A superconducting detector energy calibration system and method

Abstract

The application discloses a kind of superconducting detector energy calibration system and method, system includes superconducting transition edge sensor body, resistive heating unit and pulse driving unit, resistive heating unit is set on heat island or absorber, with detector keeps electrical isolation and thermal coupling, calibration method is by pulse driving unit to heating unit with adjustable amplitude and duration Pulse generates joule heat injection heat island;According to pulse parameter and resistance value, determine the injection energy and combine low-temperature resistance correction;Collecting detector signal and extracting characteristic quantity, using gamma function or double gaussian model fitting.The application realizes energy scanning by continuously changing electrical heat injection, and constructs the calibration function covering linear region, nonlinear region and upper limit region of energy.The application overcomes the defect that ray source calibration point is discrete, reduces extrapolation error, improves full dynamic range calibration accuracy and performance characterization ability.

Description

Technical Field

[0001] This invention relates to the field of cryogenic detection technology, specifically to a superconducting detector energy calibration system and method. Background Technology

[0002] Superconducting transition edge detectors are energy detection devices that operate in extremely low-temperature environments and possess extremely high sensitivity to minute temperature changes. When incident photons or particles deposit energy inside the detector, it causes a slight increase in the temperature of the detector's microstructure. This temperature change is keenly reflected as a change in the resistance of the superconducting thin film, and is ultimately converted into a measurable electrical impulse response signal through an external bias readout circuit. Based on this working mechanism, such detectors play a fundamental role in technological scenarios such as low-background measurements, high-energy-resolution detection, and precision spectroscopy.

[0003] Since the physical quantity actually output by the detector is an electrical response signal, rather than a direct energy value, a physical mapping relationship between the output pulse characteristics and the actual deposited energy must be established before the equipment is put into practical application; this is the energy calibration process. The accuracy of the energy calibration results directly determines the accuracy of subsequent energy reconstruction of the detection system. Currently, the industry commonly uses external characteristic radiation sources or specific radiation sources with known energy to excite the detector. By recording the electrical output pulses corresponding to these known discrete energy points, a correspondence between the input energy and the output electrical quantity is established.

[0004] However, existing energy calibration schemes driven by external radiation sources have significant limitations in practical applications. The energy points provided by external characteristic spectral lines or radiation sources are entirely limited by the physical properties of the radiation source itself, resulting in a limited number of calibration energy points with a discrete distribution. This calibration method, which is highly dependent on a fixed external radiation source, makes it impossible to achieve continuous and controllable adjustment of the input energy. Technicians find it difficult to complete continuous and dense energy point scans within the required detector target operating range, thus failing to obtain complete response data of the detector under continuous energy changes. This discrete nature results in a lack of continuity in the calibration data, directly limiting the accurate characterization and calibration of the detector's continuous response characteristics across its entire dynamic range. Summary of the Invention

[0005] To address the shortcomings of existing technologies, this invention provides a superconducting detector energy calibration system and method, which solves the problems in existing technologies where the energy calibration of superconducting transition edge detectors is highly dependent on external X-ray sources, the calibration points are discrete, and it is difficult to cover the full dynamic range.

[0006] To achieve the above objectives, the present invention provides a superconducting detector energy calibration system.

[0007] The superconducting detector energy calibration system includes: a superconducting transition edge detector body, a resistance heating unit, and a pulse driving unit. The superconducting transition edge detector body comprises the superconducting transition edge detector itself, a suspended thermal conductor supporting the detector, and a silicon substrate. The suspended thermal conductor is disposed on the silicon substrate, and the superconducting transition edge detector is disposed on the suspended thermal conductor. A heat island is formed in the region where the superconducting transition edge detector is located.

[0008] The resistive heating unit is located on the heat island and is electrically isolated from the superconducting transition edge detector. The resistive heating unit does not directly participate in the readout bias circuit of the superconducting transition edge detector. The resistive heating unit is thermally coupled to the heat island to transfer the heat generated by the resistive heating unit to the heat island.

