A grating light valve array and method of making the same

Abstract

This application discloses a grating light valve array and its fabrication method. The grating light valve array includes: a substrate; a one-dimensional cantilever array disposed above the substrate, wherein the one-dimensional cantilever array adopts a multi-row, multi-column cantilever array, each row of the cantilever array includes multiple sets of cantilever pairs that are equally spaced and parallel to each other, and the number of cantilever pairs in each row of the cantilever array is the same, and multiple cantilever pairs in the same column of different rows are electrically connected sequentially; the absolute value of the difference between the overall horizontal length and the overall vertical length of the multi-row, multi-column cantilever array is less than a preset threshold; and a driving circuit for applying voltage to each cantilever pair to cause the cantilever pair to deform and generate a height difference, wherein the driving circuit applies the same voltage to the cantilever pairs in the same column of different rows. The grating light valve array and its fabrication method of this application can reduce the difficulty of focusing and spot shaping in grating light valve illumination.

Description

Technical Field

[0001] This application relates to the field of micro-nano optics technology, and in particular to a grating light valve array and its fabrication method. Background Technology

[0002] Grating light valves (GLVs), as a commonly used phase-type optical modulation device, have been widely used in projection display and laser direct writing systems.

[0003] A typical one-dimensional GLV array consists of a large number of elongated cantilever beams, usually several centimeters long and about 0.2 mm wide. Coherent light strikes the GLV array, is modulated and reflected back, and the reflected light forms a spot in the far field. To improve the utilization of coherent light, the spot illuminating the GLV is often a strip several centimeters long and sub-millimeter wide, matching the shape of the GLV array. However, achieving such a slender spot is very difficult, as thin GLVs are not easily illuminated. Furthermore, individual GLV pixels are elongated, approximately 5-20 μm wide and 200 μm long. In image display or laser processing, these elongated spots can cause image stretching and distortion (e.g., the y-direction is much longer than the x-direction, resulting in an elongated image). Therefore, the elongated pixels need to be reshaped, for example, by compressing the y-direction through interference to make the spot circular. Summary of the Invention

[0004] This application aims to address at least one of the technical problems existing in the prior art. To this end, this application proposes a grating light valve array that can reduce the difficulty of focusing and shaping the light spot in grating light valve illumination.

[0005] This application also provides a method for fabricating a grating light valve array.

[0006] The grating light valve array according to the first aspect of this application includes: Base; A one-dimensional cantilever array is disposed above the substrate. The one-dimensional cantilever array adopts a multi-row, multi-column cantilever array. Each row of the cantilever array includes multiple pairs of cantilever beams that are equally spaced and parallel to each other. The number of cantilever beam pairs in each row of the cantilever array is the same. Multiple pairs of cantilever beams in the same column of different rows are electrically connected in sequence. The absolute value of the difference between the overall horizontal length and the overall vertical length of the multi-row, multi-column cantilever array is less than a preset threshold. A driving circuit is used to apply voltage to each pair of cantilever beams so that the cantilever beams deform to produce a height difference. The driving circuit applies the same voltage to cantilever beam pairs in different rows but the same column.

[0007] The grating light valve array according to the embodiments of this application has at least the following beneficial effects: This application employs a multi-row, multi-column suspended beam array, sequentially electrically connecting multiple pairs of suspended beams in the same column but different rows. This reduces the aspect ratio of the one-dimensional GLV array, lowers the difficulty of illumination convergence, increases the longitudinal receiving area, and increases the illumination receiving power. By applying the same voltage to the pairs of suspended beams in the same column but different rows, the longitudinal suspended beam spots are coherent and in phase, forming a bright spot at the center. Energy is converged and enhanced, increasing the pixel power density of imaging, reducing the longitudinal spot length, and lowering the difficulty of spot shaping.

