A method for fabricating an optical microchannel array panel and its application

Abstract

This invention discloses a microchannel array panel and its fabrication method, relating to the field of optical devices. The panel includes multiple transparent channel glasses and black glass filling the spaces between the multiple transparent channel glasses. The black glass forms the panel structure, and the multiple transparent channel glasses are columnar, distributed in an array. Both ends of each transparent channel glass are recessed into the end face of the panel structure. The panel provided by this invention has better optical collimation performance than existing technologies, and the fabrication process of this invention is simple.

Description

[0001] This invention is a divisional application. The original application was entitled "Optical Microchannel Array Panel and its Fabrication Method", with application number 202011117526.X and application date of October 19, 2020. Technical Field

[0002] This invention relates to the field of optics, and in particular to a microchannel array panel and its fabrication method. Background Technology

[0003] Compared to through-hole array elements, solid-core microchannel array panels offer better collimation performance, higher processing efficiency, easier mass production, and better process performance, and have already been widely adopted in under-display fingerprint recognition technology. Here, "microchannel" refers to a channel size ranging from 1 to 1000 micrometers.

[0004] However, with the development of under-display fingerprint recognition technology and its application in new fields such as VR, users hope that the product can achieve higher collimation performance in order to achieve higher image resolution.

[0005] Existing technologies primarily reduce the light divergence angle by increasing the aspect ratio (H / d) of the microchannels, reducing the refractive index of the transparent glass, and improving the light absorption performance of the black substrate glass. However, practical experience has shown that these technologies have significant limitations. Even after implementing these measures, the light divergence angle differs considerably from the theoretically calculated value, making further reduction difficult. The main reason is that although polishing is performed, the end face of the transparent solid light microchannel still exhibits microscopic unevenness. When collimated light exits from the end face, it is re-scattered by the microscopic uneven structure of the surface. This problem restricts the improvement of the collimation performance of solid light microchannel array panels. Summary of the Invention

[0006] To solve at least one of the above-mentioned technical problems, the present invention aims to provide an optical microchannel array panel and a method for preparing the same, so as to improve the collimation performance of a solid optical microchannel array panel and to provide a simple manufacturing process.

[0007] In a first aspect, embodiments of the present invention provide:

[0008] A light microchannel array panel includes a plurality of light-transmitting channel glass and black glass filling the spaces between the plurality of light-transmitting channel glass;

[0009] The black glass forms a panel structure, and the multiple light-transmitting channel glass are all columnar, with each of the light-transmitting channel glass distributed in an array.

[0010] Both ends of each of the light-transmitting channel glass are recessed into the end face of the panel structure.

[0011] In some embodiments, the light channel directions of each of the light-transmitting channel glasses are parallel.

[0012] In some embodiments, the light channel direction of each of the light-transmitting channel glass is perpendicular to the end face of the panel structure.

[0013] In some embodiments, the light channel direction of each of the light-transmitting channel glass forms an acute angle with the end face of the panel structure.

[0014] In some embodiments, the black glass has a higher acid resistance than the light-transmitting channel glass.

[0015] In some embodiments, the light-transmitting channel glass is cylindrical.

[0016] Secondly, embodiments of the present invention provide:

[0017] A method for fabricating an optical microchannel array panel includes the following steps:

[0018] Acid etching treatment was performed on the solid optical microchannel panel;

[0019] The panel is cleaned and dried after acid etching to obtain the target optical microchannel array panel.

[0020] The solid light microchannel panel includes multiple light-transmitting channel glass and black glass filling the spaces between the multiple light-transmitting channel glass. The black glass forms the panel structure. The multiple light-transmitting channel glass are all columnar and distributed in an array. The acid resistance of the black glass is greater than that of the light-transmitting channel glass.

[0021] In some embodiments, the acid used in the acid etching treatment is a mixed acid, and the composition range of the mixed acid is: water: hydrochloric acid: nitric acid: hydrofluoric acid = (15-20):(0.1-1):(0.1-1):(0.1-0.5);

[0022] During the acid etching process, the temperature of the mixed acid is 20–30 degrees Celsius, and the etching time is 120–200 minutes.

