A control method and system for a chip mass transfer device

Abstract

This invention discloses a control method and system for a chip mass transfer device, relating to the field of chip transfer technology. The method includes: determining the flight path curves for each motion stage under motion constraints based on an S-curve algorithm; differentiating each flight path curve with respect to motion time using a chain rule to output the horizontal and vertical displacement change curves for each flight path curve; converting each horizontal and vertical displacement change curve into a horizontal and vertical expansion / contraction change curve based on preset horizontal and vertical displacement amplification ratios; and performing discretized movement control of the chip mass transfer device based on these curves. The flight path curves obtained by motion trajectory planning based on the S-curve are smoother, and discretized movement control according to the motion trajectory helps achieve precise motion control.

Description

Technical Field

[0001] This invention relates to the field of chip transfer technology, and in particular to a control method and system for a chip mass transfer device. Background Technology

[0002] As semiconductor technology advances to the nanometer scale, mini / micro LED screens have become a highly promising type of display due to their superior display performance and lifespan. Mass transfer is a crucial step in the production of mini / micro LED screens, involving the transfer of mini / micro LED chips from their original carrier to the target circuit board. The method of picking up and releasing chips (i.e., the MT scheme) and the design of the chip mass transfer device both affect the accuracy and speed of the chip transfer process, determining the upper limit of the processing efficiency of mini / micro LED screens. Flying needle insertion is one type of mass transfer technology. It requires designing motion change curves for the needles in the chip mass transfer device. However, existing motion planning methods produce motion change curves with poor smoothness. When the chip mass transfer device is controlled according to these curves, the thrust changes unevenly, resulting in low motion control accuracy and potential chip damage. Summary of the Invention

[0003] This invention provides a control method and system for a chip mass transfer device, which improves the technical problem that the motion change curve of the existing chip mass transfer device is poorly smooth during the flying crystal piercing process, resulting in low motion control accuracy.

[0004] The first aspect of this invention provides a control method for a chip mass transfer device, comprising: In response to the chip transfer request, the flight path curve for each motion stage is determined based on the S-curve algorithm under motion constraints according to the preset motion stages. The chain rule is used to differentiate each of the flight path curves with respect to motion time, and the horizontal axis displacement change curve and the vertical axis displacement change curve of each of the flight path curves are output. The horizontal axis displacement variation curves are converted into horizontal axis expansion variation curves according to the preset horizontal axis displacement magnification ratio, and the vertical axis displacement variation curves are converted into vertical axis expansion variation curves according to the preset vertical axis displacement magnification ratio. Based on the number of discrete control points of each flight path curve, the associated horizontal and vertical scaling curves are discretized to determine the horizontal and vertical scaling discrete control point matrices. The chip mass transfer device is controlled to move along the horizontal and vertical axes according to the discrete control point matrix of the horizontal axis extension and the discrete control point matrix of the vertical axis extension.

[0005] Furthermore, the process of determining the flight path curve includes: ; ; ; ; ; ; ; ; In the formula, For a moment, For flight displacement, Let be the total displacement of the needle during the known flight process of the crystal piercing needle, moving from its initial position to its target position during the forward phase. These are intermediate parameters for the first motion time interval. Index for exercise time periods For the first The intermediate parameter of the second exercise time period of the exercise time period. For the first Intermediate parameters of exercise time for each exercise period. For the first Intermediate parameters of exercise time for each exercise period. For unit step function, For the first time during the flight of crystals Each exercise period For the urgency index, For the first A degree of urgency, For the first The absolute value of the intermediate parameter of the second motion time interval of the first motion time interval. For the first time during the flight of crystals Each exercise period For the first time during the flight of crystals The end time of a sports period. For the first time during the flight of crystals The end time of a sports period. This refers to the acceleration / deceleration period during the variable speed motion phase. This refers to the period of uniform acceleration during the variable motion phase. This refers to the deceleration / acceleration period during the variable speed motion phase. The uniform time intervals between the uniform crystallization stage and the uniform distance stage are defined as follows: This refers to the acceleration and deceleration time period during the variable speed return phase. This refers to the time period of uniform deceleration during the variable motion phase. This refers to the deceleration period during the return phase of the variable speed operation.

[0006] Furthermore, the motion constraints include: .

[0007] Furthermore, the step of using the chain rule to differentiate each of the flight path curves with respect to motion time, and outputting the horizontal axis displacement change curve and the vertical axis displacement change curve of each of the flight path curves, includes: Based on the chain rule, differential equations with respect to motion time are constructed for each of the flight path curves; Based on the relationship between the horizontal and vertical displacements, the differential equations are deformed and separated, and then integrated to determine the horizontal and vertical displacement variation curves for each motion stage.

[0008] Furthermore, the process of determining the number of discrete control points includes: ; In the formula, Index for exercise time periods For the first The number of discrete control points per motion time period Let be the order of the flight path curve. For the first time during the flight of crystals Each exercise period.