[0008] According to some embodiments of this application, the cantilever pair includes components all electrically connected to the drive circuit: A fixed beam is disposed above the base, and all the fixed beams are at the same height relative to the base, and multiple fixed beams in different rows but the same column are electrically connected in sequence; A movable cantilever beam is disposed above the base, and the distance between the movable cantilever beam and the fixed beam is equal to the distance between adjacent cantilever beam pairs. The movable cantilever beams are electrically connected sequentially based on the different height differences between the received voltage values ​​and the fixed beams. Multiple movable cantilever beams in different rows but the same column are connected sequentially.

[0009] According to some embodiments of this application, the movable cantilever beam includes: A first silicon nitride layer is disposed above the substrate; A first conductive layer is disposed above the first silicon nitride layer and is electrically connected to the driving circuit. The first conductive layers of the movable cantilever beams in different rows but the same column are connected sequentially.

[0010] According to some embodiments of this application, the fixed beam includes: A second silicon nitride layer is disposed above the substrate; A second conductive layer is disposed above the second silicon nitride layer, and the second conductive layer is electrically connected to the driving circuit. The second conductive layers of the fixed beams in different rows but the same column are connected sequentially.

[0011] A method for fabricating a grating light valve array according to a second aspect embodiment of this application includes: Obtain the original transverse overall length and original longitudinal overall length of the original one-dimensional cantilever array, wherein the original one-dimensional cantilever array includes multiple pairs of cantilever beams that are equally spaced and parallel to each other; The target number of rows is determined based on the original horizontal overall length and the original vertical overall length, such that the absolute value of the difference between the target vertical overall length and the original horizontal overall length is less than a preset threshold, wherein the target vertical overall length is equal to the product of the target number of rows and the original vertical overall length; The number of rows of the original one-dimensional cantilever array is increased according to the target number of rows, so that the number of cantilever pairs in each row of the cantilever array is the same, and multiple cantilever pairs in the same column of different rows are electrically connected in sequence to obtain a multi-row and multi-column cantilever array. A multi-row, multi-column suspended beam array is placed on a substrate, and a driving circuit is connected to apply voltage to each suspended beam pair to obtain a grating light valve array as described in the first aspect embodiment above, wherein the voltage applied to suspended beam pairs in different rows but the same column is the same.

[0012] The fabrication method of the grating light valve array according to the embodiments of this application has at least the following beneficial effects: This application employs a multi-row, multi-column suspended beam array, sequentially electrically connecting multiple pairs of suspended beams in the same column but different rows. This reduces the aspect ratio of the one-dimensional GLV array, lowers the difficulty of illumination convergence, increases the longitudinal receiving area, and increases the illumination receiving power. By applying the same voltage to the pairs of suspended beams in the same column but different rows, the longitudinal suspended beam spots are coherent and in phase, forming a bright spot at the center. Energy is converged and enhanced, increasing the pixel power density of imaging, reducing the longitudinal spot length, and lowering the difficulty of spot shaping.

[0013] According to some embodiments of this application, the cantilever beam pair includes a fixed beam and a movable cantilever beam, the spacing between the movable cantilever beam and the fixed beam is equal to the spacing between adjacent cantilever beam pairs, and the horizontal length and vertical length of the fixed beam and the movable cantilever beam are the same. The original overall horizontal length is obtained through the following steps: Obtain the number of cantilever pairs in the original one-dimensional cantilever array, the transverse and longitudinal lengths of the fixed beam and the movable cantilever, and the spacing between the fixed beam and the movable cantilever; The original overall transverse length is determined based on the number of cantilever pairs, the transverse lengths of the fixed beam and the movable cantilever, and the interval between the fixed beam and the movable cantilever.

[0014] According to some embodiments of this application, the constraint formula for the original transverse overall length is: ; in, The original horizontal overall length. The number of cantilever beams. The distance between the fixed beam and the movable cantilever beam. The lateral lengths of the fixed beam and the movable cantilever beam are given.

[0015] According to some embodiments of this application, the original longitudinal overall length is obtained through the following steps: The longitudinal length of the fixed beam and the movable cantilever beam is determined as the original overall longitudinal length.

