A method and device for AI identification before packaging of a silicon wafer cassette

Abstract

The application belongs to the technical field of wafer box detection, in particular to a method and device for AI identification of a wafer box before packaging, comprising a detection table, the top of which is fixedly connected with a connecting frame and an alarm lamp. In use, the wafer box is installed on the mounting seat, a plurality of cameras are used to detect the wafer box, and the color of the alarm lamp is used to determine whether the wafer box has problems. During the detection process, the mounting seat drives the wafer box to rotate in the horizontal direction by inflating the circular groove. Then, the wafer box is pushed upward by inflating the lifting inflatable plate to adjust the inclination of the wafer box. Therefore, the wafer box can be detected at multiple angles and positions, the detection accuracy is improved, the related wafer box accessories can be accurately selected, the incorrect label pasting position is prevented, and the wafer box packaging is not prone to customer complaints.

Description

Technical Field

[0001] This invention belongs to the field of wafer cassette inspection technology, specifically a method and device for AI recognition of silicon wafer cassettes before packaging. Background Technology

[0002] 12-inch silicon wafers (referred to as "12-inch wafers") are a core basic material in the semiconductor manufacturing industry, with a diameter of approximately 300 millimeters. In integrated circuit (chip) manufacturing, silicon wafers serve as substrates and the physical carriers for building electronic components such as transistors, resistors, and capacitors. The main role of 12-inch silicon wafers is to greatly improve production efficiency and economic benefits. When storing and shipping 12-inch silicon wafers, personnel load them into wafer cassettes.

[0003] With the rapid development of the semiconductor industry, the FOSB (Front-Off Container) cassettes used for 12-inch wafer shipments have complex structures and a wide variety of components, some of which are optional. Operators can easily select the wrong FOSB when choosing a cassette. Furthermore, different customers have different requirements regarding the selection of related cassette accessories and the placement of labels. If errors are discovered at the customer's site, it can lead to customer complaints. Therefore, the present invention provides a method and apparatus for AI recognition before silicon wafer cassette packaging. Summary of the Invention

[0004] In order to overcome the shortcomings of the prior art, at least one technical problem raised in the background art is solved.

[0005] The technical solution adopted by the present invention to solve its technical problem is: the present invention provides an AI recognition device for silicon wafer box packaging, including a detection platform, a connecting frame and an alarm light fixedly connected to the top of the detection platform, and a camera one and a camera two fixedly connected to a pair of inner side walls of the connecting frame respectively. A camera three is fixedly connected to the top of the testing platform, and a camera four is fixedly connected to the side of the testing platform. The top of the testing platform is provided with an annular groove. A fixing block is fixedly connected inside the annular groove. A side of a rubber telescopic plate is fixedly connected to the side of the fixing block. A sliding plate is movably inserted inside the annular groove. The side of the sliding plate is fixedly connected to the other side of the rubber telescopic plate. There is a gap between the other side of the sliding plate and the side of the fixing block away from the rubber telescopic plate. An air pump is fixedly connected to the top of the testing platform. A connecting cylinder is fixedly connected to the air outlet of the air pump. An air inlet pipe is fixedly connected to the side of the connecting cylinder. The air outlet of the air inlet pipe is connected to the annular groove and is located between the sliding plate and the fixed block. The top of the skateboard is fixedly connected to a mounting base, and a support ring is fixedly connected to the inner wall of the mounting base. A lifting inflatable plate is provided at a symmetrical position on the top of the support ring. The interior of the mounting base is a hollow structure and is connected to the lifting inflatable plate. The mounting base has an air inlet at its bottom, which communicates with the annular groove. A sealing ring and a control valve are fixedly connected to the bottom of the mounting base, and the bottom of the sealing ring abuts against the top of the testing platform.

[0006] Preferably, a semi-circular block is fixedly connected to the top of the testing platform. A spring groove is provided on the side of the semi-circular block near the mounting base. A telescopic block is movably inserted inside the spring groove. A spring is fixedly connected between the telescopic block and the spring groove. A reinforcing groove adapted to the telescopic block is provided on the outer side of the mounting base. In the initial state, the spring is in a contracted state, and the side of the telescopic block away from the spring is inserted into the reinforcing groove.

