Article storage system

Abstract

Provided is an article storage system in which containers storing articles are stored in the article storage system. The article storage system includes a support unit that is perpendicular to a mounting surface, a rotation unit that rotates axially in the support unit, and a shelf module that is disposed in the rotation unit such that its arrangement changes with rotation of the rotation unit, the shelf module housing the containers.

Description

Cross-references to related applications

[0001] This application claims priority to Korean Patent Application No. 10-2024-0186727, filed with the Korean Intellectual Property Office on December 16, 2024, and all benefits arising under 35 USC 119, the entire contents of which are incorporated herein by reference. Technical Field

[0002] This disclosure relates to an article storage system. Background Technology

[0003] Semiconductor devices or liquid crystal displays are manufactured by performing multiple unit processes, such as deposition and etching, on a substrate (such as a semiconductor substrate or a glass substrate). These processes are performed sequentially, and the substrate is transferred to process equipment in which the individual processes are performed.

[0004] Since even tiny dust particles can easily cause defects in substrates, substrates moving between processes must be kept clean. Furthermore, transferring substrates individually is inefficient. Therefore, substrates are transported while contained within containers such as cassettes or front-open unifies POD (FOUP).

[0005] Each process equipment has different substrate handling capabilities and processing times. To address the problems arising from this, item storage systems such as stockers, side rail buffers, and bottom rail buffers are used to temporarily store containers.

[0006] For example, a side rail buffer is positioned on one side of the track along which a conveyor (such as a vehicle) moves. As the conveyor travels along the track, it can load or unload items onto or from the side rail buffer in the lateral direction of the track. A bottom rail buffer can be provided to allow loading and unloading operations on the vehicle in the downward direction of the track.

[0007] In this way, a storage system can be configured so that the conveyor equipment performs loading and unloading operations in the lateral or downward direction of the track. That is, the storage tank, side rail buffers, and bottom rail buffers are installed independently in the manufacturing plant, thereby continuously striving to improve the space efficiency of the manufacturing plant and the efficiency of the loading and unloading operations of the conveyor equipment. Summary of the Invention

[0008] The purpose of this disclosure is to provide an item storage system that can improve the operational efficiency of conveying equipment and the space efficiency of manufacturing plants.

[0009] The purpose of this disclosure is not limited to the foregoing, and other purposes of this disclosure not mentioned herein will be clearly understood by those skilled in the art from the following description of this disclosure.

[0010] To achieve the above objectives, an article storage system according to one aspect of this disclosure includes: a support unit perpendicular to a mounting surface; a rotating unit that rotates axially within the support unit; and a shelf module disposed within the rotating unit such that its arrangement changes with the rotation of the rotating unit, the shelf module accommodating the container.

[0011] A storage system for storing items, wherein containers for storing items are stored in the storage system, the storage system comprising: a support unit perpendicular to a ceiling in a downward direction; a rotating unit axially rotating within the support unit; and a shelf module disposed within the rotating unit such that its arrangement changes with rotation of the rotating unit, the shelf module accommodating the containers, wherein the rotating unit comprises: a motor rotating at 45° intervals; and a rotor rotating via connection to the motor and having extension arms extending in four directions, the shelf module comprising: a shelf plate idling within the extension arms; and a shelf base on which the containers are loaded, the shelf base being disposed at a position facing the lower portion of each of a first track and a second track adjacent to the first track in a vertical direction, and disposed between the first track and the second track in a vertical direction, for loading and unloading the containers from one or more vehicles moving through each of the first track and the second track.

[0012] A storage system for items, wherein a container for storing items is stored in the storage system, the storage system comprising: a support unit perpendicular to the ceiling in a downward direction and disposed between a first track and a second track adjacent to the first track, wherein a vehicle movement path is formed on the first track and another movement path is formed on the second track; a rotating unit that rotates axially within the support unit; and a shelf module disposed within the rotating unit such that its arrangement changes with the rotation of the rotating unit, the shelf module accommodating the container, wherein the rotating unit comprises: a motor that rotates at 45° intervals; a rotor that rotates via connection to the motor and is provided with extension arms, the extension arms including a first arm, a second arm, a third arm, and a fourth arm, the first arm, the second arm, the third arm, and the fourth arm being arranged radially at 45° intervals and having through holes; and an electronic... The device includes: a brake, the electronic brake disposed in the rotor to stop the rotation of the rotor rotated by the motor, or disposed in the rotor to stop the rotation of the shelf module rotating in the rotor; and a locking module having a retaining pin that is inserted into a through hole according to the elongation of the retaining pin to prevent the rotation of the rotor, or to space the retaining pin from the through hole to allow the rotation of the rotor; and the shelf module comprising: a shelf plate that idles in the extension arm; a shelf base including a weight located at the center of the lower surface of the shelf plate, the shelf base being disposed on the upper surface of the shelf plate, on which a container is loaded; and a guide extending upward from the shelf base, the guide having an outwardly curved upper end to guide the container into place, the guide including a first guide plate paired at the front and rear of the container and a second guide plate paired at the left and right sides of the container.