[0009] The pulse drive unit is electrically connected to the resistance heating unit and is used to output current pulses or voltage pulses with adjustable amplitude and duration to the resistance heating unit.

[0010] In one embodiment of the present invention, the superconducting transition edge detector body further includes an absorber. The absorber is disposed on a suspended thermal conductor, and the superconducting transition edge detector is disposed between the absorber and the suspended thermal conductor. A resistive heating unit is disposed on the absorber, and the resistive heating unit and the superconducting transition edge detector maintain an electrical isolation relationship and a thermal coupling relationship.

[0011] A second aspect of the present invention provides a method for energy calibration of a superconducting detector using the above-described system.

[0012] The energy calibration method includes the following steps: the pulse drive unit applies a current pulse or voltage pulse with adjustable amplitude and duration to the resistance heating unit, so that the resistance heating unit generates Joule thermal energy and injects it into the heat island.

[0013] The Joule thermal energy injected into the heat island is determined based on the amplitude and duration of the current or voltage pulse and the resistance value of the resistance heating unit. This is then corrected by combining the actual resistance calibration results of the resistance heating unit under low-temperature conditions. When the driving pulse is a non-ideal rectangular wave, the Joule thermal power is integrated based on the actual driving current waveform to obtain the equivalent injected energy value.

[0014] The electrical pulse response signal output by the superconducting transition edge detector under Joule thermal energy injection conditions was acquired, and pulse characteristic quantities were extracted. A gamma function model was used to fit the pulse waveform. When the energy distribution exhibits a multi-component distribution, a double Gaussian model was used to fit the energy distribution.

[0015] Multiple injection energy points are obtained by varying the Joule thermal energy value of the injected heat island. An energy calibration function is then constructed based on these energy points and their corresponding pulse characteristics. This energy calibration function covers the linear response region, nonlinear response region, and region near the upper energy limit of the superconducting transition edge detector. The energy calibration function employs a linear function or a low-order function in the linear response region, and a piecewise function or a polynomial function in the nonlinear response region.

[0016] After obtaining response data from multiple injection energy points, the energy distribution obtained from each injection energy point is fitted to obtain the corresponding measured broadening parameter. The systematic error component is then deducted using the variance separation method to obtain the inherent energy broadening parameter of the superconducting transition edge detector.

[0017] This invention provides a superconducting detector energy calibration system and method. It has the following beneficial effects:

[0018] 1. This invention sets up a resistive heating unit that is electrically isolated and thermally coupled to the detector on the heat island of the superconducting transition edge detector body, and uses a pulse drive unit to output a drive pulse with adjustable amplitude and duration to make the resistive heating unit generate Joule heat and inject it into the heat island. This achieves the effect of getting rid of dependence on external fixed radiation sources and converting discrete energy input into electrically controlled continuous heat injection, thereby completing continuous and dense energy point scanning within the target range to obtain complete detector response data.

[0019] 2. This invention continuously increases the Joule thermal energy injected into the heat island by adjusting the pulse drive unit, so that the continuously distributed injected energy points cover the linear response region of the detector and extend to the nonlinear response region and the upper energy limit region. At the same time, piecewise functions or polynomial functions are used to construct energy calibration functions for different regions, which overcomes the error introduced by extrapolation due to insufficient high-energy calibration points in the prior art. The system characterizes the complete characteristics of the detector's cross-regional transition and effectively evaluates the dynamic range boundary of the device to improve the accuracy of energy calibration.