[0007] Preferably, the top of the semicircular block has a circular hole one, a limiting block is movably inserted inside the circular hole one, and the top of the telescopic block has a circular hole two that matches the limiting block.

[0008] Preferably, a sliding groove is provided on the inner side wall of the annular groove, and a rotating block adapted to the sliding groove is fixedly connected to the side of the sliding plate.

[0009] Preferably, the top of the testing platform is provided with an exhaust hole and an exhaust valve, and a filter block is movably inserted inside the exhaust hole, with the top of the filter block flush with the top of the testing platform.

[0010] Preferably, the filter block is equipped with a detection sensor inside, and a pair of symmetrically distributed mounting blocks are fixedly connected to the top of the filter block. The mounting blocks are equipped with indicator lights and a controller, and both the detection sensor and the indicator lights are electrically connected to the controller through wires.

[0011] Preferably, a fixing frame is provided on both sides of the mounting base. The bottom of the fixing frame is fixedly connected to the top of the testing platform. A clamping block is placed against the side of the fixing frame near the mounting base. A spring is fixedly connected between the clamping block and the mounting base. A connecting rod is movably inserted inside the spring. One side of the connecting rod is fixedly connected to the clamping block, and a rubber block is fixedly connected to the other side of the connecting rod. A pair of mating holes 1 that are adapted to the connecting rod are provided on the mounting base. A mating hole 2 that is adapted to the rubber block is provided on the inner wall of the mounting base. The mating holes 1 and 2 communicate with each other. In the initial state, the spring is in a contracted state. The side of the rubber block away from the connecting rod is flush with the inner wall of the mounting base. A magnetic coating 3 is applied to the side of the clamping block away from the connecting rod. A magnetic coating 4 that is magnetically attracted to the magnetic coating 3 is applied to the side of the fixing frame near the clamping block.

[0012] Preferably, the outer side of the plug rod is coated with a magnetic coating first, and the inner wall of the docking hole second is coated with a magnetic coating second that is magnetically connected to the magnetic coating first.

[0013] A method for AI recognition before packaging silicon wafer cassettes, the method using the aforementioned AI recognition device for packaging silicon wafer cassettes, includes the following steps; S1: Place the disc tray into the mounting base and support it using the support ring; S2: Use camera one, camera two, camera three and camera four to test the film box; S3: During the testing process, the mounting base is rotated and the degree of inflation of a pair of lifting air plates is controlled to adjust the position and angle of the film box; S4: When the mounting base rotates, the rubber block clamps the disc box.

[0014] The beneficial effects of this invention are as follows: 1. The present invention discloses an AI recognition device for silicon wafer cassette packaging. In use, the wafer cassette is mounted on a mounting base, and several cameras are used to detect it. The color of the alarm light indicates whether there is a problem with the cassette. During the detection process, air is injected into the annular groove, causing the mounting base to rotate the wafer cassette horizontally. Then, air is injected into the lifting inflation plate, pushing the wafer cassette upwards to adjust its tilt. Therefore, the present invention can detect the wafer cassette from multiple angles and positions, improving detection accuracy, enabling personnel to accurately select relevant wafer cassette accessories, and preventing incorrect label placement. This reduces the likelihood of customer complaints after silicon wafer cassette packaging.

[0015] 2. The AI ​​recognition device for silicon wafer cassette packaging described in this invention, when the wafer cassette is not inspected using a detection platform, has the side of the clamping block abutting against the side of the fixing frame, and the magnetic coating three is magnetically connected to the magnetic coating four. Simultaneously, the spring two is in a stretched state when the clamping block and the mounting base are in a stretched state, thereby improving the stability of the mounting base and making it less prone to movement. When the wafer cassette is inspected and the mounting base rotates the wafer cassette, the mounting base will move the connecting rod and the rubber block, causing the clamping block to separate from the fixing frame. Then, the spring two will pull the clamping block, causing it to move the connecting rod and the rubber block towards the wafer cassette, so that the side of the rubber block abuts against the wafer cassette and adheres to it, thereby limiting the wafer cassette's position and improving its stability within the mounting base. This makes it difficult for the wafer cassette to move out of the mounting base, ensuring smooth wafer cassette inspection. Attached Figure Description

[0016] The invention will now be further described with reference to the accompanying drawings.