[0016] According to some embodiments of this application, the step of increasing the number of rows of the original one-dimensional cantilever array according to the target number of rows, so that the number of cantilever pairs in each row of the cantilever array is the same, and multiple cantilever pairs in the same column of different rows are electrically connected in sequence to obtain a multi-row, multi-column cantilever array, includes: The number of rows in the original one-dimensional cantilever array is increased according to the target number of rows, so that the number of cantilever pairs in each row of the cantilever array is the same. Multiple movable cantilever beams in the same column of different rows are electrically connected in sequence, and multiple fixed beams in the same column of different rows are electrically connected in sequence to obtain the multi-row and multi-column cantilever array.

[0017] According to some embodiments of this application, the movable cantilever beam includes a first silicon nitride layer and a first conductive layer disposed above the first silicon nitride layer, and the fixed beam includes a second silicon nitride layer and a second conductive layer disposed above the second silicon nitride layer; The process of increasing the number of rows in the original one-dimensional cantilever array according to the target number of rows, so that the number of cantilever pairs in each row of the cantilever array is the same, and multiple movable cantilever beams in the same column of different rows are electrically connected in sequence, and multiple fixed beams in the same column of different rows are electrically connected in sequence, to obtain the multi-row, multi-column cantilever array, includes: The number of rows in the original one-dimensional cantilever array is increased according to the target number of rows, so that the number of cantilever pairs in each row of the cantilever array is the same. The first conductive layers of multiple movable cantilever beams in different rows and the same column are connected in sequence, and the second conductive layers of multiple fixed beams in different rows and the same column are connected in sequence to obtain the multi-row and multi-column cantilever array.

[0018] Other features and advantages of this application will be set forth in the following description, and will be apparent in part from the description, or may be learned by practicing this application. Attached Figure Description

[0019] The above and / or additional aspects and advantages of this application will become apparent and readily understood from the description of the embodiments taken in conjunction with the following drawings, in which: Figure 1 This is a top view of a pair of cantilever beams according to an embodiment of this application; Figure 2 This is a side view of a pair of cantilever beams according to an embodiment of this application; Figure 3 This is a top view of a one-dimensional suspended beam array composed of multiple pairs of suspended beams according to an embodiment of this application, and the corresponding light spot shape; Figure 4 This is a diagram of the deformation of the cantilever beam when the voltage difference between the cantilever beam and the substrate is zero, according to an embodiment of this application. Figure 5This is a diagram showing the deformation of a cantilever beam when the voltage difference between the cantilever beam and the substrate is not zero, according to an embodiment of this application. Figure 6 This is a schematic diagram of the lateral arrangement of a one-dimensional cantilever array according to an embodiment of this application; Figure 7 This is a schematic diagram of the longitudinal arrangement of a one-dimensional cantilever array according to an embodiment of this application; Figure 8 This is a schematic diagram of the sequential electrical connection of multiple pairs of cantilever beams in different rows but the same column according to an embodiment of this application; Figure 9 This is a far-field spot pattern of a GLV array according to an embodiment of this application; Figure 10 This is a far-field spot pattern of two GLV arrays according to an embodiment of this application; Figure 11 This is a flowchart of a method for fabricating a grating light valve array according to an embodiment of this application. Detailed Implementation

[0020] The embodiments of this application are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain this application, and should not be construed as limiting this application.

[0021] In the description of this application, the use of terms such as "first," "second," etc., is for the purpose of distinguishing technical features only and should not be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated or the order of the technical features indicated.

[0022] In the description of this application, it should be understood that the orientation descriptions, such as up, down, etc., are based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application.

[0023] In the description of this application, it should be noted that, unless otherwise explicitly defined, terms such as "setup," "installation," and "connection" should be interpreted broadly, and those skilled in the art can reasonably determine the specific meaning of the above terms in this application in conjunction with the specific content of the technical solution.

