A precursor source bottle for semiconductor manufacturing

Abstract

The application discloses a precursor source bottle for semiconductor manufacturing, which comprises a bottle cap provided with an air inlet and an air outlet, a bottle body fixedly connected with the bottle cap, and a pressing block, a bellows and a guide column accommodated in a cavity of the bottle body; a guide cylinder is fixedly penetrated through the pressing block, the guide cylinder is correspondingly arranged with the guide column, and the guide cylinder is sleeved on one end of the guide column; a plurality of air ducts are arranged on the pressing block; the bellows is fixedly connected with the bottle cap and the pressing block at two ends respectively, and the guide column and the guide cylinder are accommodated in the bellows. The technical scheme of the application can reduce the pollution of particulate matter to biological precursors, strengthen the guidance of the pressing block, and prevent the carrier gas from directly passing from the air inlet to the air outlet without passing through the solid precursor.

Description

Technical Field

[0001] This invention relates to the field of semiconductor manufacturing technology, and more specifically to a precursor source bottle for semiconductor manufacturing. Background Technology

[0002] Source bottles are crucial equipment in semiconductor manufacturing. They are used to sublimate solid precursors within the source bottle and then transport them out via a carrier gas to output ultra-high purity gases used in semiconductor manufacturing.

[0003] Because the solid precursor that has accumulated has a limited contact area with the carrier gas, it is not easily carried out by the carrier gas; and the carrier gas can easily run directly from the inlet to the outlet, causing a short circuit problem for the carrier gas.

[0004] To overcome the aforementioned problems, the current approach involves placing a pressure block with a lower grid inside the source bottle. This pressure block is fixed by a first baffle that can move up and down. The first baffle and a second baffle are sealed together, and the second baffle is fixed to the bottle cap. The first baffle moves along a longitudinal guide rail inside the bottle. This results in friction between the first baffle and the longitudinal guide rail of the bottle, as well as the second baffle. The function of the first and second baffles is to prevent the carrier gas from flowing directly from the inlet to the outlet, bypassing the grid of the lower grid pressure block. The lower grid pressure block descends as the solid precursor is consumed, and the lower grid of the lower grid pressure block allows the carrier gas to permeate, thereby increasing the contact area between the carrier gas and the solid precursor.

[0005] Because the source bottle operates at 200 degrees Celsius and needs to be reused repeatedly, the friction-generating first baffle contaminates the gas sublimated from the precursor with particles generated by friction, reducing the semiconductor yield. Summary of the Invention

[0006] To address the aforementioned problems, this invention provides a precursor source bottle for semiconductor manufacturing, which can reduce particulate matter contamination of precursor gases in biological systems, enhance the guidance of the press block, and prevent the carrier gas from flowing directly from the inlet to the outlet without passing through the solid precursor.

[0007] To achieve the above objectives, the present invention provides the following technical solution: A precursor source bottle for semiconductor manufacturing, the source bottle includes at least a bottle cap with an air inlet and an air outlet, a bottle body fixedly connected to the bottle cap, and a pressure block, a bellows and a guide post housed in the cavity of the bottle body. A guide cylinder is fixed through the pressure block, and the guide post is correspondingly arranged with the guide cylinder, with the guide cylinder fitted onto one end of the guide post; The pressure block is provided with multiple air ducts; The two ends of the corrugated tube are fixedly connected to the bottle cap and the pressure block, respectively, and the guide post and guide cylinder are housed inside the corrugated tube.

[0008] In an alternative embodiment, the guide post and the guide cylinder have the same cross-sectional shape in the first direction, both being non-circular.

[0009] In an alternative embodiment, in the third-party orientation, the end of the guide tube facing the bottle cap is an open end, the bottom end of the guide tube at the bottom of the bottle body has a bottom seal, one end of the guide post is fixedly connected to the bottle cap, and the other end is accommodated inside the guide tube.

[0010] In an alternative embodiment, the pressure block includes a flat portion and a grid portion, the grid portion being disposed on the lower surface of the flat portion; in a first direction, the width of the grid portion is the same as the width of the flat portion.

[0011] In an alternative embodiment, the grille portion includes a plurality of grilles arranged in an array along a second direction, with an air duct formed between two adjacent grilles, and in a third direction, the projected area of ​​the grille portion does not extend beyond the internal area of ​​the bellows.

