Full-automatic green sheet laser drilling and cavity opening equipment and working process thereof

Abstract

This invention relates to the field of laser processing technology for ceramic materials, and discloses a fully automated laser drilling and cavity-opening device for green ceramic sheets and its workflow. The device adopts a split-type splicing structure, including a vision positioning system, a fully automated feeding and shaping system, a green ceramic sheet supply and transmission system, a laser processing system, a green ceramic sheet and platform cleaning system, and a fully automated unloading system. It integrates functions such as vision positioning, feeding and shaping, supply and transmission, laser processing, cleaning, and unloading. Through a dual-station parallel processing layout, a flexible adsorption buffer structure, and a multi-level cleaning design, it solves the process problem of easy deformation of green ceramic sheets, achieving high precision and high consistency in the processing of micro-holes, irregular holes, and contours. At the same time, it simplifies the mechanical structure, reduces equipment costs, and significantly improves production efficiency, making it suitable for precision processing of green ceramic sheets in multi-layer co-fired ceramic processes.

Description

Technical Field

[0001] This invention relates to the field of laser processing technology for ceramic materials, and in particular to a fully automated laser drilling and cavity-opening device for green ceramic sheets and its working process. Background Technology

[0002] In the multilayer co-fired ceramic process of ceramic tube shells and substrates, laser drilling and cavity opening is an important step. Fully automatic soft ceramic laser drilling and cavity opening equipment not only meets the process requirements of cutting micro-holes, irregular holes and opening cavities on alumina sheets, but also features full automation, high speed, high precision, low circumferential edge quality thermal effect and custom processing contours. It can effectively improve the production efficiency of material processing, reduce the process control problems such as soft ceramic deformation caused by human operation, and ensure high-precision, dense, uniform and void-free high-quality circuit conduction between the layers of co-fired ceramics, effectively ensuring good electrical performance connection of devices. Summary of the Invention

[0003] Therefore, the purpose of this invention is to provide a fully automated laser drilling and cavity-opening device for green ceramic sheets and its workflow, which can meet the high-precision and high-edge-cutting quality processing requirements for fully automated micro-hole opening, irregular hole and outer contour processing of soft ceramics in multi-layer co-fired ceramic processes.

[0004] To achieve the aforementioned objectives, the technical solution adopted is as follows: A fully automated laser drilling and cavity-opening device for raw ceramic tiles includes a vision positioning system, a fully automated feeding and shaping system, a raw ceramic tile supply and transmission system, a laser processing system, a raw ceramic tile and platform cleaning system, and a fully automated unloading system. The visual positioning system includes a left-position positioning CCD and a right-position positioning CCD that are horizontally symmetrically distributed. The fully automatic feeding and shaping system includes a pallet feeding component, an empty pallet recycling component, a feeding and conveying robot, and a soft ceramic shaping component. The soft ceramic shaping component, the empty pallet recycling component, and the pallet feeding component are arranged sequentially from front to back on the left side of the fully automatic feeding module. The feeding and conveying robot is arranged on the right side of the fully automatic feeding module. The entire feeding and shaping system is separately covered by a sheet metal cover. The green ceramic tile supply and transmission system includes a spindle transmission component, a left negative pressure platform adsorption component, and a right negative pressure platform adsorption component. The spindle transmission component is located at the front end of the dual-station laser processing module. The left negative pressure platform adsorption component and the right negative pressure platform adsorption component are located at the left and right ends of the spindle transmission component, respectively. The two negative pressure platforms can switch positions from the front end to the rear end of the equipment. When moved to the rear end, they are close to the left and right station positioning CCDs. The laser processing system includes a left-position galvanometer processing and scanning component, a right-position galvanometer processing and scanning component, and a marble platform. The left-position galvanometer processing and scanning component and the right-position galvanometer processing and scanning component are respectively located at the left and right rear ends of the laser processing module, and a left-position positioning CCD and a right-position positioning CCD are respectively installed. Both components are installed on the marble platform. The green ceramic tile and platform cleaning system includes a rolling cleaning brush assembly, a vacuum adsorption chamber, a low-viscosity dust-adhesive roller, and a translational cleaning scraper assembly. Each assembly is installed on the front and rear sides of the same steel beam and is located between the laser processing system and the green ceramic tile supply and transmission system. The fully automatic unloading system includes an unloading transfer table assembly, an empty pallet supply assembly, a green ceramic tile unloading assembly, and an unloading conveying robot. The unloading transfer table assembly, the empty pallet supply assembly, and the green ceramic tile unloading assembly are arranged sequentially from front to back on the right side of the fully automatic unloading module, while the unloading conveying robot is located on the left side of the fully automatic unloading module. The entire unloading system is separately covered by a sheet metal cover.

