Self-adapting parallel electrode clamp for thin film dielectric constant measurement and method of use

Abstract

This invention relates to an adaptive parallel electrode fixture and its method of use for measuring the dielectric constant of thin films. The fixture includes a coaxial shielded cable, a movable metal rod, a metal rod lifting assembly, a ball bearing assembly, an adaptive swing assembly, a circular adapter plate, a suspension assembly, a measuring electrode component, and a high-voltage electrode. The ball bearing assembly comprises multiple nested ball bearings that can rotate under external force. The adaptive swing assembly includes multiple suspension crossbars, each symmetrically connected to the outermost ball bearing and extending towards the same side of the ball bearing. Each suspension crossbar has a swing rod connected to its end away from the ball bearing, allowing it to swing under gravity. These swing rods are symmetrically mounted along the diameter of the circular adapter plate, which is connected to the measuring electrode component via the suspension assembly. The high-voltage electrode is mounted on a worktable. Compared to existing technologies, this invention ensures the parallelism of the electrode fixture and reduces interference from air gaps and environmental factors.

Description

Technical Field

[0001] This invention relates to the field of polymer thin film measurement technology, and in particular to an adaptive parallel electrode fixture and its method of use for measuring the dielectric constant of thin films. Background Technology

[0002] Measuring the dielectric constant and dielectric loss of dielectric films is crucial for evaluating their practical performance in fields such as high-voltage capacitors and power transmission and distribution systems. This is because the dielectric constant directly affects the film's capacitance and energy storage capacity, thus determining the efficiency and reliability of electrical equipment. For polymer films with a thickness of only a few micrometers, accurate measurement of the dielectric constant is particularly critical to ensure product quality and meet the demands of high-end applications. However, due to the thinness of the films, the measurement process is susceptible to interference from air gaps and environmental factors.

[0003] The direct contact method based on a three-electrode structure is of unique importance for measuring dielectric constant. Its advantages lie in its simplicity, the absence of the need for specialized vacuum electrodes, and its suitability for widespread application in industrial production environments. This method involves directly clamping the thin film between the measuring electrode and a high-voltage electrode to form a capacitor, and the measurement result is used to calculate the dielectric constant. When the electrode flatness is sufficiently good, the parallelism of the electrode clamp plays a crucial role in measurement accuracy. If the electrode clamp deviates from parallelism, it will lead to uneven distribution of air gaps between the electrodes on both sides of the thin film, thus introducing significant measurement errors. The air gap effect may result in a lower measured capacitance value, especially when the film thickness is small. Parallelism issues not only affect measurement accuracy, but the sharp edges of the electrodes can also cause mechanical damage to micrometer-thick films, leading to localized cracking or thickness variations, further impacting the reliability of the measurement results.

[0004] To improve measurement accuracy and protect the integrity of the thin film, it is necessary to optimize the flatness of the electrode while strictly ensuring the parallelism of the electrode clamp. This ensures that the measuring electrode and the high-voltage electrode remain parallel as they gradually approach and clamp the thin film sample. The invention with publication number CN115166373A discloses a device and method for measuring the complex dielectric constant of polymer thin films under low vacuum. It proposes to ensure close contact and flatness between the electrode and the sample through a dual-degree-of-freedom adjustment structure and high-precision electrode surface processing. However, it directly connects the upper electrode with screws, requiring visual inspection of the parallelism between the upper and lower electrodes, which can easily lead to deviations and cannot effectively eliminate possible air bubbles between the thin film and the electrode. Summary of the Invention

[0005] The purpose of this invention is to overcome the defects of the prior art by providing an adaptive parallel electrode fixture and its usage method for measuring the dielectric constant of thin films, ensuring the parallelism of the electrode fixture and reducing interference from air gaps and environmental factors.

[0006] The objective of this invention can be achieved through the following technical solutions: An adaptive parallel electrode fixture for measuring the dielectric constant of thin films is mounted on a worktable and includes a coaxial shielded cable, a movable metal rod, a metal rod lifting assembly, a ball bearing assembly, an adaptive swing assembly, a circular adapter plate, a suspension assembly, a measuring electrode component, and a high-voltage electrode. The bottom of the movable metal rod is connected to the metal rod lifting assembly, and the top extends out of the worktable. The ball bearing assembly includes multiple nested ball bearings that can rotate with external force, and is horizontally mounted on a movable metal rod. The adaptive swing assembly includes multiple suspension crossbars, each suspension crossbar being symmetrically connected to the outermost ball bearing and extending toward the same side of the ball bearing; each suspension crossbar is connected to a swing rod that can swing with gravity at the end away from the ball bearing, and each swing rod is symmetrically installed in the diameter direction of the annular transition plate, the annular transition plate being connected to the measuring electrode component through the suspension assembly; The coaxial shielded cable is connected to the measuring electrode component through the central through hole of the circular adapter plate. The high-voltage electrode is mounted on the workbench, with its upper surface on a horizontal plane and located directly below the measuring electrode component.

[0007] Furthermore, the outermost ball bearing is provided with a bearing fixing plate perpendicular to the outer side of the ball bearing. The bearing fixing plate has a left-right symmetrical structure, and each suspension crossbar is symmetrically connected to the left and right sides of the bearing fixing plate.