[0012] In an alternative embodiment, in a first direction, both sides of the flat portion of the pressing block do not contact the bottle body; in a second direction, both sides of the flat portion of the pressing block contact the bottle body, and the pressing block can move along the guide post in a third direction.

[0013] In an alternative embodiment, the bottle cap is fixedly connected to at least one guide post, and the number of guide cylinders fixed through the pressure block is not less than the number of guide posts, and both the guide posts and guide cylinders are housed inside a bellows.

[0014] In an alternative embodiment, the corrugated tube has a racetrack-shaped cross-section in the second direction, and multiple diaphragms are welded from top to bottom in the third direction to form the corrugated tube. Each diaphragm includes two semicircular diaphragms and two straight strip diaphragms, and the semicircular diaphragms and straight strip diaphragms are alternately connected to form a racetrack-shaped diaphragm.

[0015] In an alternative embodiment, the bottle cap is fixedly connected to at least one guide post, and the number of guide cylinders fixed through the pressure block is greater than the number of guide posts, with each guide cylinder housed inside a corresponding bellows.

[0016] In an alternative embodiment, the protrusions of adjacent bellows are staggered, and the sum of the first gap T1 between the bellows, the second gap T2 between the outer bellows and the bottle body is smaller than the third gap T3 of an air duct of the pressure block.

[0017] The beneficial effects of this invention are: The guide pillars and guide tubes effectively guide the pressure block with the lower grille; the corrugated pipe reduces the particulate matter pollution of the precursor gas of the organism caused by friction during the guidance of the pressure block with the lower grille; and the cooperation between the corrugated pipe and the pressure block prevents the carrier gas from going directly from the inlet to the outlet without passing through the solid precursor. Attached Figure Description

[0018] Figure 1 This is a front cross-sectional view of a semiconductor manufacturing precursor source bottle in one embodiment of the present invention; Figure 2 This is a left sectional view of a semiconductor manufacturing precursor source bottle in one embodiment of the present invention; Figure 3 This is a three-dimensional exploded cross-sectional view of a semiconductor manufacturing precursor source bottle according to one embodiment of the present invention; Figure 4 This is a front cross-sectional view of a semiconductor manufacturing precursor source bottle according to another embodiment of the present invention; Figure 5 This is a left sectional view of a semiconductor manufacturing precursor source bottle in another embodiment of the present invention; Figure 6 This is a three-dimensional exploded cross-sectional view of a semiconductor manufacturing precursor source bottle according to another embodiment of the present invention.

[0019] Reference numerals: bottle cap; 11-air inlet; 12-air outlet; 2-bottle body; 3-pressing block; 31-guide cylinder; 32-flat part; 33-grid part; 331-grid; 34-pad; 4-bellows; 41-protrusion; 5-guide post; T1-first gap; T2-second gap; T3-third gap. Detailed Implementation

[0020] To make the objectives, technical solutions, and advantages of this application clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0021] Embodiments of the present invention, examples of which are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The terms "first," "second," "third," etc., in the specification, claims, and drawings of the present invention (if present) are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence. It should be understood that such described objects can be interchanged where appropriate. Furthermore, the terms "comprising" and "having," and any variations thereof, are intended to cover non-exclusive inclusion. Directional terms used in the present invention, such as: up, down, left, right, front, back, inside, outside, side, etc., are only for reference to the accompanying drawings. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and should not be construed as limiting the present invention. Furthermore, the present invention repeats reference numerals and / or reference letters in different examples; this repetition is for simplification and clarity and does not in itself indicate a relationship between the various embodiments and / or arrangements discussed. In addition, the present invention provides examples of various specific processes and materials, but those skilled in the art will recognize the application of other processes and / or the use of other materials.

[0022] Example 1 like Figures 1-6 As shown, this embodiment discloses a precursor source bottle for semiconductor manufacturing, and sets a first direction, a second direction, and a third direction accordingly. The source bottle includes at least: a bottle cap 1, a bottle body 2, a pressure block 3, a bellows 4, and a guide post 5.

[0023] The bottle cap 1 is provided with an air inlet 11 and an air outlet 12. The bottle body 2 is fixedly connected to the bottle cap 1. Preferably, the bottle body 2 can be fixed to the bottle cap 1 by a flange or welding. The pressure block 3, the bellows 4, and the guide post 5 are all housed in the bottle body 2.

