A resonant sensor device and an apparatus

Abstract

This application relates to the field of sensor technology, providing a resonant sensor device and an apparatus. The resonant sensor device includes: a waveguide with a waveguide opening at its top; a dielectric resonant unit located at the waveguide opening, the dielectric resonant unit having an internal cavity and a through-hole extending along its thickness direction; and a substrate located above the waveguide and spaced apart from it, with a dielectric medium to be measured disposed between the waveguide and the substrate. In this application, the dielectric resonant unit has an internal cavity, and the through-hole is provided on the dielectric resonant unit, which enhances and dissipates the strong resonant electromagnetic field into natural space, rather than confining it solely within the dielectric resonant unit, thereby achieving strong wave absorption performance and improving sensor sensitivity.

Description

Technical Field

[0001] This application relates to the field of sensor technology, and more specifically, to a resonant sensor device and an apparatus. Background Technology

[0002] Microwave near-field sensing technology, as a high-precision sensing method, has significant application value in fields such as industrial inspection, environmental monitoring, and materials analysis. Resonant sensors are one of the core components of this technology. The core sensing mechanism of resonant sensors is achieved by monitoring changes in resonant frequency. They can be used to collect various parameters of materials and the environment, and are commonly applied to sensing strain, displacement, temperature, density, and material property analysis.

[0003] Resonant sensors are mostly planar metallic structures, and their characterization principle is generally based on the shift in resonant frequency caused by the analyte. The planar structure confines the strong, localized electromagnetic field generated by the sensor primarily within the dielectric substrate, failing to adequately expose it to the analyte, resulting in low sensor sensitivity. Dielectric ceramic materials exhibit very low losses and possess multiple intrinsic resonant modes, which is advantageous for realizing sensors with simple structures and high accuracy. In single-dielectric constant sensors, the electromagnetic field of the entire dipole remains mainly concentrated within the dielectric particle, with only a small portion of the weak magnetic field exposed near the dielectric particle; therefore, the increase in sensitivity remains limited.

[0004] The information disclosed in the background section is only intended to enhance the understanding of the background of this application, and therefore may contain information that is not part of the prior art known to those skilled in the art. Summary of the Invention

[0005] This application provides a resonant sensor device to solve the problems of existing resonant sensors, such as the electromagnetic field being concentrated in the dielectric particles, low resonance intensity, and low sensor sensitivity.

[0006] To achieve the above objectives, this application provides the following technical solution: A resonant sensor device, comprising: Waveguide, with a waveguide port at the top; A dielectric resonant unit is located at the waveguide port. The dielectric resonant unit has an internal cavity and a through hole extending along the thickness direction. A substrate is located above and spaced apart from the waveguide, and a medium to be measured is disposed between the waveguide and the substrate.

[0007] Optionally, the dielectric resonator unit is a rectangular cavity.

[0008] Optionally, the dielectric resonator unit is a cube structure.

[0009] Optionally, the radius of the through hole is less than or equal to one-quarter of the side length of the dielectric resonator unit.

[0010] Optionally, the dielectric resonator unit is made of barium titanate.

[0011] Optionally, the substrate is an aluminum substrate.

[0012] Optionally, the number of dielectric resonator units is several, and each dielectric resonator unit is uniformly arranged on the waveguide.

[0013] Optionally, the side length of the dielectric resonator unit is 2mm, and the radius of the through hole is 0.5mm.

[0014] Optionally, the through hole is located at the center of the dielectric resonator unit.

[0015] This application provides a resonant sensor device, comprising: a waveguide with a waveguide opening at the top; a dielectric resonant unit located at the waveguide opening, the dielectric resonant unit having an inner cavity and a through hole extending along the thickness direction; and a substrate located above the waveguide and spaced apart from the waveguide, with a medium to be measured disposed between the waveguide and the substrate.

[0016] The resonant sensor device provided in this application embodiment has the following technical advantages compared to the prior art: In this application, the dielectric resonant unit has an internal cavity and through holes are provided on the dielectric resonant unit to enhance and dissipate the strong resonant electromagnetic field into the natural space, rather than confining it to the interior of the dielectric resonant unit, thereby achieving strong wave absorption performance and improving sensor sensitivity. Attached Figure Description

[0017] The accompanying drawings, which are included to provide a further understanding of this application and form part of this application, illustrate exemplary embodiments and are used to explain this application, but do not constitute an undue limitation of this application. In the drawings: Figure 1 This is a schematic diagram of the resonant sensor device provided in the embodiments of this application; Figure 2 This is a schematic diagram of the structure of the dielectric resonator unit provided in the embodiments of this application; Figure 3 This is a schematic diagram illustrating the relationship between the frequency and the S11 parameter provided in the first embodiment of this application; Figure 4 This is a schematic diagram illustrating the relationship between the frequency and the S11 parameter provided in the second embodiment of this application; Figure 5 This is a schematic diagram illustrating the relationship between the frequency and the S11 parameter provided in the third embodiment of this application; Figure 6This is a schematic diagram illustrating the relationship between the frequency and the S11 parameter provided in the fourth embodiment of this application; Figure 7 This is a schematic diagram illustrating the relationship between the frequency and the S11 parameter provided in the fifth embodiment of this application.

