A coil assembly and a manufacturing method thereof, and a motor

Abstract

This application relates to the field of motor technology, and discloses a coil assembly, its manufacturing method, and a motor. The coil assembly of this application includes a coil frame, a first sealing member, and a second sealing member. The coil frame is formed by sequentially welding multiple frame plates along the circumference. Each frame plate is a simple plate structure, which significantly reduces processing difficulty and manufacturing cost compared to traditional integrated groove structures, while also ensuring accurate dimensional and positional tolerances. The coil frame, the first sealing member, and the second sealing member are welded together to form a sealed cavity, with at least one coil and at least one coil assembly interface mounting component located within the sealed cavity. The coil assembly of this application has high sealing reliability, which is beneficial for improving vacuum adaptability.

Description

Technical Field

[0001] This application relates to the field of motor technology, and in particular to a coil assembly and its manufacturing method, and a motor. Background Technology

[0002] In the field of semiconductor manufacturing and inspection, especially in lithography equipment and automated wafer inspection equipment, most processes need to be completed in a vacuum environment. As the core driving component of vacuum motion mechanisms, the performance of vacuum motors directly affects the overall performance of the equipment. As a core component of vacuum motors, improving the vacuum performance and optimizing the manufacturing process of coil assemblies have become the main research goals at present.

[0003] Currently, coil assemblies typically employ a fully enclosed sealed structure, achieving sealing through bonding or welding. This involves using low-release-rate metal materials to create a sealed cavity, with a common design being a groove with a cover plate. However, due to the limited space of vacuum motors, the metal parts surrounding the coil are relatively thin, significantly increasing manufacturing costs and amplifying dimensional and geometric tolerances. Furthermore, the groove is usually a one-piece structure, which presents deformation issues during manufacturing due to its thin bottom surface and low rigidity. Thermal deformation during welding also contributes to poor geometric tolerance accuracy. Summary of the Invention

[0004] To address the aforementioned technical problems, embodiments of this application provide a coil assembly, its manufacturing method, and a motor.

[0005] In a first aspect, embodiments of this application provide a coil assembly, comprising: a coil frame including a plurality of frame plates sequentially welded along its circumference, the plurality of frame plates enclosing a cavity region, and the cavity region penetrating the coil frame along a first direction, wherein the first direction is the height direction of the coil frame; the cavity region having a first opening and a second opening disposed opposite to each other along the first direction; a first sealing member covering the first opening along the first direction and welded to the coil frame; a second sealing member covering the second opening along the first direction and welded to the coil frame; wherein the coil frame, the first sealing member and the second sealing member together enclose a sealed cavity; at least one coil and at least one coil assembly interface mounting member located within the sealed cavity.

[0006] It is understood that in this embodiment, the coil frame is formed by sequentially splicing and welding multiple frame plates along the circumference. Each frame plate is a simple plate structure, which significantly reduces processing difficulty and manufacturing cost compared to the traditional integrated groove structure, while also making it easier to ensure dimensional and positional tolerance accuracy. Furthermore, the coil frame, the first sealing member, and the second sealing member are welded together to form a sealed cavity, which has high sealing reliability and is beneficial for improving vacuum adaptability.

[0007] In some possible implementations of the first aspect mentioned above, the coil frame includes a first frame plate, a second frame plate, a third frame plate, and a fourth frame plate welded sequentially along the circumferential direction, wherein the first frame plate and the third frame plate are spaced apart along a second direction, and the second frame plate and the fourth frame plate are spaced apart along a third direction, with the second direction, the third direction, and the first direction being perpendicular to each other.

[0008] In some possible implementations of the first aspect described above, the first enclosure member includes a first mounting plate and a first cover plate, the first mounting plate and the first cover plate being welded together in a second direction; and the first mounting plate covers a portion of the first opening, the portion of the first opening being aligned in a first direction with the position of at least one coil assembly interface mount; the first cover plate covers another portion of the first opening, the other portion of the first opening being aligned in a first direction with the position of at least one coil.

[0009] In some possible implementations of the first aspect described above, the first mounting plate is provided with the same number of first openings as the coil assembly interface mounting parts, and the inner wall of the first opening is clearance-fitted with the outer wall of the coil assembly interface mounting part.

[0010] In some possible implementations of the first aspect above, the welding connection surface of the first mounting plate toward the first cover plate along the second direction is an inclined surface inclined to a preset plane; and / or, the welding connection surface of the first cover plate toward the first mounting plate along the second direction is an inclined surface inclined to a preset plane; wherein the preset plane is parallel to the first direction and the third direction.

[0011] In some possible implementations of the first aspect described above, the second closure member includes a second mounting plate and a second cover plate, the second mounting plate and the second cover plate being welded together in a second direction; and the second mounting plate covers a portion of the second opening, the portion of the second opening being aligned in a first direction with the position of at least one coil assembly interface mounting member; the second cover plate covers another portion of the second opening, the other portion of the second opening being aligned in a first direction with the position of at least one coil.

[0012] In some possible implementations of the first aspect described above, the second mounting plate is provided with the same number of second openings as the coil assembly interface mounting parts, and the inner wall of the second opening is in clearance fit with the outer wall of the coil assembly interface mounting part.

[0013] In some possible implementations of the first aspect above, the welding connection surface of the second mounting plate toward the second cover plate along the second direction is an inclined surface inclined to a preset plane; and / or, the welding connection surface of the second cover plate toward the second mounting plate along the second direction is an inclined surface inclined to a preset plane; wherein the preset plane is parallel to the first direction and the third direction.

[0014] In some possible implementations of the first aspect described above, the sealed cavity includes potting compound that encapsulates the coil and the coil assembly interface mounting component.

[0015] In some possible implementations of the first aspect described above, at least one coil is arranged sequentially along a third direction and is closer to the first frame plate than the third frame plate along a second direction; the first frame plate is provided with an adhesive inlet communicating with the sealing cavity, and the third frame plate is provided with an adhesive outlet communicating with the sealing cavity; any one of the first frame plate, the second frame plate, the third frame plate and the fourth frame plate is provided with a wire outlet hole communicating with the sealing cavity.

