Low temperature optical detection apparatus and its stability detection device and detection method

Abstract

This invention provides a low-temperature optical testing device and its stability testing apparatus and method, belonging to the field of optical testing. The stability testing apparatus of this invention includes a device under test (DUT), a laser, a position-sensitive detector, and a testing unit. The DUT is disposed within a testing cavity, and a testing plate is mounted on the DUT, with at least three reflectors mounted on the testing plate. The laser's output surface is coupled to optical fibers, the other ends of which are respectively aligned with at least three reflectors. The incident laser output from the laser is incident on the reflectors through the optical fibers and reflected as reflected laser light. The reflected laser light returns to the laser's output surface through the optical fibers. The position-sensitive detector receives the reflected laser light and determines the position information of the reflectors. Based on the position information of the at least three reflectors, the testing unit determines the spatial deflection angle of the testing plate. This invention's stability testing apparatus enables multi-dimensional and accurate detection of the stability of the DUT under low-temperature conditions.

Description

Technical Field

[0001] This invention relates to the field of optical testing equipment technology, and in particular to a low-temperature optical testing device and its stability testing apparatus and method. Background Technology

[0002] In fields such as optomechanical equipment, aerospace, high-end manufacturing, and cutting-edge scientific research, the core components of a large number of precision optical devices need to operate stably for a long time in complex and extreme environments such as vacuum and low temperature. Affected by factors such as ambient temperature fluctuations and stress release under vacuum conditions, the components in these precision devices are prone to problems such as positional shift and angular deflection. Their key performance characteristics, such as positional accuracy and angular stability, directly determine the system's imaging accuracy, positioning reliability, and overall operational efficiency.

[0003] Current methods for stability testing of components operating in cryogenic environments in optical testing equipment suffer from limitations due to their singular testing dimension. They can only acquire displacement or deformation information of the tested object in a single dimension, failing to comprehensively reflect the object's offset state in three-dimensional space. Furthermore, the optical path introduced into the test must traverse the temperature difference region inside and outside the cryogenic chamber, making it susceptible to interference from environmental temperature gradients. This can lead to unexpected deviations in the optical path propagation, introducing significant testing errors. These issues result in low accuracy, poor repeatability, and low reliability of existing testing methods, making it impossible to provide accurate and reliable data support for the design verification and performance evaluation of cryogenic precision optical systems.

[0004] Therefore, it is necessary to design a low-temperature optical testing device and its stability testing apparatus and method to improve the above-mentioned problems. Summary of the Invention

[0005] This invention provides a low-temperature optical testing device and its stability testing apparatus and method, which are used to improve the technical defects of the existing test structure and method for testing the stability of optical components in vacuum low-temperature environment, which have a single test dimension and are easily affected by environmental interference, resulting in large test errors.

[0006] In a first aspect, this application provides a stability testing device for a low-temperature optical testing equipment, the stability testing device including a device under test, a laser, a position-sensitive detector, and a testing unit.

[0007] The device under test (DUT) is housed within the test cavity of the low-temperature optical detection equipment. A detection plate is mounted on the DUT, and at least three reflectors are mounted on the detection plate. These at least three reflectors are located on the same plane and are not collinearly arranged on the detection plate. Multiple optical fibers are coupled to the light-emitting surface of a laser. One end of each optical fiber is coupled to the laser, and the other end extends into the test cavity. The other ends of the multiple optical fibers are respectively positioned opposite the at least three reflectors. The incident laser light output from the laser passes through the optical fibers and is incident on the reflectors, where it is reflected as reflected laser light. The reflected laser light returns to the output surface of the laser through the optical fiber; the incident laser light output by the laser light is incident on the reflector through the optical fiber and reflected by the reflector as reflected laser light, which returns to the output surface of the laser light through the optical fiber; a position-sensitive detector receives the reflected laser light reflected by the at least three reflectors at the output surface and determines the position information of the at least three reflectors based on the reflected laser light; a detection unit is communicatively connected to the position-sensitive detector, and the detection unit determines the spatial deflection angle of the detection plate based on the position information of the at least three reflectors.

