Ion beam control apparatus

Abstract

This invention discloses an ion beam control device, comprising an electromagnetic unit and a driving unit. The electromagnetic unit is disposed on one side of a grid and is used to generate a magnetic field. The grid has mesh openings for the ion beam to pass through. The magnetic field generated by the electromagnetic unit covers at least one mesh opening, thereby adjusting the direction and size of the ion beam passing through or needing to pass through the mesh opening through the magnetic field. The driving unit is drively connected to the electromagnetic unit. The grid includes a perforated contour area to open the mesh openings. The driving unit is used to drive the electromagnetic unit to move at any position within the projection range of the perforated contour. This invention intervenes in the ion beam extracted from the ion source before it is completely neutralized by using the magnetic field generated by the electromagnetic unit to adjust the size and direction of the ion beam. Simultaneously, through the cooperation of the driving unit, the electromagnetic unit can adjust the ion beam at any position within the perforated contour, thereby achieving the shaping requirements of the ion beam and convenient adjustment of the shaping at different positions.

Description

Technical Field

[0001] This invention relates to the field of semiconductor manufacturing equipment technology, and in particular to an ion beam control device. Background Technology

[0002] In semiconductor wafer patterning etching technology, ion beam etching, with its advantages of purely physical etching and non-selective application to materials, is widely used in etching processes that remove material in specific directions. With the development of ion beam etching technology, processes based on the principle of ion beam etching, using directionally controllable ion beams to micro-modify sample surfaces and achieve sample shaping requirements, have gradually developed. Currently, ion beams are mostly generated by an ion source and extracted through a grid. Since the grid's dimensions are fixed, the spatial distribution of the ion beam can only be changed by adjusting the grid pitch and gate voltage to achieve parameters such as the etching rate and non-uniformity of different regions during the process. This control process requires grid adjustment, which is complex and has low precision, making it difficult to meet the needs of ion beam control with complex spatial distributions.

[0003] Therefore, how to improve the precision and convenience of the ion beam control process to meet the complex ion beam shaping requirements of sample surfaces is a technical problem that urgently needs to be solved by those skilled in the art. Summary of the Invention

[0004] In view of this, the purpose of the present invention is to provide an ion beam control device to improve the accuracy and convenience of the ion beam control process, so as to meet the complex ion beam shaping requirements of sample surfaces.

[0005] To achieve the above objectives, the present invention provides the following technical solution:

[0006] An ion beam control device includes an electromagnetic unit and a driving unit. The electromagnetic unit is disposed on one side of a grid and is used to generate a magnetic field. The grid has mesh openings for the ion beam to pass through. The magnetic field generated by the electromagnetic unit covers at least one of the mesh openings, so as to adjust the direction and size of the ion beam passing through or needing to pass through the mesh opening through the magnetic field.

[0007] The driving unit is connected to the electromagnetic unit for transmission. The grid includes a perforated outline area to open the mesh. The driving unit is used to drive the electromagnetic unit to move at any position within the projection range of the perforated outline.

[0008] Preferably, in the above-mentioned ion beam control device, the driving unit includes a substrate as a support structure, on which a first driving component and a second driving component are symmetrically arranged. The first driving component and the second driving component are both connected to the electromagnetic unit for combined driving of the electromagnetic unit.

[0009] Preferably, in the above-mentioned ion beam control device, the electromagnetic unit includes a through hole, the through hole covering at least one of the mesh openings, and the electromagnetic unit generates a magnetic field within the through hole.

[0010] Preferably, in the above-mentioned ion beam control device, the electromagnetic unit is an electromagnetic solenoid and includes a ring-shaped magnetic core and a coil wound on the magnetic core. The coil is connected to a current source capable of outputting different current intensities via a wire; the through hole is the inner ring of the magnetic core.

[0011] Preferably, the above-mentioned ion beam control device further includes a base, a top cover, and an inner ring. The base, the top cover, and the inner ring are assembled into a cavity structure and sleeved on the outside of the electromagnetic solenoid. The base, the top cover, and the inner ring are sealed together by an adhesive.

[0012] Preferably, in the above-mentioned ion beam control device, the first driving component and the second driving component are stacked in a direction perpendicular to the substrate; when the first driving component and the second driving component are driven in the same direction at the same speed, they provide a force in a first direction to the electromagnetic unit; when the first driving component and the second driving component are driven in opposite directions at the same speed, they provide a force in a second direction to the electromagnetic unit; the first direction and the second direction are perpendicular to the projection on the substrate.

[0013] Preferably, in the above-mentioned ion beam control device, the first driving component includes a first motor and a first drive wheel connected by transmission. A first steel belt is sleeved on the outer periphery of the first drive wheel. One end of the first steel belt passes around the first lower idler wheel and is fixedly connected to the electromagnetic unit. The other end of the first steel belt passes around the first fixed wheel, and after changing direction from the first interleaved wheel, passes around the first upper idler wheel and is fixedly connected to the electromagnetic unit. The two ends of the first steel belt are connected to the opposite sides of the electromagnetic unit.