[0016] In some possible implementations of the first aspect described above, the coil assembly interface mounting component includes a first annular segment, a second annular segment, and a third annular segment sequentially spliced ​​along a first direction; wherein: the dimension of the first annular segment along the first direction is the same as the dimension of the first mounting plate along the first direction; the dimension of the second annular segment along the first direction is the same as the dimension of the coil frame along the first direction; the dimension of the third annular segment along the first direction is the same as the dimension of the second mounting plate along the first direction; and the outer diameters of the first and third annular segments are both smaller than the outer diameter of the second annular segment; the outer wall surface of the second annular segment has a planar positioning surface for cooperating with a positioning fixture.

[0017] Secondly, embodiments of this application provide a method for manufacturing a coil assembly, used to manufacture a coil assembly as described in the first aspect above. The method includes: sequentially splicing and welding multiple frame plates along the circumferential direction to form a coil frame, the coil frame enclosing a cavity region, and the cavity region extending along a first direction perpendicular to the circumferential direction of the coil frame; wherein the cavity region has a first opening and a second opening disposed opposite to each other along the first direction; obtaining a positioning fixture, and initially positioning and fixing the coil frame, at least one component interface mounting piece, and at least one coil on the positioning fixture; covering the first opening with a first sealing member, covering the second opening with a second sealing member, and welding the first sealing member and the second sealing member to the coil frame respectively, so that the coil frame, the first sealing member, and the second sealing member together enclose a sealed cavity.

[0018] Among some possible implementations of the second aspect mentioned above, it also includes: injecting potting compound into the sealed cavity through the potting inlet on the coil frame in a vacuum environment until the potting compound overflows from the potting outlet on the coil frame, stopping the potting process, and then curing the potting compound.

[0019] In some possible implementations of the second aspect above, injecting potting compound into the sealed cavity through the potting inlet on the coil frame includes: placing the potting inlet on the coil frame downwards along the direction of gravity into the cavity of the vacuum potting machine; connecting the outlet of the vacuum potting machine to one end of the potting capillary, and then extending the other end of the potting capillary into the sealed cavity through the potting inlet; evacuating the cavity of the vacuum potting machine, and using the pressure difference to force the potting compound into the sealed cavity through the potting capillary.

[0020] It is understood that the manufacturing method of the coil assembly in this application embodiment achieves precise positioning of each part through positioning fixtures, ensuring the relative positional accuracy of the coil and the coil assembly interface mounting parts. The process of first positioning and fixing, then welding and sealing, avoids positional shifts during welding. Furthermore, applying a small amount of potting compound for initial fixing, followed by welding and sealing, and finally using a bottom-up overall potting method, ensures the coil's positioning accuracy and allows the potting compound to completely and without air bubbles fill all micro-gaps inside the coil.

[0021] Thirdly, embodiments of this application provide an electric motor, including a coil assembly and a magnet assembly as described in the first aspect above, wherein: the coil assembly and the magnet assembly are correspondingly arranged; the coil assembly is supplied with current and generates an interaction force with the magnet assembly.

[0022] Understandably, motors containing coil assemblies are particularly suitable for equipment that needs to operate in a vacuum environment, such as lithography machines and wafer inspection equipment, because coil assemblies have good vacuum adaptability, high precision and high reliability. Attached Figure Description

[0023] Figure 1 According to an embodiment of the application, a schematic diagram of a split structure of a coil assembly 1 is shown;

[0024] Figure 2 According to an embodiment of the application, an overall view of a coil assembly 1 is shown;

[0025] Figure 3 According to an embodiment of the application, an overall view of the coil assembly 1 from another perspective is shown;

[0026] Figure 4 According to an embodiment of the application, a structural schematic diagram of a coil assembly interface mounting component 19 is shown;

[0027] Figure 5 According to an embodiment of the application, a schematic diagram of the manufacturing process of a coil assembly 1 is shown;

[0028] Figure 6 According to an embodiment of the application, a schematic diagram of the weld seam of a coil frame 10 is shown;

[0029] Figure 7 According to an embodiment of the application, a structural schematic diagram of a positioning fixture 22 is shown;

[0030] Figure 8 According to an embodiment of the application, an assembly diagram of the positioning fixture 22 and the coil assembly 1 is shown. Figure 1 ;

[0031] Figure 9 According to an embodiment of the application, an assembly diagram of the positioning fixture 22 and the coil assembly 1 is shown. Figure 2 ;

[0032] Figure 10 According to an embodiment of the application, a schematic diagram of the weld seam of coil assembly 1 is shown. Figure 1 ;

[0033] Figure 11 According to an embodiment of the application, a schematic diagram of the weld seam of coil assembly 1 is shown. Figure 2 ;

[0034] Figure 12 A schematic diagram of the potting process is shown according to an embodiment of the application;

[0035] Explanation of reference numerals in the attached figures:

[0036] 1-Coil assembly; 10-Coil frame; 10A-Cavity area; 11-First frame plate; 111-Glue inlet; 12-Second frame plate; 13-Third frame plate; 131-Glue outlet; 14-Fourth frame plate; 141-Wire outlet hole; 15-First mounting plate; 151-First opening; 16-Second mounting plate; 161-Second opening; 17-First cover plate; 18-Second cover plate; 19-Coil assembly interface mounting piece; 191-First segment of the annulus; 192-Second segment of the annulus; 1921-End area; 1922-Planar positioning surface; 193-Third segment of the annulus;

[0037] 20 - Coil; 21 - Motor lead wire; 22 - Positioning fixture; 221 - First groove; 222 - Second groove; 223 - First boss; 2231 - Third groove; 224 - Second boss; 23 - Potting capillary tube; 24 - Potting compound;

[0038] 301 - First weld; 302 - Second weld; 303 - Third weld; 304 - Fourth weld; 305 - Fifth weld; 306 - Sixth weld; 307 - Seventh weld; 308 - Eighth weld; 309 - Ninth weld; 310 - Tenth weld; 311 - Eleventh weld; 312 - Twelfth weld;

[0039] 101 - First plane; 102 - Second plane; 103 - Third plane; 104 - Fourth plane; 105 - Fifth plane; 106 - Sixth plane. Detailed Implementation

[0040] The illustrative embodiments of this application include, but are not limited to, a coil assembly and its manufacturing method, and a motor. To make the objectives, technical solutions, and advantages of this application clearer, the technical solutions in this application are described below in conjunction with the accompanying drawings.