[0008] In one example of this application, the at least three reflectors are located on the same plane.

[0009] In one example of this application, the detection plate is provided with three reflectors.

[0010] In one example of this application, the detection unit determines the positional offset of the three reflectors and the relative distance between the three reflectors based on the positional information of the three reflectors; the detection unit determines the spatial deflection angle of the detection plate based on the positional offset and the relative distance, the spatial deflection angle including the pitch angle and roll angle of the detection plate.

[0011] In one example of this application, a vacuum feedthrough structure is provided on the test cavity, and the optical fiber extends into the test cavity through the vacuum feedthrough structure. An optical fiber probe is provided at the port of the optical fiber located in the test cavity, and the light-emitting end of the optical fiber probe is directly opposite the reflector.

[0012] In one example of this application, the fiber optic probe is fixed to a support mechanism, and the support mechanism is made of ceramic material. In one example of this application, a temperature drift compensator is also connected to the position-sensitive detector.

[0013] In a second aspect, this application also provides a stability testing method for a low-temperature optical testing device, wherein the stability testing method is implemented using the stability testing device described in any of the above claims, and the stability testing method includes: Obtain the initial position information of the at least three reflectors on the detection plate; The laser emits incident laser light into at least three of the mirrors, and the position-sensitive detector receives the reflected laser light emitted by the at least three mirrors. When the temperature inside the test chamber is adjusted from room temperature to a preset test temperature, the position-sensitive detector is used to acquire first position change information of at least three beams of the reflected laser, and second position change information corresponding to the reflector is determined based on the first position change information. The spatial deflection angle of the detection plate is determined based on the initial position information and second position change information of at least three of the reflectors.

[0014] In one example of this application, determining the spatial deflection angle of the detection plate based on the initial position information and second position change information of at least three of the reflectors includes: Based on the second position change information, the displacement change of at least three of the reflectors is determined; Based on the initial position information and the second position change information, the relative spacing of at least three of the reflectors is determined at the preset temperature; Based on the displacement changes of at least three of the reflectors and the relative spacing between the at least three reflectors, the spatial deflection angle of the detection plate is determined, the spatial deflection angle including the pitch angle and roll angle of the detection plate.

[0015] In one example of this application, three reflectors are disposed on the detection plate, the three reflectors including a first reflector, a second reflector, and a third reflector; determining the spatial deflection angle of the detection plate based on the displacement changes of at least three reflectors and the relative spacing of at least three reflectors includes: The pitch angle of the detection plate is determined based on the displacement change and relative distance between the first and second reflectors. The roll angle of the detection plate is determined based on the displacement change and relative distance between the first and third reflectors or the displacement change and relative distance between the second and third reflectors.

[0016] In a third aspect, this application also provides a low-temperature optical inspection device, which includes the stability detection device in any of the above examples.

[0017] In one example of this application, the low-temperature optical detection device includes a base and a test cavity, the test cavity being fixed on the base.

[0018] In one example of this application, a refrigerant circulation pipe is provided on the test chamber, and the refrigerant circulation pipe extends into the test chamber.

[0019] The stability testing device provided by this invention includes a testing plate placed on the device under test (DUT) within a testing cavity, and at least three reflectors mounted on the testing plate. This stability testing device utilizes optical fibers to guide incident laser light from a laser into the testing cavity, which is then directed directly onto the reflectors on the testing plate. The reflected laser light, reflected by the at least three reflectors, returns along the original optical path to the laser's output surface and is detected and received by a position-sensitive detector to obtain the position information of each reflector on the testing plate. Finally, based on the position information of each reflector on the testing plate, the detection unit calculates and determines the spatial deflection angle of the testing plate to accurately detect the spatial deflection angle of the testing plate at low temperatures, thereby achieving multi-dimensional and accurate detection of the stability of the DUT under low-temperature conditions. Attached Figure Description

[0020] The accompanying drawings, which are incorporated in and form part of this specification, illustrate embodiments consistent with this application and, together with the description, serve to explain the principles of this application. It is obvious that the drawings described below are merely some embodiments of this application, and those skilled in the art can obtain other embodiments based on these drawings without inventive effort.