[0024] The following will combine Figures 1 to 10 The grating light valve array of the embodiments of this application will be clearly and completely described. Obviously, the embodiments described below are some embodiments of this application, not all embodiments.

[0025] According to a first aspect embodiment of this application, a grating light valve array includes a substrate, a one-dimensional cantilever array disposed above the substrate, and a driving circuit. The one-dimensional cantilever array employs a multi-row, multi-column cantilever array, with each row including multiple sets of equally spaced and parallelly aligned cantilever pairs, and the number of cantilever pairs in each row being the same. Multiple cantilever pairs in the same column of different rows are electrically connected sequentially. The absolute value of the difference between the overall horizontal length and the overall vertical length of the multi-row, multi-column cantilever array is less than a preset threshold. The driving circuit applies a voltage to each cantilever pair to cause deformation and height difference, and the driving circuit applies the same voltage to cantilever pairs in the same column of different rows.

[0026] refer to Figures 1 to 5 , Figure 1 This is a top view of a pair of cantilever beams according to an embodiment of this application. Figure 2 This is a side view of a pair of cantilever beams according to an embodiment of this application. Figure 3 This is a top view of a one-dimensional cantilever array composed of multiple pairs of cantilever beams according to an embodiment of this application, and the corresponding light spot shape. Figure 4 This is a diagram showing the deformation of the cantilever beam when the voltage difference between the cantilever beam and the substrate is zero, according to an embodiment of this application. Figure 5 This is a diagram showing the deformation of the cantilever beam when the voltage difference between the cantilever beam and the substrate is not zero, according to an embodiment of this application.

[0027] The height of the cantilever beam is determined by the voltage difference between the voltage applied to the cantilever beam and the voltage difference between the voltage difference and the voltage difference at the base below the cantilever beam. The larger the beam, the greater the electrostatic attraction, causing the beam to deform and create a height difference. .

[0028] It is understandable that the width of the bright fringes in multi-slit interference... The formula is given below: , Where is the wavelength of the incident light. It's the distance from the seam to the screen. It is the distance between two adjacent seams. This is the total number of seams. When seams... The larger the number of beams, the finer the bright fringes. For a one-dimensional array of elongated suspended beams, the same phase difference between the beams is equivalent to multi-slit interference, and multiple suspended beams will produce elongated light spots (i.e., elliptical light spots).

[0029] refer to Figure 6 and Figure 7 , Figure 6 This is a schematic diagram of the lateral arrangement of a one-dimensional cantilever array according to an embodiment of this application. Figure 7 This is a schematic diagram of the longitudinal arrangement of a one-dimensional cantilever array according to an embodiment of this application. For a one-dimensional cantilever array, in... x The direction is composed of multiple cantilever beams. yThe direction is like a long, narrow beam, creating a long, narrow light spot. If in... y Multiple slits are also formed in the direction of interference. y The light spot in the direction will be compressed. y The direction of the light spot is As long as you increase y The spacing in the direction, that is, the increase y Direction It can make It becomes smaller. For a typical one-dimensional cantilever array, y The directional cantilever beam is 200µm long. x The cantilever beam width in the direction is 5µm, which theoretically means that in... y Only two cantilever arrays are needed in the direction to allow x The light spots from the interference of 40 cantilever beams in the direction become circular. That is, the overall horizontal length and overall vertical length of the multi-row, multi-column cantilever beam array need to be as close as possible to form a near-circular light spot. The preset threshold can be set according to the actual situation and is not specifically limited here.

[0030] refer to Figure 8 , Figure 8 This is a schematic diagram illustrating the sequential electrical connection of multiple pairs of cantilever beams in different rows but the same column according to an embodiment of this application. Each pair of cantilever beams includes a fixed beam and a movable cantilever beam, both electrically connected to a drive circuit. The fixed beams are positioned above the base, and all fixed beams have the same height relative to the base; multiple fixed beams in different rows but the same column are sequentially electrically connected. The movable cantilever beam is positioned above the base, and the distance between the movable cantilever beam and the fixed beam is equal to the distance between adjacent pairs of cantilever beams. The movable cantilever beams are sequentially electrically connected based on the different height differences between the received voltage values ​​and the fixed beams.