[0013] Details of other implementation schemes are included in the detailed description and accompanying drawings.

[0014] The item storage system disclosed herein allows two vehicles in the same or opposite directions to simultaneously perform loading and unloading operations on two tracks, thereby improving the efficiency of conveying operations. This increased efficiency reduces vehicle congestion, thus improving the overall efficiency of the manufacturing plant's operating system. Furthermore, the system can be used as both a side rail buffer and a bottom rail buffer, thereby reducing installation costs and improving the space efficiency of the manufacturing plant. Attached Figure Description

[0015] The above and other aspects and features of this disclosure will become more apparent from the detailed description of exemplary embodiments thereof with reference to the accompanying drawings, in which: Figure 1 This is a front view showing an article storage system according to a first embodiment of the present disclosure; Figure 2 This is a front view showing the rotating unit and shelf module of an item storage system according to a first embodiment of the present disclosure; Figure 3 This is a front view showing a shelf module of an article storage system according to a first embodiment of the present disclosure; Figure 4 This is a perspective view showing a shelf module of an article storage system according to a first embodiment of the present disclosure; Figure 5 This is a side view showing a shelf module of an article storage system according to a first embodiment of the present disclosure; Figure 6 This is a front view showing a loading and unloading operation of a first form of an article storage system according to a first embodiment of the present disclosure; Figure 7 This is a front view showing a second form of loading and unloading operation of an article storage system according to a first embodiment of the present disclosure; Figure 8 This is a front view showing the rotation state of a rotating unit in an article storage system according to a first embodiment of the present disclosure; Figure 9 This is a front view showing the execution status of other loading and unloading operations in a second form according to the first embodiment of the article storage system of this disclosure; Figure 10 This is a side view showing an article storage system according to a first embodiment of the present disclosure; Figure 11 A front view of an article storage system according to a second embodiment of this disclosure is shown; and Figure 12 This is a front view showing the loading and unloading operation of an article storage system according to a second embodiment of the present disclosure. Detailed Implementation

[0016] Preferred embodiments of the present disclosure will be described in detail below with reference to the accompanying drawings. The advantages and features of the present disclosure, as well as methods for achieving such advantages and features, will become apparent from the embodiments described in detail with reference to the accompanying drawings. However, it should be noted that the present disclosure is not limited to the following embodiments and can be implemented in various forms. These embodiments are provided only to disclose the present disclosure and to allow those skilled in the art to understand its scope. In the accompanying drawings, embodiments of the present disclosure are defined by the scope of the claims. Throughout the specification, the same reference numerals denote the same elements.

[0017] The terminology used herein is for the purpose of describing embodiments and is not intended to limit this disclosure. In this disclosure, unless otherwise stated, the singular form is intended to include the plural form. The term "comprising" as used herein specifically refers to the presence of the stated elements, steps, operations, and / or components, but does not exclude the presence or addition of one or more other elements, steps, operations, and / or components.

[0018] Figure 1 This is a front view showing an article storage system according to a first embodiment of the present disclosure. Figure 2 This is a front view showing the rotating unit and shelf module of an item storage system according to a first embodiment of the present disclosure, and Figure 3 This is a front view showing a shelf module of an item storage system according to a first embodiment of the present disclosure. Furthermore, Figure 4 This is a perspective view showing a shelf module of an article storage system according to a first embodiment of the present disclosure, and Figure 5 This is a side view showing a shelf module of an item storage system according to a first embodiment of the present disclosure.

[0019] in addition, Figure 6 This is a front view showing a loading and unloading operation of a first form of an article storage system according to a first embodiment of the present disclosure.

[0020] also, Figure 7 This is a front view showing a second form of loading and unloading operation of an article storage system according to a first embodiment of the present disclosure. Figure 8 This is a front view showing the rotation state of a rotating unit in an article storage system according to a first embodiment of the present disclosure, and Figure 9 This is a front view showing the execution status of other loading and unloading operations in a second form according to the first embodiment of the article storage system of this disclosure.

[0021] also, Figure 10 This is a side view showing an article storage system according to a first embodiment of the present disclosure.

