Multi-working-condition adaptive corrugated diaphragm-double cavity composite pressure sensor

Abstract

The present application relates to the field of implantable pressure sensor, disclose a multi-working condition adaptation corrugated diaphragm double cavity composite pressure sensor, including: corrugated diaphragm, pressure sensing layer and substrate;Corrugated diaphragm is set in the upside of pressure sensing layer, pressure sensing layer is sealed and arranged in the upside of substrate;The side of pressure sensing layer close to substrate is provided with first capacitor cavity and second capacitor cavity arranged at intervals, and flow channel is arranged between first capacitor cavity and second capacitor cavity;Corrugated diaphragm includes integrally formed main corrugated part, auxiliary corrugated part and flat part, flat part is attached to pressure sensing layer, main corrugated part is arranged corresponding to first capacitor cavity, and auxiliary corrugated part is arranged corresponding to second capacitor cavity.The present application realizes the adaptation to different pressure range, pressure type working condition through the design of double cavity and composite corrugated structure, improves the measurement reliability and environmental adaptability of sensor in different implant environment, and the structure design is reasonable and practical.

Description

Technical Field

[0001] This invention relates to the field of implantable pressure sensor technology, specifically to a corrugated diaphragm-dual-cavity composite pressure sensor adaptable to multiple operating conditions. Background Technology

[0002] Pressure sensors are core components in the field of medical implantation and are widely used in monitoring scenarios such as intracranial pressure, vascular pressure, and interstitial pressure. The working conditions of different implantation sites vary significantly, and there are different requirements for the pressure range adaptation, pressure type response, environmental tolerance, and spatial adaptation of the sensor.

[0003] However, existing flexible corrugated diaphragm composite sensors and dual-chamber pressure sensors have significant drawbacks, making it difficult to meet the requirements of multi-condition adaptation: First, the dual-chamber structure is fixed, either independent or permanently connected, making it impossible to switch volumes according to low / high pressure while balancing sensitivity and overload resistance; second, the corrugated diaphragm is a single structure, making it difficult to simultaneously adapt to the stability of static pressure and the rapid response of dynamic pressure; third, the sealing material and external dimensions are fixed, making it impossible to adapt to different media corrosivity and space constraints; and fourth, the lack of structural co-design leads to a decrease in measurement accuracy and reliability when switching operating conditions.

[0004] Therefore, there is an urgent need to develop a pressure sensor that can flexibly adapt to different working conditions to solve the problems of limited adaptability and narrow application range of existing products. Summary of the Invention

[0005] To solve or at least partially solve the above-mentioned technical problems, the present invention provides a corrugated diaphragm-dual-cavity composite pressure sensor adaptable to multiple operating conditions.

[0006] This invention provides a corrugated diaphragm-dual-cavity composite pressure sensor adaptable to multiple operating conditions, comprising: a corrugated diaphragm, a pressure-sensing layer, and a substrate; The corrugated diaphragm is disposed on the upper side of the pressure-sensitive layer, and the pressure-sensitive layer is sealed on the upper side of the substrate; The pressure-sensitive layer has a first capacitor cavity and a second capacitor cavity spaced apart on the side near the substrate, and a flow channel is provided between the first capacitor cavity and the second capacitor cavity. The corrugated diaphragm includes an integrally formed main corrugated portion, a secondary corrugated portion, and a flat portion. The flat portion is attached to the pressure-sensitive layer. The main corrugated portion is disposed corresponding to the first capacitor cavity, and the secondary corrugated portion is disposed corresponding to the second capacitor cavity.

[0007] Optionally, the flow channel is provided with an elastic valve, one end of which is fixed to the inner wall of the flow channel and the other end is a free end. The elastic valve can open and close with pressure changes to connect or isolate the first capacitor cavity and the second capacitor cavity.

[0008] Optionally, the free end of the elastic valve is provided with a protrusion facing the second capacitor cavity, and the inner wall of the flow channel is provided with a matching limiting groove corresponding to the position of the protrusion. When the elastic valve is closed, the protrusion is engaged in the limiting groove.

