Chromatic confocal measuring device with light splitting block

By introducing a beam splitter and an optical compensator into the colorimetric confocal measurement device, the problems of strict beam orientation requirements and sensitivity to mechanical shock were solved, resulting in higher measurement accuracy and device stability.

CN122396897APending Publication Date: 2026-07-14SCI & TECH IND DE LA LUMIERE SA
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
SCI & TECH IND DE LA LUMIERE SA
Filing Date
2024-10-15
Publication Date
2026-07-14

AI Technical Summary

Technical Problem

Existing chromatic confocal measurement devices have strict requirements for beam orientation, are susceptible to mechanical shock, and have limited measurement accuracy.

Method used

The beam splitter design includes a beam splitter and an optical compensator. By setting opaque masks on the incident and exit surfaces, conjugate spatial filtering of the beam is achieved, compensating for the optical path length and enhancing mechanical stability and measurement accuracy.

Benefits of technology

This improved the mechanical robustness and measurement accuracy of the measuring device, reduced positioning constraints, ensured the rotational invariance of beam characteristics, and enhanced measurement quality.

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Abstract

The present invention relates to an apparatus (1) for performing chromatic confocal measurement of parameters of a surface (2) of a sample, the apparatus comprising: a light source (4) configured to generate an illumination beam (6); an axial chromatic aberration lens (8) configured to apply the illumination beam (6) to the surface (2) of the sample and to retransmit a backscattered beam from the surface (2) of the sample to a measuring arm (10), wherein the measuring apparatus comprises a beam splitter (20) configured to guide two reflections in a beam splitter (23) to a so-called reflected beam in the backscattered beam (9) and the illumination beam (6), and wherein an optical compensator (24) is arranged in the direct path of the other beam.
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