High utilization rate gas phase coating furnace

Abstract

This invention relates to a high-utilization vapor phase coating furnace, belonging to the field of semiconductor technology. It includes a base, a rotating frame connected above the base, a chamber rotatably connected to the rotating frame, a gas outlet pipe connected to one end of the chamber, and a fixed frame rotatably connected to the other end of the chamber. The fixed frame has a gas outlet on its surface and is connected to the rotating frame. An inlet pipe is connected to the inner side of the fixed frame, and a control valve is installed on the surface of the inlet pipe. In this invention, the rotation of the chamber drives a reciprocating gear, which in turn drives a reciprocating screw, which in turn drives a reciprocating rod. During this reciprocating motion, the reciprocating rod cyclically opens and closes three sets of control valves inside the fixed frame. Furthermore, the gas discharge time is adjusted according to the position of the three sets of control valves during the reciprocating motion, thereby ensuring that the reaction time between the powder and gas at different locations within the chamber is the same.

Description

Technical Field

[0001] This invention relates to the field of semiconductor technology, specifically to a high-utilization vapor phase coating furnace. Background Technology

[0002] Semiconductors are materials whose conductivity at room temperature falls between that of conductors and insulators. Their core value lies in controllable conductivity, which can be precisely adjusted through doping, voltage, temperature, and light. They are the foundation of modern electronics and the information industry. The semiconductor manufacturing process requires vapor phase coating furnaces (VPR furnaces). The core of VPR processing for semiconductor powders is depositing a uniform functional thin film on the surface of the powder particles, thereby modifying the powder. Processable semiconductor powders are mainly divided into four categories, covering mainstream semiconductor material systems such as silicon-based, compound, and ceramic-based materials.

[0003] In existing vapor phase coating furnaces, when processing semiconductor powder, external reactive gases need to be introduced into the inner side of the furnace through an inlet pipe. The reactive gases then react with the powder through an outlet in the inlet pipe. Because the inlet pipe is relatively long inside the furnace, the flow rate of the reactive gas discharged from the outlet at the tail end of the inlet pipe is less than that at the outlet at the head end. This difference in the flow rate of the reactive gases results in some areas of the powder inside the furnace not fully reacting with the reactive gases, which in turn leads to inconsistent quality of the finished semiconductor powder. Furthermore, during the reaction process, the powder accumulates at the bottom of the furnace due to gravity, and the powder that is partially attached to the furnace wall does not fully contact the reactive gases, further contributing to the inconsistent reaction of the powder inside the furnace.

[0004] To address the aforementioned issues, innovative design based on existing methods is urgently needed. Summary of the Invention

[0005] The purpose of this invention is to provide a high-utilization vapor phase coating furnace to solve the problem in the background art where, during operation, the flow rate of the reactant gas discharged from the outlet at the tail end of the inlet pipe is less than the flow rate of the reactant gas at the outlet at the head end of the inlet pipe. This inconsistent flow rate leads to incomplete reaction of some areas of the powder inside the furnace with the reactant gas, resulting in inconsistent quality of the finished semiconductor powder. The technical solution of this invention addresses the problem of overly simplistic solutions in existing technologies by providing a significantly different solution.

[0006] To achieve the above objectives, the present invention provides the following technical solution: a high-utilization vapor phase coating furnace, comprising a base, a rotating frame connected above the base, a chamber rotatably connected to the rotating frame, an outlet pipe connected to one end of the chamber, and a fixed frame rotatably connected to the other end of the chamber. An outlet is provided on the surface of the fixed frame, and the fixed frame is connected to the rotating frame. An inlet pipe is connected to the inner side of the fixed frame, a control valve is installed on the surface of the inlet pipe, and the control valve's air hole coincides with the outlet hole on the surface of the fixed frame. A rack and pinion valve rod is rotatably connected to the side of the control valve, and a reciprocating screw is rotatably connected to the inner side of the fixed frame. The reciprocating screw is connected to a reciprocating gear at one end on the outside of the bore, and a rack is provided on the inside of the bore housing. The reciprocating gear meshes with the rack. A reciprocating rod is sleeved on the reciprocating screw and is slidably connected to the outer wall of the intake pipe. A fixed toothed plate is connected to one end of the reciprocating rod, and a threaded screw is rotatably connected to the inner side of the other end of the reciprocating rod. A sliding toothed block is threadedly connected to the threaded screw. An adjusting gear is also rotatably connected to the inner side of the sliding toothed block end of the reciprocating rod via a rotating shaft. The rotating shaft of the adjusting gear is connected to the threaded screw via a bevel gear set. An adjusting toothed plate is connected to the inner side of the fixed frame. A material turning assembly is disposed inside the bore.