[0009] Optionally, the main corrugated portion is a concentric gradient structure, the secondary corrugated portion is a parallel short corrugated structure, the secondary corrugated portion is evenly distributed along the trough direction of the main corrugated portion, and the extension direction of the secondary corrugated portion is perpendicular to the radial direction of the main corrugated portion.

[0010] Optionally, the number of the secondary corrugations is the same as the number of the troughs of the main corrugations, and the two ends of each secondary corrugation extend to the adjacent trough of the main corrugations and are smoothly connected.

[0011] Optionally, the flat portion is provided with an annular sealing groove on the side facing the pressure-sensitive layer, and a replaceable sealing ring is adapted to be installed in the annular sealing groove. The material of the sealing ring is matched with the medium of the adapted working condition.

[0012] Optionally, the substrate has a splicing structure, including at least two splicing units, which are detachably connected by a snap-fit ​​structure.

[0013] Optionally, a temperature compensation cavity is provided on the side of the second capacitor cavity away from the first capacitor cavity, a temperature-sensitive elastic block is provided inside the temperature compensation cavity, and compensation electrodes are provided at the top and bottom of the temperature compensation cavity, respectively.

[0014] Optionally, the two ends of the temperature-sensitive elastic block abut against the top and bottom of the temperature compensation cavity, respectively, and the compensation electrode is connected in parallel with the electrodes of the first capacitor cavity and the second capacitor cavity.

[0015] Optionally, the splicing unit is provided with a flow guide groove on its side. After adjacent splicing units are spliced ​​together, the flow guide groove forms a lead wire channel that communicates with the outside. The lead wire channel is connected to the first capacitor cavity and the second capacitor cavity through through holes.

[0016] Compared with the prior art, the multi-condition adaptable corrugated diaphragm-dual-cavity composite pressure sensor of the present invention has the following technical advantages: The flow channel structure with an elastic valve between the first and second capacitor cavities allows for automatic switching between independent and connected states of the two cavities based on pressure levels. Under low-pressure conditions, the two cavities operate independently to ensure high sensitivity, while under high-pressure conditions, they are connected to enhance overload resistance. This effectively addresses the limitation of existing dual-cavity pressure sensors that can only adapt to a single pressure range, enabling the sensor to flexibly cover various pressure scenarios, including intracranial low pressure (0-20 kPa), interstitial medium pressure (20-100 kPa), and vascular high pressure (100-200 kPa).

[0017] The device employs a corrugated diaphragm structure that combines a main corrugated section and a secondary corrugated section. The concentric gradient design of the main corrugated section ensures the stability of static pressure measurement and avoids signal drift. The parallel short corrugated design of the secondary corrugated section enhances the response speed under dynamic pressure and is suitable for periodic dynamic loads such as vascular pulsation. This solves the problem that existing single corrugated structure sensors cannot achieve both dynamic and static pressure measurement accuracy.

[0018] The replaceable sealing ring structure of the flat part allows for the replacement of sealing elements of corresponding materials according to different implantation media (cerebrospinal fluid, blood, tissue fluid), improving biocompatibility and corrosion resistance. The splicing substrate structure allows for adjustment of the sensor's external size by adding or removing splicing units, adapting to the space constraints of different implantation sites such as narrow intracranial spaces and long blood vessel spaces, significantly improving the sensor's environmental adaptability and application flexibility.

[0019] Through the structural design of the temperature compensation chamber on the second capacitor side and the built-in temperature-sensitive elastic block, the thermal expansion and contraction characteristics of the temperature-sensitive elastic block can be utilized to automatically compensate for the influence of temperature fluctuations on pressure measurement by calculating the capacitance difference, effectively offsetting the measurement error caused by temperature changes of 36~42℃ in the body; at the same time, the design of the sealing ring and the spliced ​​lead channel can prevent body fluid from seeping into the cavity and lead corrosion, further ensuring the measurement accuracy and structural reliability after long-term implantation.