[0024] On the third-party upward side, a guide cylinder 31 is fixedly fixed through the pressure block 3, and a guide post 5 is correspondingly arranged with the guide cylinder 31. The guide cylinder 31 is fitted onto one end of the guide post 5. One end of the guide post 5 is fixedly connected to the bottle cap 1, preferably welded to the lower surface of the bottle cap 1, and the other end is accommodated in the guide cylinder 31.

[0025] Furthermore, to avoid rotation between the guide post 5 and the guide cylinder 31, the guide post 5 and the guide cylinder 31 have the same cross-sectional shape in the first direction.

[0026] Specifically, the cross-sectional shapes of the guide post 5 and the guide cylinder 31 in the first direction are both non-circular. Optionally, the cross-sectional shapes of the guide post 5 and the guide cylinder 31 in the first direction are square, hexagonal, triangular, or elliptical.

[0027] The pressure block 3, the bellows 4, the guide post 5, and the guide cylinder 31 are arranged coaxially.

[0028] Preferably, a pad 34 is also provided below the pressure block 3.

[0029] Furthermore, in the third direction, the end of the guide tube 31 facing the bottle cap 1 is an open end, and the bottom end of the guide tube 31 at the bottom of the bottle body 2 has a bottom seal. Preferably, the cross-sectional shape of the guide tube 31 in the third direction is U-shaped. The bottom seal design of the guide tube 31 can prevent particles from flowing into the bottle body 2 after friction between the guide tube 31 and the guide post 5.

[0030] The two ends of the bellows 4 are fixedly connected to the bottle cap 1 and the pressure block 3, respectively, and the guide post 5 and the guide cylinder 31 are housed inside the bellows 4. Preferably, in the third direction, the upper end of the bellows 4 is sealed and welded to the bottle cap 1, and the lower end of the bellows 4 is welded to the pressure block 3.

[0031] Since the guide post 5 and the guide cylinder 31 are housed inside the bellows 4, the bellows 4 encapsulates the particulate matter generated by the friction of the guide post 5 and the guide cylinder 32 inside it, thereby improving the cleanliness of the carrier gas output from the source bottle, reducing particulate matter, and not hindering the up-and-down movement of the pressure block 3.

[0032] To prevent the bellows 4 from being completely sealed inside, thus hindering its expansion and contraction under constant gas pressure, a vent hole (not shown in the figure) can be provided on the surface of the bottle cap 1 facing the bellows 4. That is, the bottle cap 1 has a through vent hole between the bellows 4 and the guide post 5. This vent hole allows the bellows 4 to be compressed and expanded without being hindered by the completely sealed internal air pressure.

[0033] Multiple air ducts are provided on the lower side of the pressure block 3, so that the upper side of the pressure block 3 is almost a path that the carrier gas cannot pass through, and the air ducts on the lower side guide the flow of the carrier gas.

[0034] Furthermore, the pressure block 3 includes a flat portion 32 and a grid portion 33. In the third direction, the grid portion 33 is disposed on the lower surface of the flat portion 32. In the first direction, the width of the grid portion 33 is the same as the width of the flat portion 32.

[0035] Preferably, multiple air ducts are formed in the grille section 33.

[0036] Specifically, the grille section 33 includes a plurality of grilles 331 arranged in an array along the second direction, with an air duct formed between two adjacent grilles 331. The length of the grille section 33 in the second direction is less than the length of the planar section 32.

[0037] Furthermore, in the third direction, the projection area of ​​the grille section 33 does not extend beyond the internal area of ​​the bellows 4. That is, the grille section 33 is always projected inside the bellows 4.

[0038] Furthermore, in the first direction, both sides of the flat portion 32 of the pressing block 3 do not contact the bottle body 2, while in the second direction, both sides of the flat portion 32 of the pressing block 3 contact the bottle body 2, thereby allowing the pressing block 3 to move along the guide post 5 in the third direction.

[0039] Optionally, the two sides of the flat portion 32 of the pressing block 3 may also be in clearance fit with the bottle body 2 or not in contact, so as to avoid friction and the generation of particulate matter.

[0040] As the solid precursor is consumed, the compact 3 can continue to descend, while the topmost precursor is always blown by the carrier gas, so that the gas sublimated by the precursor at high temperature is carried away by the carrier gas.