[0014] The first upper idler wheel and the first lower idler wheel are disposed on opposite sides of the punching profile and are symmetrical about the center of the punching profile. The first upper idler wheel and the first lower idler wheel are slidably disposed on a slide rail disposed along the second direction and in opposite directions. The first fixed wheel and the first staggered wheel are also disposed on both sides of the punching profile.

[0015] Preferably, in the above-mentioned ion beam control device, both the first driving component and the second driving component include at least three operating states: clockwise uniform speed driving, counterclockwise uniform speed driving, and stop operation.

[0016] Preferably, in the above-mentioned ion beam control device, the driving unit includes a substrate and a third driving component disposed on the substrate. The third driving component includes a third steel strip, a third motor, and a fourth motor. The two ends of the third steel strip are symmetrically fixed to both sides of the electromagnetic unit. One side of the third steel strip passes around a third upper idler wheel and reverses direction vertically, then passes around a third fixed wheel in the opposite direction, passes around a third driving wheel and reverses direction, and then passes through a third lower idler wheel and reverses direction vertically to reach the center of the drilling profile. The third motor is drivenly connected to the third driving wheel, and the third upper idler wheel and the third lower idler wheel are slidably disposed on slides in opposite directions. The third steel strip is symmetrically disposed on one side of the fourth motor.

[0017] Preferably, in the above-mentioned ion beam control device, the third motor and the fourth motor are arranged on the same plane and are symmetrical about the drilling contour.

[0018] Preferably, in the above-mentioned ion beam control device, the electromagnetic unit is disposed between the grid and the ion source, or...

[0019] The electromagnetic unit is disposed between the grid and the lower electrode.

[0020] As can be seen from the above technical solution, the ion beam control device provided by the present invention achieves the driving of the electromagnetic unit through the combination of the staggered wheel system structure of the driving unit and the steel belt structure. The electromagnetic unit then controls the unneutralized ion beam through the action of the magnetic field. The driving unit is connected to the electromagnetic unit for transmission, so as to drive the electromagnetic unit to move at any position within the projection range of the drilling contour. Combined with the magnetic field range of the electromagnetic unit, the beam current magnitude and direction of the ion beam passing through any mesh of the grid can be adjusted, thereby achieving the purpose of modifying different areas on the sample with the ion beam. It should be noted that when there are multiple points on the sample that need modification, the electromagnetic unit can be directly driven by the driving unit after the ion beam control of a single point is completed, without the need to adjust the grid and other equipment. The operation is convenient and efficient. At the same time, when the relative positions of multiple points are fixed, the relative position of the electromagnetic unit is also fixed. Only the driving parameters of the driving unit need to be adjusted. The electromagnetic unit will not be offset due to disassembly and assembly of the equipment, and the control error will not occur, thus improving the accuracy of the ion beam control process. Attached Figure Description

[0021] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0022] Figure 1 This is a schematic diagram of the drive unit structure provided in an embodiment of the present invention;

[0023] Figure 2 for Figure 1 A force diagram of an operating condition;

[0024] Figure 3 for Figure 1 Another force diagram for the operating condition;

[0025] Figure 4 A schematic diagram of the drive unit structure provided in another embodiment of the present invention;

[0026] Figure 5 for Figure 4 A force diagram of an operating condition;

[0027] Figure 6 for Figure 4 Another force diagram for the operating condition;

[0028] Figure 7 This is a schematic diagram of the electromagnetic unit structure;

[0029] Figure 8 This is a schematic diagram of the magnetic core and coil structure;

[0030] Figure 9 This is a schematic diagram illustrating the function of the electromagnetic unit;

[0031] Figure 10 This is a schematic diagram of the sequential control of multiple potentials by an ion beam modulation device.

[0032] Wherein, 10-drive unit; 110-first motor; 120-first drive pulley; 130-first steel belt; 140-first interlaced pulley; 150-first lower idler pulley; 160-first upper idler pulley; 170-first fixed pulley; 210-second motor; 220-second drive pulley; 230-second steel belt; 240-second interlaced pulley; 250-second lower idler pulley; 260-second upper idler pulley; 270-second fixed pulley; 310-third motor; 320-third drive pulley; 330- 340 - Third lower idler wheel; 350 - Third steel belt; 360 - Third fixed wheel; 410 - Fourth motor; 420 - Fourth drive wheel; 430 - Fourth lower idler wheel; 440 - Fourth upper idler wheel; 450 - Fourth fixed wheel; 510 - Slide rail; 520 - Base plate; 60 - Electromagnetic unit; 610 - Through hole; 620 - Magnetic core; 630 - Coil; 710 - Base; 720 - Top cover; 730 - Inner ring; 80 - Grid; 810 - Mesh; 820 - Perforated outline. Detailed Implementation

[0033] The core of this invention is to disclose an ion beam control device to improve the accuracy and convenience of the ion beam control process, so as to meet the complex ion beam shaping requirements of sample surfaces.

[0034] To enable those skilled in the art to better understand the present invention, embodiments of the present invention will be described below with reference to the accompanying drawings. Furthermore, the embodiments shown below do not limit the scope of the invention as described in the claims. Additionally, the complete contents of the configurations shown in the embodiments below are not limited to those necessary for the solution of the invention described in the claims.