[0021] In the attached diagram: Figure 1 This is a three-dimensional structural view of a low-temperature optical detection device in one embodiment of this application; Figure 2 This is a schematic diagram of the laser optical path structure of the stability detection device in one embodiment of this application; Figure 3 This is a three-dimensional structural diagram of the detection device within the test chamber in one embodiment of this application; Figure 4 This is a side view of the detection device within the test chamber in one embodiment of this application; Figure 5 This is a schematic diagram of a vacuum feedthrough structure in one embodiment of this application; Figure 6 This is a flowchart illustrating a stability testing method in one embodiment of this application.

[0022] The attached figures are labeled as follows: 100, Base; 200, Test Chamber; 210, Refrigerant Circulation Pipeline; 220, Vacuum Extraction Port; 230, Vacuum Feedthrough Structure; 231, Flange; 232, First Fiber Optic Interface; 233, Second Fiber Optic Interface; 300, Device Under Test; 310, Detection Plate; 320, Reflector; 400, Laser; 500, Fiber Optic; 510, First Fiber Optic; 520, Second Fiber Optic; 530, Fiber Optic Probe; 600, Support Mechanism; 700, Position Sensitive Detector; 710, Temperature Drift Compensator; 800, Detection Unit. Detailed Implementation

[0023] The following specific examples illustrate the implementation of the present invention. Those skilled in the art can easily understand other advantages and effects of the present invention from the content disclosed in this specification. The present invention can also be implemented or applied through other different specific embodiments, and various details in this specification can also be modified or changed based on different viewpoints and applications without departing from the spirit of the present invention. It should be noted that, unless otherwise specified, the following embodiments and features can be combined with each other. It should also be understood that the terminology used in the embodiments of the present invention is for describing specific implementation schemes and not for limiting the scope of protection of the present invention. Test methods in the following embodiments that do not specify specific conditions are generally performed under conventional conditions or according to the conditions recommended by the respective manufacturers.

[0024] It should be noted that the terms such as "upper", "lower", "left", "right", "middle" and "one" used in this specification are only for clarity of description and are not intended to limit the scope of the invention. Changes or adjustments to their relative relationships, without substantially altering the technical content, should also be considered as part of the scope of the invention.

[0025] In the first aspect, such as Figures 1 to 4 As shown, this application provides a stability testing device for a low-temperature optical testing equipment. The stability testing device includes a device under test 300, a laser 400, a position-sensitive detector 700, and a detection unit 800.

[0026] like Figures 1 to 4As shown, this stability testing device is applied in a cryogenic optical testing equipment. The cryogenic optical testing equipment has a test chamber 200, which provides a vacuum and / or cryogenic testing environment. The test chamber 200 also houses the devices used for testing, such as the device under test (DUT) 300 for stability testing. A testing plate 310 is mounted on the DUT 300, and at least three reflectors 320 are mounted on the testing plate 310. These at least three reflectors 320 are non-collinearly arranged on the testing plate 310, with their mirror surfaces lying on the same plane. For example, the mirror surfaces of at least three reflectors 320 are parallel to the surface of the testing plate 310, so that the reflected laser light from the reflectors 320 directly carries the deflection information of the surface of the testing plate 310.

[0027] like Figures 1 to 4 As shown, in the stability testing device, a laser 400 generates laser light to detect the stability of the device under test (DUT) 300. The laser 400 emits multiple incident laser beams from its emitting surface, the number of which corresponds to the number of reflectors 320 on the testing plate 310. Multiple optical fibers 500 are coupled to the emitting surface of the laser 400. One end of each fiber 500 is coupled to the laser 400, and the other end extends into the test cavity 200, each corresponding to a reflector 320 on the testing plate 310. The multiple incident laser beams generated by the laser 400 are transmitted through the optical fibers 500 and incident one-to-one onto the reflectors 320 on the testing plate 310. The reflectors 320 reflect the incident laser beams, causing them to return to the emitting surface of the laser 400 via the original optical fibers 500. The reflected laser beams carry information about the positional changes of the corresponding reflector 320. The position-sensitive detector 700 receives multiple reflected laser beams from the light-emitting surface of the laser 400 and determines the position information of the corresponding detection mirror 320 based on the multiple reflected laser beams. The detection unit 800 is communicatively connected to the position-sensitive detector 700, and calculates and determines the spatial deflection angle of the detection plate 310 based on the position information of each mirror 320.

