A kind of light beam deflection mechanism applied to soft ceramic laser drilling open cavity equipment fast scanning

Abstract

The application belongs to the technical field of laser processing equipment, and discloses a light beam deflection mechanism applied to rapid scanning of a soft ceramic laser drilling and cavity opening equipment, comprising a two-dimensional acousto-optic deflection assembly, a radio frequency driving control system, a precision adjustment fixing assembly, an optical auxiliary assembly and a cooling and heat dissipation assembly, wherein each assembly is cooperatively matched and linked with an equipment galvanometer system and an XY moving platform; after being optimized by the optical auxiliary assembly, a laser beam is incident into the two-dimensional acousto-optic deflection assembly, the radio frequency driving control system is adjusted to realize high-precision and rapid deflection of the light beam, the precision adjustment fixing assembly guarantees positioning accuracy, and the cooling and heat dissipation assembly controls thermal effects. The application realizes 0.1 mu rad deflection accuracy and 1 mu s scanning switching speed, controls the soft ceramic processing thermal effect area within 5 mu m, and can satisfy fine processing of through holes, buried holes, blind holes and <50 mu m micro holes.

Description

Technical Field

[0001] This invention relates to the field of laser processing equipment technology, and in particular to a beam deflection mechanism for rapid scanning in a laser drilling and cavity opening device for soft ceramics. Background Technology

[0002] In multilayer co-fired ceramic processes, laser drilling for opening cavities in soft ceramics is a critical step in ensuring the electrical performance and connectivity of devices. It must simultaneously meet the precision machining requirements of through holes, buried holes, blind holes, and micro-holes (<50μm), with some processes also involving large-size cutting. Existing laser processing equipment for soft ceramics mostly uses traditional galvanometers for its beam scanning mechanism. Its scanning speed is limited by mechanical inertia, resulting in significant response delays and insufficient scanning accuracy. This leads to problems such as hole position deviations and poor hole edge quality during micro-hole machining.

[0003] Meanwhile, when traditional galvanometers operate alone, large-size cutting requires frequent platform jumps, which can easily lead to splicing errors, and their scanning range is limited. A single beam deflection mechanism, on the other hand, cannot simultaneously meet the dual requirements of high-precision deflection and large-stroke scanning. Soft ceramics are flexible and easily deformed by heat, placing extremely high demands on the stability, focusing accuracy, and thermal effect control of the laser beam. Traditional scanning mechanisms also suffer from large fluctuations in diffraction efficiency, high beam energy loss, and obvious processing heat effect zones, severely affecting the consistency of soft ceramic processing quality. Furthermore, existing beam scanning mechanisms have poor compatibility, making it difficult to adapt to different wavelength lasers and diverse soft ceramic processing techniques. They are also complex in structure, difficult to disassemble and debug, resulting in high equipment maintenance costs.

[0004] To solve the above technical challenges, it is urgent to develop a beam deflection mechanism with high-speed response, ultra-high precision positioning, low thermal effect and good compatibility. This mechanism can not only meet the fine processing requirements of micro-holes and various hole types in soft ceramics, but also work with galvanometers and moving platforms to achieve large-size cutting, thus adapting to the diversified high-performance processing needs of soft ceramic laser drilling and cavity opening equipment. Summary of the Invention

[0005] Therefore, the purpose of this invention is to provide a beam deflection mechanism for rapid scanning in a laser drilling and cavity opening device for soft ceramics. By optimizing the optical structure design and integrating acousto-optic deflection technology with precision adjustment components, a high-speed and high-precision deflection scanning of the laser beam is achieved. This mechanism, in conjunction with galvanometer deflection and platform jumping, completes large-size cutting of soft ceramics. At the same time, it reduces laser energy loss and the impact of processing heat effects, thereby improving the processing quality and efficiency of through holes, buried holes, blind holes, micro holes, and large-size cutting of soft ceramics.