[0041] As another alternative embodiment, the source bottle includes at least one guide post 5, multiple guide cylinders 31, and multiple bellows 4. The number of guide cylinders 31 and bellows 4 corresponds.

[0042] Furthermore, the corrugated pipe 4 has a circular cross-section in the second direction.

[0043] Specifically, the bottle cap 1 is fixedly connected to at least one guide post 5, and the number of guide cylinders 31 that are fixed through the pressure block 3 is greater than the number of guide posts 5. Each guide cylinder 31 is respectively housed inside a corresponding bellows 4.

[0044] Multiple bellows 4 can work together as a surface to block the flow of transport gas between the air inlet 11 and the air outlet 12.

[0045] Preferably, in order to reduce the gap between adjacent bellows 4, the protrusions 41 of adjacent bellows 4 are staggered.

[0046] Although there are still gaps between the multiple corrugated pipes 4, the sum of the first gap T1 between the corrugated pipes 4, the second gap T2 between the outermost corrugated pipe 4 on the pressure block 3 and the bottle body 2 is smaller than the third gap T3 of the air duct of the grid part 33 of the pressure block 3, that is... Therefore, this design still allows the carrier gas to flow primarily through the precursor.

[0047] As another alternative embodiment, in order to reduce the gaps between the multiple bellows 4, the source bottle includes at least one guide post 5, at least one guide cylinder 31 and one bellows 4.

[0048] Specifically, the bottle cap 1 is fixedly connected to at least one guide post 5, and the number of guide cylinders 31 that are fixed through the pressure block 3 is not less than the number of guide posts 5. Both the guide posts 5 and the guide cylinders 31 are housed inside a bellows 4.

[0049] Furthermore, the corrugated pipe 4 has a racetrack-shaped cross-section in the second direction, and multiple diaphragms are welded from top to bottom in the third direction to form the corrugated pipe 4. Each diaphragm includes two semi-circular diaphragms and two straight strip diaphragms, and the semi-circular diaphragms and straight strip diaphragms are alternately connected to form a racetrack-shaped diaphragm.

[0050] Example 2 like Figures 1-3 As shown, this embodiment discloses a precursor source bottle for semiconductor manufacturing, and sets a first direction, a second direction, and a third direction accordingly. The source bottle includes at least: a bottle cap 1, a bottle body 2, a pressing block 3, three bellows 4, and three guide posts 5.

[0051] Three guide cylinders 31 are fixed to the through-plane portion 31 of the pressure block 3. In the second direction, the three guide cylinders 31 are arranged coaxially with the pressure block 3. The guide post 5 is correspondingly arranged with the guide cylinders 31, and the guide cylinders 31 are fitted onto one end of the guide post 5.

[0052] The guide post 5 and the guide cylinder 31 have the same cross-sectional shape in the first direction, both being non-circular.

[0053] Three corrugated pipes 4 with circular cross-sections are respectively fitted around each guide post 5 and guide cylinder 31. The grids 331 of the grid section 33 of the pressure block 3 are arranged in a row between the three guide cylinders 31, and an air duct is formed between two adjacent grids 331. Preferably, 11 grids 331 can be provided, with one grid 331 at the center of each guide cylinder 31 and four grids 331 between the centers of two adjacent guide cylinders 31.

[0054] The three bellows 4 together form a surface that blocks the flow of transported gas between the air inlet 11 and the air outlet 12. The protrusions 41 of adjacent bellows 4 are staggered. The sum of the first gap T1 between the bellows 4, the second gap T2 between the outermost bellows 4 on the pressure block 3 and the bottle body 2 is smaller than the third gap T3 of the grid portion 33 of the pressure block 3, which is a duct. .

[0055] Example 3 like Figures 1-3 As shown, this embodiment discloses a precursor source bottle for semiconductor manufacturing, and sets a first direction, a second direction, and a third direction according to the source bottle. The source bottle includes at least: a bottle cap 1, a bottle body 2, a pressing block 3, three bellows 4, and one guide post 5.

[0056] Three guide cylinders 31 are fixed to the through-plane portion 31 of the pressure block 3. In the second direction, the three guide cylinders 31 are arranged coaxially with the pressure block 3. The guide post 5 is correspondingly set to any one of the three guide cylinders 31, and the guide cylinder 31 is fitted onto one end of the guide post 5.