[0009] A control system for a chip mass transfer device, provided in a second aspect of the present invention, includes: The path planning module is used to respond to chip transfer requests and determine the flight path curve of each motion stage based on the S-curve algorithm under motion constraints according to the preset motion stages. The displacement curve determination module is used to differentiate each of the flight path curves with respect to motion time using the chain rule, and output the horizontal axis displacement change curve and the vertical axis displacement change curve for each of the motion stages. The displacement conversion module is used to convert each of the horizontal axis displacement change curves into horizontal axis expansion change curves according to a preset horizontal axis displacement magnification ratio, and to convert each of the vertical axis displacement change curves into vertical axis expansion change curves according to a preset vertical axis displacement magnification ratio. The scaling discretization module is used to discretize the associated horizontal and vertical scaling change curves based on the number of discrete control points in each of the motion stages, and to determine the horizontal and vertical scaling discrete control point matrices. The motion control module is used to perform horizontal and vertical axis motion control on the chip mass transfer device according to the horizontal axis telemetry discrete control point matrix and the vertical axis telemetry discrete control point matrix.

[0010] Furthermore, the displacement curve determination module is specifically used for: Based on the chain rule, differential equations with respect to motion time are constructed for each of the flight path curves; Based on the relationship between the horizontal and vertical displacements, the differential equations are deformed and separated, and then integrated to determine the horizontal and vertical displacement variation curves for each motion stage.

[0011] A computer device provided in a third aspect of the present invention includes a memory and a processor, wherein the memory stores a computer program, and when the computer program is executed by the processor, the processor causes the processor to perform the steps of the control method for the chip mass transfer device as described in any of the preceding claims.

[0012] The fourth aspect of the present invention provides a computer-readable storage medium having a computer program stored thereon, wherein the computer program, when executed, implements the control method of the chip mass transfer device as described in any of the preceding claims.

[0013] The fifth aspect of the present invention provides a computer program product comprising a computer program / instruction, wherein when the computer program / instruction is executed by a processor, it implements the control method of the chip mass transfer device as described in any of the preceding claims.

[0014] As can be seen from the above technical solutions, the present invention has the following advantages: The above-described solution of the present invention provides a control method for a chip mass transfer device, comprising: responding to a chip transfer request; determining the flight path curves of each motion stage under motion constraints according to a preset motion stage using an S-curve algorithm; differentiating each flight path curve with respect to motion time using a chain rule, and outputting the horizontal axis displacement change curves and vertical axis displacement change curves of each flight path curve; converting each horizontal axis displacement change curve into a horizontal axis expansion change curve according to a preset horizontal axis displacement amplification ratio, and converting each vertical axis displacement change curve into a vertical axis expansion change curve according to a preset vertical axis displacement amplification ratio; discretizing the associated horizontal axis expansion change curves and vertical axis expansion change curves based on the number of discrete control points of each flight path curve, and determining the horizontal axis expansion discrete control point matrix and the vertical axis expansion discrete control point matrix; and performing horizontal and vertical axis movement control on the chip mass transfer device according to the horizontal axis expansion discrete control point matrix and the vertical axis expansion discrete control point matrix. Based on the S-curve, the motion trajectory planning is customized to fully consider the dynamic changes of the needle in the chip mass transfer device. The resulting flight path curve is smoother, effectively reducing sudden acceleration changes and thus reducing potential damage to the chip during the transfer process. It is not limited by the traditional constraint that the control point must be located on the trajectory curve, thereby simplifying and making the planning process more intuitive. Further discretization of the motion trajectory helps to achieve precise motion control. Attached Figure Description

[0015] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0016] Figure 1 A flowchart illustrating the steps of a control method for a chip mass transfer device provided in an embodiment of the present invention; Figure 2 The control flowchart for implementing dual-drive in the chip mass transfer device provided in this embodiment of the invention; Figure 3 This is a schematic diagram of a chip mass transfer device provided in an embodiment of the present invention; Figure 4 The dimensional model of the straight-circular flexible hinge provided in the embodiment of the present invention; Figure 5 This is a dimensional model of a right-angled flexible hinge provided in an embodiment of the present invention; Figure 6 This is a schematic diagram of the displacement output of the bridge mechanism provided in an embodiment of the present invention; Figure 7 A schematic diagram of the flight path curve provided in an embodiment of the present invention; Figure 8 This is a schematic diagram of the motion path of the flying spiked crystal provided in an embodiment of the present invention; Figure 9 This is a schematic diagram of the longitudinal axis displacement variation curve provided in an embodiment of the present invention; Figure 10 This is a schematic diagram of the horizontal axis displacement variation curve provided in an embodiment of the present invention; Figure 11 This is a structural block diagram of a control system for a chip mass transfer device provided in an embodiment of the present invention. Detailed Implementation

[0017] This invention provides a control method and system for a chip mass transfer device, which improves the technical problem that the motion change curve of the existing chip mass transfer device is poorly smooth during the flying crystal piercing process, resulting in low motion control accuracy.

[0018] To make the objectives, features, and advantages of this invention more apparent and understandable, the technical solutions of the embodiments of this invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the embodiments described below are only some embodiments of this invention, and not all embodiments. Based on the embodiments of this invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this invention.

[0019] Please see Figure 1 , Figure 1 A flowchart illustrating the steps of a control method for a chip mass transfer device provided in an embodiment of the present invention.

[0020] It should be noted that the chip mass transfer device used in this embodiment is a chip mass transfer device based on flying crystal piercing. The chip mass transfer device includes at least a piercing needle, a horizontal axis movement driver, and a vertical axis movement driver. The horizontal axis movement driver is used to drive the piercing needle to move along the horizontal axis, and the vertical axis movement driver is used to drive the piercing needle to move along the vertical axis, so that the chip mass transfer is achieved through the coordinated control of the piercing needle by the horizontal axis movement and the vertical axis movement. The horizontal axis is perpendicular to the vertical axis. In this embodiment, the feeding direction of the chip source substrate, i.e., the original carrier, can be taken as the horizontal axis, and the falling direction of the chip to be peeled off can be taken as the vertical axis.