[0031] The movable cantilever beam includes a first silicon nitride layer and a first conductive layer. The first silicon nitride layer is disposed above the substrate; the first conductive layer is disposed above the first silicon nitride layer and is electrically connected to the drive circuit. The first conductive layers of the movable cantilever beams in different rows but the same column are connected sequentially.

[0032] The fixed beam includes a second silicon nitride layer and a second conductive layer. The second silicon nitride layer is disposed above the substrate; the second conductive layer is disposed above the second silicon nitride layer and is electrically connected to the drive circuit. The second conductive layers of the fixed beams in different rows but the same column are connected sequentially.

[0033] The movable / fixed beams in the same column are connected end to end. A voltage is applied to each movable / fixed beam in the same column to ensure that the potential of each beam is equal. Therefore, under the action of electrostatic force, the deformation caused by attraction at the bottom is equal. When multiple movable cantilever beams are energized and their deformation is the same, and their optical path difference is the same as that of the fixed beam, the longitudinal cantilever beam spots are coherent and in phase, forming a bright spot at the center. This concentrates and strengthens the energy, increases the pixel power density of the image, reduces the longitudinal beam length, and lowers the difficulty of beam shaping. On the other hand, by sequentially electrically connecting multiple pairs of cantilever beams in the same column but different rows, the aspect ratio of the one-dimensional GLV array is reduced, the concentration difficulty of illumination is lowered, the longitudinal receiving area is increased, and the receiving power of illumination is increased.

[0034] It should be noted that when the incident light wavelength and working distance are constant, the shape of the light spot changes from... Decision. Generally, for a one-dimensional GLV array, due to... x There are many cantilever beams in the direction, although It's relatively small, but The quantity is large, resulting in If the product is large, then to make the light spot circular, it is necessary to... y Direction ≈ To achieve ≈ It can increase Only two GLV arrays are needed, but excessively large ones... This can lead to excessively large spacing between the vertically aligned cantilever beams in the same column, resulting in low reflected light efficiency. Increasing... The same can be achieved. y The effect of compressing the light spot in the direction, but Adding more will increase the cost of GLV chips, and this must be taken into account in actual design. and .

[0035] Furthermore, it should be noted that although this application uses a multi-row, multi-column suspended beam array, it still belongs to a one-dimensional GLV array, not a two-dimensional array.

[0036] The working principle of the one-dimensional GLV array mentioned in this application is prior art known to those skilled in the art, and will not be described in detail here.

[0037] In a specific embodiment, taking 11 pairs of suspended beam grating light valves as an example, the distance between adjacent suspended beam reflective surfaces is 1 / 2 wavelength, and a plane wave is incident. The near-field simulation results of the reflected light field are as follows: Figure 9 and Figure 10 , Figure 9 This is a far-field spot pattern of a GLV array according to an embodiment of this application. Figure 10This is a far-field spot diagram of two GLV arrays according to an embodiment of this application. As can be seen, by using a multi-row, multi-column suspended beam array, multiple pairs of suspended beams in different rows and the same column are electrically connected in sequence, and the same voltage is applied to the pairs of suspended beams in different rows and the same column. The longitudinal suspended beam spots are coherent and in phase, and the resulting spot is closer to a circle, reducing the longitudinal spot length and lowering the difficulty of spot shaping.