[0022] Reference Figures 1 to 10 The item storage system 100 according to the embodiments of this disclosure can be provided to a manufacturing plant that manufactures semiconductors (or displays). The manufacturing plant may have multiple manufacturing facilities (wafer fabs).

[0023] Multiple wafer fabs can be configured as cleanrooms, and multiple substrate processing units can be installed therein for performing semiconductor manufacturing processes. The multiple substrate processing units perform multiple manufacturing processes on substrates (e.g., wafers), such as deposition processes, photolithography processes, and etching processes.

[0024] In a series of processes at a manufacturing plant, after a manufacturing process is performed in any one semiconductor substrate processing device, items such as substrates and / or reticles can be transferred to another semiconductor substrate processing device for the next manufacturing process. In this case, the substrates can be transferred while stored in a container C10, which can hold multiple substrates.

[0025] Furthermore, semiconductor substrate processing apparatuses may have different substrate processing capabilities and processing times. To address the problems arising from these different substrate processing capabilities and processing times, container C10 can be transferred to item storage system 100 for temporary storage.

[0026] The container C10 transported from the manufacturing plant can be a front-opening wafer transport box (FOUP), a front-opening shipping box (FOSB), a multi-application carrier (MAC), and / or a point of sale (POD) that contains items such as photomasks, substrates, and / or semiconductor chips.

[0027] The transfer of container C10 can be performed by vehicles B11 and B12. To enable the transfer of items between multiple substrate processing units and / or to the item storage system 100 or to multiple wafer fabs, track units (e.g., first track R11 and second track R12) can form a movement path. Vehicles B11 and B12 can move along the movement path formed by the track units.

[0028] In other words, the movement path can be configured as a transport path for transferring items between multiple substrate processing devices or for transferring items to the item storage system 100, and the movement path can form an installation path for the track unit. For example, the track unit can be installed on the ceiling.

[0029] Vehicles B11 and B12 can be provided as elevated shuttles, automated guided vehicles, and / or rail-guided vehicles. Vehicles B11 and B12 may include not only structures for travel but also housings BH11 and BH12 with open sides and lower sections, a hand unit BHU10 for holding the container, and a vehicle travel module BS10 for sliding and / or raising the hand unit BHU10. The hand unit BHU10 of vehicles B11 and B12 can slide horizontally and then rise or fall, or rise or fall without sliding, thereby loading and unloading the container C10.

[0030] In the following text, a track unit providing the movement paths of vehicles B11 and B12 is used as an example. In this example, multiple tracks are provided, and the first track R11 and the second track R12, which are set to be adjacent to each other, will be described for ease of description and understanding. Various modifications can be made to the first track R11 and the second track R12, for example, the first vehicle B11 moving through the first track R11 and the second vehicle B12 moving through the second track R12 can be set to move in the same direction or in opposite directions.

[0031] The item storage system 100 can be set up so that the first vehicle B11 and the second vehicle B12, which move along the first track R11 and the second track R12, can perform loading and unloading operations of the container C10 without interfering with each other.

[0032] That is, in the item storage system 100 according to some embodiments, a container C100 can be stored, in which items such as wafers, chips, and / or photomasks are stored. For example, the item storage system 100 is configured to combine the functions of side rail buffers and bottom rail buffers, that is, to enable loading and unloading operations of container C10 from the bottom and sides of vehicles B11 and B12, thereby improving the space efficiency of the manufacturing plant and improving the efficiency of loading and unloading operations of vehicles B11 and B12 as conveying equipment.

[0033] According to some implementations, the item storage system 100 may include a support unit 110, a rotating unit 120, and a shelf module 130.

[0034] The support unit 110 can be perpendicular to the mounting surface. In the first embodiment, the mounting surface can be the ceiling A10 of a semiconductor manufacturing plant. In this case, the support unit 110 can extend downwards from the ceiling A10. (See reference...) Figure 11 and Figure 12 Other embodiments of the mounting surface are described.

[0035] The support unit 110 can be disposed between the first track R11 and the second track R12, forming a movement path for vehicles B11 and B12 in the first track and the second track. In other words, the support unit 110 can be configured such that two vehicles (e.g., the first vehicle B11 and the second vehicle B12) can simultaneously perform loading and unloading operations on both sides of the support unit 110.

[0036] According to some embodiments, the support unit 110 may include a column 111 and a brace 112.