[0021] This embodiment provides a control method for a chip mass transfer device, including: Step 101: Respond to the chip transfer request and determine the flight path curve of each motion stage based on the S-curve algorithm under the preset motion stage and motion constraints.

[0022] A chip transfer request refers to a request message regarding the execution of a chip transfer.

[0023] The motion phase refers to the stages that can be divided according to kinematic characteristics during the mass transfer of chips by performing the flying crystal piercing. In this embodiment, the motion phases sequentially include a variable speed motion phase, a uniform speed piercing phase, a uniform speed moving away phase, and a variable speed return phase. In the variable speed motion phase, the piercing needle accelerates from its initial position to approach the chip source substrate to align with the chip to be peeled off (at this time, it can be above the chip to be peeled off). When it approaches the chip, it gradually decelerates to accurately pick up the chip and avoid damage to the chip or source substrate due to excessive speed. Then, in the uniform speed piercing phase, the piercing needle moves along the horizontal axis and is aligned with the chip source substrate. The needle moves forward at high speed, pushing the chip to be peeled off from the source substrate along the vertical axis and causing it to fall onto the target circuit board. Then, in the uniform speed moving away phase, the needle continues to move forward at the same speed as the chip source substrate along the horizontal axis, while moving away from the source substrate in the opposite direction along the vertical axis. Finally, in the variable speed return phase, it needs to quickly return to the initial position to prepare for the next chip transfer. During the return process, the needle usually accelerates first to return to the area close to the initial position as quickly as possible, and then gradually decelerates to accurately return to the initial position. This working method only requires controlling the high-speed movement of the needle, which greatly reduces the chattering phenomenon of the working parts and has high application potential.

[0024] Motion constraints refer to the conditions under which kinematic constraints are applied during the flight of crystals.

[0025] The flight path curve refers to the trajectory curve of the flying crystal during its movement. (See reference...) Figure 8 As shown.

[0026] It should be noted that, as Figure 7 As shown, to meet the requirements of short time, short distance, and constant speed in the flying crystal-piercing scheme, this embodiment uses the principle of S-curve for trajectory planning, dividing the flying crystal-piercing motion process into four stages: variable speed motion stage, uniform speed crystal-piercing stage, uniform speed moving away stage, and variable speed return stage. Each stage requires the design of the flight path curve using the S-curve principle, and the motion time of each motion stage is set as needed. To better describe the two-degree-of-freedom positioning and movement process of the chip mass transfer device, the initial position of the piercing needle can be obtained. A world coordinate system is established with the initial position as the origin, the downward direction of the piercing needle as the Z-axis (i.e., the vertical axis set in this embodiment), the chip source substrate feeding direction as the X-axis (i.e., the horizontal axis set in this embodiment), and the Y-axis perpendicular to the X and Z axes outward as the Y-axis. The real-time position of the chip to be peeled off in the world coordinate system is obtained by the sensor. The movement speed of the source substrate and the key position nodes of the crystal insertion process are set. , and , This represents the needle position at the beginning of the uniform crystal-piercing stage. This represents the needle position at the beginning of the uniformly moving away phase. The position of the needle at the beginning of the variable speed return phase is set to provide position and speed constraints for setting the motion curve. Time period designed based on S-curve ,time The definition of urgency is as follows: ; In the formula, For a moment, For speed, For the first time during the flight of crystals The end time of each exercise period (from) Start timing); Specifically, , For the first time during the flight of crystals Exercise time periods: This refers to the acceleration period during the variable speed motion phase (constant jerk rate phase), at which time the jerk rate is... acceleration Increasing from 0 to maximum acceleration ; This refers to the period of uniform acceleration during the variable motion phase, at which time the abrupt change is... acceleration for ; This refers to the deceleration / acceleration period during the variable speed motion phase (constant jerky phase), at which time the jerky intensity is... acceleration from Reduce to 0; The uniform velocity time interval between the uniform velocity crystallization stage and the uniform velocity separation stage is when the agitation is... acceleration =0; This refers to the acceleration / deceleration period during the variable speed return phase (constant jerk rate phase), at which time the jerk rate is... acceleration Reduced from 0 to ; This refers to the uniform deceleration period during the variable motion phase, at which time the abrupt change is... acceleration for ; This refers to the deceleration period during the variable speed return phase (constant jerk rate phase), at which time the jerk rate is... acceleration from Increase to 0; The motion planning of the flying crystal's motion process satisfies the following motion constraints: ; At the same time, in order to ensure that the actual displacement at the end of the motion is equal to the total displacement of the crystal-piercing process. The displacement constraint equations are obtained as follows: ; For ease of calculation, this embodiment is based on a pre-allocated time series. In motion planning, two additional intermediate parameters independent of displacement are constructed. and The relationship between them is as follows: ; ; Based on the aforementioned time characteristic coefficients, the total displacement of the known flight crystal-piercing process can be obtained. The four jerk amplitudes required to satisfy the current asymmetric trajectory can be directly solved in one direction. The formula for calculating the jerk amplitude is as follows: ; In the formula, For the urgency index, For the first A degree of urgency, Index for exercise time periods Let be the total displacement of the needle during the known flight process of the crystal piercing needle, moving from its initial position to its target position during the forward phase. These are intermediate parameters for the first motion time period. For the first The absolute value of the intermediate parameter of the second motion time interval of the first motion time interval. For the first time during the flight of crystals Each exercise period; To avoid the numerous decision jumps caused by traditional piecewise functions in the discretization of control systems, the chain rule is used to continuously integrate the flight path curve, and the expression for the flight path curve of the needle is constructed as follows: ; in, ; In the formula, For a moment, For flight displacement, Let be the total displacement of the needle during the known flight process of the crystal piercing needle, moving from its initial position to its target position during the forward phase. For the first The intermediate parameter of the second exercise time period of the exercise time period. For the first Intermediate parameters of exercise time for each exercise period. For the first time during the flight of crystals Each exercise period For the first time during the flight of crystals The end time of a sports period. For the first time during the flight of crystals The end time of a sports period. It is a unit step function.