[0057] Preferably, the guide post 5 is provided corresponding to the guide cylinder 31 in the middle position.

[0058] The guide post 5 and the guide cylinder 31 have the same cross-sectional shape in the first direction, both being non-circular.

[0059] Three bellows 4 with circular cross-sections are respectively fitted around each guide cylinder 31. One of the bellows 4 contains a guide cylinder 31 and a guide post 5 inside.

[0060] The grids 331 of the grid section 33 of the pressure block 3 are arranged in a row between the three guide cylinders 31, and an air duct is formed between two adjacent grids 331. Preferably, 11 grids 331 can be provided, with one grid 331 at the center of each guide cylinder 31 and four grids 331 between the centers of two adjacent guide cylinders 31.

[0061] The three bellows 4 together form a surface that blocks the flow of transported gas between the air inlet 11 and the air outlet 12. The protrusions 41 of adjacent bellows 4 are staggered. The sum of the first gap T1 between the bellows 4, the second gap T2 between the outermost bellows 4 on the pressure block 3 and the bottle body 2 is smaller than the third gap T3 of the grid portion 33 of the pressure block 3, which is a duct. .

[0062] Example 4 like Figures 4-6 As shown, this embodiment discloses a precursor source bottle for semiconductor manufacturing, and sets a first direction, a second direction, and a third direction according to the source bottle. The source bottle includes at least: a bottle cap 1, a bottle body 2, a pressing block 3, a bellows 4, and three guide posts 5.

[0063] Three guide cylinders 31 are fixed to the through-plane portion 31 of the pressure block 3. In the second direction, the three guide cylinders 31 are arranged coaxially with the pressure block 3. The guide post 5 is correspondingly arranged with the guide cylinders 31, and the guide cylinders 31 are fitted onto one end of the guide post 5.

[0064] The guide post 5 and the guide cylinder 31 have the same cross-sectional shape in the first direction, both being non-circular.

[0065] A corrugated pipe 4 with a racetrack-shaped cross-section is fitted around all the guide posts 5 and guide cylinders 31. The grids 331 of the grid section 33 of the pressure block 3 are arranged in rows between the three guide cylinders 31, and an air duct is formed between two adjacent grids 331. Preferably, 11 grids 331 can be provided, with one grid 331 at the center of each guide cylinder 31 and four grids 331 between the centers of two adjacent guide cylinders 31.

[0066] The bellows 4 is composed of multiple diaphragms, which are welded together from top to bottom in a third direction to form the bellows 4. Each diaphragm includes two semi-circular diaphragms and two straight strip diaphragms, which are alternately connected to form a racetrack-shaped diaphragm.

[0067] Example 5 like Figures 4-6 As shown, this embodiment discloses a precursor source bottle for semiconductor manufacturing, and sets a first direction, a second direction, and a third direction accordingly. The source bottle includes at least: a bottle cap 1, a bottle body 2, a pressing block 3, a bellows 4, and a guide post 5.

[0068] Three guide cylinders 31 are fixed to the through-plane portion 31 of the pressure block 3. In the second direction, the three guide cylinders 31 are arranged coaxially with the pressure block 3. The guide post 5 is correspondingly set to any one of the three guide cylinders 31, and the guide cylinder 31 is fitted onto one end of the guide post 5.

[0069] Preferably, the guide post 5 is provided corresponding to the guide cylinder 31 in the middle position.

[0070] The guide post 5 and the guide cylinder 31 have the same cross-sectional shape in the first direction, both being non-circular.

[0071] A corrugated pipe 4 with a racetrack-shaped cross-section is fitted around three guide cylinders 31. The width of the corrugated pipe 4 in the first direction is less than the width of the pressure block.

[0072] The bellows 4 is composed of multiple diaphragms, which are welded together from top to bottom in a third direction to form the bellows 4. Each diaphragm includes two semi-circular diaphragms and two straight strip diaphragms, which are alternately connected to form a racetrack-shaped diaphragm.

[0073] The grids 331 of the grid section 33 of the pressure block 3 are arranged in a row between the three guide cylinders 31, and an air duct is formed between two adjacent grids 331. Preferably, 11 grids 331 can be provided, with one grid 331 at the center of each guide cylinder 31 and four grids 331 between the centers of two adjacent guide cylinders 31.

