A focused ion beam microscope cryogenic sample stage
By designing a low-temperature sample stage with angle adjustment and clamping mechanisms in a focused ion beam microscope, the problems of fixed sample stage angle and low-temperature burns were solved, achieving flexible observation and safe sampling.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- CENT SOUTH UNIV SCI PARK DEV CO LTD
- Filing Date
- 2025-04-16
- Publication Date
- 2026-06-16
AI Technical Summary
The current focused ion beam microscope has a fixed sample stage angle, which makes it difficult to meet the observation requirements of complex three-dimensional structure analysis, and there is a risk of burns when sampling after low-temperature observation.
A low-temperature sample stage with an angle adjustment mechanism and a clamping mechanism was designed. The angle of the sample stage is adjusted by a worm gear, and the sample is raised by a clamp after the observation to avoid contact with the low-temperature surface.
It enables flexible adjustment of the sample stage angle and safe sample removal, meeting the needs of observation at different angles and reducing the risk of low-temperature burns.
Smart Images
Figure CN224366000U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of microscopy technology, and in particular to a low-temperature sample stage for a focused ion beam microscope. Background Technology
[0002] Focused ion beam microscopy (FIB) is a high-precision instrument that focuses an ion beam to the nanoscale to achieve imaging by detecting the interaction between ions and the sample. It typically uses an ion beam generated by a liquid metal ion source (such as gallium ions), which is accelerated and focused before irradiating the sample surface to obtain an electronic image of the sample.
[0003] The angle of existing sample stages is usually fixed, which means that the product can only be observed from a fixed angle. However, when performing complex three-dimensional structural analysis, the fixed sample stage often cannot meet the needs of observing the sample from different angles, resulting in low flexibility.
[0004] Furthermore, when observing biological samples, to preserve their true structure, the samples must be kept in a sufficiently low temperature environment, typically within the range of -150°C to -196°C. However, this low-temperature environment presents safety hazards after the observation period. Because the sample stage remains at an extremely low temperature after observation, staff are highly susceptible to low-temperature burns if they accidentally come into contact with the samples while handling them. This not only increases the risk of operation but may also cause unnecessary damage to the samples. Utility Model Content
[0005] To address the aforementioned technical problems, this invention provides a low-temperature sample stage for a focused ion beam microscope.
[0006] This utility model provides the following technical solution: a low-temperature sample stage for a focused ion beam microscope, comprising a U-shaped frame, with hollow tubes rotatably mounted through both ends of the U-shaped frame. The opposing surfaces of the two hollow tubes are connected to a hollow sample stage, and the hollow tubes are internally connected to the hollow sample stage. The other ends of the two hollow tubes are respectively rotatably connected to a cooling medium inlet pipe and a cooling medium outlet pipe via rotary joints. An angle adjustment mechanism is provided on the outer surface of one of the hollow tubes. Two parallel clamping plates are provided on the upper surface of the hollow sample stage, and a mounting plate is provided on the lower side of the hollow sample stage. The mounting plate contains a clamping mechanism capable of driving the two clamping plates to fix the sample.
[0007] Preferably, the angle adjustment mechanism includes a worm gear mounted on the outer surface of the hollow tube, two fixing blocks mounted on the outer surface of the U-shaped frame, a worm rotatably mounted between the two fixing blocks, and the worm meshing with the worm gear.
[0008] Preferably, the clamping mechanism includes two U-shaped guide rods inserted into the mounting plate from both ends along its length. One end of the U-shaped guide rod is connected to the clamping plate, and the other end of the U-shaped guide rod is equipped with a slider. A first spring is sleeved on the outer surface of the U-shaped guide rod, and the two ends of the first spring abut against the inner wall of the mounting plate and the slider, respectively.
[0009] Preferably, a telescopic rod is installed on the lower surface of the hollow sample stage, the end of the telescopic rod is connected to the upper surface of the mounting plate, and a second spring is sleeved on the outer surface of the telescopic rod, with the two ends of the second spring abutting against the hollow sample stage and the mounting plate respectively.