[0027] Step 102: Use the chain rule to differentiate each of the flight path curves with respect to motion time, and output the horizontal axis displacement change curve and the vertical axis displacement change curve of each of the flight path curves.

[0028] A horizontal axis displacement curve refers to a curve showing how displacement changes over time along the horizontal axis.

[0029] The vertical axis displacement curve refers to the curve showing how displacement changes over time along the vertical axis.

[0030] In one specific embodiment of this example, step 102 includes the following sub-steps: Based on the chain rule, differential equations with respect to motion time are constructed for each of the flight path curves; Based on the relationship between the horizontal and vertical displacements, the differential equations are deformed and separated, and then integrated to determine the horizontal and vertical displacement variation curves for each motion stage.

[0031] It should be noted that the chip mass transfer device used in this embodiment drives the needle to move along the trajectory shown by the flight path curve under the coordinated control of the horizontal and vertical axes. Therefore, it is necessary to determine the displacement changes in the horizontal and vertical directions respectively. In practice, after obtaining the flight path curve, the chain rule in calculus is used to apply the chain rule in calculus to each motion stage to obtain the optimal path curve equation for each motion stage. Conducting a survey on exercise time Taking the derivative, the constructed differential equation is as follows: ; In the formula, Displacement in the horizontal direction. This represents the displacement along the vertical axis. For flight displacement Partial derivative with respect to displacement along the horizontal axis, Displacement in the horizontal direction versus time of motion The derivative, For flight displacement Partial derivative with respect to displacement along the vertical axis, Displacement in the vertical direction versus time The derivative; The equations are transformed using the relationship between displacements along the horizontal and vertical axes to separate variables. and This relationship can be determined in advance through experimental fitting of a chip mass transfer device, and then the transformed equation can be integrated to obtain... and That is, the horizontal axis displacement change curve and the vertical axis displacement change curve (such as...) Figure 9 and Figure 10 (As shown).

[0032] Step 103: Convert each of the horizontal axis displacement change curves into horizontal axis expansion change curves according to the preset horizontal axis displacement magnification ratio, and convert each of the vertical axis displacement change curves into vertical axis expansion change curves according to the preset vertical axis displacement magnification ratio.

[0033] The horizontal axis displacement amplification ratio refers to the ratio of the input displacement to the output displacement in the horizontal axis direction. In this embodiment, the input displacement of the horizontal axis displacement amplification ratio can be understood as the displacement change in the horizontal axis direction generated when the horizontal axis movement driver performs horizontal axis direction movement control, and the output displacement of the horizontal axis displacement amplification ratio can be understood as the movement displacement of the needle in the horizontal axis direction caused by the drive control of the horizontal axis movement driver.

[0034] The longitudinal displacement amplification ratio refers to the ratio of the input displacement to the output displacement in the longitudinal direction. In this embodiment, the input displacement of the longitudinal displacement amplification ratio can be understood as the displacement change in the longitudinal direction generated when the longitudinal movement driver performs longitudinal direction movement control, and the output displacement of the longitudinal displacement amplification ratio can be understood as the movement displacement of the needle in the longitudinal direction caused by the drive control of the longitudinal movement driver.

[0035] The horizontal axis expansion / contraction refers to the amount of displacement input in the horizontal axis direction; while the horizontal axis expansion / contraction curve refers to the curve of the horizontal axis expansion / contraction changing over time.

[0036] The longitudinal axis expansion refers to the amount of displacement input in the longitudinal axis direction; while the longitudinal axis expansion curve refers to the curve of the longitudinal axis expansion changing over time.

[0037] It should be noted that, in different chip mass transfer devices, there may be a certain ratio of displacement conversion between the displacement generated by the driver and the movement displacement of the needle in the horizontal and vertical directions of the horizontal and vertical axis movement drivers that control the displacement in the horizontal and vertical directions. Therefore, it is possible to conduct experiments in advance to verify and determine the horizontal axis displacement amplification ratio and the vertical axis displacement amplification ratio in the chip mass transfer device. Based on the horizontal axis displacement amplification ratio and the vertical axis displacement amplification ratio, the horizontal axis displacement and the vertical axis displacement obtained by the flying needle planning are mapped to the extension and contraction amount generated by the driver, thereby obtaining the horizontal axis extension and contraction amount change curve and the vertical axis extension and contraction amount change curve.

[0038] Step 104: Based on the number of discrete control points of each flight path curve, discretize the associated horizontal and vertical axis scaling curves to determine the horizontal and vertical axis scaling discrete control point matrices.

[0039] Discrete control points refer to control points that are used for displacement control adjustments during the motion phase.