[0028] This stability testing device uses laser detection to obtain real-time position information of at least three non-collinear points on a testing board 310. Based on the position information of these three test points on the testing board 310, it determines the positional changes of these three test points and then determines the spatial deflection angle of the testing board 310 in three-dimensional space based on multi-dimensional information. This stability testing device, based on multi-beam laser transmission of multi-point position information, can comprehensively capture the multi-dimensional attitude changes of the device under test, providing richer and more accurate stability data and avoiding measurement errors caused by single-point measurements.

[0029] Furthermore, conventional detection methods typically introduce the detection laser through an observation window on the wall of the test cavity 200, allowing the external detection laser to enter the cavity. However, thermal deformation of the observation window due to temperature changes causes additional measurement errors. In contrast, this application utilizes an optical fiber 500 to directly introduce the laser emitted by the external laser 400 into the test cavity 200. This eliminates the need for multiple observation windows on the test cavity 200 wall when introducing multiple laser beams, simplifying the cavity structure and effectively avoiding measurement errors caused by thermal deformation of the observation windows.

[0030] like Figure 2 and Figure 3 As shown, in some embodiments, the detection plate 310 is provided with three reflectors 320, which form a reference surface for two-dimensional testing. The three reflectors 320 are distributed at the three vertices of a triangle, such as with equal spacing between them, forming an equilateral triangle on the detection plate 310. The reflected laser beams formed by the reflection of the three reflectors 320 carry the position information of the three reflectors 320. The position-sensitive detector 700 receives the three reflected laser beams and acquires the position information of the three reflectors 320. Based on the real-time acquired position information of the three reflectors 320, the detection unit 800 determines the positional offset of the three reflectors 320 in the low-temperature environment and the spacing between them; finally, based on the positional offset of the three reflectors 320 in the low-temperature environment and the spacing between them, the spatial deflection angle of the detection plate 310 in the low-temperature environment is determined, including the pitch angle and roll angle of the detection plate 310.

[0031] like Figure 1 , Figure 2 and Figure 5As shown, in some embodiments, a vacuum feedthrough structure 230 is provided on the test cavity 200. The vacuum feedthrough structure 230 is fixed to the cavity wall of the test cavity 200, and the optical fiber 500 extends from the outside of the test cavity 200 to the inside of the test cavity 200 through the vacuum feedthrough structure 230. The vacuum feedthrough structure 230 includes a flange 231 and a plurality of first optical fiber interfaces 232 and second optical fiber interfaces 233 disposed on the flange 231. The flange 231 is fixedly disposed on the cavity wall of the test cavity 200 and is sealed to the test cavity 200. The first optical fiber interfaces 232 are located on the side of the flange 231 facing the outside of the test cavity 200, and the second optical fiber interfaces 233 are located on the side of the flange 231 facing the inside of the test cavity 200. The plurality of first optical fiber interfaces 232 and second optical fiber interfaces 233 correspond one-to-one. Each optical fiber 500 coupled to the light-emitting surface of the laser 400 includes a first optical fiber 510 and a second optical fiber 520. One end of the first optical fiber 510 is coupled to the laser 400, and the other end of the first optical fiber 510 is coupled to the first optical fiber interface 232. One end of the second optical fiber 520 is coupled to the second optical fiber interface 233, and an optical fiber probe 530 is provided at the port of the other end of the second optical fiber 520. The light-emitting end of the optical fiber probe 530 is directly opposite the reflector 320.

[0032] like Figure 3 and Figure 4 As shown, in some embodiments, a support mechanism 600 is also provided inside the test cavity 200. The support mechanism 600 is fixed to one side of the detection plate 310, such as the bottom of the detection plate 310. The fiber optic probes 530 connected to the ends of each fiber optic 500 are fixed on the support mechanism 600, with the ports of the fiber optic probes 530 facing the top and each directly opposite the reflector 320 on the detection plate 310.