[0020] 3. This invention extracts stable feature quantities by fitting the acquired electrical impulse response signal with a gamma model, and obtains the measured broadening parameter by fitting the corresponding energy distribution with a double Gaussian model. Furthermore, it uses the variance separation method to deduct the systematic error component in the testing process. This enables the analysis of the energy distribution width under different heat injection conditions based on the construction of the calibration function, accurately obtains the inherent energy broadening parameter of the superconducting transition edge detector, and thus effectively evaluates the intrinsic energy resolution performance of the detector and improves the comprehensive characterization capability. Attached Figure Description

[0021] Figure 1 This is a schematic diagram of a superconducting detector energy calibration system according to an embodiment of the present invention; Figure 2 This is a schematic diagram of a superconducting detector energy calibration system according to another embodiment of the present invention.

[0022] In the figure: 1. Resistance heating unit; 2. Superconducting transition edge detector; 3. Suspended thermal conductor; 4. Silicon substrate; 5. Electrical connection wire; 6. Pulse drive unit; 7. Absorber. Detailed Implementation

[0023] The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0024] Please see the appendix Figure 1 This invention provides a system for energy calibration of a superconducting transition edge detector using a resistive heating unit. The system includes: a superconducting transition edge detector body, a resistive heating unit 1, and a pulse driving unit 6.

[0025] The superconducting transition edge detector body includes a superconducting transition edge detector 2, a suspended thermal conductor 3 supporting the superconducting transition edge detector 2, and a silicon substrate 4. The suspended thermal conductor 3 is disposed on the silicon substrate 4. The superconducting transition edge detector 2 is disposed on the suspended thermal conductor 3. A heat island is formed in the region where the superconducting transition edge detector 2 is located.

[0026] The resistive heating unit 1 is disposed on the heat island. The resistive heating unit 1 is electrically isolated from the superconducting transition edge detector 2. The resistive heating unit 1 does not directly participate in the readout bias circuit of the superconducting transition edge detector 2.

[0027] The resistance heating unit 1 maintains a thermal coupling relationship with the heat island in order to transfer the heat generated by the resistance heating unit 1 to the heat island.

[0028] The pulse drive unit 6 is electrically connected to the resistance heating unit 1 via the electrical connection wire 5.

[0029] See attached document Figure 2 In this embodiment, the system includes: a superconducting transition edge detector body, a resistive heating unit 1, and a pulse driving unit 6.

[0030] The superconducting transition edge detector body includes an absorber 7, a superconducting transition edge detector 2, a suspended thermal conductor 3, and a silicon substrate 4. The absorber 7 is disposed on the suspended thermal conductor 3. The superconducting transition edge detector 2 is disposed between the absorber 7 and the suspended thermal conductor 3.

[0031] The resistance heating unit 1 is disposed on the absorber 7. The resistance heating unit 1 and the superconducting transition edge detector 2 also maintain an electrical isolation relationship and a thermal coupling relationship.

[0032] The pulse drive unit 6 is electrically connected to the resistance heating unit 1 via the electrical connection wire 5.

[0033] The overall workflow for energy calibration of the superconducting transition edge detector 2 using the above system is as follows.

[0034] The pulse drive unit outputs electrical drive pulses to the resistance heating unit 1. These electrical drive pulses can be either current pulses or voltage pulses. The pulse drive unit adjusts the amplitude and duration of the electrical drive pulses.

[0035] The resistive heating unit 1 receives electrical drive pulses and generates Joule thermal power. The resistive heating unit 1 injects the generated Joule thermal energy into the heat island where the superconducting transition edge detector body is located.

[0036] The specific value of the Joule thermal energy injected into the heat island is calculated based on the amplitude and duration of the electrical drive pulse and the resistance value of the resistance heating unit 1.

[0037] In some implementations, the Joule thermal energy injected into the heat island is calculated based on the Joule thermal relation. This Joule thermal energy can be expressed as...

[0038] in, To inject Joule heat energy into the heat island, The instantaneous voltage applied across the resistance heating unit 1 The instantaneous current flowing through the resistance heating unit 1, The duration of the electrical drive pulse.