[0041] As mentioned earlier, coil assemblies typically employ a fully enclosed sealed structure, commonly a groove with a cover plate. However, due to the limited space of the vacuum motor, the thickness of the metal parts surrounding the coil is relatively small. This significantly increases the processing cost of these metal parts and amplifies their dimensional and geometric tolerances. Furthermore, the groove is usually a one-piece structure, which presents deformation problems during processing due to its thin bottom surface and low rigidity. It is also prone to thermal deformation during welding, resulting in poor geometric tolerances.

[0042] Based on this, this application provides a coil assembly that adopts a split-welded structure. The traditional one-piece groove structure is decomposed into multiple frame plates for individual processing. Each frame plate has a simple structure, high rigidity, is easy to process, and ensures accuracy, thereby reducing processing difficulty and cost. By welding the frame plates and sealing components into a sealed cavity, the problem of easy deformation during processing of the one-piece groove structure can be solved, greatly increasing the dimensional and positional tolerance accuracy of the assembled coil assembly and helping to reduce manufacturing costs.

[0043] The coil assembly 1 of this application embodiment will now be described with reference to the accompanying drawings.

[0044] Please see Figures 1 to 3 , Figure 1 This is a schematic diagram of the split structure of coil assembly 1 in some embodiments of this application. Figure 2 and Figure 3 The overall view of coil assembly 1 from different perspectives is shown.

[0045] It should be noted that in the figures of this application, the Z direction is a schematic diagram of the first direction, which can represent the height direction of the coil assembly 1; the Y direction is a schematic diagram of the second direction, which can represent the width direction of the coil assembly 1; and the X direction is a schematic diagram of the third direction, which can represent the length direction of the coil assembly 1. The X, Y, and Z directions are all perpendicular to each other.

[0046] like Figure 1 As shown, in some embodiments, the coil assembly 1 includes a coil frame 10, which includes a plurality of frame plates sequentially welded along its circumference. Here, the plurality of frame plates includes a first frame plate 11, a second frame plate 12, a third frame plate 13, and a fourth frame plate 14 as an example. That is, the coil frame 10 is formed by sequentially splicing and welding the first frame plate 11, the second frame plate 12, the third frame plate 13, and the fourth frame plate 14 along the circumference. It can be understood that the coil frame 10 has an axis parallel to the Z-direction, and the circumference is the direction in which this axis is wound.

[0047] The first frame plate 11, the second frame plate 12, the third frame plate 13, and the fourth frame plate 14 are sequentially spliced ​​and welded end to end along the circumferential direction to form a closed cavity region 10A. This cavity region 10A extends along the Z-direction and has a first opening (upper opening) and a second opening (lower opening) arranged opposite to each other. That is, in this embodiment, the coil frame 10 is a closed frame structure with openings at the top and bottom.

[0048] Continue reading Figure 1In some embodiments, the coil assembly 1 further includes a first sealing member and a second sealing member. The first sealing member includes a first mounting plate 15 and a first cover plate 17, and the second sealing member includes a second mounting plate 16 and a second cover plate 18. The first mounting plate 15 and the first cover plate 17 are welded together along the Y direction and cover the upper opening of the coil frame 10 along the Z direction, and are welded to the coil frame 10. The second mounting plate 16 and the second cover plate 18 are welded together along the Y direction and cover the lower opening of the coil frame 10 along the Z direction, and are welded to the coil frame 10.

[0049] Understandable, Figure 1 In the illustrated embodiment, the first mounting plate 15 and the first cover plate 17 are separate structures connected by welding. The second mounting plate 16 and the second cover plate 18 are also separate structures connected by welding. The separate structures facilitate individual processing and assembly. In other embodiments, the first mounting plate 15 and the first cover plate 17 can be an integral structure, meaning they are formed as a single, integral component. Similarly, the second mounting plate 16 and the second cover plate 18 can be an integral structure, meaning they are formed as a single, integral component. An integral structure reduces welding steps and simplifies the assembly process.

[0050] It is understood that after the first sealing member (first mounting plate 15 and first cover plate 17) and the second sealing member (second mounting plate 16 and second cover plate 18) are respectively covered on the upper opening and lower opening of the coil frame 10 along the Z direction, the cavity region 10A can form a sealed cavity.

[0051] Continue reading Figure 1 In some embodiments, the coil assembly 1 further includes at least one coil assembly interface mounting member 19 and at least one coil 20, wherein the at least one coil 20 and the at least one coil assembly interface mounting member 19 are located within a sealed cavity formed by the coil frame 10, the first sealing member (the first mounting plate 15 and the first cover plate 17), and the second sealing member (the second mounting plate 16 and the second cover plate 18). When the coil assembly 1 includes two or more coil assembly interface mounting members 19, the two or more coil assembly interface mounting members 19 are arranged at intervals along the X direction. When the coil assembly 1 includes two or more coils 20, the two or more coils 20 are arranged at intervals along the X direction.

[0052] It is understood that in this embodiment, the coil frame 10 is formed by sequentially splicing and welding multiple frame plates along the circumference. Each frame plate is a simple plate structure, which significantly reduces processing difficulty and manufacturing cost compared to the traditional integrated groove structure, while also making it easier to ensure dimensional and positional tolerance accuracy. Furthermore, the coil frame 10, the first sealing member, and the second sealing member are welded together to form a sealed cavity, which has high sealing reliability and is beneficial for improving vacuum adaptability.

[0053] It should be noted that this application does not limit the shape of the coil frame 10. In this embodiment, a rectangular coil frame 10 is used as an example. For instance, the first frame plate 11 and the third frame plate 13 are parallel and spaced apart along the Y direction, and the second frame plate 12 and the fourth frame plate 14 are parallel and spaced apart along the X direction. In other embodiments, the coil frame 10 may also be circular, elliptical, or other shapes. It is understood that the coil frame 10 has a simple structure and is easy to manufacture and assemble.