[0007] Preferably, the material-turning assembly has a connecting frame connected to the rotating frame, the connecting frame being rotatably connected to the bore, a toothed ring being provided on the inner side of the connecting frame, a transmission gear being meshed on the inner side of the toothed ring, a rotating sleeve being sleeved at the center of the transmission gear, and the rotating sleeve being rotatably connected to the bore, a cross slide rod being slidably connected on the inner side of the rotating sleeve, a ball being connected to one end of the cross slide rod located outside the bore, and a spiral material-turning rod being connected to one end of the cross slide rod located inside the bore, and a groove being formed on the inner side of the connecting frame, with the ball fitting into the groove.

[0008] Preferably, both ends of the adjusting toothed plate are connected to the inner wall of the fixed frame, and a rack is provided on the front side of the middle section control valve of the adjusting toothed plate, by providing a rack in the middle section of the adjusting toothed plate.

[0009] Preferably, a guide rod is fixedly connected to the inner side of the reciprocating rod, and the guide rod is slidably connected to the sliding tooth block.

[0010] Preferably, a rotating roller is rotatably connected above the base, and the rotating roller is in contact with the outer wall of the bottom of the chamber.

[0011] Preferably, the air outlet pipe has an air outlet hole located inside the bore, and the size of the air outlet hole is smaller than the size of the air inlet hole on the surface of the fixed frame.

[0012] Preferably, the outer side of the cross slide bar is provided with a cross protrusion, and the cross protrusion is slidably connected to the rotating sleeve.

[0013] Preferably, there are two sets of connecting frames, and the concave and convex directions of the connecting frame grooves are opposite.

[0014] Preferably, one end of the cross slide bar located inside the bore is connected to a retractable sealing gasket, and the other end of the sealing gasket is connected to the rotating sleeve.

[0015] Compared with the prior art, the beneficial effects of the present invention are: 1. In this invention, the rotation of the chamber drives the reciprocating gear to rotate, which in turn drives the reciprocating screw to rotate, which in turn drives the reciprocating rod to reciprocate. During the reciprocating motion of the reciprocating rod, the valves of the three sets of control valves inside the fixed frame are opened in a cyclical manner. Furthermore, the gas discharge time is adjusted according to the position of the three sets of control valves during the reciprocating motion of the reciprocating rod, thereby achieving the same reaction time between the powder and the gas at different positions inside the chamber.

[0016] 2. In this invention, the rotation of the bore also drives the rotation of the transmission gear. As the transmission gear follows the rotation of the bore, it rotates due to the influence of the gear ring. The rotation of the transmission gear drives the cross slide rod to rotate, and the rotation of the cross slide rod drives the spiral turning rod to rotate. During the rotation of the cross slide rod, it also undergoes horizontal reciprocating motion due to the influence of the groove and ball bearings on the inner side of the connecting frame. The reciprocating horizontal motion and the rotating spiral turning rod stir and mix the powder inside the bore, reducing the occurrence of incomplete reaction of the powder at the bottom of the bore. Attached Figure Description

[0017] Figure 1 This is a schematic diagram of the main structure of the present invention; Figure 2 This is a schematic diagram of the internal structure of the bore of the present invention; Figure 3 This is a schematic diagram of the inner structure of the fixed frame of the present invention; Figure 4 For the present invention Figure 3 Enlarged structural diagram at point A; Figure 5 This is a schematic diagram of the side structure of the reciprocating rod of the present invention; Figure 6 For the present invention Figure 5 Enlarged structural diagram at point B; Figure 7 This is a schematic diagram of the top surface structure of the reciprocating rod of the present invention; Figure 8 For the present invention Figure 7 Enlarged structural diagram at point C; Figure 9 This is a schematic diagram of the side structure of the bore of the present invention; Figure 10 For the present invention Figure 9 Enlarged structural diagram at point D; Figure 11 This is a schematic diagram of the front structure of the bore of the present invention.