[0040] The horizontal axis scaling discrete control point matrix refers to a data matrix composed of the horizontal axis scaling of discrete control points and the motion time.

[0041] The vertical axis scaling discrete control point matrix refers to a data matrix composed of the vertical axis scaling of discrete control points and the motion time.

[0042] It should be noted that, in order to ensure that the needle can move along the predetermined trajectory, the continuous motion trajectory is converted into a series of discrete control points for horizontal and vertical displacement control to achieve the desired position. Based on the number of discrete control points set according to the flight path curve of each motion stage, discrete control points are set on the corresponding horizontal and vertical expansion and contraction curves to satisfy the velocity and acceleration continuity constraints of the flight path curve. In one implementation, the discrete control points can be set at equal intervals, thus obtaining a matrix of discrete control points for horizontal expansion and contraction (tX matrix) and a matrix of discrete control points for vertical expansion and contraction (tZ matrix).

[0043] In one specific embodiment of this example, the process of determining the number of discrete control points includes: For non-periodic flight path curves: ; In the formula, Index for exercise time periods , For the first The number of discrete control points indexed for each motion time period. Let be the order of the flight path curve. For the first time during the flight of crystals Each exercise period; For periodic flight path curves: ; In the formula, The number of discrete control points. is the period of the periodic function.

[0044] It should be noted that in the flight path curve of the flying crystal spike, the speed change and speed change return phases are characterized by constantly changing speed and acceleration, while the speed change and speed change away phases are relatively stable. Therefore, the number of discrete control points for each motion phase should be determined based on the order of the flight path curves for different phases.

[0045] Step 105: Perform horizontal and vertical axis movement control on the chip mass transfer device according to the horizontal axis telemetry discrete control point matrix and the vertical axis telemetry discrete control point matrix.

[0046] It should be noted that the displacement-time data represented by the discrete control point matrix of the horizontal and vertical axes of telemetry can be transmitted to the horizontal and vertical axis motion drivers of the chip mass transfer device through a signal conversion mechanism for control parameter conversion, so that the needle can move according to the preset motion trajectory, thereby realizing the effective operation of high-precision motion control.

[0047] In this embodiment of the invention, the motion trajectory planning is customized based on the dynamic changes in acceleration, velocity, and displacement of the needle in the chip mass transfer device, taking into full account the S-curve. The resulting flight path curve is smoother, effectively reducing abrupt acceleration changes and thus reducing potential damage to the chip during the transfer process. It is not limited by the traditional constraint that the control point must be located on the trajectory curve, thereby simplifying and making the planning process more intuitive. This helps maintain operational efficiency under high speed and high acceleration. Further discretization of the motion trajectory can achieve precise motion control. Compared with mechanical structures that are highly targeted and unique, and whose control methods are designed for specific platform structures, the method in this embodiment can also adjust the curve equation according to the designer's actual needs to adapt to different process requirements and optimize the motion path, thus having high portability.

[0048] Please see Figure 3This invention provides a chip mass transfer device, comprising: an outer frame, a voice coil motor, a piezoelectric ceramic, a bridge mechanism, a four-bar linkage, and a needle. The four-bar linkage is disposed within the outer frame, the bridge mechanism is disposed within and abuts against the four-bar linkage, the piezoelectric ceramic abuts against the interior of the bridge mechanism, the needle is connected to a first side of the bridge mechanism and the four-bar linkage, and the drive shaft of the voice coil motor is connected to a second side of the four-bar linkage, wherein the first side and the second side are perpendicular. The voice coil motor is used to drive the needle to move along the horizontal axis, the piezoelectric ceramic is used to drive the needle to move along the vertical axis, and the bridge mechanism is used for the output displacement of the piezoelectric ceramic.

[0049] It should be noted that the chip mass transfer device provided in this embodiment uses a voice coil motor as a horizontal axis movement driver and a piezoelectric ceramic as a vertical axis movement driver. By controlling the extension and retraction of the voice coil motor, the four-bar guide mechanism can be driven to move in the horizontal axis direction, thereby driving the needle to move laterally. By controlling the extension and retraction of the piezoelectric ceramic, the bridge mechanism is laterally pushed to deform. The displacement amplification principle of the bridge structure is used to drive the needle to move in the vertical axis direction. In specific implementation, according to Figure 2 The process shown involves determining the optimal path function (flight path curve) using an S-curve, then using the chain rule to differentiate the horizontal displacement curve in the X direction and the vertical displacement curve in the Z direction. Based on the displacement amplification ratio, this is converted into the feed and extension / retraction curves of the voice coil motor and piezoelectric ceramic. Each motion stage is used as the acquisition range for motion time. Based on the discrete acquisition frequency (number of discrete control points) of each motion stage, mathematical operations are performed at each discrete control point to obtain the time-displacement matrices tX and tZ. The tX matrix is ​​transmitted to the voice coil motor via a signal conversion mechanism and converted into a corresponding voltage signal to drive the corresponding extension / retraction output. Similarly, the tZ matrix is ​​also transmitted to the piezoelectric ceramic for voltage signal conversion processing to output a corresponding voltage value to drive the piezoelectric ceramic to output the corresponding extension / retraction. Understandably, in terms of actuators, piezoelectric ceramic (PZT) and voice coil motor (VRM) actuators occupy an important position in micro-positioning systems due to their respective advantages, such as the fast response and high output torque of piezoelectric ceramics and the simple structure, high specific thrust, fast response, and high precision of voice coil motors. To overcome the stroke limitation of piezoelectric ceramics, a bridge mechanism can be used to amplify displacement, thereby meeting the requirements of servo control in terms of high precision, high speed, high acceleration, and high frequency excitation linear force. This mechanism is widely used in fields such as semiconductor equipment. By placing two power sources in the horizontal axis direction and utilizing the displacement amplification principle of the bridge structure, the deformation of the bridge structure controls the extension and contraction in the X-axis direction, thereby outputting the displacement in the Z-axis direction. This cleverly avoids the problem of the Z-axis motion source deviating from the vertical line. In one specific implementation, the execution module, consisting of an outer frame, a voice coil motor, a piezoelectric ceramic, a bridge mechanism, a four-bar guide mechanism, and a needle, adopts a left-right symmetrical design. The four-bar guide mechanism is centrally located within the outer frame, the bridge mechanism is centrally located within the four-bar guide mechanism, the needle is located directly below the outer frame and connected to the first side on the same side as the four-bar guide mechanism and the bridge mechanism, and the piezoelectric ceramic is centrally located within the bridge mechanism (i.e., at the very center of the execution module).