[0035] like Figure 1 and Figure 9 As shown, the ion beam control device provided in this embodiment of the invention mainly includes an electromagnetic unit 60 and a driving unit 10. The electromagnetic unit 60 is disposed on one side of and close to a grid 80. The grid 80 is a mesh structure component for extracting the ion beam generated by the ion source. It includes a perforated profile 820 with multiple mesh holes 810 to allow the ion beam to pass through the mesh holes 810 for sample etching. The electromagnetic unit 60 generates a magnetic field to adjust the beam current and direction of the ion beam based on the physical law that charged particles undergo changes in trajectory when subjected to forces in an electric field, magnetic field, or coupled field. Since the ion beam is neutralized after a period of time after being extracted from the ion source, the electromagnetic unit 60 needs to be positioned close to the mesh holes 810 to intervene in the charged ion beam. Simultaneously, the electromagnetic unit 60 controls the ion beam by generating a magnetic field, which, compared to electric field control, avoids the potential danger of high-voltage electric field arcing and improves the safety of the control process.

[0036] Regarding the configuration of the electromagnetic unit 60 and the grid 80, the grid 80 has mesh openings 810 for the ion beam to pass through. The electromagnetic unit 60 must be configured such that the magnetic field it generates during operation covers at least one mesh opening 810 through which the ion beam passes, so that it can control the spatial distribution of the ion beam about to pass through the mesh opening 810 or after passing through the mesh opening 810 through the magnetic field. The driving unit 10 is connected to the electromagnetic unit 60 for driving the electromagnetic unit 60 to move at any position within the projection range of the perforation contour 820. Combined with the magnetic field range of the electromagnetic unit 60, the ion beam control device provided in this embodiment of the invention can adjust the beam current magnitude and direction of the ion beam passing through any mesh opening 810 on the grid 80, thereby achieving the purpose of modifying different areas on the sample with the ion beam. It should also be noted that when there are multiple modification points on the sample, the electromagnetic unit 60 can be directly driven by the drive unit 10 after the ion beam is controlled at a single point, without the need to adjust the grid 80 and other equipment. This makes the operation convenient and efficient. At the same time, when the relative positions of multiple points are fixed, the relative position of the electromagnetic unit 60 is also fixed. Only the driving parameters of the drive unit 10 need to be adjusted. The electromagnetic unit 60 will not be offset due to disassembly or assembly of equipment, and the control error will not occur, thus improving the accuracy of the ion beam control process.

[0037] To improve the control accuracy of the driving unit 10 on the electromagnetic unit 60 provided in the embodiments of the present invention, in some embodiments of the present invention, the driving unit 10 includes a base plate 520 as a bearing structure, and a first driving component and a second driving component are symmetrically arranged on the base plate 520. The first driving component and the second driving component are both connected to the electromagnetic unit 60 for transmission, so as to realize the action of the electromagnetic unit 60 by the combined driving of the first driving component and the second driving component. It should be noted that the first driving component and the second driving component can be a motor or a linkage, etc., which can apply power to the electromagnetic unit 60 while connected to it, and improve the stability of the electromagnetic unit 60's action by driving it in two parts.

[0038] More specifically, in some embodiments of the present invention, the first driving component and the second driving component are stacked in a direction perpendicular to the substrate 520 so that the projections of some structures of the first driving component and the second driving component on the substrate 520 intersect.

[0039] Based on the above structure, the first driving component and the second driving component can independently apply force to the electromagnetic unit 60 to drive the electromagnetic unit 60. In some embodiments of the present invention, when the first driving component and the second driving component drive in the same direction at the same speed, the resultant force they apply to the electromagnetic unit 60 is directed towards the first direction. Furthermore, the first driving component and the second driving component can apply a force in the first direction to the electromagnetic unit 60 in the first direction by rotating in the same direction and in the opposite direction at the same speed. When the first driving component and the second driving component drive in opposite directions at the same speed, they provide a force in the second direction to the electromagnetic unit 60. Similarly, the first driving component and the second driving component can apply a force in the second direction to the electromagnetic unit 60 in the second direction by different driving directions. The projection of the first direction and the second direction perpendicular to the second direction onto the substrate 520 is perpendicular. Thus, the electromagnetic unit 60 can move at any position on the substrate 520 through the independent driving action of the first driving component and the second driving component, and meet the docking requirements with the mesh 810 at different positions on the grid 80.

[0040] Specifically, in some embodiments of the present invention, the first driving assembly includes a first motor 110 and a first drive wheel 120 connected by transmission. The first motor 110 and the first drive wheel 120 are disposed on the same plane parallel to the substrate 520, and the first motor 110 can drive the first drive wheel 120 to rotate through meshing when started. At the same time, a first steel belt 130 is meshed and sleeved on the outer periphery of the first drive wheel 120, so that the rotation of the first drive wheel 120 drives the first steel belt 130 to move. The first steel belt 130 can be bent, and the first steel belt 130 sleeved on the outer periphery of the first drive wheel 120 specifically means that the first steel belt 130 is wound in the opposite direction at the position of the first drive wheel 120, so as to form a U-shaped structure with the first drive wheel 120 as the bottom on both sides of the first drive wheel 120.