[0008] Furthermore, the end of the suspension crossbar away from the ball bearing is provided with a crossbar ring, and the top of the swing rod is provided with multiple swing rings with the same diameter as the crossbar ring. The adaptive swing assembly also includes a smooth screw. Each suspension crossbar is connected to the swing rod by passing through the circular holes of the crossbar ring and the swing ring laterally along the diameter direction of the ball bearing and perpendicular to the central axis of the ball bearing via the corresponding smooth screw.

[0009] Furthermore, the suspension assembly includes multiple adapter screws, and the annular adapter plate is provided with multiple threaded holes evenly distributed on the horizontal plane, with each adapter screw installed in the corresponding threaded hole through external threads; Each adapter screw is hollow inside, with a sliding suspension screw connected to the lower half and a flat-head screw fixedly connected to the upper half. The bottom of the suspension screw extends out of the adapter screw and connects to the measuring electrode component. When the measuring electrode component is in the suspended state, there is the same gap between the flat-head screw and the suspension screw in each adapter screw.

[0010] Furthermore, the suspension assembly includes three adapter screws, each adapter screw being evenly distributed on the horizontal surface of the annular adapter plate at an angle of 120 degrees. The upper end of the hollow area inside the adapter screw is provided with an internal thread, and the outer side of the flat-head screw is provided with an external thread that mates with the internal thread inside the adapter screw. The outer side of the flat-head screw is connected to the adapter screw by a thread. The bottom of the hollow area inside the adapter screw gradually narrows, eventually forming a through hole that matches the size of the bottom of the suspension screw. The nut portion of the suspension screw is located at the bottom of the hollow area inside the adapter screw.

[0011] Furthermore, the adaptive parallel electrode fixture also includes a counterweight disk that can rotate 360 ​​degrees, the counterweight disk including a disk body and a counterweight block connected to one side of the disk body with an adjustable lever arm; The counterweight plate is connected between the circular adapter plate and the measuring electrode component via a suspension assembly.

[0012] Furthermore, the adaptive parallel electrode fixture also includes a fixed rod and a metal sliding bracket. The bottom of the fixed rod is fixed to the worktable and extends upward toward the worktable. One end of the metal sliding bracket is fixedly connected to the fixed rod, and the other end is provided with a fixing hole for connecting the coaxial shielded cable. A Remo socket is provided on the central axis of the measuring electrode component. One end of the coaxial shielded cable is connected to a testing instrument, and the other end is equipped with a Remo plug that mates with the Remo socket.

[0013] Furthermore, the metal rod lifting assembly is a worm gear assembly.

[0014] Furthermore, the bottom of the high-voltage electrode is provided with a base, which is mounted on the workbench by multiple adjustable support feet.

[0015] The present invention also provides a method for using an adaptive parallel electrode fixture for measuring the dielectric constant of thin films as described above, comprising the following steps: Install the high-voltage electrode on the workbench and adjust the upper surface of the high-voltage electrode to a horizontal plane; The measuring electrode component is mounted on the suspension assembly. Based on the gravity of the measuring electrode component, the ball bearing assembly rotates adaptively about the central axis of the ball bearing, and the adaptive swing assembly rotates adaptively about the swing rotation axis of the swing rod. Finally, the central axis of the ball bearing is perpendicular to the central axis of the measuring electrode component, and the swing rotation axis of the swing rod is perpendicular to the central axis of the measuring electrode component. At this time, the upper surface of the high voltage electrode is parallel to the electrode plane of the measuring electrode component. Adjust the metal rod lifting assembly to lower the movable metal rod, causing the electrode plane of the measuring electrode component to fully contact the upper surface of the high voltage electrode, and continue to lower it until the air gap between the thin film sample and the high voltage electrode is eliminated. Connect one end of the coaxial shielded cable to the test instrument and install the Remo plug on the other end. Insert the Remo plug into the Remo socket installed on the central axis of the measuring electrode component for current acquisition.

[0016] Furthermore, the suspension assembly includes multiple adapter screws, and the annular adapter plate has multiple threaded holes evenly distributed on the horizontal plane. Each adapter screw is installed in the corresponding threaded hole through external threads. Each adapter screw is hollow inside, with a slidable suspension screw connected to the lower half and a flat-head screw fixedly connected to the upper half. The bottom of the suspension screw extends out of the adapter screw and connects to the measuring electrode component. When the measuring electrode component is in the suspended state, there is the same gap between the flat-head screw and the suspension screw in each adapter screw. The method adjusts the metal rod lifting assembly so that during the descent of the movable metal rod, the electrode plane of the measuring electrode component is in complete contact with the upper surface of the upper surface of the high voltage electrode. The suspension tension of the adapter screw on the suspension screw gradually decreases until it disappears as the movable metal rod descends, so that the measuring electrode component is completely placed on the upper surface of the high voltage electrode due to gravity, achieving complete contact between the measuring electrode component and the high voltage electrode. Continue lowering the movable metal rod so that the flat-head screw gradually presses against the top of the suspension screw, transmitting pressure symmetrically along the central axis to the electrode of the measuring electrode component. This ensures that the electrode plane of the measuring electrode component is in close contact with the upper surface of the high-voltage electrode, thereby eliminating the air gap between the thin film sample and the high-voltage electrode.

