Sample transfer device and sample transfer method under air-isolated conditions

Abstract

This disclosure provides a sample transfer device and method under air-isolated conditions, relating to the field of sample detection technology. The sample transfer device is used to transfer samples into or out of a sample chamber under air-isolated conditions, comprising: a sample box, including: a box body detachably disposed on a sample stage within the sample chamber, the box body forming a cavity with an opening at the top for holding the sample, and connecting portions extending outward from opposite ends of the box body in a first direction; a cover, with locking portions formed at positions facing the connecting portions, the locking portions having a locked state connected to the connecting portions and an unlocked state disengaged from the connecting portions; in the locked state, the cover is engaged with the box body to close the opening; in the unlocked state, the cover can detach from the box body; and an operating lever extending from the outside of the sample chamber along a second direction orthogonal to the first direction to the cover, driving the cover to move along the second direction to lock or unlock the locking portions.

Description

Technical Field

[0001] At least one embodiment of this disclosure relates to the field of sample testing technology, and more particularly to a sample transfer device and sample transfer method under air-isolated conditions. Background Technology

[0002] Scanning electron microscopes (SEM) and focused ion beam processing (FIB) devices are core instruments in materials science used for observing sample surface morphology, analyzing composition, and precisely processing micro-areas. The working principle of these instruments relies on the interaction between focused electrons, ions, and other charged particles and the sample. Because charged particles have weak penetrating power and require a specific vacuum environment for stable propagation, both SEM observation and analysis of samples, and FIB micro-area processing, must be performed under vacuum conditions with an unobstructed sample surface to ensure the accuracy of the detection results and the precision of the processing. Summary of the Invention

[0003] In view of this, the present disclosure provides a sample transfer device and a sample transfer method under air-isolated conditions, which can keep the sample in an air-isolated state throughout the entire process of transfer, installation and exposure in the sample chamber.

[0004] As a first aspect of the present disclosure, a sample transfer device under air-isolated conditions is provided for transferring samples into or out of a sample chamber under air-isolated conditions. The sample transfer device includes: a sample box, comprising: a box body detachably disposed on a sample stage within the sample chamber, the box body forming a cavity with an opening at the top for holding the sample, and connecting portions extending outward from opposite ends of the box body in a first direction; a cover, having locking portions formed at positions facing the connecting portions, the locking portions having a locked state connected to the connecting portions and an unlocked state disengaged from the connecting portions; in the locked state, the cover is engaged with the box body to close the opening; in the unlocked state, the cover can be disengaged from the box body; and an operating lever extending from the outside of the sample chamber along a second direction orthogonal to the first direction to the cover, for driving the cover to move along the second direction to lock or unlock the locking portions.

[0005] According to embodiments of the present disclosure, one of the connecting portion and the locking portion includes a groove extending along the second direction, and the other includes a protrusion that engages with the groove.

[0006] According to embodiments of this disclosure, the connecting portion includes the aforementioned groove, with the openings of the two aforementioned grooves facing away from each other. Alternatively, the locking portion includes the aforementioned groove, with the openings of the two aforementioned grooves facing each other.

[0007] According to an embodiment of the present disclosure, the connecting portion includes at least one outwardly extending limiting block; the locking portion includes a downwardly extending connecting arm and a stop arm extending from the lower end of the connecting arm along the second direction; in the locked state, in a vertical orthographic projection, the projection of the stop arm at least partially coincides with the projection of the limiting block.

[0008] According to an embodiment of the present disclosure, the lower surface of the limiting block extends inclined in the second direction; the upper surface of the stop arm is at least partially parallel to the lower surface of the limiting block so as to abut against the lower surface of the limiting block in the locked state.

[0009] According to an embodiment of the present disclosure, a receiving portion is formed on the side of the cover facing the operating lever, and a mating portion is formed at one end of the operating lever near the receiving portion that can be detachably connected to the receiving portion; one of the receiving portion and the mating portion has an external thread, and the other has an internal thread that mates with the external thread.

[0010] According to an embodiment of the present disclosure, the upper surface of the box body is recessed downward to form a receiving groove surrounding the opening. The sample box further includes a sealing ring disposed in the receiving groove and protruding from the upper surface of the box body, so that when the locking part is in the locked state, it abuts against the box body and the cover body to seal the cavity.

[0011] As a second aspect of this disclosure, a method for transferring samples using any of the above-described sample transfer devices is provided, comprising:

[0012] In an air-isolated environment, the sample is loaded into the cavity of the sample box body described above;

[0013] Connect the locking part to the connecting part so that the locking part is in the locked state, thereby sealing the cavity;

[0014] The sample box containing the sample is placed on the sample stage inside the sample chamber;

[0015] The air in the sample chamber is extracted to create a vacuum in the sample chamber.

[0016] Operate the operating lever from outside the sample chamber to move the cover, disengaging the locking part from the connecting part, separating the cover from the box body, and exposing the sample.

[0017] According to embodiments of this disclosure, before operating the control lever from outside the sample chamber, the following steps are included:

[0018] Drive the sample stage to move along the height direction and rotate around the rotation axis of the sample stage so that the receiving part of the cover is aligned with the mating part of the operating rod.

[0019] Drive the operating lever to engage the mating part with the receiving part, and connect the operating lever to the cover.

[0020] As a third aspect of the present disclosure, a detection system is provided, comprising: a sample chamber; an exchange chamber disposed adjacent to the sample chamber; a sample stage disposed within the sample chamber and configured to be translatable along the height direction and rotatable about the rotation axis of the sample stage; any one of the above-mentioned sample transfer devices, wherein the housing of the sample transfer device is detachably disposed on the sample stage, and one end of the operating lever passes through the exchange chamber from outside the exchange chamber and is detachably connected to the cover; and a detector adapted to detect the sample transferred by the sample transfer device.

[0021] In this implementation, the detachable design of the box and sample stage allows for rapid loading and securing of the sample box within the sample chamber, facilitating the overall removal and placement of the sample box. The cavity with an opening at the top of the box provides a stable space for the sample. The connecting parts at both ends of the box engage with the locking parts of the lid, forming a closed structure when locked, preventing gas exchange between the cavity and the external environment and avoiding contact between the sample and air. When unlocked, the lid and box can be separated, allowing for exposure and placement of the sample under air-isolated conditions. The operating lever drives the lid to move in a second direction, causing the locking and connecting parts to slide relative to each other. The locking and unlocking of the lid can be controlled from outside the sample chamber, preventing the sample chamber from being opened during operation and thus avoiding disruption of the vacuum environment or introduction of air. This ensures that the sample remains in an air-isolated state throughout the entire process of sample loading, operation within the chamber, and retrieval, meeting the requirement for maintaining the physical stability of reactive material samples in scanning electron microscopes or focused ion beam processing devices. Attached Figure Description

[0022] The above and other objects, features and advantages of this disclosure will become clearer from the following description of embodiments with reference to the accompanying drawings, in which:

[0023] Figure 1 This schematic diagram illustrates the composition of a detection device according to an embodiment of the present disclosure, wherein the locking part is in a locked state;

[0024] Figure 2 This schematic diagram illustrates the composition of a detection device according to an embodiment of the present disclosure, wherein the locking part is in an unlocked state;

[0025] Figure 3 A perspective view of a sample box according to an embodiment of the present disclosure is shown schematically;

[0026] Figure 4 Schematic illustration Figure 3 A perspective view of the lid of the sample box shown;

[0027] Figure 5 Schematic illustration Figure 3 A perspective view of the sample box shown.

