A collision avoidance control method and control system for a high-speed motion stage
By acquiring the real-time position and speed of the motion platform, dynamically calculating the virtual safety zone, and sending emergency stop commands, the problem of the inability to actively predict collision trajectories in existing technologies is solved. This enables collision prediction and timely response in high-speed motion equipment, preventing equipment damage.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- BEIJING SEMICON EQUIP INST THE 45TH RES INST OF CETC
- Filing Date
- 2026-06-08
- Publication Date
- 2026-07-17
AI Technical Summary
Existing technologies cannot effectively predict collision trajectories in high-speed moving equipment, leading to equipment damage. Existing collision avoidance methods have slow response speeds or can only passively detect collisions, and cannot proactively predict and take measures before a collision occurs.
By acquiring the real-time position, speed, and direction of the motion table, a virtual safe zone is dynamically calculated. When the zones overlap, an emergency stop command is sent to control the motion table to decelerate according to a predetermined emergency stop curve. The emergency stop command is sent directly using the on-site signal processing board, reducing response delay.
It enables proactive prediction and timely response to collisions in high-speed motion, avoiding equipment damage and improving the response speed of collision prediction.
Smart Images
Figure CN122411269A_ABST