[0017] Compared with the prior art, the present invention has the following advantages: (1) The present invention provides an adaptive rotational degree of freedom with the horizontal axis of rotation by means of a ball bearing assembly mounted horizontally on a movable metal rod, and provides an adaptive swinging degree of freedom with the horizontal axis of rotation by means of a rotatable swing rod mounted along the ball bearing assembly and perpendicular to the central axis of the ball bearing. After the measuring electrode component is suspended below, with sufficiently low friction between the ball bearing assembly and the adaptive swing assembly, based on the rotational symmetry of the cylindrical measuring electrode component, and due to gravity, the central axis of the ball bearing can be adaptively made perpendicular to the central axis of the measuring electrode component, and the swing rotation axis of the swing rod can be perpendicular to the central axis of the measuring electrode component. This achieves parallelism between the high-voltage electrode plane and the electrode plane of the measuring electrode component, strictly ensuring the parallelism of the electrode fixture, improving measurement accuracy and protecting the integrity of the thin film.

[0018] (2) In the suspension assembly provided by the present invention, the suspension screw is installed by means of the adapter screw and the upper through hole of the adapter screw is sealed by the flat head screw. When the movable metal rod gradually descends, the measuring electrode component gradually comes into complete contact with the high voltage electric plane, and the suspension pull of the adapter screw on the suspension screw gradually decreases until it disappears. After the movable metal rod continues to descend, the pressure is transmitted from the flat head screw to the suspension screw and then to the electrode of the measuring electrode component, so that the electrode of the measuring electrode component is in close contact with the high voltage electrode to eliminate the air gap between the thin film sample and the electrode. This process realizes the multi-layer structure based on the suspension assembly, gradually increases the pressure between the measuring electrode component and the high voltage electrode, provides a buffer, and allows the air bubbles to be gradually discharged, overcoming the interference of air gaps and environmental factors.

[0019] (3) The suspension assembly of the present invention adopts a three-point lifting and pressing mechanism to ensure that the electrode can be accurately pressed onto the film in parallel. In the lifting and pressing mechanism of the three points, the centering can be automatically achieved during lifting to ensure that the measuring electrode component and the high voltage electrode are completely parallel. During pressing, there is a certain amount of room for movement to ensure that the three points are pressed down evenly at the same time, ensuring that the electrode is parallel and the sample film can be kept intact.

[0020] (4) The present invention also takes into account the possibility that the plane of the high voltage electrode and the electrode plane of the measuring electrode component may not be completely parallel. It proposes to use a counterweight plate with an adjustable lever arm that can rotate 360 ​​degrees to finely adjust the tilt angle of the measuring electrode component, which can further ensure that the lower surface of the measuring electrode of the measuring electrode component is completely parallel to the upper surface of the high voltage electrode.

[0021] (5) The mechanical structure is used to control the lifting and lowering of the measuring electrode components, ensuring that the measuring electrode components are completely parallel to the high voltage electrode and eliminating the influence of the air gap.

[0022] (6) The present invention has undergone strict testing environment control and has the advantages of effectively reducing errors and ensuring the accuracy and consistency of measurement results. Attached Figure Description

[0023] Figure 1 This is a schematic diagram of an adaptive parallel electrode fixture for measuring the dielectric constant of thin films provided in an embodiment of the present invention; Figure 2 This is a schematic diagram illustrating the usage state of an adaptive parallel electrode fixture for measuring the dielectric constant of thin films, provided in an embodiment of the present invention. Figure 3 This is a schematic diagram of the overall structure of a suspension assembly provided in an embodiment of the present invention; Figure 4 This is a cross-sectional schematic diagram of a suspension assembly provided in an embodiment of the present invention; Figure 5This is a top view schematic diagram of a suspension assembly provided in an embodiment of the present invention; Figure 6 This is a schematic cross-sectional view of a suspension component provided in an embodiment of the present invention; Figure 7 This is a flowchart illustrating a method for using an adaptive parallel electrode fixture for measuring the dielectric constant of a thin film, as provided in an embodiment of the present invention. In the diagram, 1. Coaxial shielded cable, 2. Metal sliding bracket, 3. Smooth screw, 4. Swing rod, 5. Suspension crossbar, 6. First ball bearing, 7. Second ball bearing, 8. Flat head screw, 9. Circular adapter plate, 10. Adapter screw, 11. Suspension screw, 12. Remo plug, 13. Counterweight plate, 14. Measuring electrode assembly, 15. Movable metal rod, 16. High voltage electrode, 17. Worm gear. Detailed Implementation

[0024] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. The components of the embodiments of the present invention described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.

[0025] Therefore, the following detailed description of the embodiments of the invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely to illustrate selected embodiments of the invention. All other embodiments obtained by those skilled in the art based on the embodiments of the invention without inventive effort are within the scope of protection of the invention.

[0026] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.

[0027] In the description of this invention, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship in which the product of this invention is usually placed during use. They are only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this invention.