[0028] Figure 6 A perspective view of a sample box according to another embodiment of the present disclosure is shown schematically;

[0029] Figure 7 Schematic illustration Figure 6 A perspective view of the lid of the sample box shown;

[0030] Figure 8 Schematic illustration Figure 6 A perspective view of the sample box shown; and

[0031] Figure 9 A flowchart illustrating a sample transfer method according to an embodiment of the present disclosure is shown schematically.

[0032] The annotations in the attached figures are explained as follows:

[0033] 1. Sample transfer device; 11. Sample box; 111. Box body; 1111. Connecting part; 1112. Restricting block; 1113. Cavity; 112. Cover; 1121. Locking part; 1122. Connecting arm; 1123. Stop arm; 1124. Receiving part; 113. Receiving groove; 114. Limiting part; 12. Operating lever;

[0034] 2. Sample compartment;

[0035] 3. Sample stage;

[0036] 4. Exchange compartment. Detailed Implementation

[0037] To make the objectives, technical solutions, and advantages of this disclosure clearer, the following detailed description is provided in conjunction with specific embodiments and the accompanying drawings.

[0038] The terminology used herein is for the purpose of describing particular embodiments only and is not intended to limit this disclosure. The terms “comprising,” “including,” etc., as used herein indicate the presence of the stated features, steps, operations, and / or components, but do not exclude the presence or addition of one or more other features, steps, operations, or components.

[0039] All terms used herein, including technical and scientific terms, have the meanings commonly understood by those skilled in the art, unless otherwise defined. It should be noted that the terms used herein are to be interpreted in a manner consistent with the context of this specification, and not in an idealized or overly rigid way.

[0040] When using expressions such as "at least one of A, B, and C," the meaning should generally be interpreted according to the understanding of someone skilled in the art. For example, "a system having at least one of A, B, and C" should include, but is not limited to, systems having A alone, having B alone, having C alone, having A and B, having A and C, having B and C, and / or having A, B, and C. Similarly, when using expressions such as "at least one of A, B, or C," the meaning should generally be interpreted according to the understanding of someone skilled in the art. For example, "a system having at least one of A, B, or C" should include, but is not limited to, systems having A alone, having B alone, having C alone, having A and B, having A and C, having B and C, and / or having A, B, and C.

[0041] It should also be noted that the directional terms mentioned in the embodiments, such as "up," "down," "front," "back," "left," and "right," are only for reference to the directions in the accompanying drawings and are not intended to limit the scope of protection of this disclosure. Throughout the drawings, the same elements are represented by the same or similar reference numerals. Conventional structures or constructions will be omitted where they may cause confusion in understanding this disclosure.

[0042] In the process of realizing this disclosure, it was discovered that in practical applications, some material samples are chemically reactive and easily react with oxygen and water vapor in the air, or easily absorb moisture from the air, which leads to changes in the physical properties and chemical composition of the samples, seriously affecting the accuracy of subsequent SEM observation and FIB processing, and even causing the samples to be scrapped.

[0043] Based on the above issues, after the sample is taken out of the prepared inert protective environment, it must be completely isolated from air to avoid contact with air before it can be transferred to the sample chamber of SEM or FIB. Similarly, if it is necessary to take out the processed sample and maintain its physical stability, it must also be transferred out of the sample chamber under the condition of not contacting air at all.

[0044] In view of this, how to meet the requirement of complete air isolation during sample transfer and adapt to the sample chamber structure of SEM and FIB has become a technical problem that urgently needs to be solved in this field.

[0045] The sample transfer apparatus and sample transfer method under air-isolated conditions disclosed in this disclosure will be described in detail below with reference to the accompanying drawings. Unless otherwise specified, the features in the following embodiments and implementations can be combined with each other.

[0046] Figure 1 The diagram schematically illustrates the composition of a detection device according to an embodiment of the present disclosure, wherein the locking portion is in a locked state. Figure 2 The diagram schematically illustrates the composition of a detection device according to an embodiment of the present disclosure, wherein the locking part is in an unlocked state. Figure 3 A perspective view of a sample box according to an embodiment of the present disclosure is schematically shown. Figure 4 Schematic illustration Figure 3 The diagram shows a perspective view of the sample box lid. Figure 5 Schematic illustration Figure 3 The sample box shown is a three-dimensional view of its body.

[0047] As a first aspect of the present disclosure, a sample transfer device 1 under air-isolated conditions is provided. The sample transfer device 1 is used to transfer samples into or out of a sample chamber 2 under air-isolated conditions. Figure 1 and Figure 2 As shown, the sample transfer device 1 includes a sample box 11 and an operating lever 12. Figures 3 to 5 As shown, the sample box 11 includes a box body 111 and a cover 112. The box body 111 is detachably mounted on the sample stage 3 within the sample chamber 2. The box body 111 forms a cavity 1113 with an opening at the top for holding the sample. The box body 111 is positioned in a first direction ( Figure 3 The two opposite ends of the cover 112 (shown in the X direction) extend outward to form connecting portions 1111. Locking portions 1121 are formed at positions facing the connecting portions 1111 on the cover 112. The locking portions 1121 have a locked state connected to the connecting portions 1111. Figure 1 The states shown), and the unlocked state where it is disconnected from the connecting part 1111. Figure 2 (As shown in the diagram). In the locked state, the cover 112 engages with the box 111 to close the opening; in the unlocked state, the cover 112 can detach from the box 111. The operating lever 12 extends from the outside of the sample chamber 2 along a second direction orthogonal to the first direction (…). Figure 3 The Y direction shown extends to the cover 112 to drive the cover 112 to move along the second direction, thereby locking or unlocking the locking part 1121.

[0048] In this embodiment, the sample box 111, which is detachably connected to the sample stage 3, can be fixed to the sample stage 3 inside the sample chamber 2 via either the instrument exchange chamber 4 or directly onto the sample chamber 2, allowing the sample to be transferred into the sample chamber 2 under air-isolated conditions. An operating rod 12 extends from the outside of the sample chamber 2 along a second direction to the cover 112. Once the sample chamber 2 reaches a set vacuum level, the operating rod 12 connects to the cover 112, driving the cover 112 to move along the second direction. The locking part 1121 and the connecting part 1111 slide relative to each other, releasing the locked state and allowing the sample to be exposed to the vacuum environment of the sample chamber 2. After the sample is tested or processed, the cover 112 is driven to move in the second direction by the operating rod 12, so that the locking part 1121 and the connecting part 1111 enter the locked state. The cover 112 and the box 111 are combined to close the opening, realizing the re-sealing of the sample in the vacuum environment. Then the sample box 11 is taken out from the sample chamber 2, completing the transfer of the sample out of the sample chamber 2 under air-isolated conditions.