[0041] After the first steel belt 130 is wound around the first drive wheel 120, one end of it is wound around the first lower idler wheel 150 to achieve a change of direction. In order to improve the stability of the transmission, one end of the first steel belt 130 is bent at a right angle and reversed when it is wound around the first lower idler wheel 150. After the first steel belt 130 reverses at the position of the first lower idler wheel 150, it is fixedly connected to one side of the electromagnetic unit 60.

[0042] The other end of the first steel belt 130, after passing the first drive wheel 120, continues to extend and passes the first fixed wheel 170. The first fixed wheel 170 is fixedly mounted on the base plate 520 to achieve local tensioning of the first steel belt 130 and to allow the first steel belt 130 to change direction. After passing the first fixed wheel 170, the first steel belt 130 passes the first interlaced wheel 140 again to change direction, so that the first steel belt 130 passing the first interlaced wheel 140 and the first steel belts 130 on both sides of the first drive wheel 120 maintain a parallel structure, which facilitates the transmission of driving force. At the same time, after passing the first interlaced wheel 140 and passing the first upper idler wheel 160, the first steel belt 130 achieves a vertical change of direction and extends to the position of the electromagnetic unit 60 and is fixedly connected to the electromagnetic unit 60.

[0043] In the above structure, after the first steel strip 130 is fixedly connected to the electromagnetic unit 60 at one end, it extends out of the projection range of the perforated profile 820 by the shortest distance, and after passing around the periphery of the perforated profile 820 through multiple wheel structures, it is fixedly connected to the other end of the electromagnetic unit 60. The first steel strip 130, which is connected to the electromagnetic unit 60 from both ends and kept in a taut state, can achieve zero resultant force on the electromagnetic unit 60 by applying tension on both sides when the first motor 110 stops running.

[0044] Furthermore, based on the above structure, the first upper idler wheel 160 and the first lower idler wheel 150 are disposed on opposite sides of the perforation profile 820 to satisfy the requirement that the first steel strip 130 is arranged around the outer periphery of the perforation profile 820. Preferably, the first upper idler wheel 160 and the first lower idler wheel 150 are arranged symmetrically about the center of the perforation profile 820, so that when the first steel strip 130 is connected to the opposite sides of the electromagnetic unit 60, the two connection points are approximately located at the two ends of the same diameter. Furthermore, it should be noted that both the first upper idler wheel 160 and the first lower idler wheel 150 are slidably configured, allowing the electromagnetic unit 60 to be driven along the sliding direction of the first upper idler wheel 160 or the first lower idler wheel 150 through the sliding action of the first steel belt 130 and the first upper idler wheel 160 or the first lower idler wheel 150. In some embodiments of the present invention, the sliding directions of the first upper idler wheel 160 and the first lower idler wheel 150 are both along a second direction, and the slide rails 510 of the first upper idler wheel 160 and the first lower idler wheel 150 are in opposite directions, so that the electromagnetic unit 60 can be driven by both positive and negative forces in the second direction. It should also be noted that the first fixed wheel 170 and the first staggered wheel 140 are also disposed on both sides of the perforated profile 820 to accommodate the winding of the first steel belt 130, thus fulfilling the connection requirement that the two ends of the first steel belt 130 are fixedly connected to the opposite sides of the electromagnetic unit 60.

[0045] It should be noted that the first steel belt 130 can only transmit tensile force to the electromagnetic unit 60, and not thrust force, in order to simplify the stress on the electromagnetic unit 60. At the same time, as a transmission structure, the steel belt is more resistant to ion beam etching than the synchronous belt, and the steel belt has a thinner cross-sectional thickness, which can reduce the physical shielding effect on the ion beam during transmission and avoid serious obstruction of the ion beam.

[0046] Corresponding to the first driving component, in some embodiments of the present invention, the second driving component includes a second motor 210 and a second drive wheel 220 connected by transmission. The symmetrical arrangement of the first and second driving components refers to the symmetrical arrangement of each component, such as the symmetry between the first motor 110 and the second motor 210, and the symmetry between the first drive wheel 120 and the second drive wheel 220. The second motor 210 and the second drive wheel 220 are disposed on the same plane parallel to the substrate 520, but on opposite planes from the plane of the first motor 110. When started, the second motor 210 can drive the second drive wheel 220 to rotate through meshing. At the same time, a second steel strip 230 is sleeved on the outer periphery of the second drive wheel 220. The second steel strip 230 can be bent, and specifically, the second steel strip 230 sleeved on the outer periphery of the second drive wheel 220 means that the second steel strip 230 is wound in the opposite direction at the position of the second drive wheel 220, so as to form a U-shaped structure with the second drive wheel 220 as the bottom on both sides of the second drive wheel 220.

[0047] After the second steel belt 230 is wound around the second drive pulley 220, one end of it is wound around the second lower idler pulley 250 to achieve steering. In order to improve the stability of the transmission, one end of the second steel belt 230 is bent at a right angle and reversed when it is wound around the second lower idler pulley 250. After the second steel belt 230 is reversed at the position of the second lower idler pulley 250, it is fixedly connected to both sides of the electromagnetic unit 60.