[0028] It should be noted that the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this application, "multiple" means two or more, unless otherwise explicitly specified.

[0029] Furthermore, terms such as "horizontal" and "vertical" do not imply that components must be absolutely horizontal or suspended, but rather that they can be slightly tilted. For example, "horizontal" simply means that its direction is more horizontal than "vertical," and does not mean that the structure must be completely horizontal, but can be slightly tilted.

[0030] Example 1 The electrode for measuring dielectric constant has a three-electrode structure. The high-voltage electrode 16 is typically mounted on a base. Using a level and four adjustable support feet on the base, the plane of the high-voltage electrode can be adjusted to be level. The cylindrical measuring electrode and the cylindrical protective electrode are mounted together, forming an overall cylindrical shape with rotational symmetry. The upper and lower surfaces of the cylinder are parallel, and the entire cylinder is collectively referred to as the measuring electrode component 14. Ideally, to avoid damage to the thin film sample from the edges of the measuring electrode component, it should be placed vertically on the high-voltage electrode in one go, with the two electrode planes completely parallel. Slight pressure can eliminate the air gap between the two electrodes. Considering this requirement, manual placement and removal of the measuring electrode component is clearly insufficient. Therefore, the raising and lowering of the measuring electrode component should be controlled by a mechanical structure. For rotationally symmetrical measuring electrode components, vertical placement can be achieved using a cable at the central axis. However, in actual measurements, the central axis of the measuring electrode component is connected to a coaxial test cable, which is relatively fragile and easily damaged, making it unsuitable as a suspension cable.

[0031] In this regard, such as Figure 1 and Figure 2 As shown, this embodiment provides an adaptive parallel electrode fixture for measuring the dielectric constant of thin films, which is mounted on a worktable and includes a coaxial shielded cable 1, a movable metal rod 15, a metal rod lifting assembly, a ball bearing assembly, an adaptive swing assembly, a circular adapter plate 9, a suspension assembly, a measuring electrode component 14, and a high-voltage electrode 16. The bottom of the movable metal rod 15 is connected to the metal rod lifting assembly, and the top extends out of the worktable. The ball bearing assembly includes multiple ball bearings nested inside and outside, which can rotate with external force, and is horizontally mounted on the movable metal rod 15 as a whole. The adaptive swing assembly includes multiple suspension crossbars 5, each suspension crossbar 5 is symmetrically connected to the outermost ball bearing and extends toward the same side of the ball bearing; each suspension crossbar 5 is connected to a swing rod 4 that can swing with gravity at the end away from the ball bearing, and each swing rod 4 is symmetrically installed in the diameter direction of the annular transfer plate 9, which is connected to the measuring electrode component 14 through the suspension assembly. The coaxial shielded cable 1 is connected to the measuring electrode component 14 through the central through hole of the circular adapter plate 9. The high voltage electrode 16 is mounted on the workbench surface, with its upper surface on a horizontal plane and located directly below the measuring electrode component 14.

[0032] Preferably, the outermost ball bearing is provided with a bearing fixing plate perpendicular to the outer side of the ball bearing. The bearing fixing plate has a left-right symmetrical structure, and each suspension crossbar 5 is symmetrically connected to the left and right sides of the bearing fixing plate.

[0033] In this embodiment, the ball bearing assembly includes a first ball bearing 6 and a second ball bearing 7. The first and second ball bearings, which are horizontally mounted, are fixed on a movable metal rod 15. The movable metal rod 15 is perpendicular to and intersects the central axis of the first and second ball bearings.

[0034] The bearing fixing plate is a rectangular plate structure, the width of which matches the outermost diameter of the outermost first ball bearing, and both ends can be outwardly convex arc surfaces.

[0035] Preferred, such as Figures 3-6 As shown, the specific swing structure of the swing rod 4 is as follows: The end of the suspension crossbar 5 furthest from the ball bearing is provided with a crossbar ring, and the top of the swing rod 4 is provided with multiple swing rings with the same diameter as the crossbar ring. The adaptive swing assembly also includes a smooth screw 3. Each suspension crossbar 5 is connected to the swing rod 4 by passing through the circular holes of the crossbar ring and the swing ring laterally through the corresponding smooth screw 3 along the diameter direction of the ball bearing and perpendicular to the central axis of the ball bearing.

[0036] In this embodiment, two symmetrical stainless steel suspension crossbars 5 are installed in one diameter direction of the horizontally mounted ball bearing assembly. One end of the stainless steel suspension crossbar 5 is threaded and rotated to fix it to the ball bearing 6; the other end is equipped with a ring, the plane of which is perpendicular to the diameter direction of the installation.

[0037] The upper ends of a pair of swing rods 4 each have a ring with the same hole diameter as one end of the suspension crossbar 5. A smooth screw 3 is used to pass laterally through the holes of the swing rods 4 and the suspension crossbar 5 along the diameter direction of the ball bearing assembly and perpendicular to the central axis of the ball bearing assembly. This allows the swing rods 4 to be suspended and to swing along the axial direction of the stainless steel suspension crossbar 5.