[0006] To achieve the aforementioned objectives, the technical solution adopted is as follows: A beam deflection mechanism for rapid scanning in a laser drilling and cavity opening device for soft ceramics includes a two-dimensional acousto-optic deflection component, a radio frequency drive control system, a precision adjustment and fixing component, an optical auxiliary component, and a cooling and heat dissipation component. The components work together to achieve rapid deflection and stable transmission of the laser beam, and can work in conjunction with the galvanometer system and XY moving platform of the device. The two-dimensional acousto-optic deflection component is the core functional module, comprising an X-axis acousto-optic deflector and a Y-axis acousto-optic deflector orthogonally distributed and mounted on the same reference plate. Both adopt a dual-electrode phased array design, use quartz as the acousto-optic medium, employ longitudinal wave acoustic mode, have an acoustic velocity of 5.74 mm / μs, and operate at a wavelength compatible with 355 nm ultraviolet laser. The input and output polarization directions are both at 90° to the mounting plane. The center frequency of this two-dimensional acousto-optic deflection component is 170 MHz, the RF bandwidth is 80 MHz, the frequency range is 90-170 MHz, the effective aperture is 7 mm, the diffraction efficiency is 65%, the beam deflection range can reach 4.9 mrad × 4.9 mrad, the deflection accuracy is 0.1 μrad, and the scan switching speed is 1 μs. The radio frequency drive control system includes an NGD dual radio frequency output drive module, a radio frequency power amplifier, a radio frequency power divider, and a delay cable. The NGD dual radio frequency output drive module adopts digital frequency synthesis technology, with a clock frequency of 1000MHz, a frequency resolution of <1Hz, a frequency settling time of ≤310ns, and supports 0-+1V analog modulation and TTL digital modulation. The maximum dual-channel output power can reach 15W×2. The precision adjustment and fixing assembly includes a marble reference mounting plate, an XY-axis adjustment module, a θ-axis adjustment mechanism, and an elastic mechanical clamping component; the XY-axis adjustment module is mounted on the marble reference mounting plate, with an adjustment range of 0-10mm; the θ-axis adjustment mechanism is located at the mounting bases of the X-axis acoustic-optic deflector and the Y-axis acoustic-optic deflector, and can achieve fine-tuning of the angle within a range of ±1°. The optical auxiliary components include a PBS lens, a half-wave plate, an ultrafast reflector, and a beam expander, which are sequentially arranged on the incident light path of the two-dimensional acousto-optic deflection component. The beam expander can control the diameter of the incident laser beam to 3.5 mm. The PBS lens and the half-wave plate are used to adjust the laser output power. The collimating lens has a focal length of 100 mm. The cooling and heat dissipation component is a water-cooled channel integrated inside the housing of the X-axis acoustic and optical deflector and the Y-axis acoustic and optical deflector. The water-cooled channel uses corrosion-resistant pipes and SMC standard connectors. It adopts a circulating water cooling method, with the inlet water temperature controlled at 20-25℃ and the water flow rate at 0.5-1L / min.

[0007] As a further improvement of the present invention, the scanning angle of the two-dimensional acousto-optic deflection component is achieved by adjusting the radio frequency. The scanning angle range is Δθ=λ×(Fh-Fl) / v, where λ is the 355nm laser wavelength, Fh is the highest frequency of 170MHz, Fl is the lowest frequency of 90MHz, and v is the acoustic velocity of 5.74mm / μs. The beam deflection adjustment with a precision of 0.1μrad is achieved by controlling the radio frequency through a program. Combined with the wide-range deflection of the galvanometer system and the precise jump of the XY moving platform, it can meet the large-size cutting requirements with a maximum cutting size of 203×203mm.

[0008] As a further improvement of the present invention, the radio frequency drive control system has a frequency-diffraction efficiency compensation function. By using a preset frequency-power correspondence table, the radio frequency output power is dynamically adjusted according to the real-time operating frequency of 90-170MHz to ensure that the fluctuation of diffraction efficiency under different deflection angles is ≤±1%.

[0009] As a further improvement of the present invention, the marble reference mounting plate of the precision adjustment and fixing component is fixedly connected to the marble platform and galvanometer mounting base of the soft ceramic laser drilling and cavity opening device, and the scanning motion of the galvanometer system and the jumping motion of the XY moving platform are coordinated and controlled to realize the rapid scanning of the laser beam.