[0049] Thus, through the cooperation of the box 111, the cover 112 and the operating rod 12, the sample box 11 can be opened, closed and transferred in a vacuum environment by remote operation outside the sample chamber 2, avoiding contact between the sample and air throughout the process. This meets the requirement of maintaining the physical property stability of active material samples in scanning electron microscopes or focused ion beam processing devices. Moreover, the device has a simple structure and is easy to manufacture and operate.

[0050] Sample chamber 2 is a sealed chamber in a scanning electron microscope or focused ion beam processing apparatus used to contain samples. During the operation of the scanning electron microscope or focused ion beam processing apparatus, a high vacuum environment must be maintained inside sample chamber 2 to meet the requirements for electron beam or ion beam propagation and imaging.

[0051] The sample chamber 2 can be equipped with a sample stage 3 that can be raised, rotated and moved horizontally, which is used to support and adjust the position and orientation of the sample.

[0052] Sample chamber 2 is connected to the outside via exchange chamber 4 or by directly opening the chamber door to allow samples to be transferred in and out. The chamber wall is equipped with interfaces or channels for external mechanisms such as operating rods 12 to extend into the interior for remote operation, thereby completing actions such as clamping, moving, or opening the sample without disrupting the vacuum environment inside the chamber. Sample chamber 2 provides space for the installation and operation of sample transfer device 1. The sample box 11 is under vacuum protection throughout the entire process of opening, closing, and transferring within the chamber, ensuring that the sample is completely isolated from air during the transfer, testing, processing, and removal stages.

[0053] The exchange chamber 4 is a transition chamber in a scanning electron microscope or focused ion beam processing device that connects the external environment and the sample chamber 2. It can also be called a sample exchange chamber or a pre-vacuum chamber.

[0054] An openable isolation valve is provided between the exchange chamber 4 and the sample chamber 2. The exchange chamber 4 itself is equipped with an independent vacuum system and a vent valve to the atmosphere.

[0055] In some illustrative embodiments, when the sample is introduced, the exchange chamber 4 is first opened to the atmosphere. The assembled sample box 11 is placed inside the exchange chamber 4, and the outer chamber door is closed. The exchange chamber 4 is then evacuated. Once the vacuum level inside the exchange chamber 4 matches that of the sample chamber 2, the isolation valve is opened, and the sample box 11 is pushed from the exchange chamber 4 into the sample chamber 2 using the operating lever 12 (or push rod), and the box body 111 is fixed to the sample stage 3. At this time, the sample box 11 is still in a locked state where the cover 112 and the box body 111 are joined and closed, and the sample is not yet exposed. After the sample box 11 is fixed, inside the sample chamber 2, the cover 112 is moved along the second direction using the operating lever 12, causing the locking part 1121 to disengage from the connecting part 1111, thus separating the cover 112 from the box body 111. This completes the opening operation of the sample box 11 inside the sample chamber 2, exposing the sample to the vacuum environment of the sample chamber 2. After sample testing or processing is completed, within sample chamber 2, the cover 112 is moved along the second direction by the operating lever 12, causing the locking part 1121 and the connecting part 1111 to enter a locked state. The cover 112 and the box body 111 then seal the opening, completing the resealing of the sample box 11 within sample chamber 2. Subsequently, the sample box 11 is pulled back from sample chamber 2 to exchange chamber 4 by the operating lever 12, the isolation valve is closed, the exchange chamber 4 is vented to the atmosphere, and the sample box 11 is then removed.

[0056] According to the embodiments of this disclosure, the opening and closing operations of the sample box 11 are both completed within the sample chamber 2. The exchange chamber 4 can serve as a channel for the sample box 11 to enter and exit, as well as a vacuum transition chamber, ensuring that the sample chamber 2 maintains a high vacuum state during the process of the sample box 11 entering and exiting, without the need to release the entire sample chamber 2. This ensures that the sample is isolated from air throughout the opening and closing operation, and also improves the working efficiency of the instrument.

[0057] It should be understood that the embodiments disclosed herein are not limited thereto. The method of introducing the sample cartridge 11 can be selected according to the specific configuration of the instrument (i.e., scanning electron microscope or focused ion beam processing device). For scanning electron microscopes or focused ion beam processing devices that are not equipped with an exchange chamber 4, or when the volume of the sample cartridge 11 exceeds the threshold allowed by the instrument and cannot be transferred between the exchange chamber 4 and the sample chamber 2, the sample cartridge 11 containing the sample can be directly placed on the sample stage 3 inside the sample chamber 2 under atmospheric conditions. At this time, the sample cartridge 11 is in a locked state with the cover 112 and the cartridge body 111 combined and sealed, and the sample is not exposed to the external environment. After closing the sample chamber 2 door, a vacuum operation is performed on the sample chamber 2 to bring the interior of the sample chamber 2 to the set vacuum level. Once the vacuum level meets the requirements, the operating lever 12 extends from the outside of the sample chamber 2 along the second direction to the cover 112. The operating lever 12 connects to the cover 112, and the cover 112 is moved along the second direction by the operating lever 12, causing the locking part 1121 and the connecting part 1111 to slide relative to each other, releasing the locking state. The cover 112 separates from the box 111, and the sample box 11 opens inside the sample chamber 2, exposing the sample to the vacuum environment. After the sample is tested or processed, the cover 112 is moved along the second direction by the operating lever 12 inside the sample chamber 2, causing the locking part 1121 and the connecting part 1111 to enter the locking state. The cover 112 and the box 111 then seal the opening. Subsequently, the sample chamber 2 is vented to the atmosphere, the chamber door is opened, and the sample box 11 is removed. This method can also achieve air isolation during the entire process of sample introduction, operation inside the chamber, and transfer, and is suitable for instruments that do not have an exchange chamber 4, or for scenarios that cannot transfer the sample box 11 through the exchange chamber 4, or for simplified operation procedures.

[0058] It should be understood that in scanning electron microscopes or focused ion beam processing devices equipped with an exchange chamber 4, the operating lever 12 can be a lever provided by the instrument itself. In scanning electron microscopes or focused ion beam processing devices without an exchange chamber 4, the operating lever 12 can be configured separately.

[0059] After the assembled sample box 11 is fixed to the sample stage 3, the height and position of the sample box 11 relative to the operating lever 12 can be adjusted by raising and / or rotating the sample stage 3, so that the cover 112 can be connected to the operating lever 12, and the locking part 1121 can be locked or unlocked by pulling or pushing the operating lever 12.

[0060] According to an embodiment of the present disclosure, a limiting part 114 is formed at the bottom of the box body 111, which is connected to the fixing part of the sample stage 3.