[0038] The lower ends of a pair of swing rods 4 are symmetrically installed in the diameter direction of the annular adapter plate 9 via threads.

[0039] For the suspension assembly, specifically, the suspension assembly includes multiple adapter screws 10, and the annular adapter plate 9 is provided with multiple threaded holes evenly distributed on the horizontal plane, and each adapter screw 10 is installed in the corresponding threaded hole through external thread; Each adapter screw 10 is hollow inside. The lower half is connected to a hanging screw 11 that can slide up and down, and the upper half is fixedly connected to a flat-head screw 8. The bottom of the hanging screw 11 extends out of the adapter screw 10 and is connected to the measuring electrode component 14. When the measuring electrode component 14 is in the suspended state, there is the same gap between the flat-head screw 8 and the hanging screw 11 in each adapter screw 10.

[0040] The upper end of the hollow area inside the adapter screw 10 is provided with an internal thread, and the outer side of the flat-head screw 8 is provided with an external thread that mates with the internal thread inside the adapter screw 10. The outer side of the flat-head screw 8 is connected to the adapter screw 10 by the thread. The bottom of the hollow area inside the adapter screw 10 gradually narrows, eventually forming a through hole that matches the size of the bottom of the suspension screw 11. The nut part of the suspension screw 11 is located at the bottom of the hollow area inside the adapter screw 10.

[0041] In this embodiment, three adapter screws 10, each with internal and external threads, are installed at 120° intervals on the concentric rings of the annular adapter plate 9. The lower half of the adapter screw 10 is used to house the suspension screw 11, and the upper half of the adapter screw 10 uses its internal thread to install the flat-head screw 8; the external thread of the adapter screw 10 is used to fix it to the annular adapter plate 9. The three flat-head screws 8 are installed to the same depth in the adapter screw 10.

[0042] The suspension screws 11 are installed on the concentric rings on the upper surface of the measuring electrode component 14 by means of threads distributed at 120°, and when the measuring electrode component 14 is in the suspended state, the bottom of the flat-head screw 8 and the top of the suspension screw 11 have the same gap.

[0043] Specifically, during operation, to further reduce the deviation in parallelism between the lower surface of the measuring electrode of the measuring electrode component 14 and the upper surface of the high-voltage electrode 16 as observed visually, the metal movable rod 15 is slowly lowered. During this process, the lower surface of the measuring electrode of the measuring electrode component 14 slowly contacts the upper surface of the high-voltage electrode 16. At this time, the suspension force of the three suspension screws 11 on the measuring electrode component 14 gradually decreases until the suspension force is reduced to zero. In this way, the measuring electrode component 14 is completely placed on the upper surface of the high-voltage electrode 16 due to gravity, achieving complete contact between the two electrode planes and completely avoiding deviations caused by visually observed parallelism.

[0044] To eliminate potential air bubbles between the lower surface of the measuring electrode of the measuring electrode component 14 and the upper surface of the high-voltage electrode 16 after the thin film sample is installed, the two electrodes need to be further tightened. Accordingly, the metal movable rod 15 continues to descend, and the top of the suspension screw 11 gradually approaches and contacts the flat-head screw 8. The lower surfaces of the three flat-head screws 8 apply pressure to the top of the suspension screw 11, which is then transmitted to the measuring electrode component 14. To avoid damage to the thin film sample from the measuring electrode surface during pressure application, the force applied by the measuring electrode component 14 to the high-voltage electrode 16 should be symmetrical along the central axis. This needs to be achieved during installation, ensuring that when the measuring electrode component 14 is in the suspended state, the bottom of the flat-head screw 8 and the top of the suspension screw 11 have the same gap. This ensures that during the descent of the metal movable rod 15, the bottom of the three flat-head screws 8 applies a uniform, axially symmetrical force to the tops of the three suspension screws 11.

[0045] When the measuring electrode component 14 is suspended by component 3-11, and the friction of the ball bearing 6 is sufficiently small, considering the rotational symmetry of the cylindrical measuring electrode component 14, due to gravity and the adaptive adjustment of the adaptive swing component, the central axis of the laterally mounted ball bearing 6 is perpendicular to the central axis of the measuring electrode component 14, and the first plane formed by them passes through the central axis of the measuring electrode component 14 and is perpendicular to the plane of the high voltage electrode 16.

[0046] Considering that the swing rod 4 is suspended on the suspension crossbar 5 by the smooth screw 3, when the friction between the swing rod 4, the smooth screw 3, and the suspension crossbar 5 is sufficiently small, due to gravity, and through the adaptive adjustment of the ball bearing assembly, the central axis of the horizontally mounted smooth screw 3 is perpendicular to the central axis of the measuring electrode component 14, and the second plane formed by them passes through the central axis of the measuring electrode component 14 and is perpendicular to the plane of the high voltage electrode 16.

[0047] The intersection of the first and second planes is the central axis of the measuring electrode component 14. The central axes of the ball bearing 6 and the smooth screw 3, located on the two planes respectively, are perpendicular to each other. Therefore, the first and second planes are perpendicular to each other and both perpendicular to the electrode plane of the measuring electrode component 14. Considering that both the first and second planes are perpendicular to the plane of the high-voltage electrode 16, the high-voltage electrode plane is parallel to the electrode plane of the measuring electrode component 16.