[0033] Furthermore, in some embodiments, the support mechanism 600 also supports the device under test 300. The support mechanism 600 is made of ceramic material, such as zirconium oxide, aluminum nitride, or silicon carbide. Ceramic materials have a coefficient of thermal expansion much lower than that of conventional metallic materials (typically less than 5 × 10⁻⁶). -6 / ℃), which makes the dimensional changes of the support mechanism 600 minimal in low-temperature environments, thereby greatly suppressing the measurement errors introduced by the thermal deformation of the tooling itself, and ensuring the authenticity and reliability of the test results.

[0034] like Figure 2 As shown, in some embodiments, a temperature drift compensator 710 is externally connected to the position-sensitive detector 700. The temperature drift compensator 710 compensates for and reduces the influence of ambient temperature on the detection results of the position-sensitive detector 700, thereby further improving the testing accuracy of the stability detection device.

[0035] In the second aspect, such as Figure 1 and Figure 5 As shown, this application also provides a low-temperature optical testing device, which includes the stability testing device in any of the above embodiments.

[0036] like Figure 1 As shown, the low-temperature optical testing equipment includes a base 100 and a test chamber 200. The test chamber 200 is fixed on the base 100. The test chamber 200 is used to accommodate the devices used for testing, such as a sample stage for carrying samples, and the selected device is used as the device under test 300 of the stability testing device.

[0037] In addition, such as Figure 1 As shown, the test chamber 200 also provides a vacuum and low-temperature testing environment for the devices used in the test. The test chamber 200 is equipped with a vacuum port 220 and a refrigerant circulation pipe 210. The vacuum port 220 is used to evacuate the test chamber 200, creating a vacuum environment within it. The refrigerant circulation pipe 210 extends from the outside into the test chamber 200, and is used to introduce refrigerant (such as liquid nitrogen) into the test chamber 200 for low-temperature circulating heat exchange, thereby lowering the temperature within the test chamber 200 to a target temperature (such as -196°C), thus providing a vacuum and low-temperature testing environment within the test chamber 200.

[0038] In the third aspect, such as Figure 1 To Figure 6 As shown, this application also provides a stability testing method for a low-temperature optical testing device. This stability testing method is implemented using the stability testing device in any of the above embodiments, and includes the following steps: S1. Obtain the initial position information of the at least three reflectors 320 on the detection plate 310; S2. The laser 400 outputs incident laser light to at least three of the mirrors 320, and the position-sensitive detector 700 receives the reflected laser light reflected by the at least three mirrors 320. S3. When the temperature inside the test chamber 200 is adjusted from room temperature to a preset test temperature, the position-sensitive detector 700 is used to acquire the first position change information of at least three beams of the reflected laser, and the second position change information corresponding to the reflector 320 is determined based on the first position change information. S4. Based on the initial position information and second position change information of at least three of the reflectors 320, determine the spatial deflection angle of the detection plate 310.

[0039] In step S1, a planar coordinate system is established on the plane of the detection plate 310 where at least three reflectors 320 are located, and the position coordinates of at least three reflectors 320 in the planar coordinate system are determined, thereby obtaining the initial position information of at least three reflectors 320 on the detection plate 310 under room temperature conditions.

[0040] In step S2, the laser 400 is turned on and the incident laser is output to at least three reflectors 320 on the detection plate 310 through the optical fiber 500. At the same time, the position-sensitive detector 700 receives the reflected laser reflected by the at least three reflectors 320 and detects the position of the light spot of each reflected beam on the light output surface of the laser 400 through the position-sensitive detector 700, so as to realize the corresponding monitoring of the position change of the reflector 320.