[0039] When the electrical driving pulse is a constant current rectangular pulse, the Joule thermal energy can be expressed as:

[0040] When the electrical driving pulse is a constant-voltage rectangular pulse, the Joule thermal energy can be expressed as:

[0041] in, The amplitude of the current pulse. The voltage pulse amplitude, This is the actual resistance value of the resistance heating unit 1 under low-temperature operating conditions.

[0042] The heat island's temperature rises after receiving Joule thermal energy. The superconducting transition edge detector 2 operates in the superconducting transition region. The superconducting transition edge detector 2 changes its resistance according to the temperature change of the heat island, and generates an electrical pulse response signal in the bias readout circuit.

[0043] Electrical impulse response signals are acquired, and impulse characteristic quantities are extracted. These impulse characteristic quantities are used to characterize the strength of the output response of the superconducting transition edge detector 2.

[0044] By changing the amplitude or duration of the electrical drive pulse, pulse characteristic quantities corresponding to multiple different injected energy points are obtained. The injected energy is continuously adjustable. Based on the data relationship between multiple injected energy points and their corresponding pulse characteristic quantities, an energy calibration function for the superconducting transition edge detector 2 is constructed.

[0045] Let the i-th injected energy point be... Its corresponding pulse characteristic is This allows us to obtain the data relationships between multiple injected energy points and their corresponding pulse characteristics:

[0046] Based on the aforementioned data relationships, the energy calibration function for the superconducting transition edge detector 2 is constructed as follows:

[0047] in, The energy corresponding to the event to be measured. This is the pulse characteristic quantity corresponding to the event to be measured.

[0048] The energy calibration function can be a piecewise function or a polynomial function. The energy calibration function is adapted to the different response relationships of the superconducting transition edge detector 2 in the linear response region, the nonlinear response region, and the region close to the upper energy limit.

[0049] In some implementations, the energy calibration function is constructed using a piecewise function or a polynomial function to accommodate the different response relationships of the superconducting transition edge detector 2 in the linear response region, the nonlinear response region, and the region near the energy upper limit. Further, the energy calibration function can be expressed as:

[0050] in, These correspond to different response ranges, namely the linear response region, the nonlinear response region, and the region near the upper energy limit. These are the calibration sub-functions corresponding to each response interval.

[0051] In some implementations, each calibration subfunction can be expressed in polynomial form as follows:

[0052] A resistance heating unit 1 is disposed on the heat island. The resistance heating unit 1 is disposed on the surface of the heat island or on the insulating layer. (See attached diagram.) Figure 2 In one embodiment of the present invention, the superconducting transition edge detector body includes an absorber 7. A resistive heating unit 1 is disposed on the surface of the absorber 7. In an alternative embodiment, the resistive heating unit 1 and the absorber 7 are disposed in layers. The resistive heating unit 1 may also be disposed in the adjacent region, symmetrical position, above and below position, or surrounding position of the sensitive area of ​​the superconducting transition edge detector 2. In order to reduce the systematic error caused by uneven heat distribution, the lateral distance between the resistive heating unit 1 and the thin film of the superconducting transition edge detector 2 is less than a preset thermal diffusion length, so that heat is uniformly coupled to the sensitive area of ​​the superconducting transition edge detector 2 within the effective thermal diffusion range, thereby improving the consistency and stability of calibration.

[0053] The resistance heating unit 1 adopts a locally parallel block structure. This locally parallel block structure is used to achieve uniform heat injection on the heat island. In alternative embodiments, the resistance heating unit 1 may adopt a strip structure, a serpentine structure, a zigzag structure, a wraparound structure, or a grid structure. Any structure that can achieve uniform heat injection on the heat island is considered an equivalent alternative structure of the present invention.

