims
1. A method for controlling the power of an RF power supply, characterized in that, include: Obtain the current forward power, current reflected power, and current load power of the RF power supply; Based on the preset target power and the preset allowable reflection power threshold, combined with the current forward power, the current reflection power and the current load power, the safe expected forward power of the RF power supply in the next control cycle is calculated. The absolute value of the difference between the current forward power and the expected forward power is compared with a preset death window threshold to obtain the comparison result information. Based on the comparison results, the power of the radio frequency power supply is controlled.
2. The radio frequency power control method according to claim 1, characterized in that, Based on the preset target power and the preset allowable reflection power threshold, and combined with the current forward power, the current reflection power, and the current load power, the safe expected forward power of the RF power supply in the next control cycle is calculated, including: Based on the preset allowable threshold for reflected power and its corresponding preset risk parameter information, the reflected power risk threshold is determined; Determine whether the current forward power is greater than the reflection power risk threshold; If so, the preset target power is determined as the safe expected forward power of the RF power supply in the next control cycle; If not, then based on the power mode of the RF power supply, combined with the current reflected power and the current load power, the safe expected forward power of the RF power supply in the next control cycle is calculated.
3. The radio frequency power control method according to claim 2, characterized in that, Based on the power mode of the RF power supply, and combined with the current reflected power and the current load power, calculations are performed to obtain the safe expected forward power of the RF power supply in the next control cycle, including: When the power mode of the radio frequency power supply is forward power mode, the reflection power ratio limit value is calculated based on the ratio between the current reflected power and the preset allowed reflection power threshold. The minimum value between the reflected power ratio limit and the preset target power is selected as the safe expected forward power of the RF power supply in the next control cycle.
4. The radio frequency power control method according to claim 2, characterized in that, Based on the power mode of the RF power supply, and combined with the current reflected power and the current load power, calculations are performed to obtain the safe expected forward power of the RF power supply in the next control cycle, including: When the power mode of the RF power supply is the load power mode, the load power tracking limit value is calculated based on the difference between the current load power and the preset target load power. The reflection power ratio limit is calculated based on the ratio between the current reflection power and the preset allowable reflection power threshold. The minimum value between the load power tracking limit and the reflected power proportional limit is selected as the safe expected forward power of the RF power supply in the next control cycle.
5. The radio frequency power control method according to claim 1, characterized in that, The absolute value of the difference between the current forward power and the expected forward power is compared with a preset death window threshold to obtain comparison result information, including: Calculate the difference between the current forward power and the safe expected forward power, and obtain the absolute value of the difference; Determine whether the absolute value of the difference is greater than a preset death window threshold; If so, power control is applied to the radio frequency power supply to obtain comparison result information when the absolute value of the difference is greater than the preset death window threshold.
6. The radio frequency power control method according to claim 5, characterized in that, Based on the comparison results, the radio frequency power supply is controlled, including: Based on the comparison results, a target control signal is generated using a PID algorithm. The radio frequency power supply is controlled according to the target control signal.
7. The radio frequency power control method according to claim 6, characterized in that, Based on the comparison results, a target control signal is generated using a PID algorithm, including: Based on the difference between the current forward power and the expected safe forward power in the comparison results, an initial control signal is generated using a PID algorithm. Using a preset safety adjustment step size as an adjustment constraint, the initial control signal is subjected to amplitude limiting processing to obtain a target control signal; the target control signal is a control signal that adjusts the current forward power multiple times based on the preset safety adjustment step size, so that the current forward power after multiple adjustments tends to the safe expected forward power.
8. A radio frequency power control device, characterized in that, include: The acquisition module is used to acquire the current forward power, current reflected power, and current load power of the RF power supply. The calculation module is used to calculate the safe expected forward power of the radio frequency power supply in the next control cycle based on the preset target power and the preset allowed threshold for reflected power, combined with the current forward power, the current reflected power and the current load power. The comparison module is used to compare the absolute value of the difference between the current forward power and the expected forward power with a preset death window threshold to obtain comparison result information. The control module is used to control the power of the radio frequency power supply based on the comparison result information.
9. An electronic device, characterized in that, It includes a processor and a memory, the memory storing a computer program executable by the processor, and when the processor executes the computer program, it performs the steps in the radio frequency power control method as described in any one of claims 1-7.
10. A computer-readable storage medium having a computer program stored thereon, characterized in that, When the computer program is executed by the processor, it performs the steps in the radio frequency power control method as described in any one of claims 1-7.