[0017] Figure 1 This is a perspective view of the present invention; Figure 2 This is an enlarged view of point A in this invention; Figure 3 This is a partial schematic diagram of the detection stage in this invention; Figure 4 This is an enlarged view of point B in this invention; Figure 5 This is an enlarged view of point C in this invention; Figure 6 This is an enlarged view of point D in this invention; Figure 7 This is a schematic diagram of the semicircular block in this invention; Figure 8 This is a schematic diagram of the mounting base in this invention; Figure 9 This is a schematic diagram of the movement of the clamping block in this invention; Figure 10 This is a flowchart of the method of the present invention.

[0018] In the diagram: 1. Testing platform; 2. Connecting frame; 3. Alarm light; 4. Camera 1; 5. Camera 2; 6. Camera 3; 7. Camera 4; 8. Circular groove; 9. Fixing block; 10. Rubber telescopic plate; 11. Slide plate; 12. Air pump; 13. Connecting cylinder; 14. Air inlet pipe; 15. Mounting base; 16. Support ring; 17. Lifting inflation plate; 18. Semicircular block; 19. Spring groove; 20. Telescopic block; 21. Spring 1; 22. Addition... 23. Fixed groove; 24. Round hole one; 25. Limiting block; 26. Round hole two; 27. Sliding groove; 28. Rotating block; 29. ​​Exhaust hole; 20. Filter block; 31. Mounting block; 32. Indicator light; 33. Fixing bracket; 34. Spring two; 35. Insertion rod; 36. Magnetic coating four; 37. Rubber block; 38. Connecting hole one; 39. Connecting hole two; 40. Magnetic coating one; 41. Magnetic coating two; 42. Magnetic coating three. Detailed Implementation

[0019] To make the technical means, creative features, objectives and effects of this invention easier to understand, the invention will be further described below in conjunction with specific embodiments.

[0020] Example 1: As Figures 1 to 5 As shown in the figure, an AI recognition device for silicon wafer cassette packaging according to an embodiment of the present invention includes a detection platform 1. A connecting frame 2 and an alarm light 3 are fixedly connected to the top of the detection platform 1. A camera 4 and a camera 5 are fixedly connected to a pair of inner sidewalls of the connecting frame 2, respectively. A camera 6 is fixedly connected to the top of the testing platform 1, and a camera 7 is fixedly connected to the side of the testing platform 1. Camera 1 (4) identifies the number of films and film cassette accessories; Camera 2 (5) identifies the label position and film cassette accessories; Camera 3 (6) identifies the film cassette accessories; and Camera 4 (7) identifies the label position, latch status, and filter. The top of the testing platform 1 is provided with an annular groove 8. A fixing block 9 is fixedly connected inside the annular groove 8. A side of a rubber telescopic plate 10 is fixedly connected to the side of the fixing block 9. A sliding plate 11 is movably inserted inside the annular groove 8. The side of the sliding plate 11 is fixedly connected to the other side of the rubber telescopic plate 10. There is a gap between the other side of the sliding plate 11 and the side of the fixing block 9 away from the rubber telescopic plate 10. An air pump 12 is fixedly connected to the top of the testing platform 1. A connecting cylinder 13 is fixedly connected to the air outlet end of the air pump 12. An air inlet pipe 14 is fixedly connected to the side of the connecting cylinder 13. The air outlet end of the air inlet pipe 14 is connected to the annular groove 8 and is located between the slide plate 11 and the fixed block 9. The top of the slide plate 11 is fixedly connected to a mounting base 15, and a support ring 16 is fixedly connected to the inner wall of the mounting base 15. A lifting inflatable plate 17 is provided at a symmetrical position on the top of the support ring 16. The interior of the mounting base 15 is a hollow structure and it communicates with the lifting inflatable plate 17. A switch valve and a controller are provided on the lifting inflatable plate 17. The mounting base 15 has an air inlet at its bottom, which communicates with the annular groove 8. A sealing ring and a control valve are fixedly connected to the bottom of the mounting base 15, and the bottom of the sealing ring abuts against the top of the testing platform 1.