[0018] In the diagram: 1. Base; 2. Rotating frame; 3. Chamber; 4. Inlet pipe; 5. Outlet pipe; 6. Fixed frame; 7. Control valve; 8. Rack and pinion valve stem; 9. Reciprocating screw; 10. Reciprocating rod; 11. Fixed toothed plate; 12. Threaded screw; 13. Sliding toothed block; 14. Adjusting toothed plate; 15. Flipping assembly; 151. Connecting frame; 152. Gear ring; 153. Transmission gear; 154. Rotating sleeve; 155. Cross slide bar; 156. Ball bearing; 157. Spiral flipping rod; 16. Adjusting gear; 17. Reciprocating gear. Detailed Implementation

[0019] To further illustrate the technical means and effects adopted by the present invention in order to achieve the intended purpose, the following detailed description is provided in conjunction with the accompanying drawings and preferred embodiments, based on the specific implementation methods, structures, features and effects of the present invention.

[0020] Please see Figures 1-11 This invention provides a technical solution: a high-utilization vapor phase coating furnace, comprising a base 1, a rotating frame 2 connected above the base 1, a chamber 3 rotatably connected to the rotating frame 2, an outlet pipe 5 connected to one end of the chamber 3, and a fixed frame 6 rotatably connected to the other end of the chamber 3, with an outlet port on the surface of the fixed frame 6, and the fixed frame 6 connected to the rotating frame 2; an inlet pipe 4 connected to the inner side of the fixed frame 6, a control valve 7 installed on the surface of the inlet pipe 4, with the air hole of the control valve 7 coinciding with the outlet port on the surface of the fixed frame 6; a rack valve stem 8 rotatably connected to the side of the control valve 7; a reciprocating screw 9 rotatably connected to the inner side of the fixed frame 6; a reciprocating gear 17 connected to one end of the reciprocating screw 9 located outside the chamber 3; a rack provided inside the chamber 3, and the reciprocating gear 17 meshing with the rack of the chamber 3; a reciprocating rod 10 sleeved on the reciprocating screw 9, and the reciprocating rod 10 slidingly connected to the outer wall of the inlet pipe 4; and the reciprocating rod 10... One end of the reciprocating rod 10 is connected to a fixed toothed plate 11, and the other end of the reciprocating rod 10 is rotatably connected to a threaded screw 12. The threaded screw 12 is threadedly connected to a sliding toothed block 13. The reciprocating rod 10 is located inside the sliding toothed block 13 and is also rotatably connected to an adjusting gear 16 via a rotating shaft. The rotating shaft of the adjusting gear 16 is connected to the threaded screw 12 via a bevel gear set. The fixed frame 6 is connected to an adjusting toothed plate 14. During the rotation of the chamber 3, the reciprocating gear 17 will rotate, the reciprocating gear 17 will rotate, the reciprocating screw 9 will rotate, and the reciprocating screw 9 will rotate, causing the reciprocating rod 10 to reciprocate. During the reciprocating motion of the reciprocating rod 10, the valves of the three sets of control valves 7 inside the fixed frame 6 will be opened in a cyclical manner. During the reciprocating motion of the reciprocating rod 10, the gas discharge time will be adjusted differently according to the position of the three sets of control valves 7, so as to achieve the same reaction time between the powder and the gas at different positions inside the chamber 3. The material turning assembly 15 is located inside the bore 3.

