Semiconductor dehumidification and humidification control system and method

By employing DC energy access and budget units, environmental state modeling, and latent heat-electric energy mapping self-calibration in semiconductor clean spaces, combined with rolling decision-making and execution coordination, a highly stable and precise humidity control under conditions of photovoltaic DC power supply fluctuations and sudden wet loads was achieved, solving the problems of control instability and low resource utilization efficiency in existing technologies.

CN122408202APending Publication Date: 2026-07-17SHENZHEN ON XI GREEN ENERGY TECH
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2026-04-28
Publication Date
2026-07-17

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Abstract

本发明涉及半导体除湿加湿技术领域,公开了一种半导体除湿加湿控制系统及方法,该系统包括:包括半导体执行组件、气流执行组件、加湿执行组件、传感采集单元及控制器,控制器通过直流能量接入与预算单元直连光伏直流电生成功率预算,环境状态建模单元计算露点温度与绝对含湿量并构建表征预除湿或预加湿余量的湿度缓冲状态量,潜热‑电能映射自校准单元在线更新单位电能潜热去除量与供给量映射参数,滚动决策单元基于湿度缓冲状态量与映射参数滚动生成执行设定值集合,执行协调单元按风险优先级削减设定值以维持目标湿度区间。本申请可以实现光伏直流供电波动与突发湿负荷条件下的高稳定高精度湿度控制,提升能源利用效率并降低系统运行风险。
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