[0021] In the existing technology, with the rapid development of the semiconductor industry, the FOSB wafer cassette used for 12-inch wafer shipment has a complex structure and a wide variety of components, some of which are optional. Operators may easily select the wrong FOSB when selecting wafer cassettes. In addition, the selection of related wafer cassette accessories or the location of labeling vary from customer to customer. If errors are found at the customer's end, there is a risk of customer complaints. The present invention is used in the following steps: Step 1: Place the wafer cassette containing silicon wafers into the mounting base 15, and use the support ring 16 to support the wafer cassette so as to install the wafer cassette on the testing stage 1; The detection station 1 interacts with the internal system. After the detection station 1 senses the sensor, it automatically detects the film box through cameras 1-4, 2-5, 3-6 and 4-7. The detection information is then fed back to the system. The system compares the information fed back by the machine with the film box type, label pasting position, film box accessories and film quantity requirements in the production specifications. If the test is deemed OK, the green light on alarm light 3 will illuminate, indicating that the test is qualified. If the test is deemed NG, the red light on alarm light 3 will illuminate and an alarm will sound. The corresponding alarm information will be displayed in the alarm information bar of the software, allowing the operator to install the missing parts and affix the missing labels as soon as possible. Step 2: During the testing process, the air pump 12 can be started to inject gas into the air inlet pipe 14. The gas will then pass through the air inlet pipe 14 and the testing platform 1 into the annular groove 8. Under the action of the gas thrust, the slide plate 11 will drive the mounting base 15 and all its mechanisms to rotate on the testing platform 1. At the same time, the other side of the slide plate 11 will squeeze the rubber telescopic plate 10, causing it to contract and produce elastic deformation. After the thrust on the slide plate 11 is removed, the rubber telescopic plate 10 will push the mounting base 15 to reset, thereby adjusting the angle and position of the film box in the horizontal direction so that personnel can perform multi-angle and multi-position testing on the film box. Step 3: When in use, the switch valve on one of the lifting air plates 17 can be opened to allow some gas to enter the lifting air plate 17. After the lifting air plate 17 is inflated, it will push one side of the film box upward, thereby adjusting the tilt of the film box and then adjusting the angle of the film box in the vertical direction, further expanding the angle and position of the film box detection.

[0022] In summary, when using this invention, the wafer cassette is installed on the mounting base 15, and several cameras are used to detect the wafer cassette. The color of the alarm light 3 indicates whether there is a problem with the wafer cassette. During the detection process, air is injected into the annular groove 8, causing the mounting base 15 to rotate the wafer cassette horizontally. Then, air is injected into the lifting air plate 17, which pushes the wafer cassette upward to adjust its tilt. Therefore, this invention can detect the wafer cassette from multiple angles and positions, improving the accuracy of the detection. This allows personnel to accurately select relevant wafer cassette accessories and prevents incorrect label placement, thus reducing the likelihood of customer complaints after the silicon wafer cassette is packaged.

[0023] like Figure 1 As shown, a semi-circular block 18 is fixedly connected to the top of the testing platform 1. A spring groove 19 is provided on the side of the semi-circular block 18 near the mounting base 15. A telescopic block 20 is movably inserted inside the spring groove 19. A spring 21 is fixedly connected between the telescopic block 20 and the spring groove 19. A reinforcing groove 22 adapted to the telescopic block 20 is provided on the outer side of the mounting base 15. In the initial state, the spring 21 is in a retracted state, and the side of the telescopic block 20 away from the spring 21 is inserted into the reinforcing groove 22. After the tablet box is inspected, the spring 21 will push the telescopic block 20 under the action of the spring force, so that one side of the telescopic block 20 is inserted into the reinforcing groove 22. The telescopic block 20 limits the mounting base 15 to prevent it from rotating, thereby preventing the mounting base 15 from being rotated by external force when the personnel take the tablet box out of the mounting base 15.