[0048] Furthermore, the measuring electrode component 14 can be vertically raised and lowered via the movable metal rod 15, during which the disassembly and installation of the thin film sample can be completed.

[0049] Preferably, the adaptive parallel electrode fixture further includes a counterweight disk 13 that can rotate 360 ​​degrees, the counterweight disk 13 including a disk body and a counterweight block connected to one side of the disk body with an adjustable lever arm; The counterweight plate 13 is connected between the circular adapter plate 9 and the measuring electrode component 14 via a suspension assembly.

[0050] Considering machining accuracy, the measuring electrode component 14 and the annular adapter plate 9 may not be perfectly rotationally symmetrical, and the installation of components 3, 4, and 8-11 may not be perfectly centrally symmetrical. In this case, the plane of the high-voltage electrode 16 and the electrode plane of the measuring electrode component 14 will not be perfectly parallel. When the measuring electrode component 14 descends and contacts the high-voltage electrode plane, there will be a certain angle of wedge-shaped gap, which is not conducive to measurement. Slowly rotate the counterweight plate 13 and observe until the lower surface of the measuring electrode of the measuring electrode component 14 is completely parallel to the upper surface of the high-voltage electrode 16.

[0051] Preferably, the adaptive parallel electrode fixture further includes a fixed rod and a metal sliding bracket 2. The bottom of the fixed rod is fixed to the worktable surface and extends upward toward the worktable surface. One end of the metal sliding bracket 2 is fixedly connected to the fixed rod, and the other end is provided with a fixing hole for connecting the coaxial shielded cable 1. A Remo socket is provided on the central axis of the measuring electrode component 14. One end of the coaxial shielded cable 1 is connected to a testing instrument, and the other end is equipped with a Remo plug 12 that mates with the Remo socket for measuring current acquisition. The coaxial shielded cable 1 forms an electrical connection with the measuring electrode component 14 through the Remo plug 12. Since the coaxial shielded cable 1 and the metal sliding bracket 2 are in a sliding installation relationship, the coaxial shielded cable 1 does not generate a suspension force on the measuring electrode component 14.

[0052] Optionally, the metal rod lifting assembly is a worm gear assembly 17. Considering the installation and removal of the thin film sample during the measurement process, the measuring electrode component 14 should be height-adjustable. A movable metal rod 15, perpendicular to the high-voltage electrode 16 and movable up and down via a precision worm gear assembly 17, is provided to suspend the measuring electrode component 14.

[0053] Preferably, the bottom of the high-voltage electrode 16 is provided with a base, which is mounted on the workbench by a plurality of adjustable support feet.

[0054] In this embodiment, the upper surface of the high-voltage electrode 16 can be adjusted to be on a horizontal plane by using four adjustable support feet installed on the base.

[0055] This solution, while ensuring sufficient flatness of the electrodes, employs a two-degree-of-freedom measurement electrode suspension structure. A 360-degree rotating counterweight mechanism fine-tunes the electrode suspension, ensuring the measurement electrode is perfectly parallel to the high-voltage electrode. A worm gear structure applies several Newtons of pressure to the measurement electrode, eliminating air bubbles between the electrode holder and the thin film. These improvements, combined with strict testing environment control, effectively reduce errors and ensure the accuracy and consistency of measurement results.

[0056] Example 2 like Figure 6 As shown, this embodiment provides a method for using an adaptive parallel electrode fixture for measuring the dielectric constant of thin films, according to Embodiment 1, including the following steps: S1: Install the high voltage electrode 16 on the workbench and adjust the upper surface of the high voltage electrode 16 to a horizontal plane; S2: The measuring electrode component 14 is mounted on the suspension assembly. Based on the gravity of the measuring electrode component 14, the ball bearing assembly rotates adaptively about the central axis of the ball bearing, and the adaptive swing assembly rotates adaptively about the swing rotation axis of the swing rod 4. S3: After stabilization, the central axis of the ball bearing is perpendicular to the central axis of the measuring electrode component 14, and the swing rotation axis of the swing rod 4 is perpendicular to the central axis of the measuring electrode component 14. At this time, the upper surface of the high voltage electrode 16 is parallel to the electrode plane of the measuring electrode component 14. S4: Adjust the metal rod lifting assembly to lower the movable metal rod 15, and drive the electrode plane of the measuring electrode component 14 to fully contact the upper surface of the upper surface of the high voltage electrode 16, and continue to lower it until the air gap between the thin film sample and the high voltage electrode 16 is eliminated. S5: Connect one end of the coaxial shielded cable 1 to the test instrument, and install the Remo plug 12 on the other end. Insert the Remo plug 12 into the Remo socket installed on the central axis of the measuring electrode component 14 for current acquisition.

[0057] Specifically, in step S1, the high-voltage electrode 16 is installed on the base. By using a level and the four adjustable support feet installed on the base, the upper surface of the high-voltage electrode can be adjusted to be on a horizontal plane.