[0054] In some embodiments, the first frame plate 11, the second frame plate 12, the third frame plate 13 and the fourth frame plate 14 are all made of vacuum-suitable non-magnetic materials, including but not limited to 316L stainless steel, titanium alloy and other alloy or composite materials, in order to reduce the gas release rate of each frame plate in a vacuum environment and help improve the vacuum suitability of the coil assembly 1.

[0055] In some embodiments, the welding method between the frame plates can be laser welding or electron beam welding, which helps to reduce welding deformation.

[0056] like Figure 2 and Figure 3 As shown, the plane containing the first cover plate 17 is defined as the first plane 101, the plane containing the second cover plate 18 is defined as the second plane 102, the plane containing the second frame plate 12 is defined as the third plane 103, the plane containing the fourth frame plate 14 is defined as the fourth plane 104, the plane containing the third frame plate 13 is defined as the fifth plane 105, and the plane containing the first frame plate 11 is defined as the sixth plane 106. The first plane 101 and the second plane 102 are perpendicular to the Z-direction, the third plane 103 and the fourth plane 104 are perpendicular to the X-direction, and the fifth plane 105 and the sixth plane 106 are perpendicular to the Y-direction.

[0057] Combination Figure 1 and Figure 2As shown, in some embodiments, a first mounting plate 15 covers a portion of the opening on the coil frame 10, which (or the first mounting plate 15) is aligned in the Z direction with at least one coil assembly interface mounting member 19. The first mounting plate 15 has at least one first opening 151, the number of which is the same as the number of coil assembly interface mounting members 19. When two or more first openings 151 are provided, they are spaced apart sequentially in the X direction, and the inner wall of each first opening 151 is clearance-fitted with the outer wall of the corresponding coil assembly interface mounting member 19. It is understood that the clearance fit provides space for subsequent welding between the first mounting plate 15 and the coil assembly interface mounting member 19, which helps ensure assembly accuracy. A first cover plate 17 covers another portion of the opening on the coil frame 10, which (or the first cover plate 17) is aligned in the Z direction with at least one coil 20.

[0058] Combination Figure 1 and Figure 3 As shown, in some embodiments, a second mounting plate 16 covers a portion of the lower opening of the coil frame 10, and this portion (or the second mounting plate 16) is aligned in the Z direction with the position of at least one coil assembly interface mounting member 19. The second mounting plate 16 has at least one second opening 161, the number of which is the same as the number of coil assembly interface mounting members 19. When two or more second openings 161 are provided, they are sequentially spaced along the X direction, and the inner wall of each second opening 161 is clearance-fitted with the outer wall of the corresponding coil assembly interface mounting member 19. It is understood that the clearance fit provides space for subsequent welding between the second mounting plate 16 and the coil assembly interface mounting member 19, which helps ensure assembly accuracy. A second cover plate 18 covers another portion of the opening on the coil frame 10, and this portion (or the second cover plate 18) is aligned in the Z direction with the position of at least one coil 20.

[0059] In some embodiments, the welding method between the first mounting plate 15 and the first cover plate 17, and between the second mounting plate 16 and the second cover plate 18, can be laser welding or electron beam welding, which helps to reduce welding deformation.

[0060] In some embodiments, the welding connection surface of the first mounting plate 15 facing the first cover plate 17 along the Y direction is an inclined surface inclined to the XZ plane (the preset plane of this application). For example, the inclination angle of the inclined surface can be 30° to 60°; in other words, the projection of the first mounting plate 15 in the YZ plane can be a right trapezoid. This shape facilitates welding operations and provides operating space for welding. The welding connection surface of the second mounting plate 16 facing the second cover plate 18 along the Y direction is an inclined surface inclined to the XZ plane. For example, the inclination angle of the inclined surface can be 30° to 60°; in other words, the projection of the second mounting plate 16 in the YZ plane can be a right trapezoid.

[0061] In some embodiments, the dimensions (thickness) of the first cover plate 17 and the second cover plate 18 in the Z direction can range from 0.2 mm to 0.5 mm, which can ensure a certain structural strength and facilitate welding.

[0062] In some embodiments, the first cover plate 17 is located on the first plane 101 and is in close contact with the upper surface of the coil frame 10, and the second cover plate 18 is located on the second plane 102 and is in close contact with the lower surface of the coil frame 10. The materials of the first cover plate 17 and the second cover plate 18 can be the same as those of the coil frame 10, using vacuum-suitable non-magnetic materials, including but not limited to 316L stainless steel, titanium alloy and other alloys or composite materials, to reduce the gas release rate in a vacuum environment and help improve the vacuum suitability of the coil assembly 1.

[0063] It is understood that the coil frame 10, the first mounting plate 15, the first cover plate 17, the second mounting plate 16 and the second cover plate 18 are spliced ​​together by welding to form a sealed cavity, thereby achieving all-metal sealed welding of the coil assembly 1.

[0064] In some embodiments, the sealed cavity formed by the coil frame 10, the first mounting plate 15, the first cover plate 17, the second mounting plate 16, and the second cover plate 18 includes potting compound for wrapping the coil 20 and the coil assembly interface mounting piece 19.

[0065] In some embodiments, combined with Figures 1 to 3 The three coils 20 are arranged sequentially along the X direction, and the three coils 20 are closer to the first frame plate 11 in the Y direction than the third frame plate 13. The first frame plate 11 is provided with a glue inlet 111, and the third frame plate 13 is provided with a glue outlet 131. Both the glue inlet 111 and the glue outlet 131 are connected to the sealed cavity.

[0066] It is understandable that potting compound is filled into the sealed cavity through the potting inlet 111. The potting compound can be a vacuum-compatible epoxy resin potting compound, which, after curing, completely encapsulates the coil 20 and the coil assembly interface mounting piece 19. The potting compound not only fixes the position of the coil 20 and the coil assembly interface mounting piece 19, but also improves heat dissipation efficiency and insulation performance.

[0067] It can be understood that coil 20 is the core component of coil assembly 1, and its quantity usually depends on the structure and application conditions of the vacuum motor used in coil assembly 1. The array direction of coil 20 (taking the X direction as an example here) is usually the movement direction of coil assembly 1.