[0054] The resistive heating unit 1 is formed using a resistive thin film material. This resistive thin film material includes metal thin films or alloy thin films. The resistive thin film material is suitable for low-temperature operating environments. The resistive heating unit 1 is formed on the superconducting transition edge detector body using micro-nano fabrication processes. These micro-nano fabrication processes include thin film deposition, photolithography, etching, evaporation, or sputtering. The resistive heating unit 1 has a preset resistance value or a calibrated resistance value. The main function of setting a specific resistance value for the resistive heating unit 1 is not only to generate heat, but also to ensure that the Joule thermal energy injected into the heat island can be accurately calculated. Under the condition of determining the driving pulse parameters, the Joule thermal energy value injected into the heat island is quantitatively calculated based on the resistance value of the resistive heating unit 1.

[0055] The system contains one or more resistance heating units 1. When the system includes multiple resistance heating units 1, the multiple resistance heating units 1 are connected in parallel, in series, or partitioned at different physical locations on the heat island. Multiple resistance heating units 1 are used to improve the uniformity of heat distribution and to achieve precise energy injection control in different physical regions.

[0056] See attached document Figure 1 and attached Figure 2The pulse drive unit 6 is electrically connected to the resistance heating unit 1 via the electrical connection wire 5. The pulse drive unit outputs electrical drive pulses to the resistance heating unit 1. The electrical drive pulses output by the pulse drive unit include current pulses or voltage pulses. By adjusting the amplitude and duration of the current pulse, or adjusting the amplitude and duration of the voltage pulse, the injected Joule heating energy is controlled. The pulse drive unit applies drive pulses to the resistance heating unit 1 using either a single-pulse output mode or a pulse sequence output mode.

[0057] The resistive heating unit 1 and the superconducting transition edge detector 2 are strictly electrically isolated. The current generated by the resistive heating unit 1 does not enter the readout bias circuit of the superconducting transition edge detector 2. The resistive heating unit 1 and the heat island are thermally coupled. The Joule heat energy generated by the resistive heating unit 1 is transferred to the interior of the heat island through the thermal coupling structure, thereby causing a change in the operating temperature of the superconducting transition edge detector 2.

[0058] The pulse driving unit applies an electrical driving pulse to the resistive heating unit 1. The electrical driving pulse includes a current pulse or voltage pulse with adjustable amplitude and duration. The resistive heating unit 1 receives the electrical driving pulse and generates Joule thermal energy. The resistive heating unit 1 injects the generated Joule thermal energy into the heat island where the superconducting transition edge detector body is located.

[0059] The specific value of the Joule thermal energy injected into the heat island is calculated. Based on the amplitude and duration of the electrical drive pulse and the resistance value of the resistance heating unit 1, the Joule thermal energy value injected into the heat island is determined according to the Joule thermal relation. The value of the Joule thermal energy injected into the heat island is then corrected by combining the actual resistance calibration results of the resistance heating unit 1 under low-temperature conditions.

[0060] In some implementations, the reference resistance value is first used as a reference. Initial calculations were performed on the Joule thermal energy injected into the heat island.

[0061] When the electrical drive pulse is a constant current rectangular pulse, the initial calculated value can be expressed as:

[0062] Based on the actual resistance calibration results of resistance heating unit 1 under low-temperature operating conditions The corrected Joule thermal energy can be expressed as

[0063] Or written as

[0064] When the electrical drive pulse is a constant voltage rectangular pulse, the initial calculated value can be expressed as:

[0065] The corrected Joule heat energy can be expressed as

[0066] Or written as

[0067] in, The Joule heat energy obtained from the initial calculation. The corrected Joule heat energy, For reference resistance value, The actual resistance value obtained by calibrating the resistance heating unit 1 under low-temperature operating conditions.

[0068] When the electrical drive pulse exhibits a non-ideal rectangular waveform, the Joule thermal power is integrated based on the actual drive current waveform to obtain the equivalent injected energy value. A standard radiation source is used to calibrate the Joule thermal energy injected into the heat island by the resistance heating unit 1.