[0058] In step S3, the tilt angle of the measuring electrode component 14 is finely adjusted by using a counterweight disk 13 with an adjustable lever arm that can rotate 360 ​​degrees. The counterweight disk 13 can be slowly rotated and observed until the lower surface of the measuring electrode of the measuring electrode component 14 is completely parallel to the upper surface of the high voltage electrode 16.

[0059] Step S4 specifically involves adjusting the worm gear 17 to lower the movable metal rod 15, causing the electrode plane of the measuring electrode component 14 to fully contact the plane of the high-voltage electrode 16. The suspension force of the adapter screw 10 on the suspension screw 11 gradually decreases until it disappears as the movable metal rod 15 descends. In this way, the measuring electrode component 14 is completely placed on the upper surface of the high-voltage electrode 16 due to gravity, achieving complete contact between the two electrode planes and completely avoiding deviations caused by visually inspected parallelism.

[0060] Furthermore, to eliminate any possible air gap between the thin film sample and the electrode, the movable metal rod 15 is lowered further. During this process, the bottom of the flat-head screw 8 gradually descends until it is pressed tightly against the top of the suspension screw 10. The pressure is transmitted to the measuring electrode component 14, making the electrode of the measuring electrode component 14 in close contact with the high-voltage electrode 16 to eliminate the air gap between the thin film sample and the electrode.

[0061] In step S5, a coaxial shielded cable 1 is slidably fixed via a metal sliding bracket 2. One end is connected to a testing instrument, and the other end is fitted with a Remo plug 12. The Remo plug 12 is inserted into a Remo socket mounted on the central axis of the measuring electrode component 14 for current acquisition. The coaxial shielded cable 1 forms an electrical connection with the measuring electrode component 14 via the Remo plug 12. Since the coaxial shielded cable 1 and the metal sliding bracket 2 are slidably mounted, the coaxial shielded cable 1 does not exert a suspension force on the measuring electrode component 14.

[0062] The preferred embodiments of the present invention have been described in detail above. It should be understood that those skilled in the art can make numerous modifications and variations based on the concept of the present invention without creative effort. Therefore, all technical solutions that can be obtained by those skilled in the art based on the concept of the present invention through logical analysis, reasoning, or limited experimentation on the basis of existing technology should be within the scope of protection defined by the claims.

Claims

1. An adaptive parallel electrode fixture for measuring the dielectric constant of thin films, mounted on a worktable, characterized in that, Includes a coaxial shielded cable (1), a movable metal rod (15), a metal rod lifting assembly, a ball bearing assembly, an adaptive swing assembly, a circular adapter plate (9), a suspension assembly, a measuring electrode component (14), and a high-voltage electrode (16). The bottom of the movable metal rod (15) is connected to the metal rod lifting assembly, and the top extends out of the worktable. The ball bearing assembly includes multiple ball bearings nested inside and outside, which can rotate with external force, and is horizontally mounted on the movable metal rod (15). The adaptive swing assembly includes multiple suspension crossbars (5), each suspension crossbar (5) is symmetrically connected to the outermost ball bearing and extends toward the same side of the ball bearing; each suspension crossbar (5) has a swing rod (4) that can swing with gravity at the end away from the ball bearing, and each swing rod (4) is symmetrically installed in the diameter direction of the annular transfer plate (9), which is connected to the measuring electrode component (14) through the suspension assembly. The coaxial shielded cable (1) is connected to the measuring electrode component (14) through the central through hole of the circular adapter plate (9). The high voltage electrode (16) is installed on the workbench, with its upper surface on a horizontal plane and located directly below the measuring electrode component (14).

2. The adaptive parallel electrode fixture for measuring the dielectric constant of thin films according to claim 1, characterized in that, The outermost ball bearing is provided with a bearing fixing plate perpendicular to the outer side of the ball bearing. The bearing fixing plate has a left-right symmetrical structure, and each suspension crossbar (5) is symmetrically connected to the left and right sides of the bearing fixing plate.

3. The adaptive parallel electrode fixture for measuring the dielectric constant of thin films according to claim 1, characterized in that, The end of the suspension crossbar (5) away from the ball bearing is provided with a crossbar ring, and the top of the swing rod (4) is provided with multiple swing rings with the same diameter as the crossbar ring. The adaptive swing assembly also includes a smooth screw (3), and each suspension crossbar (5) passes through the corresponding smooth screw (3) along the diameter direction of the ball bearing and perpendicular to the central axis of the ball bearing, and laterally through the circular holes of the crossbar ring and the swing ring to connect the swing rod (4).

4. The adaptive parallel electrode fixture for measuring the dielectric constant of thin films according to claim 1, characterized in that, The suspension assembly includes multiple adapter screws (10), and the annular adapter plate (9) is provided with multiple threaded holes evenly distributed on the horizontal plane. Each adapter screw (10) is installed in the corresponding threaded hole through external thread. Each adapter screw (10) is hollow inside. The lower half is connected to a hanging screw (11) that can slide up and down, and the upper half is fixedly connected to a flat-head screw (8). The bottom of the hanging screw (11) extends out of the adapter screw (10) and is connected to the measuring electrode component (14). When the measuring electrode component (14) is in a suspended state, there is the same gap between the flat-head screw (8) and the hanging screw (11) in each adapter screw (10).