[0061] As an example, the fixing part may include a screw extending upward from the upper surface of the sample stage 3 to form an external thread, and the limiting part 114 may be an internal thread formed by the inward recess of the bottom wall of the box 111 that can engage with the external thread of the screw. By screwing the threads together, the box 111 and the sample stage 3 can be detachably fixed, ensuring that the box 111 remains stable during the lifting, rotation or translation of the sample stage 3.

[0062] It should be understood that the embodiments disclosed herein are not limited thereto. For example, the threaded connection methods of the fixing part and the limiting part 114 can be interchanged, that is, the fixing part can form an internal thread, and the limiting part 114 can include a rod part extending downward from the bottom wall of the box body 111, and the end of the rod part opposite to the receiving cavity is provided with an external thread that matches the internal thread of the fixing part. As another example, the fixing part of the sample stage 3 can be configured as a slot structure, and the limiting part 114 of the box body 111 can be configured as a claw or protrusion that cooperates with the slot. Locking or releasing is achieved by the claw inserting into the slot and sliding in a preset direction, thus forming a slot-type detachable connection. As yet another example, the fixing part of the sample stage 3 can be provided with a pin hole, and the limiting part 114 of the box body 111 can be provided with an elastic pin. Fixing is achieved by inserting the pin into the pin hole, and separation is achieved by removing the pin, thus forming a pin-type detachable connection. For example, the fixing part of the sample stage 3 and the limiting part 114 of the box body 111 can be connected by magnetic attraction, that is, magnetic elements are respectively set at the bottom of the sample stage 3 and the box body 111, and detachable fixing is achieved by magnetic attraction. Alternatively, the fixing part of the sample stage 3 can be set as a quick-clamping mechanism, which clamps and releases the limiting part 114 of the box body 111 by opening and closing the jaws. All of the above connection methods can achieve detachable installation and removal of the box body 111 on the sample stage 3, and can be selected according to the actual configuration and operational requirements of the instrument, ensuring connection stability while also considering ease of assembly and disassembly.

[0063] According to embodiments of this disclosure, the main body of the box 111 can be a generally cylindrical or cuboid shape. The cavity 1113 can be set to a generally cubic shape, which is suitable for block samples with relatively uniform size; the cavity 1113 can also be set to a generally elliptical cylinder or racetrack-shaped cylinder, which is suitable for strip-shaped or sheet-shaped samples, so that the sample can be better positioned and supported within the cavity 1113.

[0064] It should be understood that the embodiments disclosed herein are not limited thereto. For example, the shape of the main body can also be set as a general hemisphere, prism, etc. Furthermore, the shape of the main body of the box 111 can be consistent with the shape of the cavity 1113, or it can adopt a different shape design than the cavity 1113, for example, the main body can be a cylinder while the internal cavity 1113 is a cuboid, to meet the requirements of the sample stage 3 fixing structure and to optimize the volume of the cavity 1113. The shape of the cavity 1113 can also be set as a general cone or inverted cone, that is, the cross-sectional dimensions of the cavity 1113 gradually change along the depth direction. This design is beneficial for sample centering and positioning or for facilitating sample removal using gravity assistance. All of the above-mentioned shape designs can achieve stable placement of the sample within the cavity 1113, and can be selected according to the specific shape of the sample, sample preparation requirements, and the operating space of the instrument.

[0065] In this context, a roughly rectangular prism refers to a prism whose main body shape largely conforms to the characteristics of a cuboid, but may have slight deviations in aspects such as size proportions, the straightness of edges, and the right angles of corners. For example, the five faces of the main body may not be perfect rectangles, or its corners may not be perfect right angles (e.g., they may be rounded), but overall it still presents the appearance of a cuboid. The definitions of roughly cylindrical, hemispherical, and prism can all be understood by referring to the definition of a roughly rectangular prism, and will not be elaborated upon here.

[0066] According to embodiments of this disclosure, the sample can be fixed in the cavity 1113 inside the box 111 under an inert gas protective atmosphere (e.g., in a glove box) according to the characteristics of the sample and the sample preparation requirements of the instrument detection process. Then, the cover 112 is tightly connected and fixed to the connecting part 1111 of the box 111 through the locking part 1121.

[0067] According to embodiments of this disclosure, such as Figure 5 As shown, the upper surface of the box body 111 is recessed downward to form a receiving groove 113 surrounding the opening. The sample box 11 also includes a sealing ring (not shown in the figure). The sealing ring is disposed in the receiving groove 113 and protrudes from the upper surface of the box body 111 so that when the locking part 1121 is in the locked state, it abuts against the box body 111 and the cover body 112 to seal the cavity 1113.

[0068] As an example, the sealing ring can be made of elastomeric materials, such as fluororubber, silicone rubber, nitrile rubber, or EPDM rubber.

[0069] As an example, the cross-sectional shape of the receiving groove 113 can be set to rectangular, trapezoidal, or semi-circular, etc., to accommodate sealing rings with different cross-sectional shapes. For example, when the sealing ring is an O-ring, the cross-section of the receiving groove 113 can be set to rectangular or semi-circular to provide a stable installation space for the O-ring and prevent the sealing ring from twisting or shifting during compression. When the sealing ring is a gasket with a rectangular cross-section, the cross-section of the receiving groove 113 can be set to a rectangle that matches the shape of the gasket, so that the gasket can be securely embedded in the receiving groove 113.

[0070] In this embodiment, the sealing ring is positioned and limited by the receiving groove 113 to prevent displacement or detachment during the movement of the cover 112, ensuring that the sealing ring remains within the sealing area between the box 111 and the cover 112. The sealing ring protrudes from the upper surface of the box 111, so that in the locked state, the cover 112 first contacts and compresses the sealing ring. The elastic deformation of the sealing ring fills the gap between the box 111 and the cover 112, forming a reliable sealing interface that effectively prevents external gas from entering the cavity 1113. The elastic deformation of the sealing ring generates a continuous rebound force in the locked state, keeping the cover 112 and the box 111 pressed together. Even under the influence of vibration or temperature changes, the sealing ring maintains a sealed contact, ensuring the airtightness of the cavity 1113 during sample transfer and instrument vacuum environments. Meanwhile, the sealing ring is located on the upper surface of the box 111 rather than on the cover 112. This ensures that when the cover 112 is separated from the box 111, the sealing ring remains on the box 111, facilitating maintenance and replacement of the sealing ring and preventing it from falling off or being damaged due to frequent movement of the cover 112. Through this design, the sample box 11 can form a reliable seal in the locked state, ensuring that the sample is in an air-isolated protective state before being transferred into the sample chamber 2, during the vacuuming process of the sample chamber 2, and after the sample is transferred out, meeting the stringent requirements of reactive material samples for complete air isolation.

[0071] According to an embodiment of the present disclosure, one of the connecting portion 1111 and the locking portion 1121 includes a groove extending in a second direction, and the other includes a protrusion that engages with the groove.

[0072] As an example, such as Figure 3 and Figure 4 As shown, the locking part 1121 includes a groove, and the openings of the two grooves are opposite each other.