[0069] Under Joule thermal energy injection conditions, the superconducting transition edge detector 2 generates a resistance change and outputs an electrical impulse response signal. The electrical impulse response signal output by the superconducting transition edge detector 2 is acquired, and its pulse characteristics are extracted. These pulse characteristics include the pulse peak value, pulse integral value, fitted peak value, template-matched output value, or a combination of characteristic parameters. These pulse characteristics are used to characterize the strength of the output response of the superconducting transition edge detector 2.

[0070] To extract more stable pulse characteristics, model fitting was performed on the acquired electrical pulse response signal. A gamma function model was used to fit the pulse waveform of the electrical pulse response signal. When the energy distribution at multiple injection energy points exhibits multi-component distributions, a double Gaussian model was used to fit the energy distribution. Other fitting models describing the pulse waveform or energy distribution of the superconducting transition edge detector were also used to extract pulse characteristics.

[0071] By changing the amplitude or duration of the electrical drive pulse, continuously adjustable Joule thermal energy injection is achieved. Pulse characteristic quantities corresponding to multiple different injection energy points are obtained. These multiple injection energy points cover both the linear and nonlinear response regions of the superconducting transition edge detector 2.

[0072] Based on the data mapping relationship between multiple injected energy points and their corresponding pulse characteristics, an energy calibration function for the superconducting transition edge detector 2 is constructed. Within the linear response region of the superconducting transition edge detector 2, a linear function or a low-order function is used to establish the energy calibration function. Within the nonlinear response region of the superconducting transition edge detector 2, a piecewise function or a polynomial function is used to establish the energy calibration function. A unified energy calibration function is established using a piecewise combination modeling approach across the entire dynamic range spanning both the linear and nonlinear response regions.

[0073] After obtaining response data from multiple injected energy points, the energy distribution obtained at each injected energy point is fitted to obtain the corresponding measured broadening parameter. The intrinsic energy broadening parameter of the superconducting transition edge detector 2 is obtained by subtracting the systematic error component using a variance separation method. In an alternative embodiment, the intrinsic broadening parameter of the superconducting transition edge detector 2 is obtained using an error separation method or a noise subtraction method. The step of obtaining the intrinsic energy broadening parameter or the intrinsic broadening parameter is used to evaluate the intrinsic energy resolution performance of the superconducting transition edge detector 2.

[0074] The pulse drive unit 6 adjusts the electrical drive pulse parameters to inject continuously adjustable Joule thermal energy into the heat island. When the superconducting transition edge detector 2 is in the linear response region, the response consistency of the superconducting transition edge detector 2 within the linear region is evaluated. The Joule thermal energy injected into the heat island is continuously increased, gradually approaching the dynamic range boundary of the superconducting transition edge detector 2, to evaluate the upper energy limit of the superconducting transition edge detector 2.

[0075] As the Joule thermal energy injected into the heat island increases further, the electrothermal feedback state and operating point of the superconducting transition edge detector 2 change. The output response of the superconducting transition edge detector 2 deviates from the linear model, entering the nonlinear response region and even exhibiting saturation. The degree of deviation and nonlinear response characteristics of the superconducting transition edge detector 2 in the nonlinear response region are analyzed. By combining the linear response region data, nonlinear response characteristics, and energy upper limit evaluation results, the full dynamic range performance of the superconducting transition edge detector 2 is evaluated.

[0076] Although embodiments of the invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A superconducting detector energy calibration system, characterized in that, include: The superconducting transition edge detector body, the resistive heating unit, and the pulse drive unit; The superconducting transition edge detector body includes a superconducting transition edge detector and a suspended thermally conductive silicon substrate supporting the superconducting transition edge detector, and a heat island is formed in the region where the superconducting transition edge detector is located. The resistive heating unit is disposed on the heat island, and the resistive heating unit and the superconducting transition edge detector are electrically isolated from each other, while the resistive heating unit and the heat island are thermally coupled. The pulse driving unit is electrically connected to the resistive heating unit and is used to output electrical driving pulses to the resistive heating unit.