[0020] This invention achieves multi-condition adaptation through the structured design of a single sensor, eliminating the need to develop dedicated sensors for different implantation scenarios, thus significantly improving the product's versatility and applicability. The modular structural design also reduces the difficulty of production and assembly, and the replaceable design of components such as splicing units and sealing rings facilitates later maintenance, effectively reducing the product's R&D, production, and application costs, and giving it significant practical value and market competitiveness. Attached Figure Description

[0021] Figure 1 A schematic diagram of the overall structure of a multi-condition adaptable corrugated diaphragm-dual-cavity composite pressure sensor provided in an embodiment of the present invention; Figure 2 A cross-sectional view of a corrugated diaphragm-dual-cavity composite pressure sensor adapted to multiple operating conditions provided in an embodiment of the present invention; Figure 3 A schematic diagram of the flow channel of a corrugated diaphragm-dual-cavity composite pressure sensor adapted to multiple operating conditions provided in an embodiment of the present invention; Figure 4 A schematic diagram of the flow channel of a corrugated diaphragm-dual-cavity composite pressure sensor adapted to multiple operating conditions provided in an embodiment of the present invention; Figure 5 A top view of a multi-condition adaptable corrugated diaphragm-dual-cavity composite pressure sensor provided in an embodiment of the present invention; Figure 6A top view of a multi-condition adaptable corrugated diaphragm-dual-cavity composite pressure sensor provided in an embodiment of the present invention; Figure 7 A schematic diagram of the flat section structure of a multi-condition adaptable corrugated diaphragm-dual-cavity composite pressure sensor provided in an embodiment of the present invention; Figure 8 A schematic diagram of a corrugated diaphragm-dual-cavity composite pressure sensor substrate structure adapted to multiple operating conditions provided in an embodiment of the present invention. Figure 9 A schematic diagram of the temperature compensation cavity structure of a corrugated diaphragm-dual-cavity composite pressure sensor with multi-condition adaptability provided in an embodiment of the present invention; Figure 10 This is a schematic diagram of a multi-condition adaptable corrugated diaphragm-dual-cavity composite pressure sensor splicing unit provided in an embodiment of the present invention. Detailed Implementation

[0022] To make the objectives, technical solutions, and advantages of the present invention clearer, specific embodiments of the present invention will be described in further detail below with reference to the accompanying drawings. It should be understood that the specific embodiments described herein are merely illustrative of the invention and not intended to limit it. Furthermore, it should be noted that, for ease of description, only the parts relevant to the invention are shown in the accompanying drawings, not all of them. Before discussing exemplary embodiments in more detail, it should be mentioned that some exemplary embodiments are described as processes or methods depicted as flowcharts. Although the flowcharts describe operations (or steps) as sequential processes, many of these operations can be performed in parallel, concurrently, or simultaneously. Furthermore, the order of the operations can be rearranged. The process can be terminated when its operation is completed, but may also have additional steps not included in the drawings. The process can correspond to a method, function, procedure, subroutine, subprogram, etc.

[0023] The technical solutions of the embodiments of the present invention will be clearly described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of the present invention. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention are within the scope of protection of the present invention.

[0024] See Figures 1 to 10 The present invention provides a corrugated diaphragm-dual-cavity composite pressure sensor adaptable to multiple working conditions, comprising: a corrugated diaphragm 1, a pressure-sensing layer 2, and a substrate 3; The corrugated diaphragm 1 is disposed on the upper side of the pressure-sensitive layer 2, and the pressure-sensitive layer 2 is sealed on the upper side of the substrate 3; The pressure-sensitive layer 2 has a first capacitor cavity 21 and a second capacitor cavity 22 spaced apart on the side near the substrate 3, and a flow channel 23 is provided between the first capacitor cavity 21 and the second capacitor cavity 22. The corrugated diaphragm 1 includes an integrally formed main corrugated portion 11, a secondary corrugated portion 12, and a flat portion 13. The flat portion 13 is attached to the pressure-sensitive layer 2. The main corrugated portion 11 is disposed corresponding to the first capacitor cavity 21, and the secondary corrugated portion 12 is disposed corresponding to the second capacitor cavity 22.

[0025] In some embodiments, an elastic valve 231 is provided in the flow channel 23. One end of the elastic valve 231 is fixed to the inner wall of the flow channel 23, and the other end is a free end. The elastic valve 231 can open and close with pressure changes to connect or isolate the first capacitor cavity 21 and the second capacitor cavity 22.