[0018] Figure label: Waveguide 1, waveguide port 2, dielectric resonator 3, through hole 4, substrate 5, medium under test 6. Detailed Implementation

[0019] This invention discloses a resonant sensor device to solve the problems of existing resonant sensors, such as the electromagnetic field being concentrated in the dielectric particles, low resonance intensity, and low sensor sensitivity.

[0020] To make the technical solutions and advantages of the embodiments of this application clearer, the exemplary embodiments of this application will be described in further detail below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of this application, and not an exhaustive list of all embodiments. It should be noted that, unless otherwise specified, the embodiments and features in the embodiments of this application can be combined with each other.

[0021] Please see Figure 1-2 , Figure 1 This is a schematic diagram of the resonant sensor device provided in the embodiments of this application; Figure 2 This is a schematic diagram of the structure of the dielectric resonator unit provided in an embodiment of this application.

[0022] In one specific embodiment, the resonant sensor device provided in this application includes a waveguide 1, a dielectric resonant unit 3, and a substrate 5. The waveguide 1 has a waveguide opening 2 at its top, from which energy is radiated or received, serving as a transmission channel for electromagnetic waves and responsible for transmitting the excitation signal from the source end to the sensing area. Unlike traditional side coupling or end-face coupling, the energy outlet here is located on the upper surface of the waveguide 1, meaning that the electromagnetic field mainly radiates or disappears outward from the top of the waveguide 1, providing a direct coupling interface for placing the resonant unit above. The dielectric resonant unit 3 is placed at the waveguide opening 2. The dielectric resonant unit 3 has an internal cavity, which can be set as a hollow cylinder, square prism, or other shapes, changing the dielectric constant distribution by setting the cavity. Simultaneously, the dielectric resonant unit 3 has a through-hole 4 extending along the thickness direction. The radius r of the through-hole 4 is a key parameter affecting sensor performance. Optimizing the radius r of the through-hole 4 allows the sensor to achieve optimal impedance matching while obtaining the final dimensional parameters. Figure 3-6 As shown, Figure 3 This is a schematic diagram showing the relationship between the frequency and the S11 parameter provided in the first embodiment of this application, wherein the radius of the through hole 4 is r = 0.2 mm; Figure 4This is a schematic diagram showing the relationship between the frequency and the S11 parameter provided in the second embodiment of this application, wherein the radius of the through hole 4 is r = 0.3 mm; Figure 5 This is a schematic diagram showing the relationship between the frequency and the S11 parameter provided in the third embodiment of this application, wherein the radius of the through hole 4 is r = 0.4 mm; Figure 6 This is a schematic diagram illustrating the relationship between the frequency and the S11 parameter provided in the fourth embodiment of this application, wherein the radius of the through hole 4 is r = 0.5 mm; Figure 3-6 It can be observed that as the radius of the via 4 increases, the effective sensing frequency range shifts to higher frequencies, which can effectively characterize changes in the dielectric constant of the material. When the radius of the via 4 in the dielectric particle is 0.5 mm, the sensor can characterize the dielectric constant of the measured material between 1 and 6. Furthermore, as the dielectric constant of the measured material increases, the resonant frequency shifts to lower frequencies, and the resonant peak is strong and sharp, making it easy to detect and exhibiting good performance indicators. By drilling holes in the dielectric particles, the electromagnetic field can be enhanced and dissipated into natural space rather than confined inside the dielectric particles, thus obtaining a stronger signal. Simulation results. Figure 7 The results show that, compared to single dielectric constant sensors, single dielectric via 4 dielectric constant sensors achieve stronger absorption performance and can improve sensitivity and signal strength.

[0023] Waveguide 1 and substrate 5 are not in direct contact, but have a gap in between. The analyte fills the gap between waveguide 1 and substrate 5, creating a sandwich-type sensitive region. The dielectric resonator unit 3 has an inner cavity and a through-hole 4, which changes the equivalent dielectric constant of the resonator, causing frequency drift. This allows for the detection of extremely low concentrations of biomolecules or minute changes in dielectric constant. Liquid or gas samples can flow directly through the center of the resonator unit, enabling continuous, real-time, and online monitoring without stopping the flow for static measurements. Because the through-hole 4 is located in the region of strongest resonant field, samples flowing through this area generate the strongest signal response. The required sample volume is extremely small, making it suitable for the detection of precious biological samples.

[0024] In one embodiment, the dielectric resonator 3 is a rectangular cavity, with the through-hole 4 perpendicular to the rectangular surface along the thickness direction. This facilitates processing and manufacturing, allows for flexible mode control, and avoids degeneracy. Simultaneously, the waveguide port 2 is also rectangular; this rectangular-to-rectangular placement maximizes the overlap integral of the electromagnetic field in the coupling region, thereby improving energy transmission efficiency. Furthermore, the dielectric resonator 3 has a cubic structure, ensuring consistent sensor response and eliminating the need for precise alignment of the polarization direction of the waveguide port 2, thus reducing system assembly difficulty. Simultaneously, the manufacturing process is standardized and simplified.