[0041] In step S3, the temperature inside the test cavity 200 containing the device under test 300 is adjusted from room temperature to a preset temperature. A position-sensitive detector 700 continuously monitors the displacement of the light spots formed by each reflected laser beam on the light-emitting surface, determining the coordinate changes of each reflected laser spot relative to room temperature at the preset temperature, thereby obtaining the first position change information of at least three reflected laser beams. Then, based on the transmission parameters of the reflected laser from the reflector 320 to the fiber optic probe 530 via the fiber optic cable 500, the first position change information of the reflected laser is converted into the displacement coordinates of the corresponding reflector 320 on the detection plate 310, thus obtaining the second position change information of at least three reflectors 320.

[0042] In some embodiments, step S4 includes the following steps: S41. Based on the second position change information of each reflector 320 on the detection plate 310, determine the displacement change of at least three reflectors 320. S42. Based on the initial position information of the reflector 320 at room temperature and the second position change information at a preset temperature, determine the relative spacing of at least three reflectors 320 on the plane of the detection plate 310 at the preset temperature. S43 determines the spatial deflection angle of the detection plate 310 based on the displacement changes of at least three reflectors 320 and the relative spacing of at least three reflectors 320. The spatial deflection angle includes the pitch angle and roll angle of the detection plate 310.

[0043] In one example, the detection plate 310 is provided with three reflectors 320, namely, a first reflector 320a, a second reflector 320b, and a third reflector 320c. A planar coordinate system on the detection plate 310 can be established with the straight line direction where the first reflector 320 and the second reflector 320 are located as the horizontal coordinate axis. If the first reflector 320a, the second reflector 320b, and the third reflector 320c form a right triangle, a planar coordinate system can be established with the right-angled side where the first reflector 320a and the second reflector 320b are located as the horizontal coordinate axis and the right-angled side where the second reflector 320b and the third reflector 320c are located as the vertical coordinate axis. Furthermore, in step S1 of the stability detection method, the initial position information of the first reflector 320, the second reflector 320, and the third reflector 320 in the planar coordinate system is obtained; in step S4, based on the second position change information between the three reflectors 320, the displacement change of each reflector 320 in the planar coordinate system is determined; then, based on the initial position information and displacement change of the three reflectors 320, the relative spacing between the three reflectors 320 at a preset temperature is determined; finally, based on the displacement change ΔZ between the first reflector 320a and the second reflector 320b... ab and relative spacing L ab Determine the pitch angle θ of the detection plate 310. pitch Pitch angle θ pitch For L ab / ΔZ ab Furthermore, based on the displacement change ΔZ between the first reflecting mirror 320a and the third reflecting mirror 320c... ac and relative spacing L ac Determine the roll angle θ of the detection plate 310. roll Roll angle θ roll For L ac / ΔZ ac Or based on the displacement change ΔZ between the first reflecting mirror 320b and the third reflecting mirror 320c. bc and relative spacing L bc Determine the roll angle θ of the detection plate 310. roll Roll angle θ roll For L bc / ΔZ bc .

[0044] In summary, the stability testing device provided by this invention includes a testing plate placed on the device under test (DUT) within a testing cavity, and at least three reflectors mounted on the testing plate. This stability testing device utilizes optical fibers to guide the incident laser output from a laser into the testing cavity, directing it onto the reflectors on the testing plate. The reflected laser light, reflected by the at least three reflectors, returns along the original optical path to the laser's output surface and is detected and received by a position-sensitive detector to obtain the position information of each reflector on the testing plate. Finally, the detection unit 800 calculates and determines the spatial deflection angle of the testing plate based on the position information of each reflector on the testing plate, thereby accurately detecting the spatial deflection angle of the testing plate at low temperatures and achieving multi-dimensional and accurate detection of the stability of the DUT under low-temperature conditions.

[0045] The above embodiments are merely illustrative of the principles and effects of the present invention and are not intended to limit the invention. Anyone skilled in the art can modify or alter the above embodiments without departing from the spirit and scope of the present invention. Therefore, all equivalent modifications or alterations made by those skilled in the art without departing from the spirit and technical concept disclosed in the present invention should still be covered by the claims of the present invention. Anyone skilled in the art can modify or alter the above embodiments without departing from the spirit and scope of the present invention.