2. The superconducting detector energy calibration system according to claim 1, characterized in that, The suspended thermal conductor is disposed on the silicon substrate, and the superconducting transition edge detector is disposed on the suspended thermal conductor; The resistive heating unit does not directly participate in the readout bias circuit of the superconducting transition edge detector, and the thermal coupling relationship between the resistive heating unit and the heat island is used to transfer the heat generated by the resistive heating unit to the heat island.

3. The superconducting detector energy calibration system according to claim 1, characterized in that, The superconducting transition edge detector body also includes an absorber, which is disposed above the suspended thermal conductor, and the superconducting transition edge detector is disposed between the absorber and the suspended thermal conductor. The resistive heating unit is disposed on the absorber, and the resistive heating unit and the superconducting transition edge detector maintain an electrical isolation relationship and a thermal coupling relationship.

4. The superconducting detector energy calibration system according to claim 1, characterized in that, The resistive heating unit is disposed on the surface of the heat island or on the insulating layer, or the resistive heating unit is disposed in the adjacent area, symmetrical position, upper and lower position or surrounding position of the sensitive area of ​​the superconducting transition edge detector. The lateral distance between the resistive heating unit and the superconducting transition edge detector film is less than the preset thermal diffusion length, so that heat is uniformly coupled to the sensitive area of ​​the superconducting transition edge detector within the effective thermal diffusion range.

5. The superconducting detector energy calibration system according to claim 1, characterized in that, The resistance heating unit adopts a locally parallel block structure, strip structure, serpentine structure, zigzag structure, encircling structure or grid structure to achieve uniform heat injection on the heat island.

6. The superconducting detector energy calibration system according to claim 1, characterized in that, The resistance heating unit is formed of a metal thin film or alloy thin film resistive material, and the resistance heating unit has a preset resistance value or a calibrated resistance value. The resistive heating unit is formed on the superconducting transition edge detector body through thin film deposition, photolithography, etching, evaporation, or sputtering processes.

7. The superconducting detector energy calibration system according to claim 1, characterized in that, The system comprises multiple resistance heating units, which are connected in parallel, in series, or partitioned at different physical locations on the heat island to achieve energy injection control in different physical regions.

8. The superconducting detector energy calibration system according to claim 1, characterized in that, The pulse driving unit is used to output current pulses or voltage pulses with adjustable amplitude and duration, and to apply driving pulses to the resistive heating unit in a single pulse output mode or a pulse sequence output mode to control the Joule thermal energy value injected into the heat island.

9. The superconducting detector energy calibration system according to claim 1, characterized in that, The system is also used to construct an energy calibration function based on the data mapping relationship between multiple injected energy points and corresponding pulse characteristic quantities; The pulse characteristic quantity is obtained by performing model fitting processing on the acquired electrical pulse response signal. The model fitting processing uses a gamma function model to fit the pulse waveform, or a double Gaussian model to fit the energy distribution when there are multiple components in the energy distribution.

10. A method for energy calibration of a superconducting detector using the system described in any one of claims 1-9, characterized in that, Includes the following steps: The pulse driving unit applies an adjustable current pulse or voltage pulse to the resistive heating unit, causing the resistive heating unit to generate Joule thermal energy and inject it into the heat island. The Joule thermal energy injected into the heat island is determined based on the amplitude and duration of the electrical drive pulse and the resistance value of the resistive heating unit, and then corrected by combining the actual resistance value calibration results of the resistive heating unit under low temperature conditions. The electrical pulse response signal output by the superconducting transition edge detector under Joule thermal energy injection conditions is acquired, and pulse characteristic quantities are extracted. The Joule thermal energy value injected into the heat island is changed to obtain multiple injection energy points, and an energy calibration function is constructed based on the multiple injection energy points and the corresponding pulse characteristic quantities. The energy calibration function covers the linear response region, nonlinear response region and near-energy upper limit region of the superconducting transition edge detector.

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