[0024] like Figure 7 As shown, the top of the semicircular block 18 is provided with a circular hole 23, and a limiting block 24 is movably inserted inside the circular hole 23. The top of the telescopic block 20 is provided with a circular hole 25 that is adapted to the limiting block 24. After one side of the telescopic block 20 enters the reinforcing groove 22, one side of the limiting block 24 needs to be inserted into the first round hole 23 and the second round hole 25 to prevent the telescopic block 20 from squeezing the first spring 21 and moving into the spring groove 19 when subjected to external force.

[0025] like Figure 1 and Figure 5As shown, a sliding groove 26 is provided on the inner side wall of the annular groove 8, and a rotating block 27 adapted to the sliding groove 26 is fixedly connected to the side of the sliding plate 11. The rotating block 27 can prevent the sliding plate 11 from moving out of the annular groove 8.

[0026] like Figure 5 As shown, the top of the testing platform 1 is provided with an exhaust hole 28 and an exhaust valve. A filter block 29 is movably inserted inside the exhaust hole 28. The top of the filter block 29 is flush with the top of the testing platform 1. The gas discharged from the annular groove 8 and the lifting inflation plate 17 can be moved out from the exhaust hole 28 and filtered by the filter block 29, thereby ensuring the cleanliness of the exhaust hole 28.

[0027] like Figure 1 As shown, a detection sensor is installed inside the filter block 29. A pair of symmetrically distributed mounting blocks 30 are fixedly connected to the top of the filter block 29. An indicator light 31 and a controller are installed on the mounting blocks 30. Both the detection sensor and the indicator light 31 are electrically connected to the controller through wires. When the detection sensor detects foreign objects and dust blocking the filter block 29, the indicator light 31 will light up to remind personnel to clean the filter block 29 in time.

[0028] Example 2: Figure 7 As shown in the comparative embodiment one, another embodiment of the present invention is as follows: Fixing frames 32 are provided on both sides of the mounting base 15. The bottom of the fixing frame 32 is fixedly connected to the top of the testing platform 1. A clamping block 33 is placed against the side of the fixing frame 32 near the mounting base 15. A second spring 34 is fixedly connected between the clamping block 33 and the mounting base 15. A connecting rod 35 is movably inserted into the inside of the second spring 34. One side of the connecting rod 35 is fixedly connected to the clamping block 33, and a rubber block 37 is fixedly connected to the other side of the connecting rod 35. The mounting base 1... The mounting base 15 has a pair of mating holes 38 that are adapted to the plug rod 35. The inner wall of the mounting base 15 has a mating hole 39 that is adapted to the rubber block 37. The mating holes 38 and 39 are connected. In the initial state, the spring 34 is in the contracted state. The side of the rubber block 37 away from the plug rod 35 is flush with the inner wall of the mounting base 15. The side of the abutment block 33 away from the plug rod 35 is coated with a magnetic coating 42. The side of the fixing bracket 32 ​​near the abutment block 33 is coated with a magnetic coating 36 that is magnetically connected to the magnetic coating 42.

[0029] When the present invention is in use, when the test bench 1 is not used to test the film box, the side of the pressing block 33 abuts against the side of the fixing frame 32, and the magnetic coating 3 42 will be magnetically connected with the magnetic coating 4 36. At the same time, the spring 2 34 is in a stretched state when the pressing block 33 and the mounting base 15 are in a stretched state, thereby improving the stability of the mounting base 15 and making it less likely to move. When the film cassette is inspected and the mounting base 15 rotates the film cassette, the mounting base 15 will drive the plug rod 35 and the rubber block 37, causing the clamping block 33 to separate from the fixing frame 32. Then, the spring 34 will pull the clamping block 33, causing it to move the plug rod 35 and the rubber block 37 toward the film cassette, so that the side of the rubber block 37 abuts against the film cassette and adheres to the film cassette, thereby limiting the position of the film cassette and improving the stability of the film cassette within the mounting base 15. This makes it difficult for the film cassette to move out of the mounting base 15, ensuring the smooth inspection of the film cassette.