Claims

1. A stability testing device for a low-temperature optical testing equipment, characterized in that, include: The device under test is disposed in the test chamber of the low-temperature optical detection equipment. A detection plate is disposed on the device under test. At least three mirrors are disposed on the detection plate. The at least three mirrors are located on the same plane and are not collinearly arranged on the detection plate. A laser is provided, with multiple optical fibers coupled to its output surface. One end of each optical fiber is coupled to the laser, and the other end extends into the test cavity. The other ends of the multiple optical fibers are respectively positioned opposite the at least three reflecting mirrors. The incident laser output from the laser is incident on the reflecting mirrors through the optical fibers and reflected by the reflecting mirrors as reflected laser light. The reflected laser light returns to the output surface of the laser through the optical fibers. A position-sensitive detector receives the reflected laser light on the light-emitting surface and determines the position information of the corresponding reflector based on the reflected laser light. The detection unit is communicatively connected to the position-sensitive detector, and the detection unit determines the spatial deflection angle of the detection plate based on the position information of the at least three reflectors.

2. The stability testing device according to claim 1, characterized in that, The detection plate is equipped with three reflectors.

3. The stability testing device according to claim 1, characterized in that, The detection unit determines the positional offset of the three reflectors and the relative distance between the three reflectors based on the positional information of the three reflectors; the detection unit determines the spatial deflection angle of the detection plate based on the positional offset and the relative distance, the spatial deflection angle including the pitch angle and roll angle of the detection plate.

4. The stability testing device according to claim 1, characterized in that, The test cavity is provided with a vacuum feedthrough structure, and the optical fiber extends into the test cavity through the vacuum feedthrough structure. An optical fiber probe is provided at the port of the optical fiber located in the test cavity, and the light-emitting end of the optical fiber probe is directly opposite the reflector.

5. The stability testing device according to claim 4, characterized in that, The fiber optic probe is fixed on a support mechanism, which is made of ceramic material.

6. A method for detecting the stability of a low-temperature optical testing device, characterized in that, The stability testing method is implemented using the stability testing apparatus according to any one of claims 1 to 5, and the stability testing method includes: Obtain the initial position information of the at least three reflectors on the detection plate; The laser emits incident laser light into at least three of the mirrors, and the position-sensitive detector receives the reflected laser light emitted by the at least three mirrors. When the temperature inside the test chamber is adjusted from room temperature to a preset temperature, the position-sensitive detector is used to acquire first position change information of at least three beams of the reflected laser, and second position change information corresponding to the reflector is determined based on the first position change information. The spatial deflection angle of the detection plate is determined based on the initial position information and second position change information of at least three of the reflectors.

7. The stability testing method according to claim 6, characterized in that, Determining the spatial deflection angle of the detection plate based on the initial position information and second position change information of at least three of the reflectors includes: Based on the second position change information, the displacement change of at least three of the reflectors is determined; Based on the initial position information and the second position change information, the relative spacing of at least three of the reflectors is determined at the preset temperature; Based on the displacement changes of at least three of the reflectors and the relative spacing between the at least three reflectors, the spatial deflection angle of the detection plate is determined, the spatial deflection angle including the pitch angle and roll angle of the detection plate.

8. The stability testing method according to claim 7, characterized in that, The detection plate is provided with three reflectors, including a first reflector, a second reflector, and a third reflector; Determining the spatial deflection angle of the detection plate based on the displacement changes of at least three of the reflectors and the relative spacing between the at least three reflectors includes: The pitch angle of the detection plate is determined based on the displacement change and relative distance between the first and second reflectors. The roll angle of the detection plate is determined based on the displacement change and relative distance between the first and third reflectors or the displacement change and relative distance between the second and third reflectors.

9. A low-temperature optical detection device, characterized in that, The low-temperature optical testing equipment includes the stability testing device according to any one of claims 1 to 5.

10. The low-temperature optical detection device according to claim 9, characterized in that, The low-temperature optical detection equipment includes a base and a test chamber, the test chamber being fixed on the base; a refrigerant circulation pipe is provided on the test chamber, the refrigerant circulation pipe extending into the test chamber.

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