[0010] As a further improvement of the present invention, the collimating lens of the optical auxiliary component, together with the 170mm focal length focusing field lens and galvanometer system of the device, achieves a focused spot size ≤11μm in a 100mm×100mm scanning field.

[0011] As a further improvement of the present invention, the 1μs scanning switching speed of the two-dimensional acousto-optic deflection component consists of 300ns drive update and 300ns AOD update, which can reduce the interaction time between the laser and the soft ceramic material and control the thermal effect zone of the soft ceramic processing surface within 5μm.

[0012] As a further improvement of the present invention, the delay cable of the radio frequency drive control system is used to adjust the synchronization of the radio frequency signals of the X-axis acousto-optic deflector and the Y-axis acousto-optic deflector, the radio frequency power divider realizes the uniform distribution of radio frequency signals, and the radio frequency power amplifier is activated when the output power of the NGD dual radio frequency output drive module is insufficient to ensure the stability of radio frequency signal power.

[0013] The beneficial effects of this invention are: This invention has strong synergistic adaptability, taking into account both fine processing and large-size cutting: the two-dimensional acousto-optic deflection component has a deflection range of 4.9 mrad, and can work in conjunction with the galvanometer (±8.9° deflection) and the moving platform to meet the fine processing of through holes, buried holes, blind holes and micro holes (<50μm), and can also meet the needs of large-size cutting, thus expanding the application scenarios of the equipment. High deflection accuracy and superior processing quality: The deflection accuracy of the AOD component is up to 0.1μrad, which is far superior to that of traditional galvanometers. Combined with visual positioning and collaborative control, the accuracy of hole position and cutting edge is greatly improved, effectively avoiding deviations in the processing of soft ceramics. Fast scanning speed and minimal thermal effect: The beam deflection switching speed is as fast as 1μs, which reduces the interaction time between the laser and soft ceramic materials. The thermal effect area on the processed surface is controlled within 5μm, avoiding quality problems caused by thermal deformation and thermal damage to soft ceramics and ensuring processing consistency. Low energy loss and high efficiency: The AOD component with dual-electrode phased array design has a minimum diffraction efficiency of ≥85% and an insertion loss of only 1%. Combined with polarization calibration and collimation optimization, it significantly reduces beam energy loss and improves laser utilization. At the same time, the high-speed scanning characteristics further improve processing efficiency. Compact structure and easy maintenance: The integrated design of each component, the cooling and heat dissipation components ensure long-term stable operation, and the precision adjustment mechanism facilitates installation, commissioning and maintenance, reducing equipment operating costs. Attached Figure Description

[0014] The accompanying drawings, which form part of this application, are used to provide a further understanding of the invention. The illustrative embodiments of the invention and their descriptions are used to explain the invention and do not constitute an undue limitation of the invention. In the drawings: Figure 1 This is a schematic diagram of the structure of the present invention; Figure 2 This is a schematic diagram of the electrical control hardware structure of the present invention; Figure 3 This is a schematic diagram of the installation of the present invention on a process verification device.

[0015] In the figure: 1. Two-dimensional acousto-optic deflection component; 2. Radio frequency power amplifier; 3. Radio frequency power divider; 4. Precision adjustment and fixing component; 5. Beam expander; 6. Optical auxiliary component; 7. Galvanometer system; 8. XY moving platform. Detailed Implementation

[0016] It should be noted that, unless otherwise specified, the embodiments and features described in this application can be combined with each other. The present invention will now be described in detail with reference to the accompanying drawings and embodiments.

[0017] To enable those skilled in the art to better understand the present application, the technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present application, and not all embodiments. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative effort should fall within the scope of protection of the present application.