[0038] According to the grating light valve array of the embodiments of this application, this application adopts a multi-row, multi-column suspended beam array, which sequentially electrically connects multiple suspended beam pairs in different rows and the same column, thereby reducing the aspect ratio of the one-dimensional GLV array, reducing the difficulty of illumination convergence, increasing the longitudinal receiving area, and increasing the illumination receiving power; applying the same voltage to the suspended beam pairs in different rows and the same column, the longitudinal suspended beam spots are coherent and in phase, forming a bright spot in the center, the energy is converged and strengthened, increasing the pixel power density of imaging, reducing the longitudinal spot length, and reducing the difficulty of spot shaping.

[0039] refer to Figure 11 , Figure 11 This is a flowchart of a method for fabricating a grating light valve array according to an embodiment of this application.

[0040] A method for fabricating a grating light valve array according to a second aspect embodiment of this application includes: Obtain the original transverse overall length and original longitudinal overall length of the original one-dimensional cantilever array. The original one-dimensional cantilever array includes multiple pairs of cantilever beams that are equally spaced and parallel to each other. The target number of rows is determined based on the original horizontal overall length and the original vertical overall length, such that the absolute value of the difference between the target vertical overall length and the original horizontal overall length is less than a preset threshold. The target vertical overall length is equal to the product of the target number of rows and the original vertical overall length. The number of rows in the original one-dimensional cantilever array is increased according to the target number of rows, so that the number of cantilever pairs in each row of the cantilever array is the same. Multiple cantilever pairs in the same column of different rows are electrically connected in sequence to obtain a multi-row and multi-column cantilever array. A multi-row, multi-column cantilever array is placed on a substrate, and a driving circuit is connected to apply voltage to each cantilever pair to obtain a grating light valve array as described in the first aspect embodiment above, wherein the voltage applied to cantilever pairs in different rows but the same column is the same.

[0041] In some embodiments of this application, the suspension beam pair includes a fixed beam and a movable suspension beam, the spacing between the movable suspension beam and the fixed beam is equal to the spacing between adjacent suspension beam pairs, and the lateral length and longitudinal length of the fixed beam and the movable suspension beam are the same. The original horizontal overall length is obtained through the following steps: Obtain the number of cantilever pairs, the transverse and longitudinal lengths of the fixed and movable cantilever beams, and the spacing between the fixed and movable cantilever beams of the original one-dimensional cantilever array. The original overall transverse length is determined based on the number of cantilever pairs, the transverse lengths of the fixed beams and movable cantilever beams, and the interval between the fixed beams and movable cantilever beams.

[0042] The constraint formula for the original overall horizontal length is: ,in, This is the original horizontal overall length. The number of cantilever beams. The interval between the fixed beam and the movable cantilever beam. This refers to the lateral length of the fixed beam and the movable cantilever beam.

[0043] The original longitudinal overall length is obtained through the following steps: the longitudinal lengths of the fixed beam and the movable cantilever beam are determined as the original longitudinal overall length.

[0044] Understandably, the principle for determining the target number of rows is that the overall horizontal length and overall vertical length of the multi-row, multi-column cantilever array need to be as close as possible to form a near-circular light spot. The preset threshold can be set according to the actual situation and is not specifically limited here.

[0045] In some embodiments of this application, the number of rows in the original one-dimensional cantilever array is increased according to the target number of rows, so that the number of cantilever pairs in each row of the cantilever array is the same, and multiple cantilever pairs in the same column of different rows are electrically connected in sequence to obtain a multi-row, multi-column cantilever array, including: The number of rows in the original one-dimensional cantilever array is increased according to the target number of rows, so that the number of cantilever pairs in each row of the cantilever array is the same. Multiple movable cantilever beams in the same column of different rows are electrically connected in sequence, and multiple fixed beams in the same column of different rows are electrically connected in sequence, resulting in a multi-row and multi-column cantilever array.