[0026] In some embodiments, the free end of the elastic valve 231 is provided with a protrusion 232 facing the second capacitor cavity 22, and the inner wall of the flow channel 23 is provided with a matching limiting groove 233 corresponding to the position of the protrusion 232. When the elastic valve 231 is closed, the protrusion 232 is engaged in the limiting groove 233.

[0027] In some embodiments, the main corrugated portion 11 has a concentric gradient structure, the secondary corrugated portion 12 has a parallel short corrugated structure, the secondary corrugated portion 12 is evenly distributed along the trough direction of the main corrugated portion 11, and the extension direction of the secondary corrugated portion 12 is perpendicular to the radial direction of the main corrugated portion 11.

[0028] In some embodiments, the number of secondary corrugated portions 12 is the same as the number of troughs of the main corrugated portion 11, and the two ends of each secondary corrugated portion 12 extend to the adjacent trough of the main corrugated portion 11 and are smoothly connected.

[0029] In some embodiments, the flat portion 13 is provided with an annular sealing groove 131 on the side facing the pressure-sensitive layer 2, and a replaceable sealing ring 132 is adapted to be installed in the annular sealing groove 131. The material of the sealing ring 132 is matched with the medium of the adapted working condition.

[0030] In some embodiments, the substrate 3 has a splicing structure, including at least two splicing units 31, which are detachably connected by a snap-fit ​​structure 311.

[0031] In some embodiments, a temperature compensation cavity 24 is provided on the side of the second capacitor cavity 22 away from the first capacitor cavity 21. A temperature-sensitive elastic block 241 is provided inside the temperature compensation cavity 24, and compensation electrodes 242 are provided at the top and bottom of the temperature compensation cavity 24, respectively.

[0032] In some embodiments, the two ends of the temperature-sensitive elastic block 241 abut against the top and bottom of the temperature compensation cavity 24, respectively, and the compensation electrode 242 is connected in parallel with the electrodes of the first capacitor cavity 21 and the second capacitor cavity 22.

[0033] In some embodiments, the side of the splicing unit 31 is provided with a guide groove 312. After adjacent splicing units 31 are spliced, the guide groove 312 surrounds and forms a lead wire channel 32 that communicates with the outside. The lead wire channel 32 is connected to the first capacitor cavity 21 and the second capacitor cavity 22 through through holes.

[0034] like Figures 1 to 10 As shown, an embodiment of the present invention provides a multi-condition adaptable corrugated diaphragm-dual-cavity composite pressure sensor, including: a corrugated diaphragm 1, a pressure-sensing layer 2, and a substrate 3; the corrugated diaphragm 1 is disposed on the upper side of the pressure-sensing layer 2, and the pressure-sensing layer 2 is sealed on the upper side of the substrate 3; a first capacitor cavity 21 and a second capacitor cavity 22 are provided on the side of the pressure-sensing layer 2 near the substrate 3, and a flow channel 23 is provided between the first capacitor cavity 21 and the second capacitor cavity 22; the corrugated diaphragm 1 includes an integrally formed main corrugated portion 11, a secondary corrugated portion 12, and a flat portion 13, the flat portion 13 is attached to the pressure-sensing layer 2, the main corrugated portion 11 is disposed corresponding to the first capacitor cavity 21, and the secondary corrugated portion 12 is disposed corresponding to the second capacitor cavity 22.

[0035] The pressure-sensitive layer 2 can be made of monocrystalline silicon, the base material of the substrate 3 can be BF33 glass, and the material of the corrugated diaphragm 1 can be parylene-C. The thickness of the pressure-sensitive layer 2 can be 250μm, the thickness of a single splicing unit of the substrate 3 can be 300μm, the depth of the first capacitor cavity 21 and the second capacitor cavity 22 can both be 150μm, the diameter of both can be 800μm, and the diameter of the current guiding channel 23 can be 200μm.

