Purification of precursor compounds and related systems and methods

CN122249269APending Publication Date: 2026-06-19ENTEGRIS INC

Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
ENTEGRIS INC
Filing Date
2024-11-05
Publication Date
2026-06-19

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Abstract

This disclosure provides systems and methods for purifying precursor compounds. One method includes one or more of the following steps: mixing a crude product solution with a first solvent, wherein the crude product solution comprises a precursor compound and at least one impurity; wherein the boiling point of the first solvent is higher than the boiling point of the crude product solution; feeding at least the mixture of the crude product solution and the first solvent into an evaporator; and collecting a distillate comprising the precursor compound from the evaporator, wherein the purity of the precursor compound in the distillate is greater than 95%, as determined by [further steps]. 1 Determined by H NMR. Other methods and systems are presented in this paper.
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