[0023] In some embodiments, the composition of the black glass is: B2O3: 0.01-15%, SiO2: 55-70%, Al2O3: 0.01-7%, Na2O: 4-10%, K2O: 2-10%, CaO: 1-6%, ZnO: 1-6%, FeO: 0.01-8%, CoO: 0.01-5%, NiO: 0.01-6%, MnO2: 0.01-7%, CeO2: 0.01-2%;

[0024] The composition of the light-transmitting channel glass is: B2O3: 20-40%, SiO2: 20-30%, Al2O3: 5-10%, Na2O: 2-10%, CaO: 1-15%, BaO: 10-30%.

[0025] In some embodiments, cleaning and drying the acid-etched panel includes:

[0026] The panel is immersed in an alkaline solution with a pH value of 12-14.

[0027] The panel is cleaned using ultrasonic waves;

[0028] The panel is cleaned using a combination of ultrasonic waves and pure water.

[0029] The panel is dried using a centrifuge.

[0030] The beneficial effects of this invention are: by setting the light-transmitting channel glass as a panel structure recessed in the black glass, when light is scattered after passing through the light channel, the scattered light is absorbed because the black glass is higher than the light-transmitting channel glass, thus improving the collimation performance of the emitted light; at the same time, the manufacturing process is relatively simple. Attached Figure Description

[0031] Figure 1 This is a schematic diagram of the structure of a micro-light channel array panel;

[0032] Figure 2 This is a schematic diagram of the structure of a light-transmitting channel glass in a micro-light channel array panel;

[0033] Figure 3 This is a schematic diagram of the structure of the light-transmitting channel glass in another type of micro-light channel array panel;

[0034] Figure 4 This is a flowchart of a method for fabricating a micro-channel array panel. Detailed Implementation

[0035] The present invention will be further described below with reference to the accompanying drawings and specific embodiments.

[0036] Reference Figure 1 and Figure 2 This embodiment discloses a light microchannel array panel, including a plurality of light-transmitting channel glass 101 and black glass 102 filled between the plurality of light-transmitting channel glass;

[0037] The black glass 102 forms a panel structure, and the multiple light-transmitting channel glass 101 are all columnar, with each of the light-transmitting channel glass 101 distributed in an array.

[0038] Both ends of each of the light-transmitting channel glass 101 are recessed into the end face of the panel structure. A groove 104 is formed by a recess at the first end face 103 of the first end of the light-transmitting channel glass 101. A groove 106 is formed by a recess at the second end face 105 of the second end of the light-transmitting channel glass 101.

[0039] Black glass refers to glass that is black or nearly black, characterized by its ability to absorb specific frequencies of light, typically visible light. In contrast, transparent glass allows visible light to pass through. Collimation performance can generally be improved by reducing the refractive index of transparent glass and increasing the light absorption properties of black glass, thereby reducing the light divergence angle. Figure 2 As can be seen, when the incident light L1 enters the light-transmitting channel glass 101, a divergent light L2 is generated at the other end of the light-transmitting channel glass 101. L2 is absorbed by the black glass 102 that is higher than the light-transmitting channel glass 101.

[0040] In this embodiment, the panel structure can be viewed as a sheet-like cuboid structure. The end faces in this embodiment mainly refer to the two light-transmitting surfaces of the panel. The array arrangement of the light-transmitting channel glass means that the light-transmitting channel glass has a certain arrangement pattern, such as equidistant arrangement.

[0041] In some embodiments, the light channel directions of each of the light-transmitting channel glass are parallel. Referring to... Figure 2 The direction of the light channel refers to the line connecting the geometric centers of the two light-transmitting surfaces of the light-transmitting glass, such as... Figure 2 The direction A shown by the dashed line is the optical channel direction in this embodiment, in which the optical channel directions are parallel.

[0042] In some embodiments, the light channel direction of each of the light-transmitting channel glass is perpendicular to the end face of the panel structure.