[0010] Preferably, the outer surface of the U-shaped frame is provided with angle scale lines around the hollow tube, and a pointer is installed on the outer surface of the hollow tube.
[0011] Preferably, two limiting rods are installed on the inner walls of both sides along the length of the mounting plate, and the ends of the limiting rods extend to the other side of the slider and are equipped with end caps.
[0012] Compared with existing technologies, the beneficial effects of this utility model are:
[0013] (1) By setting up a worm and a worm wheel, the hollow tube can be rotated when the worm is turned, thereby achieving the purpose of adjusting the angle of the hollow sample stage. Furthermore, by setting up angle scale lines and pointers, the angle can be precisely adjusted, thus meeting the needs of observing samples at different angles and providing high flexibility.
[0014] (2) This utility model uses a clamping mechanism to bring two clamping plates closer to each other, thereby achieving the purpose of clamping and fixing the sample. When the sample is removed after the observation, the mounting plate can be lifted upwards, which can drive the two clamping plates to lift the sample and separate it from the surface of the hollow sample stage. Therefore, it can avoid contact with the surface of the hollow sample stage when removing the sample, reduce the risk of low temperature burns, and has high safety. Attached Figure Description
[0015] Figure 1 This is one of the three-dimensional schematic diagrams of the overall structure of this utility model;
[0016] Figure 2 This is the second three-dimensional schematic diagram of the overall structure of this utility model;
[0017] Figure 3 for Figure 1 Enlarged diagram of A in the middle;
[0018] Figure 4 This is a schematic diagram of the clamping mechanism in this utility model. Detailed Implementation
[0019] like Figures 1 to 4As shown, a low-temperature sample stage for a focused ion beam microscope includes a U-shaped frame 100, a hollow tube 101, a hollow sample stage 102, a rotary joint 103, a cooling medium input pipe 104, a cooling medium output pipe 105, a mounting plate 106, a clamping plate 107, an angle adjustment mechanism 200, a worm gear 201, a fixing block 202, a worm 203, a clamping mechanism 300, a U-shaped guide rod 301, a slider 302, a first spring 303, a telescopic rod 400, a second spring 401, an angle scale line 500, a pointer 501, a limiting rod 600, and an end 601.
[0020] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present utility model. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments.
[0021] In the description of this utility model, unless otherwise stated, "a plurality of" means two or more; the terms "upper," "lower," "left," "right," "inner," "outer," "front end," "rear end," "head," "tail," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. In addition, the terms "first," "second," "third," etc., are used for descriptive purposes only and should not be construed as indicating or implying relative importance.
[0022] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "connected" and "linked" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.
[0023] like Figures 1 to 4As shown, hollow tubes 101 are rotatably mounted through both ends of the U-shaped frame 100. The opposing surfaces of the two hollow tubes 101 are connected to a hollow sample stage 102, and the hollow tubes 101 are internally connected to the hollow sample stage 102. The other ends of the two hollow tubes 101 are rotatably connected to a cooling medium inlet pipe 104 and a cooling medium outlet pipe 105 respectively via rotary joints 103. The cooling medium enters the hollow sample stage 102 through the cooling medium inlet pipe 104 and flows out through the cooling medium outlet pipe 105, circulating continuously. The cooling medium lowers the surface temperature of the hollow sample stage 102, thus cooling the sample placed on its surface. An angle adjustment mechanism 200 is provided on the outer surface of one of the hollow tubes 101. The angle adjustment mechanism 200 is used to adjust the angle of the hollow sample stage 102 and the observation angle of the sample. The upper surface of the hollow sample stage 102 is provided with two parallel clamping plates 107. The lower side of the hollow sample stage 102 is provided with a mounting plate 106. The mounting plate 106 is provided with a clamping mechanism 300 that can drive the two clamping plates 107 to fix the sample. When the sample is placed between the two clamping plates 107, the clamping mechanism 300 can drive the two clamping plates 107 to clamp and fix the sample.