[0048] The other end of the second steel belt 230, after passing the second drive wheel 220, continues to extend and passes the second fixed wheel 270. The second fixed wheel 270 is fixedly mounted on the base plate 520 to achieve local tensioning of the second steel belt 230 and to allow the second steel belt 230 to change direction. After passing the second fixed wheel 270, the second steel belt 230 passes the second interlaced wheel 240 again to change direction, so that the second steel belt 230 passing the second interlaced wheel 240 and the second steel belts 230 on both sides of the second drive wheel 220 maintain a parallel structure, which facilitates the transmission of driving force. At the same time, after passing the second interlaced wheel 240 and passing the second upper idler wheel 260, the second steel belt 230 achieves a vertical change direction and extends to the position of the electromagnetic unit 60 and is fixedly connected to the electromagnetic unit 60.

[0049] In the above structure, after the second steel belt 230 is fixedly connected to the electromagnetic unit 60 at one end, it extends out of the projection range of the perforated profile 820 by the shortest distance, and after passing around the periphery of the perforated profile 820 through multiple wheel structures, it is fixedly connected to the other end of the electromagnetic unit 60. The second steel belt 230, which is connected to the electromagnetic unit 60 from both ends and kept in a taut state, can achieve zero resultant force on the electromagnetic unit 60 by applying tension on both sides when the second motor 210 stops running.

[0050] Furthermore, based on the above structure, the second upper idler wheel 260 and the second lower idler wheel 250 are disposed on opposite sides of the perforated profile 820 to satisfy the requirement that the second steel strip 230 is arranged around the outer periphery of the perforated profile 820. Preferably, the second upper idler wheel 260 and the second lower idler wheel 250 are arranged symmetrically about the center of the perforated profile 820, so that when the second steel strip 230 is connected to the opposite sides of the electromagnetic unit 60, the two connection points are approximately located at the two ends of the same diameter. Furthermore, it should be noted that both the second upper idler wheel 260 and the second lower idler wheel 250 are slidably configured, allowing the electromagnetic unit 60 to be driven along the sliding direction of the second upper idler wheel 260 or the second lower idler wheel 250 through the sliding action of the second steel belt 230 with the second upper idler wheel 260 or the second lower idler wheel 250. In some embodiments of the present invention, the sliding directions of the second upper idler wheel 260 and the second lower idler wheel 250 are both along a second direction, and the slide rails 510 of the second upper idler wheel 260 and the second lower idler wheel 250 are in opposite directions, so that the electromagnetic unit 60 can be driven by both positive and negative forces in the second direction. It should also be noted that the second fixed wheel 270 and the second staggered wheel 240 are also disposed on both sides of the perforated profile 820 to accommodate the winding of the second steel belt 230, thus fulfilling the connection requirement that the two ends of the second steel belt 230 are fixedly connected to the opposite sides of the electromagnetic unit 60.

[0051] In the above embodiments, preferably, both the first drive component and the second drive component include at least three operating states: clockwise constant speed drive, counterclockwise constant speed drive, and stop operation. Meanwhile, the independent drive cooperation of the first drive component and the second drive component enables the drive unit 10 to have nine drive transmission states.

[0052] Correspondingly, when both the first drive assembly and the second drive assembly are driven by motors, and when both the first motor 110 and the second motor 210 are rotating counterclockwise at the same speed, such as Figure 2As shown, at this time, the electromagnetic unit 60 is subjected to a force to the right, that is, in the positive direction of the first direction. Specifically, the first motor 110 rotates counterclockwise and pulls the first steel belt 130 on its left side to rotate synchronously through the first drive wheel 120, while the steel belt on the right side of the first drive wheel 120 does not transmit force. The transmission of the first steel belt 130 on the left side of the first drive wheel 120 passes through the first fixed wheel 170 and the first interlaced wheel 140, and then turns through the first upper idler wheel 160 to act on the electromagnetic unit 60. Since the first upper idler wheel 160 is slidably arranged in the positive direction of the second direction, the electromagnetic unit 60 will be subjected to a tension force Fa1 in the positive direction of the first direction and a tension force Fa2 perpendicular to the first direction and in the positive direction of the second direction under the action of the first steel belt 130. Similarly, the second motor 210 rotates counterclockwise and pulls the second steel belt 230 on its left side to rotate synchronously through the second drive wheel 220, while the steel belt on the right side of the second drive wheel 220 does not transmit force. The transmission effect of the second drive wheel 220 on the second steel belt 230 is directly applied to the electromagnetic unit 60 after the second steel belt 230 passes around the second lower idler wheel 250. Since the second upper idler wheel 260 is set to slide in the opposite direction of the second direction, the electromagnetic unit 60 will be subjected to a pulling force Fb1 in the positive direction of the first direction and a pulling force Fb2 perpendicular to the first direction and in the opposite direction of the second direction under the action of the second steel belt 230. Since the first motor 110 and the second motor 210 drive at the same speed, Fa2 can cancel Fb2, so that the force on the electromagnetic unit 60 in the second direction is canceled. At the same time, the electromagnetic unit 60 is subjected to a force of (Fa1+Fb1) in the positive direction of the first direction, which enables the drive unit 10 to drive the electromagnetic unit 60 in the positive direction of the first direction.