[0005] As a further improvement of the present invention, both the left and right station positioning CCDs are mounted on the Z-axis module. The camera field of view distance is adjusted by the mounting screw adjustment mechanism to meet the requirement of being consistent with the laser processing working height. The positioning CCDs on both sides are horizontally symmetrically distributed and can be adjusted to a suitable position by program control.

[0006] As a further improvement of the present invention, both the pallet feeding component and the empty pallet recycling component have Z-axis dimensional adjustment function, and the feeding and conveying robot has X-axis and Z-axis dual-dimensional adjustment. The three components work together in sequence to realize the sequential supply of palletized materials and the separation of green ceramic tiles from the pallet. The upper outlet of the pallet feeding component and the lower outlet of the empty pallet recycling component are equipped with pallet detection sensors to detect the remaining material in real time. The soft ceramic shaping component has X-axis dimensional adjustment and XY shaping air clamps to independently complete the shape and position adjustment of the green ceramic tiles before processing.

[0007] As a further improvement of the present invention, both the left-position galvanometer processing scanning component and the right-position galvanometer processing scanning component have Z-axis dimensional adjustment function. The laser beam is focused by an ultrafast laser on the marble platform through a positive pressure external optical path, a galvanometer, and a focusing field lens onto a negative pressure platform adsorption component. The laser focus position can be adjusted by program control.

[0008] As a further improvement of the present invention, the rolling cleaning brush assembly and the low-viscosity dust-adhesive roller have θ-axis dimensional adjustment, and the translational cleaning scraper assembly has pneumatic Z-axis dimensional adjustment and scraping angle adjustment functions. Each cleaning component is enclosed by a vacuum adsorption chamber, which, together with the negative pressure platform adsorption assembly, removes the processed ceramic pieces and slag debris from the platform.

[0009] As a further improvement of the present invention, the empty pallet supply component and the green ceramic tile unloading component have Z-axis dimensional adjustment function, and pallet detection sensors are provided at the corresponding outlet positions of the two to detect the empty pallet balance in real time; the unloading and conveying robot has X-axis and Z-axis dual-dimensional adjustment, and can cooperate with other components in sequence to realize fully automatic unloading of palletized materials.

[0010] A fully automated laser drilling and cavity opening process for green ceramic tiles based on any of the above-described devices includes a loading process, a laser processing process, and a unloading process. The various systems work collaboratively, and the specific steps are as follows: (1) Loading process: Manually place the stacked tray jigs containing green ceramic pieces into the loading position of the tray loading component; the loading transfer robot moves to the top of the tray loading component and moves down to pick up the material, the tray loading component moves up to feed the material, the robot opens the four corner suction nozzles to grab the tray under negative pressure and moves it to the top of the empty tray recycling component; after the robot moves down, the empty tray recycling component loads the material, and after the sensor detects that it is in position, the robot switches to the center surface to adsorb the green ceramic pieces under negative pressure and moves them to the soft ceramic shaping component; the shaping platform turns on positive pressure, and the XY two-way shaping air clamp closes to complete the initial position adjustment; (2) Laser processing workflow: The left and right negative pressure platform adsorption components move to the front waiting position, and the spindle transmission component transfers the shaped green ceramic sheet to the two negative pressure platforms in sequence; after the platform adsorbs the green ceramic sheet, it moves to the coverage area of ​​the corresponding galvanometer processing scanning component, and completes the drilling and cavity opening processing after positioning by the vision positioning system; after the processing is completed, the spindle transmission component transfers the green ceramic sheet to the fully automatic unloading system, the negative pressure platform moves to the cleaning station, and the cleaning system is started to complete the platform cleaning; (3) Unloading process: Manually place the stack of empty pallet fixtures into the empty pallet supply component; the spindle transfer robot transfers the processed green ceramic pieces to the unloading transfer table component. The unloading transfer robot uses surface adsorption to pick up the green ceramic pieces and transfer them to the empty pallet; after the green ceramic pieces are placed in place, the robot switches to the four corner suction nozzles to negative pressure adsorb the pallet and transfers it to the green ceramic piece unloading component to complete the unloading.