[0021] In one embodiment of the present invention, the material-turning assembly 15 has a connecting frame 151 connected to the rotating frame 2. The connecting frame 151 is rotatably connected to the bore 3. A toothed ring 152 is provided on the inner side of the connecting frame 151. A transmission gear 153 is meshed on the inner side of the toothed ring 152. A rotating sleeve 154 is sleeved at the center of the transmission gear 153 and is rotatably connected to the bore 3. A cross slide rod 155 is slidably connected on the inner side of the rotating sleeve 154. A ball bearing 156 is connected to one end of the cross slide rod 155 located outside the bore 3, and a spiral material-turning rod 157 is connected to one end of the cross slide rod 155 located inside the bore 3. A recess is provided on the inner side of the connecting frame 151. The convex groove and the ball bearing 156 fits into the concave and convex groove. During the rotation of the chamber 3, the transmission gear 153 will also rotate. During the rotation of the chamber 3, the transmission gear 153 will rotate due to the influence of the gear ring 152. The rotation of the transmission gear 153 will drive the cross slide rod 155 to rotate. The rotation of the cross slide rod 155 will drive the spiral turning rod 157 to rotate. During the rotation of the cross slide rod 155, it will also be affected by the concave and convex groove and the ball bearing 156 on the inner side of the connecting frame 151 to perform horizontal reciprocating motion. The reciprocating horizontal motion and the rotating spiral turning rod 157 will stir and mix the powder inside the chamber 3, reducing the occurrence of incomplete reaction of the powder at the bottom of the chamber 3. As one embodiment of the present invention, both ends of the adjusting tooth plate 14 are connected to the inner wall of the fixed frame 6, and the adjusting tooth plate 14 is provided with a rack in front of the middle section control valve 7. By providing a rack in the middle section of the adjusting tooth plate 14, the adjusting gear 16 can rotate when passing the rack position to adjust the position of the sliding tooth block 13. In one embodiment of the present invention, a guide rod is fixedly connected to the inner side of the reciprocating rod 10, and the guide rod is slidably connected to the sliding tooth block 13. By setting the guide rod to limit the sliding tooth block 13, the stability of the sliding tooth block 13 during horizontal movement is improved. As one embodiment of the present invention, a rotating roller is rotatably connected above the base 1, and the rotating roller is in contact with the bottom outer wall of the bore 3. By providing the rotating roller to support the bore 3, the stability of the bore 3 during rotation is improved. As one embodiment of the present invention, the exhaust pipe 5 is provided with an exhaust hole inside the chamber 3, and the size of the exhaust hole of the exhaust pipe 5 is smaller than the size of the air inlet hole on the surface of the fixed frame 6. Since the size of the air inlet hole is larger than the diameter of the exhaust hole, the thermal expansion of the gas inside the chamber 3 can be compensated. As one embodiment of the present invention, a cross protrusion is provided on the outer side of the cross slide bar 155, and the cross protrusion is slidably connected to the rotating sleeve 154. By providing the cross protrusion, the rotating sleeve 154 can drive the cross slide bar 155 to rotate synchronously during the rotation process. As one embodiment of the present invention, the connecting frame 151 is provided with two sets, and the concave and convex directions of the connecting frame 151 are opposite. By providing two sets of non-mirror-image concave and convex grooves, the ball 156 can perform horizontal reciprocating horizontal movement. In one embodiment of the present invention, a retractable sealing gasket is connected to one end of the cross slide bar 155 located inside the bore 3, and the other end of the sealing gasket is connected to the rotating sleeve 154. By providing a retractable sealing gasket, the connection between the rotating sleeve 154 and the cross slide bar 155 can be sealed, thus avoiding the risk of powder from the inside of the bore 3 entering the connection between the rotating sleeve 154 and the cross slide bar 155.

