Bulk acoustic wave resonator and method of manufacturing the same

By employing parallel structures and concave-convex electrode designs in the bulk acoustic resonator, the ohmic loss problem caused by thin electrodes at high frequencies is solved, thereby improving the Q value and filter performance at high frequencies.

CN122247372APending Publication Date: 2026-06-19WUHAN MEMSONICS TECH CO LTD
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
WUHAN MEMSONICS TECH CO LTD
Filing Date
2026-03-30
Publication Date
2026-06-19

AI Technical Summary

Technical Problem

Traditional bulk acoustic resonators suffer from severe ohmic losses and reduced Q values ​​due to excessively thin electrodes at high frequencies, making it difficult to meet the high-frequency, wide-bandwidth, and high-linearity requirements of 5G and future communication systems.

Method used

The bottom and top electrodes are arranged in parallel. The electrodes are spaced apart in the effective resonant region and connected outside the region. A concave-convex structure is formed outside the resonant region to suppress transverse acoustic wave leakage. The electrode thickness is increased by combining the acoustic reflection part to reduce resistance.

Benefits of technology

While maintaining a high operating frequency, it significantly reduces electrode-related losses, improves the Q value, and enhances the performance and energy efficiency of the filter.

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Abstract

This application discloses a bulk acoustic wave resonator and its fabrication method, relating to the field of resonator technology. The bulk acoustic wave resonator includes a substrate and a bottom electrode, a piezoelectric layer, and a top electrode sequentially stacked on the substrate. The region where the bottom electrode, piezoelectric layer, and top electrode overlap in the stacking direction constitutes the effective resonant region. The bottom electrode and / or top electrode includes a first electrode and a second electrode stacked together. The first electrode and the second electrode are spaced apart along the thickness direction within the effective resonant region and connected outside the effective resonant region. This bulk acoustic wave resonator and its fabrication method can significantly reduce electrode-related losses and improve the Q value while maintaining a high operating frequency.
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