[0024] The angle adjustment mechanism 200 includes a worm gear 201 mounted on the outer surface of the hollow tube 101. Two fixing blocks 202 are mounted on the outer surface of the U-shaped frame 100. A worm gear 203 is rotatably mounted between the two fixing blocks 202, and the worm gear 203 is meshed with the worm gear 201. When it is necessary to adjust the observation angle of the sample, the worm gear 203 can be turned. Since the worm gear 203 and the worm gear 201 are meshed with each other, the hollow tube 101 can be rotated, and the hollow sample stage 102 can be rotated through the hollow tube 101, thereby achieving the purpose of adjusting the sample angle. Furthermore, the self-locking property between the worm gear 203 and the worm gear 201 ensures that the hollow sample stage 102 remains stable after the angle is adjusted, thereby improving the stability during the observation process.
[0025] Angle scale lines 500 are set around the hollow tube 101 on the outer surface of the U-shaped frame 100. A pointer 501 is installed on the outer surface of the hollow tube 101. When the hollow tube 101 drives the hollow sample stage 102 to rotate, the angle of the pointer 501 will also change. Therefore, the angle of the sample can be precisely adjusted by simply observing the verticality of the angle scale line 500 corresponding to the pointer 501.
[0026] The clamping mechanism 300 includes two U-shaped guide rods 301 inserted into the mounting plate 106 from both ends along its length. One end of the U-shaped guide rod 301 is connected to the clamping plate 107, and the other end of the U-shaped guide rod 301 is equipped with a slider 302. A first spring 303 is sleeved on the outer surface of the U-shaped guide rod 301. The two ends of the first spring 303 abut against the inner wall of the mounting plate 106 and the slider 302, respectively. When fixing the sample, the U-shaped guide rod 301 is first pulled to the side to move the two clamping plates 107 away from each other. Then the sample is placed between the two clamping plates 107, and the elastic force of the first spring 303 pushes the two clamping plates 107 closer to each other, thus achieving the purpose of clamping and fixing.
[0027] A telescopic rod 400 is installed on the lower surface of the hollow sample stage 102. The end of the telescopic rod 400 is connected to the upper surface of the mounting plate 106. A second spring 401 is sleeved on the outer surface of the telescopic rod 400. The two ends of the second spring 401 abut against the hollow sample stage 102 and the mounting plate 106 respectively. When the sample is removed after the observation, the mounting plate 106 can be pushed upward to drive the two clamping plates 107 to lift the sample and separate it from the surface of the hollow sample stage 102. Therefore, it can avoid contact with the surface of the hollow sample stage 102 when the sample is removed, reducing the risk of low temperature burns and ensuring high safety. When the mounting plate 106 is released, the combined force of its gravity and the elasticity of the second spring 401 can make the clamping plates 107 apply sufficient pressure to the upper surface of the hollow sample stage 102. When the hollow sample stage 102 is rotated to an inclined angle, the clamping plates 107 can still ensure the stability of its clamping of the sample. Two limiting rods 600 are installed on the inner walls of both sides along the length of the mounting plate 106. The end of the limiting rod 600 extends to the other side of the slider 302 and is equipped with an end 601. By setting the limiting rod 600, the limiting effect on the slider 302 can be improved, and the clamping stability of the clamping plate 107 can be guaranteed.