[0018] A beam deflection mechanism for rapid scanning in a laser drilling and cavity opening device for soft ceramics includes a two-dimensional acousto-optic deflection component 1, a radio frequency drive control system, a precision adjustment and fixing component 4, an optical auxiliary component 6, and a cooling and heat dissipation component. The components work together to achieve rapid deflection and stable transmission of the laser beam, and can work in conjunction with the galvanometer system 7 and the XY moving platform 8 of the device. The two-dimensional acousto-optic deflection component 1 is the core functional module, including an X-axis acousto-optic deflector and a Y-axis acousto-optic deflector orthogonally distributed and mounted on the same reference plate. Both adopt a dual-electrode phased array design, the acousto-optic medium is quartz, the acoustic mode is longitudinal wave, the acoustic velocity is 5.74 mm / μs, the working wavelength is adapted to 355 nm ultraviolet laser, and the input and output polarization directions are both at 90° to the mounting plane. The center frequency of the two-dimensional acousto-optic deflection component 1 is 170 MHz, the radio frequency bandwidth is 80 MHz, the frequency range is 90-170 MHz, the effective aperture is 7 mm, the diffraction efficiency is 65%, the beam deflection range can reach 4.9 mrad × 4.9 mrad, the deflection accuracy is 0.1 μrad, and the scan switching speed is 1 μs. The radio frequency drive control system includes an NGD dual radio frequency output drive module, a radio frequency power amplifier 2, a radio frequency power divider 3 (the radio frequency power divider 3 is a 3dB radio frequency power divider 3), and a delay cable; the NGD dual radio frequency output drive module adopts digital frequency synthesis technology, with a clock frequency of 1000MHz, a frequency resolution of <1Hz, a frequency settling time of ≤310ns, supports 0-+1V analog modulation and TTL digital modulation, and the maximum dual-channel output power can reach 15W×2; The precision adjustment and fixing assembly 4 includes a marble reference mounting plate, an XY-axis adjustment module, a θ-axis adjustment mechanism, and an elastic mechanical clamping component; the XY-axis adjustment module is mounted on the marble reference mounting plate, with an adjustment range of 0-10mm; the θ-axis adjustment mechanism is located at the mounting bases of the X-axis acoustic-optic deflector and the Y-axis acoustic-optic deflector, and can achieve fine-tuning of the angle within a range of ±1°. The optical auxiliary component 6 includes a PBS lens, a half-wave plate, an ultrafast reflector, a beam expander 6, and a collimating lens, which are sequentially arranged on the incident light path of the two-dimensional acousto-optic deflection component 1. The beam expander 6 can control the diameter of the incident laser beam to 3.5 mm. The PBS lens and the half-wave plate are used to adjust the laser output power. The collimating lens has a focal length of 100 mm. The cooling and heat dissipation component is a water-cooled channel integrated inside the housing of the X-axis acoustic and optical deflector and the Y-axis acoustic and optical deflector. The water-cooled channel uses corrosion-resistant pipes and SMC standard connectors. It adopts a circulating water cooling method, with the inlet water temperature controlled at 20-25℃ and the water flow rate at 0.5-1L / min.

[0019] The scanning angle of the two-dimensional acousto-optic deflection component 1 is achieved by adjusting the radio frequency. The scanning angle range is Δθ=λ×(Fh-Fl) / v, where λ is the 355nm laser wavelength, Fh is the highest frequency of 170MHz, Fl is the lowest frequency of 90MHz, and v is the acoustic velocity of 5.74mm / μs. The beam deflection adjustment with a precision of 0.1μrad is achieved by controlling the radio frequency through a program. Combined with the wide-range deflection of the galvanometer system 7 and the precise jumping of the XY moving platform 8, it can meet the large-size cutting requirements with a maximum cutting size of 203×203mm.

[0020] The radio frequency drive control system has a frequency-diffraction efficiency compensation function. By using a preset frequency-power correspondence table, it dynamically adjusts the radio frequency output power according to the real-time operating frequency of 90-170MHz to ensure that the fluctuation of diffraction efficiency under different deflection angles is ≤±1%.

[0021] The marble reference mounting plate of the precision adjustment and fixing component 4 is fixedly connected to the marble platform and galvanometer mounting base of the soft ceramic laser drilling and cavity opening device. It works in conjunction with the scanning motion of the galvanometer system 7 and the jumping motion of the XY moving platform 8 to achieve rapid scanning of the laser beam.

[0022] The collimating lens of the optical auxiliary component 6, together with the 170mm focal length focusing field lens and galvanometer system 7 of the device, has a focused spot size ≤11μm in a 100mm×100mm scanning field.