[0030] like Figure 7 As shown, the outer side of the plug rod 35 is coated with a magnetic coating 40, and the inner wall of the docking hole 39 is coated with a magnetic coating 41 that is magnetically attracted to the magnetic coating 40. After the rubber block 37 clamps the sheet box, the magnetic coating 40 will be magnetically attracted to the magnetic coating 41, thereby improving the stability of the plug rod 35 in the docking hole 39.

[0031] A method for AI recognition before packaging silicon wafer cassettes, the method using the aforementioned AI recognition device for packaging silicon wafer cassettes, includes the following steps; S1: Place the disc tray into the mounting base 15 and support it using the support ring 16; S2: Use cameras 1-4, 2-5, 3-6, and 4-7 to inspect the film box; S3: During the testing process, the mounting base 15 is rotated and the degree of inflation of the pair of lifting air plates 17 is controlled to adjust the position and angle of the film box; S4: When the mounting base 15 rotates, the rubber block 37 clamps the film box.

[0032] The terms "front," "back," "left," "right," "top," and "bottom" all refer to the figures in the accompanying drawings. Figure 1 Based on the perspective of the observer, the side of the device facing the observer is defined as the front, the left side of the observer is defined as the left, and so on.

[0033] In the description of this invention, it should be understood that the terms "center", "longitudinal", "lateral", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limiting the scope of protection of this invention.

[0034] The foregoing has shown and described the basic principles, main features, and advantages of the present invention. Those skilled in the art should understand that the present invention is not limited to the above embodiments. The embodiments and descriptions in the specification are merely illustrative of the principles of the invention. Various changes and modifications can be made to the invention without departing from its spirit and scope, and all such changes and modifications fall within the scope of the present invention as claimed. The scope of protection of the present invention is defined by the appended claims and their equivalents.

Claims

1. An AI recognition device for silicon wafer cassette packaging, characterized in that: The device includes a testing platform (1), a connecting frame (2) and an alarm light (3) are fixedly connected to the top of the testing platform (1), and a camera (4) and a camera (5) are fixedly connected to a pair of inner side walls of the connecting frame (2). A camera three (6) is fixedly connected to the top of the testing platform (1), and a camera four (7) is fixedly connected to the side of the testing platform (1). The top of the testing platform (1) is provided with an annular groove (8), and a fixing block (9) is fixedly connected inside the annular groove (8). A side of a rubber telescopic plate (10) is fixedly connected to the side of the fixing block (9). A sliding plate (11) is movably inserted inside the annular groove (8). The side of the sliding plate (11) is fixedly connected to the other side of the rubber telescopic plate (10). There is a gap between the other side of the sliding plate (11) and the side of the fixing block (9) away from the rubber telescopic plate (10). An air pump (12) is fixedly connected to the top of the testing platform (1). A connecting cylinder (13) is fixedly connected to the air outlet end of the air pump (12). An air inlet pipe (14) is fixedly connected to the side of the connecting cylinder (13). The air outlet end of the air inlet pipe (14) is connected to the annular groove (8) and is located between the sliding plate (11) and the fixed block (9). The top of the skateboard (11) is fixedly connected to a mounting base (15), and a support ring (16) is fixedly connected to the inner wall of the mounting base (15). A lifting inflatable plate (17) is provided at a symmetrical position on the top of the support ring (16). The interior of the mounting base (15) is a hollow structure and it is connected to the lifting inflatable plate (17). The bottom of the mounting base (15) is provided with an air inlet, which is connected to the annular groove (8). A sealing ring and a control valve are fixedly connected to the bottom of the mounting base (15), and the bottom of the sealing ring abuts against the top of the testing platform (1).