[0011] The beneficial effects of this invention are as follows: Compared with traditional laser processing equipment, the equipment of this invention, based on the characteristics of soft ceramic material being soft and easily deformable, integrates the fully automatic loading and unloading function of a special tray fixture, the soft ceramic shaping and positioning function, the multi-level flexible adsorption robot and platform cleaning function, etc., eliminating the process control problems such as soft ceramic deformation during the processing, avoiding the problem of processing accuracy fluctuation caused by the soft and easily deformable characteristics of soft ceramic material, while simplifying the mechanical structure and reducing equipment costs. Attached Figure Description

[0012] The accompanying drawings, which form part of this application, are used to provide a further understanding of the invention. The illustrative embodiments of the invention and their descriptions are used to explain the invention and do not constitute an undue limitation of the invention. In the drawings: Figure 1 This is a schematic diagram of the structure of the present invention.

[0013] In the diagram: 1. Left station positioning CCD; 2. Right station positioning CCD; 3. Pallet loading assembly; 4. Empty pallet recycling assembly; 5. Loading and conveying robot; 6. Soft ceramic shaping assembly; 7. Spindle transmission assembly; 8. Left negative pressure platform adsorption assembly; 9. Right negative pressure platform adsorption assembly; 10. Left station galvanometer processing scanning assembly; 11. Right station galvanometer processing scanning assembly; 12. Marble platform; 13. Rolling cleaning brush assembly; 14. Translational cleaning scraper assembly; 15. Unloading transfer table assembly; 16. Empty pallet supply assembly; 17. Soft ceramic unloading assembly; 18. Unloading and conveying robot. Detailed Implementation

[0014] It should be noted that, unless otherwise specified, the embodiments and features described in this application can be combined with each other. The present invention will now be described in detail with reference to the accompanying drawings and embodiments.

[0015] To enable those skilled in the art to better understand the present application, the technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present application, and not all embodiments. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative effort should fall within the scope of protection of the present application.

[0016] like Figure 1 As shown, a fully automatic laser drilling and cavity opening device for raw ceramic tiles adopts a split and splicing structure, including a vision positioning system, a fully automatic feeding and shaping system, a raw ceramic tile supply and transmission system, a laser processing system, a raw ceramic tile and platform cleaning system, and a fully automatic unloading system; The vision positioning system includes a horizontally symmetrically distributed left-station positioning CCD1 and right-station positioning CCD2, corresponding to the two processing stations of the dual-station laser processing module. Both the left-station positioning CCD1 and right-station positioning CCD2 are mounted on the Z-axis module. The camera's field of view distance can be flexibly adjusted via a screw adjustment mechanism to ensure consistency with the laser processing working height. Simultaneously, the two positioning CCDs can be precisely adjusted in position through program control, achieving high-precision positioning before processing the green ceramic sheet and providing a positional reference for subsequent laser processing.

[0017] The fully automated feeding and shaping system integrates pallet feeding, empty pallet recycling, raw ceramic tile adsorption and transportation, and shaping and positioning functions. Specifically, it includes a pallet feeding component 3, an empty pallet recycling component 4, a feeding and transportation robot 5, and a soft ceramic shaping component 6. The soft ceramic shaping component 6, empty pallet recycling component 4, and pallet feeding component 3 are arranged sequentially from front to back on the left side of the fully automated feeding module, while the feeding and transportation robot 5 is located on the right side of the fully automated feeding module. The entire feeding and shaping system is separately covered by a sheet metal cover, providing dust protection, safety, and noise reduction.

[0018] Both the pallet feeding assembly 3 and the empty pallet recycling assembly 4 have Z-axis dimensional adjustment capabilities, while the feeding and conveying robot 5 has both X-axis and Z-axis dual-dimensional adjustment capabilities. These three components work in sequence to achieve the sequential supply of palletized materials and the separation of green ceramic tiles from the carrying pallets. Pallet detection sensors are installed at the upper outlet of the pallet feeding assembly 3 and the lower outlet of the empty pallet recycling assembly 4 to detect the remaining amount of fed materials and empty pallets in real time, ensuring continuous feeding. The soft ceramic shaping assembly 6 has X-axis dimensional adjustment capabilities and an XY shaping pneumatic clamp, enabling it to independently adjust the shape and position of the green ceramic tiles before processing, ensuring consistent processing standards for each tile and maintaining processing consistency.