[0028] The working principle of this utility model is as follows:
[0029] In use, the sample is first placed between the two clamping plates 107. The spring force applied by the first spring 303 to the clamping plates 107 is used to clamp and fix the sample. Then, the cooling medium is introduced into the hollow sample stage 102 from the cooling medium inlet pipe 104 and flows out from the cooling medium outlet pipe 105 to achieve circulation, thereby reducing the surface temperature of the hollow sample stage 102 and the temperature of the sample. At this time, the sample can be observed. During the observation process, the worm 203 can be turned. Since the worm 203 and the worm wheel 201 mesh with each other, they can drive the hollow tube 101 to rotate, and through the hollow tube 101, drive the hollow tube 101 to rotate. The hollow sample stage 102 rotates to adjust the sample angle. With the help of the angle scale line 500 and the pointer 501, the sample angle can be precisely adjusted, thus meeting the needs of observing the sample at different angles. It is highly flexible. After the observation is completed, the supply of cooling medium is stopped. At this time, the surface temperature of the hollow sample stage 102 is still low. The mounting plate 106 can be lifted upward, which can drive the two clamping plates 107 to lift the sample and separate it from the surface of the hollow sample stage 102. Therefore, when removing the sample, contact with the surface of the hollow sample stage 102 can be avoided, reducing the risk of low-temperature burns and ensuring high safety.
[0030] The above are merely preferred embodiments of this utility model, but the scope of protection of this utility model is not limited thereto. Any equivalent substitutions or modifications made by those skilled in the art within the scope of the technology disclosed in this utility model, based on the technical solution and inventive concept of this utility model, should be included within the scope of protection of this utility model.
Claims
1. A low-temperature sample stage for a focused ion beam microscope, comprising a U-shaped frame (100), characterized in that: Hollow tubes (101) are rotatably mounted through both ends of the U-shaped frame (100). The opposite surfaces of the two hollow tubes (101) are connected to a hollow sample stage (102), and the hollow tubes (101) are connected to the interior of the hollow sample stage (102). The other ends of the two hollow tubes (101) are rotatably connected to a cooling medium inlet pipe (104) and a cooling medium outlet pipe (105) respectively through a rotary joint (103). An angle adjustment mechanism (200) is provided on the outer surface of one of the hollow tubes (101). Two parallel clamping plates (107) are provided on the upper surface of the hollow sample stage (102). A mounting plate (106) is provided on the lower side of the hollow sample stage (102). A clamping mechanism (300) is provided inside the mounting plate (106) to fix the sample by driving the two clamping plates (107).
2. The low-temperature sample stage for a focused ion beam microscope according to claim 1, characterized in that: The angle adjustment mechanism (200) includes a worm gear (201) installed on the outer surface of the hollow tube (101), two fixing blocks (202) are installed on the outer surface of the U-shaped frame (100), a worm (203) is rotatably installed between the two fixing blocks (202), and the worm (203) is meshed with the worm gear (201).
3. The low-temperature sample stage for a focused ion beam microscope according to claim 1, characterized in that: The clamping mechanism (300) includes two U-shaped guide rods (301) inserted into the mounting plate (106) from both ends along its length. One end of each U-shaped guide rod (301) is connected to the clamping plate (107), and a slider (302) is mounted on the other end of each U-shaped guide rod (301). A first spring (303) is sleeved on the outer surface of the U-shaped guide rod (301), and both ends of the first spring (303) abut against the inner wall of the mounting plate (106) and the slider (302), respectively.
4. The low-temperature sample stage for a focused ion beam microscope according to claim 1, characterized in that: A telescopic rod (400) is installed on the lower surface of the hollow sample stage (102). The end of the telescopic rod (400) is connected to the upper surface of the mounting plate (106). A second spring (401) is sleeved on the outer surface of the telescopic rod (400). The two ends of the second spring (401) abut against the hollow sample stage (102) and the mounting plate (106) respectively.
5. A low-temperature sample stage for a focused ion beam microscope according to claim 2, characterized in that: Angle scale lines (500) are provided on the outer surface of the U-shaped frame (100) around the hollow tube (101), and a pointer (501) is installed on the outer surface of the hollow tube (101).
6. The low-temperature sample stage for a focused ion beam microscope according to claim 3, characterized in that: Two limiting rods (600) are installed on the inner walls of both sides of the mounting plate (106) along its length. The ends of the limiting rods (600) extend through to the other side of the slider (302) and are equipped with end caps (601).