A cleaning agent for removing magnesium-silver-erbium alloy on the surface of a metal mask plate and a preparation method thereof
By utilizing the synergistic effect of hydrogen peroxide, carboxylic acid ammonium salts, and organophosphonic acid complexing agents, the cleaning problem of magnesium-silver-ytterbium alloy on the surface of metal mask plates has been solved, resulting in a highly efficient and environmentally friendly cleaning agent that extends the cleaning agent's lifespan and protects the substrate.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- SHENZHEN KEXI CHEM CO LTD
- Filing Date
- 2026-03-05
- Publication Date
- 2026-07-17
AI Technical Summary
Existing cleaning agents are ineffective at removing magnesium-silver-ytterbium alloys from the surface of metal photomasks, resulting in product defects and short cleaning agent lifespan. They are also corrosive to the substrate, producing suspended solids and waste liquid pollution.
The cleaning agent formula uses hydrogen peroxide, carboxylic acid ammonium salts, organophosphonic acid complexing agents, rare earth element inhibitors, corrosion inhibitors, and surfactants. Through synergistic effects, it complexes magnesium, silver, and ytterbium ions to prevent precipitation. When used under weakly alkaline conditions, it forms a protective film to prevent corrosion.
It achieves a cleaning effect that is free of sediment, has a long service life, and is non-corrosive, improving cleaning efficiency, reducing waste liquid treatment and production costs, and meeting environmental protection requirements.
Smart Images
Figure CN122406237A_ABST