[0053] Based on the above embodiments, when the first motor 110 and the second motor 210 are both rotating clockwise at the same speed, the same force analysis can be performed, causing the electromagnetic unit 60 to be subjected to a force in the opposite direction along the first direction, thus realizing the reverse movement of the electromagnetic unit 60 in the first direction, which will not be elaborated further here. Furthermore, in the above embodiments, the first motor 110 and the second motor 210 each include at least three operating states: clockwise uniform speed driving, counterclockwise uniform speed driving, and stopping operation. As can be seen from the above force analysis, when only one motor is driving and the other motor is stopped, the electromagnetic unit 60 is subjected to the resultant force in the area of ​​the angle between the first direction and the second direction, which enables the electromagnetic unit 60 to move obliquely in a straight line. However, in order to improve the stability and accuracy of the movement process of the electromagnetic unit 60, it is preferable that the electromagnetic unit 60 moves along the first direction and the second direction to achieve position adjustment.

[0054] Furthermore, when the first motor 110 rotates counterclockwise and the second motor 210 rotates clockwise, such as Figure 3As shown, similar to the above embodiment, the operation and force state of the first motor 110 remain unchanged. Therefore, the electromagnetic unit 60 will be subjected to a positive tension Fa1 along the first direction and a positive tension Fa2 perpendicular to the first direction along the second direction under the action of the first steel belt 130. During the clockwise rotation of the second motor 210, the second driving wheel 220 pulls the second steel belt 230 on its right side to rotate synchronously, while the steel belt on the left side of the second driving wheel 220 will not transmit force. The transmission of the second steel belt 230 on the right side of the second driving wheel 220 passes through the second fixed wheel 270 and the second interlaced wheel 240, and then turns through the second upper idler wheel 260 to act on the electromagnetic unit 60. Since the second upper idler wheel 260 is slidably arranged along the second direction, the electromagnetic unit 60 will be subjected to a negative tension Fc1 along the first direction and a positive tension Fc2 perpendicular to the first direction under the action of the second steel belt 230. Since the first motor 110 and the second motor 210 drive at the same speed, Fa1 can cancel out Fc1, thus canceling out the force on the electromagnetic unit 60 in the first direction. At the same time, the electromagnetic unit 60 is subjected to a force of (Fa2+Fc2) acting in the positive direction in the second direction, thus enabling the driving unit 10 to drive the electromagnetic unit 60 in the positive direction in the second direction.

[0055] Based on the above embodiments, when the first motor 110 rotates clockwise and the second motor 210 rotates counterclockwise, the same force analysis can be performed, causing the electromagnetic unit 60 to be subjected to a force in the opposite direction along the second direction, thus realizing the reverse movement of the electromagnetic unit 60 in the second direction, which will not be elaborated further here. By combining the above embodiments, the electromagnetic unit 60 can achieve full-position movement within the drilling contour 820 region through the independent driving of the first motor 110 and the second motor 210, satisfying the electromagnetic unit 60's control requirements for the ion beam in different regions of the drilling contour 820.

[0056] In the above embodiments, the driving unit 10 uses two steel strips to drive the electromagnetic unit 60. However, in some embodiments of the present invention, such as... Figure 4 As shown, the drive unit 10 can also drive the electromagnetic unit 60 using a single steel strip. Specifically, the drive unit 10 includes a substrate 520 and a third drive assembly disposed on the substrate 520. The third drive assembly specifically includes a third steel strip 350, a third motor 310, and a fourth motor 410. The third steel strip 350 is a long steel strip with its two ends symmetrically fixed to both sides of the electromagnetic unit 60. Figure 4As shown, the left side of the electromagnetic unit 60 is described. One side of the third steel belt 350 passes around the third upper idler wheel 340 and achieves a vertical reversal. After extending in the positive direction of the second direction, it passes around the third fixed wheel 360 and achieves a reverse reversal. It continues to extend and passes around the third driving wheel 320 to achieve a reverse reversal again. After a vertical reversal via the third lower idler wheel 330, it reaches the center of the perforated profile 820 to form a T-shaped structure. The third motor 310 is connected to the third driving wheel 320 to drive the steel belt. At the same time, the third upper idler wheel 340 and the third lower idler wheel 330 are slidably arranged on the slide rail 510 with opposite directions. That is, the third upper idler wheel 340 is slidably arranged in the positive direction of the second direction, and the third lower idler wheel 330 is slidably arranged in the reverse direction of the second direction. On the right side of the electromagnetic unit 60, i.e. the transmission area of ​​the fourth motor 410, the wheel structure and the steel belt structure are symmetrically arranged. In particular, the third motor 310 and the fourth motor 410 are arranged on the same plane and symmetrically about the perforation outline 820.