[0023] The 1μs scanning switching speed of the two-dimensional acousto-optic deflection component 1 consists of 300ns drive update and 300ns AOD update, which can reduce the interaction time between the laser and the soft ceramic material and control the thermal effect zone of the soft ceramic processing surface within 5μm.

[0024] The delay cable of the radio frequency drive control system is used to adjust the synchronization of the radio frequency signals of the X-axis acousto-optic deflector and the Y-axis acousto-optic deflector. The radio frequency power divider 3 realizes the uniform distribution of radio frequency signals. The radio frequency power amplifier 2 is activated when the output power of the NGD dual radio frequency output drive module is insufficient to ensure the stability of the radio frequency signal power.

[0025] The working process of the beam deflection mechanism described in this invention includes the following steps: S1. Initialization Preparation: Circulating cooling water at 20-25℃ is introduced into the water cooling channel of the cooling heat dissipation component. The radio frequency drive control system completes self-test. The NGD dual radio frequency output drive module loads the preset parameters with a center frequency of 170MHz. The delay cable adjusts the radio frequency signals of the X-axis acousto-optic deflector and the Y-axis acousto-optic deflector for synchronization. The galvanometer system 7 and the XY moving platform 8 complete zero calibration and establish a collaborative working reference with the beam deflection mechanism. S2. Beam Injection and Calibration: The 355nm ultraviolet laser is collimated by the collimating lens of the optical auxiliary component 6 and expanded by the beam expander 6 to form a laser beam with a diameter of 3.5mm. The laser beam passes through the PBS lens, the 1 / 2 wave plate, and the ultrafast reflector in sequence and is incident on the two-dimensional acousto-optic deflection component 1. The position and angle of the two-dimensional acousto-optic deflection component 1 are finely adjusted by the XY-axis adjustment module and the θ-axis adjustment mechanism to ensure that the laser beam is aligned with the central axis of the deflector and coaxial with the optical axis of the galvanometer system 7. S3. Processing Mode Selection and Collaborative Operation: In the micro-hole / hole-type processing mode, the RF drive control system adjusts the RF frequency according to the processing path planning, enabling the two-dimensional acousto-optic deflection component 1 to achieve two-dimensional rapid scanning of the laser beam with an accuracy of 0.1μrad, and the scanning switching speed is maintained at 1μs; in the large-size cutting mode, the two-dimensional acousto-optic deflection component 1 undertakes high-precision small-range deflection within a range of 4.9mrad, the galvanometer system 7 undertakes medium-range scanning of ±8.9°, and the XY moving platform 8 performs large-range position jumps. The three work together to complete the cutting path coverage. S4. Dynamic Compensation and Stability Control: The radio frequency drive control system dynamically adjusts the radio frequency output power according to the preset frequency-power correspondence table to maintain a diffraction efficiency of ≥85%; the cooling and heat dissipation components continuously perform circulating water cooling and heat dissipation, and automatically increase the water flow rate when the temperature exceeds the threshold; the precision adjustment and fixing components 4 maintain the overall positional stability of the mechanism, and the collaborative control algorithm ensures the working synchronization of the two-dimensional acousto-optic deflection components 1, the galvanometer system 7, and the XY moving platform 8. S5. Processing End Reset: The RF drive control system restores the initial frequency parameters, the two-dimensional acousto-optic deflection component 1 stops the laser beam deflection, the galvanometer system 7 and the XY moving platform 8 return to the zero position, and the cooling heat dissipation component shuts down after a 30-second delay, completing the entire workflow.