[0073] In this embodiment, the connecting portion 1111 on the box body 111 includes a protrusion that mates with the groove, and the protrusions of the two connecting portions 1111 are arranged opposite to each other. In the locked state, the cover 112 covers the opening of the box body 111, and the protrusion is inserted into the groove from the inside. The groove limits the protrusion, thus achieving the sealing of the cover 112 and the box body 111. In the unlocked state, the operating lever 12 drives the cover 112 to move in the second direction, the protrusion slides out of the groove, and the cover 112 separates from the box body 111.

[0074] Alternatively, the connecting part 1111 includes a groove, with the openings of the two grooves facing away from each other.

[0075] In this embodiment, the locking portion 1121 on the cover 112 includes a protrusion that mates with a groove, with two protrusions facing each other. In the locked state, the cover 112 covers the opening of the box 111, and the protrusion is inserted into the groove from the outside. The groove limits the protrusion, thus fixing the cover 112 and the box 111 in a vertical direction orthogonal to the second direction (…). Figure 3 The cover 112 is constrained in the Z direction (as shown), and the friction between the groove and the protrusion keeps the cover 112 and the box 111 in close contact. In the unlocked state, the operating lever 12 drives the cover 112 to move in the second direction, the protrusion slides out of the groove, and the cover 112 separates from the box 111.

[0076] In this embodiment, by configuring the connecting part 1111 and the locking part 1121 as a groove extending along the second direction and a protrusion cooperating with the groove, locking and unlocking between the cover 112 and the box 111 can be achieved simply by relative movement along the second direction. In the locked state, the protrusion is embedded in the groove, and the limiting effect of the groove sidewall on the protrusion restricts the degree of freedom of the cover 112 in the direction orthogonal to the second direction, ensuring that the cover 112 and the box 111 maintain accurate alignment and stable engagement in the closed state, thereby ensuring the sealing effect at the opening. In the unlocked state, the operating lever 12 drives the cover 112 to move along the second direction, and the protrusion slides out along the extension direction of the groove, realizing the smooth separation of the cover 112 and the box 111, avoiding operation failure or sample damage due to jamming or tilting. The groove and protrusion adopt a mating structure that extends along the second direction, unifying the driving direction of the operating lever 12 and the locking and unlocking movement direction into the same direction. This allows the driving force applied by the operating lever 12 outside the sample chamber 2 to be directly and efficiently converted into the relative movement between the cover 112 and the box 111 without the need for an intermediate conversion mechanism, simplifying the operation process and improving the reliability and accuracy of remote operation in a vacuum environment.

[0077] In some illustrative embodiments, the protrusion may be provided with a slope or a guide ramp. The insertion end of the protrusion may be chamfered or rounded to form a guide ramp; or the overall shape of the protrusion may be wedge-shaped, that is, the protrusion gradually thickens or thins along the insertion direction. When the cover 112 moves along the second direction, the slope first contacts the edge of the groove. Through the guiding effect of the slope, part of the driving force applied by the operating rod 12 is converted into a component force that causes the cover 112 and the box 111 to produce a small displacement in the vertical direction or other directions orthogonal to the second direction, guiding the protrusion to slide smoothly into the groove and avoiding jamming or inability to insert due to misalignment. When the locked state is about to be reached, the mating surface of the wedge-shaped protrusion and the groove gradually fits together. Through the mutual compression between the slope and the inner wall of the groove, a pre-tightening force is generated, making the cover 112 and the box 111 more tightly combined in the locked state, thereby enhancing the sealing effect at the opening.

[0078] In other illustrative embodiments, the groove opening edge can be chamfered or rounded to match the raised slope, further reducing insertion resistance. The inner wall of the groove can be configured as a slope matching the raised slope, i.e., the groove cross-section is trapezoidal or dovetail-shaped, and the raised cross-section is correspondingly trapezoidal or dovetail-shaped. When the raised is inserted into the groove, the slope of the groove and the slope of the raised fit together, forming a limit in the vertical direction and the horizontal direction orthogonal to the second direction, in addition to the constraint along the second direction, preventing the cover 112 from accidentally disengaging due to vibration or external force in the locked state, thus improving the stability of the lock.

[0079] In other illustrative embodiments, the raised slope can be multi-segmented, for example, first a gentler guide slope for initial guidance, followed by a steeper locking slope to generate preload. A stepped inner wall can be provided within the groove at a corresponding position to cooperate with the multi-segmented slope. This design enables different functions at different stages of the cover 112's movement: in the initial insertion stage, the gentler guide slope provides low-resistance guidance; as it approaches the locking position, the steeper locking slope generates greater compressive force against the groove's inner wall, creating a reliable locking effect.

[0080] In other illustrative embodiments, the engagement between the groove and the protrusion can employ an elastic locking structure. For example, the protrusion can be configured as an elastic protrusion, meaning it is hollow inside or made of an elastic material. When inserted into the groove, it undergoes elastic deformation and returns to its original shape after entering the groove. The elastic restoring force forms an interference fit with the inner wall of the groove, achieving self-locking. Alternatively, the sidewall of the groove can be configured as an elastic arm. When the protrusion is inserted, the elastic arm opens outwards, and after the protrusion enters, the elastic arm rebounds, clamping the protrusion. This design provides continuous locking force in the locked state, preventing loosening due to vibration or temperature changes, while unlocking only requires overcoming the elastic force to pull the protrusion out.

[0081] In other illustrative embodiments, the extension direction of the groove can be set to form a slight angle with the second direction, that is, the groove extends along the second direction while being slightly inclined in the vertical direction, and the protrusion is correspondingly set as a matching inclined protrusion. When the cover 112 moves along the second direction to lock, the inclined mating surface causes the cover 112 to gradually press against the box 111 to achieve pre-tightening; when unlocking, the inclined mating surface causes the cover 112 to separate from the box 111 in the initial stage of movement, avoiding adhesion or jamming caused by long-term pressing.

[0082] Figure 6 A perspective view of a sample box according to another embodiment of the present disclosure is shown schematically. Figure 7 Schematic illustration Figure 6 The diagram shows a perspective view of the sample box lid. Figure 8 Schematic illustration Figure 6 The sample box shown is a three-dimensional view of its body.

[0083] According to embodiments of this disclosure, such as Figures 6 to 8 As shown, the connecting portion 1111 includes at least one outwardly extending limiting block 1112. The locking portion 1121 includes a downwardly extending connecting arm 1122 and a stop arm 1123 extending from the lower end of the connecting arm 1122 along a second direction. In the locked state, in a vertical orthographic projection, the projection of the stop arm 1123 at least partially coincides with the projection of the limiting block 1112.

[0084] According to embodiments of this disclosure, connecting portions 1111 are respectively disposed at both ends of the box body 111 facing each other in a first direction. That is, connecting portions 1111 are disposed on both sides of the box body 111 facing each other in the first direction, and each connecting portion 1111 includes at least one limiting block 1112. Connecting arms 1122 and stop arms 1123 are respectively disposed on the cover 112 at positions corresponding to the connecting portions 1111 on both sides of the box body 111.

