Quadrupole mass analyzer

By setting a blocking component between the filament and the ionization box to block the coating formation, the problem of shortened filament life is solved, enabling longer filament use and stable voltage control.

CN122291371APending Publication Date: 2026-06-26HORIBA STEC CO LTD
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
HORIBA STEC CO LTD
Filing Date
2025-12-09
Publication Date
2026-06-26

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Abstract

The present invention provides a quadrupole mass analyzer. The ion source (21) of the quadrupole mass analyzer (100) has: a filament (211) which is subjected to a voltage to release electrons; an ionization chamber (212) which provides electrons to ionize the sample; and a blocking member (214) disposed between the filament (211) and the ionization chamber (212) to block the movement of a coating forming a film that forms a coating in the ionization chamber (212) into the ionization chamber (212).
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Citation Information

Patent Citations

  • Filament for thermal electron emission, quadrupole mass spectrometer, and method for analyzing residual gas

    JP2017107816A