[0037] Multiple columnar members 111 can be configured as structures with length, and can be, for example, rod-shaped and / or bar-shaped members. That is, the columnar members 111 are implemented as structures extending from the mounting surface to the location of the loading container C10, and can be configured such that when vehicles B11 and B12 load and unload container C10, container C10 is loaded onto shelf module 130, meaning the height of shelf module 130 can be easily adjusted for loading and unloading operations. However, the height and position of shelf module 130 can be changed by operating the rotation unit 120.

[0038] The columnar members 111 of the support unit 110 can be configured as, for example, four columnar members 111 located at each vertex of a virtual square based on a plan view. However, three or two columnar members 111 can also be configured as elements for supporting the rotation unit 120. In this way, various modifications can be made to the columnar members 111, for example, configuring the columnar members 111 to rotate the rotation unit 120.

[0039] The support member 112 can connect multiple columnar members 111 to strengthen the structure of the columnar members 111 and / or reduce / prevent swaying. For example, the support member 112 is arranged in an "X" shape across multiple columnar members 111 to achieve a structure in which multiple columnar members 111 are interconnected, such that adjacent columnar members 111 are constrained by each other through the support member 112, thereby reducing swaying and enhancing structural stability compared to multiple columnar members 111 having individual cantilever structures. However, this is merely exemplary and therefore not limited to this.

[0040] The rotating unit 120 is a medium connecting the support unit 110 and the shelf module 130, and can be implemented to change the position and height of the shelf module 130 while supporting the shelf module 130.

[0041] According to some embodiments, the rotating unit 120 may be configured to rotate axially on the support unit 110. For example, the rotating unit 120 may include a motor 121M, a rotor 123R, and / or a locking module 125R.

[0042] The motor 121M can be electrically driven by receiving power from a battery and / or a cable provided as an external power supply line, and when the cable is connected, the cable can be fixed to the columnar member 111 of the support unit 110 by a structure such as a bracket. The motor 121M may be provided with a shaft connected to the rotor 123R for the rotation of the rotor 123R, and the motor may have the same structure as known motors.

[0043] like Figure 1 and Figure 10As shown, the motor 121M can be connected to the end of the column 111 and mounted on the mounting surface through the column 111, and is respectively arranged at both ends of the shelf module 130 in the longitudinal direction, so that a pair of motors 121M can synchronously rotate the rotor 123R.

[0044] The motor 121M is equipped with a reducer and an encoder, which allows the speed to be controlled and the number of revolutions to be sensed / measured, thereby controlling the rotation angle of the rotor 123R so as to rotate at a set angle.

[0045] For example, motor 121M can be operated to cause the first vehicle B11 and the second vehicle B12 to perform actions such as Figure 7 The loading and unloading operations are shown, and then rotor 123R rotates 45° so that the first vehicle B11 and / or the second vehicle B12 can be loaded as shown. Figure 8 The empty shelf base 133B shown performs loading and unloading operations. Then, as... Figure 9 As shown, container C10 can be loaded onto empty shelf base 133B.

[0046] However, this is only based on the example operation; the first vehicle B11 and / or the first vehicle B11 can be operated as follows: Figure 6 The loading and unloading operations are performed by sliding in the lateral direction and loading and unloading in the downward direction. In other words, the first vehicle B11 and / or the second vehicle B12 can perform the operation of loading the container C10 onto the empty shelf base 133B. Therefore, depending on the position of the shelf base 133B on which the container C10 is loaded or the container C10 is empty, the motor 121M can rotate the rotor 123R at various angles, such as 90°, 180° and / or -45°, -90°, and not limited to an angle of 45°.

[0047] The rotor 123R can be connected to the motor 121M and rotated by the drive of the motor 121M. Unlike the idle shelf 131P, the rotor 123R can be connected to the shaft of the motor 121M via bearings, so that it rotates together with the shaft of the motor 121M, and therefore the angle of rotation can be changed according to the operation of the motor 121M.

[0048] However, various modifications can be made to the rotor 123R, such as installing an electronic brake 131PS between the rotor 123R and the motor 121M so that the rotor 123R can be stopped by the operation of the electronic brake 131PS during the fault operation of the motor 121M, regardless of the operation of the motor 121M.

[0049] In some embodiments, the rotor 123R may be provided with an extension arm 123RA extending in the radial direction, and one or more through holes 123RH may be formed in the extension arm.

[0050] For example, the extension arm 123RA may include a first arm 123RA1, a second arm 123RA2, a third arm 123RA3, and a fourth arm 123RA4.