5. An adaptive parallel electrode fixture for measuring the dielectric constant of thin films according to claim 4, characterized in that, The suspension assembly includes three adapter screws (10), each adapter screw (10) being evenly distributed on the horizontal surface of the annular adapter plate (9) at an angle of 120 degrees. The upper end of the hollow area inside the adapter screw (10) is provided with an internal thread, and the outer side of the flat-head screw (8) is provided with an external thread that matches the internal thread inside the adapter screw (10). The outer side of the flat-head screw (8) is connected to the adapter screw (10) by a thread. The bottom of the hollow area inside the adapter screw (10) gradually narrows, eventually forming a through hole that matches the size of the bottom of the suspension screw (11). The nut part of the suspension screw (11) is located at the bottom of the hollow area inside the adapter screw (10).

6. The adaptive parallel electrode fixture for measuring the dielectric constant of thin films according to claim 1, characterized in that, The adaptive parallel electrode fixture also includes a counterweight disk (13) that can rotate 360 ​​degrees. The counterweight disk (13) includes a disk body and a counterweight block connected to one side of the disk body with an adjustable lever arm. The counterweight plate (13) is connected between the annular adapter plate (9) and the measuring electrode component (14) via a suspension assembly.

7. The adaptive parallel electrode fixture for measuring the dielectric constant of thin films according to claim 1, characterized in that, The adaptive parallel electrode fixture also includes a fixed rod and a metal sliding bracket (2). The bottom of the fixed rod is fixed to the workbench and extends upward toward the workbench. One end of the metal sliding bracket (2) is fixedly connected to the fixed rod, and the other end is provided with a fixing hole for connecting the coaxial shielded cable (1). The measuring electrode component (14) is provided with a Remo socket on its central axis. One end of the coaxial shielded cable (1) is connected to a test instrument, and the other end is equipped with a Remo plug (12) that mates with the Remo socket.

8. An adaptive parallel electrode fixture for measuring the dielectric constant of thin films according to claim 1, characterized in that, The metal rod lifting assembly is a worm gear assembly (17). The high-voltage electrode (16) has a base at its bottom, which is mounted on the workbench by multiple adjustable support feet.

9. A method of using an adaptive parallel electrode fixture for measuring the dielectric constant of thin films as described in any one of claims 1-8, characterized in that, Includes the following steps: Install the high voltage electrode (16) on the workbench and adjust the upper surface of the high voltage electrode (16) to a horizontal plane; The measuring electrode component (14) is mounted on the suspension assembly. Based on the gravity of the measuring electrode component (14), the ball bearing assembly rotates adaptively about the central axis of the ball bearing, and the adaptive swing assembly rotates adaptively about the swing rotation axis of the swing rod (4). Finally, the central axis of the ball bearing is perpendicular to the central axis of the measuring electrode component (14), and the swing rotation axis of the swing rod (4) is perpendicular to the central axis of the measuring electrode component (14). At this time, the upper surface of the high voltage electrode (16) is parallel to the electrode plane of the measuring electrode component (14). Adjust the metal rod lifting assembly to lower the movable metal rod (15) and drive the electrode plane of the measuring electrode component (14) to fully contact the upper surface of the high voltage electrode (16), and continue to lower it until the air gap between the thin film sample and the high voltage electrode (16) is eliminated. Connect one end of the coaxial shielded cable (1) to the test instrument and install the Remo plug (12) on the other end. Insert the Remo plug (12) into the Remo socket installed on the central axis of the measuring electrode component (14) for measuring current acquisition.

10. The method according to claim 9, characterized in that, The suspension assembly includes multiple adapter screws (10), and the annular adapter plate (9) is provided with multiple threaded holes evenly distributed on the horizontal plane. Each adapter screw (10) is installed in the corresponding threaded hole through external thread. Each adapter screw (10) is hollow inside, with a slidable suspension screw (11) connected to the lower half and a flat-head screw (8) fixedly connected to the upper half. The bottom of the suspension screw (11) extends out of the adapter screw (10) and is connected to the measuring electrode component (14). When the measuring electrode component (14) is in the suspension state, the flat-head screw (8) and the suspension screw (11) in each adapter screw (10) have the same gap. The method adjusts the metal rod lifting assembly so that during the descent of the movable metal rod (15), the electrode plane of the measuring electrode component (14) is in complete contact with the upper surface of the upper surface of the high voltage electrode (16). The suspension tension of the adapter screw (10) on the suspension screw (11) gradually decreases until it disappears as the movable metal rod (15) descends, so that the measuring electrode component (14) is completely placed on the upper surface of the high voltage electrode (16) due to gravity, thus achieving complete contact between the measuring electrode component (14) and the high voltage electrode (16). Continue to lower the movable metal rod (15) so that the flat-head screw (8) is gradually pressed against the top of the suspension screw (11), and the pressure symmetrical about the central axis is transmitted to the electrode of the measuring electrode component (14), so that the electrode plane of the measuring electrode component (14) is in close contact with the upper surface of the upper surface of the high voltage electrode (16) to eliminate the air gap between the thin film sample and the high voltage electrode (16).

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