[0019] The green ceramic sheet supply and conveying system includes a spindle conveying assembly 7, a left negative pressure platform adsorption assembly 8, and a right negative pressure platform adsorption assembly 9, responsible for the precise conveying of green ceramic sheets from the shaping station to the processing station. The spindle conveying assembly 7 is located at the front end of the dual-station laser processing module, serving as the core power mechanism for green ceramic sheet conveying. The left and right negative pressure platform adsorption assemblies 8 and 9 are located at the left and right ends of the spindle conveying assembly 7, respectively, allowing for position switching from the front to the rear of the equipment. When moved to the rear, it is positioned close to the left and right station positioning CCD2, facilitating rapid start-up of processing after positioning. The negative pressure platform employs a flexible adsorption structure, effectively preventing deformation of the green ceramic sheets during conveying and ensuring material integrity.

[0020] The laser processing system is the core unit for drilling and opening cavities in green ceramic tiles. It includes a left-station galvanometer processing scanning assembly 10, a right-station galvanometer processing scanning assembly 11, and a marble platform 12. The left-station and right-station galvanometer processing scanning assemblies 10 and 11 are respectively located at the left and right rear ends of the laser processing module, and each is equipped with a left-station positioning CCD1 and a right-station positioning CCD2. Both assemblies are fixedly mounted on the marble platform 12. The marble platform 12 possesses high strength, high stability, and anti-deformation characteristics, providing a stable installation reference for laser processing. Both the left and right galvanometer processing scanning assemblies 11 have Z-axis dimensional adjustment capabilities. The laser beam, generated by an ultrafast laser on the marble platform 12, is focused onto the green ceramic tile on the negative-pressure platform adsorption assembly via a positive-pressure external optical path, galvanometer, and focusing field lens. The laser focus position can be precisely adjusted through program control to ensure laser spot focusing accuracy, achieving high-precision processing of micro-holes, irregularly shaped holes, and complex contours. The dual-station parallel processing design significantly improves equipment utilization and production efficiency.

[0021] The green ceramic tile and platform cleaning system, located between the laser processing system and the green ceramic tile supply and transmission system, includes a rolling cleaning brush assembly 13, a vacuum adsorption chamber, a low-viscosity dust-collecting roller, and a translational cleaning scraper assembly 14. These components are mounted on the front and rear sides of the same steel beam, forming a multi-level cleaning defense. The rolling cleaning brush assembly 13 and the low-viscosity dust-collecting roller have θ-axis dimensional adjustment capabilities, while the translational cleaning scraper assembly 14 has pneumatic Z-axis dimensional adjustment and scraping angle adjustment capabilities, adaptable to different cleaning needs. Each cleaning component is enclosed by the vacuum adsorption chamber, and in conjunction with the adsorption effect of the negative pressure platform adsorption assembly, it can efficiently remove slag and debris from the surface of the processed green ceramic tile and the negative pressure platform, preventing residual impurities from affecting the quality of subsequent processing and extending the equipment's service life.

[0022] The fully automatic unloading system is symmetrically structured with the fully automatic feeding and shaping system, and includes an unloading transfer table assembly 15, an empty pallet supply assembly 16, a green ceramic tile unloading assembly, and an unloading conveyor robot 18. The unloading transfer table assembly 15, the empty pallet supply assembly 16, and the green ceramic tile unloading assembly are arranged sequentially from front to back on the right side of the fully automatic unloading module, while the unloading conveyor robot 18 is located on the left side of the fully automatic unloading module. The entire unloading system is separately covered by a sheet metal cover for dust protection.

[0023] The empty pallet supply component 16 and the green ceramic tile unloading component have Z-axis dimensional adjustment capabilities. Pallet detection sensors are installed at the upper outlet of the empty pallet supply component 16 and the lower outlet of the green ceramic tile unloading component to detect the remaining empty pallet quantity in real time, ensuring continuous unloading. The unloading and conveying robot 18 has X-axis and Z-axis dual-dimensional adjustment capabilities. By coordinating with other components in a timing sequence, it achieves fully automated unloading of palletized materials. During the entire unloading process, the robot does not directly contact the green ceramic tiles, avoiding secondary deformation of the materials.