[0074] The semiconductor manufacturing precursor source bottle of the present invention effectively guides the pressure block with a lower grid by means of a guide post and a guide cylinder; by means of a bellows, it reduces the pollution of the precursor gas of the organism by particulate matter generated by friction during the guidance of the pressure block with the lower grid; and by means of the cooperation between the bellows and the pressure block, it prevents the carrier gas from going directly from the inlet to the outlet without passing through the solid precursor.

[0075] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

Claims

1. A precursor source bottle for semiconductor manufacturing, characterized in that, The source bottle includes at least a bottle cap (1) with an air inlet (11) and an air outlet (12), a bottle body (2) fixedly connected to the bottle cap (1), and a pressure block (3), a bellows (4) and a guide post (5) housed in the cavity of the bottle body (2). A guide cylinder (31) is fixed through the pressure block (3), and the guide post (5) is correspondingly arranged with the guide cylinder (31). The guide cylinder (31) is fitted onto one end of the guide post (5). The pressure block (3) is provided with multiple air ducts; The two ends of the corrugated tube (4) are fixedly connected to the bottle cap (1) and the pressure block (3) respectively, and the guide post (5) and the guide cylinder (31) are housed inside the corrugated tube (4).

2. The precursor source bottle for semiconductor manufacturing according to claim 1, characterized in that, The bottle cap (1) is fixedly connected to at least one guide post (5), and the number of guide cylinders (31) that pass through and are fixed on the pressure block (3) is not less than the number of guide posts (5). The guide posts (5) and guide cylinders (31) are both housed inside a bellows (4).

3. The precursor source bottle for semiconductor manufacturing according to claim 2, characterized in that, The corrugated pipe (4) has a racetrack-shaped cross section in the second direction. Multiple diaphragms are welded from top to bottom in the third direction to form the corrugated pipe (4). Each diaphragm includes two semi-circular diaphragms and two straight strip diaphragms. The semi-circular diaphragms and straight strip diaphragms are alternately connected to form a racetrack-shaped diaphragm.

4. The precursor source bottle for semiconductor manufacturing according to claim 1, characterized in that, The bottle cap (1) is fixedly connected to at least one guide post (5), and the number of guide cylinders (31) that are fixed through the pressure block (3) is greater than the number of guide posts (5). Each guide cylinder (31) is respectively housed inside a corresponding bellows (4).

5. The precursor source bottle for semiconductor manufacturing according to claim 4, characterized in that, The protrusions (41) of adjacent corrugated pipes (4) are staggered from each other, and the sum of the first gap (T1) between the corrugated pipes (4), the second gap (T2) between the outer corrugated pipe (4) and the bottle body (2) is smaller than the third gap (T3) of the air duct of the pressure block (3).

6. The precursor source bottle for semiconductor manufacturing according to claim 1, characterized in that, The guide post (5) and the guide cylinder (31) have the same cross-sectional shape in the first direction.

7. The precursor source bottle for semiconductor manufacturing according to claim 1, characterized in that, In the third direction, the end of the guide tube (31) facing the bottle cap (1) is an open end, the bottom end of the bottle body (2) of the guide tube (31) has a bottom seal, one end of the guide post (5) is fixedly connected to the bottle cap (1), and the other end is accommodated in the guide tube (31).

8. The precursor source bottle for semiconductor manufacturing according to claim 1, characterized in that, The pressure block (3) includes a flat portion (32) and a grid portion (33), the grid portion (33) being disposed on the lower surface of the flat portion (32); in a first direction, the width of the grid portion (33) is the same as the width of the flat portion (32).

9. The precursor source bottle for semiconductor manufacturing according to claim 8, characterized in that, The grille section (33) includes a plurality of grilles (331) arranged in an array along the second direction, with an air duct formed between two adjacent grilles. In the third direction, the projection area of ​​the grille section (33) does not exceed the internal area of ​​the bellows (4).

10. The precursor source bottle for semiconductor manufacturing according to claim 9, characterized in that, In the first direction, both sides of the flat portion (32) of the pressing block (3) do not contact the bottle body (2); in the second direction, both sides of the flat portion (32) of the pressing block (3) contact the bottle body (2), and the pressing block (3) can move along the guide post (5) in the third direction.

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