[0050] In one specific embodiment of this example, the execution module uses a compliant micro-positioning mechanism. The bridge mechanism and the four-bar linkage utilize the deformation of flexible hinges to achieve motion. The bridge mechanism in the Z-axis direction includes a straight-circular flexible hinge, and the four-bar linkage includes a right-angle flexible hinge. The dimensional model of the straight-circular flexible hinge is as follows: Figure 4 As shown, the main dimensional parameters include the width of the straight-round hinge. Length of the straight circular hinge in the horizontal direction Minimum thickness of straight circle and the radius of the straight circular arc cut The right-angle flexible hinge is an operational amplifier mechanism based on the triangular principle. Compared with traditional amplification mechanisms, it has the advantages of large displacement amplification ratio, compact size, low coupling, and good dynamic performance. The dimensional model of the right-angle flexible hinge is shown below. Figure 5 As shown, the main dimensional parameters include the width of the right-angle hinge. Right-angle hinge length and the thickness of right-angle hinge The width and thickness of the flexible hinge directly affect the stiffness, equivalent mass, and displacement amplification ratio of the actuator module. Therefore, the width and thickness of each flexible hinge need to be designed based on the determined bridge mechanism and four-bar linkage to meet the mass transfer requirements of the flying crystal-piercing scheme. It is understandable that flexible hinges, with their advantages of nanometer-level resolution, compact structural size, large motion stroke, fast response, and high motion decoupling, are widely used in ultra-precision manufacturing and other fields. The bridge mechanism and four-bar linkage designed based on flexible hinges have the characteristics of being assembly-free, lubrication-free, backlash-free, and frictionless, which helps to achieve high-precision positioning. The compliant micro-positioning mechanism has a simple structure, reducing the complexity of the device, lowering maintenance costs, and also improving the reliability and service life of the device.

[0051] In a more specific embodiment of this example, the bridge mechanism is a symmetrical bridge amplification mechanism, including four straight circular flexible hinges, four connecting beams, two translation rods, an output block, and a fixed block; as shown below. Figure 6 As shown, due to the symmetrical relationship, under the action of input voltage, the bridge mechanism of the piezoelectric ceramic changes with the input force. Under the action of [the bridge mechanism], the elongation at both ends is [amount]. At the output needle, a corresponding amplified output displacement is generated. .

[0052] Furthermore, when calculating the displacement amplification ratio of the four-bar linkage and the bridge mechanism, it is necessary to comprehensively consider the three degrees of freedom of each flexible hinge in the plane, namely the tension along the X and Z axes and the possible torsion, to ensure accurate calculation of the displacement change of each flexible hinge, and thus derive the extension and retraction curve of the piezoelectric ceramic actuator. For a single flexible hinge, the transverse displacement of the flexible hinge... Longitudinal displacement and rotational displacement about the y-axis ,in, It is caused by axial force Caused by, Mainly composed of radial force and rotational torque Caused by rotational displacement Mainly composed of and rotational torque cause, Axial force and tensile displacement The corresponding compliance coefficient, Radial force and tensile displacement The corresponding compliance coefficient, Rotational torque and tensile displacement The corresponding compliance coefficient, Radial force and rotational displacement The corresponding compliance coefficient, Rotational torque and rotational displacement The corresponding compliance coefficient, The compliance matrix is ​​composed of the compliance coefficients: ; When an axial force is applied to the left side of the bridge structure, and this force exceeds the critical compressive strength of the member, the member will undergo lateral displacement. Longitudinal displacement will also occur at the hinge in the middle of the member. Based on the principle of triangular amplification, force analysis of the bridge mechanism can yield the longitudinal axis displacement amplification ratio. The formula is: ; ; ; ; In the formula, Axial force The resulting axial deformation The offset angle is the angle along the longitudinal axis of the hinge. The length of the hinge along its longitudinal axis. Let be the translational stiffness of the bridge mechanism. The rotational stiffness of the bridge mechanism; The longitudinal displacement of the bridge mechanism was calculated. for: ; Therefore, the formula for the vertical axis displacement magnification ratio can be simplified to: ;