[0051] The first arm 123RA1 can form a direction reference. In this case, for descriptive and convenience purposes, a direction reference is set / defined and referenced. Figure 2 For example, according to the figure, the reference for the direction in which the first arm 123RA1 is formed can be the left, but this is to illustrate the case where the extension arm 123RA extends in four directions. The extension arm 123RA extending to the left is not limited to the first arm 123RA1, and since the first arm 123RA1 can be an extension arm 123RA extending to the right, the upper side, or the lower side, the reference for the direction can be the right, the upper side, or the lower side.

[0052] The second arm 123RA2 can extend in the opposite direction to the first arm 123RA1. For example, when the first arm 123RA1 is defined as an extension arm 123RA extending to the left, the second arm 123RA2 can be defined as an extension arm 123RA extending to the right, which is the opposite direction to the left.

[0053] The third arm 123RA3 can extend in a direction orthogonal to the first arm 123RA1. For example, when the first arm 123RA1 is defined as an extension arm 123RA extending to the left, the third arm 123RA3 is an extension arm 123RA extending in a direction orthogonal to the first arm 123RA1, and can be defined as an extension arm 123RA extending upward.

[0054] The fourth arm 123RA4 can extend in a direction orthogonal to the first arm 123RA1, while forming in a direction opposite to the third arm 123RA3. For example, when the first arm 123RA1 is defined as an extension arm 123RA1 extending to the left, the fourth arm 123RA4 is an extension arm 123RA orthogonal to the first arm 123RA1 and extending in a direction opposite to the third arm 123RA3, and can be defined as an extension arm 123RA extending downward.

[0055] That is, there are four extension arms 123RA in four directions, each extension arm can be set at a 45° interval, and the positions of the first arm 123RA1, the second arm 123RA2, the third arm 123RA3 and the fourth arm 123RA4 can change according to the rotation of the rotor 123R.

[0056] The through hole 123RH is a component configured to physically prevent the rotor 123R from rotating via the locking module 125R, and can be configured such that the fixing pin 125RP of the locking module 125R engages with the through hole 123RH of any one of the multiple extension arms 123RA, regardless of the rotation angle of the rotor 123R, i.e., regardless of the position of the first arm 123RA1, the second arm 123RA2, the third arm 123RA3, and the fourth arm 123RA4.

[0057] For this purpose, through holes 123RH can be formed on each of the extension arms 123RA, that is, through holes 123RH can be formed in each of the first arm 123RA1, the second arm 123RA2, the third arm 123RA3, and the fourth arm 123RA4. Therefore, regardless of the positions of the first arm 123RA1, the second arm 123RA2, the third arm 123RA3, and the fourth arm 123RA4, the fixing pin 125RP of the locking module 125R faces each extension arm 123RA, so that the fixing pin 125RP can be inserted into the through hole 123RH at the position where the fixing pin 125RP faces the through hole 123RH, thereby physically blocking the rotation of the rotor 123R.

[0058] The locking module 125R is a component that, together with or alone with the electronic brake 131PS that electrically prevents the rotor 123R from rotating, prevents the rotor 123R from rotating. The retaining pin 125RP of the locking module 125R can be inserted into the through-hole 123RH to physically prevent the rotor 123R from rotating, or the retaining pin 125RP can be spaced apart from the through-hole 123RH to allow the rotor 123R to rotate.

[0059] For example, the locking module 125R can be configured as an actuator that uses pneumatic or hydraulic pressure to adjust the protruding length of the retaining pin 125RP inserted into or spaced apart from the through-hole 123RH, but this is merely exemplary. That is, various modifications can be made to the locking module 125R to physically prevent the rotation of the rotor 123R, such as a motor and / or ball screw mechanism operated by electromagnetic interaction.

[0060] Additionally, the locking module 125R can be configured as a pair of locking modules adjacent to a pair of motors 12M, allowing rotation to be stopped at both ends of the shelf module 130.

[0061] Shelf module 130 can be disposed in rotating unit 120 such that its arrangement changes as rotating unit 120 rotates, and container C10 can be accommodated in shelf module.

[0062] For example, shelf module 130 may include shelf plate 131P, weight 132W, shelf base 133B, and guide 135G.

[0063] Shelf 131P can idle in extension arm 123RA. For example, shelf 131P can be configured as a rectangular plate extending longitudinally along the first track R11 and / or the second track R12 between a pair of motors 121M.

[0064] Additionally, the shelf panel 131P can be configured for easy connection with the extension arm 123RA. For example, see reference... Figure 3 and Figure 4 The shelf 131P can be bent at a right angle, or it can be provided with a connecting plate 131PP connected at a right angle.