[0025] In one optional embodiment, the radius of the through-hole 4 is less than or equal to one-quarter of the side length of the dielectric resonator unit 3. By drilling a hole in the dielectric particle, the electromagnetic field can be enhanced and dissipated into natural space instead of being confined inside the dielectric particle, thereby obtaining a stronger signal. The single dielectric through-hole 4 dielectric constant sensor has a greater resonance intensity, higher sensitivity, and stronger signal, making it easier to detect. The through-hole 4 structure enhances the absorption intensity of the sensor. Preferably, the side length of the dielectric resonator unit 3 is 2 mm, and the radius of the through-hole 4 is 0.5 mm.

[0026] Preferably, the through hole 4 is located at the center of the dielectric resonant unit 3; the axis of the through hole 4 coincides with the geometric center axis of the dielectric resonant unit 3, and in the cross-section, the center of the through hole 4 is the geometric center of the bottom surface of the resonant unit; in the longitudinal direction, the through hole 4 penetrates the central axis of the thickness; it maximizes the detection sensitivity and ensures the uniformity and repeatability of the measurement.

[0027] In one specific embodiment, the dielectric resonator 3 is made of barium titanate material; it has a high dielectric constant, low microwave loss, and enables the sensor to be miniaturized, while also possessing extremely high sensitivity.

[0028] In one embodiment, the substrate 5 is an aluminum substrate 5; it has high conductivity, which facilitates total reflection of electromagnetic waves on the surface to form standing waves. The aluminum substrate 5 serves as the top cover, forming a standard "parallel plate" or "rectangular cavity" structure with the waveguide 1 below. The high conductivity of aluminum ensures that the Q value of the cavity is mainly determined by the loss of the measured medium 6, rather than the wall loss, thereby making the measurement results more realistically reflect the sample characteristics and establishing the boundary conditions of the resonant mode; it can construct high-quality electromagnetic boundaries and has excellent electromagnetic shielding and anti-interference capabilities.

[0029] Optionally, in another embodiment, the number of dielectric resonator units 3 is several, and each dielectric resonator unit 3 is uniformly arranged on the waveguide 1; such as arranged in a row, matrix, or ring with equal spacing; when the electromagnetic wave propagates in the waveguide 1, it will pass through each resonator unit in sequence; each unit will couple out a portion of energy from the waveguide 1 to generate resonance, and transfer the remaining energy to the next unit; this structure forms a cascaded coupling system or a periodic structure. Depending on the arrangement spacing and unit characteristics, they can behave as independent parallel channels, or they can interact to form special filtering characteristics; it can perform multi-channel parallel detection and high-throughput screening; construct special filtering responses, improve the signal-to-noise ratio; and expand the effective detection area.

[0030] This application also provides a device including the resonant sensor device described in any of the above embodiments. The device can be a detection device, such as a temperature detection device or a displacement detection device.

[0031] Although preferred embodiments of this application have been described, those skilled in the art, upon learning the basic inventive concept, can make other changes and modifications to these embodiments. Therefore, the appended claims are intended to be interpreted as including the preferred embodiments as well as all changes and modifications falling within the scope of this application.

[0032] Obviously, those skilled in the art can make various modifications and variations to this application without departing from the spirit and scope of this application. Therefore, if such modifications and variations fall within the scope of the claims of this application and their equivalents, this application also intends to include such modifications and variations.

Claims

1. A resonant sensor device, characterized in that, include: Waveguide, with a waveguide port at the top; A dielectric resonant unit is located at the waveguide port. The dielectric resonant unit has an internal cavity and a through hole extending along the thickness direction. A substrate is located above and spaced apart from the waveguide, and a medium to be measured is disposed between the waveguide and the substrate.

2. The resonant sensor device according to claim 1, characterized in that, The dielectric resonant unit is a rectangular cavity.

3. The resonant sensor device according to claim 2, characterized in that, The dielectric resonant unit has a cube structure.

4. The resonant sensor device according to claim 3, characterized in that, The radius of the through hole is less than or equal to one-quarter of the side length of the dielectric resonator unit.

5. The resonant sensor device according to claim 1, characterized in that, The dielectric resonator unit is made of barium titanate.

6. The resonant sensor device according to claim 1, characterized in that, The substrate is an aluminum substrate.

7. The resonant sensor device according to claim 1, characterized in that, The number of dielectric resonant units is several, and each dielectric resonant unit is evenly arranged on the waveguide.

8. The resonant sensor device according to claim 4, characterized in that, The side length of the dielectric resonator unit is 2mm, and the radius of the through hole is 0.5mm.

9. The resonant sensor device according to claim 1, characterized in that, The through hole is located at the center of the dielectric resonator unit.

10. A device, characterized in that, Includes the resonant sensor device according to any one of claims 1-9.

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