[0085] In some illustrative embodiments, a limiting block 1112 can be provided at each end of the housing 111 in the first direction, and the cover 112 can be provided with two connecting arms 1122 and a stop arm 1123, forming a single-point double-sided locking structure, which is simple in structure and easy to operate. When multiple limiting blocks 1112 are provided on each side, for example, two limiting blocks 1112 are provided at intervals along the second direction on each side, and the cover 112 can be provided with multiple connecting arms 1122 and stop arms 1123, forming a multi-point double-sided locking structure, which can further improve the stability and vibration resistance of the locked state.

[0086] In other illustrative embodiments, the shape of the limiting block 1112 can be set as a cuboid, wedge, cylinder, or hemisphere, as long as it can form a projection overlap with the stop arm 1123 in the vertical direction. The connecting arm 1122 can be set as a plate-like structure or column-like structure extending in the vertical direction, with its lower end connected to the stop arm 1123 to form an L-shaped or inverted L-shaped cross section. The length of the stop arm 1123 extending in the second direction can be designed to match the size of the limiting block 1112 to ensure that the projection overlap area has sufficient overlap in the locked state, thereby providing reliable vertical constraint.

[0087] In this embodiment, by overlapping the projections of the limiting block 1112 and the stop arm 1123 in the vertical direction, in the locked state, the stop arm 1123 is located above or below the limiting block 1112. When the cover 112 is subjected to an upward or downward external force, the stop arm 1123 and the limiting block 1112 form an abutment in the vertical direction, thereby restricting the degree of freedom of the cover 112 in the vertical direction orthogonal to the second direction and preventing the cover 112 from detaching from the box 111. The connecting arm 1122 extends downward to provide support for the stop arm 1123 and extends it to a vertical height position corresponding to the limiting block 1112. The stop arm 1123 extends from the lower end of the connecting arm 1122 along the second direction, so that locking and unlocking operations can be achieved simply by moving the cover 112 along the second direction. When it is necessary to open the cover, the sample stage 3 can be moved downward, causing the box 111 to move downward, so that the box 111 is separated from the cover 112, opening the sample box 11 and exposing the sample inside, realizing the transfer of the sample under ambient air conditions. When the cover 112 moves along the second direction and the projection of the stop arm 1123 and the limiting block 1112 in the vertical direction overlaps, it enters the locked state; when the cover 112 moves in the opposite direction along the second direction and the projection of the stop arm 1123 and the limiting block 1112 in the vertical direction is misaligned, it releases the locked state. This design unifies the driving direction of the operating lever 12 with the locking and unlocking motion direction into the same direction. The operating lever 12 drives the cover 112 to move from the outside of the sample chamber 2 along the second direction, which can directly realize the locking or unlocking of the cover 112 and the box 111. There is no need for a complex motion conversion mechanism, which improves the reliability and convenience of remote operation in a vacuum environment.

[0088] According to embodiments of this disclosure, such as Figures 6 to 8 As shown, the lower surface of the limiting block 1112 extends at an angle in a second direction. The upper surface of the stop arm 1123 is at least partially parallel to the lower surface of the limiting block 1112 so as to abut against the lower surface of the limiting block 1112 in the locked state.

[0089] The lower surface of the limiting block 1112 gradually tilts downward in the second direction along the direction in which the cover 112 can be driven into the locked state by the operating lever 12. The upper surface of the stop arm 1123 is at least partially parallel to the lower surface of the limiting block 1112. When the operating lever 12 drives the cover 112 to move in the locking direction along the second direction, the upper surface of the stop arm 1123 slides along the lower surface of the limiting block 1112. As the operating lever 12 continues to drive the cover 112 to move, the two inclined surfaces gradually press together, converting part of the driving force applied by the operating lever 12 in the second direction into a vertical pressing force towards the box 111, so that the cover 112 and the box 111 are tightly pressed together. When the operating lever 12 drives the cover 112 to move in the unlocking direction in the opposite direction along the second direction, the inclined surface guides the stop arm 1123 to slide out smoothly, releasing the locked state.

[0090] After the cover 112 and the box 111 are assembled via the connecting part 1111 and the locking part 1121, the connection between the cover 112 and the box 111 can be further stabilized by adding auxiliary positioning components such as screws, pins, and buckles. In this embodiment, the auxiliary positioning components can be installed after the sample box 11 is assembled but before it is placed in a vacuum environment to enhance the vibration resistance and connection reliability of the sample box 11 during the transfer process, and to prevent the relative displacement or unlocking of the cover 112 and the box 111 due to accidental collisions or vibrations during hand handling, transfer through the exchange chamber 4, or installation on the sample stage 3.

[0091] In this embodiment, before the sample box 11 is placed into the sample chamber 2 or the exchange chamber 4, the operator can first disengage the auxiliary fasteners such as screws, pins, and clips, leaving only a basic lock formed by the connecting part 1111 and the locking part 1121 between the cover 112 and the box 111. Then, the sample box 11 is placed into the sample chamber 2 through the exchange chamber 4 or directly, the chamber door is closed, and a vacuum is drawn. Once the vacuum level reaches the set value, the operating lever 12 extends from the outside of the sample chamber 2 along the second direction to the cover 112, driving the cover 112 to move, causing the locking part 1121 to disengage from the connecting part 1111, thus separating the cover 112 from the box 111. Since the auxiliary fasteners have been removed before the sample box 11 is placed into the instrument, the cover 112 can move freely under the drive of the operating lever 12, without being constrained by the auxiliary fasteners, ensuring that the sample box 11 can be opened smoothly in a vacuum environment.

[0092] According to embodiments of this disclosure, such as Figure 3 , Figure 4 , Figure 6 and Figure 7 As shown, a receiving portion 1124 is formed on the side of the cover 112 facing the operating lever 12, and a mating portion is formed at the end of the operating lever 12 near the receiving portion 1124 that can be detachably connected to the receiving portion 1124.

[0093] According to embodiments of this disclosure, the sample stage 3 has rotation and lifting functions, enabling it to support the sample box 11 and allow it to move freely within the sample chamber 2. By rotating the sample stage 3, the orientation of the sample box 11 in the horizontal plane can be adjusted, aligning the receiving portion 1124 on the cover 112 with the mating portion of the operating rod 12 in the circumferential direction. By lifting the sample stage 3, the vertical height of the sample box 11 can be adjusted, aligning the receiving portion 1124 with the mating portion in the vertical direction. Once the receiving portion 1124 and the mating portion are aligned, the operating rod 12 can be moved along the second direction to smoothly connect with the cover 112.

[0094] In this embodiment, when it is necessary to move the cover 112, the operating lever 12 moves along the second direction until the mating part contacts and connects with the receiving part 1124, thereby fixing the operating lever 12 to the cover 112. Subsequently, when the operating lever 12 moves in the second direction by pushing or pulling, the driving force is transmitted to the cover 112, causing the cover 112 to move along the second direction, thus achieving the locking or unlocking operation of the locking part 1121 and the connecting part 1111.