[0065] The connecting plate 131PP may have a fan-shaped shape as an example, but this is merely exemplary and therefore not limited to. When the connecting plate 131PP is provided, the connecting plate 131PP can be connected to the extension arm 123RA for idling, and since the electronic brake 131PS can be disposed between the extension arm 123RA and the connecting plate 131PP, the electronic brake 131PS can be mounted on one surface (or the other surface) of the connecting plate 131PP.

[0066] The weight 132W can minimize the sway of the rotor 123R when the rotor 123R is rotating, and regardless of whether the rotor 123R is rotating, one surface of the shelf plate 131P forms the lower surface.

[0067] For example, the weight 132W may be located at the center of one surface of the shelf 131P. For example, the weight 132W may be integrally formed with the shelf 131P to form a single structure, but is not limited thereto. The weight 132W may be modified in various ways, such as being detachably attached to the shelf 131P by magnetic and / or bolt connection methods.

[0068] In addition, the weight component 132W can be set in the form of a long strip, but it is not limited to this. The weight component 132W can be modified in various ways, such as connecting multiple blocks into a row or setting them at intervals along the longitudinal direction of the shelf plate 131P.

[0069] Shelf base 133B can be disposed on the other surface, i.e., the upper surface, of shelf plate 131P, and container C10 is loaded on shelf base. Shelf base 133B can be configured to correspond to the shape / size of container C10, such that one container C10 can be loaded thereon, but is not limited thereto. Shelf base 133b can have a length corresponding to multiple containers C10, such that multiple containers C10 are loaded on one shelf base 133B.

[0070] The guide 135G extends upward from the shelf base 133B, and its upper end can be bent outward to guide the container C10 into place. For example, the guide 135G may include a first guide plate 135G1 arranged in pairs at the front and rear of the container C10, and a second guide plate 135G2 arranged in pairs at the left and right sides of the container C10.

[0071] In some embodiments, the shelving module 130 may be positioned vertically toward the lower part of the first track R11 and the second track R12, so that containers C10 loaded and unloaded from one or more vehicles B11 and B12 moving along the first track R11 and the second track R12 may be loaded onto the shelving module.

[0072] That is, a shelf module 130 can be provided on each of the first arm 123RA1 and the second arm 123RA2. Furthermore, the rotor 123R can rotate to change the arrangement of the left first arm 123RA1 and the right second arm 123RA2 in the upper and lower directions, respectively. In this case, shelf modules 130 can be provided not only on the first arm 123RA1 and the second arm 123RA2, but also on the third arm 123RA3 and the fourth arm 123RA4, such that the lower parts of the first track R11 and the second track R12 each face the other shelf module 130 in the upper and lower directions.

[0073] In other words, a shelf plate 131P can be provided on each of the first arm 123RA1, the second arm 123RA2, the third arm 123RA3, and the fourth arm 123RA4 to idle, so that regardless of the rotation state of the rotor 123R, vehicles B11 and B12 can load the container C10 onto the shelf base 133B and unload the container from the shelf base.

[0074] An electronic brake 131PS can be disposed in the rotor 123R to stop the rotation of the rotor 123R by the motor 121M. For example, the electronic brake 131PS can be disposed at the center of the rotor 123R, i.e., facing the motor 121M, thereby stopping the rotation of the rotor 123R by the motor 121M.

[0075] An electronic brake 131PS can be provided in the rotor 123R to stop the rotation of the shelf plate 131P rotating in the rotor 123R. For example, the electronic brake 131PS can be provided between the rotor 123R and the shelf plate 131P, and thus can be provided at a position facing the shelf plate 131P in each of the four extension arms 123RA.

[0076] The electronic brake 131PS can operate in response to erroneous operation of the motor 121M, but is not limited thereto. The electronic brake 131PS can be set to stop the idling of the shelf plate 131P after the rotor 123R has finished rotating, that is, during the normal time when the rotor 123R does not rotate, thereby minimizing the shaking of the container C10 caused by external forces such as collisions.

[0077] The electronic brake 131PS can be configured, for example, as a brake drive unit that rotates a disc-shaped component such that the disc-shaped component, a rotational shaft spaced apart from the disc-shaped component, and a portion of the circumferential surface of the disc-shaped component come into close contact with the body (appearance rather than the shaft) of the rotor 123R and / or the motor 121M, thereby generating braking force. However, this is merely exemplary and therefore not limited thereto.

[0078] Although not shown in the figure, shelf module 130 is provided with: a loading sensor for detecting the loading status of container C10; and an RFC that enables the determination of the loading / unloading status of container C10 in control equipment controlling the entire manufacturing plant, including vehicles B11 and B12. In this case, known mechanisms can be applied.