[0046] In some embodiments of this application, the movable cantilever beam includes a first silicon nitride layer and a first conductive layer disposed above the first silicon nitride layer, and the fixed beam includes a second silicon nitride layer and a second conductive layer disposed above the second silicon nitride layer; The number of rows in the original one-dimensional cantilever array is increased according to the target number of rows, so that the number of cantilever pairs in each row of the cantilever array is the same. Multiple movable cantilever beams in the same column of different rows are electrically connected in sequence, and multiple fixed beams in the same column of different rows are electrically connected in sequence, resulting in a multi-row, multi-column cantilever array, including: The number of rows in the original one-dimensional cantilever array is increased according to the target number of rows, so that the number of cantilever pairs in each row of the cantilever array is the same. The first conductive layer of multiple movable cantilever beams in different rows and the same column is connected in sequence, and the second conductive layer of multiple fixed beams in different rows and the same column is connected in sequence, thus obtaining a multi-row and multi-column cantilever array.

[0047] Since the fabrication method of the grating light valve array adopts all the technical solutions of the grating light valve array of the first aspect embodiment described above, it has at least all the beneficial effects brought about by the technical solutions of the above embodiments, and will not be repeated here.

[0048] According to the fabrication method of the grating light valve array according to the embodiments of this application, this application adopts a multi-row, multi-column suspended beam array, which sequentially electrically connects multiple suspended beam pairs in different rows and the same column, thereby reducing the aspect ratio of the one-dimensional GLV array, reducing the difficulty of illumination convergence, increasing the longitudinal receiving area, and increasing the illumination receiving power; applying the same voltage to the suspended beam pairs in different rows and the same column, the longitudinal suspended beam light spots are coherent and in phase, forming a bright spot in the center, the energy is converged and strengthened, increasing the pixel power density of imaging, reducing the longitudinal light spot length, and reducing the difficulty of light spot shaping.

[0049] The embodiments of this application have been described in detail above with reference to the accompanying drawings. However, this application is not limited to the above embodiments. Within the scope of knowledge possessed by those skilled in the art, various changes can be made without departing from the spirit of this application.

Claims

1. A grating light valve array, characterized in that, include: Base; A one-dimensional cantilever array is disposed above the substrate. The one-dimensional cantilever array adopts a multi-row, multi-column cantilever array. Each row of the cantilever array includes multiple pairs of cantilever beams that are equally spaced and parallel to each other. The number of cantilever beam pairs in each row of the cantilever array is the same. Multiple pairs of cantilever beams in the same column of different rows are electrically connected in sequence. The absolute value of the difference between the overall horizontal length and the overall vertical length of the multi-row, multi-column cantilever array is less than a preset threshold. A driving circuit is used to apply voltage to each pair of cantilever beams so that the cantilever beams deform to produce a height difference. The driving circuit applies the same voltage to cantilever beam pairs in different rows but the same column.

2. The grating light valve array according to claim 1, characterized in that, The cantilever beams are all electrically connected to the drive circuit: A fixed beam is disposed above the base, and all the fixed beams are at the same height relative to the base, and multiple fixed beams in different rows but the same column are electrically connected in sequence; A movable cantilever beam is disposed above the base, and the distance between the movable cantilever beam and the fixed beam is equal to the distance between adjacent cantilever beam pairs. The movable cantilever beams are electrically connected sequentially based on the different height differences between the received voltage values ​​and the fixed beams. Multiple movable cantilever beams in different rows but the same column are connected sequentially.

3. The grating light valve array according to claim 2, characterized in that, The movable cantilever beam includes: A first silicon nitride layer is disposed above the substrate; A first conductive layer is disposed above the first silicon nitride layer and is electrically connected to the driving circuit. The first conductive layers of the movable cantilever beams in different rows but the same column are connected sequentially.

4. The grating light valve array according to claim 2, characterized in that, The fixed beam includes: A second silicon nitride layer is disposed above the substrate; A second conductive layer is disposed above the second silicon nitride layer, and the second conductive layer is electrically connected to the driving circuit. The second conductive layers of the fixed beams in different rows but the same column are connected sequentially.