[0026] The above description is merely a preferred embodiment of the present invention and is not intended to limit the invention. Various modifications and variations can be made to the present invention by those skilled in the art. Any modifications, equivalent substitutions, improvements, component splitting or combination, etc., made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. A beam deflection mechanism for rapid scanning in a laser drilling and cavity opening device for soft ceramics, characterized in that, It includes a two-dimensional acousto-optic deflection component, a radio frequency drive control system, a precision adjustment and fixing component, an optical auxiliary component, and a cooling and heat dissipation component. The components work together to achieve rapid deflection and stable transmission of the laser beam, and can work in conjunction with the equipment's galvanometer system and XY moving platform. The two-dimensional acousto-optic deflection component is the core functional module, comprising an X-axis acousto-optic deflector and a Y-axis acousto-optic deflector orthogonally distributed and mounted on the same reference plate. Both adopt a dual-electrode phased array design, use quartz as the acousto-optic medium, employ longitudinal wave acoustic mode, have an acoustic velocity of 5.74 mm / μs, and operate at a wavelength compatible with 355 nm ultraviolet laser. The input and output polarization directions are both at 90° to the mounting plane. The center frequency of this two-dimensional acousto-optic deflection component is 170 MHz, the RF bandwidth is 80 MHz, the frequency range is 90-170 MHz, the effective aperture is 7 mm, the diffraction efficiency is 65%, the beam deflection range can reach 4.9 mrad × 4.9 mrad, the deflection accuracy is 0.1 μrad, and the scan switching speed is 1 μs. The radio frequency drive control system includes an NGD dual radio frequency output drive module, a radio frequency power amplifier, a radio frequency power divider, and a delay cable. The NGD dual radio frequency output drive module adopts digital frequency synthesis technology, with a clock frequency of 1000MHz, a frequency resolution of <1Hz, a frequency settling time of ≤310ns, and supports 0-+1V analog modulation and TTL digital modulation. The maximum dual-channel output power can reach 15W×2. The precision adjustment and fixing assembly includes a marble reference mounting plate, an XY-axis adjustment module, a θ-axis adjustment mechanism, and an elastic mechanical clamping component; the XY-axis adjustment module is mounted on the marble reference mounting plate, with an adjustment range of 0-10mm; the θ-axis adjustment mechanism is located at the mounting bases of the X-axis acoustic-optic deflector and the Y-axis acoustic-optic deflector, and can achieve fine-tuning of the angle within a range of ±1°. The optical auxiliary components include a PBS lens, a half-wave plate, an ultrafast reflector, and a beam expander, which are sequentially arranged on the incident light path of the two-dimensional acousto-optic deflection component. The beam expander can control the diameter of the incident laser beam to 3.5 mm. The PBS lens and the half-wave plate are used to adjust the laser output power. The collimating lens has a focal length of 100 mm. The cooling and heat dissipation component is a water-cooled channel integrated inside the housing of the X-axis acoustic and optical deflector and the Y-axis acoustic and optical deflector. The water-cooled channel uses corrosion-resistant pipes and SMC standard connectors. It adopts a circulating water cooling method, with the inlet water temperature controlled at 20-25℃ and the water flow rate at 0.5-1L / min.

2. The beam deflection mechanism for rapid scanning in a laser drilling and cavity opening device for soft ceramics according to claim 1, characterized in that: The scanning angle of the two-dimensional acousto-optic deflection component is achieved by adjusting the radio frequency. The scanning angle range is Δθ=λ×(Fh-Fl) / v, where λ is the 355nm laser wavelength, Fh is the highest frequency of 170MHz, Fl is the lowest frequency of 90MHz, and v is the acoustic velocity of 5.74mm / μs. The beam deflection adjustment with a precision of 0.1μrad is achieved by controlling the radio frequency through a program. Combined with the wide-range deflection of the galvanometer system and the precise jump of the XY moving platform, it can meet the large-size cutting requirements with a maximum cutting size of 203×203mm.

3. The beam deflection mechanism for rapid scanning in a laser drilling and cavity opening device for soft ceramics according to claim 1, characterized in that: The radio frequency drive control system has a frequency-diffraction efficiency compensation function. By using a preset frequency-power correspondence table, it dynamically adjusts the radio frequency output power according to the real-time operating frequency of 90-170MHz to ensure that the fluctuation of diffraction efficiency under different deflection angles is ≤±1%.

4. The beam deflection mechanism for rapid scanning in a laser drilling and cavity opening device for soft ceramics according to claim 1, characterized in that: The marble reference mounting plate of the precision adjustment and fixing assembly is fixedly connected to the marble platform and galvanometer mounting base of the soft ceramic laser drilling and cavity opening equipment. It works in conjunction with the scanning motion of the galvanometer system and the jumping motion of the XY moving platform to achieve rapid scanning of the laser beam.