[0079] A loading sensor is a sensor that detects the loading status of container C10. For example, when container C10 is being loaded, the light receiver of the laser is blocked, allowing the loading sensor to detect that container C10 is loaded. Alternatively, the loading sensor can detect whether container C10 is in place by detecting pressure changes or loading. Thus, the type of loading sensor is not limited.

[0080] In addition, the shelf module 130 may be provided with alignment pins and / or guide blocks, which can be embedded in the slots of the container C10 to align the container C10 or prevent it from shaking.

[0081] As another example of modification, the mounting surface can be set as the bottom surface A20 of a semiconductor manufacturing plant. In this case, the support unit 110 can extend upward from the bottom surface A20.

[0082] In the following text, reference will be made to Figure 11 and Figure 12 This document describes a modified example of this implementation scheme, and redundant descriptions of the same components that perform the same function will be omitted.

[0083] Figure 11 A front view of an article storage system according to a second embodiment of this disclosure is shown; and Figure 12 This is a front view illustrating the loading and unloading operations of an article storage system according to a second embodiment of this disclosure. (Refer to...) Figure 11 and Figure 12 The following description will be based on reference Figures 1 to 10 The differences mentioned above.

[0084] Reference Figure 11 and Figure 12 The item storage system 100 according to the second embodiment may include a support unit 110, a rotating unit 120 and a shelf module 130 in the same / similar manner as the first embodiment.

[0085] However, the second embodiment differs from the first embodiment in that the mounting surface of the mounting support unit 110 is set as the bottom surface A20 of the semiconductor manufacturing plant. In this case, the support unit 110 can extend upward from the bottom surface A20.

[0086] That is, the second embodiment differs from the first embodiment in that the columnar member 111 of the support unit 110 is configured to extend upward from the bottom surface A20. The second embodiment is similar to the first embodiment in that the plurality of columnar members 111 are reinforced by the support member 112, and the motor 121M can be mounted at the end (e.g., the top) of the columnar member 111.

[0087] In the same or similar manner as the first embodiment, the shelf module 130 of the second embodiment can be emptied by rotating the rotating unit 120, or the position of the shelf base 133B containing the container C10 can be changed.

[0088] Since the structure and / or operation of the rotating unit 120 and shelf module 130 according to the second embodiment are the same as / similar to those of the first embodiment, repeated descriptions will be omitted.

[0089] In the article storage system 100 according to some embodiments of this disclosure, based on Figure 1 and Figure 11 Two vehicles, B11 and B12, located at the same position in the left and right directions—that is, the first vehicle B11 on the first track R11 and the second vehicle B12 on the second track R12—can simultaneously perform loading and unloading operations, thereby improving the efficiency of loading and unloading operations and minimizing / preventing delays in transport operations due to inefficiencies in loading and unloading. Therefore, as congestion on vehicles B11 and B12 can be reduced, the system can operate efficiently throughout the manufacturing plant.

[0090] In addition, the item storage system 100 is equipped with side rail buffers and bottom rail buffers, which means that two storage structures are achieved through one item storage system 100. This can reduce installation / manufacturing costs by sharing the support unit 110 mounted on the mounting surface and improve the space efficiency of the manufacturing plant.

[0091] Although embodiments of this disclosure have been described with reference to the accompanying drawings, those skilled in the art will understand that this disclosure can be implemented in various forms, and is not limited to the embodiments described above, and can be embodied in other specific forms without departing from the spirit and essential characteristics of the technology. Therefore, the embodiments described above should be considered illustrative rather than restrictive in all respects.

Claims

1. An item storage system, wherein a container for storing items is stored in the item storage system, the item storage system comprising: A support unit, wherein the support unit is perpendicular to the mounting surface; A rotating unit that rotates axially within the support unit; as well as A shelf module is disposed in the rotating unit such that its arrangement changes as the rotating unit rotates, and the shelf module accommodates the container.

2. The item storage system according to claim 1, wherein, The rotating unit includes: Electric motor; and The rotor rotates via connection to the motor.

3. The item storage system according to claim 2, wherein, The rotor is provided with an extension arm that extends in the radial direction.

4. The item storage system according to claim 3, wherein, The extension arm includes: First arm, the first arm constitutes a reference; The second arm extends in the opposite direction to the first arm; A third arm, the third arm extending in a direction orthogonal to the first arm; and The fourth arm extends in a direction orthogonal to the first arm and is formed in a direction opposite to the third arm.

5. The item storage system according to claim 4, wherein, The first arm, the second arm, the third arm, and the fourth arm are spaced 45° apart from each other.