[0043] Reference Figure 2 In this embodiment, the optical channel direction A is perpendicular to the first end face 103 and the second end face 105.

[0044] In some embodiments, the light channel direction of each of the light-transmitting channel glass forms an acute angle with the end face of the panel structure.

[0045] Reference Figure 3 In this embodiment, the optical channel direction B forms an acute angle α with the first end face 103 and the second end face 105. The inclined optical channel and the vertical optical channel can be applied to different scenarios respectively.

[0046] In some embodiments, the black glass has a higher acid resistance than the light-transmitting channel glass.

[0047] In this embodiment, two materials with different acid resistance are used to make the panel. The advantage is that acid etching can be used instead of photolithography or laser drilling, which greatly simplifies the process and makes the production of the panel simpler.

[0048] In some embodiments, the light-transmitting channel glass is cylindrical.

[0049] In this embodiment, when manufacturing the panel, processes such as stacking circular glass rods for fusion and wire drawing are usually used. Therefore, using a cylindrical shape as the shape of the light-transmitting channel glass simplifies the process.

[0050] In some embodiments, the diameter of the light-transmitting channel glass is 5-10 micrometers, the spacing between two adjacent light-transmitting channel glass channels is 6-12 micrometers, and the depth of the light-transmitting channel glass channel is 150-300 micrometers. This size design results in better panel performance, easier processing, and a higher yield.

[0051] Reference Figure 4 This embodiment discloses a method for fabricating an optical microchannel array panel, which includes the following steps:

[0052] Step 410: Perform acid etching on the solid optical microchannel panel;

[0053] Step 420: Clean and dry the acid-etched panel to obtain the target optical microchannel array panel;

[0054] The solid light microchannel panel includes multiple light-transmitting channel glass and black glass filling the spaces between the multiple light-transmitting channel glass. The black glass forms the panel structure. The multiple light-transmitting channel glass are all columnar and distributed in an array. The acid resistance of the black glass is greater than that of the light-transmitting channel glass.

[0055] The above embodiments utilize the different acid resistance properties of the two types of glass to corrode the light-transmitting channel glass, forming grooves.

[0056] In some embodiments, the acid used in the acid etching treatment is a mixed acid, and the composition range of the mixed acid is: water: hydrochloric acid: nitric acid: hydrofluoric acid = (15-20):(0.1-1):(0.1-1):(0.1-0.5).

[0057] During the acid etching process, the temperature of the mixed acid is 20–30 degrees Celsius, and the etching time is 120–200 minutes.

[0058] In some embodiments, the composition of the black glass is: B2O3: 0.01-15%, SiO2: 55-70%, Al2O3: 0.01-7%, Na2O: 4-10%, K2O: 2-10%, CaO: 1-6%, ZnO: 1-6%, FeO: 0.01-8%, CoO: 0.01-5%, NiO: 0.01-6%, MnO2: 0.01-7%, CeO2: 0.01-2%;

[0059] The composition of the light-transmitting channel glass is: B2O3: 20-40%, SiO2: 20-30%, Al2O3: 5-10%, Na2O: 2-10%, CaO: 1-15%, BaO: 10-30%.

[0060] In some embodiments, cleaning and drying the acid-etched panel includes:

[0061] The panel is immersed in an alkaline solution with a pH value of 12-14.

[0062] The panel is cleaned using ultrasonic waves;

[0063] The panel is cleaned using a combination of ultrasonic waves and pure water.

[0064] The panel is dried using a centrifuge.

[0065] This embodiment discloses a method for fabricating an optical microchannel array panel, which includes the following steps:

[0066] A solid microchannel array panel was fabricated using a black substrate glass and a light-transmitting channel glass with the following components:

[0067] B2O3: 35%, SiO2: 22%, Al2O3: 5%, Na2O: 8%, CaO: 10%, BaO: 20%.

[0068] B2O3: 14%, SiO2: 61%, Al2O3: 3%, Na2O: 5%, K2O: 1%, CaO: 1%, ZnO: 1%, FeO: 6%, CoO: 2%, NiO: 3%, MnO2: 2%, CeO2: 1%.