5. The beam deflection mechanism for rapid scanning in a laser drilling and cavity opening device for soft ceramics according to claim 1, characterized in that, The collimating lens of the optical auxiliary component works in conjunction with the 170mm focal length focusing field lens and galvanometer system of the device to achieve a focused spot size ≤11μm within a 100mm×100mm scanning field.

6. The beam deflection mechanism for rapid scanning in a laser drilling and cavity opening device for soft ceramics according to claim 1, characterized in that: The 1μs scanning switching speed of the two-dimensional acousto-optic deflection component consists of 300ns drive update and 300ns AOD update, which can reduce the interaction time between the laser and the soft ceramic material and control the thermal effect zone of the soft ceramic processing surface to within 5μm.

7. The beam deflection mechanism for rapid scanning in a laser drilling and cavity opening device for soft ceramics according to claim 1, characterized in that: The delay cable of the radio frequency drive control system is used to adjust the synchronization of the radio frequency signals of the X-axis acousto-optic deflector and the Y-axis acousto-optic deflector. The radio frequency power divider realizes the uniform distribution of radio frequency signals. The radio frequency power amplifier is activated when the output power of the NGD dual radio frequency output drive module is insufficient to ensure stable radio frequency signal power.

8. The beam deflection mechanism for rapid scanning in a laser drilling and cavity opening device for soft ceramics according to any one of claims 1-7, characterized in that, The agency's workflow includes the following steps: S1. Initialization Preparation: Circulating cooling water at 20-25℃ is introduced into the water cooling channel of the cooling heat dissipation component. The radio frequency drive control system completes self-test. The NGD dual radio frequency output drive module loads the preset parameters with a center frequency of 170MHz. The delay cable adjusts the radio frequency signals of the X-axis acousto-optic deflector and the Y-axis acousto-optic deflector for synchronization. The galvanometer system and the XY moving platform complete zero calibration and establish a collaborative working reference with the beam deflection mechanism. S2. Beam Injection and Calibration: The 355nm ultraviolet laser is collimated by the collimating lens of the optical auxiliary component and expanded by the beam expander to form a laser beam with a diameter of 3.5mm. The beam is then incident on the two-dimensional acousto-optic deflection component through the PBS lens, the half-wave plate, and the ultrafast reflector in sequence. The position and angle of the two-dimensional acousto-optic deflection component are finely adjusted by the XY-axis adjustment module and the θ-axis adjustment mechanism to ensure that the laser beam is aligned with the central axis of the deflector and coaxial with the optical axis of the galvanometer system. S3. Processing Mode Selection and Collaborative Operation: In micro-hole / hole-type processing mode, the RF drive control system adjusts the RF frequency according to the processing path plan, enabling the two-dimensional acousto-optic deflection component to achieve two-dimensional rapid scanning of the laser beam with an accuracy of 0.1μrad, and the scanning switching speed is maintained at 1μs; in large-size cutting mode, the two-dimensional acousto-optic deflection component undertakes high-precision small-range deflection within a range of 4.9mrad, the galvanometer system undertakes medium-range scanning of ±8.9°, and the XY moving platform performs large-range position jumps. The three work together to complete the cutting path coverage. S4. Dynamic Compensation and Stable Control: The RF drive control system dynamically adjusts the RF output power according to the preset frequency-power correspondence table to maintain a diffraction efficiency of ≥85%; the cooling and heat dissipation components continuously perform circulating water cooling and automatically increase the water flow rate when the temperature exceeds the threshold; the precision adjustment and fixing components maintain the overall positional stability of the mechanism, and the collaborative control algorithm ensures the working synchronization of the two-dimensional acousto-optic deflection components, galvanometer system, and XY moving platform. S5. Processing End Reset: The RF drive control system restores the initial frequency parameters, the two-dimensional acousto-optic deflection component stops the laser beam deflection, the galvanometer system and the XY moving platform return to zero, and the cooling heat dissipation component shuts down after a 30-second delay, completing the entire workflow.

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