[0068] In some embodiments, the coil 20 may be made of enameled wire of a multilayer composite insulating material suitable for vacuum applications, and wound using a winding mold. To maximize the use of space in the coil assembly and reduce the thermal resistance of the vacuum motor coil assembly, flat enameled wire is generally selected. The flat wire windings form a large-area contact, improving the heat transfer efficiency of the coil assembly. Furthermore, the flat wire windings have higher rigidity than the round wire windings, resulting in better vibration resistance, thermal deformation resistance, and higher reliability.

[0069] In some embodiments, the coil 20 can be a single-layer or multi-layer structure in the shape of a racetrack. It is understood that one or more sets of drive output units are usually provided outside the coil assembly 1. The drive output units can supply the coil assembly 1 with a drive current with adjustable amplitude. Under the excitation of the drive current, the coil assembly 1 can generate electromagnetic interaction with the magnet assembly, and the tooling can then generate a driving force corresponding to the degree of freedom.

[0070] In some embodiments, any one of the first frame plate 11, the second frame plate 12, the third frame plate 13, and the fourth frame plate 14 is provided with a cable outlet hole communicating with the sealed cavity. Here, as... Figure 1 As shown, taking the fourth frame plate 14 with a wire outlet hole 141 as an example, the wire outlet hole 141 is used to place the motor lead wire 21. It can be understood that the motor lead wire 21 is led out through the wire outlet hole 141 and is sealed to the fourth frame plate 14 by a rubber sealing method or an ultra-high vacuum metal welding sealing method. The enameled wire of the coil 20 is connected to the motor lead wire 21 at the wire outlet hole 141. The cable used for the motor lead wire 21 is a cable suitable for ultra-high vacuum, which can transmit the current or voltage signal of the coil assembly 1 from the inside of the coil assembly 1 to the outside of the coil assembly 1. Usually, the motor lead wire 21 is a shielded twisted pair cable, and the number of wire cores depends on the number of signals to be transmitted in the coil assembly 1.

[0071] It can be understood that the coil assembly interface mounting part 19 is a mechanical mounting connector for the coil assembly 1. Figure 4 A schematic diagram of a coil assembly interface mounting component 19 is shown.

[0072] like Figure 4 As shown, in some embodiments, the coil assembly interface mounting component 19 includes a first annular segment 191, a second annular segment 192, and a third annular segment 193 sequentially spliced ​​along the Z direction. The inner hole 190 of the first annular segment 191 serves as the mounting interface for the coil assembly 1, used to connect with external components (such as magnet assemblies or mounting flanges). Through this mounting interface, the coil assembly 1 can be precisely positioned and fixed. Furthermore, the dimension of the first annular segment 191 along the Z direction is the same as the dimension of the first mounting plate 15 along the Z direction; the dimension of the second annular segment 192 along the Z direction is the same as the dimension of the coil frame 10 along the Z direction; the dimension of the third annular segment 193 along the Z direction is the same as the dimension of the second mounting plate 16 along the Z direction; and the outer diameters of the first annular segment 191 and the third annular segment 193 are both smaller than the outer diameter of the second annular segment 192.

[0073] It can be understood that the coil assembly interface mounting piece 19 has a three-section structure, and the dimensions of each section in the Z direction match the dimensions of the first mounting plate 15, the coil frame 10, and the second mounting plate 16 in the Z direction. In this way, the coil assembly interface mounting piece 19 can be precisely clamped and positioned during assembly, improving assembly accuracy.

[0074] Continue reading Figure 4 As shown, since the outer diameters of the first ring 191 and the third ring 193 are both smaller than the outer diameter of the second ring 192, the coil assembly interface mounting piece 19 forms a stepped structure. Thus, the two end regions of the second ring 192 along the Z direction (e.g., one end region 1921) can provide support and positioning for the first mounting plate 15 and the second mounting plate 16. For example, end region 1921 provides support and positioning for the first mounting plate 15.

[0075] In some embodiments, such as Figure 4 As shown, the outer wall of the second annular body 192 has a planar positioning surface 1922, which is used to cooperate with positioning fixtures (such as positioning fixture 22 below) during the manufacturing process of coil assembly 1 to achieve high-precision positioning.

[0076] It should be noted that in the above embodiments, the coil assembly interface mounting member 19 is formed by three circular rings. However, this application does not limit the specific structure or shape of the coil assembly interface mounting member 19. For example, in other embodiments, the second circular ring 192 in the coil assembly interface mounting member 19 can be replaced with a rectangular ring. Alternatively, in some other embodiments, the coil assembly interface mounting member 19 is composed of multiple rectangular rings sequentially spliced ​​along the Z direction.

[0077] Furthermore, this application embodiment also provides a motor suitable for a vacuum environment. The motor includes a coil assembly 1 and a magnet assembly according to this application embodiment. The magnet assembly is disposed outside the coil frame 10, opposite to the coil 20, and an air gap is formed between the coil assembly 1 and the magnet assembly. The magnet assembly includes multiple magnets, which can be arranged in alternating polarities.

[0078] In some embodiments, the motor may further include one or more drive output units. The coil assembly 1 is electrically connected to one or more drive output units. The drive output units supply an adjustable drive current to the coil assembly, causing the coil 20 to interact electromagnetically with the magnet assembly, generating a driving force corresponding to the degree of freedom, thereby driving the motor to move.

[0079] Because the coil assembly 1 has good vacuum adaptability, high precision and high reliability, the motor containing the coil assembly 1 is particularly suitable for equipment that needs to operate in a vacuum environment, such as lithography machines and wafer inspection equipment.

[0080] It is understandable that coil assembly 1 is the core component of the vacuum motor, and the vacuum motor needs to operate stably in a high vacuum environment. Therefore, the control of the gas release rate and gas composition of coil assembly 1 is particularly critical. Excessive gas release rate and unfavorable gas composition will not only disrupt the overall vacuum conditions of the equipment but also lead to product defects. In related technologies, coil assemblies are often manufactured by first applying adhesive and then machining. This process is complex, has low reliability, and makes it difficult to effectively control the gas release rate.