[0057] In the above embodiment, the electromagnetic unit 60 is also driven independently by the third motor 310 and the fourth motor 410. When both the third motor 310 and the fourth motor 410 rotate counterclockwise at the same speed, as... Figure 5 As shown, the counterclockwise rotation of the third motor 310 pulls the third steel belt 350 on its left side to rotate synchronously. The transmission action of the third steel belt 350 is reversed by the third fixed wheel 360 and then acts on the electromagnetic unit 60 through the vertical reversal of the third upper idler wheel 340. Since the third upper idler wheel 340 is slidably set in the positive direction of the second direction, the electromagnetic unit 60 will be subjected to a pulling force Fd1 in the opposite direction of the first direction and a pulling force Fd2 perpendicular to the first direction and in the positive direction of the second direction under the action of the third steel belt 350. Similarly, during the counterclockwise rotation of the fourth motor 410, the third steel belt 350 on its left side rotates synchronously. The transmission effect of the third steel belt 350, after passing through the fourth lower idler wheel 430, generates a pulling force Fe2 in the second direction due to the sliding structure of the fourth lower idler wheel 430. At this time, Fe2 can cancel out Fd2, so the electromagnetic unit 60 will only experience a pulling force Fd1 in the first direction under the action of the third steel belt 350, thus achieving movement of the electromagnetic unit 60 in the negative direction of the first direction. It should also be noted that when both the third motor 310 and the fourth motor 410 rotate clockwise at the same speed, similar to the force analysis above, the electromagnetic unit 60 can achieve positive movement in the first direction under the action of the fourth driving wheel 420, the fourth fixed wheel 450, the fourth upper idler wheel 440, and the third lower idler wheel 330 on the left side.

[0058] It should also be noted that, as Figure 6As shown, the force analysis of the electromagnetic unit 60 moving in the positive and negative directions in the second direction by the third motor 310 and the fourth motor 410 through opposite-direction operation is similar to that in the above embodiment, and will not be repeated here.

[0059] The aforementioned driving method reduces the occupancy of the driving structure on the perforation profile 820 through which the ion beam passes. Simultaneously, it enables independent driving of the electromagnetic unit 60 in both the first and second directions. The perpendicular interaction of the first and second directions allows the perforation profile 820 to adopt a coordinate structure, enabling the electromagnetic unit 60 to accurately move to the desired area within the perforation profile 820, thus achieving convenient and accurate control of the ion beam and precise modification of the sample. Figure 10 As shown, for a working condition where there are three points within the punched profile 820 that need to be adjusted, the electromagnetic unit 60 can be turned off after adjusting a single position and restarted when moving to the second adjustment position. Similarly, it can be used to adjust multiple positions.

[0060] In the ion beam modulation device provided in the embodiments of the present invention, such as Figure 7 and Figure 8 As shown, the electromagnetic unit 60 is an electromagnetic solenoid, which includes a through hole 610, and is arranged such that the axis of the through hole 610 is perpendicular to the perforation profile 820. The through hole 610 covers at least one mesh 810. The electromagnetic unit 60 generates a magnetic field within the through hole 610, causing the ion beam passing through the through hole 610 to change its beam magnitude or deflect its direction under the influence of the magnetic field, thus satisfying the need for control over the ion beam in a specific region. Specifically, the electromagnetic unit 60 includes a ring-shaped magnetic core 620 and a coil 630 wound around the magnetic core 620. The coil 630 is connected to a current source via a wire, enabling it to generate a magnetic field under the influence of the current source. Preferably, the current source can output currents of different intensities to produce magnetic fields of different intensities through the magnetic core 620 and the coil 630, thereby meeting the need for differentiated control of the ion beam. The through hole 610 is the inner ring 730 of the magnetic core 620. It should also be noted that coil 630 can achieve higher magnetic flux through multiple turns of winding. The wire diameter and number of turns of coil 630 are determined according to the required magnetic flux, which is usually ≥100Gs. The material of coil 630 is a metal, such as copper, silver, molybdenum or tungsten, while the material of magnetic core 620 is generally permalloy.

[0061] Furthermore, to better protect the electromagnetic solenoid in the plasma environment, in some embodiments of the present invention, the ion beam control device further includes a base 710, a top cover 720, and an inner ring 730. The base 710, top cover 720, and inner ring 730 enclose a cavity structure, and the wound electromagnetic solenoid is encapsulated within the cavity structure to reduce damage to the electromagnetic solenoid from the ion beam. Simultaneously, the base 710, top cover 720, and inner ring 730 are independently processed to allow for smooth insertion of the electromagnetic solenoid. After the electromagnetic solenoid is inserted, the base 710, top cover 720, and inner ring 730 are integrally encapsulated using adhesive to maintain a stable protective structure. It should also be noted that the base 710, top cover 720 and inner ring 730 can be made of polymer plastics, ceramics, graphite, etc., and the adhesive can be polymer glue, ceramic slurry, etc., so that the materials around the electromagnetic solenoid have no effect on the magnetic field formed, thereby improving the precision of the electromagnetic unit 60 in controlling the ion beam.

[0062] Furthermore, in the ion beam control device provided in this embodiment of the invention, the electromagnetic unit 60 can be disposed between the grid 80 and the ion source to control the ion beam before it enters the grid 80; at the same time, the electromagnetic unit 60 can also be disposed between the grid 80 and the lower electrode to control the ion beam flowing out from the grid 80. Both of these can achieve parameter adjustment of the ion beam to meet the modification requirements of the sample.

[0063] The terms "first," "second," "third," "left," and "right," etc., used in the specification, claims, and accompanying drawings of this invention are used to distinguish different objects, not to describe a specific order. Furthermore, the terms "comprising" and "having," and any variations thereof, are intended to cover non-exclusive inclusion. For example, a process, method, system, product, or device that includes a series of steps or units may include steps or units not listed, but rather steps or units not listed.