[0036] Example 1: This embodiment is suitable for low-pressure static operating conditions of 0~20kPa, such as... Figure 2 , 3 As shown in Figures 4, 5, and 7, this structural design ensures measurement sensitivity and stability under low pressure. An elastic valve 231 is installed within the flow channel 23. The elastic valve 231 can be made of medical-grade silicone with a thickness of 20 μm. One end is fixed to the inner wall of the flow channel 23 by laser welding, while the other end is free. The free end of the elastic valve 231 has a protrusion 232 facing the second capacitor cavity 22. A matching limiting groove 233 is provided on the inner wall of the flow channel 23 corresponding to the protrusion 232. Under low pressure, the elastic valve 231 remains closed due to its own elasticity, and the protrusion 232 engages within the limiting groove 233, allowing the first capacitor cavity 21 and the second capacitor cavity 22 to operate independently. This structure, through the independent small-volume configuration of the two cavities, enhances the diaphragm deformation amplitude under low pressure, thereby ensuring measurement sensitivity and preventing the low-pressure signal from being diluted.

[0037] An annular sealing groove 131 is provided on the side of the flat part 13 facing the pressure-sensitive layer 2. The annular sealing groove 131 has a width of 30μm and a depth of 15μm. A replaceable sealing ring 132 is adapted to be installed inside. In this embodiment, the sealing ring 132 can be made of hydrogel. Its purpose is to adapt to the mild medium environment of cerebrospinal fluid, reduce tissue rejection reaction through the biocompatibility of hydrogel, and achieve reliable sealing to prevent cerebrospinal fluid from seeping into the cavity and affecting the measurement.

[0038] The main corrugated section 11 has a concentric gradient structure, with the wave height gradually changing from the center to the edge by 10μm to 15μm, and the number of cycles is 4. Figure 5 (This number is not shown in the figure), which can ensure the stability of deformation under static low pressure and avoid measurement errors caused by diaphragm drift; the sub-corrugated part 12 is in a non-primary working state at this time and only plays an auxiliary support role.

[0039] In intracranial pressure monitoring scenarios, the composite pressure sensor of this embodiment can accurately capture static pressure changes of 0~20kPa. The structural coordination between the sealing ring 132 and the elastic valve 231 ensures both biocompatibility and improves low-pressure sensitivity.

[0040] Example 2: This embodiment is suitable for high-pressure dynamic operating conditions of 100~200kPa, such as... Figure 3 , 4 As shown in Figures 5, 6, and 9, this structural design ensures high-voltage overload resistance and dynamic response speed. The main corrugated section 11 has a concentric, gradually changing structure, with a wave height that gradually changes from 15μm to 20μm from the center to the edge, and a period of 6. The secondary corrugated sections 12 have a parallel short corrugated structure, uniformly distributed along the trough direction of the main corrugated section 11, and the extension direction of the secondary corrugated sections 12 is perpendicular to the radial direction of the main corrugated section 11. The wave height of the secondary corrugated sections 12 is 5μm, and the wave spacing is 20μm. The number of secondary corrugated sections 12 is the same as the number of troughs in the main corrugated section 11 (both are 6). Both ends of each secondary corrugated section 12 extend to the adjacent trough of the main corrugated section 11 and smoothly connect. Under this structural design, under dynamic high pressure (such as vasoconstriction and vasodilation), the main corrugated part 11 bears the main deformation, while the secondary corrugated part 12 provides additional elastic buffering, improving the dynamic response speed of the diaphragm, while avoiding fatigue fracture of the single corrugated structure under high-frequency dynamic load, and adapting to the periodic pressure changes of vascular pulsation.

[0041] A temperature compensation cavity 24 is provided on the side of the second capacitor cavity 22 away from the first capacitor cavity 21. The temperature compensation cavity 24 has a depth of 100μm and a diameter of 500μm. Inside, there is a temperature-sensitive elastic block 241 made of nickel-titanium alloy (with a stable coefficient of thermal expansion). Its two ends abut against the top and bottom of the temperature compensation cavity 24, respectively. Compensation electrodes 242 are provided at the top and bottom of the temperature compensation cavity 24, respectively. The compensation electrodes 242 are connected in parallel with the electrodes of the first capacitor cavity 21 and the second capacitor cavity 22 (the parallel connection is not shown in the figure). With this structural design, when the intravascular temperature fluctuates (36~38℃), the temperature-sensitive elastic block 241 expands and contracts with the temperature, causing the spacing between the compensation electrodes 242 to change. Through capacitance difference calculation in the parallel circuit, the interference of temperature on pressure measurement is automatically canceled, ensuring measurement accuracy under high-pressure dynamic conditions.