6. The item storage system according to claim 3, wherein, The shelf module includes: Shelf plate, the shelf plate idling in the extension arm; and A weight component, which is located at the center of the lower surface of the shelf.

7. The item storage system according to claim 6, wherein, The rotating unit also includes an electronic brake disposed in the rotor to stop the rotation of the rotor rotated by the motor, or disposed in the rotor to stop the rotation of the shelf plate rotating in the rotor.

8. The item storage system according to claim 6, wherein, The shelf module also includes a shelf base disposed on the upper surface of the shelf plate, on which the container is loaded.

9. The item storage system according to claim 8, wherein, The shelf module also includes a guide extending upward from the shelf base, the guide having an upper end that bends outward to guide the container into place.

10. The item storage system according to claim 9, wherein, The guide includes: A pair of first guide plates are arranged at the front and rear of the container; and A pair of second guide plates are provided on the left and right sides of the container.

11. The item storage system according to claim 2, wherein, The rotor is provided with one or more through holes, and The rotating unit also includes a locking module, which is inserted into the through hole to prevent the rotor from rotating, or spaced apart from the through hole to allow the rotor to rotate.

12. The item storage system according to claim 11, wherein, The locking module is configured as an actuator that operates under pneumatic or hydraulic pressure to adjust the protruding length of a retaining pin inserted into or spaced apart from the through hole.

13. The item storage system according to claim 1, wherein, The mounting surface is set as the ceiling of the semiconductor manufacturing plant, and The support unit extends downward from the ceiling.

14. The item storage system according to claim 1, wherein, The mounting surface is configured as the bottom surface of the semiconductor manufacturing plant, and The support unit extends upward from the bottom surface.

15. The item storage system according to claim 1, wherein, The support unit includes: Multiple columnar elements; and A support member that connects the plurality of columnar members.

16. The item storage system according to claim 1, wherein, The support unit is disposed between a first track and a second track adjacent to the first track, forming a vehicle movement path on the first track and another movement path on the second track.

17. The item storage system according to claim 16, wherein, The shelving module is positioned at the lower part of each of the first and second tracks in a vertical direction to accommodate containers loaded and unloaded from one or more vehicles moving through each of the first and second tracks.

18. An item storage system, wherein a container for storing items is stored in the item storage system, the item storage system comprising: A support unit that is perpendicular to the ceiling in the downward direction; A rotating unit that rotates axially within the support unit; as well as A shelf module, disposed within the rotating unit, such that its arrangement changes as the rotating unit rotates, the shelf module accommodating the container. The rotating unit includes: The motor, which rotates at 45° intervals; and The rotor, which rotates via connection to the motor, is provided with extension arms extending in four directions. The shelf module includes: Shelf plate, the shelf plate idling in the extension arm; and A shelf base on which the container is mounted, and The shelf base is positioned at the lower part of each of the first track and the second track adjacent to the first track in the vertical direction, and is positioned between the first track and the second track in the vertical direction, so as to load and unload the containers from one or more vehicles moving through each of the first track and the second track.

19. An item storage system, wherein a container for storing items is stored in the item storage system, the item storage system comprising: A support unit is perpendicular to the ceiling in a downward direction and is disposed between a first track and a second track adjacent to the first track. A vehicle movement path is formed on the first track and another movement path is formed on the second track. A rotating unit that rotates axially within the support unit; as well as A shelf module, disposed within the rotating unit, such that its arrangement changes as the rotating unit rotates, the shelf module accommodating the container. The rotating unit includes: An electric motor that rotates at 45° intervals; The rotor rotates by being connected to the motor and is provided with an extension arm, the extension arm including a first arm, a second arm, a third arm and a fourth arm, the first arm, the second arm, the third arm and the fourth arm being arranged radially, spaced at 45° intervals and provided with through holes; An electronic brake, disposed in the rotor to stop the rotation of the rotor by the motor, or disposed in the rotor to stop the rotation of the shelf module rotating in the rotor; and A locking module is provided, wherein the locking module is equipped with a fixing pin, which is inserted into a through hole according to the elongation of the fixing pin to prevent the rotation of the rotor, or the fixing pin is separated from the through hole to allow the rotation of the rotor. The shelf module includes: Shelf plate, the shelf plate idling in the extension arm; A shelf base, the shelf base including a weight located at the center of the lower surface of the shelf plate, the shelf base being disposed on the upper surface of the shelf plate, and a container being loaded on the shelf base; and A guide extending upward from the shelf base, the guide having an upper end that curves outward to guide the container into place, the guide including a first guide plate arranged in pairs at the front and rear of the container and a second guide plate arranged in pairs at the left and right sides of the container.

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