[0081] Based on this, this application also provides a method for manufacturing the coil assembly 1. Figure 5 A schematic diagram of the manufacturing process steps for coil assembly 1 is shown. The manufacturing method of coil assembly 1 includes the following steps:

[0082] S51: Multiple frame plates are sequentially spliced ​​and welded along the circumference to form a coil frame. The coil frame encloses a cavity region, and the cavity region is through along a first direction, which is perpendicular to the circumference of the coil frame. The cavity region has a first opening and a second opening that are arranged opposite to each other along the first direction.

[0083] In some embodiments, combined with Figure 6 As shown, step S51 may specifically include: sequentially splicing the first frame plate 11, the second frame plate 12, the third frame plate 13, and the fourth frame plate 14 along the circumferential direction, and welding them at the weld seams (joints) to form the coil frame 10. For example, the weld seams and welding methods are as follows:

[0084] The first weld 301 between the second frame plate 12 and the third frame plate 13 can be made by short-side argon arc welding / laser welding / electron beam welding.

[0085] The second weld 302 between the third frame plate 13 and the fourth frame plate 14 can be achieved by short-side argon arc welding / laser welding / electron beam welding.

[0086] The third weld 303 between the second frame plate 12 and the first frame plate 11 can be achieved by short-side argon arc welding / laser welding / electron beam welding.

[0087] The fourth weld 304 between the first frame plate 11 and the fourth frame plate 14 can be achieved by short-side argon arc welding / laser welding / electron beam welding.

[0088] S52: Obtain the positioning fixture and perform preliminary positioning and fixation of the coil frame, at least one component interface mounting piece and at least one coil on the positioning fixture.

[0089] In some embodiments, combined with Figures 7 to 9 As shown, step S52 may specifically include the following steps S521 to S523:

[0090] S521: Obtain positioning fixture 22.

[0091] Figure 7 A schematic diagram of the positioning fixture 22 is shown. Figure 7 As shown, the positioning fixture 22 has a first groove 221 inside, the shape of which matches the coil frame 10, for accommodating and positioning the coil frame 10. Here, the shape of the first groove 221 can be rectangular; in other embodiments, the first groove 221 can also be circular, elliptical, or other shapes. The positioning fixture 22 also has at least one second groove 222 inside, which can be annular, for accommodating and positioning the coil assembly interface mounting member 19. Therefore, the number of second grooves 222 is the same as the number of coil assembly interface mounting members 19, the spacing between adjacent second grooves 222 is the same as the spacing between adjacent coil assembly interface mounting members 19, and the inner wall of the second groove 222 is clearance-fitted with the outer wall of the coil assembly interface mounting member 19.

[0092] The positioning fixture 22 also includes a first boss 223 (e.g., in the central area). The first boss 223 can be racetrack-shaped and used to support the coil 20, serving as a limit for the coil 20 in the Z direction. The center of the first boss 223 may also have a third groove 2231, the same number as the coil 20. This third groove 2231 can also be racetrack-shaped, and its size is equal to the inner diameter of the coil 20, serving as the welding area for the solder joints inside the coil 20. Furthermore, multiple second bosses 224 are arrayed inside the third groove 2231 (two second bosses 224 are shown as an example in the figure). By tightly abutting the inner side of the coil 20 against the second bosses 224, the coil 20 is limited in both the X and Y directions.

[0093] S522: The initial positioning of the coil 20, the coil assembly interface mounting piece 19 and the coil frame 10 can be achieved by using the positioning fixture 22.

[0094] For example, Figure 8 and Figure 9 As shown, the coil frame 10 is placed in the rectangular first groove 221, the coil assembly interface mounting piece 19 is placed in the annular second groove 222, and the coil 20 is placed on the racetrack-shaped first boss 223 and limited by the second boss 224.

[0095] S523: After initial positioning, apply a small amount of vacuum-applied epoxy resin potting compound using a vacuum potting machine to fix the relative positions of the coil 20, the coil assembly interface mounting piece 19, and the coil frame 10, and then proceed with the subsequent steps.

[0096] This ensures that the coil 20, the coil assembly interface mounting piece 19, and the coil frame 10 do not undergo relative displacement during subsequent welding processes.

[0097] S53: The first sealing member is placed over the first opening, the second sealing member is placed over the second opening, and the first sealing member and the second sealing member are welded to the coil frame respectively, so that the coil frame, the first sealing member and the second sealing member together enclose a sealed cavity.

[0098] In some embodiments, combined with Figure 10 and Figure 11 As shown, step S53 may specifically include steps S531 and S532:

[0099] S531: The first mounting plate 15 and the first cover plate 17 are placed sequentially in the upper opening of the coil frame 10, and welded at the weld joints. Exemplary examples of the weld joints and welding methods are as follows:

[0100] The fifth weld 305 between the first cover plate 17 and the first frame plate 11, the second frame plate 12, and the fourth frame plate 14 can be achieved by three-sided laser welding / electron beam welding.

[0101] The sixth weld 306 between the first mounting plate 15 and the first cover plate 17 can be achieved by long-side laser welding / electron beam welding.

[0102] The seventh weld 307 between the first mounting plate 15 and the second frame plate 12, the third frame plate 13, and the fourth frame plate 14 can be achieved by three-sided laser welding / electron beam welding.

[0103] The ninth weld 309 of the first mounting plate 15 and the coil assembly interface mounting part 19 can be achieved by array ring laser welding.

[0104] S532: The second mounting plate 16 and the second cover plate 18 are placed sequentially in the lower opening of the coil frame 10, and welded at the weld joints. Exemplary weld joints and welding methods are as follows:

[0105] The eighth weld 308 between the second mounting plate 16 and the second frame plate 12, the third frame plate 13 and the fourth frame plate 14 can be achieved by three-sided laser welding / electron beam welding.

[0106] The tenth weld 310 between the second cover plate 18 and the first frame plate 11, the second frame plate 12, and the fourth frame plate 14 can be achieved by three-sided laser welding / electron beam welding.

[0107] The eleventh weld 311 between the second mounting plate 16 and the second cover plate 18 can be achieved by long-side laser welding / electron beam welding.

[0108] The twelfth weld 312 between the second mounting plate 16 and the coil assembly interface mounting piece 19 can be achieved by array ring laser welding.