[0022] Working principle: First, when processing the powder inside the chamber 3, the rotating frame 2 is activated to drive the chamber 3 to rotate. Since the inner rack at one end of the chamber 3 is meshed with the reciprocating gear 17, and the fixed frame 6 is fixedly connected to the rotating frame 2, the rotation of the chamber 3 will drive the reciprocating gear 17 to rotate. The rotation of the reciprocating gear 17 will drive the reciprocating screw 9 to rotate. Since the reciprocating screw 9 is sleeved with the reciprocating rod 10, and the reciprocating rod 10 is slidably connected to the outer wall of the intake pipe 4, the rotation of the reciprocating screw 9 will drive the reciprocating rod 10 to reciprocate. The movement of the reciprocating rod 10 will drive... The fixed toothed plate 11 moves, and the fixed toothed plate 11 will first contact the rack valve rod 8 on the outside of the first group of control valves 7. During the contact process, the fixed toothed plate 11 will mesh with the first group of rack valve rod 8. The horizontal movement of the fixed toothed plate 11 will drive the rack valve rod 8 to rotate. During the meshing process between the fixed toothed plate 11 and the rack valve rod 8, the rack valve rod 8 will rotate one revolution. One revolution of the first group of rack valve rod 8 will open the inner valve of the first group of control valves 7. At this time, the gas inside the air intake pipe 4 will be discharged through the air hole of the first group of control valves 7. The discharged gas reacts with the semiconductor powder at the position. Secondly, during the movement of the reciprocating rod 10, it will also drive the sliding tooth block 13 to move. The movement of the sliding tooth block 13 will contact the first set of rack valve rods 8 and drive the rack valve rods 8 to rotate a second revolution. The first set of rack valve rods 8 rotates a second revolution and closes the valve of the first set of control valves 7. Subsequently, the fixed tooth plate 11 will still move and contact the second set of rack valve rods 8 and open the valve of the second set of control valves 7. During the movement of the sliding tooth block 13 towards the second rack valve rod 8, the adjusting gear 16 rotatably connected to the inner side of the sliding tooth block 13 will contact the rack on the surface of the adjusting tooth plate 14. The adjusting gear 16 will rotate under the influence of the rack of the adjusting tooth plate 14. Since the adjusting gear 16 is connected to the threaded screw 12 through the bevel gear set, the rotation of the adjusting gear 16 will drive the threaded screw 12 to rotate. Since the threaded screw 12 is threadedly connected to the sliding tooth block 13 and the sliding tooth block 13 is slidably connected to the guide rod, the rotation of the threaded screw 12 will drive the sliding tooth block 13 to move horizontally. The increased distance between the horizontal movement of the sliding toothed block 13 and the fixed toothed plate 11 delays the contact between the sliding toothed block 13 and the second set of rack valve rods 8, thereby extending the opening time of the second set of control valves 7. After the sliding toothed block 13 contacts the second set of rack valve rods 8 and closes the second set of control valves 7, the fixed toothed plate 11 will still move to contact the third set of rack valve rods 8 and open the third set of control valves 7. Then, when the sliding toothed block 13 is about to contact the third set of rack valve rods 8, the reciprocating rod 10 will be affected by the reciprocating screw 9 and move in the opposite direction. The reciprocating rod 10 moves in the opposite direction, driving the fixed toothed plate 11 to move. The fixed toothed plate 11 moves to contact the third set of rack valve rods 8 again, thereby closing the third set of control valves 7 through the fixed toothed plate 11. At this time, half of the reciprocating interval distance of the fixed toothed plate 11 is greater than the distance between the sliding toothed block 13 and the fixed toothed plate 11 after adjustment, thus ensuring that the opening time of the three sets of control valves 7 is greater than the opening time of the second set of control valves 7. Finally, during the rotation of the chamber 3, the rotating sleeve 154 will rotate, which in turn will drive the transmission gear 153 to rotate. Since the transmission gear 153 is meshed with the gear ring 152 and the gear ring 152 is fixedly connected to the connecting frame 151, the transmission gear 153 will also rotate on its own axis during its circumferential rotation. The rotation of the transmission gear 153 will drive the rotation of the rotating sleeve 154, which in turn will drive the rotation of the cross slide bar 155. The rotation of the cross slide bar 155 will then drive the spiral turning rod 1. 57. During the rotation of the cross slide bar 155 under the influence of the chamber 3, the ball bearing 156 will rotate in a circular motion. After the ball bearing 156 rotates in a circular motion, it will undergo horizontal reciprocating motion due to the concave and convex grooves on the inner side of the connecting frame 151. The horizontal reciprocating motion of the ball bearing 156 will drive the cross slide bar 155 to move horizontally. The reciprocating motion of the cross slide bar 155 will drive the spiral turning rod 157 to move in a reciprocating motion. The spiral turning rod 157, which rotates and moves horizontally in a reciprocating motion, will disperse and stir the powder in the chamber 3, reducing the situation of insufficient powder reaction.

[0023] The above description is merely a preferred embodiment of the present invention and is not intended to limit the present invention in any way. Although the present invention has been disclosed above with reference to preferred embodiments, it is not intended to limit the present invention. Any person skilled in the art can make some modifications or alterations to the above-disclosed technical content to create equivalent embodiments without departing from the scope of the present invention. Any simple modifications, equivalent changes and alterations made to the above embodiments based on the technical essence of the present invention without departing from the scope of the present invention are within the scope of the present invention.