[0053] Experiments have verified that the displacement amplification ratio of the bridge mechanism in the Z direction, when exceeding the critical pressure of the members, will result in axial displacement of the members. Longitudinal displacement will also occur at the hinge in the middle of the member. Through the The variation curve of the longitudinal expansion and contraction of the piezoelectric ceramic can be obtained by magnifying the longitudinal displacement according to the longitudinal displacement magnification ratio. The four-bar linkage in the X-axis direction uses a right-angle flexible hinge and is an operational amplifier mechanism based on the lever principle. It has a simple structure, is easy to manufacture, has high transmission efficiency, and exhibits a good linear relationship between input and output displacements; the displacement generated in the X-axis direction... u x The expression is as follows: ; ; In the formula, For elastic modulus, Let y be the moment of inertia in the right-angle flexible hinge direction; Therefore, the horizontal axis displacement amplification ratio corresponding to the four-bar linkage can be obtained. The formula is: ; In the formula, This is the input displacement (horizontal axis extension / retraction) of the voice coil motor. Let be the output displacement of the four-bar linkage; it can be concluded that the driving force and output displacement of the flexible hinge four-bar linkage have a relatively good linear relationship.

[0054] In this embodiment of the invention, the driver was deeply customized and optimized to achieve a perfect match with the compliant micro-positioning mechanism. The secondary development of the drive device includes, but is not limited to, optimization of the control algorithms for piezoelectric ceramics and voice coil motors, improvement of response speed, precise control of output torque, and integration of displacement amplification mechanisms. This secondary development not only enables the drive device to accurately execute complex motion trajectories according to custom curves, but also overcomes the problem of piezoelectric ceramic stroke limitations through the design of bridge mechanisms and four-bar guide mechanisms in terms of displacement amplification, achieving high-precision positioning over a wider range. This meets the servo control requirements of high speed, high acceleration, high precision, and high-frequency excitation, allowing the entire device to maintain high efficiency while adapting to complex production environments. The comprehensive application of these technologies provides strong technical support for the application of flying crystal spike technology in the field of mass transfer, and helps to enhance market competitiveness.

[0055] Please see Figure 11 , Figure 11 This is a structural block diagram of a control system for a chip mass transfer device provided in an embodiment of the present invention.

[0056] The present invention provides a control system for a chip mass transfer device, comprising: The path planning module 1101 is used to respond to chip transfer requests and determine the flight path curve of each motion stage based on the S-curve algorithm under motion constraints according to the preset motion stages. The displacement curve determination module 1102 is used to differentiate each flight path curve with respect to motion time using the chain rule, and output the horizontal axis displacement change curve and the vertical axis displacement change curve for each motion stage. The displacement conversion module 1103 is used to convert each horizontal axis displacement change curve into a horizontal axis expansion change curve according to a preset horizontal axis displacement amplification ratio, and to convert each vertical axis displacement change curve into a vertical axis expansion change curve according to a preset vertical axis displacement amplification ratio. The scaling discretization module 1104 is used to discretize the associated horizontal and vertical scaling change curves based on the number of discrete control points in each motion stage, and to determine the horizontal and vertical scaling discrete control point matrices. The motion control module 1105 is used to perform horizontal and vertical axis motion control on the chip mass transfer device according to the horizontal axis telemetry discrete control point matrix and the vertical axis telemetry discrete control point matrix.

[0057] This invention also provides a computer device, including a memory and a processor, wherein the memory stores a computer program; when the computer program is executed by the processor, the processor performs the steps of the control method for the chip mass transfer device as described in any of the above embodiments.

[0058] This invention also provides a computer-readable storage medium storing a computer program / instructions thereon, which, when executed by a processor, implements the steps of the control method for the chip mass transfer device as described in any of the above embodiments.

[0059] This invention also provides a computer program product, including a computer program / instructions, which, when executed by a processor, implement the steps of a control method for a chip mass transfer device as described in any of the above embodiments.

[0060] Those skilled in the art will understand that, for the sake of convenience and brevity, the specific working processes of the systems, devices, and modules described above can be referred to the corresponding processes in the foregoing method embodiments, and will not be repeated here.

[0061] In the embodiments provided in this application, it should be understood that the disclosed systems, apparatuses, and methods can be implemented in other ways. For example, the system embodiments described above are merely illustrative; for instance, the division of units is only a logical functional division, and in actual implementation, there may be other division methods. For example, multiple units or components may be combined or integrated into another system, or some features may be ignored or not executed. Furthermore, the coupling or direct coupling or communication connection shown or discussed may be an indirect coupling or communication connection through some interfaces, apparatuses, or units, and may be electrical, mechanical, or other forms.

[0062] The units described as separate components may or may not be physically separate. The components shown as units may or may not be physical units; that is, they may be located in one place or distributed across multiple network units. Some or all of the units can be selected to achieve the purpose of this embodiment according to actual needs.

[0063] Furthermore, the functional units in the various embodiments of the present invention can be integrated into one processing unit, or each unit can exist physically separately, or two or more units can be integrated into one unit. The integrated unit can be implemented in hardware or as a software functional unit.

[0064] If the integrated unit is implemented as a software functional unit and sold or used as an independent product, it can be stored in a computer-readable storage medium. Based on this understanding, the technical solution of the present invention, in essence, or the part that contributes to the prior art, or all or part of the technical solution, can be embodied in the form of a software product. This computer software product is stored in a storage medium and includes several instructions to cause a computer device (which may be a personal computer, server, or network device, etc.) to execute all or part of the steps of the methods described in the various embodiments of the present invention. The aforementioned storage medium includes various media capable of storing program code, such as USB flash drives, portable hard drives, read-only memory (ROM), random access memory (RAM), magnetic disks, or optical disks.