5. A method for fabricating a grating light valve array, characterized in that, include: Obtain the original transverse overall length and original longitudinal overall length of the original one-dimensional cantilever array, wherein the original one-dimensional cantilever array includes multiple pairs of cantilever beams that are equally spaced and parallel to each other; The target number of rows is determined based on the original horizontal overall length and the original vertical overall length, such that the absolute value of the difference between the target vertical overall length and the original horizontal overall length is less than a preset threshold, wherein the target vertical overall length is equal to the product of the target number of rows and the original vertical overall length; The number of rows of the original one-dimensional cantilever array is increased according to the target number of rows, so that the number of cantilever pairs in each row of the cantilever array is the same, and multiple cantilever pairs in the same column of different rows are electrically connected in sequence to obtain a multi-row and multi-column cantilever array. A multi-row, multi-column suspended beam array is placed on a substrate, and a driving circuit is connected to apply voltage to each suspended beam pair to obtain a grating light valve array as described in any one of claims 1 to 4, wherein the voltage applied to suspended beam pairs in different rows but the same column is the same.

6. The method for fabricating a grating light valve array according to claim 5, characterized in that, The cantilever beam pair includes a fixed beam and a movable cantilever beam. The distance between the movable cantilever beam and the fixed beam is equal to the distance between adjacent cantilever beam pairs. The horizontal length and vertical length of the fixed beam and the movable cantilever beam are the same. The original overall horizontal length is obtained through the following steps: Obtain the number of cantilever pairs in the original one-dimensional cantilever array, the transverse and longitudinal lengths of the fixed beam and the movable cantilever, and the spacing between the fixed beam and the movable cantilever; The original overall transverse length is determined based on the number of cantilever pairs, the transverse lengths of the fixed beam and the movable cantilever, and the interval between the fixed beam and the movable cantilever.

7. The method for fabricating a grating light valve array according to claim 6, characterized in that, The constraint formula for the original horizontal overall length is: ； in, The original horizontal overall length. The number of cantilever beams. The distance between the fixed beam and the movable cantilever beam. The lateral lengths of the fixed beam and the movable cantilever beam are given.

8. The method for fabricating a grating light valve array according to claim 6, characterized in that, The original longitudinal overall length is obtained through the following steps: The longitudinal length of the fixed beam and the movable cantilever beam is determined as the original overall longitudinal length.

9. The method for fabricating a grating light valve array according to claim 6, characterized in that, The step of increasing the number of rows in the original one-dimensional cantilever array according to the target number of rows, so that the number of cantilever pairs in each row of the cantilever array is the same, and multiple cantilever pairs in the same column of different rows are electrically connected in sequence to obtain a multi-row, multi-column cantilever array, includes: The number of rows in the original one-dimensional cantilever array is increased according to the target number of rows, so that the number of cantilever pairs in each row of the cantilever array is the same. Multiple movable cantilever beams in the same column of different rows are electrically connected in sequence, and multiple fixed beams in the same column of different rows are electrically connected in sequence to obtain the multi-row and multi-column cantilever array.

10. The method for fabricating a grating light valve array according to claim 9, characterized in that, The movable cantilever beam includes a first silicon nitride layer and a first conductive layer disposed above the first silicon nitride layer, and the fixed beam includes a second silicon nitride layer and a second conductive layer disposed above the second silicon nitride layer; The process of increasing the number of rows in the original one-dimensional cantilever array according to the target number of rows, so that the number of cantilever pairs in each row of the cantilever array is the same, and multiple movable cantilever beams in the same column of different rows are electrically connected in sequence, and multiple fixed beams in the same column of different rows are electrically connected in sequence, to obtain the multi-row, multi-column cantilever array, includes: The number of rows in the original one-dimensional cantilever array is increased according to the target number of rows, so that the number of cantilever pairs in each row of the cantilever array is the same. The first conductive layers of multiple movable cantilever beams in different rows and the same column are connected in sequence, and the second conductive layers of multiple fixed beams in different rows and the same column are connected in sequence to obtain the multi-row and multi-column cantilever array.

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