[0024] A fully automated laser drilling and cavity opening process for green ceramic tiles based on the above-mentioned equipment includes a loading process, a laser processing process, and a unloading process. The various systems work together, and the specific steps are as follows: (1) Loading process: Manually place the stacked tray jigs containing green ceramic pieces into the loading position of the tray loading component 3; the loading transfer robot 5 moves to the top of the tray loading component 3 and moves down to pick up the material, the tray loading component 3 moves up to feed the material, the robot opens the four corner suction nozzles to grab the tray under negative pressure and moves it to the top of the empty tray recycling component 4; after the robot moves down, the empty tray recycling component 4 loads the material, and after the sensor detects that it is in position, the robot switches to the center surface to adsorb the green ceramic pieces under negative pressure and moves them to the soft ceramic shaping component 6; the shaping platform opens the positive pressure, and the XY two-way shaping air clamp closes to complete the initial position adjustment; (2) Laser processing workflow: The left and right negative pressure platform adsorption components 9 move to the front waiting position, and the spindle transmission component 7 transfers the shaped green ceramic sheet to the two negative pressure platforms in sequence; after the platform adsorbs the green ceramic sheet, it moves to the coverage area of ​​the corresponding galvanometer processing scanning component, and completes the drilling and cavity opening processing after positioning by the vision positioning system; after the processing is completed, the spindle transmission component 7 transfers the green ceramic sheet to the fully automatic unloading system, the negative pressure platform moves to the cleaning station, and the cleaning system starts to complete the platform cleaning; (3) Unloading process: Manually place the stack of empty pallet fixtures into the empty pallet supply component 16; the spindle transfer robot moves the processed green ceramic pieces to the unloading transfer table component 15, and the unloading transfer robot 18 uses surface adsorption to pick up the green ceramic pieces and transfer them to the empty pallet; after the green ceramic pieces are placed in place, the robot switches to the four corner suction nozzles to negative pressure adsorb the pallet and transfers it to the green ceramic piece unloading component to complete the unloading.

[0025] The above description is merely a preferred embodiment of the present invention and is not intended to limit the invention. Various modifications and variations can be made to the present invention by those skilled in the art. Any modifications, equivalent substitutions, improvements, component splitting or combination, etc., made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. A fully automated laser drilling and cavity-opening device for green ceramic tiles, characterized in that: It includes a visual positioning system, a fully automated feeding and shaping system, a raw ceramic tile supply and conveying system, a laser processing system, a raw ceramic tile and platform cleaning system, and a fully automated unloading system; The visual positioning system includes a left-position positioning CCD and a right-position positioning CCD that are horizontally symmetrically distributed. The fully automatic feeding and shaping system includes a pallet feeding component, an empty pallet recycling component, a feeding and conveying robot, and a soft ceramic shaping component. The soft ceramic shaping component, the empty pallet recycling component, and the pallet feeding component are arranged sequentially from front to back on the left side of the fully automatic feeding module. The feeding and conveying robot is arranged on the right side of the fully automatic feeding module. The entire feeding and shaping system is separately covered by a sheet metal cover. The green ceramic tile supply and transmission system includes a spindle transmission component, a left negative pressure platform adsorption component, and a right negative pressure platform adsorption component. The spindle transmission component is located at the front end of the dual-station laser processing module. The left negative pressure platform adsorption component and the right negative pressure platform adsorption component are located at the left and right ends of the spindle transmission component, respectively. The two negative pressure platforms can switch positions from the front end to the rear end of the equipment. When moved to the rear end, they are close to the left and right station positioning CCDs. The laser processing system includes a left-position galvanometer processing and scanning component, a right-position galvanometer processing and scanning component, and a marble platform. The left-position galvanometer processing and scanning component and the right-position galvanometer processing and scanning component are respectively located at the left and right rear ends of the laser processing module, and a left-position positioning CCD and a right-position positioning CCD are respectively installed. Both components are installed on the marble platform. The green ceramic tile and platform cleaning system includes a rolling cleaning brush assembly, a vacuum adsorption chamber, a low-viscosity dust-adhesive roller, and a translational cleaning scraper assembly. Each assembly is installed on the front and rear sides of the same steel beam and is located between the laser processing system and the green ceramic tile supply and transmission system. The fully automatic unloading system includes an unloading transfer table assembly, an empty pallet supply assembly, a green ceramic tile unloading assembly, and an unloading conveying robot. The unloading transfer table assembly, the empty pallet supply assembly, and the green ceramic tile unloading assembly are arranged sequentially from front to back on the right side of the fully automatic unloading module, while the unloading conveying robot is located on the left side of the fully automatic unloading module. The entire unloading system is separately covered by a sheet metal cover.