[0042] Under high-pressure conditions, when the pressure exceeds the elastic threshold (approximately 80 kPa) of the elastic valve 231, the free end of the elastic valve 231 is pushed open, the protrusion 232 disengages from the limiting groove 233, and the flow channel 23 connects the first capacitor cavity 21 and the second capacitor cavity 22, forming a large-volume cavity. This structural design can distribute the high-pressure load, prevent the diaphragm from rupturing due to excessive pressure in a single cavity, and improve the sensor's overload resistance.

[0043] In the vascular pressure monitoring scenario, the composite pressure sensor of this embodiment can quickly respond to dynamic pressure changes caused by heartbeats, while resisting high pressure overload and temperature interference, and maintaining stable measurement accuracy.

[0044] Example 3: This embodiment is suitable for medium-pressure conditions of 20~100kPa, and needs to address space constraints and fluid corrosion in different areas. Modular design enables adaptation to multiple operating conditions, such as... Figure 2 , 3 As shown in Figures 4, 7, 8, and 10, the substrate 3 has a splicing structure, including two splicing units 31, which are detachably connected by a snap-fit ​​structure 311. This structural design allows for adjustment of the sensor length according to the size of the interstitial space. For example, one splicing unit can be used in confined spaces, while two to three splicing units can be used in areas with ample space, achieving flexible adaptation to different spatial conditions.

[0045] The splicing unit 31 has a flow guide groove 312 on its side. After two splicing units 31 are spliced ​​together, the flow guide groove 312 encloses and forms a lead wire channel 32 that communicates with the outside. The lead wire channel 32 has a diameter of 100μm and is connected to the first capacitor cavity 21 and the second capacitor cavity 22 through through holes with a diameter of 50μm. This structural design can avoid the lead wires being directly exposed to body fluids through the spliced ​​lead wire channel, while adapting to the lead wire arrangement under different splicing lengths, ensuring the reliability of the circuit connection.

[0046] A replaceable sealing ring 132, made of fluororubber, is installed within the annular sealing groove 131 of the flat portion 13. This structural design is adaptable to the corrosive environment of interstitial fluids. Fluororubber has better corrosion resistance than hydrogel, which can prevent the seal from failing due to long-term immersion and extend the service life of the sensor.

[0047] In this embodiment, the elastic valve 231 automatically maintains a semi-open state according to the medium pressure condition. The first capacitor cavity 21 and the second capacitor cavity 22 are partially connected, taking into account both sensitivity and overload resistance. The main corrugated part 11 and the sub-corrugated part 12 deform in coordination to adapt to the slow dynamic pressure changes in the interstitial space.

[0048] The composite pressure sensor in this embodiment can be flexibly adapted to the monitoring of interstitial pressure in different spaces and corrosive environments, and the modular structure reduces the design cost for multi-scenario applications.

[0049] Example 4: This embodiment integrates all the above structures to achieve full-condition adaptation across a pressure range of 0~200kPa, static / dynamic pressure types, and different environments / spaces, such as... Figures 2 to 10 As shown, the composite pressure sensor simultaneously incorporates an elastic valve 231 (switching volume), a main and secondary corrugated composite structure (adapting to dynamic and static pressures), a replaceable sealing ring 132 (adapting to the medium), a modular substrate 3 (adapting to the space), and a temperature compensation chamber 24 (compensating for temperature drift). These structures work together: under low-pressure static conditions, the valve is closed, the secondary corrugation is ready, and the hydrogel seal is applied; under high-pressure dynamic conditions, the valve is open, the main and secondary corrugations work in tandem, and the fluororubber seal is applied; the number of modular units can be adjusted for different spatial conditions. This structural design, through the multifunctionality of a single sensor, covers most scenarios for implantable pressure monitoring, eliminating the need for separate sensor designs for different operating conditions, thus improving product versatility and ease of application.