[0109] After the above steps S531 and S532, the coil frame 10, the first mounting plate 15, the first cover plate 17, the second mounting plate 16 and the second cover plate 18 together enclose a sealed cavity.

[0110] It is understandable that after forming a sealed cavity through welding, the coil assembly 1 is then potted with adhesive. The potting compound can be a material with extremely low electrical conductivity, extremely high thermal conductivity, and strong reshaping properties, serving as a component for balancing the heat distribution inside the coil assembly 1. Ideally, this can result in an extremely low temperature gradient between the coil 20 and the coil frame 10.

[0111] Therefore, in some embodiments, after step S53, step S54 may be included: in a vacuum environment, potting compound is injected into the sealed cavity through the potting inlet 111 on the coil frame 10 until the potting compound overflows from the potting outlet 131 on the coil frame 10, the potting is stopped, and then the potting compound is cured.

[0112] Specifically, in combination Figure 12 As shown, injecting potting compound into the sealed cavity through the potting inlet 111 on the coil frame 10 may include steps S541 to S543:

[0113] S541: Combination Figure 12 As shown, the glue inlet 111 on the coil frame 10 is placed downwards along the direction of gravity into the cavity of the vacuum glue dispensing machine. At this time, the glue inlet 111 is located at the bottom and the glue outlet 131 is located at the top.

[0114] S542: Connect the outlet of the vacuum dispensing machine to one end of the dispensing capillary tube 23, and then extend the other end of the dispensing capillary tube 23 into the sealed cavity through the dispensing inlet 111.

[0115] S543: Vacuum the cavity of the vacuum dispensing machine and maintain a low vacuum state during the dispensing process. Utilize the pressure difference between the inside of the coil frame 10 and the outside to press the potting compound into the sealed cavity through the dispensing capillary tube 23.

[0116] Understandably, the potting compound 24 is slowly and steadily pressed into the coil potting inlet 111, gradually rising from the bottom of the sealed cavity. As the compound level exceeds the bottom of the coil 20, driven by both vacuum suction and the material's own capillary action, the compound begins to seep into the microscopic gaps between the enameled wire layers of the coil 20. This stage must be carried out slowly, with the injection speed closely monitored through the potting capillary tube 23 or a flow meter to ensure that the compound fully penetrates the microscopic gaps. When the compound level slowly rises to near the potting outlet 131, a small amount of compound can be observed overflowing from the potting outlet 131. At this point, the outlet of the vacuum potting machine and the vacuum pump should be immediately shut off to ensure that the potting compound 24 completely fills the sealed cavity.

[0117] After potting, while keeping the coil assembly 1 stationary, heat and cure the potting compound 24 according to its curing process to form a dense, thermally conductive, and insulating overall structure.

[0118] Understandably, the advantage of the potting process is that, in a vacuum environment, the potting capillary 23 allows for a slow, precise, bottom-up potting method, which enables the potting compound 24 to penetrate into microscopic gaps, achieving a high filling rate and zero-bubble potting effect.

[0119] In summary, the manufacturing method of the coil assembly 1 in this application embodiment achieves precise positioning of each part through the positioning fixture 22, ensuring the relative positional accuracy of the coil 20 and the coil assembly interface mounting part 19. The process of first positioning and fixing, then welding and sealing, avoids positional shifts during welding. Furthermore, applying a small amount of potting compound for initial fixing, followed by welding and sealing, and finally using a bottom-up overall potting method ensures the coil's positioning accuracy and allows the potting compound to completely and without air bubbles fill all micro-gaps inside the coil 20.

[0120] The above description illustrates the implementation of this application through specific embodiments. Those skilled in the art can easily understand other advantages and effects of this application from the content disclosed in this specification. Although the description of this application is presented in conjunction with some embodiments, this does not mean that the features of this application are limited to these embodiments. On the contrary, the purpose of describing the application in conjunction with embodiments is to cover other options or modifications that may be derived based on the claims of this application. To provide a thorough understanding of this application, many exemplary details are included in the above description. This application may also be implemented without using these details. Furthermore, to avoid confusion or obscuring the focus of this application, some specific details will be omitted in the description.

[0121] In the description of the embodiments of this application, "and / or" is merely a way of describing the relationship between associated objects, indicating that there can be three relationships. For example, A and / or B can represent three situations: A exists alone, A and B exist simultaneously, and B exists alone. In addition, the character " / " in this document generally indicates that the associated objects before and after are in an "or" relationship. When there are multiple associated objects, it can represent choosing one, choosing two, or choosing all.

[0122] In the description of the embodiments of this application, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing the embodiments of this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the embodiments of this application. In addition, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0123] In the description of the embodiments of this application, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in the embodiments of this application based on the specific circumstances.

[0124] The limitations mentioned in the embodiments of this application, such as parallel, perpendicular, and identical (e.g., identical length, identical width, etc.), are all relative to the current technological level, and not absolute and strict definitions in a mathematical sense. There may be a deviation within a predetermined angular range between two mutually parallel or perpendicular components. In one embodiment, the predetermined angle is 10°, and for example, the deviation may be within the range of ±5°.

[0125] Although this application has been illustrated and described with reference to certain preferred embodiments thereof, those skilled in the art will understand that various changes in form and detail may be made thereto without departing from the scope of this application.

Claims

1. A coil assembly, characterized in that, include: The coil frame (10) includes a plurality of frame plates welded sequentially along its circumference, the plurality of frame plates enclosing a cavity region, and the cavity region penetrating the coil frame (10) along a first direction, wherein the first direction is the height direction of the coil frame (10); the cavity region has a first opening and a second opening disposed opposite to each other along the first direction. A first sealing member is provided over the first opening along the first direction and is welded to the coil frame (10); The second sealing member is disposed over the second opening along the first direction and is welded to the coil frame (10); wherein the coil frame (10), the first sealing member and the second sealing member together enclose a sealed cavity; At least one coil (20) and at least one coil assembly interface mount (19) are located within the sealed cavity.