[0095] As an example, one of the receiving part 1124 and the mating part has an external thread, and the other has an internal thread that mates with the external thread.

[0096] In this embodiment, a detachable connection between the operating rod 12 and the cover 112 is achieved through a threaded connection. When the operating rod 12 needs to drive the cover 112 to move, the operating rod 12 moves along the second direction until the mating part contacts the receiving part 1124. By rotating the operating rod 12, the external thread and the internal thread are engaged, thus fixing the operating rod 12 and the cover 112 in a fixed connection. Subsequently, when the operating rod 12 moves in the second direction, the driving force can be transmitted to the cover 112, realizing the locking or unlocking operation of the cover 112. The threaded connection method has the advantages of reliable connection, good centering, and not easily loosening itself in a vacuum environment. It can ensure that the cover 112 and the operating rod 12 remain firmly connected during the pushing and pulling process of the operating rod 12, avoiding operational failure due to loose connection.

[0097] It should be understood that the embodiments disclosed herein are not limited to this. For example, the receiving part 1124 and the mating part can be connected by a slot. Specifically, the receiving part 1124 can be provided with a slot, and the mating part can be provided with a claw that mates with the slot. By moving the operating rod 12 in the second direction, the claw is inserted into the slot, and then rotated in the circumferential direction at a certain angle to lock it. After rotating in the opposite direction, it can be pulled out in the second direction to disengage. This connection method is convenient to operate and has a short connection and disengagement stroke.

[0098] Figure 9 A flowchart illustrating a sample transfer method according to an embodiment of the present disclosure is shown schematically.

[0099] As a second aspect of this disclosure, a method for transferring samples using any of the above-described sample transfer devices is provided, such as... Figure 9 As shown, the method includes operations S900 to S940.

[0100] When operating the S900, the sample is loaded into the cavity of the sample box in an air-isolated environment.

[0101] In operation S910, the locking part is connected to the connecting part, so that the locking part is in a locked state to close the cavity.

[0102] In operation S920, the sample box containing the sample is placed on the sample stage inside the sample chamber.

[0103] When operating S930, the air in the sample chamber is extracted, creating a vacuum in the sample chamber.

[0104] When operating S940, the operating lever is operated from outside the sample chamber to drive the cover to move, causing the locking part to disengage from the connecting part, separating the cover from the box body to expose the sample.

[0105] In this embodiment, by loading the sample into the cavity 1113 of the housing 111 in an air-isolated environment and connecting the locking part 1121 with the connecting part 1111 to seal the cavity 1113 with the cover 112, the sample remains in a sealed and protected state throughout the initial loading and subsequent transfer processes. After placing the sample housing 11 containing the sample on the sample stage 3 inside the sample chamber 2 and evacuating the sample chamber 2, the operating lever 12 outside the sample chamber 2 drives the cover 112 to move, disengaging the locking part 1121 from the connecting part 1111 and separating the cover 112 from the housing 111 to expose the sample. At this point, the sample chamber 2 is under vacuum, and the exposed sample is unaffected by air. Thus, the sample remains in an air-isolated protective state throughout the entire process from loading, transfer, installation, evacuation to final exposure, preventing changes in the properties of reactive material samples due to contact with air and ensuring the accuracy of subsequent testing or processing.

[0106] According to embodiments of this disclosure, before operating the lever from outside the sample chamber, the following steps are included:

[0107] The sample stage is moved along its height and rotated about its axis of rotation, aligning the receiving part of the cover with the mating part of the operating lever; and

[0108] Drive the operating lever to engage the mating part with the receiving part, connecting the operating lever to the cover.

[0109] In this implementation, before operating the lever 12 from outside the sample chamber 2, the sample stage 3 is first driven to move along the height direction and rotate around its rotation axis, aligning the receiving part 1124 of the cover 112 with the mating part of the lever 12. Then, the lever 12 is driven to engage the mating part with the receiving part 1124, connecting the lever 12 to the cover 112. Through the multi-degree-of-freedom movement of the sample stage 3, the spatial position and orientation of the sample box 11 within the sample chamber 2 can be precisely adjusted, compensating for potential positional deviations during installation or operation. This ensures precise alignment of the receiving part 1124 and the mating part in three-dimensional space, guaranteeing a smooth connection between the lever 12 and the cover 112. The height-direction translation and rotation around the axis of the sample stage 3, combined with the linear movement of the lever 12, transfer the multi-degree-of-freedom alignment requirements of the lever 12 to the sample stage 3, simplifying the structural design of the lever 12 and allowing it to complete the connection simply by linear movement in a single direction. After the receiving part 1124 and the mating part are accurately aligned, the operating rod 12 can move along the second direction to achieve a reliable connection between the two, providing a stable force transmission path for the subsequent movement of the cover 112. This avoids connection failure or jamming due to misalignment, improving the reliability and accuracy of remote operation in a vacuum environment. Through the above alignment and connection steps, a stable connection is ensured between the operating rod 12 and the cover 112 before driving the cover 112 from outside the sample chamber 2, providing a prerequisite guarantee for the smooth opening or closing of the sample box 11 in a vacuum environment.

[0110] As an example, the above method may also include, after the sample is tested or processed, driving the cover 112 to move in the opposite direction by operating lever 12 to relock the locking part 1121 and the connecting part 1111, and after sealing the cavity 1113, taking the sample box 11 out of the sample chamber 2, so as to realize the sample is transferred out under the condition of being isolated from air, forming a complete input and output closed loop.

[0111] In some illustrative embodiments, the method of transferring samples using the sample transfer device 1 under air-isolated conditions includes:

[0112] After releasing the vacuum from sample chamber 2, open the chamber door, fix the sample box 11 containing the sample onto the sample stage 3 inside sample chamber 2, close the chamber door of sample chamber 2, and evacuate sample chamber 2.

[0113] According to the design parameters of the sample box 11, the sample stage 3 is raised, lowered and rotated so that the internal threaded hole of the receiving part 1124 of the cover 112 reaches a horizontal position and direction that can be connected to the operating rod 12.

[0114] After the vacuum level in sample chamber 2 reaches the set value, open the channel valve between exchange chamber 4 and sample chamber 2, push the operating rod 12 from exchange chamber 4 into sample chamber 2, align the external thread of operating rod 12 with the internal thread of cover 112, rotate operating rod 12 to make the external thread and internal thread engage, and connect and fix operating rod 12 to cover 112.

[0115] Pull the operating lever 12 out of the sample chamber 2 and back into the exchange chamber 4, closing the channel valve between the two chambers. As can be seen from the camera in the sample chamber 2, the cover 112 is pulled out by the operating lever 12 and separated from the box body 111, thus isolating the sample from air entering the sample chamber 2, achieving the desired effect.