[0050] All the above embodiments revolve around the core objective of "multi-condition adaptation": the elastic valve and dual-chamber structure solve the pressure range adaptation problem, the main and auxiliary corrugated composite structure solves the pressure type adaptation problem, the replaceable sealing ring and spliced ​​substrate solve the environmental and spatial adaptation problem, and the temperature compensation cavity solves the environmental interference adaptation problem. These structures work together to enable the composite pressure sensor to maintain high accuracy, high reliability, and long service life in different implantation scenarios, significantly improving the product's applicability and market competitiveness.

[0051] The above description is merely a preferred embodiment of the present invention and the technical principles employed. The present invention is not limited to the specific embodiments described herein, and various obvious changes, readjustments, and substitutions that can be made by those skilled in the art will not depart from the scope of protection of the present invention. Therefore, although the present invention has been described in detail through the above embodiments, the present invention is not limited to the above embodiments, and may include many other equivalent embodiments without departing from the concept of the present invention.

Claims

1. A corrugated diaphragm-dual-cavity composite pressure sensor adaptable to multiple operating conditions, characterized in that, include: Corrugated diaphragm, pressure-sensitive layer and substrate; The corrugated diaphragm is disposed on the upper side of the pressure-sensitive layer, and the pressure-sensitive layer is sealed on the upper side of the substrate; The pressure-sensitive layer has a first capacitor cavity and a second capacitor cavity spaced apart on the side near the substrate, and a flow channel is provided between the first capacitor cavity and the second capacitor cavity. The corrugated diaphragm includes an integrally formed main corrugated portion, a secondary corrugated portion, and a flat portion. The flat portion is attached to the pressure-sensitive layer. The main corrugated portion is disposed corresponding to the first capacitor cavity, and the secondary corrugated portion is disposed corresponding to the second capacitor cavity.

2. The composite pressure sensor as described in claim 1, characterized in that, The flow channel is provided with an elastic valve. One end of the elastic valve is fixed to the inner wall of the flow channel, and the other end is a free end. The elastic valve can open and close with pressure changes to connect or isolate the first capacitor cavity and the second capacitor cavity.

3. The composite pressure sensor as described in claim 2, characterized in that, The free end of the elastic valve has a protrusion facing the second capacitor cavity, and the inner wall of the flow channel has a matching limiting groove corresponding to the position of the protrusion. When the elastic valve is closed, the protrusion is engaged in the limiting groove.

4. The composite pressure sensor as described in claim 1, characterized in that, The main corrugated section has a concentric gradient structure, and the secondary corrugated section has a parallel short corrugated structure. The secondary corrugated sections are evenly distributed along the trough direction of the main corrugated section, and the extension direction of the secondary corrugated sections is perpendicular to the radial direction of the main corrugated section.

5. The composite pressure sensor as described in claim 4, characterized in that, The number of the secondary corrugations is the same as the number of the troughs of the main corrugations, and the two ends of each secondary corrugation extend to the adjacent trough of the main corrugation and are smoothly connected.

6. The composite pressure sensor as described in claim 1, characterized in that, The flat portion is provided with an annular sealing groove on the side facing the pressure-sensitive layer. A replaceable sealing ring is adapted to be installed in the annular sealing groove, and the material of the sealing ring is matched with the medium of the adapted working condition.

7. The composite pressure sensor as described in claim 1, characterized in that, The substrate has a splicing structure, including at least two splicing units, which are detachably connected by a snap-fit ​​structure.

8. The composite pressure sensor as described in claim 1, characterized in that, A temperature compensation cavity is provided on the side of the second capacitor cavity away from the first capacitor cavity. A temperature-sensitive elastic block is provided inside the temperature compensation cavity, and compensation electrodes are provided at the top and bottom of the temperature compensation cavity, respectively.

9. The composite pressure sensor as described in claim 8, characterized in that, The two ends of the temperature-sensitive elastic block abut against the top and bottom of the temperature compensation cavity, respectively, and the compensation electrode is connected in parallel with the electrodes of the first capacitor cavity and the second capacitor cavity.

10. The composite pressure sensor as described in claim 7, characterized in that, The splicing unit has a flow guide groove on its side. After adjacent splicing units are spliced ​​together, the flow guide groove forms a lead wire channel that communicates with the outside. The lead wire channel is connected to the first capacitor cavity and the second capacitor cavity through through holes.

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