[0064] The above description of the disclosed embodiments enables those skilled in the art to make or use the invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the invention. Therefore, the invention is not to be limited to the embodiments shown herein, but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. An ion beam modulation device, characterized in that, It includes an electromagnetic unit (60) and a driving unit (10). The electromagnetic unit (60) is disposed on one side of the grid (80) and is used to generate a magnetic field. The grid (80) has mesh holes (810) for ion beams to pass through. The magnetic field generated by the electromagnetic unit (60) covers at least one of the mesh holes (810) so as to adjust the direction and size of the ion beams that pass through or need to pass through the mesh holes (810) by means of the magnetic field. The drive unit (10) is connected to the electromagnetic unit (60) in a transmission manner. The grid (80) includes a perforated outline (820) area to open the mesh (810). The drive unit (10) is used to drive the electromagnetic unit (60) to move at any position within the projection range of the perforated outline (820).

2. The ion beam control device as described in claim 1, characterized in that, The driving unit (10) includes a substrate (520) as a support structure. A first driving component and a second driving component are symmetrically arranged on the substrate (520). The first driving component and the second driving component are both connected to the electromagnetic unit (60) for combined driving of the electromagnetic unit (60).

3. The ion beam control device as described in claim 1, characterized in that, The electromagnetic unit (60) includes a through hole (610) that covers at least one of the mesh holes (810), and the electromagnetic unit (60) generates a magnetic field within the through hole (610).

4. The ion beam control device as described in claim 3, characterized in that, The electromagnetic unit (60) is an electromagnetic solenoid and includes a ring-shaped magnetic core (620) and a coil (630) wound on the magnetic core (620). The coil (630) is connected to a current source capable of outputting different current intensities via a wire. The through hole (610) is the inner ring (730) of the magnetic core (620).

5. The ion beam control device as described in claim 4, characterized in that, It also includes a base (710), a top cover (720) and an inner ring (730), wherein the base (710), the top cover (720) and the inner ring (730) are assembled into a cavity structure and sleeved on the outside of the electromagnetic solenoid, and the base (710), the top cover (720) and the inner ring (730) are sealed and connected by an adhesive.

6. The ion beam control device as described in claim 2, characterized in that, The first driving component and the second driving component are stacked in a direction perpendicular to the substrate (520); when the first driving component and the second driving component drive in the same direction at the same speed, they provide a force in a first direction to the electromagnetic unit (60); when the first driving component and the second driving component drive in opposite directions at the same speed, they provide a force in a second direction to the electromagnetic unit (60); the first direction and the projection of the second direction on the substrate (520) are perpendicular.

7. The ion beam control device as described in claim 6, characterized in that, The first drive assembly includes a first motor (110) and a first drive wheel (120) connected by transmission. A first steel belt (130) is sleeved on the outer periphery of the first drive wheel (120). One end of the first steel belt (130) is fixedly connected to the electromagnetic unit (60) after passing around the first lower idler wheel (150). The other end of the first steel belt (130) passes around the first fixed wheel (170), and after changing direction from the first interleaved wheel (140), passes around the first upper idler wheel (160) and is fixedly connected to the electromagnetic unit (60). Both ends of the first steel belt (130) are connected to the opposite sides of the electromagnetic unit (60). The first upper idler wheel (160) and the first lower idler wheel (150) are disposed on opposite sides of the punching profile (820) and are symmetrical about the center of the punching profile (820). The first upper idler wheel (160) and the first lower idler wheel (150) are slidably disposed on a slide rail (510) that is disposed along the second direction and in the opposite direction. The first fixed wheel (170) and the first staggered wheel (140) are also disposed on both sides of the punching profile (820).

8. The ion beam control device as described in claim 7, characterized in that, Both the first drive component and the second drive component include at least three operating states: clockwise constant speed drive, counterclockwise constant speed drive, and stop operation.

9. The ion beam control device as described in claim 1, characterized in that, The drive unit (10) includes a base plate (520) and a third drive assembly disposed on the base plate (520). The third drive assembly includes a third steel belt (350), a third motor (310) and a fourth motor (410). The two ends of the third steel belt (350) are symmetrically fixed to both sides of the electromagnetic unit (60). One side of the third steel belt (350) passes around the third upper idler wheel (340) and reverses direction vertically, then passes around the third fixed wheel (360) in the opposite direction, passes around the third driving wheel (320) and reverses direction, and then passes through the third lower idler wheel (330) and reverses direction vertically to reach the center of the perforation profile (820). The third motor (310) is connected to the third driving wheel (320) in a transmission, and the third upper idler wheel (340) and the third lower idler wheel (330) are slidably disposed on the slide rail (510) in opposite directions. The third steel belt (350) is symmetrically disposed on one side of the fourth motor (410).

10. The ion beam control device as described in claim 9, characterized in that, The third motor (310) and the fourth motor (410) are arranged on the same plane and are symmetrical about the punching profile (820).

11. The ion beam control device according to any one of claims 1-10, characterized in that, The electromagnetic unit (60) is disposed between the grid (80) and the ion source, or, The electromagnetic unit (60) is disposed between the grid (80) and the lower electrode.

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