Claims

1. A high-utilization gas phase coating furnace, comprising a base (1), characterized in that: A rotating frame (2) is connected above the base (1). The rotating frame (2) is rotatably connected to a chamber (3). One end of the chamber (3) is connected to an air outlet pipe (5), and the other end of the chamber (3) is rotatably connected to a fixed frame (6). An air outlet is provided on the surface of the fixed frame (6), and the fixed frame (6) is connected to the rotating frame (2). An air inlet pipe (4) is connected to the inside of the fixed frame (6). A control valve (7) is installed on the surface of the air inlet pipe (4), and the air hole of the control valve (7) coincides with the air outlet on the surface of the fixed frame (6). A rack valve rod (8) is rotatably connected to the side of the control valve (7). A reciprocating screw (9) is rotatably connected to the inside of the fixed frame (6). A reciprocating gear (17) is connected to one end of the reciprocating screw (9) located outside the chamber (3). The chamber (3) is provided with a rack on the inner side of the housing, and the reciprocating gear (17) is meshed with the rack of the chamber (3). The reciprocating screw (9) is sleeved with a reciprocating rod (10), and the reciprocating rod (10) is slidably connected to the outer wall of the intake pipe (4). One end of the reciprocating rod (10) is connected with a fixed tooth plate (11), and the other end of the reciprocating rod (10) is rotatably connected with a threaded screw (12). The threaded screw (12) is threadedly connected with a sliding tooth block (13). The reciprocating rod (10) is located on the inner side of one end of the sliding tooth block (13) and is also rotatably connected with an adjusting gear (16) through a rotating shaft. The rotating shaft of the adjusting gear (16) is connected to the threaded screw (12) through a bevel gear set. The inner side of the fixed frame (6) is connected with an adjusting tooth plate (14). The material turning assembly (15) is located inside the bore (3).

2. The high-utilization vapor phase coating furnace according to claim 1, characterized in that: The material turning assembly (15) has a connecting frame (151) connected to the rotating frame (2). The connecting frame (151) is rotatably connected to the bore (3). A toothed ring (152) is provided on the inner side of the connecting frame (151). A transmission gear (153) is meshed on the inner side of the toothed ring (152). A rotating sleeve (154) is sleeved at the center of the transmission gear (153). The rotating sleeve (154) is rotatably connected to the bore (3). A cross slide rod (155) is slidably connected on the inner side of the rotating sleeve (154). A ball bearing (156) is connected to one end of the cross slide rod (155) located on the outer side of the bore (3). A spiral turning rod (157) is connected to one end of the cross slide rod (155) located on the inner side of the bore (3). A groove is provided on the inner side of the connecting frame (151), and the ball bearing (156) fits into the groove.

3. The high-utilization vapor phase coating furnace according to claim 1, characterized in that: Both ends of the adjusting toothed plate (14) are connected to the inner wall of the fixed frame (6), and the adjusting toothed plate (14) is provided with a rack in front of the middle section control valve (7). The rack is provided in the middle section of the adjusting toothed plate (14).

4. The high-utilization vapor phase coating furnace according to claim 1, characterized in that: The reciprocating rod (10) is fixedly connected to a guide rod on its inner side, and the guide rod is slidably connected to the sliding tooth block (13).

5. A high-utilization vapor phase coating furnace according to claim 1, characterized in that: A rotating roller is rotatably connected above the base (1), and the rotating roller is in contact with the bottom outer wall of the chamber (3).

6. The high-utilization vapor phase coating furnace according to claim 1, characterized in that: The air outlet pipe (5) is located inside the chamber (3) and has an air outlet hole. The size of the air outlet hole of the air outlet pipe (5) is smaller than the size of the air inlet hole on the surface of the fixed frame (6).

7. A high-utilization vapor phase coating furnace according to claim 2, characterized in that: The cross slide bar (155) has a cross protrusion on its outer side, and the cross protrusion is slidably connected to the rotating sleeve (154).

8. A high-utilization vapor phase coating furnace according to claim 2, characterized in that: The connecting frame (151) is provided in two sets, and the concave and convex directions of the connecting frame (151) are opposite.

9. A high-utilization vapor phase coating furnace according to claim 7, characterized in that: The cross slide bar (155) is located inside the bore (3) with one end connected to a retractable sealing gasket, and the other end of the sealing gasket is connected to the rotating sleeve (154).

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