2. The coil assembly according to claim 1, characterized in that, The coil frame (10) includes a first frame plate (11), a second frame plate (12), a third frame plate (13), and a fourth frame plate (14) welded sequentially along the circumferential direction, wherein, The first frame plate (11) and the third frame plate (13) are spaced apart along the second direction, and the second frame plate (12) and the fourth frame plate (14) are spaced apart along the third direction. The second direction and the third direction are perpendicular to each other with the first direction.

3. The coil assembly according to claim 2, characterized in that, The first sealing member includes a first mounting plate (15) and a first cover plate (17), wherein the first mounting plate (15) and the first cover plate (17) are welded together along the second direction; Furthermore, the first mounting plate (15) covers a portion of the first opening, and the portion of the first opening is aligned with the position of the at least one coil assembly interface mount (19) in the first direction; The first cover plate (17) covers another portion of the first opening, which is aligned with the position of the at least one coil (20) in the first direction.

4. The coil assembly according to claim 3, characterized in that, The first mounting plate (15) has the same number of first openings (151) as the coil assembly interface mounting piece (19), and the inner wall of the first opening (151) is in clearance fit with the outer wall of the coil assembly interface mounting piece (19).

5. The coil assembly according to claim 3 or 4, characterized in that, The welding connection surface of the first mounting plate (15) facing the first cover plate (17) along the second direction is an inclined surface that is inclined to a preset plane; And / or, the welding connection surface of the first cover plate (17) facing the first mounting plate (15) in the second direction is an inclined surface that is inclined to the preset plane; The preset plane is parallel to the first direction and the third direction.

6. The coil assembly according to claim 3, characterized in that, The second enclosure component includes a second mounting plate (16) and a second cover plate (18), wherein the second mounting plate (16) and the second cover plate (18) are welded together along the second direction; Furthermore, the second mounting plate (16) covers a portion of the second opening, and the portion of the second opening is aligned with the position of the at least one coil assembly interface mounting member (19) in the first direction; The second cover plate (18) covers another portion of the second opening, which is aligned with the position of the at least one coil (20) in the first direction.

7. The coil assembly according to claim 6, characterized in that, The second mounting plate (16) has the same number of second openings (161) as the coil assembly interface mounting piece (19), and the inner wall of the second opening (161) is in clearance fit with the outer wall of the coil assembly interface mounting piece (19).

8. The coil assembly according to claim 6 or 7, characterized in that, The welding connection surface of the second mounting plate (16) facing the second cover plate (18) along the second direction is an inclined surface that is inclined to a preset plane; And / or, the welding connection surface of the second cover plate (18) facing the second mounting plate (16) along the second direction is an inclined surface inclined to the preset plane; The preset plane is parallel to the first direction and the third direction.

9. The coil assembly according to claim 2, characterized in that, The sealed cavity includes potting compound (24), which encapsulates the coil (20) and the coil assembly interface mounting piece (19).

10. The coil assembly according to claim 9, characterized in that, The at least one coil (20) is arranged sequentially along the third direction and is closer to the first frame plate (11) than the third frame plate (13) along the second direction. The first frame plate (11) is provided with a glue inlet (111) communicating with the sealed cavity, and the third frame plate (13) is provided with a glue outlet (131) communicating with the sealed cavity. Any one of the first frame plate (11), the second frame plate (12), the third frame plate (13), and the fourth frame plate (14) is provided with a wire outlet hole that communicates with the sealed cavity.

11. The coil assembly according to claim 6, characterized in that, The coil assembly interface mounting component (19) includes a first annular segment (191), a second annular segment (192), and a third annular segment (193) sequentially spliced ​​along the first direction; wherein: The dimension of the first annular segment (191) along the first direction is the same as the dimension of the first mounting plate (15) along the first direction; The second segment of the annulus (192) has the same dimension along the first direction as the coil frame (10) along the first direction; The dimension of the third annular segment (193) along the first direction is the same as the dimension of the second mounting plate (16) along the first direction; Furthermore, the outer diameter of the first segment of the annulus (191) and the outer diameter of the third segment of the annulus (193) are both smaller than the outer diameter of the second segment of the annulus (192); the outer wall surface of the second segment of the annulus (192) has a planar positioning surface for cooperating with the positioning fixture.

12. A method for manufacturing a coil assembly, characterized in that, The method for manufacturing a coil assembly as described in any one of claims 1 to 11 includes: The plurality of frame plates are sequentially spliced ​​and welded along the circumferential direction to form the coil frame (10). The coil frame (10) encloses a cavity region, and the cavity region extends along a first direction, which is perpendicular to the circumferential direction of the coil frame (10). The cavity region has a first opening and a second opening that are arranged opposite to each other along the first direction. Obtain the positioning fixture, and initially position and fix the coil frame (10), the at least one component interface mounting piece and the at least one coil (20) on the positioning fixture; The first sealing member is placed over the first opening, the second sealing member is placed over the second opening, and the first sealing member and the second sealing member are welded to the coil frame (10) respectively, so that the coil frame (10), the first sealing member and the second sealing member together enclose a sealed cavity.

13. The method for manufacturing a coil assembly according to claim 12, characterized in that, Also includes: In a vacuum environment, potting compound (24) is injected into the sealed cavity through the potting inlet (111) on the coil frame (10) until the potting compound (24) overflows from the potting outlet (131) on the coil frame (10), then the potting is stopped and the potting compound (24) is cured.

14. The method for manufacturing a coil assembly according to claim 13, characterized in that, The injection of potting compound (24) into the sealed cavity through the potting inlet (111) on the coil frame (10) includes: Place the glue inlet (111) on the coil frame (10) downwards along the direction of gravity into the cavity of the vacuum glue dispensing machine; Connect the outlet of the vacuum dispensing machine to one end of the dispensing capillary tube, and then extend the other end of the dispensing capillary tube into the sealed cavity through the dispensing inlet (111). The cavity of the vacuum dispensing machine is evacuated, and the potting compound (24) is forced into the sealed cavity through the dispensing capillary tube by the pressure difference.

15. An electric motor, characterized in that, The coil assembly and magnet assembly according to any one of claims 1 to 11, wherein: The coil assembly and the magnet assembly are respectively arranged; The coil assembly is energized and interacts with the magnet assembly.

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