[0065] The above-described embodiments are only used to illustrate the technical solutions of the present invention, and are not intended to limit it. Although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A control method of a chip mass transfer apparatus, characterized by, include: In response to the chip transfer request, the flight path curve for each motion stage is determined based on the S-curve algorithm under motion constraints according to the preset motion stages. The chain rule is used to differentiate each of the flight path curves with respect to motion time, and the horizontal axis displacement change curve and the vertical axis displacement change curve of each of the flight path curves are output. The horizontal axis displacement variation curves are converted into horizontal axis expansion variation curves according to the preset horizontal axis displacement magnification ratio, and the vertical axis displacement variation curves are converted into vertical axis expansion variation curves according to the preset vertical axis displacement magnification ratio. Based on the number of discrete control points of each flight path curve, the associated horizontal and vertical scaling curves are discretized to determine the horizontal and vertical scaling discrete control point matrices. The chip mass transfer device is controlled to move along the horizontal and vertical axes according to the discrete control point matrix of the horizontal axis extension and the discrete control point matrix of the vertical axis extension.

2. The control method of the chip massive transfer apparatus according to claim 1, wherein The process of determining the flight path curve includes: ； ； ； ； ； ； ； ； In the formula, For a moment, For flight displacement, Let be the total displacement of the needle during the known flight process of the crystal piercing needle, from its initial position to its target position during the forward phase. These are intermediate parameters for the first motion time interval. Index for exercise time periods For the first The intermediate parameter of the second exercise time period of the exercise time period. For the first Intermediate parameters of exercise time for each exercise period. For the first Intermediate parameters of exercise time for each exercise period. For unit step function, For the first time during the flight of crystals Each exercise period For the urgency index, For the first A degree of urgency, For the first The absolute value of the intermediate parameter of the second motion time interval of the first motion time interval. For the first time during the flight of crystals Each exercise period For the first time during the flight of crystals The end time of a sports period. For the first time during the flight of crystals The end time of a sports period. This refers to the acceleration / deceleration period during the variable speed motion phase. This refers to the period of uniform acceleration during the variable motion phase. This refers to the deceleration / acceleration period during the variable speed motion phase. The uniform time intervals between the uniform crystallization stage and the uniform distance stage are defined as follows: This refers to the acceleration and deceleration time period during the variable speed return phase. This refers to the time period of uniform deceleration during the variable motion phase. This refers to the deceleration period during the return phase of the variable speed operation.

3. The control method for the chip mass transfer device according to claim 2, characterized in that, The motion constraints include: 。 4. The control method for the chip mass transfer device according to claim 1, characterized in that, The chain rule is used to differentiate each of the flight path curves with respect to motion time, and the horizontal and vertical displacement change curves of each flight path curve are output, including: Based on the chain rule, differential equations with respect to motion time are constructed for each of the flight path curves; Based on the relationship between the horizontal and vertical displacements, the differential equations are deformed and separated, and then integrated to determine the horizontal and vertical displacement variation curves for each motion stage.

5. The control method for the chip mass transfer device according to claim 1, characterized in that, The process of determining the number of discrete control points includes: ； In the formula, Index for exercise time periods For the first The number of discrete control points per motion time period Let be the order of the flight path curve. For the first time during the flight of crystals Each exercise period.

6. A control system for a chip mass transfer device, characterized in that, include: The path planning module is used to respond to chip transfer requests and determine the flight path curve of each motion stage based on the S-curve algorithm under motion constraints according to the preset motion stages. The displacement curve determination module is used to differentiate each of the flight path curves with respect to motion time using the chain rule, and output the horizontal axis displacement change curve and the vertical axis displacement change curve for each of the motion stages. The displacement conversion module is used to convert each of the horizontal axis displacement change curves into horizontal axis expansion change curves according to a preset horizontal axis displacement magnification ratio, and to convert each of the vertical axis displacement change curves into vertical axis expansion change curves according to a preset vertical axis displacement magnification ratio. The scaling discretization module is used to discretize the associated horizontal and vertical scaling change curves based on the number of discrete control points in each of the motion stages, and to determine the horizontal and vertical scaling discrete control point matrices. The motion control module is used to perform horizontal and vertical axis motion control on the chip mass transfer device according to the horizontal axis telemetry discrete control point matrix and the vertical axis telemetry discrete control point matrix.

7. The control system of the chip mass transfer device according to claim 6, characterized in that, The displacement curve determination module is specifically used for: Based on the chain rule, differential equations with respect to motion time are constructed for each of the flight path curves; Based on the relationship between the horizontal and vertical displacements, the differential equations are deformed and separated, and then integrated to determine the horizontal and vertical displacement variation curves for each motion stage.

8. A computer device, characterized in that, The device includes a memory and a processor, wherein the memory stores a computer program, and when the computer program is executed by the processor, the processor causes the processor to perform the steps of the control method for the chip mass transfer device as described in any one of claims 1-5.

9. A computer-readable storage medium having a computer program / instructions stored thereon, characterized in that, When the computer program / instructions are executed by the processor, they implement the steps of the control method for the chip mass transfer device as described in any one of claims 1-5.

10. A computer program product comprising a computer program / instructions, characterized in that, When the computer program / instructions are executed by the processor, they implement the steps of the control method for the chip mass transfer device as described in any one of claims 1-5.

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