2. The fully automatic laser drilling and cavity-opening equipment for green ceramic tiles according to claim 1, characterized in that: Both the left and right station positioning CCDs are mounted on the Z-axis module. The camera field of view distance is adjusted by the mounting screw adjustment mechanism to meet the requirement of being consistent with the laser processing working height. The positioning CCDs on both sides are horizontally symmetrically distributed and can be adjusted to a suitable position through program control.

3. The fully automated laser drilling and cavity-opening equipment for green ceramic tiles according to claim 1, characterized in that: Both the pallet feeding component and the empty pallet recycling component have Z-axis dimensional adjustment functions, and the feeding and conveying robot has X-axis and Z-axis dual-dimensional adjustment. The three components work together in sequence to achieve the sequential supply of palletized materials and the separation of green ceramic tiles from the pallets. The upper outlet of the pallet feeding component and the lower outlet of the empty pallet recycling component are equipped with pallet detection sensors to detect the remaining material in real time. The soft ceramic shaping component has X-axis dimensional adjustment and XY shaping air clamps to independently complete the shape and position adjustment of the green ceramic tiles before processing.

4. The fully automated laser drilling and cavity-opening equipment for green ceramic tiles according to claim 1, characterized in that: Both the left-position galvanometer processing and scanning component and the right-position galvanometer processing and scanning component have Z-axis dimensional adjustment function. The laser beam is focused by an ultrafast laser on the marble platform through a positive pressure external optical path, a galvanometer, and a focusing field lens onto a negative pressure platform adsorption component. The laser focus position can be adjusted by program control.

5. The fully automated laser drilling and cavity-opening equipment for green ceramic tiles according to claim 1, characterized in that: The rolling cleaning brush assembly and the low-viscosity dust-adhesive roller have θ-axis dimensional adjustment, and the translational cleaning scraper assembly has pneumatic Z-axis dimensional adjustment and scraping angle adjustment functions. Each cleaning component is enclosed by a vacuum adsorption chamber, which, together with the negative pressure platform adsorption assembly, removes the processed ceramic pieces and slag debris from the platform.

6. The fully automated laser drilling and cavity-opening equipment for green ceramic tiles according to claim 1, characterized in that: The empty pallet supply component and the green ceramic tile unloading component have Z-axis dimensional adjustment function. Pallet detection sensors are installed at the corresponding outlet positions of both to detect the empty pallet balance in real time. The unloading and conveying robot has X-axis and Z-axis dual-dimensional adjustment and can cooperate with other components in sequence to realize fully automatic unloading of palletized materials.

7. A fully automated laser drilling and cavity opening process for green ceramic tiles based on the equipment described in any one of claims 1-6, characterized in that, The process includes loading, laser processing, and unloading, with each system working collaboratively. The specific steps are as follows: (1) Loading process: Manually place the stacked tray jigs containing green ceramic pieces into the loading position of the tray loading component; the loading transfer robot moves to the top of the tray loading component and moves down to pick up the material, the tray loading component moves up to feed the material, the robot opens the four corner suction nozzles to grab the tray under negative pressure and moves it to the top of the empty tray recycling component; after the robot moves down, the empty tray recycling component loads the material, and after the sensor detects that it is in position, the robot switches to the center surface to adsorb the green ceramic pieces under negative pressure and moves them to the soft ceramic shaping component; the shaping platform turns on positive pressure, and the XY two-way shaping air clamp closes to complete the initial position adjustment; (2) Laser processing workflow: The left and right negative pressure platform adsorption components move to the front waiting position, and the spindle transmission component transfers the shaped green ceramic sheet to the two negative pressure platforms in sequence; after the platform adsorbs the green ceramic sheet, it moves to the coverage area of ​​the corresponding galvanometer processing scanning component, and completes the drilling and cavity opening processing after positioning by the vision positioning system; after the processing is completed, the spindle transmission component transfers the green ceramic sheet to the fully automatic unloading system, the negative pressure platform moves to the cleaning station, and the cleaning system is started to complete the platform cleaning; (3) Unloading process: Manually place the stack of empty pallet fixtures into the empty pallet supply component; The spindle transfer robot moves the processed green ceramic sheet to the unloading transfer table assembly. The unloading transfer robot uses surface adsorption to pick up the green ceramic sheet and transfer it to the empty tray. After the green ceramic sheet is placed in place, the robot switches to the four corner suction nozzles to negative pressure adsorb the tray and transfer it to the green ceramic sheet unloading assembly to complete the unloading.

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