2. The AI ​​recognition device for silicon wafer cassette packaging according to claim 1, characterized in that: The top of the testing platform (1) is fixedly connected to a semi-circular block (18). A spring groove (19) is provided on the side of the semi-circular block (18) near the mounting base (15). A telescopic block (20) is movably inserted inside the spring groove (19). A spring (21) is fixedly connected between the telescopic block (20) and the spring groove (19). A reinforcing groove (22) adapted to the telescopic block (20) is provided on the outside of the mounting base (15). In the initial state, the spring (21) is in a contracted state, and the side of the telescopic block (20) away from the spring (21) is inserted into the reinforcing groove (22).

3. The AI ​​recognition device for silicon wafer cassette packaging according to claim 2, characterized in that: The top of the semicircular block (18) is provided with a circular hole (23), and a limiting block (24) is movably inserted inside the circular hole (23). The top of the telescopic block (20) is provided with a circular hole (25) that is adapted to the limiting block (24).

4. The AI ​​recognition device for silicon wafer cassette packaging according to claim 1, characterized in that: The inner wall of the annular groove (8) is provided with a sliding groove (26), and the side of the sliding plate (11) is fixedly connected with a rotating block (27) that is compatible with the sliding groove (26).

5. The AI ​​recognition device for silicon wafer cassette packaging according to claim 1, characterized in that: The top of the testing platform (1) is provided with an exhaust hole (28) and an exhaust valve. A filter block (29) is movably inserted inside the exhaust hole (28), and the top of the filter block (29) is flush with the top of the testing platform (1).

6. The AI ​​recognition device for silicon wafer cassette packaging according to claim 5, characterized in that: The filter block (29) is equipped with a detection sensor inside. A pair of symmetrically distributed mounting blocks (30) are fixedly connected to the top of the filter block (29). An indicator light (31) and a controller are provided on the mounting blocks (30). Both the detection sensor and the indicator light (31) are electrically connected to the controller through wires.

7. The AI ​​recognition device for silicon wafer cassette packaging according to claim 1, characterized in that: Both sides of the mounting base (15) are provided with fixing brackets (32). The bottom of the fixing bracket (32) is fixedly connected to the top of the testing table (1). A clamping block (33) is placed close to the side of the fixing bracket (32) near the mounting base (15). A spring (34) is fixedly connected between the clamping block (33) and the mounting base (15). A connecting rod (35) is movably inserted inside the spring (34). One side of the connecting rod (35) is fixedly connected to the clamping block (33), and the other side of the connecting rod (35) is fixedly connected to a rubber block (37). A pair of connecting rods (37) are provided on the mounting base (15). 5) Matching docking hole one (38), the inner wall of the mounting base (15) is provided with docking hole two (39) that matches the rubber block (37), docking hole one (38) and docking hole two (39) are connected. In the initial state, spring two (34) is in the contracted state. The side of the rubber block (37) away from the plug rod (35) is flush with the inner wall of the mounting base (15). The side of the pressing block (33) away from the plug rod (35) is coated with magnetic coating three (42). The side of the fixing bracket (32) close to the pressing block (33) is coated with magnetic coating four (36) that is magnetically connected to magnetic coating three (42).

8. The AI ​​recognition device for silicon wafer cassette packaging according to claim 7, characterized in that: The outer side of the plug rod (35) is coated with a magnetic coating first (40), and the inner wall of the docking hole second (39) is coated with a magnetic coating second (41) that is magnetically connected to the magnetic coating first (40).

9. A method for AI recognition before packaging silicon wafer cassettes, the method employing the AI ​​recognition device for pre-packaging silicon wafer cassettes as described in claim 8, characterized in that: Includes the following steps; S1: Place the disc tray in the mounting base (15) and support it with the support ring (16); S2: Use camera one (4), camera two (5), camera three (6) and camera four (7) to detect the film box; S3: During the testing process, the mounting base (15) is rotated and the degree of inflation of a pair of lifting air plates (17) is controlled to adjust the position and angle of the tablet box; S4: When the mounting base (15) rotates, the film box is clamped by the rubber block (37).

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