[0116] After the testing and processing are completed, the sample stage 3 is used to readjust the position of the box 111 back to the same level and direction as the groove of the box 111 and the protrusion of the cover 112.

[0117] Open the channel valve between sample chamber 2 and exchange chamber 4, and push the operating lever 12 until the cover 112 and the box 111 are tightly connected and fixed by the groove and the protrusion.

[0118] Rotate the operating lever 12 to disengage it from the internal threaded hole of the cover 112, pull the operating lever 12 back into the exchange chamber 4, and close the channel valve between the sample chamber 2 and the exchange chamber 4.

[0119] After releasing the vacuum from the sample chamber 2, the chamber door is opened and the sample box 11 is taken out, thus achieving the desired effect of isolating the sample from air and allowing it to exit the sample chamber 2.

[0120] Other features of this implementation have become apparent in the above embodiments and will not be repeated here.

[0121] As a third aspect of this disclosure, a detection system is provided. For example... Figure 1 and Figure 2 As shown, the detection system includes a sample chamber 2, an exchange chamber 4, a sample stage 3, any one of the aforementioned sample transfer devices 1, and a detector. The exchange chamber 4 is arranged adjacent to the sample chamber 2. The sample stage 3 is disposed within the sample chamber 2 and is configured to be able to translate along the height direction and rotate about the rotation axis of the sample stage 3. The housing 111 of the sample transfer device 1 is detachably mounted on the sample stage 3, and one end of the operating lever 12 passes through the exchange chamber 4 from outside and is detachably connected to the cover 112. The detector is suitable for detecting the samples transferred by the sample transfer device 1.

[0122] The detector may include a scanning electron microscope (SEM) or a focused ion beam processing device (FIB).

[0123] The detection system may also include an imaging device that can image the sample chamber 2 to determine the orientation of the sample box 11 in the sample chamber 2.

[0124] Imaging devices may include charge-coupled device cameras (CCD cameras).

[0125] In this implementation, the sample stage 3 can translate along the height direction and rotate around the rotation axis, enabling the sample box 11 to be precisely aligned with the operating lever 12 or adjusted to the detection position; the exchange chamber 4 is arranged adjacent to the sample chamber 2 to ensure that the sample chamber 2 maintains a high vacuum state during the process of sample box 11 being transferred in and out; the operating lever 12 passes through the exchange chamber 4 from outside and can be detachably connected to the cover 112, realizing remote linear drive and simplifying the operation structure in a vacuum environment; the detector detects the sample after it is opened, and after the detection is completed, the sample box 11 is resealed and transferred out, so that the sample is always isolated from air during the entire process of transfer, detection and transfer, which meets the requirement of maintaining the stability of the physical properties of active material samples, and at the same time realizes efficient transfer and accurate detection in a vacuum environment.

[0126] Other features of this implementation have become apparent in the above embodiments and will not be repeated here.

[0127] The embodiments of this disclosure have been described above. However, these embodiments are for illustrative purposes only and are not intended to limit the scope of this disclosure. Although various embodiments have been described above, this does not mean that the measures in the various embodiments cannot be used advantageously in combination. The scope of this disclosure is defined by the appended claims and their equivalents. Various substitutions and modifications can be made by those skilled in the art without departing from the scope of this disclosure, and all such substitutions and modifications should fall within the scope of this disclosure.

Claims

1. A sample transfer device under air-isolated conditions, used to transfer samples into or out of a sample chamber under air-isolated conditions, the sample transfer device comprising: Sample box, including: The box body is detachably mounted on the sample stage inside the sample chamber. The box body forms a cavity with an opening at the top for holding the sample. The two facing ends of the box body extend outward in a first direction to form connecting portions. The cover has locking portions formed at positions facing the connecting portion. Each locking portion has a locked state connected to the connecting portion and an unlocked state disconnected from the connecting portion. In the locked state, the cover is engaged with the box to close the opening. In the unlocked state, the cover can be detached from the box. An operating lever extends from the outside of the sample chamber along a second direction orthogonal to the first direction to the cover, thereby driving the cover to move along the second direction to lock or unlock the locking part.

2. The sample transfer device according to claim 1, wherein, One of the connecting portion and the locking portion includes a groove extending along the second direction, and the other includes a protrusion that engages with the groove.

3. The sample transfer device according to claim 2, wherein, The connecting part includes the groove, and the openings of the two grooves face away from each other. Alternatively, the locking portion may include the grooves, with the openings of the two grooves facing each other.

4. The sample transfer device according to claim 1, wherein, The connecting portion includes at least one outwardly extending limiting block; The locking portion includes a downwardly extending connecting arm and a stop arm extending from the lower end of the connecting arm along the second direction. In the locked state, in the orthographic projection along the vertical direction, the projection of the stop arm at least partially coincides with the projection of the limiting block.

5. The sample transfer device according to claim 4, wherein, The lower surface of the limiting block extends inclined in the second direction; The upper surface of the stop arm is at least partially parallel to the lower surface of the limiting block, so that it abuts against the lower surface of the limiting block in the locked state.

6. The sample transfer device according to claim 1, wherein, The cover has a receiving portion on the side facing the operating lever, and the end of the operating lever near the receiving portion has a mating portion that can be detachably connected to the receiving portion. One of the receiving part and the mating part has an external thread, and the other has an internal thread that mates with the external thread.

7. The sample transfer device according to claim 1, wherein, The upper surface of the box is recessed downwards to form a receiving groove surrounding the opening, and the sample box further includes: A sealing ring is disposed in the receiving groove and protrudes from the upper surface of the box body, so that when the locking part is in the locked state, it abuts against the box body and the cover body to seal the cavity.

8. A method for transferring a sample using the sample transfer apparatus as described in any one of claims 1 to 7, comprising: In an air-isolated environment, the sample is loaded into the cavity of the sample box body; Connect the locking part to the connecting part, so that the locking part is in the locked state to close the cavity; The sample box containing the sample is placed on the sample stage inside the sample chamber; The air inside the sample chamber is extracted, creating a vacuum in the sample chamber. Operating the lever from outside the sample chamber drives the cover to move, disengaging the locking part from the connecting part and separating the cover from the box to expose the sample.

9. The method according to claim 8, wherein, Before operating the lever from outside the sample chamber, the following steps are also included: Drive the sample stage to move along the height direction and rotate around the rotation axis of the sample stage, so that the receiving part of the cover is aligned with the mating part of the operating rod; Drive the operating lever to engage the mating part with the receiving part, thereby connecting the operating lever to the cover.

10. A detection system, comprising: Sample compartment; An exchange chamber is located adjacent to the sample chamber; The sample stage, disposed within the sample chamber, is configured to be able to translate along the height direction and rotate about the rotation axis of the sample stage. The sample transfer device as described in any one of claims 1 to 7, wherein the housing of the sample transfer device is detachably disposed on the sample stage, and one end of the operating lever passes through the exchange chamber from outside the exchange chamber and is detachably connected to the cover; The detector is suitable for detecting samples transferred by the sample transfer device.

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