[0069] The solution is prepared using an acid etching apparatus, wherein the solution ratio is: water: hydrochloric acid: nitric acid: hydrofluoric acid = 20:1:1:0.5.

[0070] The acid etching device is equipped with a circulation system, with the circulation rate controlled by a PLC at 15 ml / min, and the temperature of the acid solution controlled by a temperature control system at 25 ± 2℃.

[0071] Place the workpiece vertically into the acid-resistant Teflon sawtooth fixture, and control the etching time to 150 minutes according to the product's light-receiving angle requirements (different etching depths).

[0072] Lift the Teflon clamp containing the workpiece (panel), immerse the clamp in an alkaline solvent with pH=12, concentration of 15%, and temperature of 30℃, ultrasonically clean for 3 minutes, then pass it through 6 ultrasonic pure water tanks for 3 minutes each, and centrifuge to dry for 3 minutes.

[0073] Compared with existing technologies, the emitted light divergence angle of the optical microchannel array panel with a recessed channel end face manufactured in this way is reduced by an average of 34%.

[0074] The step numbers in the above method embodiments are set only for ease of explanation and do not limit the order of the steps. The execution order of each step in the embodiments can be adaptively adjusted according to the understanding of those skilled in the art.

[0075] The above is a detailed description of the preferred embodiments of the present invention. However, the present invention is not limited to the embodiments described. Those skilled in the art can make various equivalent modifications or substitutions without departing from the spirit of the present invention. All such equivalent modifications or substitutions are included within the scope defined by the claims of this application.

Claims

1. A method for fabricating an optical microchannel array panel, characterized in that, The optical microchannel array panel includes multiple light-transmitting channel glasses and black glass filling the spaces between them. The black glass forms a panel structure, and each of the multiple light-transmitting channel glasses is columnar, distributed in an array. The black glass absorbs the diverging light generated when incident light passes through the light-transmitting channel glasses. Both ends of each light-transmitting channel glass are recessed into the end face of the panel structure; the end face refers to the two light-transmitting surfaces of the panel structure. The black glass has a higher acid resistance than the light-transmitting channel glasses. The preparation method includes the following steps: Acid etching treatment was performed on the solid optical microchannel panel; The panel is cleaned and dried after acid etching to obtain the target optical microchannel array panel. The solid light microchannel panel includes multiple light-transmitting channel glass and black glass filling the spaces between the multiple light-transmitting channel glass. The black glass forms the panel structure. The multiple light-transmitting channel glass are all columnar and distributed in an array. The acid resistance of the black glass is greater than that of the light-transmitting channel glass.

2. The method for fabricating an optical microchannel array panel according to claim 1, characterized in that, The acid used in the acid etching treatment is a mixed acid, and the composition range of the mixed acid is: water: hydrochloric acid: nitric acid: hydrofluoric acid = (15~20):(0.1~1):(0.1~1):(0.1~0.5); During the acid etching process, the temperature of the mixed acid is 20–30 degrees Celsius, and the etching time is 120–200 minutes.

3. The method for fabricating an optical microchannel array panel according to claim 1, characterized in that, The composition of the black glass is as follows: B2O3: 0.01-15%, SiO2: 55-70%, Al2O3: 0.01-7%, Na2O: 4-10%, K2O: 2-10%, CaO: 1-6%, ZnO: 1-6%, FeO: 0.01-8%, CoO: 0.01-5%, NiO: 0.01-6%, MnO2: 0.01-7%, CeO2: 0.01-2%; The composition of the light-transmitting channel glass is: B2O3: 20-40%, SiO2: 20-30%, Al2O3: 5-10%, Na2O: 2-10%, CaO: 1-15%, BaO: 10-30%.

4. The method for fabricating an optical microchannel array panel according to claim 1, characterized in that, The panel, after being cleaned and dried following acid etching, includes: The panel is immersed in an alkaline solution with a pH value of 12-14. The panel is cleaned using ultrasonic waves; The panel is cleaned using a combination of ultrasonic waves and pure water. The panel is dried using a centrifuge.

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